Every software package contains a full set of examples suitable for that version and are installed with the software. If you see examples here that are not in your installation you should consider updating to a later version of the software. These examples can be used by beginners and advanced users for product evaluation, teaching purposes, and self-training.

Required Modules

Victory Process

• 2D Diffusion & Implantation

The example demonstrates the impact on number of ions used during Monte-Carlo implantation.

To capture the doping profile correctly, the line mesh is set to be tight near the surface and near the expected junction.

Visualization shows that more island like regions are found when smaller number of ions are used to produce the profile and as the number of ions are increased, the profile gets a smoother tail.

Deckbuild’s “loop ” Statement is used to set up this experiment. Using “loops “, user can run the code present between “loop ” and “L.end ” multiple times by setting the “steps ” parameter. Using Deckbuild’s “assign ” Statement, user can also set variables for each loop iteration.

For more information, refer to Deckbuild User Manual.

This example can be used as a test-bench for identifying appropriate number of ions to obtain a good doping profile.

Since MC implantation simulates ion collisions with the lattice, the number of ions needed in a 1D simulation is less than those needed for 2D and 3D simulation domains.

Images