PG-Fig7-20.in : Boron segregation during LOCOS oxidation

PG-Fig7-20.in : Boron segregation during LOCOS oxidation

PG-Fig7-20.in : Boron segregation during LOCOS oxidation

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Required Modules

Victory Process

  • 2D Diffusion & Implantation

From “Integrated Circuit Fabrication: Science and Technology by Plummer & Griffin, published by Cambridge University Press

The boron is depleted near the surface where it segregates into oxide

Images

B.png
PG-Fig7-20-01.png
PG-Fig6-20_Final.png
PG-Fig7-20-02.png

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