PG-Fig8-11.in : Tilt angle dependence of boron implants

PG-Fig8-11.in : Tilt angle dependence of boron implants

PG-Fig8-11.in : Tilt angle dependence of boron implants

Every software package contains a full set of examples suitable for that version and are installed with the software. If you see examples here that are not in your installation you should consider updating to a later version of the software. These examples can be used by beginners and advanced users for product evaluation, teaching purposes, and self-training.

Required Modules

Victory Process

  • 2D Diffusion & Implantation

From “Integrated Circuit Fabrication: Science and Technology by Plummer & Griffin, published by Cambridge University Press

Channeling reduces as the tile angle increases

Images

PG-Fig8-11_B_1e13_T0R0.png

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