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opt_ex06 : Gummel-Poon Bipolar Model Extraction

opt_ex06 : Gummel-Poon Bipolar Model Extraction

opt_ex06 : Gummel-Poon Bipolar Model Extraction

Requires: Utmost IV, SmartSpice, SmartView

Minimum Versions: Utmost IV 1.10.6.R, SmartSpice 4.10.2.R, SmartView 2.28.2.R

This example describes how to extract a standard Gummel-Poon model
for a bipolar transistor. To extract the model, typical forward and
reverse operation DC characteristics and reverse bias capacitance
characteristics of each junction are required.

The project file
opt_ex06.prj
and the data file
opt_ex06.uds
for this example should be loaded into your database. When opened, the
project will look as shown in
opt_ex06_01.png
and when plotted, the example measured data will look as shown in
opt_ex06_02.png
.

The optimization sequence, which fully automates the extraction of this
Gummel-Poon bipolar model example, has six sections. The objective of each
section is to isolate a device characteristic and then to optimize only those
model parameters which account for this device behaviour. However, it is
especially true of the bipolar Gummel-Poon model that certain values of the
reverse characteristic parameters will affect the modeling of the forward
operation and vice versa. It may be necessary to repeat the sequence
several times to achieve the best model fit to your data.

The first section optimizes the parameters
IS
,
NR
,
BR
,
ISC
,
NC
,
IKR
,
RBM
and
RC
to model the reverse Gummel data. Following this the parameters
VAR
and
IKR
are optimized to fit to the reverse output characteristics. In the third
section, both of the reverse datasets are included and all of the parameters
again optimized to achieve the best fit to all of the reverse data together.

Since the most important operation of the bipolar transistor is the forward
operation, this will be optimized after the reverse parameters. In this way,
goodness of fit to the reverse characteristics can be sacrificed in order to
achieve a good model in forward operation.

The fourth section optimizes the parameters
IS
,
NF
,
BF
,
ISE
,
NE
,
RE
,
IKF
, and
RBM
to achieve the best fit to the forward Gummel data. Then in the fifth
section the parameters VAF and IKF are optimized to fit to the forward
output characteristics.

In the final section, all three of the bipolar junction capacitances are
optimized at the same time, to extract the
CJE
,
MJE
,
VJE
,
CJC
,
MJC
,
VJC
,
CJS
,
MJS
and
VJS
model parameters.

On completion of the sequence, the measured versus simulated
characteristics should be as shown in
opt_ex06_03.png
. If necessary the entire sequence can be run multiple times in
order to achieve a good fit to the measured data. The model card
can then be exported into an external model library file as shown
in the output file
opt_ex06.lib.

Graphics

opt_ex06_01.png
opt_ex06_02.png
opt_ex06_03.png

Files

opt_ex06.lib

.LIB demo

.MODEL npn NPN (
+LEVEL    = 1              IS       = 1e-16          BF       = 37.9747        
+NF       = 1              BR       = 5.17617        NR       = 1              
+ISE      = 3.37284e-15    NE       = 1.65304        ISC      = 2.21865e-13    
+NC       = 1.35444        VAF      = 63.3792        VAR      = 10.4944        
+IKF      = 0.00182126     IKR      = 0.0001         RB       = 1854.54        
+RBM      = 60.4543        IRB      = 1.21914e-06    RE       = 10             
+RC       = 69.0206        CJE      = 3.59001e-14    VJE      = 0.686403       
+MJE      = 0.313618       FC       = 0.5            CJC      = 5.25001e-14    
+VJC      = 0.551295       MJC      = 0.346841       CJS      = 7.05712e-13    
+VJS      = 0.501668       MJS      = 0.05           TF       = 1e-10          
+XTF      = 1              ITF      = 0.01           VTF      = 5              
+PTF      = 20             TR       = 1e-08          XTB      = 1.5            
+EG       = 1.17           XTI      = 3               )

.ENDL demo

opt_ex06.uds

Utmost IV CSV Data Logfile
Format Version 1
Copyright (c) 1984 - 2016 Silvaco, Inc. All rights reserved

DataSetStart

DataSetName, Cbc
MeasurementType, LCR

BatchName, opt_ex06
WaferName, 1
DieName, 1
GroupName, 1, 0, 12000
DeviceName, npn1
Temperature, 27


FabDate, 23 Apr 2007
UserDate, 23 Apr 2007

WaferDiameter, 200
DieSize, 20, 20

NodeNames, C B E S

LCRSource, B, C, 1e+06, V, 0
LCRTarget, CP
Sweep, 1, V_LCR, LIN, 0.1, -5, -0.1, CALCULATED

Constant, V, E, 0, 0.1, 0.0
Constant, V, C, 0, 0.1, 0.0
Constant, V, S, 0, 0.1, 0.0

Function, VB, VC + V_LCR

Plot, cbc, XY (LIN LIN), VB, CP

DataArray, CP
5.6274e-14     5.25e-14       4.95507e-14    4.71557e-14    4.51556e-14    
4.34492e-14    4.19687e-14    4.06667e-14    3.95087e-14    3.8469e-14     
3.75281e-14    3.66708e-14    3.58848e-14    3.51604e-14    3.44897e-14    
3.38661e-14    3.32841e-14    3.27391e-14    3.22272e-14    3.17451e-14    
3.12898e-14    3.08588e-14    3.04501e-14    3.00615e-14    2.96916e-14    
2.93387e-14    2.90016e-14    2.8679e-14     2.83699e-14    2.80734e-14    
2.77886e-14    2.75146e-14    2.72509e-14    2.69967e-14    2.67515e-14    
2.65147e-14    2.62859e-14    2.60645e-14    2.58502e-14    2.56426e-14    
2.54413e-14    2.5246e-14     2.50564e-14    2.48722e-14    2.46932e-14    
2.4519e-14     2.43496e-14    2.41846e-14    2.40239e-14    2.38672e-14    
2.37144e-14    2.35654e-14    

DataSetFinish

DataSetStart

DataSetName, Cbe
MeasurementType, LCR

BatchName, opt_ex06
WaferName, 1
DieName, 1
GroupName, 1, 0, 12000
DeviceName, npn1
Temperature, 27


FabDate, 23 Apr 2007
UserDate, 23 Apr 2007

WaferDiameter, 200
DieSize, 20, 20

NodeNames, C B E S

LCRSource, E, B, 1e+06, V, 0
LCRTarget, CP
Sweep, 1, V_LCR, LIN, -0.1, 2, 0.1, CALCULATED

Constant, V, C, 0, 0.1, 0.0
Constant, V, B, 0, 0.01, 0.0
Constant, V, S, 0, 0.1, 0.0

Function, VE, VB + V_LCR

Plot, cbe, XY (LIN LIN), VE, CP

DataArray, CP
3.77173e-14    3.59e-14       3.4401e-14     3.31335e-14    3.20411e-14    
3.10853e-14    3.02387e-14    2.94809e-14    2.87968e-14    2.81746e-14    
2.76051e-14    2.70809e-14    2.65961e-14    2.61456e-14    2.57255e-14    
2.53323e-14    2.4963e-14     2.46154e-14    2.42871e-14    2.39764e-14    
2.36818e-14    2.34017e-14    

DataSetFinish

DataSetStart

DataSetName, Ccs
MeasurementType, LCR

BatchName, opt_ex06
WaferName, 1
DieName, 1
GroupName, 1, 0, 12000
DeviceName, npn1
Temperature, 27


FabDate, 23 Apr 2007
UserDate, 23 Apr 2007

WaferDiameter, 200
DieSize, 20, 20

NodeNames, C B E S

LCRSource, C, S, 1e+06, V, 0
LCRTarget, CP
Sweep, 1, V_LCR, LIN, -0.1, 5, 0.1, CALCULATED

Constant, V, E, 0, 0.1, 0.0
Constant, V, B, 0, 0.01, 0.0
Constant, V, S, 0, 0.1, 0.0

Function, VC, VS + V_LCR

Plot, ccs, XY (LIN LIN), VC, CP

DataArray, CP
7.12799e-13    7.05e-13       6.98691e-13    6.93402e-13    6.88852e-13    
6.84863e-13    6.81315e-13    6.78121e-13    6.75218e-13    6.72559e-13    
6.70106e-13    6.67831e-13    6.65709e-13    6.63723e-13    6.61855e-13    
6.60093e-13    6.58426e-13    6.56844e-13    6.55339e-13    6.53905e-13    
6.52534e-13    6.51222e-13    6.49964e-13    6.48756e-13    6.47594e-13    
6.46474e-13    6.45395e-13    6.44352e-13    6.43344e-13    6.42369e-13    
6.41424e-13    6.40508e-13    6.39619e-13    6.38756e-13    6.37917e-13    
6.371e-13      6.36306e-13    6.35531e-13    6.34777e-13    6.34041e-13    
6.33323e-13    6.32621e-13    6.31936e-13    6.31267e-13    6.30612e-13    
6.29971e-13    6.29344e-13    6.2873e-13     6.28128e-13    6.27539e-13    
6.2696e-13     6.26394e-13    

DataSetFinish

DataSetStart

DataSetName, Gummel
MeasurementType, DC

BatchName, opt_ex06
WaferName, 1
DieName, 1
GroupName, 1, 0, 12000
DeviceName, npn1
Temperature, 27


FabDate, 23 Apr 2007
UserDate, 23 Apr 2007

WaferDiameter, 200
DieSize, 20, 20

NodeNames, C B E S

Sweep, 1, V, B, LIN, 0.5, 1, CALCULATED, 51, 0.1

Constant, V, E, 0, 0.1, 0.0
Constant, V, S, 0, 0.1, 0.0
Constant, V, C, 2, 0.1, 0.0

Target, I, B
Target, I, C

Function, beta, IC / IB

Plot, beta, XY (LOG LIN), IC, beta
Plot, gummel, XY (LIN LOG), VB, IC IB

DataArray, IB
9.39533e-10    1.31163e-09    1.83968e-09    2.59186e-09    3.66703e-09    
5.2088e-09     7.42606e-09    1.06231e-08    1.52436e-08    2.19352e-08    
3.16434e-08    4.57493e-08    6.62701e-08    9.61498e-08    1.3968e-07     
2.03102e-07    2.95463e-07    4.2981e-07     6.24814e-07    9.06919e-07    
1.31304e-06    1.89372e-06    2.71653e-06    3.86918e-06    5.46176e-06    
7.62758e-06    1.05222e-05    1.43209e-05    1.92144e-05    2.54033e-05    
3.30923e-05    4.24832e-05    5.37685e-05    6.71257e-05    8.27128e-05    
0.000100665    0.000121093    0.000144082    0.000169695    0.00019797     
0.000228926    0.000262564    0.000298869    0.000337815    0.000379362    
0.000423465    0.000470071    0.000519121    0.000570555    0.000624308    
0.000680316    

DataArray, IC
2.14005e-08    3.14807e-08    4.63087e-08    6.81202e-08    1.00203e-07    
1.47394e-07    2.16802e-07    3.18878e-07    4.68981e-07    6.89668e-07    
1.01405e-06    1.49066e-06    2.19057e-06    3.21755e-06    4.72269e-06    
6.92482e-06    1.01388e-05    1.48128e-05    2.1576e-05     3.12933e-05    
4.51206e-05    6.45428e-05    9.13719e-05    0.000127674    0.000175612    
0.000237223    0.000314184    0.000407631    0.000518093    0.000645515    
0.000789361    0.000948728    0.00112247     0.00130929     0.00150782     
0.0017167      0.00193459     0.00216021     0.00239238     0.00263        
0.00287208     0.00311773     0.00336616     0.00361667     0.00386865     
0.00412157     0.00437497     0.00462844     0.00488165     0.00513431     
0.00538616     

DataSetFinish

DataSetStart

DataSetName, ICvsVCE
MeasurementType, DC

BatchName, opt_ex06
WaferName, 1
DieName, 1
GroupName, 1, 0, 12000
DeviceName, npn1
Temperature, 27


FabDate, 23 Apr 2007
UserDate, 23 Apr 2007

WaferDiameter, 200
DieSize, 20, 20

NodeNames, C B E S

Sweep, 1, V, C, LIN, 0, 5, CALCULATED, 51, 0.1

Sweep, 2, I, B, LIN, 1e-06, CALCULATED, 1e-06, 5, 2

Constant, V, S, 0, 0.1, 0.0
Constant, V, E, 0, 0.1, 0.0

Target, I, C

Function, rout, 1 / gout
Function, gout, derivative (VC, IC)

Plot, gout, XY (LIN LOG), VC, gout
Plot, icvce, XY (LIN LIN), VC, IC
Plot, rout, XY (LIN LOG), VC, rout

DataArray, IC
-9.96026e-07   2.85571e-06    2.57363e-05    3.30161e-05    3.35889e-05    
3.36736e-05    3.37291e-05    3.37828e-05    3.38364e-05    3.389e-05      
3.39437e-05    3.39973e-05    3.40509e-05    3.41045e-05    3.41582e-05    
3.42118e-05    3.42654e-05    3.4319e-05     3.43726e-05    3.44263e-05    
3.44799e-05    3.45335e-05    3.45871e-05    3.46408e-05    3.46944e-05    
3.4748e-05     3.48016e-05    3.48553e-05    3.49089e-05    3.49625e-05    
3.50161e-05    3.50697e-05    3.51234e-05    3.5177e-05     3.52306e-05    
3.52842e-05    3.53379e-05    3.53915e-05    3.54451e-05    3.54987e-05    
3.55523e-05    3.5606e-05     3.56596e-05    3.57132e-05    3.57668e-05    
3.58205e-05    3.58741e-05    3.59277e-05    3.59813e-05    3.6035e-05     
3.60886e-05    -1.98977e-06   7.23369e-06    5.21727e-05    6.52664e-05    
6.62991e-05    6.64604e-05    6.65696e-05    6.66758e-05    6.67818e-05    
6.68877e-05    6.69937e-05    6.70996e-05    6.72056e-05    6.73116e-05    
6.74175e-05    6.75235e-05    6.76295e-05    6.77354e-05    6.78414e-05    
6.79474e-05    6.80533e-05    6.81593e-05    6.82652e-05    6.83712e-05    
6.84772e-05    6.85831e-05    6.86891e-05    6.87951e-05    6.8901e-05     
6.9007e-05     6.9113e-05     6.92189e-05    6.93249e-05    6.94308e-05    
6.95368e-05    6.96428e-05    6.97487e-05    6.98547e-05    6.99607e-05    
7.00666e-05    7.01726e-05    7.02786e-05    7.03845e-05    7.04905e-05    
7.05964e-05    7.07024e-05    7.08084e-05    7.09143e-05    7.10203e-05    
7.11263e-05    7.12322e-05    -2.98148e-06   1.21652e-05    7.76875e-05    
9.63592e-05    9.78457e-05    9.80816e-05    9.82428e-05    9.83995e-05    
9.85561e-05    9.87125e-05    9.8869e-05     9.90255e-05    9.9182e-05     
9.93385e-05    9.9495e-05     9.96515e-05    9.9808e-05     9.99645e-05    
0.000100121    0.000100277    0.000100434    0.00010059     0.000100747    
0.000100903    0.00010106     0.000101216    0.000101373    0.000101529    
0.000101686    0.000101842    0.000101999    0.000102155    0.000102312    
0.000102468    0.000102625    0.000102781    0.000102938    0.000103094    
0.000103251    0.000103407    0.000103564    0.00010372     0.000103877    
0.000104033    0.00010419     0.000104346    0.000104503    0.000104659    
0.000104816    0.000104972    0.000105129    -3.97113e-06   1.73663e-05    
0.00010214     0.000126358    0.000128309    0.000128619    0.00012883     
0.000129036    0.000129241    0.000129446    0.000129652    0.000129857    
0.000130062    0.000130268    0.000130473    0.000130678    0.000130884    
0.000131089    0.000131294    0.0001315      0.000131705    0.00013191     
0.000132116    0.000132321    0.000132526    0.000132732    0.000132937    
0.000133142    0.000133347    0.000133553    0.000133758    0.000133963    
0.000134169    0.000134374    0.000134579    0.000134785    0.00013499     
0.000135195    0.000135401    0.000135606    0.000135811    0.000136017    
0.000136222    0.000136427    0.000136633    0.000136838    0.000137043    
0.000137249    0.000137454    0.000137659    0.000137865    -4.95867e-06   
2.26936e-05    0.000125533    0.000155346    0.00015778     0.000158163    
0.000158423    0.000158676    0.000158929    0.000159181    0.000159434    
0.000159687    0.000159939    0.000160192    0.000160444    0.000160697    
0.00016095     0.000161202    0.000161455    0.000161707    0.00016196     
0.000162212    0.000162465    0.000162718    0.00016297     0.000163223    
0.000163475    0.000163728    0.000163981    0.000164233    0.000164486    
0.000164738    0.000164991    0.000165243    0.000165496    0.000165749    
0.000166001    0.000166254    0.000166506    0.000166759    0.000167012    
0.000167264    0.000167517    0.000167769    0.000168022    0.000168274    
0.000168527    0.00016878     0.000169032    0.000169285    0.000169537    

DataSetFinish

DataSetStart

DataSetName, IEvsVCE
MeasurementType, DC

BatchName, opt_ex06
WaferName, 1
DieName, 1
GroupName, 1, 0, 12000
DeviceName, npn1
Temperature, 27


FabDate, 23 Apr 2007
UserDate, 23 Apr 2007

WaferDiameter, 200
DieSize, 20, 20

NodeNames, C B E S

Sweep, 1, V, E, LIN, 0, 0.75, CALCULATED, 51, 0.1

Sweep, 2, I, B, LIN, 1e-06, CALCULATED, 1e-06, 5, 2

Constant, V, S, 0, 0.1, 0.0
Constant, V, C, 0, 0.1, 0.0

Target, I, E

Plot, ievec, XY (LIN LIN), VE, IE

DataArray, IE
-3.97448e-09   3.99618e-08    6.47407e-08    7.87161e-08    8.66105e-08    
9.10848e-08    9.36362e-08    9.51063e-08    9.59682e-08    9.64875e-08    
9.68139e-08    9.70314e-08    9.71874e-08    9.73086e-08    9.741e-08      
9.75001e-08    9.75838e-08    9.76639e-08    9.77418e-08    9.78185e-08    
9.78945e-08    9.79701e-08    9.80454e-08    9.81206e-08    9.81957e-08    
9.82707e-08    9.83457e-08    9.84207e-08    9.84957e-08    9.85706e-08    
9.86456e-08    9.87205e-08    9.87955e-08    9.88704e-08    9.89454e-08    
9.90203e-08    9.90953e-08    9.91702e-08    9.92451e-08    9.93201e-08    
9.9395e-08     9.947e-08      9.95449e-08    9.96198e-08    9.96948e-08    
9.97697e-08    9.98447e-08    9.99196e-08    9.99946e-08    1.00069e-07    
1.00144e-07    -1.02257e-08   1.00895e-07    1.63602e-07    1.98969e-07    
2.18939e-07    2.3025e-07     2.36694e-07    2.40402e-07    2.42573e-07    
2.43879e-07    2.44699e-07    2.45245e-07    2.45637e-07    2.45941e-07    
2.46196e-07    2.46423e-07    2.46634e-07    2.46836e-07    2.47033e-07    
2.47227e-07    2.47419e-07    2.4761e-07     2.47801e-07    2.47991e-07    
2.48181e-07    2.48371e-07    2.48561e-07    2.4875e-07     2.4894e-07     
2.4913e-07     2.4932e-07     2.49509e-07    2.49699e-07    2.49889e-07    
2.50079e-07    2.50268e-07    2.50458e-07    2.50648e-07    2.50837e-07    
2.51027e-07    2.51217e-07    2.51407e-07    2.51596e-07    2.51786e-07    
2.51976e-07    2.52165e-07    2.52355e-07    2.52545e-07    2.52735e-07    
2.52924e-07    2.53114e-07    -1.85209e-08   1.72496e-07    2.80375e-07    
3.41238e-07    3.75603e-07    3.95062e-07    4.06143e-07    4.12516e-07    
4.16245e-07    4.18487e-07    4.19893e-07    4.20829e-07    4.21499e-07    
4.2202e-07     4.22457e-07    4.22846e-07    4.23208e-07    4.23555e-07    
4.23893e-07    4.24225e-07    4.24555e-07    4.24883e-07    4.25211e-07    
4.25537e-07    4.25864e-07    4.2619e-07     4.26516e-07    4.26842e-07    
4.27168e-07    4.27494e-07    4.2782e-07     4.28145e-07    4.28471e-07    
4.28797e-07    4.29123e-07    4.29449e-07    4.29775e-07    4.301e-07      
4.30426e-07    4.30752e-07    4.31078e-07    4.31404e-07    4.3173e-07     
4.32056e-07    4.32381e-07    4.32707e-07    4.33033e-07    4.33359e-07    
4.33685e-07    4.34011e-07    4.34336e-07    -2.88726e-08   2.51567e-07    
4.10083e-07    4.9955e-07     5.50071e-07    5.78675e-07    5.9496e-07     
6.04324e-07    6.09799e-07    6.13089e-07    6.15151e-07    6.16523e-07    
6.17505e-07    6.18268e-07    6.18908e-07    6.19478e-07    6.20008e-07    
6.20516e-07    6.21011e-07    6.21498e-07    6.21982e-07    6.22463e-07    
6.22943e-07    6.23422e-07    6.239e-07      6.24378e-07    6.24856e-07    
6.25334e-07    6.25812e-07    6.26289e-07    6.26767e-07    6.27245e-07    
6.27723e-07    6.282e-07      6.28678e-07    6.29156e-07    6.29633e-07    
6.30111e-07    6.30589e-07    6.31066e-07    6.31544e-07    6.32022e-07    
6.32499e-07    6.32977e-07    6.33455e-07    6.33932e-07    6.3441e-07     
6.34888e-07    6.35365e-07    6.35843e-07    6.36321e-07    -4.13292e-08   
3.36352e-07    5.50027e-07    6.70678e-07    7.3882e-07     7.77401e-07    
7.99362e-07    8.11987e-07    8.19365e-07    8.23798e-07    8.26574e-07    
8.28419e-07    8.2974e-07     8.30766e-07    8.31626e-07    8.32391e-07    
8.33104e-07    8.33786e-07    8.34452e-07    8.35107e-07    8.35757e-07    
8.36404e-07    8.37049e-07    8.37692e-07    8.38335e-07    8.38978e-07    
8.39621e-07    8.40263e-07    8.40905e-07    8.41548e-07    8.4219e-07     
8.42832e-07    8.43474e-07    8.44117e-07    8.44759e-07    8.45401e-07    
8.46043e-07    8.46685e-07    8.47328e-07    8.4797e-07     8.48612e-07    
8.49254e-07    8.49896e-07    8.50538e-07    8.51181e-07    8.51823e-07    
8.52465e-07    8.53107e-07    8.53749e-07    8.54392e-07    8.55034e-07    

DataSetFinish

DataSetStart

DataSetName, RGummel
MeasurementType, DC

BatchName, opt_ex06
WaferName, 1
DieName, 1
GroupName, 1, 0, 12000
DeviceName, npn1
Temperature, 27


FabDate, 23 Apr 2007
UserDate, 23 Apr 2007

WaferDiameter, 200
DieSize, 20, 20

NodeNames, C B E S

Sweep, 1, V, B, LIN, 0.55, 1, CALCULATED, 51, 0.1

Constant, V, E, 2, 0.1, 0.0
Constant, V, S, 0, 0.1, 0.0
Constant, V, C, 0, 0.1, 0.0

Target, I, B
Target, I, E

Function, rbeta, IE / IB

Plot, rbeta, XY (LOG LIN), IE, rbeta
Plot, rgummel, XY (LIN LOG), VB, IE IB

DataArray, IB
1.32684e-06    1.71508e-06    2.21616e-06    2.86211e-06    3.69351e-06    
4.76135e-06    6.1291e-06     7.87485e-06    1.00931e-05    1.28963e-05    
1.64144e-05    2.07937e-05    2.61927e-05    3.27747e-05    4.06992e-05    
5.01107e-05    6.11279e-05    7.38355e-05    8.82786e-05    0.000104463    
0.000122358    0.000141905    0.000163022    0.000185615    0.000209582    
0.000234821    0.000261233    0.000288723    0.000317203    0.000346593    
0.000376821    0.00040782     0.000439533    0.000471906    0.000504894    
0.000538453    0.000572547    0.000607143    0.00064221     0.000677721    
0.000713653    0.000749984    0.000786693    0.000823763    0.000861178    
0.000898923    0.000936983    0.000975348    0.001014       0.00105294     
0.00109215     

DataArray, IE
1.55404e-07    2.19037e-07    3.08369e-07    4.33501e-07    6.08295e-07    
8.51629e-07    1.18894e-06    1.65411e-06    2.2915e-06     3.15819e-06    
4.32583e-06    5.88187e-06    7.92936e-06    1.05849e-05    1.39742e-05    
1.8225e-05     2.34591e-05    2.97834e-05    3.72823e-05    4.60131e-05    
5.6004e-05     6.72554e-05    7.97433e-05    9.34245e-05    0.000108242    
0.000124128    0.00014101     0.000158816    0.00017747     0.000196902    
0.000217044    0.000237832    0.000259205    0.000281109    0.000303492    
0.000326309    0.000349515    0.000373072    0.000396944    0.000421098    
0.000445505    0.000470137    0.000494969    0.00051998     0.000545148    
0.000570454    0.000595882    0.000621415    0.000647038    0.00067274     
0.000698506    

DataSetFinish

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