PG-Fig10-43.in : Incomplete filling of a trench creating a “keyhole”.

PG-Fig10-43.in : Incomplete filling of a trench creating a “keyhole”.

PG-Fig10-43.in : Incomplete filling of a trench creating a “keyhole”.

Every software package contains a full set of examples suitable for that version and are installed with the software. If you see examples here that are not in your installation you should consider updating to a later version of the software. These examples can be used by beginners and advanced users for product evaluation, teaching purposes, and self-training.

Required Modules

Victory Process

  • 2D Physical Etch & Deposit

From “Integrated Circuit Fabrication: Science and Technology by Plummer & Griffin, published by Cambridge University Press

The parameters are an ideal cosine distribution
(n=1 or PAR_FOCUS=1in cosine(theta)^n and a sticking
coefficient STICKING=0.2

Images

PG-Fig10-43_CP1p0_S0p2.png

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