14 years ago
Simulation of Stress Evolution During Semiconductor Device Fabrication
Accurate stress simulation has become a necessary part of performance and reliability analysis of semiconductor devices. In our previous paper [1] we demonstrated that 3D stress simulation of the whole
14 years ago
Actuation Voltage For a Cantilever Switch in MEMS
Following the successful 3D simulation of the process flow of cantilever based MEMS switches using VICTORY Process is presented in August 2005 Simulation Standard article “Process Flow Simulation and Manufacture”,