PG-Fig6-20.in : Fig6-20 Isolation Structures for the 256Mb Dram

PG-Fig6-20.in : Fig6-20 Isolation Structures for the 256Mb Dram

PG-Fig6-20.in : Fig6-20 Isolation Structures for the 256Mb Dram

Every software package contains a full set of examples suitable for that version and are installed with the software. If you see examples here that are not in your installation you should consider updating to a later version of the software. These examples can be used by beginners and advanced users for product evaluation, teaching purposes, and self-training.

Required Modules

Victory Process

  • 2D Diffusion & Implantation

From “Integrated Circuit Fabrication: Science and Technology by Plummer & Griffin, published by Cambridge University Press

— the pad oxide thickness is 240A for the locos
— assuming that the nitride thickness is 1500A
— the Poly spacer thickness is 800A on the sidewall
— the Nitride spacer thickness is 450A on the sidewall
— the recess depth is 1000A

Images

PG-6-20.png

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