28 years ago
ATHENA version 5.0 includes a new Binary Collision Algorithm (BCA) for accurate Monte-Carlo implant modeling down to sub-1keV energies. This new BCA code is a 3D model that takes account
ATHENA version 5.0 includes a new Binary Collision Algorithm (BCA) for accurate Monte-Carlo implant modeling down to sub-1keV energies. This new BCA code is a 3D model that takes account
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