The Industry Standard of SOI Technology From Process To Circuit Simulation

Abstract

SOI technology for state of the art CMOS technology is rapidly approaching maturity. PD-SOI device design has the advantage of easier manufacturing but requires more sophisticated device and circuit design to reduce the effects of the floating-body. FD-SOI device design potentially has the advantage of no floating-body effects but requires very thin silicon films making manufacturing more challenging. As a consequence the optimization of SOI device design requires a coupled solution where both process and circuit simulation can be tied together. Silvaco provides a complete, well integrated simulation software for all aspects of SOI technology. Our SOI specific software includes technology simulation, SPICE model extraction, interconnect parasitic analysis, SPICE circuit simulation and traditional CAD. The TCAD Driven CAD approach provides the most accurate models for both device engineers and circuit designers.