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Know how your circuit behaves across process variation before silicon tells you, with Monte Carlo-accurate results up to 30X faster.

PG-Fig10-37.in : Simulation of oxide deposition in a trench

Every software package contains a full set of examples suitable for that version and are installed with the software. If you see examples here that are not in your installation

PG-Fig10-39.in : Overhang structure, various values of cosine power and sticking coefficient

Every software package contains a full set of examples suitable for that version and are installed with the software. If you see examples here that are not in your installation

PG-Fig10-42-2D.in : Oxide deposition in a 2D trench

Every software package contains a full set of examples suitable for that version and are installed with the software. If you see examples here that are not in your installation

PG-Fig10-42-3D.in : Oxide deposition in a 3D via

Every software package contains a full set of examples suitable for that version and are installed with the software. If you see examples here that are not in your installation

PG-Fig10-43.in : Incomplete filling of a trench creating a “keyhole”.

Every software package contains a full set of examples suitable for that version and are installed with the software. If you see examples here that are not in your installation

PG-Fig2-25.in : Modern CMOS Technology

Every software package contains a full set of examples suitable for that version and are installed with the software. If you see examples here that are not in your installation

PG-Fig2-25-Device.in : Modern CMOS Technology

Every software package contains a full set of examples suitable for that version and are installed with the software. If you see examples here that are not in your installation

PG-Fig5-36.in : Projection aerial image 365nm, NA=0.43, 1um complex mask features

Every software package contains a full set of examples suitable for that version and are installed with the software. If you see examples here that are not in your installation

PG-Fig5-37.in : Projection aerial image 193nm, NA=0.8, 0.25um complex features

Every software package contains a full set of examples suitable for that version and are installed with the software. If you see examples here that are not in your installation

PG-Fig5-38.in : Projection aerial image 193nm, NA=0.93, 0.1um complex features

Every software package contains a full set of examples suitable for that version and are installed with the software. If you see examples here that are not in your installation