Every software package contains a full set of examples suitable for that version and are installed with the software. If you see examples here that are not in your installation you should consider updating to a later version of the software. These examples can be used by beginners and advanced users for product evaluation, teaching purposes, and self-training.
Required Modules
Victory Process
- 2D Physical Etch & Deposit
From “Integrated Circuit Fabrication: Science and Technology by Plummer & Griffin, published by Cambridge University Press
We will compare this to deposition in a 3D via
The parameters PAR_FOCUS=3.0 and STICKING=0.2 correspond to
the power n in the cosine(theta)^n and the sticking coefficient
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