PG-Fig8-10.in : Dose dependence of phosphorus implants

PG-Fig8-10.in : Dose dependence of phosphorus implants

PG-Fig8-10.in : Dose dependence of phosphorus implants

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Required Modules

Victory Process

  • 2D Diffusion & Implantation

From “Integrated Circuit Fabrication: Science and Technology by Plummer & Griffin, published by Cambridge University Press

Channeling decreases as the substrate becomes more amorphous

Images

PG-Fig8-10_P_1e13_gauss.png

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