SEM/TEM Image Conversion for Process TCAD Simulation

SEM/TEM Image Conversion for Process TCAD Simulation

SEM/TEM Image Conversion for Process TCAD Simulation

Silvaco has developed the imagesforvp converter, which transforms SEM and TEM images into a format that can be read by the Victory Process simulator [1]. The convert-ed images can be used to create substrates or structures for subsequent process simulation, or target device structures for device simulation. SEM images can be used for layout generation, while TEM images are particularly useful when a profile is difficult to reproduce using geometric or physics-based etch and deposition models.
The imagesforvp converter supports PNG, TIFF, and JPG image formats and requires black-and-white input images. The physical scale and dimensions of the image, specified in micrometers, can be adjusted through command-line options provided by the converter
Silvaco has developed the imagesforvp converter, which transforms SEM and TEM images into a format that can be read by the Victory Process simulator [1]. The convert-ed images can be used to create substrates or structures for subsequent process simulation, or target device structures for device simulation. SEM images can be used for layout generation, while TEM images are particularly useful when a profile is difficult to reproduce using geometric or physics-based etch and deposition models.
The imagesforvp converter supports PNG, TIFF, and JPG image formats and requires black-and-white input images. The physical scale and dimensions of the image, specified in micrometers, can be adjusted through command-line options provided by the converter

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