Every software package contains a full set of examples suitable for that version and are installed with the software. If you see examples here that are not in your installation you should consider updating to a later version of the software. These examples can be used by beginners and advanced users for product evaluation, teaching purposes, and self-training.
Required Modules
Victory Process
- 2D Diffusion & Implantation
From “Integrated Circuit Fabrication: Science and Technology by Plummer & Griffin, published by Cambridge University Press
5e13, 100keV tilt=7 for various diffusion times at 800C
TED is caused by implant damage
Main parameter is clust.fac=1, indicating the “+1 model “
Images
