Every software package contains a full set of examples suitable for that version and are installed with the software. If you see examples here that are not in your installation you should consider updating to a later version of the software. These examples can be used by beginners and advanced users for product evaluation, teaching purposes, and self-training.

Required Modules

Victory Process

• 2D Oxidation

The material characteristics of commonly used materials are well characterized and available.

Niche processes and novel materials can sometimes prove to be challenging to simulate from a process point of view due to a lack of stable material data.

Victory Process provides well calibrated default material characteristics for many common materials. In addition, through the material library, these material characteristics can be re-calibrated or completely new materials can be defined.

This example shows how an arbitrary material can be used and oxidized.

Three arbitrary materials are deposited, they are called my_material_1, my_material_2 and my_material_3.

One approach would then be to define all the material characteristics for all three materials. This would be somewhat laborious.

We can consider in this instance that the materials are similar to silicon but with different oxidation rates, so we can simply tell the simulator, using the MATERIAL INHERIT command to apply silicon material characteristics to these arbitrary materials.

We can then target/re-calibrate specific material characteristics. Here we set different oxidation rates for the linear Arrhenius function for the three different materials. The parabolic rates for silicon are included for completeness. The material statements can be access through the Silver material database utility.

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