Every software package contains a full set of examples suitable for that version and are installed with the software. If you see examples here that are not in your installation you should consider updating to a later version of the software. These examples can be used by beginners and advanced users for product evaluation, teaching purposes, and self-training.
Required Modules
Victory Process
- 3D Oxidation
- 3D Diffusion & Implantation
The oxidation rate of SiC depends on the crystal face. Victory Process offers a calibrated, crystal orientation dependent oxidation model for SiC.
In this example, a half sphere is etched into the surface of a 4H SiC substrate. The surface is then oxidized to demonstrate the functionality in 3D.
2D slices are automatically taken through the 3D structure about the centre point on the xz and yz planes, the oxide thicknesses are then automatically extracted at pertinent locations to demonstrate the variation in thickness with location.
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