PG-Fig8-22.in : Discrete nature of Monte Carlo implant with fewer ions

PG-Fig8-22.in : Discrete nature of Monte Carlo implant with fewer ions

PG-Fig8-22.in : Discrete nature of Monte Carlo implant with fewer ions

Every software package contains a full set of examples suitable for that version and are installed with the software. If you see examples here that are not in your installation you should consider updating to a later version of the software. These examples can be used by beginners and advanced users for product evaluation, teaching purposes, and self-training.

Required Modules

Victory Process

  • 2D Diffusion & Implantation

From “Integrated Circuit Fabrication: Science and Technology by Plummer & Griffin, published by Cambridge University Press

This shows discrete nature of the Monte Carlo model with 10X fewer
ions than used in PG-Fig8-20
Arsenic implants with various degrees of Si preamorphization

Images

PG-Fig8-22_NoPreAmor.png

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