PG-Fig7-21.in : Segregation for different dopants during oxide growth

PG-Fig7-21.in : Segregation for different dopants during oxide growth

PG-Fig7-21.in : Segregation for different dopants during oxide growth

Every software package contains a full set of examples suitable for that version and are installed with the software. If you see examples here that are not in your installation you should consider updating to a later version of the software. These examples can be used by beginners and advanced users for product evaluation, teaching purposes, and self-training.

Required Modules

Victory Process

  • 2D Diffusion & Implantation

From “Integrated Circuit Fabrication: Science and Technology by Plummer & Griffin, published by Cambridge University Press

Some dopants (Boron) deplete, some (Phosphorus) pile up
This is caused by segregation at interfaces

Images

PG-Fig7-21.png

Related Articles