Every software package contains a full set of examples suitable for that version and are installed with the software. If you see examples here that are not in your installation you should consider updating to a later version of the software. These examples can be used by beginners and advanced users for product evaluation, teaching purposes, and self-training.
Required Modules
Victory Process
- Core Simulator
Trench etching is an important processing step for many technologies. Often the full physical process sequence is an unnecessary additional complexity in a TCAD simulation as the final shape the designer wants is already known and the recipe to achieve it is known.
Therefore in a TCAD simulation to save simulation time and syntax complexity it is just a case of removing the relevant material in the simplest and most accurate way.
This example shows 4 different ways of creating trenches through simple geometric etching.
– First, a two step process, where vertical sides walls are first etched, then the corners rounded with a conformal etch
– Second, arbitrary shape removal with smoothing using POLYLINE (absolute domain coordinates, full support in 2D, shape extruded into third dimension (2.5D))
– Third, arbitrary shape removal with smoothing using PROFILE (coordinates relative to mask edge, supported in 2D and 3D).
– Forth and finally, using RBOTTOM, this is the simplest and fastest method, a geometric etch, that automatically rounds the internal corners by a given value.
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