AI-Driven Manufacturing
AI-Driven Manufacturing: semiconductor manufacturing simulation software
Every wafer run you replace with a simulation is a learning cycle you don’t pay for in silicon. Silvaco’s semiconductor manufacturing simulation goes as deep as a TCAD specialist needs, and through FTCO it reaches the fab engineers who have to act on the answer.
Semiconductor manufacturing simulation, in four families
TCAD
Process and device simulation. Run the process steps in software, watch the device take shape, and give your circuit team models it can trust.
Implant, diffusion, oxidation, etch, deposition, epitaxy, lithography and stress, moving between 1D, 2D and 3D as each step needs.
3D device simulation on tetrahedral meshes: DC, AC and transient analysis, plus TCAD devices inside a SPICE circuit.
RC parasitic extraction taken straight off the simulated device.
Device characterization and SPICE model extraction, including BSIM-CMG, BSIM4, HiSIM and PSP.
Plasma
FTCO
FTCO™ (Fab Technology Co-Optimization): your process as a digital twin.
Victory Analytics: machine learning analytics for semiconductor data.
Victory DoE: design of experiments for TCAD simulation.
Interactive visualization for Silvaco TCAD results, from full 3D device structures down to the 1D curves you extract from them.
Lithography
Computational lithography, so the pattern on the wafer matches the one in your layout.
Photonics
Waveguides and optical components for silicon photonics and optoelectronic devices.
Electromagnetic and photonic multi-physics simulation, part of Silvaco since it acquired Tech-X in April 2025.
Start with the problem in front of you
You know the problem. Here’s where to start on it.
Develop or transfer a process, and predict the device it produces
Process simulation builds the structure. Device simulation predicts performance. Parasitics and compact models bring it into the circuit.
Make the printed pattern match the drawn layout
Process proximity compensation on the mask, before the pattern ever reaches a wafer.
Design or optimize reactor chamber equipment and process recipes
See what the plasma is doing at the wafer, predict how it shapes features, then change the recipe in software.
Design a photonic component or a waveguide
Optical and electromagnetic behavior of the component, in one multi-physics tool.
Build a surrogate model of an entire multiphysics workflow to abstract simulation complexity and enable real-time virtual experiments by non-simulation experts
Multiphysics provides the high-fidelity foundation. FTCO turns it into surrogate models everyone can sweep in real time before committing to a wafer lot.
Extract parasitics from a simulated structure
RC extraction taken from the 3D structure TCAD built, not from a layout.
What this portfolio covers,
and where it stops
Where these tools stop, a standard format such as GDSII or SPICE carries your
work into the flow you already run.
Covers
The process steps from implant to stress, and the device that comes out, in 1D, 2D and 3D.
The handoff to circuit design: compact models from Utmost IV and parasitics from Victory RCx.
Semiconductor manufacturing simulation from atomic-scale transport to computational lithography.
Physics you can extend. Add process models through the Open Model Interface, and new materials or parameters through the Open Material Database.
The equipment side. VSim models the plasma chamber and passes particle distributions to Victory Process at feature scale.
Does not
Your layout database. Victory Process reads your GDSII files as they are and builds the structure from them.
Circuit simulation. Utmost IV output runs in Eldo, HSPICE, LTspice, QSpice, SmartSpice and Spectre, whichever your circuit team uses.
Circuit design, physical verification and interface IP. Those belong to AI-Driven Design.
The built-in model set. Physics Silvaco doesn’t ship goes in through that published interface.
Running the fab. There’s no MES, scheduling or equipment control here. The portfolio predicts what the process will do.
The portfolio, in figures
The track record you’d want before trusting a simulator with your process.
1984
Founded
Silvaco has built semiconductor software since 1984.
17
Foundry partners
ams AG, GlobalFoundries, ON Semiconductor, TSMC, Tower Semiconductor, UMC and X-FAB.
8 of 10
Largest display makers
Silvaco TCAD is in use at eight of the ten biggest display manufacturers.
2
Manufacturing partnerships announced in 2026
Release and version index
Current versions across the portfolio, from the 2025 baseline release.
| FAMILY | PRODUCT | CURRENT VERSION | RELEASE DATE |
|---|---|---|---|
| TCAD | Victory Process | 8.57.5.R | Not published |
| Victory Device | 2.0.1.R | Not published | |
| Victory Atomistic | 1.12.0.R | Not published | |
| Victory Mesh | 1.12.0.R | Not published | |
| Victory RCx | 1.4.6.R | Not published | |
| Utmost IV | 2.24.0.R | Not published | |
| Lithography | Process Proximity Correction | Not in the baseline release | Not published |
| Plasma | VSim Plasma | Not in the baseline release | Not published |
| Photonics | XSim Photonics | Not in the baseline release | Not published |
The other business unit
AI-Driven Design
Circuit simulation, analog and custom IC design, and licensed Design IP. The two units meet at the models: the SPICE models from Utmost IV and the parasitics from Victory RCx are what a design team simulates against.
Tell us which result didn't match
Start with the step in your process that keeps surprising you. An application engineer will
work out which family models it, and what data an evaluation would need.
Questions about the manufacturing portfolio
What does Silvaco make for semiconductor manufacturing?
Four families with nine products between them. TCAD is the largest, with six tools that run from process and device simulation to meshing, atomic-scale quantum transport, parasitic extraction and SPICE model extraction. Lithography handles process proximity compensation, Plasma the reactor chamber plasma, and Photonics optical components.
How do TCAD, Lithography, Plasma and Photonics simulation relate to each other?
The four families solve different but connected engineering problems. Plasma simulation links chamber conditions to feature-scale processing. TCAD predicts structures and device behavior, then extracts parasitics and SPICE models for circuit simulation. Lithography turns layouts into printable patterns, while Photonics predicts optical behavior using structures generated by process simulation.
Which foundries and process nodes are supported across the portfolio?
Our tools work with the process and layout inputs you define, from your process recipe to your GDSII/OASIS layout. That means they are not limited to a single foundry’s PDK. For your specific node and workflow, an application engineer will confirm coverage. Silvaco’s foundry partners are listed on the Partners page.
Can these tools run on GPUs or an HPC cluster?
Yes. Depending on the tool and simulation workflow, our software can take advantage of multicore CPUs, HPC clusters, and GPU acceleration. Because the optimal configuration depends on the application and problem size, our application engineers can help match your workload to the appropriate hardware.
Is there a license option for universities and research laboratories?
Yes. Academic terms are separate from commercial ones and cover research and teaching. Over 200 universities use this track, and requests go through the University Program.