Every software package contains a full set of examples suitable for that version and are installed with the software. If you see examples here that are not in your installation you should consider updating to a later version of the software. These examples can be used by beginners and advanced users for product evaluation, teaching purposes, and self-training.
Required Modules
Victory Process
- Optolith
From “Integrated Circuit Fabrication: Science and Technology by Plummer & Griffin, published by Cambridge University Press
The illumination wavelength is ArF = 193nm
The projection numerical aperature is 0.93
0.1um features are imaged
This is an OPTOLITH simulation
Images
