Requires: Utmost IV, SmartSpice, SmartView
Minimum Versions: Utmost IV 2.24.0.R, SmartSpice 5.4.0.R, SmartView 2.34.0.R
This example describes how to extract a macromodel for a SiC Power DMOS.
The project file
opt_ex25.prj
and the data file
opt_ex25.uds
for this example should be loaded into your database. When opened, the
project will look as shown in
opt_ex25_project.png
.
Preliminary information
The netlist of the macromodel is partially illustrated in
opt_ex25_netlist.png
.
The SiC_MOS subcircuit contains the main section of the macromodel and it includes the following SPICE
nonlinear circuit elements:
- M1: a MOSFET device instance modeled using a BSIM4 model card
- D1 and D2: two diodes connected between the source and drain of the device, to accurately
account for the recovery effect, modeled using diode Level 1 model cards - Gd1: A bias-controlled current source, in fact, a bias-dependent and temperature-dependent drain conductance
- Gs1: A temperature-dependent source conductance
- Rds1: A constant resistor connected between the drain and source device terminals, to better
account for the leakage current of the device - Ggd: A bias-controlled current source, in fact a bias-dependent capacitor connected between
the gate and drain device terminals - Cgs: A constant capacitor connected between the gate and source device terminals
- Cds: A constant capacitor connected between the drain and source device terminals
These other elements are used in a separate section of the macromodel, to account for the bias-controlled
current source Ggd behaving like a capacitor:
- Cgd1: A constant capacitor
- Vgd1: A zero-bias voltage source, used as a current probe
- Egd3: A bias-controlled voltage source, used to implement the bias dependence of Ggd on Vgd
Temperature dependence
Instead of using the built-in temperature dependence parameters of the various model cards and passive
components, this example uses an alternative temperature dependence based on additional controlled
voltage and current sources. This approach is preferred for power device macromodels, because it can be
extended to implement a dynamic circuit temperature dependence, to account for the self-heating phenomenon.
The following macromodel elements are used to account for the temperature dependence of other
macromodel components.
- Vprobe1: A zero-bias voltage source, used as a current probe
- Ed1, Es1, Eg1, Gds1: Bias-controlled sources to account for the temperature dependence of the
core MOSFET element M1 - Edi1: A bias-controlled voltage source, to account for the temperature dependence of the diode D1
- Edi2: A bias-controlled voltage source, to account for the temperature dependence of the diode D2
Model cards and parameters
The macromodel thus includes 3 compact model cards, db1, db2 and nch1, to describe the circuit elements
D1, D2 and M1, respectively:
opt_ex25_model_cards.png
.
Additional netlist parameters are used in the bias dependence equations of various circuit elements:
opt_ex25_netlist_parameters.png
.
Specific netlist for the Ciss capacitance
The Rext1 and Cext1 circuit elements are required for the proper netlist used for simulating the Ciss
capacitance versus drain voltage. When the cissvd_flag attribute is not 0 (Ciss data is used), then Rext1=Rext
and Cext1=Cext. When the cissvd_flag attribute is 0, then Rext1=Rmin and Cext1=Cmin.
Model extraction sequence
The extraction and optimization sequence, which fully automates the extraction of this
macromodel’s parameters, has a total of 51 sections.
The objective of each section is to isolate a device
characteristic and then to optimize or directly calculate specific model parameters.
Some of the model parameters are optimized in multiple sections for better fitting.
Sections 1-3: idvg_rt
The first 3 sections are used to extract a preliminary value of the MOSFET threshold voltage parameter,
nch1/VTH0, and to properly set its lower and upper limits:
opt_ex25_03.png
.
Sections 4-10: idvg_rt, crss
The next 7 sections are used to calculate two important capacitance-related parameters based on the
Crss capacitance and its derivative, versus drain voltage data, at room temperature, as seen in the
Utmost IV Log view:
opt_ex25_10.png
.
- nch1/VOFFCV BSIM4 C-V offset parameter for the weak to strong inversion transition
- pcgdv Netlist parameter used in the bias dependence of Ggd
Sections 11-13: idvg_rt
This section optimizes the I-V parameters of the MOSFET based on the drain current versus gate voltage
characteristic in the linear region and at room temperature. The following model parameters
are optimized.
- PARAMS/PRDWMIN Geometry-independent drain resistance
- nch1/VTH0 Threshold voltage
- nch1/U0 Low-field mobility
- nch1/VOFF I-V offset parameter for the weak to strong inversion transition
- nch1/MINV I-V coefficient for the weak to strong inversion transition
- nch1/NFACTOR Subthreshold slope
After these steps have been completed (step idvg_3 has been finished), the fit to measured data will be
as shown in
opt_ex25_13.png
.
Sections 14-17: iv_bd_rt
This section optimizes the I-V parameters of the recovery diodes based on the drain current versus drain
voltage characteristic in the third quadrant (negative drain voltage and drain current), at room temperature.
The following model parameters are optimized.
- db1/IS Saturation current of diode db1
- db1/RS Series resistance of diode db1
- db1/N Emission coefficient of diode db1
- db1/IKF Knee current of diode db1
- db2/IS Saturation current of diode db2
- db2/RS Series resistance of diode db2
- db2/IKF Knee current of diode db2
After these steps have been completed (step iv_bd_4 has been finished), the fit to measured data will be
as shown in
opt_ex25_17.png
.
Sections 18-19: idvd_idvg_sat_rt
This section optimizes the I-V parameters of the MOSFET based on the drain current versus drain voltage
and drain current versus gate voltage characteristics in the saturation region, at room temperature.
The following model parameters are optimized.
- PARAMS/PRDWMIN Geometry-independent drain resistance
- nch1/VSAT Saturation velocity
- nch1/PCLM Channel length modulation parameter
After these steps have been completed (step idvd_idvg_sat_2 has been finished), the fit to measured data
will be as shown in
opt_ex25_19.png
.
Sections 20-21: iv_bd_rt
This section refines the I-V parameters of the recovery diodes based on the drain current versus drain
voltage characteristic in the third quadrant (negative drain voltage and drain current), at room temperature.
The following model parameters are optimized and refined.
- db1/IS Saturation current of diode db1
- db1/RS Series resistance of diode db1
- db1/N Emission coefficient of diode db1
- db1/IKF Knee current of diode db1
- db2/IS Saturation current of diode db2
- db2/RS Series resistance of diode db2
- db2/IKF Knee current of diode db2
After these steps have been completed (step iv_bd_4 has been finished), the fit to measured data will be
as shown in
opt_ex25_21.png
.
Sections 22-23: idvd_idvg_sat_bd_rt
This section optimizes the I-V parameters of the MOSFET based on the drain current versus drain voltage
and drain current versus gate voltage characteristics in the saturation region, and the drain current
versus drain voltage characteristic in the third quadrant (negative drain voltage and drain current),
at room temperature. The following model parameters are optimized and refined.
- PARAMS/PRDWMIN Geometry-independent drain resistance
- PARAMS/PRSWMIN Geometry-independent source resistance
- nch1/VSAT Saturation velocity
- nch1/AGS Vgs dependence of bulk factor
- nch1/PCLM Channel length modulation parameter
After these steps have been completed (step idvd_idvg_sat_bd_2 has been finished), the fit to measured data
will be as shown in
opt_ex25_23.png
.
Sections 24-26: all_iv_rt
This section optimizes the I-V parameters of the MOSFET based on the drain current versus drain voltage
and drain current versus gate voltage characteristics in the saturation and linear region, and the drain current
versus drain voltage characteristic in the third quadrant (negative drain voltage and drain current),
at room temperature. The following model parameters are optimized and refined.
- PARAMS/PRDWMIN Geometry-independent drain resistance
- PARAMS/PRSWMIN Geometry-independent source resistance
- nch1/VTH0 Threshold voltage
- nch1/U0 Low-field mobility
- nch1/UA First-order mobility degradation coefficient due to vertical electric field
- nch1/VSAT Saturation velocity
- nch1/AGS Vgs dependence of bulk factor
- nch1/VOFF I-V offset parameter for the weak to strong inversion transition
- nch1/MINV I-V coefficient for the weak to strong inversion transition
- nch1/NFACTOR Subthreshold slope
- nch1/PCLM Channel length modulation parameter
After these steps have been completed (step iv_3 has been finished), the fit to measured data will be
as shown in
opt_ex25_26.png
.
Section 27: iv_bd_rt
This section refines the I-V parameters of the recovery diodes based on the drain current versus drain voltage
characteristic in the third quadrant (negative drain voltage and drain current), at room temperature.
The following model parameters are refined.
- db1/IS Saturation current of diode db1
- db1/RS Series resistance of diode db1
- db1/N Emission coefficient of diode db1
- db1/IKF Knee current of diode db1
- db2/IS Saturation current of diode db2
- db2/RS Series resistance of diode db2
- db2/IKF Knee current of diode db2
After these steps have been completed (step iv_bd_4 has been finished), the fit to measured data will be
as shown in
opt_ex25_27.png
.
Section 28-30: all_cv
This section optimizes the C-V parameters of the recovery diode based on the Cds capacitance versus drain
voltage data, at room temperature. The following model parameters are optimized.
- PARAMS/pcds0 Netlist parameter used for the drain-source parasitic capacitance
- db1/CJO Zero-bias junction capacitance of diode db1
- db1/VJ Junction potential barrier of diode db1
- db1/MJ Junction grading coefficient of diode db1
After these steps have been completed (step cds_vd_3 has been finished), the fit to measured data will be
as shown in
opt_ex25_30.png
.
Section 31-32: all_cv
This section optimizes the C-V parameters of various macromodel components, based on a combination of Cds, Coss, Crss
and Ciss capacitances versus drain voltage data, at room temperature. The following model parameters are optimized
and refined.
- PARAMS/pcgd0 Netlist parameter used in the bias dependence of Ggd
- PARAMS/pcgd11 Netlist parameter used in the bias dependence of Ggd
- PARAMS/pcgd12 Netlist parameter used in the bias dependence of Ggd
- PARAMS/pcgs0 Netlist parameter used for the gate-source parasitic capacitance
- nch1/DLC Effective length offset for the MOSFET C-V model
- nch1/VOFFCV MOSFET C-V offset parameter for the weak to strong inversion transition
After these steps have been completed (step all_cvd_2 has been finished), the fit to measured data will be
as shown in
opt_ex25_32.png
.
Section 33: all_cv
This section refines the C-V parameters of various macromodel components, based on the Crss
capacitance versus drain voltage data, at room temperature. The following model parameters are refined.
- PARAMS/pcgd0 Netlist parameter used in the bias dependence of Ggd
- PARAMS/pcgd11 Netlist parameter used in the bias dependence of Ggd
- PARAMS/pcgd12 Netlist parameter used in the bias dependence of Ggd
- nch1/VOFFCV MOSFET C-V offset parameter for the weak to strong inversion transition
After these steps have been completed (step crss_1 has been finished), the fit to measured data will be
as shown in
opt_ex25_33.png
.
Section 34-35: all_iv_cv_rt
This section refines all previously optimized parameters of various macromodel components, based on
combined I-V and C-V characteristics, at room temperature. The following model parameters are refined.
- PARAMS/pcgd0 Netlist parameter used in the bias dependence of Ggd
- PARAMS/pcgd11 Netlist parameter used in the bias dependence of Ggd
- PARAMS/pcgd12 Netlist parameter used in the bias dependence of Ggd
- PARAMS/pcgs0 Netlist parameter used for the gate-source parasitic capacitance
- PARAMS/pcds0 Netlist parameter used for the drain-source parasitic capacitance
- PARAMS/PRDWMIN Geometry-independent drain resistance
- PARAMS/PRSWMIN Geometry-independent source resistance
- db1/CJO Zero-bias junction capacitance of diode db1
- db1/VJ Junction potential barrier of diode db1
- db1/MJ Junction grading coefficient of diode db1
- nch1/VTH0 Threshold voltage
- nch1/U0 Low-field mobility
- nch1/UA First-order mobility degradation coefficient due to vertical electric field
- nch1/VSAT Saturation velocity
- nch1/AGS Vgs dependence of bulk factor
- nch1/VOFF I-V offset parameter for the weak to strong inversion transition
- nch1/MINV I-V coefficient for the weak to strong inversion transition
- nch1/NFACTOR Subthreshold slope
- nch1/PCLM Channel length modulation parameter
- nch1/DLC Effective length offset for the MOSFET C-V model
- nch1/VOFFCV MOSFET C-V offset parameter for the weak to strong inversion transition
After these steps have been completed (step crss_1 has been finished), the fit to measured data will be
as shown in
opt_ex25_35.png
.
Section 36-37: all_cv
This section refines the C-V parameters of various macromodel components, based on the Crss
capacitance and its derivative, versus drain voltage data, at room temperature. The following
model parameters are refined.
- PARAMS/pcgd0 Netlist parameter used in the bias dependence of Ggd
- PARAMS/pcgd11 Netlist parameter used in the bias dependence of Ggd
- PARAMS/pcgd12 Netlist parameter used in the bias dependence of Ggd
- nch1/VOFFCV MOSFET C-V offset parameter for the weak to strong inversion transition
After these steps have been completed (step crss_3 has been finished), the fit to measured data will be
as shown in
opt_ex25_37.png
.
Section 38-39: all_cv
This section optimizes the C-V parameters of various macromodel components, based on a combination of Cds, Coss, Crss
and Ciss capacitances versus drain voltage data, at room temperature. The following model parameters are optimized
and refined.
- PARAMS/pcgd0 Netlist parameter used in the bias dependence of Ggd
- PARAMS/pcgd11 Netlist parameter used in the bias dependence of Ggd
- PARAMS/pcgd12 Netlist parameter used in the bias dependence of Ggd
- PARAMS/pcgs0 Netlist parameter used for the gate-source parasitic capacitance
- nch1/DLC Effective length offset for the MOSFET C-V model
- nch1/VOFFCV MOSFET C-V offset parameter for the weak to strong inversion transition
After these steps have been completed (step all_cvd_4 has been finished), the fit to measured data will be
as shown in
opt_ex25_39.png
.
Section 40-41: all_cv
This section refines the C-V parameters of the recovery diode based on the Cds capacitance versus drain
voltage data, at room temperature. The following model parameters are optimized.
- PARAMS/pcds0 Netlist parameter used for the drain-source parasitic capacitance
- db1/CJO Zero-bias junction capacitance of diode db1
- db1/VJ Junction potential barrier of diode db1
- db1/MJ Junction grading coefficient of diode db1
After these steps have been completed (step cds_vd_3 has been finished), the fit to measured data will be
as shown in
opt_ex25_41.png
.
Section 42-45: iv_bd_rt
This section refines the I-V parameters of the recovery diodes based on the drain current versus drain voltage
characteristic in the third quadrant (negative drain voltage and drain current), at room temperature.
The following model parameters are refined.
- db1/IS Saturation current of diode db1
- db1/RS Series resistance of diode db1
- db1/N Emission coefficient of diode db1
- db1/IKF Knee current of diode db1
- db2/IS Saturation current of diode db2
- db2/RS Series resistance of diode db2
- db2/IKF Knee current of diode db2
After these steps have been completed (step iv_bd_6 has been finished), the fit to measured data will be
as shown in
opt_ex25_45.png
.
Section 46-47: all_iv_no_bd_t
This section optimizes the refines the temperature parameters of various macromodel components, based on
I-V characteristics, at different temperatures (high and low). The following model parameters are optimized.
- PARAMS/PEDT1 Netlist parameter used in the bias dependence of Ed1
- PARAMS/PEGT1 Netlist parameter used in the bias dependence of Eg1
- PARAMS/PEGT2 Netlist parameter used in the bias dependence of Eg1
- PARAMS/PGDST1 Netlist parameter used in the bias dependence of Gds1
- PARAMS/PGRDWT1 Netlist parameter used in the bias dependence of Gd1
- PARAMS/PGRDWT2 Netlist parameter used in the bias dependence of Gd1
- PARAMS/PGRSWT1 Netlist parameter used in the bias dependence of Gs1
- PARAMS/PGRSWT2 Netlist parameter used in the bias dependence of Gs1
After these steps have been completed (step iv_t_2 has been finished), the fit to measured data will be
as shown in
opt_ex25_47.png
.
Section 48-51: iv_bd_t
This section optimizes the temperature parameters of the macromodel components associated with the recovery
diodes, based on the drain current versus drain voltage characteristic in the third quadrant (negative drain
voltage and drain current), at different temperatures (high and low).
The following model parameters are optimized.
- PARAMS/PEDIT11 Netlist parameter used in the bias dependence of Edi1
- PARAMS/PEDIT12 Netlist parameter used in the bias dependence of Edi1
- PARAMS/PEDIT21 Netlist parameter used in the bias dependence of Edi2
- PARAMS/PEDIT22 Netlist parameter used in the bias dependence of Edi2
- db1/EG Energy gap of diode db1
- db2/EG Energy gap of diode db1
After these steps have been completed (step iv_bd_t_4 has been finished), the fit to measured data will be
as shown in
opt_ex25_51.png
.
When complete, the project netlist, model cards and netlist parameters can then be exported into an external
model library file.
First, the macromodel netlist is exported. We export the whole netlist under the name SiC_DMOS, as shown in
opt_ex25_export_netlist.png
.
As a result, the exported netlist will include two subcircuits, in a 2-level hierarchy: the top level subcircuit,
SiC_DMOS, and the lower level subcircuit, SiC_MOS.
The model cards are then exported into the lower level subcircuit, SiC_DMOS/SiC_MOS, as shown in
opt_ex25_export_model_cards.png
.
Finally, the netlist parameters are exported. The first 4 parameters, Rmin, Cmin, Rext, Cext that are used to
account for the Ciss capacitance-specific netlist, must be exported into the top level subcircuit, SiC_DMOS, as
shown in
opt_ex25_export_netlist_params_1.png
.
The other netlist parameters will be exported into the lower level subcircuit, SiC_DMOS/SiC_MOS, as shown in
opt_ex25_export_netlist_params_2.png
.
For this example, the netlist and the final model card and netlist parameters have been exported in the opt_ex25.libr
file.
Graphics
Files
opt_ex25.uds
Utmost IV CSV Data Logfile
Format Version 3
Copyright (c) 1984-2024 Silvaco, Inc. All rights reserved
DataSetStart
DataSetName, body_d
MeasurementType, DC
BatchName, opt_ex25
WaferName, TCAD
DieName, TCAD
DeviceName, nmos_1
Temperature, -53.15
FabDate, 25 Jul 2024
UserDate, 25 Jul 2024
Attribute, W, 1.5
Attribute, L, 1.2e-06
NodeNames, source gate drain
Sweep, 1, V, drain, LIST, 0.1, 0
List, 1
0 -0.25 -0.5 -0.75
-1 -1.25 -1.5 -1.75
-2 -2.25 -2.5 -2.75
-3 -3.25 -3.5 -3.75
-4 -4.25 -4.5 -4.75
-5 -5.25 -5.5 -5.75
-6
Sweep, 2, V, gate, LIST, 0.1, 0
List, 2
0
Constant, V, source, 0, 0.1, 0
Target, I, drain
Target, I, source
Target, I, gate
Plot, idvd, XY (LIN LIN), vdrain, idrain
DataArray, idrain
7.088653223927e-16 6.4562953090861e-16 5.3937210231402e-16 -2.9128547986048e-12
-1.2873651513787e-07 -0.00081032246621372 -0.095602613608007 -0.59781452196179
-1.6106291492903 -3.1708736279511 -5.3218832043648 -8.1447061892095
-11.982565720581 -19.998623000675 -29.252300611088 -36.660837567321
-41.465956269783 -44.899175967087 -47.732097253929 -50.293688022366
-52.739551250613 -55.150488173217 -57.57282021185 -60.038093506963
-62.571424341754
DataArray, igate
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0
DataArray, isource
-7.0886530873201e-16 -6.4563018931669e-16 -5.3937238422356e-16 2.912854798486e-12
1.287365151368e-07 0.00081032246622141 0.095602613612085 0.59781452195594
1.6106291490685 3.170873628614 5.3218832171293 8.1447062026634
11.982566023465 19.998624171474 29.252300691819 36.660837505498
41.465956338882 44.89917890854 47.732098251939 50.293688903053
52.739552139189 55.150488642747 57.5728203309 60.038093512218
62.571424217438
DataSetFinish
DataSetStart
DataSetName, idvd
MeasurementType, DC
BatchName, opt_ex25
WaferName, TCAD
DieName, TCAD
DeviceName, nmos_1
Temperature, -53.15
FabDate, 25 Jul 2024
UserDate, 25 Jul 2024
Attribute, W, 1.5
Attribute, L, 1.2e-06
NodeNames, source gate drain
Sweep, 1, V, drain, LIST, 0.1, 0
List, 1
0 0.5 1 1.5
2 2.5 3 3.5
4 4.5 5 5.5
6 6.5 7 7.5
8 8.5 9 9.5
10 10.5 11 11.5
12 12.5 13 13.5
14 14.5 15 15.5
16 16.5 17 17.5
18 18.5 19 19.5
20 20.5 21 21.5
22 22.5 23 23.5
24 24.5 25 25.5
26 26.5 27 27.5
28 28.5 29 29.5
30 30.5 31 31.5
32 32.5 33 33.5
34 34.5 35 35.5
36 36.5 37 37.5
38 38.5 39 39.5
40
Sweep, 2, V, gate, LIST, 0.1, 0
List, 2
2 4 6 8
10 12 14 16
18 20
Constant, V, source, 0, 0.1, 0
Target, I, drain
Target, I, source
Target, I, gate
Function, gds, derivative (vdrain, idrain)
Plot, idvd, XY (LIN LIN), vdrain, idrain
Plot, gds, XY (LIN LOG), vdrain, gds
DataArray, idrain
7.0824420968475e-16 6.5157208756608e-12 1.2088369338139e-11 1.8447706589666e-11
2.5392440371407e-11 -0.0059653206719399 4.0008293854414e-11 4.7090140458147e-11
5.375091532165e-11 5.9887680395147e-11 6.5453297669479e-11 7.0455667590765e-11
7.4942367215411e-11 7.8963218843321e-11 8.2602742164582e-11 8.5961133933272e-11
8.911841864723e-11 9.2121566598044e-11 9.4994058303999e-11 9.7630046911277e-11
1.0009110270575e-10 1.0242620338098e-10 1.0462820013281e-10 1.0671029259058e-10
1.0868009860272e-10 1.1055420397501e-10 1.1233083763056e-10 1.1400771651692e-10
1.1561530642646e-10 1.171292475233e-10 1.1859417708967e-10 1.1999648101304e-10
1.2132732253787e-10 1.2260556610098e-10 1.2384794061145e-10 1.2500403624038e-10
1.2611839053205e-10 1.2717129170551e-10 1.2815701177077e-10 1.2902013076691e-10
1.2957609535519e-10 1.3008619452444e-10 1.3058550949548e-10 1.3107298815783e-10
1.3154240150462e-10 1.3200407399672e-10 1.3245806018693e-10 1.3290420673532e-10
1.3334068877309e-10 1.3376894043534e-10 1.3419202052924e-10 1.3461108975037e-10
1.350258262728e-10 1.35434900034e-10 1.3583897729022e-10 1.36235981698e-10
1.3662735315224e-10 1.3701764874118e-10 1.3740700057309e-10 1.3779454563316e-10
1.3817908056411e-10 1.3856003174168e-10 1.3893687387686e-10 1.3930986634796e-10
1.3968116721363e-10 1.4005156760508e-10 1.4042041004961e-10 1.4078727231913e-10
1.411531779087e-10 1.4151820798229e-10 1.4188109670612e-10 1.422396362111e-10
1.4259435735496e-10 1.4294754389629e-10 1.432990680193e-10 1.4364851933431e-10
1.4399707078245e-10 1.4434513993811e-10 1.446925044997e-10 1.4503889995634e-10
1.4538415948758e-10 6.9872684608402e-16 0.13076916407508 0.18656416229222
0.2245899153839 0.25328317882583 0.27588172596765 0.29412157249557
0.30911950437742 0.321606228891 0.33211394017781 0.34102277030169
0.34860098270525 0.35507466349465 0.3606366782444 0.36543460904836
0.36958195741274 0.3731829905682 0.376375919796 0.37922806292646
0.38181341623667 0.38416353172975 0.3863191731453 0.38832250501254
0.39018832298113 0.39190421842972 0.39350130103602 0.39497393617014
0.39636112355326 0.39765597721828 0.39885650019402 0.39996835607632
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0.40470530245836 0.4054921671106 0.40624612290603 0.40691519001666
0.40747929073859 0.40798399535302 0.40843758310631 0.40886429521088
0.4092735781963 0.40966214924763 0.41002208489908 0.41036320498703
0.41068595096999 0.41099076118716 0.4112772895356 0.41154825251949
0.41180548296163 0.41205332474024 0.41229531622991 0.41253265384736
0.41276622336578 0.41299552848498 0.41322014152067 0.41344307106169
0.41366488605343 0.41388508028061 0.41410288921501 0.4143179342154
0.41453008857066 0.41473953551076 0.41494754811923 0.41515463129667
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DataSetFinish
DataSetStart
DataSetName, idvglin
MeasurementType, DC
BatchName, opt_ex25
WaferName, TCAD
DieName, TCAD
DeviceName, nmos_1
Temperature, -53.15
FabDate, 25 Jul 2024
UserDate, 25 Jul 2024
Attribute, W, 1.5
Attribute, L, 1.2e-06
NodeNames, source gate drain
Sweep, 1, V, gate, LIST, 0.1, 0
List, 1
0 0.25 0.5 0.75
1 1.25 1.5 1.75
2 2.25 2.5 2.75
3 3.25 3.5 3.75
4 4.25 4.5 4.75
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Sweep, 2, V, drain, LIST, 0.1, 0
List, 2
0.1
Constant, V, source, 0, 0.1, 0
Target, I, drain
Target, I, source
Target, I, gate
Function, gm, derivative (vgate, idrain)
Plot, idvg, XY (LIN LIN), vgate, idrain
Plot, gm, XY (LIN LIN), vgate, gm
DataArray, idrain
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7.3379040850261e-16 7.4044999094859e-16 1.2831466007948e-15 4.0425922586724e-14
2.6389758700554e-12 1.578746991278e-10 8.1234259680006e-09 3.3045981943476e-07
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2.3525342608864 2.3652881733673 2.3776995020856 2.3897811367256
2.4015454467147
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0
DataArray, isource
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DataSetFinish
DataSetStart
DataSetName, idvgsat
MeasurementType, DC
BatchName, opt_ex25
WaferName, TCAD
DieName, TCAD
DeviceName, nmos_1
Temperature, -53.15
FabDate, 25 Jul 2024
UserDate, 25 Jul 2024
Attribute, W, 1.5
Attribute, L, 1.2e-06
NodeNames, source gate drain
Sweep, 1, V, gate, LIST, 0.1, 0
List, 1
0 0.25 0.5 0.75
1 1.25 1.5 1.75
2 2.25 2.5 2.75
3 3.25 3.5 3.75
4 4.25 4.5 4.75
5 5.25 5.5 5.75
6 6.25 6.5 6.75
7 7.25 7.5 7.75
8 8.25 8.5 8.75
9 9.25 9.5 9.75
10 10.25 10.5 10.75
11 11.25 11.5 11.75
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14 14.25 14.5 14.75
15 15.25 15.5 15.75
16 16.25 16.5 16.75
17 17.25 17.5 17.75
18 18.25 18.5 18.75
19 19.25 19.5 19.75
20
Sweep, 2, V, drain, LIST, 0.1, 0
List, 2
20
Constant, V, source, 0, 0.1, 0
Target, I, drain
Target, I, source
Target, I, gate
Function, gm, derivative (vgate, idrain)
Plot, idvg, XY (LIN LIN), vgate, idrain
Plot, gm, XY (LIN LIN), vgate, gm
DataArray, idrain
2.391389058276e-15 2.3903258143977e-15 2.3898103692194e-15 2.3886979440089e-15
2.389419885111e-15 2.5502669958239e-15 1.9771482915557e-14 1.5721378009151e-12
1.2957609612148e-10 9.2991180777751e-09 5.2632408695481e-07 2.0468468702663e-05
0.00048640144413031 0.0064744567375456 0.045086086754804 0.16730950355201
0.40798399542873 0.77839175394553 1.2803702234282 1.9137550838062
2.6783181235177 3.5741037153746 4.601335301679 5.7602807795081
7.051177634313 8.4741936035014 10.029448415084 11.717134142143
13.537494565285 15.490746937917 17.577024333221 19.79642077179
22.148776468327 24.63357200558 27.250061493058 29.997417567471
32.874412911105 35.879724065869 39.011841022736 42.269000226903
45.648411538743 49.146769084287 52.76172341716 56.490025432339
60.328194666083 64.27321130848 68.322104190593 72.47136671682
76.715842422711 81.048282938899 85.45478320866 89.938326579935
94.50375317761 99.149148141886 103.8711450962 108.6663320335
113.53061802575 118.45950526194 123.44792099267 128.49242911616
133.58850196254 138.73008564329 143.91124041799 149.12573495606
154.36699147873 159.62761458354 164.89980841688 170.17562345383
175.44617590044 180.69955452928 185.92874202547 191.12320813743
196.27082266881 201.36282593575 206.38955199238 211.34161842855
216.20903623897 220.98478885776 225.66206766269 230.22987293828
234.68317820713
DataArray, igate
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0
DataArray, isource
-2.3913890547605e-15 -2.390326757183e-15 -2.3898109187215e-15 -2.3886980924251e-15
-2.3894199362336e-15 -2.5502671354323e-15 -1.9771483190411e-14 -1.5721378006722e-12
-1.2957609612244e-10 -9.2991180778011e-09 -5.2632408695657e-07 -2.0468468702592e-05
-0.0004864014441283 -0.0064744567375771 -0.045086086754632 -0.16730950355173
-0.40798399542793 -0.77839175303043 -1.2803702230253 -1.91375508381
-2.6783181235286 -3.5741037158262 -4.6013353022428 -5.7602807794912
-7.0511776347298 -8.4741936034726 -10.029448415042 -11.717134142087
-13.537494565237 -15.490746937861 -17.577024333183 -19.796420771806
-22.148776469019 -24.633572005603 -27.250061493075 -29.997417567583
-32.874412911612 -35.879724064053 -39.011841022892 -42.269000226845
-45.648411539303 -49.146769059439 -52.761723424786 -56.490025460883
-60.3281946662 -64.27321135733 -68.322104199362 -72.471366714095
-76.715842396109 -81.048283032509 -85.454783221249 -89.938326598582
-94.503753372405 -99.149148223753 -103.87114517204 -108.66633208599
-113.53061807517 -118.45950524396 -123.44791898701 -128.49242919232
-133.5885015868 -138.73008517962 -143.91124044877 -149.12573496263
-154.36699109499 -159.62761452919 -164.89980823974 -170.17562330267
-175.44617566633 -180.69955476649 -185.92872619924 -191.12320814748
-196.27082263483 -201.3628262108 -206.38955197613 -211.34161842188
-216.20903623571 -220.98478869072 -225.66206768062 -230.22987199985
-234.68317781162
DataSetFinish
DataSetStart
DataSetName, body_d
MeasurementType, DC
BatchName, opt_ex25
WaferName, TCAD
DieName, TCAD
DeviceName, nmos_1
Temperature, 26.85
FabDate, 25 Jul 2024
UserDate, 25 Jul 2024
Attribute, W, 1.5
Attribute, L, 1.2e-06
NodeNames, source gate drain
Sweep, 1, V, drain, LIST, 0.1, 0
List, 1
0 -0.25 -0.5 -0.75
-1 -1.25 -1.5 -1.75
-2 -2.25 -2.5 -2.75
-3 -3.25 -3.5 -3.75
-4 -4.25 -4.5 -4.75
-5 -5.25 -5.5 -5.75
-6
Sweep, 2, V, gate, LIST, 0.1, 0
List, 2
0
Constant, V, source, 0, 0.1, 0
Target, I, drain
Target, I, source
Target, I, gate
Plot, idvd, XY (LIN LIN), vdrain, idrain
DataArray, idrain
4.1264387671289e-16 -4.8187824490043e-16 -4.3143194885223e-12 -1.7248934228738e-08
-3.8884069347202e-05 -0.015282300792621 -0.2754978507372 -1.0171295778043
-2.2298515390224 -3.8808024289715 -5.9470470753253 -8.4253113965209
-11.384354337313 -15.789679224553 -21.95657617212 -29.005641072038
-36.788167667289 -45.25649232453 -54.316867050178 -63.821131264403
-73.586624605513 -83.429257307514 -93.19250115761 -102.75717968275
-112.03669487922
DataArray, igate
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0
DataArray, isource
-4.1264383300849e-16 4.8188158257448e-16 4.3143194911707e-12 1.7248934228741e-08
3.8884069347202e-05 0.015282300792635 0.27549785074847 1.0171295778737
2.2298515374077 3.8808024265797 5.9470470731045 8.4253113970518
11.384354373052 15.789679244891 21.956576189268 29.005640257508
36.788164006528 45.256491677595 54.316866766708 63.821130988202
73.586624311091 83.429257046981 93.192500987198 102.75717961336
112.0366901651
DataSetFinish
DataSetStart
DataSetName, cds_vds
MeasurementType, LCR_TABLE
BatchName, opt_ex25
WaferName, TCAD
DieName, TCAD
DeviceName, nmos_1
Temperature, 26.85
FabDate, 25 Jul 2024
UserDate, 25 Jul 2024
Attribute, W, 1.5
Attribute, L, 1.2e-06
NodeNames, source gate drain
LCRSource, drain, source, 100000, V, 0
LCRTarget, CP
Sweep, 1, V_LCR, LIST
List, 1
1e-06 0.2 0.4 0.6
0.8 1 1.2 1.4
1.6 1.8 2 2.2
2.4 2.6 2.8 3
3.2 3.4 3.6 3.8
4 4.2 4.4 4.6
4.8 5 5.2 5.4
5.6 5.8 6 6.2
6.4 6.6 6.8 7
7.2 7.4 7.6 7.8
8 8.2 8.4 8.6
8.8 9 9.2 9.4
9.6 9.8 10 10.2
10.4 10.6 10.8 11
11.2 11.4 11.6 11.8
12 12.2 12.4 12.6
12.8 13 13.2 13.4
13.6 13.8 14 14.2
14.4 14.6 14.8 15
15.2 15.4 15.6 15.8
16 16.2 16.4 16.6
16.8 17 17.2 17.4
17.6 17.8 18 18.2
18.4 18.6 18.8 19
19.2 19.4 19.6 19.8
20 20.2 20.4 20.6
20.8 21 21.2 21.4
21.6 21.8 22 22.2
22.4 22.6 22.8 23
23.2 23.4 23.6 23.8
24 24.2 24.4 24.6
24.8 25 25.2 25.4
25.6 25.8 26 26.2
26.4 26.6 26.8 27
27.2 27.4 27.6 27.8
28 28.2 28.4 28.6
28.8 29 29.2 29.4
29.6 29.8 30 30.2
30.4 30.6 30.8 31
31.2 31.4 31.6 31.8
32 32.2 32.4 32.6
32.8 33 33.2 33.4
33.6 33.8 34 34.2
34.4 34.6 34.8 35
35.2 35.4 35.6 35.8
36 36.2 36.4 36.6
36.8 37 37.2 37.4
37.6 37.8 38 38.2
38.4 38.6 38.8 39
39.2 39.4 39.6 39.8
40 40.2 40.4 40.6
40.8 41 41.2 41.4
41.6 41.8 42 42.2
42.4 42.6 42.8 43
43.2 43.4 43.6 43.8
44 44.2 44.4 44.6
44.8 45 45.2 45.4
45.6 45.8 46 46.2
46.4 46.6 46.8 47
47.2 47.4 47.6 47.8
48 48.2 48.4 48.6
48.8 49 49.2 49.4
49.6 49.8 50 50.2
50.4 50.6 50.8 51
51.2 51.4 51.6 51.8
52 52.2 52.4 52.6
52.8 53 53.2 53.4
53.6 53.8 54 54.2
54.4 54.6 54.8 55
55.2 55.4 55.6 55.8
56 56.2 56.4 56.6
56.8 57 57.2 57.4
57.6 57.8 58 58.2
58.4 58.6 58.8 59
59.2 59.4 59.6 59.8
60 60.2 60.4 60.6
60.8 61 61.2 61.4
61.6 61.8 62 62.2
62.4 62.6 62.8 63
63.2 63.4 63.6 63.8
64 64.2 64.4 64.6
64.8 65 65.2 65.4
65.6 65.8 66 66.2
66.4 66.6 66.8 67
67.2 67.4 67.6 67.8
68 68.2 68.4 68.6
68.8 69 69.2 69.4
69.6 69.8 70
Sweep, 2, V, source, LIST, 0.1, 0
List, 2
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0 0 0 0
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0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0
Sweep, 3, V, gate, LIST, 0.1, 0
List, 3
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
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0 0 0 0
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0 0 0 0
0 0 0 0
0 0 0
Function, cds, CP
Function, vdrain, Vsource + V_LCR
Function, cdsd, derivative (vdrain, CP)
Plot, cds, XY (LIN LIN), vdrain, cds
DataArray, CP
8.9330324501493e-10 8.635031652377e-10 8.3649091810302e-10 8.1159555386908e-10
7.8857876711966e-10 7.6720230870841e-10 7.4743076201301e-10 7.2913333463616e-10
7.1202687727784e-10 6.9588682338343e-10 6.8051994012362e-10 6.6584438064658e-10
6.51800966366e-10 6.383711501462e-10 6.2555236885597e-10 6.1329226076048e-10
6.0152513284083e-10 5.901965279472e-10 5.7930355076078e-10 5.688422393506e-10
5.5880984534469e-10 5.4937093340015e-10 5.4045228247741e-10 5.3187360428251e-10
5.2368595322417e-10 5.1609386090685e-10 5.0867791473411e-10 5.0106008837117e-10
4.9393540591061e-10 4.8718247590512e-10 4.8075168574014e-10 4.7501628929341e-10
4.6959203554118e-10 4.638886609457e-10 4.5810812816701e-10 4.5307201086073e-10
4.4845599153738e-10 4.4386256930676e-10 4.3936836193187e-10 4.3482450508364e-10
4.3014480870574e-10 4.2549501148856e-10 4.2071094969632e-10 4.1557833248855e-10
4.1070607139713e-10 4.0634080763549e-10 4.0225780084304e-10 3.9856684338142e-10
3.9505730479249e-10 3.9141017287787e-10 3.8766797362492e-10 3.8394618427331e-10
3.802671495184e-10 3.7678885753784e-10 3.7340112852845e-10 3.6975365343415e-10
3.6572260326861e-10 3.6234870538715e-10 3.5966748576752e-10 3.5695893040981e-10
3.5414063469723e-10 3.5130284850878e-10 3.4818929484073e-10 3.4485037877458e-10
3.4190653225349e-10 3.3947251288181e-10 3.3709287083889e-10 3.3465396965457e-10
3.3238129399437e-10 3.2999847851477e-10 3.2721919784292e-10 3.2446842420182e-10
3.2221655941233e-10 3.2011574112882e-10 3.1806003114818e-10 3.1603969175019e-10
3.1372601509802e-10 3.1074920378561e-10 3.0792587238723e-10 3.060241407744e-10
3.0437466640896e-10 3.025559188641e-10 3.0041084517813e-10 2.9823263894416e-10
2.9623600202337e-10 2.9406126034417e-10 2.9146671368598e-10 2.88694971387e-10
2.8541425905127e-10 2.8049904754449e-10 2.6979129826325e-10 2.6117929685315e-10
2.5895329361325e-10 2.5682042390637e-10 2.5447883300658e-10 2.523726919199e-10
2.5056279993824e-10 2.4887442799047e-10 2.4740533584271e-10 2.4618061668694e-10
2.450187909661e-10 2.4377454844726e-10 2.4236107866313e-10 2.4073657691928e-10
2.3899174644644e-10 2.3739400433283e-10 2.3609228131161e-10 2.3498549051592e-10
2.3394301038084e-10 2.3291716637576e-10 2.3193278590121e-10 2.3099998823847e-10
2.3006570943558e-10 2.2906439324716e-10 2.2797970122117e-10 2.2686367058797e-10
2.2576233008133e-10 2.2466262309629e-10 2.2356616851553e-10 2.2251086745671e-10
2.2150629932608e-10 2.2053901701764e-10 2.1960708902145e-10 2.1871896988435e-10
2.1787754001103e-10 2.1706753549778e-10 2.1625741749205e-10 2.1541690479057e-10
2.1453810171296e-10 2.1364168717064e-10 2.1275165566053e-10 2.1185973911467e-10
2.1092698138126e-10 2.099258240762e-10 2.0889743074447e-10 2.0795617067356e-10
2.0717183364581e-10 2.0650940480962e-10 2.0590833501522e-10 2.0533468437328e-10
2.0477786621501e-10 2.0423558293306e-10 2.0370434882824e-10 2.0317693675519e-10
2.0264372496604e-10 2.0209537736677e-10 2.0152516537128e-10 2.0092915632556e-10
2.003038176419e-10 1.9964397889781e-10 1.9894456363138e-10 1.9820526372213e-10
1.9743431667013e-10 1.9664764194513e-10 1.9586242292993e-10 1.9509130975453e-10
1.9434391258628e-10 1.9363072784291e-10 1.9296077194355e-10 1.9233585058117e-10
1.9175054087557e-10 1.9119821085888e-10 1.9067718053462e-10 1.9019303862832e-10
1.8975458471696e-10 1.8936430424773e-10 1.8901217619581e-10 1.8867904943246e-10
1.8834391838388e-10 1.8798811899615e-10 1.8759576568111e-10 1.8715270021536e-10
1.8664643026683e-10 1.8606982756909e-10 1.8543027901781e-10 1.8475807546406e-10
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1.795296374607e-10 1.7904187845639e-10 1.7857764991956e-10 1.7811565239857e-10
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1.7205364924889e-10 1.7152694379343e-10 1.7097228232458e-10 1.7042538539579e-10
1.6992893647982e-10 1.6950964437982e-10 1.6916519472429e-10 1.6887398647479e-10
1.6861244305187e-10 1.6836400511975e-10 1.6811940065062e-10 1.6787344913996e-10
1.6762213054238e-10 1.6736134773731e-10 1.6708713295613e-10 1.6679645320715e-10
1.6648809669059e-10 1.6616348170034e-10 1.6582714043194e-10 1.6548640552618e-10
1.6514984889084e-10 1.6482441336441e-10 1.6451235425235e-10 1.6421037692031e-10
1.6391204683287e-10 1.6361144939497e-10 1.6330530537623e-10 1.6299240830181e-10
1.6267112967355e-10 1.6233697573024e-10 1.6198203130978e-10 1.6159660591703e-10
1.6117220375282e-10 1.6070495671585e-10 1.6019879698252e-10 1.5966691062911e-10
1.5912963689742e-10 1.5860945252659e-10 1.5812674941282e-10 1.5769800920756e-10
1.5733375807023e-10 1.5703529957834e-10 1.5679384522318e-10 1.5659424913037e-10
1.5642046333517e-10 1.5625919957101e-10 1.5610107686014e-10 1.559401860137e-10
1.5577295681976e-10 1.555968107542e-10 1.5540895498951e-10 1.5520567336954e-10
1.5498233257312e-10 1.5473407912109e-10 1.5445703320072e-10 1.5414972942671e-10
1.5381461388329e-10 1.5345952207754e-10 1.5309843257521e-10 1.5274896609719e-10
1.5242507051986e-10 1.5213008356158e-10 1.5185731274802e-10 1.5159654603013e-10
1.5133979919631e-10 1.5108337002998e-10 1.5082707335766e-10 1.5057201714352e-10
1.5031795175302e-10 1.5006134753415e-10 1.4979487332338e-10 1.4950814926192e-10
1.4919020050062e-10 1.4883541117205e-10 1.4845335928992e-10 1.4807358485013e-10
1.4772972155032e-10 1.4743406237631e-10 1.4717569706041e-10 1.4693784340638e-10
1.4670919512501e-10 1.4648488782993e-10 1.4626377973247e-10 1.4604604030219e-10
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1.449800870489e-10 1.4476060170198e-10 1.4453734223701e-10 1.4431005892383e-10
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1.406278432155e-10 1.4034265604539e-10 1.4004886951723e-10 1.3974419095849e-10
1.3943197641531e-10 1.3912075833572e-10 1.3882238868192e-10 1.3854898806278e-10
1.3830893171177e-10 1.3810358567749e-10 1.3792734191598e-10 1.3777072937268e-10
1.3762384368651e-10 1.3747846185999e-10 1.3732910285595e-10 1.3717369408325e-10
1.3701389040231e-10 1.3685439263721e-10 1.367007509611e-10 1.3655652890367e-10
1.364217882406e-10 1.362937686536e-10 1.3616872396606e-10 1.3604350403114e-10
1.3591631722986e-10 1.357867771811e-10 1.3565552083081e-10 1.3552369712289e-10
1.3539258620327e-10 1.3526345280263e-10 1.3513752374387e-10 1.3501590835533e-10
1.3489941577851e-10 1.3478838480876e-10 1.3468264236209e-10 1.3458158272888e-10
1.3448428023149e-10 1.3438957653667e-10 1.3429614591758e-10 1.3420256301704e-10
1.3410737918815e-10 1.3400919225677e-10 1.3390669111096e-10 1.3379866716053e-10
1.3368399831849e-10 1.3356162056767e-10 1.334305049843e-10
DataSetFinish
DataSetStart
DataSetName, ciss_vds
MeasurementType, LCR_TABLE
BatchName, opt_ex25
WaferName, TCAD
DieName, TCAD
DeviceName, nmos_1
Temperature, 26.85
FabDate, 25 Jul 2024
UserDate, 25 Jul 2024
Attribute, W, 1.5
Attribute, L, 1.2e-06
Attribute, cissvd_flag, 1
NodeNames, source gate drain
LCRSource, source, gate, 100000, V, 0
LCRTarget, CP
Sweep, 1, V_LCR, LIST
List, 1
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0
Sweep, 2, V, gate, LIST, 0.1, 0
List, 2
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0
Sweep, 3, V, drain, LIST, 0.1, 0
List, 3
1e-06 0.2 0.4 0.6
0.8 1 1.2 1.4
1.6 1.8 2 2.2
2.4 2.6 2.8 3
3.2 3.4 3.6 3.8
4 4.2 4.4 4.6
4.8 5 5.2 5.4
5.6 5.8 6 6.2
6.4 6.6 6.8 7
7.2 7.4 7.6 7.8
8 8.2 8.4 8.6
8.8 9 9.2 9.4
9.6 9.8 10 10.2
10.4 10.6 10.8 11
11.2 11.4 11.6 11.8
12 12.2 12.4 12.6
12.8 13 13.2 13.4
13.6 13.8 14 14.2
14.4 14.6 14.8 15
15.2 15.4 15.6 15.8
16 16.2 16.4 16.6
16.8 17 17.2 17.4
17.6 17.8 18 18.2
18.4 18.6 18.8 19
19.2 19.4 19.6 19.8
20 20.2 20.4 20.6
20.8 21 21.2 21.4
21.6 21.8 22 22.2
22.4 22.6 22.8 23
23.2 23.4 23.6 23.8
24 24.2 24.4 24.6
24.8 25 25.2 25.4
25.6 25.8 26 26.2
26.4 26.6 26.8 27
27.2 27.4 27.6 27.8
28 28.2 28.4 28.6
28.8 29 29.2 29.4
29.6 29.8 30 30.2
30.4 30.6 30.8 31
31.2 31.4 31.6 31.8
32 32.2 32.4 32.6
32.8 33 33.2 33.4
33.6 33.8 34 34.2
34.4 34.6 34.8 35
35.2 35.4 35.6 35.8
36 36.2 36.4 36.6
36.8 37 37.2 37.4
37.6 37.8 38 38.2
38.4 38.6 38.8 39
39.2 39.4 39.6 39.8
40 40.2 40.4 40.6
40.8 41 41.2 41.4
41.6 41.8 42 42.2
42.4 42.6 42.8 43
43.2 43.4 43.6 43.8
44 44.2 44.4 44.6
44.8 45 45.2 45.4
45.6 45.8 46 46.2
46.4 46.6 46.8 47
47.2 47.4 47.6 47.8
48 48.2 48.4 48.6
48.8 49 49.2 49.4
49.6 49.8 50 50.2
50.4 50.6 50.8 51
51.2 51.4 51.6 51.8
52 52.2 52.4 52.6
52.8 53 53.2 53.4
53.6 53.8 54 54.2
54.4 54.6 54.8 55
55.2 55.4 55.6 55.8
56 56.2 56.4 56.6
56.8 57 57.2 57.4
57.6 57.8 58 58.2
58.4 58.6 58.8 59
59.2 59.4 59.6 59.8
60 60.2 60.4 60.6
60.8 61 61.2 61.4
61.6 61.8 62 62.2
62.4 62.6 62.8 63
63.2 63.4 63.6 63.8
64 64.2 64.4 64.6
64.8 65 65.2 65.4
65.6 65.8 66 66.2
66.4 66.6 66.8 67
67.2 67.4 67.6 67.8
68 68.2 68.4 68.6
68.8 69 69.2 69.4
69.6 69.8 70
Function, ciss, CP
Function, cissd, derivative (vdrain, CP)
Plot, ciss, XY (LIN LIN), vdrain, ciss
DataArray, CP
2.0723265750345e-09 2.0653717446346e-09 2.0584404037485e-09 2.0513371122004e-09
2.0440301330991e-09 2.0363717463105e-09 2.0282907255929e-09 2.019710041589e-09
2.0105073914732e-09 2.000624247007e-09 1.9899434406907e-09 1.9783349981593e-09
1.9655901841023e-09 1.9514649938309e-09 1.9357403836951e-09 1.9181891552237e-09
1.8985184533413e-09 1.8762969500948e-09 1.8511543650501e-09 1.8236709524277e-09
1.7947043772888e-09 1.7637470812687e-09 1.7317159626759e-09 1.6927402053916e-09
1.6548823646286e-09 1.6268287340873e-09 1.6032834068857e-09 1.582484914232e-09
1.5640684768683e-09 1.546713264627e-09 1.529934083245e-09 1.5143429600167e-09
1.4995823826949e-09 1.4849049298491e-09 1.4708409809575e-09 1.4582003638765e-09
1.4467066910144e-09 1.436174986622e-09 1.4255727062234e-09 1.4172379086645e-09
1.4069955336653e-09 1.3954832645389e-09 1.3836523274756e-09 1.3716408311073e-09
1.3610117828416e-09 1.3516860214256e-09 1.3429419659815e-09 1.3347771326837e-09
1.3266363668294e-09 1.3181265917714e-09 1.3092308744738e-09 1.300256419234e-09
1.2921598168284e-09 1.2855338881471e-09 1.2794713625227e-09 1.2723961947777e-09
1.2636751544978e-09 1.2564525518089e-09 1.2513238282199e-09 1.2460525563975e-09
1.2400751464244e-09 1.23344199261e-09 1.2258115943727e-09 1.2179436703335e-09
1.2116240952697e-09 1.2066951931834e-09 1.2017815683392e-09 1.1967185657989e-09
1.1923135511124e-09 1.1879274508499e-09 1.1826200359528e-09 1.1774484192462e-09
1.1740410844392e-09 1.1711345528498e-09 1.167908317281e-09 1.1640301433115e-09
1.1585498467261e-09 1.1505352074115e-09 1.1432911891486e-09 1.1394802342691e-09
1.1368898976357e-09 1.1341139384359e-09 1.1304512750172e-09 1.1266280443785e-09
1.1230267904828e-09 1.1182278221323e-09 1.1116553252675e-09 1.1055172587487e-09
1.0996737836408e-09 1.0902853126611e-09 1.0659459807635e-09 1.0487081087696e-09
1.0477807243752e-09 1.0471394386214e-09 1.0464536169042e-09 1.0459102420708e-09
1.0455056507023e-09 1.0451431106882e-09 1.0448638448238e-09 1.0446859741017e-09
1.0445428271052e-09 1.0443822634531e-09 1.0441747835589e-09 1.0439061289301e-09
1.043602699911e-09 1.0433405060282e-09 1.0431559844174e-09 1.043014775451e-09
1.0428794989586e-09 1.0427398078634e-09 1.0426068603525e-09 1.04248734708e-09
1.0423701846071e-09 1.0422409597453e-09 1.0420969828139e-09 1.041950903737e-09
1.0418145181536e-09 1.0416875807324e-09 1.0415730589762e-09 1.0414793150468e-09
1.0414039472142e-09 1.0413367125446e-09 1.0412704499927e-09 1.0412030940981e-09
1.0411349527709e-09 1.0410655396309e-09 1.0409925138836e-09 1.0409133689239e-09
1.0408282471327e-09 1.0407411440368e-09 1.0406564373554e-09 1.0405731790657e-09
1.0404848907707e-09 1.0403862730854e-09 1.0402832008496e-09 1.0401941896626e-09
1.0401307368743e-09 1.0400869745031e-09 1.0400525820338e-09 1.0400210477694e-09
1.0399892805102e-09 1.0399558508884e-09 1.0399199977002e-09 1.0398812465322e-09
1.0398393624188e-09 1.0397944762194e-09 1.0397471952364e-09 1.0396984287026e-09
1.0396488524332e-09 1.039598463694e-09 1.0395467925323e-09 1.0394937323087e-09
1.0394403825014e-09 1.0393890753726e-09 1.039342182206e-09 1.0393006752476e-09
1.0392638145223e-09 1.0392298793507e-09 1.039196975187e-09 1.0391634433476e-09
1.0391280278453e-09 1.0390900721174e-09 1.039049859107e-09 1.0390088647735e-09
1.0389693069998e-09 1.0389328384846e-09 1.0388995469546e-09 1.0388682340057e-09
1.0388372961213e-09 1.038805274111e-09 1.0387709469291e-09 1.0387332397567e-09
1.0386912199517e-09 1.0386444675058e-09 1.0385939808966e-09 1.0385429709636e-09
1.0384958035213e-09 1.0384550472041e-09 1.0384200425543e-09 1.0383883041328e-09
1.0383573090261e-09 1.0383253290148e-09 1.0382918273799e-09 1.0382578535178e-09
1.0382257269036e-09 1.0381973363971e-09 1.0381727615707e-09 1.0381508062397e-09
1.0381301235344e-09 1.0381097048659e-09 1.0380888936033e-09 1.0380672952743e-09
1.0380447226067e-09 1.0380211824142e-09 1.0379968374833e-09 1.0379718636619e-09
1.0379462261907e-09 1.0379195347229e-09 1.0378910848993e-09 1.0378600409818e-09
1.0378257211786e-09 1.0377880230448e-09 1.0377479804267e-09 1.0377080743946e-09
1.0376715262605e-09 1.0376405486941e-09 1.0376152179085e-09 1.0375940957965e-09
1.0375754757727e-09 1.0375580440651e-09 1.0375409572864e-09 1.0375237097187e-09
1.0375059954973e-09 1.0374876187226e-09 1.0374684389121e-09 1.0374483415008e-09
1.0374272357193e-09 1.0374050921292e-09 1.0373820225799e-09 1.0373583704401e-09
1.0373347215854e-09 1.037311745003e-09 1.0372898986536e-09 1.037269231499e-09
1.0372494539511e-09 1.0372301597998e-09 1.0372109952878e-09 1.0371916957502e-09
1.0371720269948e-09 1.0371517080119e-09 1.0371303789195e-09 1.037107637791e-09
1.0370831459929e-09 1.0370568056044e-09 1.0370289819306e-09 1.0370006288666e-09
1.0369730962288e-09 1.0369476165396e-09 1.0369248342962e-09 1.0369047082838e-09
1.036886742832e-09 1.0368702946925e-09 1.0368547758594e-09 1.0368397245351e-09
1.0368248081472e-09 1.0368097996398e-09 1.0367945439071e-09 1.0367789287336e-09
1.0367628613578e-09 1.0367462497225e-09 1.0367289824577e-09 1.0367109182356e-09
1.0366918848006e-09 1.0366716911389e-09 1.0366501561919e-09 1.0366271606873e-09
1.0366027319263e-09 1.0365771617933e-09 1.0365510963476e-09 1.0365254312819e-09
1.0365009223187e-09 1.0364777912982e-09 1.0364557109478e-09 1.0364341089167e-09
1.0364124747587e-09 1.0363905166828e-09 1.0363681708729e-09 1.0363454841554e-09
1.0363224223017e-09 1.036298723604e-09 1.0362738823553e-09 1.0362472435157e-09
1.0362181985426e-09 1.0361865811425e-09 1.0361532921593e-09 1.0361205656618e-09
1.0360908465931e-09 1.0360650460097e-09 1.0360424092944e-09 1.0360216874625e-09
1.0360019333453e-09 1.0359826373602e-09 1.0359636076569e-09 1.0359448324574e-09
1.0359263678007e-09 1.0359082601488e-09 1.0358905109669e-09 1.0358730785807e-09
1.0358558996429e-09 1.0358389078792e-09 1.0358220400691e-09 1.0358052328465e-09
1.0357884185614e-09 1.0357715246574e-09 1.0357544767132e-09 1.0357372029922e-09
1.0357196390016e-09 1.035701731243e-09 1.035683439971e-09 1.035664738469e-09
1.0356456069237e-09 1.0356260177565e-09 1.0356059143492e-09 1.0355851980005e-09
1.0355637422443e-09 1.0355414348467e-09 1.0355182321944e-09 1.0354942058343e-09
1.0354695647512e-09 1.0354446504523e-09 1.0354199168121e-09 1.0353958649977e-09
1.0353728794275e-09 1.0353510414431e-09 1.0353301024691e-09 1.035309636478e-09
1.0352892171664e-09 1.0352685225866e-09 1.0352473776565e-09 1.0352257799459e-09
1.0352039174861e-09 1.0351821325253e-09 1.0351608008884e-09 1.0351401756955e-09
1.035120302523e-09 1.035101053751e-09 1.0350822241364e-09 1.0350636114873e-09
1.0350450558463e-09 1.0350264484102e-09 1.035007727846e-09 1.0349888745476e-09
1.0349699058096e-09 1.0349508700817e-09 1.0349318372311e-09 1.0349128824518e-09
1.0348940694837e-09 1.0348754391461e-09 1.0348570064486e-09 1.0348387657359e-09
1.0348206988352e-09 1.0348027819642e-09 1.03478499007e-09 1.0347672991086e-09
1.0347496870837e-09 1.0347321343617e-09 1.0347146234928e-09 1.0346971386676e-09
1.0346796649449e-09 1.0346621873688e-09 1.0346446900788e-09
DataSetFinish
DataSetStart
DataSetName, coss_vds
MeasurementType, LCR_TABLE
BatchName, opt_ex25
WaferName, TCAD
DieName, TCAD
DeviceName, nmos_1
Temperature, 26.85
FabDate, 25 Jul 2024
UserDate, 25 Jul 2024
Attribute, W, 1.5
Attribute, L, 1.2e-06
NodeNames, source gate drain
LCRSource, drain, gate source, 100000, V, 0
LCRTarget, CP
Sweep, 1, V_LCR, LIST
List, 1
1e-06 0.2 0.4 0.6
0.8 1 1.2 1.4
1.6 1.8 2 2.2
2.4 2.6 2.8 3
3.2 3.4 3.6 3.8
4 4.2 4.4 4.6
4.8 5 5.2 5.4
5.6 5.8 6 6.2
6.4 6.6 6.8 7
7.2 7.4 7.6 7.8
8 8.2 8.4 8.6
8.8 9 9.2 9.4
9.6 9.8 10 10.2
10.4 10.6 10.8 11
11.2 11.4 11.6 11.8
12 12.2 12.4 12.6
12.8 13 13.2 13.4
13.6 13.8 14 14.2
14.4 14.6 14.8 15
15.2 15.4 15.6 15.8
16 16.2 16.4 16.6
16.8 17 17.2 17.4
17.6 17.8 18 18.2
18.4 18.6 18.8 19
19.2 19.4 19.6 19.8
20 20.2 20.4 20.6
20.8 21 21.2 21.4
21.6 21.8 22 22.2
22.4 22.6 22.8 23
23.2 23.4 23.6 23.8
24 24.2 24.4 24.6
24.8 25 25.2 25.4
25.6 25.8 26 26.2
26.4 26.6 26.8 27
27.2 27.4 27.6 27.8
28 28.2 28.4 28.6
28.8 29 29.2 29.4
29.6 29.8 30 30.2
30.4 30.6 30.8 31
31.2 31.4 31.6 31.8
32 32.2 32.4 32.6
32.8 33 33.2 33.4
33.6 33.8 34 34.2
34.4 34.6 34.8 35
35.2 35.4 35.6 35.8
36 36.2 36.4 36.6
36.8 37 37.2 37.4
37.6 37.8 38 38.2
38.4 38.6 38.8 39
39.2 39.4 39.6 39.8
40 40.2 40.4 40.6
40.8 41 41.2 41.4
41.6 41.8 42 42.2
42.4 42.6 42.8 43
43.2 43.4 43.6 43.8
44 44.2 44.4 44.6
44.8 45 45.2 45.4
45.6 45.8 46 46.2
46.4 46.6 46.8 47
47.2 47.4 47.6 47.8
48 48.2 48.4 48.6
48.8 49 49.2 49.4
49.6 49.8 50 50.2
50.4 50.6 50.8 51
51.2 51.4 51.6 51.8
52 52.2 52.4 52.6
52.8 53 53.2 53.4
53.6 53.8 54 54.2
54.4 54.6 54.8 55
55.2 55.4 55.6 55.8
56 56.2 56.4 56.6
56.8 57 57.2 57.4
57.6 57.8 58 58.2
58.4 58.6 58.8 59
59.2 59.4 59.6 59.8
60 60.2 60.4 60.6
60.8 61 61.2 61.4
61.6 61.8 62 62.2
62.4 62.6 62.8 63
63.2 63.4 63.6 63.8
64 64.2 64.4 64.6
64.8 65 65.2 65.4
65.6 65.8 66 66.2
66.4 66.6 66.8 67
67.2 67.4 67.6 67.8
68 68.2 68.4 68.6
68.8 69 69.2 69.4
69.6 69.8 70
Sweep, 2, V, gate source, LIST, 0.1, 0
List, 2
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0
Function, coss, CP
Function, vdrain, Vgate_source + V_LCR
Function, cossd, derivative (vdrain, CP)
Plot, coss, XY (LIN LIN), vdrain, coss
DataArray, CP
2.1485793623996e-09 2.1066981836499e-09 2.0680745772262e-09 2.0316720886398e-09
1.9972091731443e-09 1.9642031468999e-09 1.9325162148369e-09 1.9018996627794e-09
1.8718887835407e-09 1.8422011646856e-09 1.8125107190533e-09 1.7826131020119e-09
1.7522362214479e-09 1.7211196178081e-09 1.6890555086375e-09 1.655765437547e-09
1.6208888181865e-09 1.5839358344074e-09 1.5445444729977e-09 1.5033039792959e-09
1.461089406852e-09 1.4176776153554e-09 1.3738676186552e-09 1.3235254871824e-09
1.2748442712751e-09 1.2368961891776e-09 1.2037546261499e-09 1.1730281897785e-09
1.1454591629591e-09 1.1194241256892e-09 1.0942856985757e-09 1.071279341181e-09
1.049441119898e-09 1.0270881331188e-09 1.0051462533487e-09 9.8578106187624e-10
9.6818035122225e-10 9.5157290234109e-10 9.3512069428239e-10 9.2090124786518e-10
9.0454594896371e-10 8.8698009601288e-10 8.6887210221917e-10 8.4997563581693e-10
8.3285072624364e-10 8.1773156601878e-10 8.0347959032235e-10 7.903395097154e-10
7.7748026310554e-10 7.6403819472471e-10 7.5008285979979e-10 7.3610921411619e-10
7.2315236270452e-10 7.1208447012957e-10 7.017381190091e-10 6.8984884821259e-10
6.7553469810547e-10 6.6379491979389e-10 6.5532089511184e-10 6.4660300123894e-10
6.3692263542835e-10 6.2648491932351e-10 6.1452930575667e-10 6.019407566818e-10
5.9157072906639e-10 5.8341358829975e-10 5.7530690087621e-10 5.6691786040168e-10
5.5947529221155e-10 5.5186120126215e-10 5.4262503543039e-10 5.3357085948146e-10
5.2717701857432e-10 5.2154820487331e-10 5.1564178847328e-10 5.0908633184197e-10
5.0034963263214e-10 4.8785032947689e-10 4.7637872663684e-10 4.6997729009661e-10
4.6523197490529e-10 4.5998204363906e-10 4.532432834159e-10 4.462670548732e-10
4.3981620639669e-10 4.318242066707e-10 4.2130851640844e-10 4.1098888850912e-10
4.0017346117459e-10 3.8297691854972e-10 3.4057296569739e-10 3.090620620341e-10
3.0514674150227e-10 3.0171644684578e-10 2.9795376018734e-10 2.9469685325362e-10
2.9201654412536e-10 2.8954786062904e-10 2.8747668132167e-10 2.8586420317539e-10
2.8438416936642e-10 2.8277632532011e-10 2.8088613769e-10 2.7863714349963e-10
2.7618091124928e-10 2.7396729759739e-10 2.7223705032101e-10 2.7080901545297e-10
2.6946179634656e-10 2.6812104206292e-10 2.6683712694346e-10 2.6563510673174e-10
2.6443317339255e-10 2.6312860952367e-10 2.6169853474236e-10 2.6022958131856e-10
2.5879968206818e-10 2.5739388249567e-10 2.5601932059214e-10 2.5473456784933e-10
2.5354330663127e-10 2.5240654818793e-10 2.5130518779254e-10 2.5024392424383e-10
2.4922761921002e-10 2.4823960397143e-10 2.4724081046089e-10 2.461930575015e-10
2.4508913772978e-10 2.4396240530985e-10 2.4285040701127e-10 2.417419646906e-10
2.4057838362173e-10 2.3931574439271e-10 2.3801200360818e-10 2.3683599035888e-10
2.358914959117e-10 2.3512616502493e-10 2.3444885080115e-10 2.3380632355935e-10
2.3317892724752e-10 2.3256023902096e-10 2.3194454580578e-10 2.3132310836445e-10
2.306853707272e-10 2.3002205931056e-10 2.2932790994298e-10 2.2860140752598e-10
2.2784083775252e-10 2.2704097859204e-10 2.2619556421492e-10 2.2530449864283e-10
2.2438008016266e-10 2.2344606308399e-10 2.2252750738268e-10 2.2164058456571e-10
2.2079322782726e-10 2.1999137009377e-10 2.1923881336343e-10 2.1853240620834e-10
2.1786253689938e-10 2.1722007420427e-10 2.1660385214924e-10 2.1602385164121e-10
2.1549564454526e-10 2.1502657968735e-10 2.1460634071906e-10 2.1421126150598e-10
2.1381450406196e-10 2.1339205695324e-10 2.1292346947161e-10 2.1239047459037e-10
2.1177693804409e-10 2.1107394324785e-10 2.1029232329742e-10 2.0947407929447e-10
2.0867887346659e-10 2.0794398976722e-10 2.0726440921223e-10 2.0661279586794e-10
2.0596547730753e-10 2.0531260963599e-10 2.0465789965584e-10 2.0401717520437e-10
2.0341283187813e-10 2.0285650002248e-10 2.0233645800743e-10 2.0182687751968e-10
2.0130408240363e-10 2.007556824156e-10 2.0018317201079e-10 1.9959976987658e-10
1.9902396265741e-10 1.9847188233251e-10 1.9795248595317e-10 1.9746569232536e-10
1.9700168094374e-10 1.9654189246159e-10 1.9606284145125e-10 1.955417603352e-10
1.9496298383308e-10 1.9432543770955e-10 1.9365056314858e-10 1.9298443276649e-10
1.9238294545495e-10 1.9188177940463e-10 1.914788047357e-10 1.9114638126175e-10
1.9085378036714e-10 1.9057892374363e-10 1.9030897861554e-10 1.9003661024973e-10
1.8975648396188e-10 1.8946365286539e-10 1.8915354721269e-10 1.8882266704628e-10
1.8846946708089e-10 1.8809532117414e-10 1.877053169961e-10 1.8730826029333e-10
1.8691510082581e-10 1.8653537934881e-10 1.8617301260435e-10 1.8582473104333e-10
1.8548286830269e-10 1.8513997944217e-10 1.8479164139093e-10 1.8443595662539e-10
1.8407066559468e-10 1.8369025026125e-10 1.8328522112345e-10 1.8284400108092e-10
1.8235644649342e-10 1.8181808187565e-10 1.8123419707378e-10 1.8062181008811e-10
1.8000682088896e-10 1.79416990307e-10 1.7887585695613e-10 1.7840045054435e-10
1.7799996281789e-10 1.776734370458e-10 1.7740959511506e-10 1.7719100765831e-10
1.7699978116927e-10 1.7682127343987e-10 1.7664517682281e-10 1.7646496514157e-10
1.7627662167361e-10 1.7607714399778e-10 1.7586320557173e-10 1.7563036820356e-10
1.7537309530275e-10 1.7508555219747e-10 1.7476299837504e-10 1.7440352423712e-10
1.740099581335e-10 1.735918609407e-10 1.7316663775385e-10 1.7275647265213e-10
1.7237909031882e-10 1.7203889834726e-10 1.7172753311068e-10 1.7143191210491e-10
1.7114148751177e-10 1.7085102363768e-10 1.705598487051e-10 1.7026910090569e-10
1.6997824821032e-10 1.6968252824872e-10 1.693723236208e-10 1.6903427985793e-10
1.686545832922e-10 1.6822664688377e-10 1.6776371711551e-10 1.6730487209849e-10
1.6689429610769e-10 1.6654821047755e-10 1.6625239836732e-10 1.659846733105e-10
1.6572972638331e-10 1.654806311814e-10 1.6523554692616e-10 1.6499467455906e-10
1.6475830516482e-10 1.6452571714866e-10 1.6429499742461e-10 1.6406375429322e-10
1.6383009609889e-10 1.6359309029115e-10 1.6335241562039e-10 1.6310754722378e-10
1.6285706150083e-10 1.6259844341624e-10 1.6232842961611e-10 1.6204371794316e-10
1.6174184224452e-10 1.6142204505114e-10 1.6108603844151e-10 1.6073852797913e-10
1.603870122449e-10 1.6003992167824e-10 1.5970298358935e-10 1.5937597633895e-10
1.5905267967639e-10 1.5872420376916e-10 1.5838340553245e-10 1.580282475221e-10
1.5766320471951e-10 1.5729872752624e-10 1.5694915473494e-10 1.5662919103464e-10
1.5634905434136e-10 1.5611038796808e-10 1.5590625408446e-10 1.5572501058297e-10
1.5555458492629e-10 1.5538507579584e-10 1.5521003345944e-10 1.550272684139e-10
1.5483924473844e-10 1.5465222153747e-10 1.5447348105877e-10 1.5430774392461e-10
1.5415524610611e-10 1.5401258012723e-10 1.5387498880697e-10 1.5373833657171e-10
1.5360006300917e-10 1.5345927196218e-10 1.5331632622891e-10 1.5317230059939e-10
1.5302857320836e-10 1.5288665261825e-10 1.5274811035663e-10 1.5261442641752e-10
1.5248671872026e-10 1.5236550908914e-10 1.5225066632875e-10 1.5214151092512e-10
1.5203696760169e-10 1.5193568650864e-10 1.5183613104731e-10 1.5173666022932e-10
1.5163561521841e-10 1.5153139591751e-10 1.5142250870433e-10 1.5130757734141e-10
1.5118532349662e-10 1.5105453325616e-10 1.5091402888226e-10
DataSetFinish
DataSetStart
DataSetName, crss
MeasurementType, LCR_TABLE
BatchName, opt_ex25
WaferName, TCAD
DieName, TCAD
DeviceName, nmos_1
Temperature, 26.85
FabDate, 25 Jul 2024
UserDate, 25 Jul 2024
Attribute, W, 1.5
Attribute, L, 1.2e-06
NodeNames, source gate drain
LCRSource, drain, gate, 100000, V, 0
LCRTarget, CP
Sweep, 1, V_LCR, LIST
List, 1
1e-06 0.2 0.4 0.6
0.8 1 1.2 1.4
1.6 1.8 2 2.2
2.4 2.6 2.8 3
3.2 3.4 3.6 3.8
4 4.2 4.4 4.6
4.8 5 5.2 5.4
5.6 5.8 6 6.2
6.4 6.6 6.8 7
7.2 7.4 7.6 7.8
8 8.2 8.4 8.6
8.8 9 9.2 9.4
9.6 9.8 10 10.2
10.4 10.6 10.8 11
11.2 11.4 11.6 11.8
12 12.2 12.4 12.6
12.8 13 13.2 13.4
13.6 13.8 14 14.2
14.4 14.6 14.8 15
15.2 15.4 15.6 15.8
16 16.2 16.4 16.6
16.8 17 17.2 17.4
17.6 17.8 18 18.2
18.4 18.6 18.8 19
19.2 19.4 19.6 19.8
20 20.2 20.4 20.6
20.8 21 21.2 21.4
21.6 21.8 22 22.2
22.4 22.6 22.8 23
23.2 23.4 23.6 23.8
24 24.2 24.4 24.6
24.8 25 25.2 25.4
25.6 25.8 26 26.2
26.4 26.6 26.8 27
27.2 27.4 27.6 27.8
28 28.2 28.4 28.6
28.8 29 29.2 29.4
29.6 29.8 30 30.2
30.4 30.6 30.8 31
31.2 31.4 31.6 31.8
32 32.2 32.4 32.6
32.8 33 33.2 33.4
33.6 33.8 34 34.2
34.4 34.6 34.8 35
35.2 35.4 35.6 35.8
36 36.2 36.4 36.6
36.8 37 37.2 37.4
37.6 37.8 38 38.2
38.4 38.6 38.8 39
39.2 39.4 39.6 39.8
40 40.2 40.4 40.6
40.8 41 41.2 41.4
41.6 41.8 42 42.2
42.4 42.6 42.8 43
43.2 43.4 43.6 43.8
44 44.2 44.4 44.6
44.8 45 45.2 45.4
45.6 45.8 46 46.2
46.4 46.6 46.8 47
47.2 47.4 47.6 47.8
48 48.2 48.4 48.6
48.8 49 49.2 49.4
49.6 49.8 50 50.2
50.4 50.6 50.8 51
51.2 51.4 51.6 51.8
52 52.2 52.4 52.6
52.8 53 53.2 53.4
53.6 53.8 54 54.2
54.4 54.6 54.8 55
55.2 55.4 55.6 55.8
56 56.2 56.4 56.6
56.8 57 57.2 57.4
57.6 57.8 58 58.2
58.4 58.6 58.8 59
59.2 59.4 59.6 59.8
60 60.2 60.4 60.6
60.8 61 61.2 61.4
61.6 61.8 62 62.2
62.4 62.6 62.8 63
63.2 63.4 63.6 63.8
64 64.2 64.4 64.6
64.8 65 65.2 65.4
65.6 65.8 66 66.2
66.4 66.6 66.8 67
67.2 67.4 67.6 67.8
68 68.2 68.4 68.6
68.8 69 69.2 69.4
69.6 69.8 70
Sweep, 2, V, source, LIST, 0.1, 0
List, 2
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0
Sweep, 3, V, gate, LIST, 0.1, 0
List, 3
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0
Function, crss, CP
Function, vdrain, Vgate + V_LCR
Function, crssd, derivative (vdrain, CP)
Plot, crss, XY (LIN LIN), vdrain, crss
DataArray, CP
1.2552761173847e-09 1.2431950184122e-09 1.2315836591232e-09 1.2200765347707e-09
1.2086304060246e-09 1.1970008381915e-09 1.1850854528239e-09 1.1727663281432e-09
1.1598619062629e-09 1.1463143413022e-09 1.1319907789296e-09 1.1167687213653e-09
1.1004352550819e-09 1.0827484676619e-09 1.0635031397815e-09 1.0424731767865e-09
1.0193636853457e-09 9.9373930646018e-10 9.6524092223695e-10 9.3446173994535e-10
9.022795615073e-10 8.6830668195525e-10 8.3341533617782e-10 7.9165188289991e-10
7.511583180509e-10 7.2080232827071e-10 6.9507671141578e-10 6.7196810140734e-10
6.515237570485e-10 6.3224164978406e-10 6.1353401283552e-10 5.9626305188761e-10
5.7984908435685e-10 5.6319947217308e-10 5.4703812518166e-10 5.327090510155e-10
5.1972435968486e-10 5.0771033303434e-10 4.9575233235052e-10 4.8607674278155e-10
4.7440114025797e-10 4.6148508452432e-10 4.4816115252285e-10 4.3439730332838e-10
4.2214465484651e-10 4.1139075838328e-10 4.0122178947931e-10 3.9177266633398e-10
3.8242295831305e-10 3.7262802184684e-10 3.6241488617486e-10 3.5216302984288e-10
3.4288521318612e-10 3.3529561259173e-10 3.2833699048065e-10 3.2009519477844e-10
3.0981209483686e-10 3.0144621440674e-10 2.9565340934432e-10 2.8964407082913e-10
2.8278200073112e-10 2.7518207081473e-10 2.6634001091593e-10 2.5709037790722e-10
2.496641968129e-10 2.4394107541793e-10 2.3821403003731e-10 2.322638907471e-10
2.2709399821718e-10 2.2186272274738e-10 2.1540583758747e-10 2.0910243527964e-10
2.0496045916199e-10 2.0143246374449e-10 1.9758175732509e-10 1.9304664009178e-10
1.8662361753412e-10 1.7710112569127e-10 1.6845285424961e-10 1.6395314932221e-10
1.6085730849634e-10 1.5742612477496e-10 1.5283243823778e-10 1.4803441592904e-10
1.4358020437333e-10 1.3776294632653e-10 1.2984180272246e-10 1.2229391712211e-10
1.1475920212332e-10 1.0247787100523e-10 7.0781667434138e-11 4.7882765180946e-11
4.6193447889025e-11 4.4896022939415e-11 4.3474927180755e-11 4.2324161333718e-11
4.1453744187119e-11 4.0673432638567e-11 4.0071345478959e-11 3.9683586488444e-11
3.9365378400329e-11 3.9001776872846e-11 3.8525059026875e-11 3.7900566580357e-11
3.7189164802846e-11 3.6573293264565e-11 3.6144769009399e-11 3.5823524937057e-11
3.5518785965719e-11 3.5203875687161e-11 3.4904341042252e-11 3.4635118493264e-11
3.4367463956967e-11 3.406421627651e-11 3.3718833521186e-11 3.3365910730589e-11
3.3037351986849e-11 3.2731259399376e-11 3.2453152076613e-11 3.2223700392624e-11
3.2037007305189e-11 3.1867531170289e-11 3.1698098771086e-11 3.1524954359473e-11
3.1350079198991e-11 3.117206847365e-11 3.0983392968838e-11 3.0776152710924e-11
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DataSetFinish
DataSetStart
DataSetName, idvd
MeasurementType, DC
BatchName, opt_ex25
WaferName, TCAD
DieName, TCAD
DeviceName, nmos_1
Temperature, 26.85
FabDate, 25 Jul 2024
UserDate, 25 Jul 2024
Attribute, W, 1.5
Attribute, L, 1.2e-06
NodeNames, source gate drain
Sweep, 1, V, drain, LIST, 0.1, 0
List, 1
0 0.5 1 1.5
2 2.5 3 3.5
4 4.5 5 5.5
6 6.5 7 7.5
8 8.5 9 9.5
10 10.5 11 11.5
12 12.5 13 13.5
14 14.5 15 15.5
16 16.5 17 17.5
18 18.5 19 19.5
20 20.5 21 21.5
22 22.5 23 23.5
24 24.5 25 25.5
26 26.5 27 27.5
28 28.5 29 29.5
30 30.5 31 31.5
32 32.5 33 33.5
34 34.5 35 35.5
36 36.5 37 37.5
38 38.5 39 39.5
40
Sweep, 2, V, gate, LIST, 0.1, 0
List, 2
2 4 6 8
10 12 14 16
18 20
Constant, V, source, 0, 0.1, 0
Target, I, drain
Target, I, source
Target, I, gate
Function, gds, derivative (vdrain, idrain)
Plot, idvd, XY (LIN LIN), vdrain, idrain
Plot, gds, XY (LIN LOG), vdrain, gds
DataArray, idrain
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DataSetFinish
DataSetStart
DataSetName, idvglin
MeasurementType, DC
BatchName, opt_ex25
WaferName, TCAD
DieName, TCAD
DeviceName, nmos_1
Temperature, 26.85
FabDate, 25 Jul 2024
UserDate, 25 Jul 2024
Attribute, W, 1.5
Attribute, L, 1.2e-06
NodeNames, source gate drain
Sweep, 1, V, gate, LIST, 0.1, 0
List, 1
0 0.25 0.5 0.75
1 1.25 1.5 1.75
2 2.25 2.5 2.75
3 3.25 3.5 3.75
4 4.25 4.5 4.75
5 5.25 5.5 5.75
6 6.25 6.5 6.75
7 7.25 7.5 7.75
8 8.25 8.5 8.75
9 9.25 9.5 9.75
10 10.25 10.5 10.75
11 11.25 11.5 11.75
12 12.25 12.5 12.75
13 13.25 13.5 13.75
14 14.25 14.5 14.75
15 15.25 15.5 15.75
16 16.25 16.5 16.75
17 17.25 17.5 17.75
18 18.25 18.5 18.75
19 19.25 19.5 19.75
20
Sweep, 2, V, drain, LIST, 0.1, 0
List, 2
0.1
Constant, V, source, 0, 0.1, 0
Target, I, drain
Target, I, source
Target, I, gate
Function, gm, derivative (vgate, idrain)
Plot, idvg, XY (LIN LIN), vgate, idrain
Plot, gm, XY (LIN LIN), vgate, gm
DataArray, idrain
4.453055068563e-16 4.4848089169703e-16 5.2929537563446e-16 2.5532108289235e-15
5.2178533034397e-14 1.2410129703015e-12 2.8745551393299e-11 6.3414245398087e-10
1.3101442033253e-08 2.4748520310025e-07 4.1043914491998e-06 5.6033082184068e-05
0.00058111331211228 0.0042177135802606 0.019878415418403 0.059500964459741
0.1212100539159 0.19352521041444 0.26850420579461 0.34253128577034
0.41434906204638 0.48363136484144 0.55033252595591 0.61446313268101
0.67603140684751 0.73503801704884 0.79148328084012 0.84537530802469
0.89673509065357 0.94559882161819 0.99201785250637 1.0360573119305
1.0777940143383 1.1173138052643 1.1547092993481 1.1900777010989
1.2235178473053 1.2551297940303 1.2850125465428 1.3132631784686
1.3399759334819 1.3652416553821 1.3891473166601 1.4117757664199
1.4332055591276 1.4535109275643 1.4727618488845 1.4910240422129
1.5083591443648 1.5248248646886 1.540475164348 1.555360437817
1.5695277346271 1.583020930678 1.5958809432961 1.6081458479127
1.6198512315961 1.6310302346521 1.6417137293832 1.6519304937093
1.6617073590847 1.6710693453429 1.6800397893331 1.6886405061789
1.6968918392932 1.7048127994149 1.7124211554525 1.7197335245981
1.7267654553549 1.7335315048513 1.7400453059902 1.7463196397935
1.7523665007163 1.7581971410126 1.763822123922 1.7692513823631
1.7744942519147 1.7795595158851 1.7844554430428 1.7891898230027
1.7937699977455
DataArray, igate
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0
DataArray, isource
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-5.2178529865675e-14 -1.2410129666626e-12 -2.8745551390453e-11 -6.3414245397758e-10
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DataSetFinish
DataSetStart
DataSetName, idvgsat
MeasurementType, DC
BatchName, opt_ex25
WaferName, TCAD
DieName, TCAD
DeviceName, nmos_1
Temperature, 26.85
FabDate, 25 Jul 2024
UserDate, 25 Jul 2024
Attribute, W, 1.5
Attribute, L, 1.2e-06
NodeNames, source gate drain
Sweep, 1, V, gate, LIST, 0.1, 0
List, 1
0 0.25 0.5 0.75
1 1.25 1.5 1.75
2 2.25 2.5 2.75
3 3.25 3.5 3.75
4 4.25 4.5 4.75
5 5.25 5.5 5.75
6 6.25 6.5 6.75
7 7.25 7.5 7.75
8 8.25 8.5 8.75
9 9.25 9.5 9.75
10 10.25 10.5 10.75
11 11.25 11.5 11.75
12 12.25 12.5 12.75
13 13.25 13.5 13.75
14 14.25 14.5 14.75
15 15.25 15.5 15.75
16 16.25 16.5 16.75
17 17.25 17.5 17.75
18 18.25 18.5 18.75
19 19.25 19.5 19.75
20
Sweep, 2, V, drain, LIST, 0.1, 0
List, 2
20
Constant, V, source, 0, 0.1, 0
Target, I, drain
Target, I, source
Target, I, gate
Function, gm, derivative (vgate, idrain)
Plot, idvg, XY (LIN LIN), vgate, idrain
Plot, gm, XY (LIN LIN), vgate, gm
DataArray, idrain
2.1340357348615e-15 2.1471687232804e-15 2.6798167433834e-15 1.9138205273669e-14
4.9562408161692e-13 1.3962458909815e-11 3.812339430663e-10 9.8957557472134e-09
2.3881729870493e-07 5.1394063665024e-06 9.1331486792433e-05 0.0012043954955602
0.010588300010384 0.057633401592411 0.19727607508004 0.47613791048301
0.91735707225861 1.5314987943907 2.3246601782989 3.3013706818449
4.4657320907414 5.8217838392703 7.373528035062 9.1247644626286
11.079311125537 13.240682815212 15.611736130645 18.195383887531
20.993931551477 24.009209792558 27.242494292992 30.694476148745
34.365532328798 38.254622657229 42.361192445763 46.683659281444
51.218698157577 55.961678819932 60.906295083818 66.04484364085
71.365243037324 76.841729356444 82.46509555465 88.243041510419
94.172375951645 100.24415735422 106.44614150539 112.76342168305
119.17777630875 125.6657439942 132.20382289129 138.76303418723
145.31271601809 151.81731164291 158.23726484129 164.5339304421
170.66908760749 176.60732139201 182.31599362586 187.76759734774
192.94286879334 197.82961860598 202.42263863692 206.72177983967
210.73307320094 214.46728109905 217.94030936576 221.16966614955
224.17362492352 226.9706521216 229.57826034872 232.01218655094
234.28851415369 236.42100684415 238.42239207001 240.30415828812
242.07652061516 243.74830930641 245.32733540482 246.82168305278
248.23782045775
DataArray, igate
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0 0 0 0
0
DataArray, isource
-2.1340357279444e-15 -2.1471659883809e-15 -2.6798141844433e-15 -1.9138202439406e-14
-4.9562407890744e-13 -1.3962458906777e-11 -3.8123394306273e-10 -9.8957557472104e-09
-2.3881729870492e-07 -5.1394063665024e-06 -9.1331486792433e-05 -0.0012043954955602
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DataSetFinish
DataSetStart
DataSetName, body_d
MeasurementType, DC
BatchName, opt_ex25
WaferName, TCAD
DieName, TCAD
DeviceName, nmos_1
Temperature, 176.85
FabDate, 25 Jul 2024
UserDate, 25 Jul 2024
Attribute, W, 1.5
Attribute, L, 1.2e-06
NodeNames, source gate drain
Sweep, 1, V, drain, LIST, 0.1, 0
List, 1
0 -0.25 -0.5 -0.75
-1 -1.25 -1.5 -1.75
-2 -2.25 -2.5 -2.75
-3 -3.25 -3.5 -3.75
-4 -4.25 -4.5 -4.75
-5 -5.25 -5.5 -5.75
-6
Sweep, 2, V, gate, LIST, 0.1, 0
List, 2
0
Constant, V, source, 0, 0.1, 0
Target, I, drain
Target, I, source
Target, I, gate
Plot, idvd, XY (LIN LIN), vdrain, idrain
DataArray, idrain
-3.7907576612128e-25 -1.1283840018699e-09 -3.3363201528038e-07 -7.7237512456349e-05
-0.0095129243779514 -0.17219443337176 -0.62354934211007 -1.2703112819494
-2.0436170277428 -2.9086760836578 -3.846172243443 -4.8453926064392
-5.9161475185616 -7.3148723079978 -10.146621632538 -14.887456821654
-20.926196536806 -27.772948571816 -35.16883668905 -42.97243675067
-51.099108774873 -59.492121814553 -68.110891965866 -76.924931270247
-85.910792911627
DataArray, igate
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0
DataArray, isource
1.4685754431682e-23 1.1283840018728e-09 3.3363201528038e-07 7.7237512456357e-05
0.009512924377952 0.17219443338012 0.62354934212251 1.2703112816967
2.0436170332761 2.9086760882488 3.8461722481997 4.8453926114368
5.9161475239925 7.3148723112719 10.146621676485 14.887456933804
20.926196541811 27.772948687168 35.16883669751 42.972436753397
51.099108776952 59.492121856076 68.110891892613 76.924931196142
85.910792797206
DataSetFinish
DataSetStart
DataSetName, idvd
MeasurementType, DC
BatchName, opt_ex25
WaferName, TCAD
DieName, TCAD
DeviceName, nmos_1
Temperature, 176.85
FabDate, 25 Jul 2024
UserDate, 25 Jul 2024
Attribute, W, 1.5
Attribute, L, 1.2e-06
NodeNames, source gate drain
Sweep, 1, V, drain, LIST, 0.1, 0
List, 1
0 0.5 1 1.5
2 2.5 3 3.5
4 4.5 5 5.5
6 6.5 7 7.5
8 8.5 9 9.5
10 10.5 11 11.5
12 12.5 13 13.5
14 14.5 15 15.5
16 16.5 17 17.5
18 18.5 19 19.5
20 20.5 21 21.5
22 22.5 23 23.5
24 24.5 25 25.5
26 26.5 27 27.5
28 28.5 29 29.5
30 30.5 31 31.5
32 32.5 33 33.5
34 34.5 35 35.5
36 36.5 37 37.5
38 38.5 39 39.5
40
Sweep, 2, V, gate, LIST, 0.1, 0
List, 2
2 4 6 8
10 12 14 16
18 20
Constant, V, source, 0, 0.1, 0
Target, I, drain
Target, I, source
Target, I, gate
Function, gds, derivative (vdrain, idrain)
Plot, idvd, XY (LIN LIN), vdrain, idrain
Plot, gds, XY (LIN LOG), vdrain, gds
DataArray, idrain
1.1630062756214e-32 8.5663048050956e-05 0.00011889113012668 0.00014688883441368
0.00017146829862908 0.00019317446162941 0.0002122574295301 0.00022893764840306
0.00024347062208271 0.00025610239330127 0.00026704824588109 0.00027651521506572
0.0002847251152251 0.00029187839336357 0.00029817910540865 0.00030381906542617
0.00030892823732108 0.00031354864855341 0.00031778212753517 0.00032169092071335
0.00032531523391249 0.00032863797978704 0.00033172321449514 0.00033461758637951
0.00033733412834255 0.00033989179707357 0.00034230586786427 0.00034457378398471
0.00034673460304686 0.00034876684802339 0.00035069850576695 0.00035254010450032
0.0003542870872523 0.00035594959499348 0.0003575517007908 0.00035905702795467
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0.00037581051714196 0.00037628185283806 0.00037674871627033 0.00037721077461867
0.0003776683036527 0.00037812220331636 0.00037857323932504 0.00037902160410019
0.00037946730747073 0.0003799105438084 0.00038035127139102 0.00038078881906772
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0.00038292198890687 0.00038334082133703 0.00038375805417795 0.00038417370586958
0.00038458758196285 9.1180240043804e-33 0.87196102121751 1.3158350050108
1.5656687204266 1.7341011181061 1.860355051502 1.9600297622683
2.0405203589339 2.1065982250409 2.1614956901487 2.207525696478
2.2464466163092 2.2795786670282 2.3078890854565 2.3321398530103
2.352940198524 2.3707977847932 2.3861655978464 2.3995540747869
2.4113921306684 2.4219516974845 2.4314755315765 2.4401371604925
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DataSetFinish
DataSetStart
DataSetName, idvglin
MeasurementType, DC
BatchName, opt_ex25
WaferName, TCAD
DieName, TCAD
DeviceName, nmos_1
Temperature, 176.85
FabDate, 25 Jul 2024
UserDate, 25 Jul 2024
Attribute, W, 1.5
Attribute, L, 1.2e-06
NodeNames, source gate drain
Sweep, 1, V, gate, LIST, 0.1, 0
List, 1
0 0.25 0.5 0.75
1 1.25 1.5 1.75
2 2.25 2.5 2.75
3 3.25 3.5 3.75
4 4.25 4.5 4.75
5 5.25 5.5 5.75
6 6.25 6.5 6.75
7 7.25 7.5 7.75
8 8.25 8.5 8.75
9 9.25 9.5 9.75
10 10.25 10.5 10.75
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16 16.25 16.5 16.75
17 17.25 17.5 17.75
18 18.25 18.5 18.75
19 19.25 19.5 19.75
20
Sweep, 2, V, drain, LIST, 0.1, 0
List, 2
0.1
Constant, V, source, 0, 0.1, 0
Target, I, drain
Target, I, source
Target, I, gate
Function, gm, derivative (vgate, idrain)
Plot, idvg, XY (LIN LIN), vgate, idrain
Plot, gm, XY (LIN LIN), vgate, gm
DataArray, idrain
3.2723475950051e-12 2.7575825521189e-11 2.2991331081984e-10 1.8885093280229e-09
1.5216404550336e-08 1.1966162571972e-07 9.1234499377931e-07 6.6780736117507e-06
4.6197519808751e-05 0.00029415856213393 0.0016484691743436 0.0075884318214923
0.026430321671477 0.065740010274137 0.1187058268866 0.17110352410051
0.21614483835058 0.25324044941236 0.2837251416713 0.30906401566724
0.33042694041478 0.34867892327946 0.36445247060135 0.37821540520172
0.39032048358175 0.40103928800671 0.41058521498658 0.41912898813337
0.42680934894762 0.43374059278227 0.44001797616653 0.44572163808806
0.45091962252279 0.45567007957912 0.46002301013548 0.46402163274132
0.4677034768336 0.4711012929526 0.47424374282738 0.47715600499252
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0.50589881836463 0.50687183724149 0.50779821630987 0.50868103836439
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0.5150664502497 0.51563765909484 0.51618675296013 0.51671492941785
0.51722330395888 0.51771291674566 0.51818473865741 0.51863967689346
0.51907857993402 0.51950224173195 0.51991140602866 0.52030677184809
0.52068899453827
DataArray, igate
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0 0 0 0
0 0 0 0
0 0 0 0
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0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0
DataArray, isource
-3.2723475949622e-12 -2.7575825518417e-11 -2.2991331081721e-10 -1.8885093280198e-09
-1.5216404550333e-08 -1.1966162571971e-07 -9.1234499377931e-07 -6.6780736117507e-06
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DataSetFinish
DataSetStart
DataSetName, idvgsat
MeasurementType, DC
BatchName, opt_ex25
WaferName, TCAD
DieName, TCAD
DeviceName, nmos_1
Temperature, 176.85
FabDate, 25 Jul 2024
UserDate, 25 Jul 2024
Attribute, W, 1.5
Attribute, L, 1.2e-06
NodeNames, source gate drain
Sweep, 1, V, gate, LIST, 0.1, 0
List, 1
0 0.25 0.5 0.75
1 1.25 1.5 1.75
2 2.25 2.5 2.75
3 3.25 3.5 3.75
4 4.25 4.5 4.75
5 5.25 5.5 5.75
6 6.25 6.5 6.75
7 7.25 7.5 7.75
8 8.25 8.5 8.75
9 9.25 9.5 9.75
10 10.25 10.5 10.75
11 11.25 11.5 11.75
12 12.25 12.5 12.75
13 13.25 13.5 13.75
14 14.25 14.5 14.75
15 15.25 15.5 15.75
16 16.25 16.5 16.75
17 17.25 17.5 17.75
18 18.25 18.5 18.75
19 19.25 19.5 19.75
20
Sweep, 2, V, drain, LIST, 0.1, 0
List, 2
20
Constant, V, source, 0, 0.1, 0
Target, I, drain
Target, I, source
Target, I, gate
Function, gm, derivative (vgate, idrain)
Plot, idvg, XY (LIN LIN), vgate, idrain
Plot, gm, XY (LIN LIN), vgate, gm
DataArray, idrain
1.158414884125e-11 1.0558626199785e-10 9.5979035425769e-10 8.6722806445035e-09
7.7530608037469e-08 6.8097257673907e-07 5.8181360355703e-06 4.7648960822054e-05
0.00036495881948292 0.0025009133927676 0.014266747578827 0.062395087774598
0.20042887278723 0.48654105673076 0.95816338640046 1.6336177986467
2.5214138452983 3.6262576277629 4.9512190130117 6.4988675904699
8.271455427647 10.270975826057 12.498820589808 14.955687783084
17.641328923514 20.5538869308 23.688872828906 27.037809467879
30.584127245897 34.29477565884 38.132196878487 42.074440206765
46.086230535075 50.115429346881 54.093935953796 57.94068848218
61.569270646497 64.900303207903 67.876322242572 70.474955827548
72.710157732717 74.621232497728 76.256850562366 77.664169385466
78.884510484446 79.951815230436 80.893171866603 81.73001696126
82.479369524459 83.154788751673 83.767163242608 84.325286766208
84.836384282459 85.306430593203 85.740374049818 86.14240191162
86.516056021698 86.864349475965 87.189870557522 87.494854717506
87.781240522509 88.050728226218 88.304805852639 88.54479049424
88.771847341502 88.987011578664 89.191206526255 89.385258426293
89.569919483864 89.745862520968 89.913696115708 90.073966140353
90.227182167015 90.373800704995 90.514234391309 90.648864666837
90.778050332224 90.902112683943 91.021349272454 91.136036857148
91.246425631555
DataArray, igate
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0
DataArray, isource
-1.1584148841209e-11 -1.0558626199528e-10 -9.5979035425522e-10 -8.6722806445009e-09
-7.7530608037467e-08 -6.8097257673906e-07 -5.8181360355703e-06 -4.7648960822053e-05
-0.00036495881948289 -0.0025009133927676 -0.014266747578826 -0.062395087774584
-0.20042887280738 -0.48654105655661 -0.95816338640077 -1.6336177986474
-2.5214138453008 -3.6262576277651 -4.9512190130185 -6.4988675904799
-8.2714554276459 -10.270975826023 -12.498820589808 -14.955687783036
-17.641328923525 -20.553886930793 -23.688872829089 -27.037809467138
-30.584127244524 -34.294775658514 -38.132196858448 -42.07444020685
-46.086230538203 -50.115429389806 -54.093936013474 -57.940688539676
-61.569270672587 -64.900302119456 -67.876321330981 -70.474955085673
-72.710157124667 -74.621231974416 -76.2568501036 -77.66416939646
-78.884510445904 -79.951815208802 -80.893171782623 -81.730016918063
-82.479369534543 -83.154788748524 -83.767163247984 -84.325286772301
-84.83638427412 -85.30643060496 -85.74037232192 -86.142400841379
-86.516055142493 -86.864348754143 -87.189869955165 -87.494854210031
-87.781240096384 -88.050727853804 -88.304805536716 -88.544790219655
-88.771847145425 -88.987011239021 -89.191206418574 -89.385258192001
-89.569919438436 -89.745862354474 -89.913695991588 -90.073966040992
-90.227182066746 -90.373800619734 -90.514234314924 -90.648864597453
-90.77805026846 -90.902112627773 -91.021349220964 -91.136036810152
-91.246425590119
DataSetFinish