Every software package contains a full set of examples suitable for that version and are installed with the software. If you see examples here that are not in your installation you should consider updating to a later version of the software. These examples can be used by beginners and advanced users for product evaluation, teaching purposes, and self-training.

Required Modules

Victory Process

• Optolith

From “Integrated Circuit Fabrication: Science and Technology by Plummer & Griffin, published by Cambridge University Press

The illumination wavelength i.line (365nm)
The projection numerical aperature is 0.43
One micron (1um) features are imaged
This is an OPTOLITH simulation

Images