Every software package contains a full set of examples suitable for that version and are installed with the software. If you see examples here that are not in your installation you should consider updating to a later version of the software. These examples can be used by beginners and advanced users for product evaluation, teaching purposes, and self-training.

Required Modules

Victory Process:

• 2D Diffusion & Implantation

This example demonstrates the two methods of performing implantation:

1. Analytical – models are based on the reconstruction of implant profiles from the calculated or measured distribution moments.

2. Monte Carlo – The Monte-Carlo method is physically based. Trajectories of thousands of implanted ions are followed until they stop and form the dopant profile.

The example compares Analytical result with Monte-Carlo results. Line statements are used to refine the volume mesh near the substrate surface to capture the doping profiles accurately.

More information can be found in Victory Process user manual.

Images