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opt_ex06 : Gummel-Poon Bipolar Model Extraction

opt_ex06 : Gummel-Poon Bipolar Model Extraction

opt_ex06 : Gummel-Poon Bipolar Model Extraction

Requires: Utmost IV, SmartSpice, SmartView

Minimum Versions: Utmost IV 1.10.6.R, SmartSpice 4.10.2.R, SmartView 2.28.2.R

This example describes how to extract a standard Gummel-Poon model for a bipolar transistor. To extract the model, typical forward and reverse operation DC characteristics and reverse bias capacitance characteristics of each junction are required.

The project file opt_ex06.prj and the data file opt_ex06.uds for this example should be loaded into your database. When opened, the project will look as shown in opt_ex06_01.png and when plotted, the example measured data will look as shown in opt_ex06_02.png.

The optimization sequence, which fully automates the extraction of this Gummel-Poon bipolar model example, has six sections. The objective of each section is to isolate a device characteristic and then to optimize only those model parameters which account for this device behaviour. However, it is especially true of the bipolar Gummel-Poon model that certain values of the reverse characteristic parameters will affect the modeling of the forward operation and vice versa. It may be necessary to repeat the sequence several times to achieve the best model fit to your data.

The first section optimizes the parameters IS, NR, BR, ISC, NC, IKR, RBM and RC to model the reverse Gummel data. Following this the parameters VAR and IKR are optimized to fit to the reverse output characteristics. In the third section, both of the reverse datasets are included and all of the parameters again optimized to achieve the best fit to all of the reverse data together.

Since the most important operation of the bipolar transistor is the forward operation, this will be optimized after the reverse parameters. In this way, goodness of fit to the reverse characteristics can be sacrificed in order to achieve a good model in forward operation.

The fourth section optimizes the parameters IS, NF, BF, ISE, NE, RE, IKF, and RBM to achieve the best fit to the forward Gummel data. Then in the fifth section the parameters VAF and IKF are optimized to fit to the forward output characteristics.

In the final section, all three of the bipolar junction capacitances are optimized at the same time, to extract the CJE, MJE, VJE, CJC, MJC, VJC, CJS, MJS and VJS model parameters.

On completion of the sequence, the measured versus simulated characteristics should be as shown in opt_ex06_03.png. If necessary the entire sequence can be run multiple times in order to achieve a good fit to the measured data. The model card can then be exported into an external model library file as shown in the output file opt_ex06.lib.

opt_ex06.lib — view contents
.LIB demo

.MODEL npn NPN (
+LEVEL    = 1              IS       = 1e-16          BF       = 37.9747        
+NF       = 1              BR       = 5.17617        NR       = 1              
+ISE      = 3.37284e-15    NE       = 1.65304        ISC      = 2.21865e-13    
+NC       = 1.35444        VAF      = 63.3792        VAR      = 10.4944        
+IKF      = 0.00182126     IKR      = 0.0001         RB       = 1854.54        
+RBM      = 60.4543        IRB      = 1.21914e-06    RE       = 10             
+RC       = 69.0206        CJE      = 3.59001e-14    VJE      = 0.686403       
+MJE      = 0.313618       FC       = 0.5            CJC      = 5.25001e-14    
+VJC      = 0.551295       MJC      = 0.346841       CJS      = 7.05712e-13    
+VJS      = 0.501668       MJS      = 0.05           TF       = 1e-10          
+XTF      = 1              ITF      = 0.01           VTF      = 5              
+PTF      = 20             TR       = 1e-08          XTB      = 1.5            
+EG       = 1.17           XTI      = 3               )

.ENDL demo
opt_ex06.uds — view contents
Utmost IV CSV Data Logfile
Format Version 1
Copyright (c) 1984 - 2016 Silvaco, Inc. All rights reserved

DataSetStart

DataSetName, Cbc
MeasurementType, LCR

BatchName, opt_ex06
WaferName, 1
DieName, 1
GroupName, 1, 0, 12000
DeviceName, npn1
Temperature, 27


FabDate, 23 Apr 2007
UserDate, 23 Apr 2007

WaferDiameter, 200
DieSize, 20, 20

NodeNames, C B E S

LCRSource, B, C, 1e+06, V, 0
LCRTarget, CP
Sweep, 1, V_LCR, LIN, 0.1, -5, -0.1, CALCULATED

Constant, V, E, 0, 0.1, 0.0
Constant, V, C, 0, 0.1, 0.0
Constant, V, S, 0, 0.1, 0.0

Function, VB, VC + V_LCR

Plot, cbc, XY (LIN LIN), VB, CP

DataArray, CP
5.6274e-14     5.25e-14       4.95507e-14    4.71557e-14    4.51556e-14    
4.34492e-14    4.19687e-14    4.06667e-14    3.95087e-14    3.8469e-14     
3.75281e-14    3.66708e-14    3.58848e-14    3.51604e-14    3.44897e-14    
3.38661e-14    3.32841e-14    3.27391e-14    3.22272e-14    3.17451e-14    
3.12898e-14    3.08588e-14    3.04501e-14    3.00615e-14    2.96916e-14    
2.93387e-14    2.90016e-14    2.8679e-14     2.83699e-14    2.80734e-14    
2.77886e-14    2.75146e-14    2.72509e-14    2.69967e-14    2.67515e-14    
2.65147e-14    2.62859e-14    2.60645e-14    2.58502e-14    2.56426e-14    
2.54413e-14    2.5246e-14     2.50564e-14    2.48722e-14    2.46932e-14    
2.4519e-14     2.43496e-14    2.41846e-14    2.40239e-14    2.38672e-14    
2.37144e-14    2.35654e-14    

DataSetFinish

DataSetStart

DataSetName, Cbe
MeasurementType, LCR

BatchName, opt_ex06
WaferName, 1
DieName, 1
GroupName, 1, 0, 12000
DeviceName, npn1
Temperature, 27


FabDate, 23 Apr 2007
UserDate, 23 Apr 2007

WaferDiameter, 200
DieSize, 20, 20

NodeNames, C B E S

LCRSource, E, B, 1e+06, V, 0
LCRTarget, CP
Sweep, 1, V_LCR, LIN, -0.1, 2, 0.1, CALCULATED

Constant, V, C, 0, 0.1, 0.0
Constant, V, B, 0, 0.01, 0.0
Constant, V, S, 0, 0.1, 0.0

Function, VE, VB + V_LCR

Plot, cbe, XY (LIN LIN), VE, CP

DataArray, CP
3.77173e-14    3.59e-14       3.4401e-14     3.31335e-14    3.20411e-14    
3.10853e-14    3.02387e-14    2.94809e-14    2.87968e-14    2.81746e-14    
2.76051e-14    2.70809e-14    2.65961e-14    2.61456e-14    2.57255e-14    
2.53323e-14    2.4963e-14     2.46154e-14    2.42871e-14    2.39764e-14    
2.36818e-14    2.34017e-14    

DataSetFinish

DataSetStart

DataSetName, Ccs
MeasurementType, LCR

BatchName, opt_ex06
WaferName, 1
DieName, 1
GroupName, 1, 0, 12000
DeviceName, npn1
Temperature, 27


FabDate, 23 Apr 2007
UserDate, 23 Apr 2007

WaferDiameter, 200
DieSize, 20, 20

NodeNames, C B E S

LCRSource, C, S, 1e+06, V, 0
LCRTarget, CP
Sweep, 1, V_LCR, LIN, -0.1, 5, 0.1, CALCULATED

Constant, V, E, 0, 0.1, 0.0
Constant, V, B, 0, 0.01, 0.0
Constant, V, S, 0, 0.1, 0.0

Function, VC, VS + V_LCR

Plot, ccs, XY (LIN LIN), VC, CP

DataArray, CP
7.12799e-13    7.05e-13       6.98691e-13    6.93402e-13    6.88852e-13    
6.84863e-13    6.81315e-13    6.78121e-13    6.75218e-13    6.72559e-13    
6.70106e-13    6.67831e-13    6.65709e-13    6.63723e-13    6.61855e-13    
6.60093e-13    6.58426e-13    6.56844e-13    6.55339e-13    6.53905e-13    
6.52534e-13    6.51222e-13    6.49964e-13    6.48756e-13    6.47594e-13    
6.46474e-13    6.45395e-13    6.44352e-13    6.43344e-13    6.42369e-13    
6.41424e-13    6.40508e-13    6.39619e-13    6.38756e-13    6.37917e-13    
6.371e-13      6.36306e-13    6.35531e-13    6.34777e-13    6.34041e-13    
6.33323e-13    6.32621e-13    6.31936e-13    6.31267e-13    6.30612e-13    
6.29971e-13    6.29344e-13    6.2873e-13     6.28128e-13    6.27539e-13    
6.2696e-13     6.26394e-13    

DataSetFinish

DataSetStart

DataSetName, Gummel
MeasurementType, DC

BatchName, opt_ex06
WaferName, 1
DieName, 1
GroupName, 1, 0, 12000
DeviceName, npn1
Temperature, 27


FabDate, 23 Apr 2007
UserDate, 23 Apr 2007

WaferDiameter, 200
DieSize, 20, 20

NodeNames, C B E S

Sweep, 1, V, B, LIN, 0.5, 1, CALCULATED, 51, 0.1

Constant, V, E, 0, 0.1, 0.0
Constant, V, S, 0, 0.1, 0.0
Constant, V, C, 2, 0.1, 0.0

Target, I, B
Target, I, C

Function, beta, IC / IB

Plot, beta, XY (LOG LIN), IC, beta
Plot, gummel, XY (LIN LOG), VB, IC IB

DataArray, IB
9.39533e-10    1.31163e-09    1.83968e-09    2.59186e-09    3.66703e-09    
5.2088e-09     7.42606e-09    1.06231e-08    1.52436e-08    2.19352e-08    
3.16434e-08    4.57493e-08    6.62701e-08    9.61498e-08    1.3968e-07     
2.03102e-07    2.95463e-07    4.2981e-07     6.24814e-07    9.06919e-07    
1.31304e-06    1.89372e-06    2.71653e-06    3.86918e-06    5.46176e-06    
7.62758e-06    1.05222e-05    1.43209e-05    1.92144e-05    2.54033e-05    
3.30923e-05    4.24832e-05    5.37685e-05    6.71257e-05    8.27128e-05    
0.000100665    0.000121093    0.000144082    0.000169695    0.00019797     
0.000228926    0.000262564    0.000298869    0.000337815    0.000379362    
0.000423465    0.000470071    0.000519121    0.000570555    0.000624308    
0.000680316    

DataArray, IC
2.14005e-08    3.14807e-08    4.63087e-08    6.81202e-08    1.00203e-07    
1.47394e-07    2.16802e-07    3.18878e-07    4.68981e-07    6.89668e-07    
1.01405e-06    1.49066e-06    2.19057e-06    3.21755e-06    4.72269e-06    
6.92482e-06    1.01388e-05    1.48128e-05    2.1576e-05     3.12933e-05    
4.51206e-05    6.45428e-05    9.13719e-05    0.000127674    0.000175612    
0.000237223    0.000314184    0.000407631    0.000518093    0.000645515    
0.000789361    0.000948728    0.00112247     0.00130929     0.00150782     
0.0017167      0.00193459     0.00216021     0.00239238     0.00263        
0.00287208     0.00311773     0.00336616     0.00361667     0.00386865     
0.00412157     0.00437497     0.00462844     0.00488165     0.00513431     
0.00538616     

DataSetFinish

DataSetStart

DataSetName, ICvsVCE
MeasurementType, DC

BatchName, opt_ex06
WaferName, 1
DieName, 1
GroupName, 1, 0, 12000
DeviceName, npn1
Temperature, 27


FabDate, 23 Apr 2007
UserDate, 23 Apr 2007

WaferDiameter, 200
DieSize, 20, 20

NodeNames, C B E S

Sweep, 1, V, C, LIN, 0, 5, CALCULATED, 51, 0.1

Sweep, 2, I, B, LIN, 1e-06, CALCULATED, 1e-06, 5, 2

Constant, V, S, 0, 0.1, 0.0
Constant, V, E, 0, 0.1, 0.0

Target, I, C

Function, rout, 1 / gout
Function, gout, derivative (VC, IC)

Plot, gout, XY (LIN LOG), VC, gout
Plot, icvce, XY (LIN LIN), VC, IC
Plot, rout, XY (LIN LOG), VC, rout

DataArray, IC
-9.96026e-07   2.85571e-06    2.57363e-05    3.30161e-05    3.35889e-05    
3.36736e-05    3.37291e-05    3.37828e-05    3.38364e-05    3.389e-05      
3.39437e-05    3.39973e-05    3.40509e-05    3.41045e-05    3.41582e-05    
3.42118e-05    3.42654e-05    3.4319e-05     3.43726e-05    3.44263e-05    
3.44799e-05    3.45335e-05    3.45871e-05    3.46408e-05    3.46944e-05    
3.4748e-05     3.48016e-05    3.48553e-05    3.49089e-05    3.49625e-05    
3.50161e-05    3.50697e-05    3.51234e-05    3.5177e-05     3.52306e-05    
3.52842e-05    3.53379e-05    3.53915e-05    3.54451e-05    3.54987e-05    
3.55523e-05    3.5606e-05     3.56596e-05    3.57132e-05    3.57668e-05    
3.58205e-05    3.58741e-05    3.59277e-05    3.59813e-05    3.6035e-05     
3.60886e-05    -1.98977e-06   7.23369e-06    5.21727e-05    6.52664e-05    
6.62991e-05    6.64604e-05    6.65696e-05    6.66758e-05    6.67818e-05    
6.68877e-05    6.69937e-05    6.70996e-05    6.72056e-05    6.73116e-05    
6.74175e-05    6.75235e-05    6.76295e-05    6.77354e-05    6.78414e-05    
6.79474e-05    6.80533e-05    6.81593e-05    6.82652e-05    6.83712e-05    
6.84772e-05    6.85831e-05    6.86891e-05    6.87951e-05    6.8901e-05     
6.9007e-05     6.9113e-05     6.92189e-05    6.93249e-05    6.94308e-05    
6.95368e-05    6.96428e-05    6.97487e-05    6.98547e-05    6.99607e-05    
7.00666e-05    7.01726e-05    7.02786e-05    7.03845e-05    7.04905e-05    
7.05964e-05    7.07024e-05    7.08084e-05    7.09143e-05    7.10203e-05    
7.11263e-05    7.12322e-05    -2.98148e-06   1.21652e-05    7.76875e-05    
9.63592e-05    9.78457e-05    9.80816e-05    9.82428e-05    9.83995e-05    
9.85561e-05    9.87125e-05    9.8869e-05     9.90255e-05    9.9182e-05     
9.93385e-05    9.9495e-05     9.96515e-05    9.9808e-05     9.99645e-05    
0.000100121    0.000100277    0.000100434    0.00010059     0.000100747    
0.000100903    0.00010106     0.000101216    0.000101373    0.000101529    
0.000101686    0.000101842    0.000101999    0.000102155    0.000102312    
0.000102468    0.000102625    0.000102781    0.000102938    0.000103094    
0.000103251    0.000103407    0.000103564    0.00010372     0.000103877    
0.000104033    0.00010419     0.000104346    0.000104503    0.000104659    
0.000104816    0.000104972    0.000105129    -3.97113e-06   1.73663e-05    
0.00010214     0.000126358    0.000128309    0.000128619    0.00012883     
0.000129036    0.000129241    0.000129446    0.000129652    0.000129857    
0.000130062    0.000130268    0.000130473    0.000130678    0.000130884    
0.000131089    0.000131294    0.0001315      0.000131705    0.00013191     
0.000132116    0.000132321    0.000132526    0.000132732    0.000132937    
0.000133142    0.000133347    0.000133553    0.000133758    0.000133963    
0.000134169    0.000134374    0.000134579    0.000134785    0.00013499     
0.000135195    0.000135401    0.000135606    0.000135811    0.000136017    
0.000136222    0.000136427    0.000136633    0.000136838    0.000137043    
0.000137249    0.000137454    0.000137659    0.000137865    -4.95867e-06   
2.26936e-05    0.000125533    0.000155346    0.00015778     0.000158163    
0.000158423    0.000158676    0.000158929    0.000159181    0.000159434    
0.000159687    0.000159939    0.000160192    0.000160444    0.000160697    
0.00016095     0.000161202    0.000161455    0.000161707    0.00016196     
0.000162212    0.000162465    0.000162718    0.00016297     0.000163223    
0.000163475    0.000163728    0.000163981    0.000164233    0.000164486    
0.000164738    0.000164991    0.000165243    0.000165496    0.000165749    
0.000166001    0.000166254    0.000166506    0.000166759    0.000167012    
0.000167264    0.000167517    0.000167769    0.000168022    0.000168274    
0.000168527    0.00016878     0.000169032    0.000169285    0.000169537    

DataSetFinish

DataSetStart

DataSetName, IEvsVCE
MeasurementType, DC

BatchName, opt_ex06
WaferName, 1
DieName, 1
GroupName, 1, 0, 12000
DeviceName, npn1
Temperature, 27


FabDate, 23 Apr 2007
UserDate, 23 Apr 2007

WaferDiameter, 200
DieSize, 20, 20

NodeNames, C B E S

Sweep, 1, V, E, LIN, 0, 0.75, CALCULATED, 51, 0.1

Sweep, 2, I, B, LIN, 1e-06, CALCULATED, 1e-06, 5, 2

Constant, V, S, 0, 0.1, 0.0
Constant, V, C, 0, 0.1, 0.0

Target, I, E

Plot, ievec, XY (LIN LIN), VE, IE

DataArray, IE
-3.97448e-09   3.99618e-08    6.47407e-08    7.87161e-08    8.66105e-08    
9.10848e-08    9.36362e-08    9.51063e-08    9.59682e-08    9.64875e-08    
9.68139e-08    9.70314e-08    9.71874e-08    9.73086e-08    9.741e-08      
9.75001e-08    9.75838e-08    9.76639e-08    9.77418e-08    9.78185e-08    
9.78945e-08    9.79701e-08    9.80454e-08    9.81206e-08    9.81957e-08    
9.82707e-08    9.83457e-08    9.84207e-08    9.84957e-08    9.85706e-08    
9.86456e-08    9.87205e-08    9.87955e-08    9.88704e-08    9.89454e-08    
9.90203e-08    9.90953e-08    9.91702e-08    9.92451e-08    9.93201e-08    
9.9395e-08     9.947e-08      9.95449e-08    9.96198e-08    9.96948e-08    
9.97697e-08    9.98447e-08    9.99196e-08    9.99946e-08    1.00069e-07    
1.00144e-07    -1.02257e-08   1.00895e-07    1.63602e-07    1.98969e-07    
2.18939e-07    2.3025e-07     2.36694e-07    2.40402e-07    2.42573e-07    
2.43879e-07    2.44699e-07    2.45245e-07    2.45637e-07    2.45941e-07    
2.46196e-07    2.46423e-07    2.46634e-07    2.46836e-07    2.47033e-07    
2.47227e-07    2.47419e-07    2.4761e-07     2.47801e-07    2.47991e-07    
2.48181e-07    2.48371e-07    2.48561e-07    2.4875e-07     2.4894e-07     
2.4913e-07     2.4932e-07     2.49509e-07    2.49699e-07    2.49889e-07    
2.50079e-07    2.50268e-07    2.50458e-07    2.50648e-07    2.50837e-07    
2.51027e-07    2.51217e-07    2.51407e-07    2.51596e-07    2.51786e-07    
2.51976e-07    2.52165e-07    2.52355e-07    2.52545e-07    2.52735e-07    
2.52924e-07    2.53114e-07    -1.85209e-08   1.72496e-07    2.80375e-07    
3.41238e-07    3.75603e-07    3.95062e-07    4.06143e-07    4.12516e-07    
4.16245e-07    4.18487e-07    4.19893e-07    4.20829e-07    4.21499e-07    
4.2202e-07     4.22457e-07    4.22846e-07    4.23208e-07    4.23555e-07    
4.23893e-07    4.24225e-07    4.24555e-07    4.24883e-07    4.25211e-07    
4.25537e-07    4.25864e-07    4.2619e-07     4.26516e-07    4.26842e-07    
4.27168e-07    4.27494e-07    4.2782e-07     4.28145e-07    4.28471e-07    
4.28797e-07    4.29123e-07    4.29449e-07    4.29775e-07    4.301e-07      
4.30426e-07    4.30752e-07    4.31078e-07    4.31404e-07    4.3173e-07     
4.32056e-07    4.32381e-07    4.32707e-07    4.33033e-07    4.33359e-07    
4.33685e-07    4.34011e-07    4.34336e-07    -2.88726e-08   2.51567e-07    
4.10083e-07    4.9955e-07     5.50071e-07    5.78675e-07    5.9496e-07     
6.04324e-07    6.09799e-07    6.13089e-07    6.15151e-07    6.16523e-07    
6.17505e-07    6.18268e-07    6.18908e-07    6.19478e-07    6.20008e-07    
6.20516e-07    6.21011e-07    6.21498e-07    6.21982e-07    6.22463e-07    
6.22943e-07    6.23422e-07    6.239e-07      6.24378e-07    6.24856e-07    
6.25334e-07    6.25812e-07    6.26289e-07    6.26767e-07    6.27245e-07    
6.27723e-07    6.282e-07      6.28678e-07    6.29156e-07    6.29633e-07    
6.30111e-07    6.30589e-07    6.31066e-07    6.31544e-07    6.32022e-07    
6.32499e-07    6.32977e-07    6.33455e-07    6.33932e-07    6.3441e-07     
6.34888e-07    6.35365e-07    6.35843e-07    6.36321e-07    -4.13292e-08   
3.36352e-07    5.50027e-07    6.70678e-07    7.3882e-07     7.77401e-07    
7.99362e-07    8.11987e-07    8.19365e-07    8.23798e-07    8.26574e-07    
8.28419e-07    8.2974e-07     8.30766e-07    8.31626e-07    8.32391e-07    
8.33104e-07    8.33786e-07    8.34452e-07    8.35107e-07    8.35757e-07    
8.36404e-07    8.37049e-07    8.37692e-07    8.38335e-07    8.38978e-07    
8.39621e-07    8.40263e-07    8.40905e-07    8.41548e-07    8.4219e-07     
8.42832e-07    8.43474e-07    8.44117e-07    8.44759e-07    8.45401e-07    
8.46043e-07    8.46685e-07    8.47328e-07    8.4797e-07     8.48612e-07    
8.49254e-07    8.49896e-07    8.50538e-07    8.51181e-07    8.51823e-07    
8.52465e-07    8.53107e-07    8.53749e-07    8.54392e-07    8.55034e-07    

DataSetFinish

DataSetStart

DataSetName, RGummel
MeasurementType, DC

BatchName, opt_ex06
WaferName, 1
DieName, 1
GroupName, 1, 0, 12000
DeviceName, npn1
Temperature, 27


FabDate, 23 Apr 2007
UserDate, 23 Apr 2007

WaferDiameter, 200
DieSize, 20, 20

NodeNames, C B E S

Sweep, 1, V, B, LIN, 0.55, 1, CALCULATED, 51, 0.1

Constant, V, E, 2, 0.1, 0.0
Constant, V, S, 0, 0.1, 0.0
Constant, V, C, 0, 0.1, 0.0

Target, I, B
Target, I, E

Function, rbeta, IE / IB

Plot, rbeta, XY (LOG LIN), IE, rbeta
Plot, rgummel, XY (LIN LOG), VB, IE IB

DataArray, IB
1.32684e-06    1.71508e-06    2.21616e-06    2.86211e-06    3.69351e-06    
4.76135e-06    6.1291e-06     7.87485e-06    1.00931e-05    1.28963e-05    
1.64144e-05    2.07937e-05    2.61927e-05    3.27747e-05    4.06992e-05    
5.01107e-05    6.11279e-05    7.38355e-05    8.82786e-05    0.000104463    
0.000122358    0.000141905    0.000163022    0.000185615    0.000209582    
0.000234821    0.000261233    0.000288723    0.000317203    0.000346593    
0.000376821    0.00040782     0.000439533    0.000471906    0.000504894    
0.000538453    0.000572547    0.000607143    0.00064221     0.000677721    
0.000713653    0.000749984    0.000786693    0.000823763    0.000861178    
0.000898923    0.000936983    0.000975348    0.001014       0.00105294     
0.00109215     

DataArray, IE
1.55404e-07    2.19037e-07    3.08369e-07    4.33501e-07    6.08295e-07    
8.51629e-07    1.18894e-06    1.65411e-06    2.2915e-06     3.15819e-06    
4.32583e-06    5.88187e-06    7.92936e-06    1.05849e-05    1.39742e-05    
1.8225e-05     2.34591e-05    2.97834e-05    3.72823e-05    4.60131e-05    
5.6004e-05     6.72554e-05    7.97433e-05    9.34245e-05    0.000108242    
0.000124128    0.00014101     0.000158816    0.00017747     0.000196902    
0.000217044    0.000237832    0.000259205    0.000281109    0.000303492    
0.000326309    0.000349515    0.000373072    0.000396944    0.000421098    
0.000445505    0.000470137    0.000494969    0.00051998     0.000545148    
0.000570454    0.000595882    0.000621415    0.000647038    0.00067274     
0.000698506    

DataSetFinish