4 years ago
2023년 5월 19일 2:00am-2:30am (한국 시각) 이번 시간에 FinFET 및 메모리 애플리케이션이라는 면에서 기하학적 식각 모델을 제시합니다. 핀 형상 구성, 이상적이지 않은 식각 프로파일 (bowing, twisting) 및 자체 정렬 공정
2023년 5월 19일 2:00am-2:30am (한국 시각) 이번 시간에 FinFET 및 메모리 애플리케이션이라는 면에서 기하학적 식각 모델을 제시합니다. 핀 형상 구성, 이상적이지 않은 식각 프로파일 (bowing, twisting) 및 자체 정렬 공정
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