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VP_Etch_Dep_ex10.in : Introduction to geometric deposition models

VP_Etch_Dep_ex10.in : Introduction to geometric deposition models

VP_Etch_Dep_ex10.in : Introduction to geometric deposition models

Every software package contains a full set of examples suitable for that version and are installed with the software. If you see examples here that are not in your installation you should consider updating to a later version of the software. These examples can be used by beginners and advanced users for product evaluation, teaching purposes, and self-training.

Required Modules

Victory Process

  • Core Simulator

The example demonstrates different geometric deposition models.

The example is set up such that a polysilicon window is created, followed by deposition of a nitride layer repeated 6 times, each showing the operation of a specific geometric deposition model.

Models explored in this example set are:

Max model, which is set up to show thicknesses greater than 0, less than 0 and equal to 0.

Min model with thickness value set greater than 0 (only option)

Conformal model

Directional model

Images

VP_Etch_Dep_ex10_06.png
VP_Etch_Dep_ex10_01.png
VP_Etch_Dep_ex10_02.png
VP_Etch_Dep_ex10_05.png
VP_Etch_Dep_ex10_04.png
VP_Etch_Dep_ex10_03.png

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