Requires: Utmost IV, SmartSpice, SmartView
Minimum Versions: Utmost IV 2.4.0.R, SmartSpice 4.32.0.R, SmartView 2.34.0.R.
This example describes how to extract an MVSG model for symmetric HEMT devices.
To extract a model which is scalable with geometry, multiple different device sizes
must be included. In this example, three devices with different gate lengths are
included.
The project file
opt_ex18.prj
and the data file
opt_ex18.uds
for this example should be loaded into your database. When opened, the
project will look as shown in
opt_ex18_project.png
.
Preliminary information
The MVSG model allows independent parameters to describe the source and drain region
resistances. In order to consider symmetric devices, with the same parameter values
for drain and source, respectively, one can assign two model parameters to the same
netlist parameter and optimize the netlist parameter instead:
opt_ex18_model_card.png
and
opt_ex18_netlist_parameters.png
.
This example uses depletion mode HEMT devices. In order to better display the ID-VG
plots of such devices, one needs to edit the preferences:
opt_ex18_edit_preferences.png
and set the X Axis Direction to “By Sweep” in the Viewer preferences:
opt_ex18_preferences_x_axis.png
.
The optimization sequence, which automates the parameter extraction, is divided into ten sections.
The objective of each section is to isolate a device characteristic and then to optimize only those
model parameters which account for this device behavior. Some model parameters are optimized in
multiple sections for better fitting.
Before starting the optimization sequence, the following device parameters are defined in the model library.
- cg: Specific gate capacitance
- lgd: Drain side access region distance
- lgs: Source side access region distance
- tnom: Nominal (room) temperature
Section 1 : idvglin_large_rt
This section performs a preliminary extraction of the threshold voltage for the wide
and long channel device, using the drain current versus gate voltage characteristic
in the linear region and at room temperature. The extracted value is stored in the vto
model parameter, as shown in
opt_ex18_01.png
.
Section 2 : idvglin_large_rt
This section optimizes the parameters for wide and long channel devices. The
data in this section is the drain current versus gate voltage characteristic
in the linear region and at room temperature. The following model parameters
are extracted.
- mu0 Low-field mobility
- ss Subthreshold slope
- vto Threshold voltage
After this step has been completed, the fit to measured data will be as shown in
opt_ex18_02.png
.
Section 3: idvglin_larray_rt
In this section, the parameters for short channel effect are optimized using
devices of multiple lengths and wide channel value. The following model parameters
are extracted.
- mu0 Low-field mobility
- vto Threshold voltage
- rsh Drain/source sheet resistance
If needed, additional parameters may be considered for improved accuracy.
- mtheta Mobility reduction parameter with VG
After this step has been completed, the fit to measured data will be as shown in
opt_ex18_03.png
.
Section 4: idvglin_large_t
This section extracts the model parameters for the large geometry drain
current versus gate voltage linear temperature measurements. The following
parameters are optimized.
- vtzeta Threshold voltage dependence on temperature
- epsilon Mobility dependence on temperature
After this step has been completed, the fit to measured data will be as shown in
opt_ex18_04.png
.
Section 5 : idvglin_larray_t
Now we select multiple length devices at temperature for the linear drain
current versus gate voltage characteristics and optimize the following parameters.
- vtzeta Threshold voltage dependence on temperature
- epsilon Mobility dependence on temperature
- rct1 Contact and sheet resistance temperature coefficient
After this step has been completed, the fit to measured data will be as shown in
opt_ex18_05.png
.
Section 6: idvglin_larray_rt
This section is used for refining the value of the subthreshold slope parameter.
- ss Subthreshold slope
After this step has been completed, the fit to measured data will be as shown in
opt_ex18_06.png
.
Section 7 : idvgsat_larray_rt
The first 6 sections concentrated only on the linear regions drain current versus
gate voltage for each of the different geometries. This section will use the
high VDS subthreshold drain current versus gate voltage data for multiple lengths.
The following parameters are optimized.
- delta1 DIBL coefficient
After this step has been completed, the fit to measured data will be as shown in
opt_ex18_07.png
.
Section 8 : idvd_larray_rt
This section uses saturation region drain current versus drain voltage data
for multiple lengths. The following parameters are optimized.
- vx0 Source injection velocity
- lambda Channel length modulation parameter
- delta1 DIBL coefficient
- rth Thermal resistance
After this step has been completed, the fit to measured data will be as shown in
opt_ex18_08.png
.
Section 9 : all_rt
This section combines room temperature data from all operation regions, in order
to refine the nominal temperature parameters.
- mu0 Low-field mobility
- ss Subthreshold slope
- vto Threshold voltage
- rsh Drain/source sheet resistance
- beta Linear to saturation transition parameter
- vx0 Source injection velocity
- lambda Channel length modulation parameter
- delta1 DIBL coefficient
- rth Thermal resistance
After this step has been completed, the fit to measured data will be as shown in
opt_ex18_09.png
.
Section 10 : all_t
Finally, this section combines all temperature data to refine all previously extracted
model parameters, including the thermal resistance.
- mu0 Low-field mobility
- ss Subthreshold slope
- vto Threshold voltage
- rsh Drain/source sheet resistance
- beta Linear to saturation transition parameter
- vx0 Source injection velocity
- lambda Channel length modulation parameter
- delta1 DIBL coefficient
- vtzeta Threshold voltage dependence on temperature
- epsilon Mobility dependence on temperature
- rct1 Contact and sheet resistance temperature coefficient
- rth Thermal resistance
If needed, additional parameters may be considered for an improved temperature fitting
accuracy.
- vzeta Vx0 dependence on temperature
After this step has been completed, the fit to measured data will be as shown in
opt_ex18_10.png
.
When complete, the model card and the netlist parameters can be exported into
an external model library file as shown in the output file
opt_ex18.lib.
Graphics
Files
opt_ex18.lib
.PARAM RC = 0
.MODEL mvsghv NMOS (
+level = 91 version = 1 tnom = 26.85
+cg = 0.004264 cofsm = 1.6e-09 cofdm = 1e-19
+cofdsm = 8e-10 cofdsubm = 0 cofssubm = 0
+cofgsubm = 3e-10 rsh = 651.218 rcs = RC
+rcd = RC vx0 = 499981 mu0 = 0.0396636
+beta = 3.7045 vto = -6.15029 ss = 0.0797273
+delta1 = 0.0172486 delta2 = 0 dibsat = 10
+nd = 0 alpha = 3.5 lambda = 9.99983e-05
+vtheta = 0 mtheta = 0 vzeta = 0.004
+vtzeta = -0.000550215 epsilon = 2.74741 rct1 = 0.0121881
+rct2 = 0 flagres = 1 lgs = 3e-06
+vtors = -650 cgrs = 0.0008 vx0rs = 100000
+mu0rs = 0.1 betars = 1.1 delta1rs = 0.0004
+srs = 0.065 ndrs = 0 vthetars = 0
+mthetars = 0 alphars = 3.5 lgd = 3e-06
+vtord = -650 cgrd = 0.0007 vx0rd = 100000
+mu0rd = 0.1 betard = 1.1 delta1rd = 0.0004
+srd = 0.08 ndrd = 0 vthetard = 0
+mthetard = 0 alphard = 3.5 flagfp1 = 1
+lgfp1 = 0 vtofp1 = -44.5 cgfp1 = 0.0002
+flagfp1s = 1 cfp1s = 1e-19 ccfp1 = 9e-11
+cbfp1 = 0 vx0fp1 = 120000 mu0fp1 = 0.2
+betafp1 = 1.16
+delta1fp1 = 0
+sfp1 = 3.2 ndfp1 = 0
+vthetafp1 = 0
+mthetafp1 = 0
+alphafp1 = 0.01 flagfp2 = 0 lgfp2 = 0
+vtofp2 = -60 cgfp2 = 9e-05 flagfp2s = 0
+cfp2s = 0 ccfp2 = 6.5e-11 cbfp2 = 0
+vx0fp2 = 190000 mu0fp2 = 0.29 betafp2 = 1.16
+delta1fp2 = 0
+sfp2 = 4.1 ndfp2 = 0
+vthetafp2 = 0
+mthetafp2 = 0
+alphafp2 = 1300 flagfp3 = 1 lgfp3 = 0
+vtofp3 = -120 cgfp3 = 0.001 flagfp3s = 0
+cfp3s = 0 ccfp3 = 0 cbfp3 = 0
+vx0fp3 = 100000 mu0fp3 = 0.17 betafp3 = 1
+delta1fp3 = 0.01
+sfp3 = 0.1 ndfp3 = 0
+vthetafp3 = 0
+mthetafp3 = 0
+alphafp3 = 3.5 flagfp4 = 1 lgfp4 = 0
+vtofp4 = -220 cgfp4 = 0.001 flagfp4s = 0
+cfp4s = 0 ccfp4 = 0 cbfp4 = 0
+vx0fp4 = 100000 mu0fp4 = 0.17 betafp4 = 1
+delta1fp4 = 0.01
+sfp4 = 0.1 ndfp4 = 0
+vthetafp4 = 0
+mthetafp4 = 0
+alphafp4 = 3.5 rgsp = 0 igmod = 0
+vjg = 1
+pg_param1 = 0.45
+pg_params = 0.3
+ijs = 0 vgsats = 3 fracs = 1
+alphags = 10
+pg_paramd = 0.38
+ijd = 0 vgsatd = 3 fracd = 1
+alphagd = 10 pgsrecs = 0.8 irecs = 0
+vgsatqs = 3.4 vbdgs = 600 pbdgs = 4
+kbdgates = 0 betarecs = 0.35 pgsrecd = 0.957
+irecd = 0 vgsatqd = 0.55 vbdgd = 600
+pbdgd = 4 kbdgated = 0 betarecd = 0.734
+rth = 11.0515 cth = 0.0001
+trapselect = 0
+vttrap = 230 taut = 3e-05 alphat1 = 0.0001
+alphat2 = 21 tempt = 0.0001 noisemod = 0
+shs = 2 shd = 2 kf = 0
+af = 1 ffe = 1 minr = 0.001
+minl = 1e-09 minc = 1e-15 )opt_ex18.uds
Utmost IV CSV Data Logfile
Format Version 2
Copyright (c) 1984-2018 Silvaco, Inc. All rights reserved
DataSetStart
DataSetName, idvd
MeasurementType, DC
BatchName, opt_ex18
WaferName, TCAD
DieName, TCAD
DeviceName, nmos_1
Temperature, 26.85
FabDate, 25 Oct 2018
UserDate, 25 Oct 2018
Attribute, W, 0.0001
Attribute, L, 1e-06
NodeNames, drain gate source substrate
Sweep, 1, V, drain, LIST, 0.1, 0
List, 1
0 0.5 1 1.5
2 2.5 3 3.5
4 4.5 5 5.5
6 6.5 7 7.5
8 8.5 9 9.5
10 10.5 11 11.5
12 12.5 13 13.5
14 14.5 15
Sweep, 2, V, gate, LIST, 0.1, 0
List, 2
-3 -2 -1 0
Constant, V, source, 0, 0.1, 0
Constant, V, substrate, 0, 0.1, 0
Target, I, drain
Target, I, source
Target, I, gate
Target, I, substrate
Function, gds, derivative (vdrain, idrain)
Plot, idvd, XY (LIN LIN), vdrain, idrain
Plot, gds, XY (LIN LOG), vdrain, gds
DataArray, idrain
7.804408753e-16 0.01598464467 0.03089936619 0.044536357
0.05664095558 0.06674481567 0.0747152162 0.08040388706
0.08388609836 0.08572804876 0.08678528929 0.08733651223
0.08775495226 0.08795245346 0.08808631423 0.08817785268
0.08831734973 0.08834204754 0.0884367652 0.08842741285
0.08849360661 0.08846047345 0.08850436466 0.08852671173
0.08853396242 0.08852837199 0.08851126295 0.08848361245
0.08844630302 0.08840026703 0.08834656177 1.135099919e-19
0.01758157354 0.0344547526 0.05051156198 0.06561970235
0.07962158987 0.09211184905 0.1028582383 0.1115914865
0.1182999587 0.1226199325 0.1250897991 0.1261974667
0.126578865 0.1265398425 0.1262664582 0.1258635077
0.125391056 0.1248845284 0.1243649741 0.1239580092
0.1235246025 0.1230823182 0.1226385426 0.1221972909
0.1217609545 0.1213310011 0.1209083194 0.1204934073
0.1200864782 0.1197859855 -5.573978494e-16 0.01868232925
0.03685550451 0.05445685006 0.07141051005 0.08762601754
0.1029970547 0.1172644983 0.1297979823 0.1406036981
0.1494447326 0.156161807 0.1604956646 0.162921892
0.1639871576 0.1640612493 0.1635110682 0.1626068266
0.161519366 0.160349887 0.1593156225 0.158238734
0.1571605214 0.156100518 0.1550688194 0.1540703354
0.1532378983 0.1522680274 0.1514756824 0.1506814847
0.1498995544 -1.533487033e-15 0.01949210874 0.03859592351
0.05727166976 0.07547155035 0.09313889755 0.1102073071
0.1265996249 0.1422264619 0.1558569268 0.1678884479
0.1780847675 0.1862626372 0.1916863739 0.1955029221
0.1974535023 0.198119357 0.1977595498 0.1969349418
0.1953531302 0.1937986653 0.1920905577 0.1903380303
0.188599754 0.1870807071 0.1853935354 0.1839586247
0.1825464233 0.1811771607 0.179999446 0.1788185074
DataArray, igate
-1.199782624e-15 -1.277757905e-15 -1.356083757e-15 -1.439309142e-15
-1.534873721e-15 -1.820503783e-15 -2.174295228e-15 -2.622828624e-15
-3.289633777e-15 -4.271122995e-15 -5.399495686e-15 -6.945541265e-15
-8.662078698e-15 -1.108299276e-14 -1.409016589e-14 -1.785495251e-14
-2.209460263e-14 -2.809060113e-14 -3.477707455e-14 -4.416692938e-14
-5.457368616e-14 -6.906533978e-14 -8.500490176e-14 -1.048154678e-13
-1.291483666e-13 -1.588625933e-13 -1.949935355e-13 -2.387745561e-13
-2.916722577e-13 -3.554297862e-13 -4.321151697e-13 -8.842360903e-16
-9.626914169e-16 -1.041150752e-15 -1.121553212e-15 -1.207113786e-15
-1.302918315e-15 -1.549059592e-15 -1.969507662e-15 -2.66225017e-15
-3.625129729e-15 -5.354026778e-15 -7.926456752e-15 -1.178477311e-14
-1.716352987e-14 -2.472684751e-14 -3.533299068e-14 -5.009353687e-14
-7.044159193e-14 -9.823560551e-14 -1.358992176e-13 -1.826962003e-13
-2.459216968e-13 -3.302576798e-13 -4.418821454e-13 -5.885780864e-13
-7.799999078e-13 -1.0280024e-12 -1.347015049e-12 -1.754462968e-12
-2.271245239e-12 -2.870514334e-12 -5.679029842e-16 -6.466105741e-16
-7.251974759e-16 -8.045230912e-16 -8.860540849e-16 -9.721094111e-16
-1.066227687e-15 -1.224351104e-15 -1.65276438e-15 -2.372896011e-15
-3.620966329e-15 -5.816641906e-15 -1.001815372e-14 -1.72757146e-14
-2.891262395e-14 -4.737358775e-14 -7.625109378e-14 -1.208186799e-13
-1.886303076e-13 -2.901843929e-13 -4.30425848e-13 -6.348110607e-13
-9.267761447e-13 -1.337936268e-12 -1.910132613e-12 -2.698335816e-12
-3.706241104e-12 -5.177790115e-12 -7.016035705e-12 -9.487677904e-12
-1.27604186e-11 -1.07705963e-31 -3.29909166e-16 -4.086411756e-16
-4.875251786e-16 -5.672737253e-16 -6.489952721e-16 -7.34386479e-16
-8.259632836e-16 -9.274164175e-16 -1.319001076e-15 -1.99118395e-15
-3.2138923e-15 -5.533940979e-15 -1.084848789e-14 -2.055396441e-14
-3.946244907e-14 -7.335664885e-14 -1.326049086e-13 -2.276753399e-13
-3.950278677e-13 -6.513389741e-13 -1.060371106e-12 -1.69829722e-12
-2.672668943e-12 -4.053849752e-12 -6.209728013e-12 -9.144208253e-12
-1.334442968e-11 -1.924382282e-11 -2.698369745e-11 -3.772171109e-11
DataArray, isource
-9.477188186e-16 -0.01598464467 -0.03089936619 -0.044536357
-0.05664095558 -0.06674481567 -0.0747152162 -0.08040388706
-0.08388609836 -0.08572804876 -0.08678528929 -0.08733651223
-0.08775495225 -0.08795245346 -0.08808631423 -0.08817785268
-0.08831734973 -0.08834204754 -0.0884367652 -0.08842741285
-0.08849360661 -0.08846047346 -0.08850436465 -0.08852671173
-0.08853396242 -0.08852837199 -0.08851126295 -0.08848361244
-0.08844630302 -0.08840026703 -0.08834656177 6.070821887e-16
-0.01758157354 -0.0344547526 -0.05051156198 -0.06561970235
-0.07962158987 -0.09211184905 -0.1028582383 -0.1115914865
-0.1182999587 -0.1226199325 -0.1250897991 -0.1261974667
-0.126578865 -0.1265398425 -0.1262664582 -0.1258635077
-0.125391056 -0.1248845284 -0.1243649741 -0.1239580092
-0.1235246025 -0.1230823182 -0.1226385426 -0.1221972909
-0.1217609545 -0.1213310011 -0.1209083194 -0.1204934073
-0.1200864782 -0.1197859855 5.421532316e-16 -0.01868232925
-0.03685550451 -0.05445685006 -0.07141051047 -0.08762601768
-0.1029970548 -0.1172644983 -0.1297979823 -0.1406036981
-0.1494447326 -0.156161807 -0.1604956646 -0.162921892
-0.1639871576 -0.1640612493 -0.1635110682 -0.1626068266
-0.161519366 -0.160349887 -0.1593156225 -0.158238734
-0.1571605214 -0.156100518 -0.1550688194 -0.1540703354
-0.1532378983 -0.1522680274 -0.1514756824 -0.1506814847
-0.1498995544 -8.396237672e-16 -0.01949210874 -0.03859592351
-0.05727166976 -0.07547155078 -0.09313889768 -0.1102073072
-0.126599625 -0.142226462 -0.1558569268 -0.1678884479
-0.1780847675 -0.1862626372 -0.1916863739 -0.1955029221
-0.1974535023 -0.198119357 -0.1977595498 -0.1969349418
-0.1953531302 -0.1937986653 -0.1920905577 -0.1903380303
-0.188599754 -0.1870807071 -0.1853935354 -0.1839586247
-0.1825464232 -0.1811771607 -0.179999446 -0.1788185074
DataArray, isubstrate
2.226966063e-40 -1.891213099e-27 -2.239474274e-27 -2.553687978e-27
-2.8571739e-27 -3.153778565e-27 -3.443704575e-27 -3.725902608e-27
-3.999493369e-27 -4.265445546e-27 -4.526725005e-27 -4.784722543e-27
-5.041228729e-27 -5.295939867e-27 -5.549685577e-27 -5.802702432e-27
-6.055617865e-27 -6.307548888e-27 -6.559563727e-27 -6.810629583e-27
-7.061811098e-27 -7.312003344e-27 -7.562313941e-27 -7.812158851e-27
-8.061569304e-27 -8.310577318e-27 -8.559225017e-27 -8.80756586e-27
-9.05565659e-27 -9.303546683e-27 -9.551273386e-27 1.603936949e-40
-1.900261977e-27 -2.245570499e-27 -2.560165035e-27 -2.865927376e-27
-3.167061664e-27 -3.464446949e-27 -3.757516617e-27 -4.045376858e-27
-4.327458432e-27 -4.601598473e-27 -4.86830576e-27 -5.128610437e-27
-5.384892591e-27 -5.638457357e-27 -5.890129638e-27 -6.140399082e-27
-6.389599774e-27 -6.637975903e-27 -6.885698187e-27 -7.133686663e-27
-7.38113928e-27 -7.628139898e-27 -7.874737217e-27 -8.120962295e-27
-8.366838613e-27 -8.612389899e-27 -8.857645441e-27 -9.102638723e-27
-9.347401568e-27 -9.592785812e-27 1.036041456e-40 -1.905606659e-27
-2.248980784e-27 -2.56353756e-27 -2.870098229e-27 -3.172804646e-27
-3.472899978e-27 -3.770578649e-27 -4.064155123e-27 -4.353228991e-27
-4.637215612e-27 -4.915193263e-27 -5.18513054e-27 -5.447694176e-27
-5.704438788e-27 -5.95636639e-27 -6.20475935e-27 -6.450722894e-27
-6.695019611e-27 -6.938123646e-27 -7.181571537e-27 -7.424205063e-27
-7.666251617e-27 -7.907875891e-27 -8.14918647e-27 -8.390280634e-27
-8.63234149e-27 -8.873100439e-27 -9.114972556e-27 -9.356762775e-27
-9.598551683e-27 -4.195843739e-44 -1.909154128e-27 -2.251172209e-27
-2.565613345e-27 -2.872531606e-27 -3.175954916e-27 -3.47715491e-27
-3.776604794e-27 -4.074446162e-27 -4.366852001e-27 -4.654638931e-27
-4.937324184e-27 -5.214143859e-27 -5.480862013e-27 -5.742005745e-27
-5.99546798e-27 -6.243405153e-27 -6.486387292e-27 -6.727436126e-27
-6.963434818e-27 -7.19967208e-27 -7.434650141e-27 -7.668934667e-27
-7.902923233e-27 -8.138487473e-27 -8.372311371e-27 -8.608022736e-27
-8.843936879e-27 -9.080247251e-27 -9.318406307e-27 -9.556979303e-27
DataSetFinish
DataSetStart
DataSetName, idvd
MeasurementType, DC
BatchName, opt_ex18
WaferName, TCAD
DieName, TCAD
DeviceName, nmos_2
Temperature, 26.85
FabDate, 25 Oct 2018
UserDate, 25 Oct 2018
Attribute, W, 0.0001
Attribute, L, 2e-06
NodeNames, drain gate source substrate
Sweep, 1, V, drain, LIST, 0.1, 0
List, 1
0 0.5 1 1.5
2 2.5 3 3.5
4 4.5 5 5.5
6 6.5 7 7.5
8 8.5 9 9.5
10 10.5 11 11.5
12 12.5 13 13.5
14 14.5 15
Sweep, 2, V, gate, LIST, 0.1, 0
List, 2
-3 -2 -1 0
Constant, V, source, 0, 0.1, 0
Constant, V, substrate, 0, 0.1, 0
Target, I, drain
Target, I, source
Target, I, gate
Target, I, substrate
Function, gds, derivative (vdrain, idrain)
Plot, idvd, XY (LIN LIN), vdrain, idrain
Plot, gds, XY (LIN LOG), vdrain, gds
DataArray, idrain
2.841363162e-15 0.01230817484 0.02345174113 0.03326724267
0.04155961471 0.04805292469 0.0526366621 0.05539870529
0.05682665326 0.05742500218 0.05779735875 0.0580616107
0.05822324124 0.05840635812 0.05856216319 0.0586563199
0.05879021921 0.05886521531 0.05898066033 0.05908084988
0.05912570612 0.05921323217 0.05928639695 0.0593481368
0.05939993136 0.05944295662 0.05947836993 0.05950736597
0.05953111952 0.05955069723 0.05956699512 1.762049038e-15
0.01416580212 0.02749142367 0.03987811897 0.05120906355
0.06134726469 0.07006030409 0.07711525477 0.08234707694
0.085878182 0.08793802679 0.0887746392 0.08914835825
0.08920692085 0.08917386082 0.08908870025 0.08904419077
0.08889315404 0.08880906971 0.08863707943 0.08853840898
0.08842529289 0.08830321627 0.08817498566 0.08804222316
0.08790590786 0.08776664325 0.08762480467 0.08748062767
0.08733426443 0.08724968332 5.139117395e-16 0.0155394475
0.03044094511 0.04464085387 0.05806495194 0.07062687243
0.08222688077 0.09275174943 0.1016696742 0.1089699262
0.1146822604 0.1187710294 0.1209721435 0.1219053094
0.1220168542 0.1217944235 0.1214001577 0.1210315172
0.1204845824 0.1200372303 0.1195659943 0.1190876376
0.1186108832 0.1181403313 0.1176783441 0.1172260665
0.1168715246 0.1165022269 0.116039937 0.1156873428
0.1153268937 -6.479793381e-16 0.01659965053 0.03269531864
0.04824358349 0.06319429613 0.07748973222 0.09106368511
0.103840628 0.1157350401 0.1263289127 0.1351219932
0.1422717425 0.147905273 0.1519966702 0.1538867914
0.1547116697 0.1547191645 0.1542050703 0.1532425409
0.1523531608 0.1513939565 0.1504167981 0.1494485195
0.1486271322 0.1477971064 0.1469756103 0.1461708198
0.1453865873 0.1446244693 0.1438847869 0.1431672154
DataArray, igate
-2.243809579e-15 -2.389317737e-15 -2.53314641e-15 -2.679519802e-15
-2.835339635e-15 -3.120492791e-15 -3.467125474e-15 -3.865756954e-15
-4.289176194e-15 -5.024814504e-15 -5.696928494e-15 -6.392585518e-15
-7.284595544e-15 -8.096706266e-15 -9.026193245e-15 -1.027894616e-14
-1.145304781e-14 -1.305584565e-14 -1.456689816e-14 -1.631418643e-14
-1.866570093e-14 -2.086842478e-14 -2.340056291e-14 -2.627810098e-14
-2.953440006e-14 -3.321240404e-14 -3.73636812e-14 -4.20480001e-14
-4.733292043e-14 -5.329354037e-14 -6.001259339e-14 -1.653686119e-15
-1.80025404e-15 -1.945747865e-15 -2.092139612e-15 -2.242742338e-15
-2.402795211e-15 -2.666236731e-15 -3.122437524e-15 -3.854989249e-15
-4.746802401e-15 -5.799441409e-15 -7.439029505e-15 -9.233658989e-15
-1.155915655e-14 -1.427096183e-14 -1.750834149e-14 -2.098876537e-14
-2.578174388e-14 -3.092801109e-14 -3.801489335e-14 -4.564095739e-14
-5.502183776e-14 -6.644882355e-14 -8.029061868e-14 -9.698260847e-14
-1.170295262e-13 -1.410111171e-13 -1.695896879e-13 -2.035203039e-13
-2.436651688e-13 -2.854409243e-13 -1.06208653e-15 -1.209202686e-15
-1.35552063e-15 -1.501950922e-15 -1.650096275e-15 -1.802514878e-15
-1.963109582e-15 -2.137730452e-15 -2.631203076e-15 -3.42526566e-15
-4.518283104e-15 -6.025284638e-15 -8.680859088e-15 -1.243932845e-14
-1.764531806e-14 -2.42694903e-14 -3.285487458e-14 -4.31548198e-14
-5.7985342e-14 -7.565746494e-14 -9.881970671e-14 -1.28909276e-13
-1.678260071e-13 -2.179948586e-13 -2.82448748e-13 -3.649176236e-13
-4.61038658e-13 -5.846606494e-13 -7.556540334e-13 -9.495616557e-13
-1.194065199e-12 -1.476436705e-31 -6.168848251e-16 -7.638204175e-16
-9.10344095e-16 -1.057347377e-15 -1.206104572e-15 -1.358582467e-15
-1.5176973e-15 -1.687705211e-15 -2.021323596e-15 -2.784815618e-15
-4.055522615e-15 -5.973282978e-15 -8.893163084e-15 -1.482692494e-14
-2.350314621e-14 -3.601763876e-14 -5.385669165e-14 -8.10168797e-14
-1.16669311e-13 -1.671711367e-13 -2.380459498e-13 -3.365406097e-13
-4.627197909e-13 -6.362373438e-13 -8.715240752e-13 -1.187849499e-12
-1.610219692e-12 -2.170635167e-12 -2.90950547e-12 -3.877214232e-12
DataArray, isource
5.563362608e-16 -0.01230817484 -0.02345174113 -0.03326724267
-0.04155961471 -0.04805292469 -0.0526366621 -0.05539870529
-0.05682665326 -0.05742500218 -0.05779735875 -0.0580616107
-0.05822324124 -0.05840635812 -0.05856216319 -0.0586563199
-0.0587902192 -0.05886521531 -0.05898066033 -0.05908084988
-0.05912570612 -0.05921323217 -0.05928639695 -0.0593481368
-0.05939993136 -0.05944295662 -0.05947836993 -0.05950736598
-0.05953111952 -0.05955069723 -0.05956699512 8.963395703e-16
-0.01416580212 -0.02749142367 -0.03987811897 -0.05120906355
-0.06134726469 -0.07006030409 -0.07711525477 -0.08234707694
-0.085878182 -0.08793802679 -0.0887746392 -0.08914835825
-0.08920692085 -0.08917386082 -0.08908870025 -0.08904419077
-0.08889315404 -0.08880906971 -0.08863707943 -0.08853840898
-0.08842529288 -0.08830321627 -0.08817498566 -0.08804222316
-0.08790590786 -0.08776664325 -0.08762480467 -0.08748062767
-0.08733426443 -0.08724968332 2.154611714e-16 -0.0155394475
-0.03044094511 -0.04464085387 -0.05806495234 -0.07062687257
-0.08222688088 -0.09275174943 -0.1016696742 -0.1089699262
-0.1146822604 -0.1187710294 -0.1209721435 -0.1219053094
-0.1220168542 -0.1217944235 -0.1214001577 -0.1210315172
-0.1204845824 -0.1200372303 -0.1195659943 -0.1190876376
-0.1186108832 -0.1181403313 -0.1176783441 -0.1172260665
-0.1168715246 -0.1165022269 -0.116039937 -0.1156873428
-0.1153268937 4.660739025e-16 -0.01659965053 -0.03269531864
-0.04824358349 -0.06319429653 -0.07748973234 -0.09106368518
-0.1038406281 -0.1157350402 -0.1263289127 -0.1351219932
-0.1422717425 -0.147905273 -0.1519966702 -0.1538867914
-0.1547116697 -0.1547191645 -0.1542050703 -0.1532425409
-0.1523531608 -0.1513939565 -0.1504167981 -0.1494485195
-0.1486271322 -0.1477971064 -0.1469756103 -0.1461708198
-0.1453865873 -0.1446244693 -0.1438847869 -0.1431672154
DataArray, isubstrate
5.636856575e-40 -2.129902879e-27 -2.526245639e-27 -2.877672663e-27
-3.212811639e-27 -3.53503727e-27 -3.842840963e-27 -4.13413803e-27
-4.410654559e-27 -4.677693362e-27 -4.940386597e-27 -5.200695385e-27
-5.459247698e-27 -5.717106447e-27 -5.974253741e-27 -6.230567417e-27
-6.486788114e-27 -6.742258272e-27 -6.99770421e-27 -7.252739657e-27
-7.507021335e-27 -7.761301977e-27 -8.015154356e-27 -8.268601407e-27
-8.521667901e-27 -8.774387361e-27 -9.026804891e-27 -9.278975797e-27
-9.530956057e-27 -9.782791524e-27 -1.003451437e-26 4.024975459e-40
-2.146672412e-27 -2.537913815e-27 -2.890507903e-27 -3.231026197e-27
-3.564163876e-27 -3.890340436e-27 -4.208261544e-27 -4.515617146e-27
-4.810528469e-27 -5.092411096e-27 -5.36271714e-27 -5.626597089e-27
-5.886275077e-27 -6.143782214e-27 -6.399788607e-27 -6.655229033e-27
-6.909297018e-27 -7.16333966e-27 -7.416307746e-27 -7.669423116e-27
-7.922069639e-27 -8.174285581e-27 -8.42609861e-27 -8.677531552e-27
-8.928609242e-27 -9.179359574e-27 -9.429817018e-27 -9.68001919e-27
-9.930000806e-27 -1.018036788e-26 2.553068198e-40 -2.156587195e-27
-2.544358365e-27 -2.897063881e-27 -3.239511839e-27 -3.576478834e-27
-3.909184041e-27 -4.237660876e-27 -4.560209671e-27 -4.875304241e-27
-5.182049203e-27 -5.47877697e-27 -5.762587305e-27 -6.035141413e-27
-6.29888235e-27 -6.557503542e-27 -6.812945121e-27 -7.067141509e-27
-7.318964006e-27 -7.570542306e-27 -7.821197009e-27 -8.071175354e-27
-8.320630815e-27 -8.569670898e-27 -8.818366183e-27 -9.066771048e-27
-9.315678097e-27 -9.564257481e-27 -9.811868606e-27 -1.006017555e-26
-1.030829921e-26 -8.755359802e-43 -2.163138935e-27 -2.548449134e-27
-2.901023191e-27 -3.244338128e-27 -3.58305355e-27 -3.918546723e-27
-4.251204551e-27 -4.580959352e-27 -4.90629221e-27 -5.224567454e-27
-5.535631721e-27 -5.839392847e-27 -6.134598533e-27 -6.416275561e-27
-6.688486451e-27 -6.952169873e-27 -7.209344076e-27 -7.460912804e-27
-7.711075294e-27 -7.95935986e-27 -8.206391225e-27 -8.45252282e-27
-8.699085386e-27 -8.945041016e-27 -9.190659296e-27 -9.436125363e-27
-9.681592692e-27 -9.927202941e-27 -1.017308775e-26 -1.041936793e-26
DataSetFinish
DataSetStart
DataSetName, idvd
MeasurementType, DC
BatchName, opt_ex18
WaferName, TCAD
DieName, TCAD
DeviceName, nmos_3
Temperature, 26.85
FabDate, 25 Oct 2018
UserDate, 25 Oct 2018
Attribute, W, 0.0001
Attribute, L, 3e-06
NodeNames, drain gate source substrate
Sweep, 1, V, drain, LIST, 0.1, 0
List, 1
0 0.5 1 1.5
2 2.5 3 3.5
4 4.5 5 5.5
6 6.5 7 7.5
8 8.5 9 9.5
10 10.5 11 11.5
12 12.5 13 13.5
14 14.5 15
Sweep, 2, V, gate, LIST, 0.1, 0
List, 2
-3 -2 -1 0
Constant, V, source, 0, 0.1, 0
Constant, V, substrate, 0, 0.1, 0
Target, I, drain
Target, I, source
Target, I, gate
Target, I, substrate
Function, gds, derivative (vdrain, idrain)
Plot, idvd, XY (LIN LIN), vdrain, idrain
Plot, gds, XY (LIN LOG), vdrain, gds
DataArray, idrain
6.008411602e-17 0.01000607771 0.01889248747 0.02653413941
0.03278763855 0.03750037577 0.04052755327 0.04212370469
0.04284806468 0.04321987964 0.04342245274 0.04358296004
0.04372084576 0.04384526823 0.04396040564 0.04404062006
0.04414732727 0.04424505518 0.04433499518 0.04441752436
0.04446612249 0.0445404672 0.04460641329 0.0446658496
0.04471998995 0.04476990215 0.04481648452 0.04486043114
0.0449022376 0.04494223183 0.04498060992 6.675883907e-16
0.01186106327 0.02286718817 0.03293520246 0.04196959648
0.0498611674 0.05648903732 0.06165176848 0.06524406039
0.06744335047 0.06857813906 0.06903675696 0.06918710416
0.06925518391 0.06928438046 0.06924442132 0.0692533789
0.06925165493 0.06924313173 0.06922947839 0.069211477
0.06918951415 0.06916379362 0.06913442158 0.06910144406
0.06906487426 0.06902472394 0.06898104224 0.06893395804
0.06892501044 0.06886172914 1.271521268e-15 0.01330156126
0.02592698716 0.03781883151 0.04891172968 0.05913133897
0.06839346767 0.07660432137 0.08356579449 0.08899574291
0.09304138463 0.09572994698 0.09711618857 0.09749773979
0.097536046 0.09741458217 0.0972229636 0.09700049993
0.09676515179 0.09652607065 0.09628811594 0.09605361061
0.09582345485 0.09559785296 0.09543696337 0.09520484252
0.0950410368 0.09480985231 0.09464650834 0.09447543296
0.0942999591 1.874291174e-16 0.01445459478 0.02835891494
0.04167169784 0.0543463534 0.06633035753 0.0775645816
0.08798269854 0.09751091268 0.1059552097 0.1130022034
0.1186223978 0.1227368714 0.1255547171 0.1270156635
0.1272803077 0.1270851408 0.1266488035 0.1261076199
0.1255297446 0.1249466934 0.1244654268 0.123884055
0.1234152446 0.1229468346 0.1224849053 0.1220320313
0.1215892943 0.1211570525 0.1208105053 0.12037898
DataArray, igate
-3.28783626e-15 -3.500570719e-15 -3.708393478e-15 -3.913861885e-15
-4.121278298e-15 -4.33671564e-15 -4.733856048e-15 -5.125154545e-15
-5.496121408e-15 -5.852790206e-15 -6.344700375e-15 -6.814368246e-15
-7.293433171e-15 -7.796326299e-15 -8.333367592e-15 -9.05635536e-15
-9.657017048e-15 -1.032288283e-14 -1.105214922e-14 -1.184808725e-14
-1.292895161e-14 -1.383479066e-14 -1.484120226e-14 -1.594548501e-14
-1.715384368e-14 -1.847459233e-14 -1.991715861e-14 -2.149178967e-14
-2.320949452e-14 -2.508208748e-14 -2.712227447e-14 -2.423135942e-15
-2.637623502e-15 -2.849238945e-15 -3.059346546e-15 -3.270376582e-15
-3.486273439e-15 -3.713140085e-15 -4.103947732e-15 -4.737922852e-15
-5.441835798e-15 -6.194285612e-15 -7.18498116e-15 -8.393595445e-15
-9.654232817e-15 -1.102632486e-14 -1.277920451e-14 -1.445873197e-14
-1.639286715e-14 -1.862113513e-14 -2.119212932e-14 -2.415944806e-14
-2.758162674e-14 -3.152291122e-14 -3.605430682e-14 -4.12547975e-14
-4.721281173e-14 -5.402806962e-14 -6.18139356e-14 -7.070029138e-14
-7.933370609e-14 -9.121964738e-14 -1.556269939e-15 -1.771669798e-15
-1.985133913e-15 -2.197304776e-15 -2.409433733e-15 -2.623603005e-15
-2.843054338e-15 -3.072706995e-15 -3.428801034e-15 -4.156969681e-15
-5.074831607e-15 -6.221619453e-15 -7.871430121e-15 -1.032897035e-14
-1.307476234e-14 -1.626179785e-14 -2.005046773e-14 -2.461818476e-14
-3.016110315e-14 -3.690797004e-14 -4.514271888e-14 -5.521981848e-14
-6.757109185e-14 -8.271043945e-14 -9.934597385e-14 -1.223580449e-13
-1.472749238e-13 -1.813679669e-13 -2.1798728e-13 -2.627070129e-13
-3.166454977e-13 -6.45935427e-32 -9.036547362e-16 -1.118524188e-15
-1.331827618e-15 -1.544509077e-15 -1.757643241e-15 -1.972944587e-15
-2.192998554e-15 -2.421616618e-15 -2.743970677e-15 -3.361606601e-15
-4.343567908e-15 -5.904022497e-15 -8.030330414e-15 -1.125662012e-14
-1.635721986e-14 -2.279370359e-14 -3.102133639e-14 -4.166108156e-14
-5.553793855e-14 -7.370778573e-14 -9.557366476e-14 -1.268819683e-13
-1.640780704e-13 -2.127291998e-13 -2.758603978e-13 -3.574417346e-13
-4.624551994e-13 -5.970382976e-13 -7.543212691e-13 -9.753697036e-13
DataArray, isource
8.668133797e-16 -0.01000607771 -0.01889248747 -0.02653413941
-0.03278763855 -0.03750037577 -0.04052755327 -0.04212370469
-0.04284806468 -0.04321987964 -0.04342245274 -0.04358296004
-0.04372084576 -0.04384526823 -0.04396040564 -0.04404062006
-0.04414732727 -0.04424505518 -0.04433499518 -0.04441752436
-0.04446612249 -0.0445404672 -0.04460641329 -0.0446658496
-0.04471998995 -0.04476990215 -0.04481648452 -0.04486043114
-0.0449022376 -0.04494223183 -0.04498060992 5.827469964e-16
-0.01186106327 -0.02286718817 -0.03293520246 -0.04196959648
-0.0498611674 -0.05648903732 -0.06165176848 -0.06524406039
-0.06744335047 -0.06857813906 -0.06903675696 -0.06918710416
-0.06925518391 -0.06928438046 -0.06924442132 -0.0692533789
-0.06925165493 -0.06924313172 -0.06922947839 -0.069211477
-0.06918951414 -0.06916379362 -0.06913442158 -0.06910144406
-0.06906487426 -0.06902472394 -0.06898104224 -0.06893395804
-0.06892501044 -0.06886172914 1.383949897e-15 -0.01330156126
-0.02592698716 -0.03781883151 -0.04891173007 -0.0591313391
-0.06839346778 -0.07660432137 -0.08356579449 -0.08899574291
-0.09304138463 -0.09572994698 -0.09711618857 -0.09749773979
-0.097536046 -0.09741458217 -0.0972229636 -0.09700049993
-0.09676515179 -0.09652607065 -0.09628811594 -0.09605361061
-0.09582345485 -0.09559785296 -0.09543696337 -0.09520484252
-0.0950410368 -0.09480985231 -0.09464650834 -0.09447543296
-0.0942999591 -1.650229081e-16 -0.01445459478 -0.02835891494
-0.04167169784 -0.05434635379 -0.06633035765 -0.07756458167
-0.08798269861 -0.09751091277 -0.1059552097 -0.1130022034
-0.1186223978 -0.1227368714 -0.1255547171 -0.1270156635
-0.1272803077 -0.1270851408 -0.1266488035 -0.1261076199
-0.1255297446 -0.1249466934 -0.1244654268 -0.123884055
-0.1234152446 -0.1229468346 -0.1224849053 -0.1220320313
-0.1215892943 -0.1211570525 -0.1208105053 -0.12037898
DataArray, isubstrate
1.087323241e-39 -2.369110739e-27 -2.812362486e-27 -3.199992452e-27
-3.56507852e-27 -3.910433685e-27 -4.231822594e-27 -4.527460104e-27
-4.803831732e-27 -5.071053494e-27 -5.33414099e-27 -5.595293743e-27
-5.855198354e-27 -6.11427697e-27 -6.372767038e-27 -6.630512144e-27
-6.88814319e-27 -7.145336517e-27 -7.402123004e-27 -7.65851342e-27
-7.914197711e-27 -8.169859025e-27 -8.425105152e-27 -8.679971394e-27
-8.934487148e-27 -9.188685826e-27 -9.442608717e-27 -9.696306005e-27
-9.949829367e-27 -1.020322198e-26 -1.045651469e-26 7.635511948e-40
-2.393172095e-27 -2.829872318e-27 -3.219872687e-27 -3.594091167e-27
-3.957556899e-27 -4.310105662e-27 -4.648981971e-27 -4.970457478e-27
-5.272158679e-27 -5.555397921e-27 -5.82604685e-27 -6.090151569e-27
-6.351206186e-27 -6.61039781e-27 -6.867880254e-27 -7.125004163e-27
-7.381454909e-27 -7.637382844e-27 -7.892849967e-27 -8.147877244e-27
-8.402470516e-27 -8.656636363e-27 -8.910391973e-27 -9.163756271e-27
-9.416754358e-27 -9.669417991e-27 -9.921786953e-27 -1.017390411e-26
-1.042632314e-26 -1.06779423e-26 4.765013068e-40 -2.407554129e-27
-2.839504793e-27 -3.229985446e-27 -3.607635049e-27 -3.97778203e-27
-4.341463287e-27 -4.698241227e-27 -5.046344801e-27 -5.382435935e-27
-5.704680085e-27 -6.010678402e-27 -6.299082002e-27 -6.572498872e-27
-6.837741953e-27 -7.098305953e-27 -7.356162317e-27 -7.612269776e-27
-7.867108862e-27 -8.121003285e-27 -8.374198927e-27 -8.626850645e-27
-8.879043212e-27 -9.130832005e-27 -9.382915623e-27 -9.633859327e-27
-9.885229518e-27 -1.013557212e-26 -1.038644228e-26 -1.063704821e-26
-1.088746322e-26 4.615442919e-43 -2.417086985e-27 -2.845583892e-27
-3.236043153e-27 -3.615290329e-27 -3.9885491e-27 -4.357224458e-27
-4.721522699e-27 -5.081047264e-27 -5.434454837e-27 -5.778891973e-27
-6.112746469e-27 -6.433738815e-27 -6.741061295e-27 -7.03242945e-27
-7.308093105e-27 -7.573995244e-27 -7.833482605e-27 -8.089093981e-27
-8.342329243e-27 -8.593992729e-27 -8.8454185e-27 -9.094840773e-27
-9.344584481e-27 -9.593702827e-27 -9.842400196e-27 -1.009080581e-26
-1.03390155e-26 -1.058710963e-26 -1.083597055e-26 -1.108382798e-26
DataSetFinish
DataSetStart
DataSetName, idvgsat
MeasurementType, DC_TABLE
BatchName, opt_ex18
WaferName, TCAD
DieName, TCAD
DeviceName, nmos_1
Temperature, 26.85
FabDate, 25 Oct 2018
UserDate, 25 Oct 2018
Attribute, W, 0.0001
Attribute, L, 1e-06
NodeNames, gate drain source substrate
Sweep, 1, V, gate, LIST, 0.1, 0
List, 1
-9.5 -9 -8.5 -8
-7.5 -7 -6.5 -6
-5.5 -5 -4.5 -4
-3.5 -3 -2.5 -2
-1.5 -1 -0.5 1.285828941e-15
0.5 1
Sweep, 2, V, drain, LIST, 0.1, 0
List, 2
1 1 1 1
1 1 1 1
1 1 1 1
1 1 1 1
1 1 1 1
1 1
Sweep, 3, V, source, LIST, 0.1, 0
List, 3
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0
Sweep, 4, V, substrate, LIST, 0.1, 0
List, 4
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0
Target, I, gate
Target, I, drain
Target, I, source
Target, I, substrate
Function, gm, derivative (vgate, idrain)
Plot, idvg, XY (LIN LIN), vgate, idrain
Plot, gm, XY (LIN LIN), vgate, gm
DataArray, Idrain
-6.360009627e-16 5.219768933e-16 2.963049426e-15 8.787694837e-16
2.647174923e-15 1.733761207e-15 1.070831291e-09 0.0005193135882
0.005682942323 0.01387101811 0.0204603608 0.02505486119
0.02838397518 0.03090068394 0.03287039468 0.03445571162
0.03576106598 0.03685635674 0.03779004619 0.0385967571
0.03930186888 0.03992436292
DataArray, Igate
-2.226392413e-15 -2.216404508e-15 -2.20640791e-15 -2.196399885e-15
-2.186374313e-15 -2.176320974e-15 -2.166222891e-15 -2.138486806e-15
-2.056872377e-15 -1.951039965e-15 -1.813496192e-15 -1.663767928e-15
-1.509921715e-15 -1.354251882e-15 -1.197608045e-15 -1.040375004e-15
-8.827531536e-16 -7.24857959e-16 -5.667611982e-16 -4.085101845e-16
1.1369271e-15 9.190771385e-08
DataArray, Isource
2.123805395e-15 3.41209609e-16 1.182346984e-15 -9.03889484e-16
1.931400107e-15 1.408510669e-15 -1.07082896e-09 -0.0005193135882
-0.005682942323 -0.01387101811 -0.0204603608 -0.02505486119
-0.02838397518 -0.03090068394 -0.03287039468 -0.03445571184
-0.03576106605 -0.03685635676 -0.0377900462 -0.03859675711
-0.03930186888 -0.03992445482
DataArray, Isubstrate
1.029248239e-17 8.269284467e-19 1.612531313e-20 6.868995839e-23
4.64807605e-26 -1.415142734e-27 -1.473329519e-27 -1.634829213e-27
-2.005947671e-27 -2.163881866e-27 -2.208268281e-27 -2.225335593e-27
-2.23410353e-27 -2.239406247e-27 -2.242954151e-27 -2.24549585e-27
-2.247408548e-27 -2.248902305e-27 -2.250103146e-27 -2.251091186e-27
-2.251919758e-27 -2.252626059e-27
DataSetFinish
DataSetStart
DataSetName, idvgsat
MeasurementType, DC_TABLE
BatchName, opt_ex18
WaferName, TCAD
DieName, TCAD
DeviceName, nmos_2
Temperature, 26.85
FabDate, 25 Oct 2018
UserDate, 25 Oct 2018
Attribute, W, 0.0001
Attribute, L, 2e-06
NodeNames, gate drain source substrate
Sweep, 1, V, gate, LIST, 0.1, 0
List, 1
-9.5 -9 -8.5 -8
-7.5 -7 -6.5 -6
-5.5 -5 -4.5 -4
-3.5 -3 -2.5 -2
-1.5 -1 -0.5 1.285828941e-15
0.5 1
Sweep, 2, V, drain, LIST, 0.1, 0
List, 2
1 1 1 1
1 1 1 1
1 1 1 1
1 1 1 1
1 1 1 1
1 1
Sweep, 3, V, source, LIST, 0.1, 0
List, 3
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0
Sweep, 4, V, substrate, LIST, 0.1, 0
List, 4
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0
Target, I, gate
Target, I, drain
Target, I, source
Target, I, substrate
Function, gm, derivative (vgate, idrain)
Plot, idvg, XY (LIN LIN), vgate, idrain
Plot, gm, XY (LIN LIN), vgate, gm
DataArray, Idrain
2.707195276e-15 2.109484273e-15 1.131883833e-15 1.392796834e-15
1.158621018e-15 4.10758329e-16 1.64727002e-10 0.0002344895655
0.003076952908 0.008426957446 0.01352404712 0.01757405953
0.02081280983 0.02345256493 0.02564375768 0.0274920534
0.02907294424 0.03044151237 0.03163878021 0.03269588008
0.03363684344 0.03448023291
DataArray, Igate
-4.113728834e-15 -4.101182914e-15 -4.08862795e-15 -4.076061304e-15
-4.063476898e-15 -4.050864002e-15 -4.038205532e-15 -3.990899782e-15
-3.83269801e-15 -3.638516092e-15 -3.385582041e-15 -3.107773338e-15
-2.821320315e-15 -2.530957718e-15 -2.238494275e-15 -1.94476429e-15
-1.650205541e-15 -1.3550703e-15 -1.05951467e-15 -7.636406876e-16
1.378647983e-14 7.014214228e-07
DataArray, Isource
1.006620888e-15 1.04082038e-15 1.307676374e-15 2.776339598e-15
2.968203795e-15 1.889642617e-15 -1.647213887e-10 -0.0002344895655
-0.003076952909 -0.008426957446 -0.01352404712 -0.01757405953
-0.02081280983 -0.02345256493 -0.02564375768 -0.02749205352
-0.02907294429 -0.03044151239 -0.03163878022 -0.03269588008
-0.03363684344 -0.03448093433
DataArray, Isubstrate
8.260728005e-16 5.534121955e-16 2.175889372e-16 9.337482773e-18
2.710768775e-21 2.029025059e-27 -1.561235608e-27 -1.782155132e-27
-2.149835252e-27 -2.383797018e-27 -2.466079478e-27 -2.498970395e-27
-2.515952979e-27 -2.526190288e-27 -2.533001351e-27 -2.537850125e-27
-2.541475732e-27 -2.544289506e-27 -2.54653776e-27 -2.548376677e-27
-2.549909931e-27 -2.551212245e-27
DataSetFinish
DataSetStart
DataSetName, idvgsat
MeasurementType, DC_TABLE
BatchName, opt_ex18
WaferName, TCAD
DieName, TCAD
DeviceName, nmos_3
Temperature, 26.85
FabDate, 25 Oct 2018
UserDate, 25 Oct 2018
Attribute, W, 0.0001
Attribute, L, 3e-06
NodeNames, gate drain source substrate
Sweep, 1, V, gate, LIST, 0.1, 0
List, 1
-9.5 -9 -8.5 -8
-7.5 -7 -6.5 -6
-5.5 -5 -4.5 -4
-3.5 -3 -2.5 -2
-1.5 -1 -0.5 1.285828941e-15
0.5 1
Sweep, 2, V, drain, LIST, 0.1, 0
List, 2
1 1 1 1
1 1 1 1
1 1 1 1
1 1 1 1
1 1 1 1
1 1
Sweep, 3, V, source, LIST, 0.1, 0
List, 3
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0
Sweep, 4, V, substrate, LIST, 0.1, 0
List, 4
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0
Target, I, gate
Target, I, drain
Target, I, source
Target, I, substrate
Function, gm, derivative (vgate, idrain)
Plot, idvg, XY (LIN LIN), vgate, idrain
Plot, gm, XY (LIN LIN), vgate, gm
DataArray, Idrain
-4.35470087e-16 4.940279275e-16 2.185294457e-15 3.407511756e-15
3.192768776e-15 3.390473276e-15 8.044291577e-11 0.0001496811188
0.002100941652 0.006036673192 0.01008695632 0.01352394777
0.01642364539 0.01889301357 0.02101878064 0.02286761899
0.02449064471 0.02592738847 0.02720878138 0.02835931992
0.02939863151 0.03034152524
DataArray, Igate
-5.99950689e-15 -5.984600144e-15 -5.969684326e-15 -5.95475681e-15
-5.939811528e-15 -5.924837724e-15 -5.909818314e-15 -5.842418511e-15
-5.606119077e-15 -5.322591286e-15 -4.954773331e-15 -4.549472119e-15
-4.130893343e-15 -3.706212644e-15 -3.278217442e-15 -2.84821176e-15
-2.416887343e-15 -1.984645822e-15 -1.551736911e-15 -1.118323597e-15
8.123720593e-14 3.110131238e-06
DataArray, Isource
1.021231313e-15 7.532998212e-16 1.338623771e-15 2.006740756e-15
2.426065754e-15 3.219485578e-15 -8.043781151e-11 -0.0001496811188
-0.002100941652 -0.006036673192 -0.01008695632 -0.01352394777
-0.01642364539 -0.01889301357 -0.02101878082 -0.02286761905
-0.02449064473 -0.02592738848 -0.02720878138 -0.02835931993
-0.02939863151 -0.03034463537
DataArray, Isubstrate
2.47020831e-15 2.084091886e-15 1.469264907e-15 4.178675557e-16
1.912620551e-19 4.491835698e-26 -1.652149533e-27 -1.954734734e-27
-2.336691612e-27 -2.610583626e-27 -2.723599881e-27 -2.771642237e-27
-2.796958578e-27 -2.812315455e-27 -2.822543507e-27 -2.829816544e-27
-2.835243099e-27 -2.839443303e-27 -2.842789546e-27 -2.845518265e-27
-2.847786476e-27 -2.849720491e-27
DataSetFinish
DataSetStart
DataSetName, idvglin
MeasurementType, DC_TABLE
BatchName, opt_ex18
WaferName, TCAD
DieName, TCAD
DeviceName, nmos_1
Temperature, 26.85
FabDate, 25 Oct 2018
UserDate, 25 Oct 2018
Attribute, W, 0.0001
Attribute, L, 1e-06
NodeNames, gate drain source substrate
Sweep, 1, V, gate, LIST, 0.1, 0
List, 1
-9.5 -9 -8.5 -8
-7.5 -7 -6.5 -6
-5.5 -5 -4.5 -4
-3.5 -3 -2.5 -2
-1.5 -1 -0.5 1.285828941e-15
0.5
Sweep, 2, V, drain, LIST, 0.1, 0
List, 2
0.1 0.1 0.1 0.1
0.1 0.1 0.1 0.1
0.1 0.1 0.1 0.1
0.1 0.1 0.1 0.1
0.1 0.1 0.1 0.1
0.1
Sweep, 3, V, source, LIST, 0.1, 0
List, 3
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0
Sweep, 4, V, substrate, LIST, 0.1, 0
List, 4
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0
Target, I, gate
Target, I, drain
Target, I, source
Target, I, substrate
Function, gm, derivative (vgate, idrain)
Plot, idvg, XY (LIN LIN), vgate, idrain
Plot, gm, XY (LIN LIN), vgate, gm
DataArray, Idrain
-4.269914863e-16 -5.055471376e-16 1.001645272e-15 1.419556461e-15
-1.989449854e-17 1.419441286e-15 4.343532918e-10 0.000277599559
0.001292014284 0.00199390335 0.0024716737 0.002814800358
0.003072847473 0.003274114723 0.003435709599 0.003568525542
0.003679810772 0.003774569037 0.003856363606 0.003927799926
0.003990824923
DataArray, Igate
-2.219700941e-15 -2.209703592e-15 -2.199696263e-15 -2.189675125e-15
-2.17963045e-15 -2.169545262e-15 -2.159396508e-15 -2.123735817e-15
-1.989859044e-15 -1.839449337e-15 -1.685240067e-15 -1.529415425e-15
-1.372713727e-15 -1.215467792e-15 -1.057854183e-15 -8.999770339e-16
-7.419025409e-16 -5.836752083e-16 -4.25326292e-16 -2.271716373e-16
4.027671477e-09
DataArray, Isource
5.566608865e-16 3.373221197e-16 1.595726029e-15 1.335686143e-15
5.783086936e-16 1.152380412e-15 -4.343524506e-10 -0.000277599559
-0.001292014284 -0.00199390335 -0.0024716737 -0.002814800358
-0.003072847473 -0.003274114723 -0.003435709602 -0.003568525543
-0.003679810773 -0.003774569037 -0.003856363606 -0.003927799926
-0.003990828951
DataArray, Isubstrate
4.012218825e-17 7.079145815e-18 2.772737685e-19 1.759111708e-21
1.237539243e-24 -8.752542198e-28 -9.496938265e-28 -1.065349883e-27
-1.186258808e-27 -1.245292723e-27 -1.278684357e-27 -1.299786236e-27
-1.314211375e-27 -1.324653053e-27 -1.33254508e-27 -1.33871432e-27
-1.343668503e-27 -1.347735456e-27 -1.35113574e-27 -1.354022913e-27
-1.356507177e-27
DataSetFinish
DataSetStart
DataSetName, idvglin
MeasurementType, DC_TABLE
BatchName, opt_ex18
WaferName, TCAD
DieName, TCAD
DeviceName, nmos_2
Temperature, 26.85
FabDate, 25 Oct 2018
UserDate, 25 Oct 2018
Attribute, W, 0.0001
Attribute, L, 2e-06
NodeNames, gate drain source substrate
Sweep, 1, V, gate, LIST, 0.1, 0
List, 1
-9.5 -9 -8.5 -8
-7.5 -7 -6.5 -6
-5.5 -5 -4.5 -4
-3.5 -3 -2.5 -2
-1.5 -1 -0.5 1.285828941e-15
0.5
Sweep, 2, V, drain, LIST, 0.1, 0
List, 2
0.1 0.1 0.1 0.1
0.1 0.1 0.1 0.1
0.1 0.1 0.1 0.1
0.1 0.1 0.1 0.1
0.1 0.1 0.1 0.1
0.1
Sweep, 3, V, source, LIST, 0.1, 0
List, 3
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0
Sweep, 4, V, substrate, LIST, 0.1, 0
List, 4
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0
Target, I, gate
Target, I, drain
Target, I, source
Target, I, substrate
Function, gm, derivative (vgate, idrain)
Plot, idvg, XY (LIN LIN), vgate, idrain
Plot, gm, XY (LIN LIN), vgate, gm
DataArray, Idrain
1.294469916e-15 2.558836092e-15 5.036557624e-16 1.363416662e-15
1.794752134e-15 2.604720191e-15 1.203115468e-10 0.0001455489759
0.0007778089494 0.001308459684 0.001724482851 0.002055697333
0.002324902228 0.002547906652 0.002735716747 0.002896152792
0.003034898134 0.003156172546 0.003263170662 0.003358353574
0.003443643431
DataArray, Igate
-4.10683804e-15 -4.094282122e-15 -4.081715757e-15 -4.069135211e-15
-4.056530618e-15 -4.043883886e-15 -4.031170258e-15 -3.970696287e-15
-3.721113115e-15 -3.439975248e-15 -3.151641791e-15 -2.860255464e-15
-2.567214113e-15 -2.273147049e-15 -1.978387734e-15 -1.683132642e-15
-1.38750655e-15 -1.091593281e-15 -7.954516676e-16 -4.22330596e-16
7.742031806e-09
DataArray, Isource
1.422270014e-15 2.967547199e-15 2.054018097e-15 1.632747287e-15
1.536007501e-15 1.222621592e-15 -1.203075086e-10 -0.0001455489759
-0.0007778089494 -0.001308459684 -0.001724482851 -0.002055697333
-0.002324902228 -0.002547906656 -0.002735716748 -0.002896152792
-0.003034898134 -0.003156172546 -0.003263170662 -0.003358353574
-0.003443651173
DataArray, Isubstrate
1.014696777e-15 7.364974751e-16 3.570540543e-16 2.744516957e-17
9.226915049e-21 6.981277175e-27 -1.038241004e-27 -1.211456651e-27
-1.318903486e-27 -1.378528503e-27 -1.417979362e-27 -1.445779605e-27
-1.466296043e-27 -1.481992546e-27 -1.494353035e-27 -1.504318801e-27
-1.512512926e-27 -1.519362782e-27 -1.525170457e-27 -1.530155056e-27
-1.534479486e-27
DataSetFinish
DataSetStart
DataSetName, idvglin
MeasurementType, DC_TABLE
BatchName, opt_ex18
WaferName, TCAD
DieName, TCAD
DeviceName, nmos_3
Temperature, 26.85
FabDate, 25 Oct 2018
UserDate, 25 Oct 2018
Attribute, W, 0.0001
Attribute, L, 3e-06
NodeNames, gate drain source substrate
Sweep, 1, V, gate, LIST, 0.1, 0
List, 1
-9.5 -9 -8.5 -8
-7.5 -7 -6.5 -6
-5.5 -5 -4.5 -4
-3.5 -3 -2.5 -2
-1.5 -1 -0.5 1.285828941e-15
0.5
Sweep, 2, V, drain, LIST, 0.1, 0
List, 2
0.1 0.1 0.1 0.1
0.1 0.1 0.1 0.1
0.1 0.1 0.1 0.1
0.1 0.1 0.1 0.1
0.1 0.1 0.1 0.1
0.1
Sweep, 3, V, source, LIST, 0.1, 0
List, 3
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0
Sweep, 4, V, substrate, LIST, 0.1, 0
List, 4
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0
Target, I, gate
Target, I, drain
Target, I, source
Target, I, substrate
Function, gm, derivative (vgate, idrain)
Plot, idvg, XY (LIN LIN), vgate, idrain
Plot, gm, XY (LIN LIN), vgate, gm
DataArray, Idrain
2.150328571e-15 2.675291677e-16 1.403126045e-15 3.114629478e-15
4.137788559e-15 3.813254246e-15 6.695184855e-11 9.857058568e-05
0.0005563397805 0.0009736923434 0.001324157592 0.001619046505
0.001869774471 0.002085356642 0.002272672524 0.002436976693
0.002582322474 0.002711875169 0.002828137564 0.002933112255
0.003028414167
DataArray, Igate
-5.99259835e-15 -5.977681557e-15 -5.962754282e-15 -5.94781279e-15
-5.93284721e-15 -5.917839375e-15 -5.902764395e-15 -5.817611361e-15
-5.45233553e-15 -5.04047469e-15 -4.61802383e-15 -4.19108172e-15
-3.761705347e-15 -3.330820675e-15 -2.898918315e-15 -2.466287293e-15
-2.033111131e-15 -1.599513096e-15 -1.165579685e-15 -6.148628915e-16
1.168064043e-08
DataArray, Isource
1.338078716e-15 1.978371937e-15 2.378449442e-15 3.839222024e-15
3.34642243e-15 3.269480832e-15 -6.694441806e-11 -9.857058568e-05
-0.0005563397805 -0.0009736923434 -0.001324157592 -0.001619046505
-0.001869774471 -0.002085356643 -0.002272672525 -0.002436976694
-0.002582322474 -0.002711875169 -0.002828137564 -0.002933112255
-0.003028425848
DataArray, Isubstrate
2.709635764e-15 2.343500152e-15 1.741171292e-15 6.009168131e-16
3.312714885e-19 6.941815287e-26 -1.126955022e-27 -1.367923252e-27
-1.473829774e-27 -1.530903945e-27 -1.571520603e-27 -1.602000798e-27
-1.625647228e-27 -1.644469307e-27 -1.659768855e-27 -1.672425314e-27
-1.68305285e-27 -1.692092289e-27 -1.699867559e-27 -1.706621589e-27
-1.712540628e-27
DataSetFinish
DataSetStart
DataSetName, idvd
MeasurementType, DC
BatchName, opt_ex18
WaferName, TCAD
DieName, TCAD
DeviceName, nmos_1
Temperature, 126.85
FabDate, 25 Oct 2018
UserDate, 25 Oct 2018
Attribute, W, 0.0001
Attribute, L, 1e-06
NodeNames, drain gate source substrate
Sweep, 1, V, drain, LIST, 0.1, 0
List, 1
0 0.5 1 1.5
2 2.5 3 3.5
4 4.5 5 5.5
6 6.5 7 7.5
8 8.5 9 9.5
10 10.5 11 11.5
12 12.5 13 13.5
14 14.5 15
Sweep, 2, V, gate, LIST, 0.1, 0
List, 2
-3 -2 -1 0
Constant, V, source, 0, 0.1, 0
Constant, V, substrate, 0, 0.1, 0
Target, I, drain
Target, I, source
Target, I, gate
Target, I, substrate
Function, gds, derivative (vdrain, idrain)
Plot, idvd, XY (LIN LIN), vdrain, idrain
Plot, gds, XY (LIN LOG), vdrain, gds
DataArray, idrain
1.420462999e-11 0.007344947092 0.01420164208 0.0204784112
0.02606080049 0.03081573861 0.03458186621 0.03734153575
0.03916923796 0.04031469872 0.04106315241 0.04157021321
0.04197489452 0.04231735863 0.04262128899 0.04290009605
0.04316151397 0.04340997446 0.04364795948 0.04387683395
0.0440973466 0.04430991288 0.0445147696 0.04471206371
0.04490191144 0.04508444584 0.04525985921 0.04542843951
0.04559059298 0.04574684413 0.04589780838 1.048603553e-11
0.00807670893 0.01582895138 0.02320877664 0.03015751748
0.0366041259 0.0424651624 0.0476010797 0.05195596959
0.05545226923 0.05806665815 0.05981070792 0.06091307089
0.06164667023 0.06215374387 0.06252559862 0.06281438295
0.06305013055 0.0632018041 0.06338994331 0.06355662412
0.06370942304 0.06385192842 0.06398618217 0.06411340917
0.06423437164 0.0643495592 0.06445929327 0.06456378701
0.06466318247 0.06475757604 6.757859028e-12 0.008581912458
0.01693016518 0.02501684196 0.03280851413 0.04026531303
0.04734004209 0.05397759963 0.06011493155 0.06553489456
0.07028773014 0.07429736942 0.07751245211 0.07983407349
0.08137558324 0.08239180785 0.08303543631 0.08335959592
0.08362882661 0.08372065163 0.08383890919 0.08390820082
0.08387801267 0.08391394221 0.0839302776 0.08393551985
0.0839336559 0.08392695574 0.0839167891 0.08390400352
0.08388913143 2.996231416e-16 0.008953797286 0.01772923856
0.02630862891 0.03467109333 0.042792121 0.05064305247
0.05819055632 0.0653961237 0.07221560072 0.07851154702
0.08418482288 0.08914941427 0.09345658207 0.09705148669
0.09964101937 0.1015649052 0.1028782424 0.1036988051
0.1040511626 0.1042986714 0.1042787425 0.1042809145
0.1042084285 0.104091256 0.1039469941 0.1037869095
0.1036183933 0.1034462944 0.1032737421 0.1031026833
DataArray, igate
-2.848627008e-11 -3.03271544e-11 -3.215787217e-11 -3.402317247e-11
-3.598349044e-11 -3.810590155e-11 -4.178190703e-11 -4.528395707e-11
-4.874271624e-11 -5.215916035e-11 -5.561181389e-11 -6.041796175e-11
-6.515609662e-11 -7.016306279e-11 -7.55286633e-11 -8.13134029e-11
-8.757228524e-11 -9.435809062e-11 -1.017213304e-10 -1.097105125e-10
-1.183730944e-10 -1.27756716e-10 -1.379104239e-10 -1.488858633e-10
-1.607385297e-10 -1.735291427e-10 -1.873250937e-10 -2.022017911e-10
-2.182436403e-10 -2.355444191e-10 -2.542069979e-10 -2.10349552e-11
-2.288920781e-11 -2.473599673e-11 -2.65962222e-11 -2.850279861e-11
-3.050330865e-11 -3.266197343e-11 -3.621478473e-11 -4.016738105e-11
-4.464224277e-11 -4.964002918e-11 -5.686504883e-11 -6.553180691e-11
-7.43513889e-11 -8.390477111e-11 -9.444547302e-11 -1.06154926e-10
-1.191931912e-10 -1.362449414e-10 -1.518946228e-10 -1.697170667e-10
-1.897506621e-10 -2.121947018e-10 -2.372948666e-10 -2.653221974e-10
-2.965685298e-10 -3.313464897e-10 -3.699909027e-10 -4.128608339e-10
-4.60342289e-10 -5.128517831e-10 -1.355773146e-11 -1.541914131e-11
-1.72743502e-11 -1.91326573e-11 -2.100995566e-11 -2.293070252e-11
-2.493037029e-11 -2.705845302e-11 -2.938181866e-11 -3.436744475e-11
-3.995571788e-11 -4.650581548e-11 -5.425379724e-11 -6.534209843e-11
-7.967254103e-11 -9.550619402e-11 -1.135408312e-10 -1.371313958e-10
-1.605245521e-10 -1.917886795e-10 -2.228667077e-10 -2.593286296e-10
-3.073164865e-10 -3.545809521e-10 -4.097916287e-10 -4.734737976e-10
-5.466333082e-10 -6.304877302e-10 -7.264086767e-10 -8.359098068e-10
-9.606499145e-10 5.002647973e-27 -7.922406953e-12 -9.790747237e-12
-1.16495754e-11 -1.351402784e-11 -1.539620555e-11 -1.731433835e-11
-1.929459776e-11 -2.137345972e-11 -2.36007844e-11 -2.697159147e-11
-3.208760967e-11 -3.956692166e-11 -4.860482612e-11 -5.978770411e-11
-7.830374681e-11 -1.001820355e-10 -1.266403336e-10 -1.586319971e-10
-2.016361063e-10 -2.472489656e-10 -3.090529893e-10 -3.744471468e-10
-4.536155603e-10 -5.481379873e-10 -6.602159537e-10 -7.924698143e-10
-9.479616945e-10 -1.130264499e-09 -1.343535093e-09 -1.592570427e-09
DataArray, isource
1.428167938e-11 -0.007344947062 -0.01420164205 -0.02047841116
-0.02606080046 -0.03081573858 -0.03458186616 -0.0373415357
-0.03916923791 -0.04031469867 -0.04106315235 -0.04157021315
-0.04197489446 -0.04231735856 -0.04262128891 -0.04290009597
-0.04316151388 -0.04340997437 -0.04364795937 -0.04387683384
-0.04409734649 -0.04430991276 -0.04451476946 -0.04471206356
-0.04490191128 -0.04508444566 -0.04525985902 -0.0454284393
-0.04559059276 -0.04574684389 -0.04589780813 1.054875343e-11
-0.008076708907 -0.01582895135 -0.02320877661 -0.03015751745
-0.03660412587 -0.04246516237 -0.04760107967 -0.05195596954
-0.05545226919 -0.0580666581 -0.05981070786 -0.06091307082
-0.06164667016 -0.06215374379 -0.06252559852 -0.06281438284
-0.06305013043 -0.06320180397 -0.06338994316 -0.06355662395
-0.06370942285 -0.06385192821 -0.06398618193 -0.06411340891
-0.06423437135 -0.06434955887 -0.0644592929 -0.0645637866
-0.06466318201 -0.06475757552 6.799742932e-12 -0.008581912443
-0.01693016517 -0.02501684194 -0.03280851451 -0.04026531316
-0.04734004214 -0.05397759966 -0.06011493159 -0.06553489452
-0.0702877301 -0.07429736938 -0.07751245206 -0.07983407343
-0.08137558316 -0.08239180776 -0.0830354362 -0.08335959578
-0.08362882645 -0.08372065144 -0.08383890897 -0.08390820056
-0.08387801236 -0.08391394185 -0.08393027719 -0.08393551937
-0.08393365535 -0.08392695511 -0.08391678838 -0.08390400269
-0.08388913047 -4.458629728e-17 -0.008953797278 -0.01772923855
-0.0263086289 -0.03467109374 -0.04279212114 -0.05064305251
-0.05819055633 -0.0653961237 -0.07221560073 -0.07851154699
-0.08418482284 -0.08914941423 -0.09345658203 -0.09705148663
-0.09964101929 -0.1015649051 -0.1028782422 -0.103698805
-0.1040511624 -0.1042986711 -0.1042787422 -0.1042809142
-0.104208428 -0.1040912554 -0.1039469934 -0.1037869087
-0.1036183923 -0.1034462933 -0.1032737408 -0.1031026817
DataArray, isubstrate
1.817009945e-28 -3.979295798e-20 -4.798118798e-20 -5.520592461e-20
-6.212816349e-20 -6.886548748e-20 -7.543264903e-20 -8.182087792e-20
-8.802239014e-20 -9.406587125e-20 -1.000037906e-19 -1.058749163e-19
-1.117065616e-19 -1.175111578e-19 -1.232965383e-19 -1.290678853e-19
-1.34828588e-19 -1.405807404e-19 -1.463254709e-19 -1.520632712e-19
-1.577942656e-19 -1.63518382e-19 -1.692355165e-19 -1.749455933e-19
-1.806486987e-19 -1.86345097e-19 -1.920352096e-19 -1.977195779e-19
-2.033988303e-19 -2.090736659e-19 -2.147448299e-19 1.32485922e-28
-4.004375281e-20 -4.815150029e-20 -5.537705391e-20 -6.234580394e-20
-6.918100883e-20 -7.591758697e-20 -8.256028614e-20 -8.910339199e-20
-9.552942146e-20 -1.018198676e-19 -1.07962973e-19 -1.139789951e-19
-1.199058369e-19 -1.257718435e-19 -1.315960792e-19 -1.373900027e-19
-1.431610941e-19 -1.489079878e-19 -1.546486429e-19 -1.603779554e-19
-1.660980023e-19 -1.71809941e-19 -1.775143277e-19 -1.832114556e-19
-1.889015114e-19 -1.945846673e-19 -2.002611374e-19 -2.059312316e-19
-2.115953999e-19 -2.172542483e-19 8.46743743e-29 -4.019356453e-20
-4.824731912e-20 -5.546680321e-20 -6.245009167e-20 -6.931789251e-20
-7.610926582e-20 -8.283947327e-20 -8.951250638e-20 -9.611472538e-20
-1.026459197e-19 -1.090922972e-19 -1.15437347e-19 -1.216577691e-19
-1.277511453e-19 -1.337400961e-19 -1.396468289e-19 -1.454835896e-19
-1.512884434e-19 -1.570498818e-19 -1.627975518e-19 -1.6852444e-19
-1.74224139e-19 -1.799223551e-19 -1.856089736e-19 -1.912861964e-19
-1.969555205e-19 -2.026180094e-19 -2.082744676e-19 -2.139255597e-19
-2.195718978e-19 1.64216484e-35 -4.029356991e-20 -4.830904578e-20
-5.552218603e-20 -6.251093015e-20 -6.939264972e-20 -7.620692428e-20
-8.29710422e-20 -8.969260757e-20 -9.637359567e-20 -1.030063459e-19
-1.095834922e-19 -1.160953694e-19 -1.225405057e-19 -1.289063319e-19
-1.351531291e-19 -1.412984034e-19 -1.473400913e-19 -1.532880697e-19
-1.591447418e-19 -1.649598942e-19 -1.707160701e-19 -1.764556427e-19
-1.821682062e-19 -1.87859244e-19 -1.935329701e-19 -1.991927612e-19
-2.048413199e-19 -2.104809217e-19 -2.161134855e-19 -2.217406391e-19
DataSetFinish
DataSetStart
DataSetName, idvd
MeasurementType, DC
BatchName, opt_ex18
WaferName, TCAD
DieName, TCAD
DeviceName, nmos_2
Temperature, 126.85
FabDate, 25 Oct 2018
UserDate, 25 Oct 2018
Attribute, W, 0.0001
Attribute, L, 2e-06
NodeNames, drain gate source substrate
Sweep, 1, V, drain, LIST, 0.1, 0
List, 1
0 0.5 1 1.5
2 2.5 3 3.5
4 4.5 5 5.5
6 6.5 7 7.5
8 8.5 9 9.5
10 10.5 11 11.5
12 12.5 13 13.5
14 14.5 15
Sweep, 2, V, gate, LIST, 0.1, 0
List, 2
-3 -2 -1 0
Constant, V, source, 0, 0.1, 0
Constant, V, substrate, 0, 0.1, 0
Target, I, drain
Target, I, source
Target, I, gate
Target, I, substrate
Function, gds, derivative (vdrain, idrain)
Plot, idvd, XY (LIN LIN), vdrain, idrain
Plot, gds, XY (LIN LOG), vdrain, gds
DataArray, idrain
2.658048887e-11 0.005656865279 0.0107808034 0.01529876632
0.0191247857 0.02216240314 0.02433521379 0.02568008499
0.02638771207 0.02679067182 0.02705900174 0.02726581572
0.02744064693 0.02759680125 0.02774094392 0.02787657006
0.02800550811 0.02812869481 0.02824660411 0.02835948085
0.02846746466 0.02857066194 0.02866919812 0.02876326068
0.02885312939 0.02893918378 0.02902188087 0.02910170854
0.02917913277 0.02925455742 0.02932830497 1.962231555e-11
0.006508076335 0.01263075571 0.01832352169 0.02353429245
0.02820222732 0.0322576273 0.03562696633 0.03820580683
0.04003061796 0.04118887112 0.04187706977 0.04230069985
0.04255448846 0.04274890989 0.04290806992 0.04304525192
0.04316801111 0.04328082356 0.04338634582 0.0434861208
0.04358102365 0.04367154635 0.04375796709 0.04384044287
0.04391905937 0.04399386135 0.04406487618 0.04413213556
0.04422342499 0.04427583488 1.264504976e-11 0.007138474917
0.0139839736 0.02050772713 0.02667654443 0.03245209853
0.03779018857 0.04264032039 0.04694645999 0.05059669921
0.05358230189 0.05587419677 0.05749443861 0.05847330931
0.05901377761 0.05934491519 0.05955669092 0.05970041098
0.05980349061 0.05988114736 0.05994241752 0.05999291352
0.06003615675 0.06007432921 0.06010874925 0.06014019269
0.06016910924 0.06019575824 0.06022028624 0.0602803802
0.06029119846 -3.648753344e-18 0.007625359681 0.01501914206
0.02216173137 0.02903075436 0.03560070691 0.04184251008
0.04772304802 0.05320478247 0.05824565389 0.06279958364
0.06666185687 0.06992268436 0.07254735296 0.07453036842
0.07582111626 0.07655952239 0.07698765469 0.077218085
0.07733124194 0.07737557595 0.07737880167 0.07735698561
0.0773198911 0.07727370865 0.0772224012 0.07716846331
0.07716412963 0.07709625805 0.07708324866 0.07701038475
DataArray, igate
-5.32741037e-11 -5.670841685e-11 -6.008130871e-11 -6.342278836e-11
-6.676996356e-11 -7.014204473e-11 -7.349283141e-11 -7.669645901e-11
-8.169575527e-11 -8.533863421e-11 -8.856720337e-11 -9.167624199e-11
-9.480348027e-11 -9.801837847e-11 -1.013598386e-10 -1.048516189e-10
-1.085085732e-10 -1.123397839e-10 -1.163506853e-10 -1.205447032e-10
-1.249244758e-10 -1.294927534e-10 -1.342531293e-10 -1.39210668e-10
-1.443723511e-10 -1.497471848e-10 -1.553458841e-10 -1.611802439e-10
-1.672624552e-10 -1.736046027e-10 -1.802184338e-10 -3.933907488e-11
-4.280265357e-11 -4.623111161e-11 -4.9640921e-11 -5.305980801e-11
-5.652798222e-11 -6.009608998e-11 -6.381576243e-11 -6.979359601e-11
-7.566531748e-11 -8.135804111e-11 -8.679563041e-11 -9.207262687e-11
-9.926169989e-11 -1.060820157e-10 -1.129644918e-10 -1.200814372e-10
-1.275371688e-10 -1.354078211e-10 -1.437552088e-10 -1.526314086e-10
-1.620808167e-10 -1.721420579e-10 -1.828500014e-10 -1.942375481e-10
-2.063369996e-10 -2.19181107e-10 -2.328040392e-10 -2.472424843e-10
-2.582489129e-10 -2.757368249e-10 -2.53554242e-11 -2.883442712e-11
-3.228995792e-11 -3.572936305e-11 -3.916694252e-11 -4.262585886e-11
-4.614026838e-11 -4.975742161e-11 -5.353887862e-11 -5.925355518e-11
-6.554374623e-11 -7.245094788e-11 -7.986661488e-11 -9.030361508e-11
-1.027236339e-10 -1.146731011e-10 -1.268162671e-10 -1.395258472e-10
-1.530475953e-10 -1.675577492e-10 -1.832043127e-10 -2.001325745e-10
-2.184955251e-10 -2.384543018e-10 -2.601743535e-10 -2.838219762e-10
-3.095633398e-10 -3.375656916e-10 -3.679994759e-10 -3.946561738e-10
-4.322897283e-10 -3.251297837e-27 -1.48076069e-11 -1.830094821e-11
-2.175715563e-11 -2.520470841e-11 -2.865547519e-11 -3.212800547e-11
-3.564945627e-11 -3.925786716e-11 -4.300487963e-11 -4.69585707e-11
-5.458144077e-11 -6.317058096e-11 -7.297891335e-11 -8.4086185e-11
-9.927647407e-11 -1.181038974e-10 -1.376032009e-10 -1.583541746e-10
-1.808342528e-10 -2.05481953e-10 -2.326927667e-10 -2.62827375e-10
-2.962387308e-10 -3.333067067e-10 -3.744623506e-10 -4.201974005e-10
-4.634220106e-10 -5.220872871e-10 -5.765934409e-10 -6.499728744e-10
DataArray, isource
2.669334565e-11 -0.005656865223 -0.01078080334 -0.01529876626
-0.01912478563 -0.02216240307 -0.02433521372 -0.02568008491
-0.02638771199 -0.02679067173 -0.02705900166 -0.02726581563
-0.02744064684 -0.02759680115 -0.02774094382 -0.02787656996
-0.028005508 -0.0281286947 -0.02824660399 -0.02835948073
-0.02846746454 -0.02857066181 -0.02866919798 -0.02876326054
-0.02885312924 -0.02893918363 -0.02902188071 -0.02910170838
-0.02917913261 -0.02925455725 -0.02932830479 1.971667926e-11
-0.006508076293 -0.01263075567 -0.01832352164 -0.0235342924
-0.02820222727 -0.03225762724 -0.03562696626 -0.03820580676
-0.04003061789 -0.04118887104 -0.04187706968 -0.04230069976
-0.04255448836 -0.04274890978 -0.04290806981 -0.0430452518
-0.04316801098 -0.04328082342 -0.04338634568 -0.04348612065
-0.04358102348 -0.04367154618 -0.04375796691 -0.04384044268
-0.04391905916 -0.04399386113 -0.04406487595 -0.04413213531
-0.04422342473 -0.04427583461 1.271094564e-11 -0.007138474889
-0.01398397357 -0.02050772709 -0.02667654439 -0.03245209863
-0.03779018859 -0.0426403204 -0.04694645994 -0.05059669915
-0.05358230182 -0.0558741967 -0.05749443853 -0.05847330922
-0.05901377751 -0.05934491508 -0.05955669079 -0.05970041084
-0.05980349046 -0.0598811472 -0.05994241734 -0.05999291332
-0.06003615653 -0.06007432897 -0.06010874899 -0.06014019241
-0.06016910893 -0.0601957579 -0.06022028587 -0.0602803798
-0.06029119803 1.297272554e-16 -0.007625359667 -0.01501914204
-0.02216173135 -0.02903075473 -0.03560070703 -0.04184251011
-0.04772304802 -0.05320478246 -0.05824565389 -0.06279958365
-0.06666185681 -0.06992268429 -0.07254735288 -0.07453036834
-0.07582111617 -0.07655952227 -0.07698765455 -0.07721808484
-0.07733124176 -0.07737557574 -0.07737880144 -0.07735698535
-0.07731989081 -0.07727370832 -0.07722240083 -0.07716846289
-0.07716412917 -0.07709625753 -0.07708324809 -0.0770103841
DataArray, isubstrate
4.625034532e-28 -4.470650542e-20 -5.403143924e-20 -6.212535795e-20
-6.977984805e-20 -7.711140273e-20 -8.40949406e-20 -9.069206945e-20
-9.694351268e-20 -1.029898582e-19 -1.089324287e-19 -1.148206858e-19
-1.206767757e-19 -1.265120447e-19 -1.323329887e-19 -1.381433104e-19
-1.43944945e-19 -1.497388749e-19 -1.555255738e-19 -1.613052816e-19
-1.670780994e-19 -1.728440251e-19 -1.786030459e-19 -1.843551844e-19
-1.901006163e-19 -1.958396769e-19 -2.015728246e-19 -2.073005926e-19
-2.130235587e-19 -2.187423477e-19 -2.244576321e-19 3.313033642e-28
-4.515774775e-20 -5.435531797e-20 -6.246372238e-20 -7.023206522e-20
-7.780078981e-20 -8.519581571e-20 -9.240149571e-20 -9.937203056e-20
-1.060700395e-19 -1.124806781e-19 -1.186545922e-19 -1.246771338e-19
-1.306079668e-19 -1.364893818e-19 -1.423379261e-19 -1.481633908e-19
-1.539722096e-19 -1.597685867e-19 -1.655551306e-19 -1.713333015e-19
-1.771037783e-19 -1.828668316e-19 -1.886225281e-19 -1.94370926e-19
-2.001121215e-19 -2.05846264e-19 -2.1157358e-19 -2.172944119e-19
-2.230152739e-19 -2.287232612e-19 2.094737347e-28 -4.543055118e-20
-5.453589632e-20 -6.263848256e-20 -7.04454411e-20 -7.809663894e-20
-8.563199966e-20 -9.306008616e-20 -1.003720883e-19 -1.075394136e-19
-1.14536388e-19 -1.213259405e-19 -1.278789848e-19 -1.341888455e-19
-1.403070366e-19 -1.463032317e-19 -1.522221041e-19 -1.580910295e-19
-1.639252302e-19 -1.697338371e-19 -1.755231503e-19 -1.812976155e-19
-1.870602543e-19 -1.928130013e-19 -1.985570995e-19 -2.04293343e-19
-2.100222803e-19 -2.157443863e-19 -2.214601575e-19 -2.271784175e-19
-2.328813741e-19 6.366817099e-36 -4.561304791e-20 -5.465104265e-20
-6.274459698e-20 -7.056738868e-20 -7.825489784e-20 -8.585035577e-20
-9.336980588e-20 -1.008162264e-19 -1.081839677e-19 -1.154614851e-19
-1.226120285e-19 -1.29628347e-19 -1.364804503e-19 -1.431396936e-19
-1.495778366e-19 -1.558102484e-19 -1.618883402e-19 -1.678566554e-19
-1.737515504e-19 -1.795966568e-19 -1.854059135e-19 -1.911877244e-19
-1.969479651e-19 -2.026913101e-19 -2.084213779e-19 -2.141408029e-19
-2.19862519e-19 -2.255637131e-19 -2.312708546e-19 -2.369599034e-19
DataSetFinish
DataSetStart
DataSetName, idvd
MeasurementType, DC
BatchName, opt_ex18
WaferName, TCAD
DieName, TCAD
DeviceName, nmos_3
Temperature, 126.85
FabDate, 25 Oct 2018
UserDate, 25 Oct 2018
Attribute, W, 0.0001
Attribute, L, 3e-06
NodeNames, drain gate source substrate
Sweep, 1, V, drain, LIST, 0.1, 0
List, 1
0 0.5 1 1.5
2 2.5 3 3.5
4 4.5 5 5.5
6 6.5 7 7.5
8 8.5 9 9.5
10 10.5 11 11.5
12 12.5 13 13.5
14 14.5 15
Sweep, 2, V, gate, LIST, 0.1, 0
List, 2
-3 -2 -1 0
Constant, V, source, 0, 0.1, 0
Constant, V, substrate, 0, 0.1, 0
Target, I, drain
Target, I, source
Target, I, gate
Target, I, substrate
Function, gds, derivative (vdrain, idrain)
Plot, idvd, XY (LIN LIN), vdrain, idrain
Plot, gds, XY (LIN LOG), vdrain, gds
DataArray, idrain
3.896286513e-11 0.004599521769 0.008686509537 0.01220488741
0.01509158255 0.01727936851 0.01872257719 0.01950415268
0.01988207692 0.02009219181 0.02023888849 0.02035774263
0.02046202966 0.02054513216 0.0206378296 0.02071273997
0.02079748004 0.02086545575 0.02093287269 0.02100791977
0.02106674883 0.02112513562 0.02119147589 0.0212424209
0.02129384095 0.0213542355 0.02140017943 0.0214474571
0.02150442766 0.02154729577 0.02160217146 2.876367113e-11
0.005449552791 0.01050688755 0.01513438153 0.01928928286
0.02292319448 0.0259823073 0.02841185781 0.03017675489
0.03127542437 0.03189396414 0.03223516304 0.03244738968
0.03260033471 0.03272309082 0.03282863218 0.03292345196
0.03301106114 0.0330933935 0.03317149633 0.03322853793
0.03330306274 0.03337307616 0.03343936297 0.03350216982
0.03356165128 0.03361794769 0.03367122227 0.03372168333
0.03376959123 0.03381524789 1.853463907e-11 0.00611062184
0.01191072426 0.01737424756 0.02247179374 0.02717019494
0.03143208102 0.03521569257 0.03847578996 0.04116792881
0.04321184889 0.04465870243 0.04557795085 0.0461161622
0.04639198475 0.04656620192 0.04668764084 0.04678015343
0.04685555495 0.04692023103 0.0469778891 0.04703071943
0.04707999 0.0471264082 0.04717035185 0.04721201411
0.04725148895 0.04728881704 0.04732400935 0.04735706044
0.04738795869 2.279037214e-16 0.006640141904 0.01302743797
0.01914317308 0.02496640405 0.03047370425 0.03563886044
0.04043256373 0.04482217813 0.04877183366 0.05224337518
0.05514277042 0.05748658818 0.05919716094 0.06044713031
0.06117315683 0.06153760721 0.06173793133 0.06184796677
0.0619091323 0.06194288709 0.06196055734 0.06196853051
0.06197066519 0.061969338 0.06196597251 0.06196137848
0.0619559844 0.06194999226 0.06194347637 0.06193644234
DataArray, igate
-7.806193058e-11 -8.30822613e-11 -8.796470367e-11 -9.270306737e-11
-9.728065263e-11 -1.016331323e-10 -1.055851781e-10 -1.089336849e-10
-1.117093596e-10 -1.141218621e-10 -1.163468928e-10 -1.184922284e-10
-1.206190144e-10 -1.246160428e-10 -1.262050255e-10 -1.300728071e-10
-1.316493485e-10 -1.356349261e-10 -1.390876569e-10 -1.406650585e-10
-1.448353018e-10 -1.484739312e-10 -1.501278041e-10 -1.545984539e-10
-1.585029774e-10 -1.602639181e-10 -1.651146486e-10 -1.693428473e-10
-1.712378512e-10 -1.765187334e-10 -1.785895045e-10 -5.764318953e-11
-6.27113936e-11 -6.770122446e-11 -7.261432262e-11 -7.745784818e-11
-8.224315611e-11 -8.697905259e-11 -9.165366922e-11 -9.620732974e-11
-1.030641468e-10 -1.087345041e-10 -1.137070404e-10 -1.183087529e-10
-1.227660543e-10 -1.272131951e-10 -1.317300076e-10 -1.363695365e-10
-1.411713302e-10 -1.461659121e-10 -1.513763137e-10 -1.588893057e-10
-1.641284149e-10 -1.698155314e-10 -1.758347169e-10 -1.821647802e-10
-1.887992711e-10 -1.957384297e-10 -2.029872076e-10 -2.105545055e-10
-2.184525669e-10 -2.266961935e-10 -3.715311353e-11 -4.224666368e-11
-4.728921924e-11 -5.228087866e-11 -5.72265731e-11 -6.213715959e-11
-6.703034915e-11 -7.193087962e-11 -7.686851846e-11 -8.187134643e-11
-8.939586341e-11 -9.686145017e-11 -1.041501725e-10 -1.11157602e-10
-1.204134305e-10 -1.290345333e-10 -1.375449614e-10 -1.461762112e-10
-1.550686383e-10 -1.64321938e-10 -1.740196949e-10 -1.842381716e-10
-1.950472528e-10 -2.065096194e-10 -2.18680766e-10 -2.316101885e-10
-2.453432408e-10 -2.599230647e-10 -2.753922645e-10 -2.917942949e-10
-3.091746835e-10 -3.168175464e-27 -2.167965972e-11 -2.679980839e-11
-3.183468927e-11 -3.683248832e-11 -4.179930515e-11 -4.67460714e-11
-5.169020361e-11 -5.665703988e-11 -6.168129961e-11 -6.68080047e-11
-7.402052554e-11 -8.180694298e-11 -9.268764978e-11 -1.010823826e-10
-1.130072361e-10 -1.274852243e-10 -1.415594239e-10 -1.558181314e-10
-1.706137934e-10 -1.861988829e-10 -2.027629472e-10 -2.204634404e-10
-2.394538549e-10 -2.598987585e-10 -2.819751642e-10 -3.058673305e-10
-3.317613329e-10 -3.598423267e-10 -3.902946015e-10 -4.233033659e-10
DataArray, isource
3.909864273e-11 -0.004599521687 -0.008686509449 -0.01220488732
-0.01509158245 -0.01727936841 -0.01872257709 -0.01950415257
-0.01988207681 -0.02009219169 -0.02023888837 -0.02035774251
-0.02046202957 -0.02054513204 -0.02063782952 -0.02071273984
-0.02079748002 -0.02086545561 -0.02093287255 -0.02100791963
-0.02106674869 -0.02112513547 -0.02119147574 -0.02124242074
-0.02129384079 -0.02135423534 -0.02140017927 -0.02144745693
-0.02150442749 -0.02154729559 -0.0216021713 2.887978502e-11
-0.005449552729 -0.01050688748 -0.01513438146 -0.01928928279
-0.0229231944 -0.02598230722 -0.02841185771 -0.0301767548
-0.03127542427 -0.03189396403 -0.03223516292 -0.03244738957
-0.03260033459 -0.0327230907 -0.03282863204 -0.03292345182
-0.033011061 -0.03309339335 -0.03317149617 -0.03322853777
-0.03330306258 -0.03337307599 -0.03343936279 -0.03350216964
-0.03356165109 -0.0336179475 -0.03367122207 -0.03372168312
-0.03376959101 -0.03381524766 1.861808606e-11 -0.006110621798
-0.01191072421 -0.01737424751 -0.02247179369 -0.02717019502
-0.03143208102 -0.03521569257 -0.03847578989 -0.04116792873
-0.04321184881 -0.04465870233 -0.04557795075 -0.04611616209
-0.04639198463 -0.0465662018 -0.04668764071 -0.04678015328
-0.04685555479 -0.04692023087 -0.04697788893 -0.04703071925
-0.0470799898 -0.047126408 -0.04717035163 -0.04721201388
-0.0472514887 -0.04728881678 -0.04732400908 -0.04735706015
-0.04738795838 3.0992934e-16 -0.006640141883 -0.01302743795
-0.01914317305 -0.02496640439 -0.03047370435 -0.03563886045
-0.04043256371 -0.0448221781 -0.04877183364 -0.05224337518
-0.05514277035 -0.0574865881 -0.05919716084 -0.06044713021
-0.06117315671 -0.06153760709 -0.06173793119 -0.06184796661
-0.06190913212 -0.06194288691 -0.06196055713 -0.06196853029
-0.06197066495 -0.06196933774 -0.06196597222 -0.06196137818
-0.06195598407 -0.06194999191 -0.06194347598 -0.06193644191
DataArray, isubstrate
8.91746591e-28 -4.96556505e-20 -6.007098845e-20 -6.900745704e-20
-7.735330089e-20 -8.521678387e-20 -9.25235451e-20 -9.922581998e-20
-1.054814537e-19 -1.115210867e-19 -1.174676249e-19 -1.233675596e-19
-1.292401498e-19 -1.35090589e-19 -1.409347112e-19 -1.467631237e-19
-1.525884388e-19 -1.583998115e-19 -1.642052342e-19 -1.700073368e-19
-1.757964628e-19 -1.815803717e-19 -1.873616648e-19 -1.931305581e-19
-1.988948724e-19 -2.046573741e-19 -2.104083627e-19 -2.16155869e-19
-2.219028717e-19 -2.276398015e-19 -2.333789774e-19 6.268695009e-28
-5.02838911e-20 -6.05514604e-20 -6.952756938e-20 -7.806993828e-20
-8.633222658e-20 -9.432750959e-20 -1.02011369e-19 -1.093074099e-19
-1.161449662e-19 -1.225726698e-19 -1.287259035e-19 -1.347353077e-19
-1.406705721e-19 -1.465629358e-19 -1.524275054e-19 -1.58272892e-19
-1.641044434e-19 -1.699252668e-19 -1.757370257e-19 -1.815353561e-19
-1.873323569e-19 -1.931207934e-19 -1.989011932e-19 -2.046737493e-19
-2.104386601e-19 -2.161961861e-19 -2.219466919e-19 -2.276906726e-19
-2.334287727e-19 -2.391617724e-19 3.915561675e-28 -5.067152277e-20
-6.081951915e-20 -6.979561584e-20 -7.840938945e-20 -8.681758278e-20
-9.505859573e-20 -1.03131083e-19 -1.110093086e-19 -1.186480168e-19
-1.259773322e-19 -1.329560673e-19 -1.395672119e-19 -1.458714014e-19
-1.519658317e-19 -1.579502671e-19 -1.638701801e-19 -1.697490589e-19
-1.755993465e-19 -1.814288609e-19 -1.872429413e-19 -1.930449966e-19
-1.98837016e-19 -2.046200374e-19 -2.103946269e-19 -2.161611523e-19
-2.219199509e-19 -2.276714213e-19 -2.3341604e-19 -2.39154359e-19
-2.448869943e-19 2.717462029e-35 -5.093331969e-20 -6.098986764e-20
-6.995736519e-20 -7.860255903e-20 -8.707763311e-20 -9.542793309e-20
-1.036662388e-19 -1.117885126e-19 -1.197784946e-19 -1.276104973e-19
-1.352364513e-19 -1.426223977e-19 -1.497072713e-19 -1.564924325e-19
-1.629528168e-19 -1.691621137e-19 -1.752162415e-19 -1.811741338e-19
-1.870719168e-19 -1.929292977e-19 -1.987570604e-19 -2.045620959e-19
-2.103495413e-19 -2.161232422e-19 -2.218858485e-19 -2.276391057e-19
-2.333842172e-19 -2.391220818e-19 -2.448534445e-19 -2.505790179e-19
DataSetFinish
DataSetStart
DataSetName, idvgsat
MeasurementType, DC_TABLE
BatchName, opt_ex18
WaferName, TCAD
DieName, TCAD
DeviceName, nmos_1
Temperature, 126.85
FabDate, 25 Oct 2018
UserDate, 25 Oct 2018
Attribute, W, 0.0001
Attribute, L, 1e-06
NodeNames, gate drain source substrate
Sweep, 1, V, gate, LIST, 0.1, 0
List, 1
-9.5 -9 -8.5 -8
-7.5 -7 -6.5 -6
-5.5 -5 -4.5 -4
-3.5 -3 -2.5 -2
-1.5 -1 -0.5 -1.836898487e-15
0.5 1
Sweep, 2, V, drain, LIST, 0.1, 0
List, 2
1 1 1 1
1 1 1 1
1 1 1 1
1 1 1 1
1 1 1 1
1 1
Sweep, 3, V, source, LIST, 0.1, 0
List, 3
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0
Sweep, 4, V, substrate, LIST, 0.1, 0
List, 4
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0
Target, I, gate
Target, I, drain
Target, I, source
Target, I, substrate
Function, gm, derivative (vgate, idrain)
Plot, idvg, XY (LIN LIN), vgate, idrain
Plot, gm, XY (LIN LIN), vgate, gm
DataArray, Idrain
2.882151543e-11 2.913956454e-11 2.934767607e-11 2.959771857e-11
2.996275432e-11 3.18454119e-11 7.156315514e-08 0.0003776031506
0.002839374698 0.006524013898 0.00946614817 0.01154032245
0.01305356464 0.01420199962 0.01510296765 0.01582921312
0.01642780224 0.01693039566 0.01735902254 0.01772946248
0.01805330548 0.01833458081
DataArray, Igate
-5.277751369e-11 -5.254026578e-11 -5.230273475e-11 -5.206479336e-11
-5.182626176e-11 -5.158687628e-11 -5.13455651e-11 -5.057455288e-11
-4.867988244e-11 -4.618010578e-11 -4.294428255e-11 -3.942573422e-11
-3.580443952e-11 -3.213506902e-11 -2.843897437e-11 -2.472621337e-11
-2.100218925e-11 -1.727009538e-11 -1.353195867e-11 -9.789119994e-12
1.139838067e-11 1.038903234e-05
DataArray, Isource
2.345731932e-11 2.331254057e-11 2.294940441e-11 2.246709405e-11
2.186378858e-11 1.974139534e-11 -7.151180903e-08 -0.0003776031
-0.002839374649 -0.006524013852 -0.009466148127 -0.01154032241
-0.0130535646 -0.01420199958 -0.01510296762 -0.01582921319
-0.01642780225 -0.01693039566 -0.01735902253 -0.01772946247
-0.01805330549 -0.01834496985
DataArray, Isubstrate
4.991576383e-13 8.729450782e-14 5.632907652e-15 1.17330864e-16
6.114416494e-19 -3.031373725e-20 -3.214570865e-20 -3.571655539e-20
-4.253402942e-20 -4.601788365e-20 -4.713667165e-20 -4.759318487e-20
-4.783342589e-20 -4.798043551e-20 -4.807944746e-20 -4.815066667e-20
-4.82044013e-20 -4.824643965e-20 -4.828027473e-20 -4.830813662e-20
-4.833151471e-20 -4.835335816e-20
DataSetFinish
DataSetStart
DataSetName, idvgsat
MeasurementType, DC_TABLE
BatchName, opt_ex18
WaferName, TCAD
DieName, TCAD
DeviceName, nmos_2
Temperature, 126.85
FabDate, 25 Oct 2018
UserDate, 25 Oct 2018
Attribute, W, 0.0001
Attribute, L, 2e-06
NodeNames, gate drain source substrate
Sweep, 1, V, gate, LIST, 0.1, 0
List, 1
-9.5 -9 -8.5 -8
-7.5 -7 -6.5 -6
-5.5 -5 -4.5 -4
-3.5 -3 -2.5 -2
-1.5 -1 -0.5 -1.836898487e-15
0.5 1
Sweep, 2, V, drain, LIST, 0.1, 0
List, 2
1 1 1 1
1 1 1 1
1 1 1 1
1 1 1 1
1 1 1 1
1 1
Sweep, 3, V, source, LIST, 0.1, 0
List, 3
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0
Sweep, 4, V, substrate, LIST, 0.1, 0
List, 4
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0
Target, I, gate
Target, I, drain
Target, I, source
Target, I, substrate
Function, gm, derivative (vgate, idrain)
Plot, idvg, XY (LIN LIN), vgate, idrain
Plot, gm, XY (LIN LIN), vgate, gm
DataArray, Idrain
4.162661258e-11 4.493044145e-11 4.908548224e-11 5.243228272e-11
5.320526488e-11 5.395902423e-11 1.37223123e-08 0.0001766602217
0.001555618473 0.003983243653 0.006267254821 0.008100707867
0.009575275963 0.01078103308 0.01178390315 0.01263093021
0.01335603845 0.01398412864 0.01453382244 0.01501929413
0.01545150989 0.01582006788
DataArray, Igate
-9.752346943e-11 -9.722556181e-11 -9.692736668e-11 -9.662875441e-11
-9.632953466e-11 -9.602943687e-11 -9.572739943e-11 -9.43762446e-11
-9.071682844e-11 -8.611682998e-11 -8.016058103e-11 -7.36355881e-11
-6.689555022e-11 -6.005306242e-11 -5.315347176e-11 -4.621846933e-11
-3.925976331e-11 -3.22842584e-11 -2.529631089e-11 -1.829870583e-11
9.136123527e-11 4.748181776e-05
DataArray, Isource
3.497448236e-11 3.762505925e-11 4.100201377e-11 4.343819988e-11
4.312195659e-11 4.207023483e-11 -1.362658505e-08 -0.0001766601273
-0.001555618382 -0.003983243567 -0.00626725474 -0.008100707794
-0.009575275896 -0.01078103302 -0.01178390327 -0.01263093022
-0.01335603843 -0.01398412862 -0.01453382242 -0.01501929412
-0.01545150998 -0.0158675497
DataArray, Isubstrate
2.092177343e-11 1.466935196e-11 6.839239916e-12 7.581934258e-13
2.860877708e-15 1.902582486e-19 -3.406048209e-20 -3.882283252e-20
-4.568681677e-20 -5.050363673e-20 -5.244332594e-20 -5.329370787e-20
-5.375031595e-20 -5.403083265e-20 -5.421945056e-20 -5.435460817e-20
-5.445611107e-20 -5.453512456e-20 -5.459839521e-20 -5.465022893e-20
-5.469349833e-20 -5.474170086e-20
DataSetFinish
DataSetStart
DataSetName, idvgsat
MeasurementType, DC_TABLE
BatchName, opt_ex18
WaferName, TCAD
DieName, TCAD
DeviceName, nmos_3
Temperature, 126.85
FabDate, 25 Oct 2018
UserDate, 25 Oct 2018
Attribute, W, 0.0001
Attribute, L, 3e-06
NodeNames, gate drain source substrate
Sweep, 1, V, gate, LIST, 0.1, 0
List, 1
-9.5 -9 -8.5 -8
-7.5 -7 -6.5 -6
-5.5 -5 -4.5 -4
-3.5 -3 -2.5 -2
-1.5 -1 -0.5 -1.836898487e-15
0.5 1
Sweep, 2, V, drain, LIST, 0.1, 0
List, 2
1 1 1 1
1 1 1 1
1 1 1 1
1 1 1 1
1 1 1 1
1 1
Sweep, 3, V, source, LIST, 0.1, 0
List, 3
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0
Sweep, 4, V, substrate, LIST, 0.1, 0
List, 4
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0
Target, I, gate
Target, I, drain
Target, I, source
Target, I, substrate
Function, gm, derivative (vgate, idrain)
Plot, idvg, XY (LIN LIN), vgate, idrain
Plot, gm, XY (LIN LIN), vgate, gm
DataArray, Idrain
4.448407748e-11 4.904343901e-11 5.620407707e-11 6.832254428e-11
7.581289602e-11 7.664929719e-11 7.053140641e-09 0.0001141760445
0.001067670988 0.002861331476 0.004680035555 0.006237587698
0.007558451818 0.008686656868 0.009659691957 0.01050700633
0.01125145138 0.01191083295 0.01249915449 0.01302754653
0.01350495191 0.01388740767
DataArray, Igate
-1.422327016e-10 -1.418788251e-10 -1.415246608e-10 -1.411700789e-10
-1.408148886e-10 -1.404588189e-10 -1.401007516e-10 -1.381543978e-10
-1.32699649e-10 -1.259770994e-10 -1.173102644e-10 -1.077910799e-10
-9.794305987e-11 -8.793613975e-11 -7.783986232e-11 -6.768792176e-11
-5.749867584e-11 -4.728301769e-11 -3.704784412e-11 -2.679730145e-11
3.725174647e-10 0.0001417469207
DataArray, Isource
3.754563452e-11 4.136747635e-11 4.760520914e-11 5.860375531e-11
6.490425946e-11 6.38099849e-11 -6.913039428e-09 -0.0001141759063
-0.001067670855 -0.00286133135 -0.004680035438 -0.00623758759
-0.00755845172 -0.00868665678 -0.009659691957 -0.01050700629
-0.01125145133 -0.01191083291 -0.01249915446 -0.01302754651
-0.01350495229 -0.01402915459
DataArray, Isubstrate
6.020248182e-11 5.146741593e-11 3.771545649e-11 1.424336248e-11
9.770888178e-14 2.44222362e-18 -3.603841753e-20 -4.249710893e-20
-4.9762843e-20 -5.526814379e-20 -5.780058066e-20 -5.899442284e-20
-5.965722018e-20 -6.007047539e-20 -6.035007428e-20 -6.055083929e-20
-6.070160541e-20 -6.081882964e-20 -6.09125302e-20 -6.098912993e-20
-6.105292524e-20 -6.115007898e-20
DataSetFinish
DataSetStart
DataSetName, idvglin
MeasurementType, DC_TABLE
BatchName, opt_ex18
WaferName, TCAD
DieName, TCAD
DeviceName, nmos_1
Temperature, 126.85
FabDate, 25 Oct 2018
UserDate, 25 Oct 2018
Attribute, W, 0.0001
Attribute, L, 1e-06
NodeNames, gate drain source substrate
Sweep, 1, V, gate, LIST, 0.1, 0
List, 1
-9.5 -9 -8.5 -8
-7.5 -7 -6.5 -6
-5.5 -5 -4.5 -4
-3.5 -3 -2.5 -2
-1.5 -1 -0.5 -1.836898487e-15
0.5
Sweep, 2, V, drain, LIST, 0.1, 0
List, 2
0.1 0.1 0.1 0.1
0.1 0.1 0.1 0.1
0.1 0.1 0.1 0.1
0.1 0.1 0.1 0.1
0.1 0.1 0.1 0.1
0.1
Sweep, 3, V, source, LIST, 0.1, 0
List, 3
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0
Sweep, 4, V, substrate, LIST, 0.1, 0
List, 4
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0
Target, I, gate
Target, I, drain
Target, I, source
Target, I, substrate
Function, gm, derivative (vgate, idrain)
Plot, idvg, XY (LIN LIN), vgate, idrain
Plot, gm, XY (LIN LIN), vgate, gm
DataArray, Idrain
2.589073649e-11 2.631430749e-11 2.642578731e-11 2.638445774e-11
2.634219561e-11 2.660086622e-11 3.058451937e-08 0.0001730676555
0.0006114204802 0.0009230006905 0.001138473981 0.00129443093
0.001412218149 0.001504317575 0.001578375779 0.001639302393
0.001690382279 0.001733891866 0.001771456749 0.001804267987
0.001832592545
DataArray, Igate
-5.2618214e-11 -5.238070735e-11 -5.214283908e-11 -5.190440894e-11
-5.166514674e-11 -5.142472078e-11 -5.11818638e-11 -5.012546638e-11
-4.703161136e-11 -4.353144332e-11 -3.991877525e-11 -3.625582329e-11
-3.256493021e-11 -2.885646172e-11 -2.513601429e-11 -2.140692883e-11
-1.767134776e-11 -1.393072038e-11 -1.018606606e-11 -4.902731357e-12
1.27391387e-06
DataArray, Isource
2.528154942e-11 2.564076689e-11 2.567002363e-11 2.551868084e-11
2.532332298e-11 2.482370082e-11 -3.053333766e-08 -0.0001730676054
-0.0006114204336 -0.0009230006471 -0.001138473941 -0.001294430894
-0.001412218117 -0.001504317546 -0.001578375755 -0.001639302372
-0.001690382261 -0.001733891852 -0.001771456739 -0.001804267982
-0.001833866459
DataArray, Isubstrate
1.44587436e-12 4.257735829e-13 4.680922488e-14 1.379363137e-15
7.986441673e-18 -1.398144697e-20 -1.954028028e-20 -2.164021753e-20
-2.340956475e-20 -2.434658406e-20 -2.489746168e-20 -2.525299007e-20
-2.549910857e-20 -2.567870667e-20 -2.581519084e-20 -2.592228786e-20
-2.600852738e-20 -2.607946534e-20 -2.61388646e-20 -2.618935843e-20
-2.623526514e-20
DataSetFinish
DataSetStart
DataSetName, idvglin
MeasurementType, DC_TABLE
BatchName, opt_ex18
WaferName, TCAD
DieName, TCAD
DeviceName, nmos_2
Temperature, 126.85
FabDate, 25 Oct 2018
UserDate, 25 Oct 2018
Attribute, W, 0.0001
Attribute, L, 2e-06
NodeNames, gate drain source substrate
Sweep, 1, V, gate, LIST, 0.1, 0
List, 1
-9.5 -9 -8.5 -8
-7.5 -7 -6.5 -6
-5.5 -5 -4.5 -4
-3.5 -3 -2.5 -2
-1.5 -1 -0.5 -1.836898487e-15
0.5
Sweep, 2, V, drain, LIST, 0.1, 0
List, 2
0.1 0.1 0.1 0.1
0.1 0.1 0.1 0.1
0.1 0.1 0.1 0.1
0.1 0.1 0.1 0.1
0.1 0.1 0.1 0.1
0.1
Sweep, 3, V, source, LIST, 0.1, 0
List, 3
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0
Sweep, 4, V, substrate, LIST, 0.1, 0
List, 4
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0
Target, I, gate
Target, I, drain
Target, I, source
Target, I, substrate
Function, gm, derivative (vgate, idrain)
Plot, idvg, XY (LIN LIN), vgate, idrain
Plot, gm, XY (LIN LIN), vgate, gm
DataArray, Idrain
3.627766624e-11 3.933613037e-11 4.358796493e-11 4.791562935e-11
4.871405024e-11 4.874585616e-11 9.759094349e-09 9.256398476e-05
0.0003700575572 0.0006071367646 0.0007952479134 0.0009459383037
0.001068850787 0.001170891252 0.001256948132 0.001330529728
0.001394202396 0.001449880261 0.001499017172 0.001542735908
0.001580756557
DataArray, Igate
-9.735941022e-11 -9.706122947e-11 -9.676268021e-11 -9.646355475e-11
-9.616356154e-11 -9.586234417e-11 -9.555853118e-11 -9.371815285e-11
-8.794897531e-11 -8.140734443e-11 -7.465293511e-11 -6.780359477e-11
-6.090157513e-11 -5.396645507e-11 -4.700879413e-11 -4.003489052e-11
-3.304877981e-11 -2.605319032e-11 -1.905004013e-11 -9.115557108e-12
2.41668584e-06
DataArray, Isource
3.552302498e-11 3.849229724e-11 4.262945696e-11 4.681753134e-11
4.744144295e-11 4.711735403e-11 -9.663536235e-09 -9.256389105e-05
-0.0003700574694 -0.0006071366833 -0.0007952478387 -0.0009459382359
-0.001068850726 -0.0011708912 -0.001256948086 -0.001330529688
-0.001394202363 -0.001449880235 -0.001499017153 -0.001542735899
-0.001583173243
DataArray, Isubstrate
2.555881335e-11 1.923316201e-11 1.054511935e-11 1.730482941e-12
7.901818517e-15 4.635820811e-19 -2.140696993e-20 -2.44745358e-20
-2.606747517e-20 -2.701355748e-20 -2.765716062e-20 -2.81192508e-20
-2.846474496e-20 -2.873156621e-20 -2.894314745e-20 -2.911463954e-20
-2.925622158e-20 -2.93749568e-20 -2.947588439e-20 -2.956268707e-20
-2.964419664e-20
DataSetFinish
DataSetStart
DataSetName, idvglin
MeasurementType, DC_TABLE
BatchName, opt_ex18
WaferName, TCAD
DieName, TCAD
DeviceName, nmos_3
Temperature, 126.85
FabDate, 25 Oct 2018
UserDate, 25 Oct 2018
Attribute, W, 0.0001
Attribute, L, 3e-06
NodeNames, gate drain source substrate
Sweep, 1, V, gate, LIST, 0.1, 0
List, 1
-9.5 -9 -8.5 -8
-7.5 -7 -6.5 -6
-5.5 -5 -4.5 -4
-3.5 -3 -2.5 -2
-1.5 -1 -0.5 -1.836898487e-15
0.5
Sweep, 2, V, drain, LIST, 0.1, 0
List, 2
0.1 0.1 0.1 0.1
0.1 0.1 0.1 0.1
0.1 0.1 0.1 0.1
0.1 0.1 0.1 0.1
0.1 0.1 0.1 0.1
0.1
Sweep, 3, V, source, LIST, 0.1, 0
List, 3
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0
Sweep, 4, V, substrate, LIST, 0.1, 0
List, 4
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0 0 0 0
0
Target, I, gate
Target, I, drain
Target, I, source
Target, I, substrate
Function, gm, derivative (vgate, idrain)
Plot, idvg, XY (LIN LIN), vgate, idrain
Plot, gm, XY (LIN LIN), vgate, gm
DataArray, Idrain
3.842084147e-11 4.240936057e-11 4.899011643e-11 6.140050043e-11
7.093374171e-11 7.101646942e-11 5.675666296e-09 6.315340525e-05
0.000265305292 0.0004523278866 0.0006110249859 0.0007452816028
0.0008597937874 0.0009584497059 0.001044282101 0.001119636466
0.001186336476 0.001245813971 0.001299205471 0.001347423014
0.001389522316
DataArray, Igate
-1.420682185e-10 -1.417140675e-10 -1.413595473e-10 -1.410044497e-10
-1.406484817e-10 -1.402912851e-10 -1.399314127e-10 -1.373100808e-10
-1.288656456e-10 -1.192826377e-10 -1.093866294e-10 -9.935103219e-11
-8.923799236e-11 -7.90763032e-11 -6.888149193e-11 -5.866281846e-11
-4.842621516e-11 -3.817569209e-11 -2.791406808e-11 -1.32732953e-11
3.595701801e-06
DataArray, Isource
3.763523894e-11 4.152534402e-11 4.797529217e-11 6.021520282e-11
6.95539532e-11 6.927497469e-11 -5.535734758e-09 -6.315326794e-05
-0.0002653051633 -0.0004523277673 -0.0006110248765 -0.0007452815035
-0.0008597936981 -0.0009584496275 -0.001044282033 -0.001119636408
-0.001186336427 -0.001245813932 -0.001299205443 -0.001347423001
-0.001393118018
DataArray, Isubstrate
6.601202388e-11 5.777938484e-11 4.4393923e-11 1.93886726e-11
1.609391786e-13 3.725734644e-18 -2.326881873e-20 -2.750996007e-20
-2.908735455e-20 -2.999931412e-20 -3.066029414e-20 -3.116376081e-20
-3.155894604e-20 -3.187640629e-20 -3.213633881e-20 -3.235262362e-20
-3.253509712e-20 -3.269090581e-20 -3.282535504e-20 -3.294245823e-20
-3.305683863e-20
DataSetFinish