Every software package contains a full set of examples suitable for that version and are installed with the software. If you see examples here that are not in your installation you should consider updating to a later version of the software. These examples can be used by beginners and advanced users for product evaluation, teaching purposes, and self-training.

Required Modules

Victory Process

• 2D Diffusion & Implantation

From “Integrated Circuit Fabrication: Science and Technology by Plummer & Griffin, published by Cambridge University Press

TED of Phosphorus for various diffusion times at 800C
The high dose removes {311} defects in the amorphous region
Main parameter is max.clust=1e19, indicating the substrate
is amorphous is amorphous above 1e19/cm3

Images