Requires: Utmost IV, SmartSpice, SmartView
Minimum Versions: Utmost IV 1.11.0.R, SmartSpice 4.10.2.R, SmartView 2.28.2.R
This example describes how to extract a three terminal r3_cmc model including temperature
coefficients and parasitic parameters. This model is designed to model lightly doped resistors,
such as well resistors and in this case we will model an nwell resistor.
The project file
opt_ex15.prj
and the data file
opt_ex15.uds
for this example should both be loaded into your database. When opened, the
project will look as shown in
opt_ex15_01.png
.
There are five sections in the extraction sequence. The first three sections deal with
the main resistor at room temperature, with back bias and then with temperature effect.
The last two sections deal with the parasitic diode current and capacitance to the third
terminal. The objective of each section is to isolate a device characteristic and then
to extract or optimize only those model parameters which account for this device effect.
The first section, selects the resistor measurement at the nominal temperature,
as shown in
opt_ex15_02.png
. From this single dataset, we pre-extract a sheet resistance value. This is done by the
extraction ‘rsh’ which is defined as shown in
opt_ex15_03.png
. The extraction setup, also called ‘rsh’, is used to select the extraction to
be performed on the single dataset and also defines where to write the result
as shown in
opt_ex15_04.png
. In this case, the extraction called ‘rsh’ is performed and the result is written
into the model parameter
RSH
of the model
NWRES
into the optimized column. Then we optimize the sheet resistance parameter again
along with parameters describing the velocity saturation of the device. Once this
optimization has been run, the measured vs simulated IV characteristics are displayed
in the viewer as shown in
opt_ex15_05.png
.
The second section deals with the change in the resistance due to the bias effect
from the third terminal. For an nwell resistor, with a pbulk region, negative bias
on the ptype third terminal will reverse bias the junction and extend a depletion
region into the nwell which will pinch off the resistor. This will increase the
resistivity of the nwell resistor layer. For this optimization we will use datasets
at the nominal temperature, but with differing back biases. Once this optimization
has been run, the measured vs simulated characteristics are displayed in the viewer as
shown in
opt_ex15_06.png
.
The third section deals with the temperature coefficients. One resistor has been measured
at four temperatures and the dataset subset definition is as shown in
opt_ex15_07.png
. The first and second order temperature
coefficients
TC1
and
TC2
are optimized. Once this optimization has been run, the measured vs simulated IV and extracted
characteristics are displayed in the viewer as shown in
opt_ex15_08.png
.
The fourth section deals with the forward diode parasitic current optimization. Note that the
model does not account for the roll off in current with higher forward biases, however, it is not
intended that this junction be forward biased during normal resistor operation. After optimization
the measured vs modeled parasitic current characteristics are as shown in
opt_ex15_09.png
.
Finally in the fifth section, the parasitic reverse junction capacitance of the n-well resistor to
the p bulk is optimized. After optimization the measured vs modeled characteristic will be as shown in
opt_ex15_10.png
.
The model card can then be exported into an external model library file as shown
in the output file
opt_ex15.lib.
Graphics
Files
opt_ex15.lib
.MODEL nwres R3_CMC (
+LEVEL = 1003 VERSION = 1
+SUBVERSION = 0
+REVISION = 0 TYPE = -1 SCALE = 1
+SHRINK = 0 TMIN = -100 TMAX = 500
+RTHRESH = 0.001 GMIN = 3.4556e-13 IMAX = 1
+TNOM = 25 LMIN = 0 LMAX = 9.9e+09
+WMIN = 0 WMAX = 9.9e+09 JMAX = 100
+VMAX = 9.9e+09 TMINCLIP = -100 TMAXCLIP = 500
+RSH = 6806.6 XW = 0 NWXW = 0
+WEXW = 0 FDRW = 1 FDXWINF = 0
+XL = 0 XLW = 0 DXLSAT = 0
+NST = 1 ATS = 0 DFINF = 0.0990268
+DFW = 0 DFL = 0 DFWL = 0
+SW_DFGEO = 1 DP = 81.2582 ECRIT = 100
+ECORN = 0.01 DU = 0.000500096 RC = 0
+RCW = 0 FC = 0.9 ISA = 2.3129e-18
+NA = 1.05746 CA = 0 CJA = 3.99368e-16
+PA = 0.608792 MA = 0.395893 AJA = -0.5
+ISP = 0 NP = 1 CP = 0
+CJP = 0 PP = 0.75 MP = 0.33
+AJP = -0.5 VBV = 0 IBV = 1e-06
+NBV = 1 KFN = 0 AFN = 2
+BFN = 1 SW_FNGEO = 0 EA = 1.13495
+XIS = 3.51692 TC1 = 0.00157425 TC2 = 1.37811e-05
+TC1L = 0 TC2L = 0 TC1W = 0
+TC2W = 0 TC1RC = 0 TC2RC = 0
+TC1KFN = 0 TC1VBV = 0 TC2VBV = 0
+TC1NBV = 0 GTH0 = 1e+06 GTHP = 0
+GTHA = 0 GTHC = 0 CTH0 = 0
+CTHP = 0 CTHA = 0 CTHC = 0
+NSIG_RSH = 0 NSIG_W = 0 NSIG_L = 0
+SIG_RSH = 0 SIG_W = 0 SIG_L = 0
+SMM_RSH = 0 SMM_W = 0 SMM_L = 0
+SW_MMGEO = 0 )opt_ex15.uds
Utmost IV CSV Data Logfile
Format Version 2
Copyright (c) 1984-2016 Silvaco, Inc. All rights reserved
DataSetStart
DataSetName, IV_bb0
MeasurementType, DC_TABLE
BatchName, opt_ex15
WaferName, 1
DieName, center
DeviceName, nwres
Temperature, 0
FabDate, 11 Sep 2014
UserDate, 11 Sep 2014
Attribute, L, 1e-05
Attribute, W, 1e-06
NodeNames, vss vdd bulk
Sweep, 1, V, vss, LIST, 0.1, 0
List, 1
0 0 0 0 0
0 0 0 0 0
0 0 0 0 0
0 0 0 0 0
0 0 0 0 0
0 0 0 0 0
0 0 0 0 0
0 0 0 0 0
0
Sweep, 2, V, vdd, LIST, 0.1, 0
List, 2
0.01 0.05 0.1 0.15 0.2
0.25 0.3 0.35 0.4 0.45
0.5 0.55 0.6 0.65 0.7
0.75 0.8 0.85 0.9 0.95
1 1.05 1.1 1.15 1.2
1.25 1.3 1.35 1.4 1.45
1.5 1.55 1.6 1.65 1.7
1.75 1.8 1.85 1.9 1.95
2
Sweep, 3, V, bulk, LIST, 0.1, 0
List, 3
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0 0 0 0 0
0 0 0 0 0
0 0 0 0 0
0 0 0 0 0
0 0 0 0 0
0 0 0 0 0
0 0 0 0 0
0
Target, I, vdd
Target, I, bulk
Target, I, vss
Plot, iv, XY (LIN LIN), vvdd, ivdd
DataArray, Ibulk
-6.74793e-17 -2.83168e-16 -4.82582e-16 -6.47374e-16 -8.0477e-16
-9.56973e-16 -1.09491e-15 -1.22063e-15 -1.34389e-15 -1.47566e-15
-1.6132e-15 -1.74382e-15 -1.86127e-15 -1.96832e-15 -2.07036e-15
-2.17331e-15 -2.28388e-15 -2.40707e-15 -2.5396e-15 -2.67015e-15
-2.79077e-15 -2.90144e-15 -3.00559e-15 -3.10632e-15 -3.2058e-15
-3.30526e-15 -3.40555e-15 -3.50788e-15 -3.61469e-15 -3.73049e-15
-3.86112e-15 -4.00885e-15 -4.16599e-15 -4.31886e-15 -4.45978e-15
-4.5895e-15 -4.71185e-15 -4.83005e-15 -4.9462e-15 -5.0616e-15
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DataArray, Ivdd
1.54948e-07 7.7212e-07 1.53781e-06 2.29727e-06 3.05065e-06
3.79808e-06 4.53972e-06 5.27568e-06 6.00611e-06 6.73113e-06
7.45088e-06 8.16549e-06 8.87509e-06 9.57976e-06 1.02796e-05
1.09747e-05 1.16651e-05 1.23508e-05 1.3032e-05 1.37086e-05
1.43806e-05 1.50482e-05 1.57114e-05 1.63702e-05 1.70248e-05
1.7675e-05 1.83212e-05 1.89633e-05 1.96014e-05 2.02356e-05
2.0866e-05 2.14927e-05 2.21159e-05 2.27355e-05 2.33517e-05
2.39646e-05 2.45741e-05 2.51803e-05 2.57833e-05 2.63831e-05
2.69796e-05
DataArray, Ivss
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-2.39646e-05 -2.45741e-05 -2.51803e-05 -2.57833e-05 -2.63831e-05
-2.69796e-05
DataSetFinish
DataSetStart
DataSetName, IV_bb_m1
MeasurementType, DC_TABLE
BatchName, opt_ex15
WaferName, 1
DieName, center
DeviceName, nwres
Temperature, 0
FabDate, 11 Sep 2014
UserDate, 11 Sep 2014
Attribute, L, 1e-05
Attribute, W, 1e-06
NodeNames, vss vdd bulk
Sweep, 1, V, vss, LIST, 0.1, 0
List, 1
0 0 0 0 0
0 0 0 0 0
0 0 0 0 0
0 0 0 0 0
0 0 0 0 0
0 0 0 0 0
0 0 0 0 0
0 0 0 0 0
0
Sweep, 2, V, vdd, LIST, 0.1, 0
List, 2
0.01 0.05 0.1 0.15 0.2
0.25 0.3 0.35 0.4 0.45
0.5 0.55 0.6 0.65 0.7
0.75 0.8 0.85 0.9 0.95
1 1.05 1.1 1.15 1.2
1.25 1.3 1.35 1.4 1.45
1.5 1.55 1.6 1.65 1.7
1.75 1.8 1.85 1.9 1.95
2
Sweep, 3, V, bulk, LIST, 0.1, 0
List, 3
-1 -1 -1 -1 -1
-1 -1 -1 -1 -1
-1 -1 -1 -1 -1
-1 -1 -1 -1 -1
-1 -1 -1 -1 -1
-1 -1 -1 -1 -1
-1 -1 -1 -1 -1
-1 -1 -1 -1 -1
-1
Target, I, vdd
Target, I, bulk
Target, I, vss
Plot, iv, XY (LIN LIN), vvdd, ivdd
DataArray, Ibulk
-4.94745e-15 -4.99837e-15 -5.05984e-15 -5.1106e-15 -5.15971e-15
-5.20943e-15 -5.26088e-15 -5.31527e-15 -5.3751e-15 -5.44531e-15
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-7.4652e-15 -7.60097e-15 -7.75245e-15 -7.91907e-15 -8.09691e-15
-8.2796e-15 -8.46106e-15 -8.6375e-15 -8.80779e-15 -8.97249e-15
-9.13277e-15
DataArray, Ivdd
1.3385e-07 6.67469e-07 1.33052e-06 1.9892e-06 2.64359e-06
3.29375e-06 3.93977e-06 4.58173e-06 5.21972e-06 5.85385e-06
6.48423e-06 7.11096e-06 7.73414e-06 8.35386e-06 8.97019e-06
9.5832e-06 1.01929e-05 1.07995e-05 1.14028e-05 1.2003e-05
1.26e-05 1.31939e-05 1.37847e-05 1.43724e-05 1.49571e-05
1.55387e-05 1.61172e-05 1.66927e-05 1.72652e-05 1.78347e-05
1.84011e-05 1.89645e-05 1.9525e-05 2.00824e-05 2.06368e-05
2.11883e-05 2.17368e-05 2.22823e-05 2.28249e-05 2.33645e-05
2.39012e-05
DataArray, Ivss
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-1.26e-05 -1.31939e-05 -1.37847e-05 -1.43724e-05 -1.49571e-05
-1.55387e-05 -1.61172e-05 -1.66927e-05 -1.72652e-05 -1.78347e-05
-1.84011e-05 -1.89645e-05 -1.9525e-05 -2.00824e-05 -2.06368e-05
-2.11883e-05 -2.17368e-05 -2.22823e-05 -2.28249e-05 -2.33645e-05
-2.39012e-05
DataSetFinish
DataSetStart
DataSetName, IV_bb_m2
MeasurementType, DC_TABLE
BatchName, opt_ex15
WaferName, 1
DieName, center
DeviceName, nwres
Temperature, 0
FabDate, 11 Sep 2014
UserDate, 11 Sep 2014
Attribute, L, 1e-05
Attribute, W, 1e-06
NodeNames, vss vdd bulk
Sweep, 1, V, vss, LIST, 0.1, 0
List, 1
0 0 0 0 0
0 0 0 0 0
0 0 0 0 0
0 0 0 0 0
0 0 0 0 0
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0 0 0 0 0
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Sweep, 2, V, vdd, LIST, 0.1, 0
List, 2
0.01 0.05 0.1 0.15 0.2
0.25 0.3 0.35 0.4 0.45
0.5 0.55 0.6 0.65 0.7
0.75 0.8 0.85 0.9 0.95
1 1.05 1.1 1.15 1.2
1.25 1.3 1.35 1.4 1.45
1.5 1.55 1.6 1.65 1.7
1.75 1.8 1.85 1.9 1.95
2
Sweep, 3, V, bulk, LIST, 0.1, 0
List, 3
-2 -2 -2 -2 -2
-2 -2 -2 -2 -2
-2 -2 -2 -2 -2
-2 -2 -2 -2 -2
-2 -2 -2 -2 -2
-2 -2 -2 -2 -2
-2 -2 -2 -2 -2
-2 -2 -2 -2 -2
-2
Target, I, vdd
Target, I, bulk
Target, I, vss
Plot, iv, XY (LIN LIN), vvdd, ivdd
DataArray, Ibulk
-7.53358e-15 -7.54479e-15 -7.57431e-15 -7.6041e-15 -7.63956e-15
-7.68097e-15 -7.72858e-15 -7.7827e-15 -7.84408e-15 -7.91402e-15
-7.99466e-15 -8.0886e-15 -8.19797e-15 -8.32296e-15 -8.46058e-15
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-1.03334e-14 -1.04335e-14 -1.05342e-14 -1.06357e-14 -1.07383e-14
-1.08421e-14 -1.09474e-14 -1.10544e-14 -1.11634e-14 -1.12746e-14
-1.13885e-14
DataArray, Ivdd
1.19013e-07 5.93821e-07 1.18454e-06 1.77218e-06 2.35676e-06
2.93828e-06 3.51676e-06 4.0922e-06 4.66463e-06 5.23404e-06
5.80045e-06 6.36387e-06 6.9243e-06 7.48175e-06 8.03624e-06
8.58778e-06 9.13636e-06 9.68202e-06 1.02248e-05 1.07646e-05
1.13015e-05 1.18356e-05 1.23669e-05 1.28953e-05 1.34209e-05
1.39438e-05 1.4464e-05 1.49815e-05 1.54964e-05 1.60088e-05
1.65186e-05 1.70259e-05 1.75307e-05 1.80331e-05 1.85331e-05
1.90307e-05 1.95258e-05 2.00186e-05 2.0509e-05 2.0997e-05
2.14826e-05
DataArray, Ivss
-1.19013e-07 -5.93821e-07 -1.18454e-06 -1.77218e-06 -2.35676e-06
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-8.58778e-06 -9.13636e-06 -9.68202e-06 -1.02248e-05 -1.07646e-05
-1.13015e-05 -1.18356e-05 -1.23669e-05 -1.28953e-05 -1.34209e-05
-1.39438e-05 -1.4464e-05 -1.49815e-05 -1.54964e-05 -1.60088e-05
-1.65186e-05 -1.70259e-05 -1.75307e-05 -1.80331e-05 -1.85331e-05
-1.90307e-05 -1.95258e-05 -2.00186e-05 -2.0509e-05 -2.0997e-05
-2.14826e-05
DataSetFinish
DataSetStart
DataSetName, Ibulk
MeasurementType, DC_TABLE
BatchName, opt_ex15
WaferName, 1
DieName, center
DeviceName, nwres
Temperature, 0
FabDate, 11 Sep 2014
UserDate, 11 Sep 2014
Attribute, L, 1e-05
Attribute, W, 1e-06
NodeNames, vss vdd bulk
Sweep, 1, V, vss, LIST, 0.1, 0
List, 1
0 0 0 0 0
0 0 0 0 0
0 0 0 0 0
0 0 0 0 0
0
Sweep, 2, V, vdd, LIST, 0.1, 0
List, 2
0 0 0 0 0
0 0 0 0 0
0 0 0 0 0
0 0 0 0 0
0
Sweep, 3, V, bulk, LIST, 0.1, 0
List, 3
0.01 0.05 0.1 0.15 0.2
0.25 0.3 0.35 0.4 0.45
0.5 0.55 0.6 0.65 0.7
0.75 0.8 0.85 0.9 0.95
1
Target, I, vss
Target, I, vdd
Target, I, bulk
Plot, ibulk, XY (LIN LOG), vbulk, ibulk
DataArray, Ibulk
1.53747e-16 1.13277e-15 4.35884e-15 1.4398e-14 4.60563e-14
1.4713e-13 4.81626e-13 1.68456e-12 6.73444e-12 3.30157e-11
2.00967e-10 1.42776e-09 1.07612e-08 7.12144e-08 2.89294e-07
6.95217e-07 1.24499e-06 1.91766e-06 2.71367e-06 3.64194e-06
4.71382e-06
DataArray, Ivdd
-1.01569e-16 1.66813e-15 -2.30458e-15 -7.09788e-15 -2.30346e-14
-7.3447e-14 -2.40797e-13 -8.42301e-13 -3.36718e-12 -1.65079e-11
-1.00484e-10 -7.13882e-10 -5.38059e-09 -3.56072e-08 -1.44647e-07
-3.47609e-07 -6.22493e-07 -9.58832e-07 -1.35683e-06 -1.82097e-06
-2.35691e-06
DataArray, Ivss
-1.00949e-16 1.6692e-15 -2.30405e-15 -7.09664e-15 -2.30361e-14
-7.3447e-14 -2.40797e-13 -8.423e-13 -3.36718e-12 -1.65079e-11
-1.00484e-10 -7.13882e-10 -5.38059e-09 -3.56072e-08 -1.44647e-07
-3.47609e-07 -6.22493e-07 -9.58832e-07 -1.35683e-06 -1.82097e-06
-2.35691e-06
DataSetFinish
DataSetStart
DataSetName, IV_bb0
MeasurementType, DC_TABLE
BatchName, opt_ex15
WaferName, 1
DieName, center
DeviceName, nwres
Temperature, 25
FabDate, 11 Sep 2014
UserDate, 11 Sep 2014
Attribute, L, 1e-05
Attribute, W, 1e-06
NodeNames, vss vdd bulk
Sweep, 1, V, vss, LIST, 0.1, 0
List, 1
0 0 0 0 0
0 0 0 0 0
0 0 0 0 0
0 0 0 0 0
0 0 0 0 0
0 0 0 0 0
0 0 0 0 0
0 0 0 0 0
0
Sweep, 2, V, vdd, LIST, 0.1, 0
List, 2
0.01 0.05 0.1 0.15 0.2
0.25 0.3 0.35 0.4 0.45
0.5 0.55 0.6 0.65 0.7
0.75 0.8 0.85 0.9 0.95
1 1.05 1.1 1.15 1.2
1.25 1.3 1.35 1.4 1.45
1.5 1.55 1.6 1.65 1.7
1.75 1.8 1.85 1.9 1.95
2
Sweep, 3, V, bulk, LIST, 0.1, 0
List, 3
0 0 0 0 0
0 0 0 0 0
0 0 0 0 0
0 0 0 0 0
0 0 0 0 0
0 0 0 0 0
0 0 0 0 0
0 0 0 0 0
0
Target, I, vdd
Target, I, bulk
Target, I, vss
Plot, iv, XY (LIN LIN), vvdd, ivdd
DataArray, Ibulk
-6.36858e-16 -2.67268e-15 -4.55756e-15 -6.12204e-15 -7.5819e-15
-8.95943e-15 -1.02165e-14 -1.13862e-14 -1.25503e-14 -1.37599e-14
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-2.00558e-14 -2.10945e-14 -2.22218e-14 -2.33877e-14 -2.45154e-14
-2.55675e-14 -2.6552e-14 -2.74914e-14 -2.84052e-14 -2.93067e-14
-3.02057e-14 -3.11135e-14 -3.20485e-14 -3.30397e-14 -3.41232e-14
-3.53226e-14 -3.66154e-14 -3.79282e-14 -3.91859e-14 -4.03599e-14
-4.14617e-14 -4.25155e-14 -4.35424e-14 -4.45572e-14 -4.55707e-14
-4.65909e-14
DataArray, Ivdd
1.50861e-07 7.51748e-07 1.49723e-06 2.23664e-06 2.97015e-06
3.69789e-06 4.42e-06 5.13659e-06 5.84778e-06 6.5537e-06
7.25444e-06 7.95013e-06 8.64088e-06 9.3268e-06 1.0008e-05
1.06845e-05 1.13563e-05 1.20237e-05 1.26865e-05 1.33449e-05
1.39988e-05 1.46483e-05 1.52935e-05 1.59343e-05 1.65709e-05
1.72033e-05 1.78315e-05 1.84556e-05 1.90757e-05 1.96918e-05
2.0304e-05 2.09124e-05 2.15171e-05 2.21182e-05 2.27157e-05
2.33097e-05 2.39003e-05 2.44874e-05 2.50712e-05 2.56516e-05
2.62287e-05
DataArray, Ivss
-1.50861e-07 -7.51748e-07 -1.49723e-06 -2.23664e-06 -2.97015e-06
-3.69789e-06 -4.42e-06 -5.13659e-06 -5.84778e-06 -6.5537e-06
-7.25444e-06 -7.95013e-06 -8.64088e-06 -9.3268e-06 -1.0008e-05
-1.06845e-05 -1.13563e-05 -1.20237e-05 -1.26865e-05 -1.33449e-05
-1.39988e-05 -1.46483e-05 -1.52935e-05 -1.59343e-05 -1.65709e-05
-1.72033e-05 -1.78315e-05 -1.84556e-05 -1.90757e-05 -1.96918e-05
-2.0304e-05 -2.09124e-05 -2.15171e-05 -2.21182e-05 -2.27157e-05
-2.33097e-05 -2.39003e-05 -2.44874e-05 -2.50712e-05 -2.56516e-05
-2.62287e-05
DataSetFinish
DataSetStart
DataSetName, IV_bb_m1
MeasurementType, DC_TABLE
BatchName, opt_ex15
WaferName, 1
DieName, center
DeviceName, nwres
Temperature, 25
FabDate, 11 Sep 2014
UserDate, 11 Sep 2014
Attribute, L, 1e-05
Attribute, W, 1e-06
NodeNames, vss vdd bulk
Sweep, 1, V, vss, LIST, 0.1, 0
List, 1
0 0 0 0 0
0 0 0 0 0
0 0 0 0 0
0 0 0 0 0
0 0 0 0 0
0 0 0 0 0
0 0 0 0 0
0 0 0 0 0
0
Sweep, 2, V, vdd, LIST, 0.1, 0
List, 2
0.01 0.05 0.1 0.15 0.2
0.25 0.3 0.35 0.4 0.45
0.5 0.55 0.6 0.65 0.7
0.75 0.8 0.85 0.9 0.95
1 1.05 1.1 1.15 1.2
1.25 1.3 1.35 1.4 1.45
1.5 1.55 1.6 1.65 1.7
1.75 1.8 1.85 1.9 1.95
2
Sweep, 3, V, bulk, LIST, 0.1, 0
List, 3
-1 -1 -1 -1 -1
-1 -1 -1 -1 -1
-1 -1 -1 -1 -1
-1 -1 -1 -1 -1
-1 -1 -1 -1 -1
-1 -1 -1 -1 -1
-1 -1 -1 -1 -1
-1 -1 -1 -1 -1
-1
Target, I, vdd
Target, I, bulk
Target, I, vss
Plot, iv, XY (LIN LIN), vvdd, ivdd
DataArray, Ibulk
-4.49861e-14 -4.5463e-14 -4.599e-14 -4.64637e-14 -4.69188e-14
-4.73734e-14 -4.78435e-14 -4.83514e-14 -4.89269e-14 -4.96265e-14
-5.04699e-14 -5.14488e-14 -5.24919e-14 -5.35143e-14 -5.44684e-14
-5.53475e-14 -5.6164e-14 -5.69342e-14 -5.76725e-14 -5.83914e-14
-5.91017e-14 -5.98129e-14 -6.05341e-14 -6.12737e-14 -6.20407e-14
-6.28444e-14 -6.36959e-14 -6.4609e-14 -6.56007e-14 -6.66897e-14
-6.78923e-14 -6.92137e-14 -7.06396e-14 -7.21351e-14 -7.36556e-14
-7.51626e-14 -7.66335e-14 -7.80617e-14 -7.94499e-14 -8.08057e-14
-8.2137e-14
DataArray, Ivdd
1.30529e-07 6.50945e-07 1.29766e-06 1.94019e-06 2.57857e-06
3.21287e-06 3.84313e-06 4.46942e-06 5.09181e-06 5.71038e-06
6.32521e-06 6.93639e-06 7.54399e-06 8.14811e-06 8.74881e-06
9.34616e-06 9.94022e-06 1.0531e-05 1.11186e-05 1.1703e-05
1.22843e-05 1.28624e-05 1.34374e-05 1.40093e-05 1.45781e-05
1.51438e-05 1.57064e-05 1.6266e-05 1.68224e-05 1.73759e-05
1.79262e-05 1.84736e-05 1.90178e-05 1.95591e-05 2.00973e-05
2.06325e-05 2.11646e-05 2.16937e-05 2.22199e-05 2.2743e-05
2.32631e-05
DataArray, Ivss
-1.30529e-07 -6.50945e-07 -1.29766e-06 -1.94019e-06 -2.57857e-06
-3.21287e-06 -3.84313e-06 -4.46942e-06 -5.09181e-06 -5.71038e-06
-6.32521e-06 -6.93639e-06 -7.54399e-06 -8.14811e-06 -8.74881e-06
-9.34616e-06 -9.94022e-06 -1.0531e-05 -1.11186e-05 -1.1703e-05
-1.22843e-05 -1.28624e-05 -1.34374e-05 -1.40093e-05 -1.45781e-05
-1.51438e-05 -1.57064e-05 -1.6266e-05 -1.68224e-05 -1.73759e-05
-1.79262e-05 -1.84736e-05 -1.90178e-05 -1.95591e-05 -2.00973e-05
-2.06325e-05 -2.11646e-05 -2.16937e-05 -2.22199e-05 -2.2743e-05
-2.32631e-05
DataSetFinish
DataSetStart
DataSetName, IV_bb_m2
MeasurementType, DC_TABLE
BatchName, opt_ex15
WaferName, 1
DieName, center
DeviceName, nwres
Temperature, 25
FabDate, 11 Sep 2014
UserDate, 11 Sep 2014
Attribute, L, 1e-05
Attribute, W, 1e-06
NodeNames, vss vdd bulk
Sweep, 1, V, vss, LIST, 0.1, 0
List, 1
0 0 0 0 0
0 0 0 0 0
0 0 0 0 0
0 0 0 0 0
0 0 0 0 0
0 0 0 0 0
0 0 0 0 0
0 0 0 0 0
0
Sweep, 2, V, vdd, LIST, 0.1, 0
List, 2
0.01 0.05 0.1 0.15 0.2
0.25 0.3 0.35 0.4 0.45
0.5 0.55 0.6 0.65 0.7
0.75 0.8 0.85 0.9 0.95
1 1.05 1.1 1.15 1.2
1.25 1.3 1.35 1.4 1.45
1.5 1.55 1.6 1.65 1.7
1.75 1.8 1.85 1.9 1.95
2
Sweep, 3, V, bulk, LIST, 0.1, 0
List, 3
-2 -2 -2 -2 -2
-2 -2 -2 -2 -2
-2 -2 -2 -2 -2
-2 -2 -2 -2 -2
-2 -2 -2 -2 -2
-2 -2 -2 -2 -2
-2 -2 -2 -2 -2
-2 -2 -2 -2 -2
-2
Target, I, vdd
Target, I, bulk
Target, I, vss
Plot, iv, XY (LIN LIN), vvdd, ivdd
DataArray, Ibulk
-6.80193e-14 -6.82224e-14 -6.85142e-14 -6.88508e-14 -6.92347e-14
-6.9669e-14 -7.01591e-14 -7.07143e-14 -7.13488e-14 -7.20809e-14
-7.29288e-14 -7.39018e-14 -7.49915e-14 -7.61683e-14 -7.73891e-14
-7.8612e-14 -7.98065e-14 -8.09558e-14 -8.20538e-14 -8.31008e-14
-8.41009e-14 -8.50599e-14 -8.59844e-14 -8.68808e-14 -8.7755e-14
-8.86124e-14 -8.94579e-14 -9.02955e-14 -9.11288e-14 -9.19611e-14
-9.27951e-14 -9.36333e-14 -9.44779e-14 -9.5331e-14 -9.61948e-14
-9.70714e-14 -9.79632e-14 -9.88731e-14 -9.98049e-14 -1.00764e-13
-1.01756e-13
DataArray, Ivdd
1.16082e-07 5.792e-07 1.15538e-06 1.72855e-06 2.29873e-06
2.86593e-06 3.43016e-06 3.99141e-06 4.54971e-06 5.10506e-06
5.65746e-06 6.20691e-06 6.75343e-06 7.29702e-06 7.83768e-06
8.37542e-06 8.91025e-06 9.44217e-06 9.9712e-06 1.04973e-05
1.10206e-05 1.1541e-05 1.20586e-05 1.25733e-05 1.30852e-05
1.35944e-05 1.41008e-05 1.46045e-05 1.51055e-05 1.56039e-05
1.60996e-05 1.65928e-05 1.70835e-05 1.75717e-05 1.80573e-05
1.85405e-05 1.90213e-05 1.94996e-05 1.99754e-05 2.04489e-05
2.09198e-05
DataArray, Ivss
-1.16082e-07 -5.792e-07 -1.15538e-06 -1.72855e-06 -2.29873e-06
-2.86593e-06 -3.43016e-06 -3.99141e-06 -4.54971e-06 -5.10506e-06
-5.65746e-06 -6.20691e-06 -6.75343e-06 -7.29702e-06 -7.83768e-06
-8.37542e-06 -8.91025e-06 -9.44217e-06 -9.9712e-06 -1.04973e-05
-1.10206e-05 -1.1541e-05 -1.20586e-05 -1.25733e-05 -1.30852e-05
-1.35944e-05 -1.41008e-05 -1.46045e-05 -1.51055e-05 -1.56039e-05
-1.60996e-05 -1.65928e-05 -1.70835e-05 -1.75717e-05 -1.80573e-05
-1.85405e-05 -1.90213e-05 -1.94996e-05 -1.99754e-05 -2.04489e-05
-2.09198e-05
DataSetFinish
DataSetStart
DataSetName, Ibulk
MeasurementType, DC_TABLE
BatchName, opt_ex15
WaferName, 1
DieName, center
DeviceName, nwres
Temperature, 25
FabDate, 11 Sep 2014
UserDate, 11 Sep 2014
Attribute, L, 1e-05
Attribute, W, 1e-06
NodeNames, vss vdd bulk
Sweep, 1, V, vss, LIST, 0.1, 0
List, 1
0 0 0 0 0
0 0 0 0 0
0 0 0 0 0
0 0 0 0 0
0
Sweep, 2, V, vdd, LIST, 0.1, 0
List, 2
0 0 0 0 0
0 0 0 0 0
0 0 0 0 0
0 0 0 0 0
0
Sweep, 3, V, bulk, LIST, 0.1, 0
List, 3
0.01 0.05 0.1 0.15 0.2
0.25 0.3 0.35 0.4 0.45
0.5 0.55 0.6 0.65 0.7
0.75 0.8 0.85 0.9 0.95
1
Target, I, vss
Target, I, vdd
Target, I, bulk
Plot, ibulk, XY (LIN LOG), vbulk, ibulk
DataArray, Ibulk
1.44661e-15 1.0404e-14 3.77425e-14 1.16107e-13 3.48901e-13
1.07857e-12 3.61243e-12 1.39388e-11 6.4621e-11 3.5502e-10
2.17967e-09 1.37797e-08 7.53448e-08 2.67639e-07 6.08134e-07
1.062e-06 1.60976e-06 2.24809e-06 2.98105e-06 3.81543e-06
4.7586e-06
DataArray, Ivdd
-7.72541e-16 -7.49723e-16 -1.88545e-14 -5.80955e-14 -1.74504e-13
-5.39303e-13 -1.80617e-12 -6.96937e-12 -3.23104e-11 -1.7751e-10
-1.08983e-09 -6.88986e-09 -3.76724e-08 -1.33819e-07 -3.04067e-07
-5.31e-07 -8.04879e-07 -1.12404e-06 -1.49053e-06 -1.90772e-06
-2.3793e-06
DataArray, Ivss
-7.71818e-16 -7.49155e-16 -1.88552e-14 -5.8096e-14 -1.74505e-13
-5.39302e-13 -1.80616e-12 -6.96936e-12 -3.23104e-11 -1.7751e-10
-1.08983e-09 -6.88986e-09 -3.76724e-08 -1.33819e-07 -3.04067e-07
-5.31e-07 -8.04879e-07 -1.12404e-06 -1.49053e-06 -1.90772e-06
-2.3793e-06
DataSetFinish
DataSetStart
DataSetName, cap
MeasurementType, LCR_TABLE
BatchName, opt_ex15
WaferName, 1
DieName, center
DeviceName, nwres
Temperature, 25
FabDate, 11 Sep 2014
UserDate, 11 Sep 2014
Attribute, L, 1e-05
Attribute, W, 1e-06
NodeNames, vss vdd bulk
LCRSource, bulk, vdd, 1e+06, V, 0
LCRTarget, CP
Sweep, 1, V_LCR, LIST
List, 1
-0.05 -0.1 -0.15 -0.2 -0.25
-0.3 -0.35 -0.4 -0.45 -0.5
-0.55 -0.6 -0.65 -0.7 -0.75
-0.8 -0.85 -0.9 -0.95 -1
Sweep, 2, V, vss, LIST, 0.1, 0
List, 2
0 0 0 0 0
0 0 0 0 0
0 0 0 0 0
0 0 0 0 0
Sweep, 3, V, vdd, LIST, 0.1, 0
List, 3
0 0 0 0 0
0 0 0 0 0
0 0 0 0 0
0 0 0 0 0
Plot, cap, XY (LIN LIN), V_LCR, CP
DataArray, CP
1.92604e-15 1.8731e-15 1.82772e-15 1.78796e-15 1.75174e-15
1.71717e-15 1.6828e-15 1.64779e-15 1.612e-15 1.57608e-15
1.54136e-15 1.50944e-15 1.48157e-15 1.45827e-15 1.43927e-15
1.42374e-15 1.4107e-15 1.39918e-15 1.38841e-15 1.37774e-15
DataSetFinish
DataSetStart
DataSetName, IV_bb0
MeasurementType, DC_TABLE
BatchName, opt_ex15
WaferName, 1
DieName, center
DeviceName, nwres
Temperature, 75
FabDate, 11 Sep 2014
UserDate, 11 Sep 2014
Attribute, L, 1e-05
Attribute, W, 1e-06
NodeNames, vss vdd bulk
Sweep, 1, V, vss, LIST, 0.1, 0
List, 1
0 0 0 0 0
0 0 0 0 0
0 0 0 0 0
0 0 0 0 0
0 0 0 0 0
0 0 0 0 0
0 0 0 0 0
0 0 0 0 0
0
Sweep, 2, V, vdd, LIST, 0.1, 0
List, 2
0.01 0.05 0.1 0.15 0.2
0.25 0.3 0.35 0.4 0.45
0.5 0.55 0.6 0.65 0.7
0.75 0.8 0.85 0.9 0.95
1 1.05 1.1 1.15 1.2
1.25 1.3 1.35 1.4 1.45
1.5 1.55 1.6 1.65 1.7
1.75 1.8 1.85 1.9 1.95
2
Sweep, 3, V, bulk, LIST, 0.1, 0
List, 3
0 0 0 0 0
0 0 0 0 0
0 0 0 0 0
0 0 0 0 0
0 0 0 0 0
0 0 0 0 0
0 0 0 0 0
0 0 0 0 0
0
Target, I, vdd
Target, I, bulk
Target, I, vss
Plot, iv, XY (LIN LIN), vvdd, ivdd
DataArray, Ibulk
-2.40533e-14 -1.00721e-13 -1.71103e-13 -2.28482e-13 -2.79749e-13
-3.26767e-13 -3.70255e-13 -4.11699e-13 -4.52581e-13 -4.9308e-13
-5.32152e-13 -5.68883e-13 -6.03361e-13 -6.36507e-13 -6.69626e-13
-7.03928e-13 -7.39885e-13 -7.76785e-13 -8.1321e-13 -8.4808e-13
-8.8112e-13 -9.12596e-13 -9.42943e-13 -9.72621e-13 -1.00211e-12
-1.03197e-12 -1.06282e-12 -1.09532e-12 -1.12989e-12 -1.16643e-12
-1.20419e-12 -1.24202e-12 -1.27889e-12 -1.31431e-12 -1.34832e-12
-1.38125e-12 -1.4135e-12 -1.44547e-12 -1.47746e-12 -1.50975e-12
-1.54259e-12
DataArray, Ivdd
1.35168e-07 6.73506e-07 1.3413e-06 2.00358e-06 2.66051e-06
3.31223e-06 3.95888e-06 4.60056e-06 5.23736e-06 5.8694e-06
6.49674e-06 7.11947e-06 7.73768e-06 8.35146e-06 8.96087e-06
9.56599e-06 1.01669e-05 1.07636e-05 1.13562e-05 1.19448e-05
1.25293e-05 1.31097e-05 1.36862e-05 1.42588e-05 1.48274e-05
1.53921e-05 1.59529e-05 1.65098e-05 1.7063e-05 1.76124e-05
1.81581e-05 1.87001e-05 1.92384e-05 1.97732e-05 2.03045e-05
2.08323e-05 2.13567e-05 2.18778e-05 2.23955e-05 2.29098e-05
2.3421e-05
DataArray, Ivss
-1.35168e-07 -6.73506e-07 -1.3413e-06 -2.00358e-06 -2.66051e-06
-3.31223e-06 -3.95888e-06 -4.60056e-06 -5.23736e-06 -5.8694e-06
-6.49674e-06 -7.11947e-06 -7.73768e-06 -8.35146e-06 -8.96087e-06
-9.56599e-06 -1.01669e-05 -1.07636e-05 -1.13562e-05 -1.19448e-05
-1.25293e-05 -1.31097e-05 -1.36862e-05 -1.42588e-05 -1.48274e-05
-1.53921e-05 -1.59529e-05 -1.65098e-05 -1.7063e-05 -1.76124e-05
-1.81581e-05 -1.87001e-05 -1.92384e-05 -1.97732e-05 -2.03045e-05
-2.08323e-05 -2.13567e-05 -2.18778e-05 -2.23955e-05 -2.29098e-05
-2.3421e-05
DataSetFinish
DataSetStart
DataSetName, IV_bb_m1
MeasurementType, DC_TABLE
BatchName, opt_ex15
WaferName, 1
DieName, center
DeviceName, nwres
Temperature, 75
FabDate, 11 Sep 2014
UserDate, 11 Sep 2014
Attribute, L, 1e-05
Attribute, W, 1e-06
NodeNames, vss vdd bulk
Sweep, 1, V, vss, LIST, 0.1, 0
List, 1
0 0 0 0 0
0 0 0 0 0
0 0 0 0 0
0 0 0 0 0
0 0 0 0 0
0 0 0 0 0
0 0 0 0 0
0 0 0 0 0
0
Sweep, 2, V, vdd, LIST, 0.1, 0
List, 2
0.01 0.05 0.1 0.15 0.2
0.25 0.3 0.35 0.4 0.45
0.5 0.55 0.6 0.65 0.7
0.75 0.8 0.85 0.9 0.95
1 1.05 1.1 1.15 1.2
1.25 1.3 1.35 1.4 1.45
1.5 1.55 1.6 1.65 1.7
1.75 1.8 1.85 1.9 1.95
2
Sweep, 3, V, bulk, LIST, 0.1, 0
List, 3
-1 -1 -1 -1 -1
-1 -1 -1 -1 -1
-1 -1 -1 -1 -1
-1 -1 -1 -1 -1
-1 -1 -1 -1 -1
-1 -1 -1 -1 -1
-1 -1 -1 -1 -1
-1 -1 -1 -1 -1
-1
Target, I, vdd
Target, I, bulk
Target, I, vss
Plot, iv, XY (LIN LIN), vvdd, ivdd
DataArray, Ibulk
-1.52283e-12 -1.53723e-12 -1.55351e-12 -1.56887e-12 -1.58421e-12
-1.60041e-12 -1.61835e-12 -1.63891e-12 -1.66269e-12 -1.6897e-12
-1.71916e-12 -1.74969e-12 -1.7799e-12 -1.80886e-12 -1.83626e-12
-1.86219e-12 -1.88698e-12 -1.91098e-12 -1.93454e-12 -1.95799e-12
-1.98161e-12 -2.00568e-12 -2.03049e-12 -2.05636e-12 -2.08364e-12
-2.11274e-12 -2.14408e-12 -2.17802e-12 -2.2147e-12 -2.2539e-12
-2.29504e-12 -2.33725e-12 -2.37965e-12 -2.42154e-12 -2.46255e-12
-2.50255e-12 -2.54158e-12 -2.57979e-12 -2.61734e-12 -2.65438e-12
-2.69105e-12
DataArray, Ivdd
1.171e-07 5.84019e-07 1.16436e-06 1.74104e-06 2.31408e-06
2.88351e-06 3.44937e-06 4.01166e-06 4.57045e-06 5.12575e-06
5.67762e-06 6.22609e-06 6.77123e-06 7.31309e-06 7.85171e-06
8.38715e-06 8.91946e-06 9.44868e-06 9.97485e-06 1.0498e-05
1.10182e-05 1.15354e-05 1.20496e-05 1.25609e-05 1.30692e-05
1.35747e-05 1.40772e-05 1.45768e-05 1.50735e-05 1.55672e-05
1.60581e-05 1.6546e-05 1.70311e-05 1.75133e-05 1.79925e-05
1.84689e-05 1.89423e-05 1.94129e-05 1.98806e-05 2.03454e-05
2.08073e-05
DataArray, Ivss
-1.17099e-07 -5.84018e-07 -1.16436e-06 -1.74103e-06 -2.31408e-06
-2.88351e-06 -3.44936e-06 -4.01166e-06 -4.57045e-06 -5.12575e-06
-5.67762e-06 -6.22609e-06 -6.77123e-06 -7.31308e-06 -7.85171e-06
-8.38715e-06 -8.91945e-06 -9.44868e-06 -9.97485e-06 -1.0498e-05
-1.10182e-05 -1.15354e-05 -1.20496e-05 -1.25609e-05 -1.30692e-05
-1.35747e-05 -1.40772e-05 -1.45768e-05 -1.50734e-05 -1.55672e-05
-1.60581e-05 -1.6546e-05 -1.70311e-05 -1.75133e-05 -1.79925e-05
-1.84689e-05 -1.89423e-05 -1.94129e-05 -1.98806e-05 -2.03454e-05
-2.08073e-05
DataSetFinish
DataSetStart
DataSetName, IV_bb_m2
MeasurementType, DC_TABLE
BatchName, opt_ex15
WaferName, 1
DieName, center
DeviceName, nwres
Temperature, 75
FabDate, 11 Sep 2014
UserDate, 11 Sep 2014
Attribute, L, 1e-05
Attribute, W, 1e-06
NodeNames, vss vdd bulk
Sweep, 1, V, vss, LIST, 0.1, 0
List, 1
0 0 0 0 0
0 0 0 0 0
0 0 0 0 0
0 0 0 0 0
0 0 0 0 0
0 0 0 0 0
0 0 0 0 0
0 0 0 0 0
0
Sweep, 2, V, vdd, LIST, 0.1, 0
List, 2
0.01 0.05 0.1 0.15 0.2
0.25 0.3 0.35 0.4 0.45
0.5 0.55 0.6 0.65 0.7
0.75 0.8 0.85 0.9 0.95
1 1.05 1.1 1.15 1.2
1.25 1.3 1.35 1.4 1.45
1.5 1.55 1.6 1.65 1.7
1.75 1.8 1.85 1.9 1.95
2
Sweep, 3, V, bulk, LIST, 0.1, 0
List, 3
-2 -2 -2 -2 -2
-2 -2 -2 -2 -2
-2 -2 -2 -2 -2
-2 -2 -2 -2 -2
-2 -2 -2 -2 -2
-2 -2 -2 -2 -2
-2 -2 -2 -2 -2
-2 -2 -2 -2 -2
-2
Target, I, vdd
Target, I, bulk
Target, I, vss
Plot, iv, XY (LIN LIN), vvdd, ivdd
DataArray, Ibulk
-2.28328e-12 -2.29236e-12 -2.30485e-12 -2.31883e-12 -2.33463e-12
-2.35266e-12 -2.37339e-12 -2.39721e-12 -2.42435e-12 -2.45468e-12
-2.48764e-12 -2.52229e-12 -2.55761e-12 -2.59264e-12 -2.62674e-12
-2.65951e-12 -2.69078e-12 -2.72058e-12 -2.74899e-12 -2.77616e-12
-2.80227e-12 -2.82749e-12 -2.85199e-12 -2.87592e-12 -2.89942e-12
-2.92263e-12 -2.94565e-12 -2.96859e-12 -2.99153e-12 -3.01458e-12
-3.03781e-12 -3.0613e-12 -3.08514e-12 -3.10943e-12 -3.13429e-12
-3.15985e-12 -3.18629e-12 -3.21386e-12 -3.24286e-12 -3.27369e-12
-3.30684e-12
DataArray, Ivdd
1.042e-07 5.19907e-07 1.0371e-06 1.55159e-06 2.06339e-06
2.5725e-06 3.07892e-06 3.58266e-06 4.08373e-06 4.58211e-06
5.07782e-06 5.57086e-06 6.06122e-06 6.5489e-06 7.0339e-06
7.51623e-06 7.99589e-06 8.47287e-06 8.94717e-06 9.41881e-06
9.88778e-06 1.03541e-05 1.08177e-05 1.12787e-05 1.17371e-05
1.21929e-05 1.2646e-05 1.30965e-05 1.35445e-05 1.39899e-05
1.44327e-05 1.48731e-05 1.5311e-05 1.57464e-05 1.61794e-05
1.661e-05 1.70381e-05 1.74639e-05 1.78874e-05 1.83084e-05
1.87271e-05
DataArray, Ivss
-1.04198e-07 -5.19905e-07 -1.0371e-06 -1.55159e-06 -2.06339e-06
-2.57249e-06 -3.07892e-06 -3.58266e-06 -4.08373e-06 -4.58211e-06
-5.07782e-06 -5.57086e-06 -6.06121e-06 -6.54889e-06 -7.0339e-06
-7.51623e-06 -7.99588e-06 -8.47286e-06 -8.94717e-06 -9.41881e-06
-9.88778e-06 -1.03541e-05 -1.08177e-05 -1.12787e-05 -1.17371e-05
-1.21929e-05 -1.2646e-05 -1.30965e-05 -1.35445e-05 -1.39899e-05
-1.44327e-05 -1.48731e-05 -1.5311e-05 -1.57464e-05 -1.61794e-05
-1.661e-05 -1.70381e-05 -1.74639e-05 -1.78874e-05 -1.83084e-05
-1.87271e-05
DataSetFinish
DataSetStart
DataSetName, Ibulk
MeasurementType, DC_TABLE
BatchName, opt_ex15
WaferName, 1
DieName, center
DeviceName, nwres
Temperature, 75
FabDate, 11 Sep 2014
UserDate, 11 Sep 2014
Attribute, L, 1e-05
Attribute, W, 1e-06
NodeNames, vss vdd bulk
Sweep, 1, V, vss, LIST, 0.1, 0
List, 1
0 0 0 0 0
0 0 0 0 0
0 0 0 0 0
0 0 0 0 0
0
Sweep, 2, V, vdd, LIST, 0.1, 0
List, 2
0 0 0 0 0
0 0 0 0 0
0 0 0 0 0
0 0 0 0 0
0
Sweep, 3, V, bulk, LIST, 0.1, 0
List, 3
0.01 0.05 0.1 0.15 0.2
0.25 0.3 0.35 0.4 0.45
0.5 0.55 0.6 0.65 0.7
0.75 0.8 0.85 0.9 0.95
1
Target, I, vss
Target, I, vdd
Target, I, bulk
Plot, ibulk, XY (LIN LOG), vbulk, ibulk
DataArray, Ibulk
5.4556e-14 3.86705e-13 1.36577e-12 4.21986e-12 1.36961e-11
4.97904e-11 2.0509e-10 9.32752e-10 4.48126e-09 2.11955e-08
8.46916e-08 2.39372e-07 4.87226e-07 8.06211e-07 1.18194e-06
1.60895e-06 2.08667e-06 2.6168e-06 3.20207e-06 3.84556e-06
4.55029e-06
DataArray, Ivdd
-2.72775e-14 -1.8485e-13 -6.82786e-13 -2.10997e-12 -6.84809e-12
-2.48952e-11 -1.02545e-10 -4.66376e-10 -2.24063e-09 -1.05977e-08
-4.23458e-08 -1.19686e-07 -2.43613e-07 -4.03106e-07 -5.90969e-07
-8.04477e-07 -1.04333e-06 -1.3084e-06 -1.60104e-06 -1.92278e-06
-2.27515e-06
DataArray, Ivss
-2.72783e-14 -1.84851e-13 -6.82787e-13 -2.10997e-12 -6.84809e-12
-2.48952e-11 -1.02545e-10 -4.66376e-10 -2.24063e-09 -1.05977e-08
-4.23458e-08 -1.19686e-07 -2.43613e-07 -4.03106e-07 -5.90969e-07
-8.04477e-07 -1.04333e-06 -1.3084e-06 -1.60104e-06 -1.92278e-06
-2.27515e-06
DataSetFinish
DataSetStart
DataSetName, IV_bb0
MeasurementType, DC_TABLE
BatchName, opt_ex15
WaferName, 1
DieName, center
DeviceName, nwres
Temperature, 125
FabDate, 11 Sep 2014
UserDate, 11 Sep 2014
Attribute, L, 1e-05
Attribute, W, 1e-06
NodeNames, vss vdd bulk
Sweep, 1, V, vss, LIST, 0.1, 0
List, 1
0 0 0 0 0
0 0 0 0 0
0 0 0 0 0
0 0 0 0 0
0 0 0 0 0
0 0 0 0 0
0 0 0 0 0
0 0 0 0 0
0
Sweep, 2, V, vdd, LIST, 0.1, 0
List, 2
0.01 0.05 0.1 0.15 0.2
0.25 0.3 0.35 0.4 0.45
0.5 0.55 0.6 0.65 0.7
0.75 0.8 0.85 0.9 0.95
1 1.05 1.1 1.15 1.2
1.25 1.3 1.35 1.4 1.45
1.5 1.55 1.6 1.65 1.7
1.75 1.8 1.85 1.9 1.95
2
Sweep, 3, V, bulk, LIST, 0.1, 0
List, 3
0 0 0 0 0
0 0 0 0 0
0 0 0 0 0
0 0 0 0 0
0 0 0 0 0
0 0 0 0 0
0 0 0 0 0
0 0 0 0 0
0
Target, I, vdd
Target, I, bulk
Target, I, vss
Plot, iv, XY (LIN LIN), vvdd, ivdd
DataArray, Ibulk
-5.37194e-13 -2.14789e-12 -3.48903e-12 -4.49304e-12 -5.33479e-12
-6.0821e-12 -6.7686e-12 -7.41729e-12 -8.04025e-12 -8.63771e-12
-9.20578e-12 -9.74548e-12 -1.02651e-11 -1.07768e-11 -1.12914e-11
-1.18131e-11 -1.23377e-11 -1.28551e-11 -1.33559e-11 -1.38359e-11
-1.42964e-11 -1.47424e-11 -1.51808e-11 -1.56189e-11 -1.6064e-11
-1.65225e-11 -1.69978e-11 -1.74895e-11 -1.79929e-11 -1.85004e-11
-1.90042e-11 -1.94986e-11 -1.99813e-11 -2.0453e-11 -2.09159e-11
-2.13732e-11 -2.18283e-11 -2.22845e-11 -2.2745e-11 -2.32135e-11
-2.36935e-11
DataArray, Ivdd
1.16022e-07 5.78026e-07 1.15097e-06 1.71902e-06 2.28234e-06
2.84108e-06 3.39537e-06 3.94532e-06 4.49103e-06 5.03257e-06
5.57003e-06 6.10349e-06 6.63299e-06 7.15862e-06 7.68043e-06
8.19847e-06 8.71282e-06 9.22351e-06 9.7306e-06 1.02341e-05
1.07341e-05 1.12307e-05 1.17237e-05 1.22133e-05 1.26995e-05
1.31823e-05 1.36618e-05 1.41378e-05 1.46106e-05 1.508e-05
1.55461e-05 1.6009e-05 1.64686e-05 1.6925e-05 1.73783e-05
1.78284e-05 1.82754e-05 1.87194e-05 1.91604e-05 1.95983e-05
2.00333e-05
DataArray, Ivss
-1.16022e-07 -5.78024e-07 -1.15096e-06 -1.71901e-06 -2.28234e-06
-2.84108e-06 -3.39537e-06 -3.94532e-06 -4.49102e-06 -5.03256e-06
-5.57003e-06 -6.10348e-06 -6.63298e-06 -7.15861e-06 -7.68042e-06
-8.19846e-06 -8.7128e-06 -9.2235e-06 -9.73058e-06 -1.02341e-05
-1.07341e-05 -1.12306e-05 -1.17237e-05 -1.22133e-05 -1.26995e-05
-1.31823e-05 -1.36617e-05 -1.41378e-05 -1.46105e-05 -1.50799e-05
-1.55461e-05 -1.60089e-05 -1.64686e-05 -1.6925e-05 -1.73783e-05
-1.78284e-05 -1.82754e-05 -1.87194e-05 -1.91603e-05 -1.95983e-05
-2.00333e-05
DataSetFinish
DataSetStart
DataSetName, IV_bb_m1
MeasurementType, DC_TABLE
BatchName, opt_ex15
WaferName, 1
DieName, center
DeviceName, nwres
Temperature, 125
FabDate, 11 Sep 2014
UserDate, 11 Sep 2014
Attribute, L, 1e-05
Attribute, W, 1e-06
NodeNames, vss vdd bulk
Sweep, 1, V, vss, LIST, 0.1, 0
List, 1
0 0 0 0 0
0 0 0 0 0
0 0 0 0 0
0 0 0 0 0
0 0 0 0 0
0 0 0 0 0
0 0 0 0 0
0 0 0 0 0
0
Sweep, 2, V, vdd, LIST, 0.1, 0
List, 2
0.01 0.05 0.1 0.15 0.2
0.25 0.3 0.35 0.4 0.45
0.5 0.55 0.6 0.65 0.7
0.75 0.8 0.85 0.9 0.95
1 1.05 1.1 1.15 1.2
1.25 1.3 1.35 1.4 1.45
1.5 1.55 1.6 1.65 1.7
1.75 1.8 1.85 1.9 1.95
2
Sweep, 3, V, bulk, LIST, 0.1, 0
List, 3
-1 -1 -1 -1 -1
-1 -1 -1 -1 -1
-1 -1 -1 -1 -1
-1 -1 -1 -1 -1
-1 -1 -1 -1 -1
-1 -1 -1 -1 -1
-1 -1 -1 -1 -1
-1 -1 -1 -1 -1
-1
Target, I, vdd
Target, I, bulk
Target, I, vss
Plot, iv, XY (LIN LIN), vvdd, ivdd
DataArray, Ibulk
-2.36258e-11 -2.38288e-11 -2.40782e-11 -2.43352e-11 -2.46113e-11
-2.49153e-11 -2.52524e-11 -2.56219e-11 -2.60175e-11 -2.64283e-11
-2.68421e-11 -2.72491e-11 -2.76431e-11 -2.80219e-11 -2.83864e-11
-2.8739e-11 -2.90832e-11 -2.94226e-11 -2.97611e-11 -3.01025e-11
-3.04511e-11 -3.08115e-11 -3.11884e-11 -3.15866e-11 -3.20101e-11
-3.24611e-11 -3.29392e-11 -3.34402e-11 -3.39573e-11 -3.44819e-11
-3.50061e-11 -3.5524e-11 -3.6032e-11 -3.65289e-11 -3.70149e-11
-3.74912e-11 -3.79594e-11 -3.84211e-11 -3.88779e-11 -3.93312e-11
-3.97825e-11
DataArray, Ivdd
1.00392e-07 5.00664e-07 9.98208e-07 1.49266e-06 1.98405e-06
2.47238e-06 2.95767e-06 3.43993e-06 3.91919e-06 4.39546e-06
4.86877e-06 5.33913e-06 5.80658e-06 6.27114e-06 6.73284e-06
7.19172e-06 7.64782e-06 8.10116e-06 8.55178e-06 8.9997e-06
9.44497e-06 9.88758e-06 1.03276e-05 1.0765e-05 1.11997e-05
1.16319e-05 1.20616e-05 1.24886e-05 1.29131e-05 1.33349e-05
1.37543e-05 1.4171e-05 1.45852e-05 1.49968e-05 1.54059e-05
1.58124e-05 1.62163e-05 1.66177e-05 1.70165e-05 1.74127e-05
1.78064e-05
DataArray, Ivss
-1.00368e-07 -5.0064e-07 -9.98184e-07 -1.49264e-06 -1.98403e-06
-2.47235e-06 -2.95764e-06 -3.43991e-06 -3.91917e-06 -4.39544e-06
-4.86874e-06 -5.3391e-06 -5.80655e-06 -6.27111e-06 -6.73281e-06
-7.19169e-06 -7.64779e-06 -8.10113e-06 -8.55175e-06 -8.99967e-06
-9.44494e-06 -9.88755e-06 -1.03275e-05 -1.07649e-05 -1.11997e-05
-1.16319e-05 -1.20615e-05 -1.24886e-05 -1.2913e-05 -1.33349e-05
-1.37542e-05 -1.4171e-05 -1.45852e-05 -1.49968e-05 -1.54058e-05
-1.58123e-05 -1.62163e-05 -1.66176e-05 -1.70164e-05 -1.74127e-05
-1.78063e-05
DataSetFinish
DataSetStart
DataSetName, IV_bb_m2
MeasurementType, DC_TABLE
BatchName, opt_ex15
WaferName, 1
DieName, center
DeviceName, nwres
Temperature, 125
FabDate, 11 Sep 2014
UserDate, 11 Sep 2014
Attribute, L, 1e-05
Attribute, W, 1e-06
NodeNames, vss vdd bulk
Sweep, 1, V, vss, LIST, 0.1, 0
List, 1
0 0 0 0 0
0 0 0 0 0
0 0 0 0 0
0 0 0 0 0
0 0 0 0 0
0 0 0 0 0
0 0 0 0 0
0 0 0 0 0
0
Sweep, 2, V, vdd, LIST, 0.1, 0
List, 2
0.01 0.05 0.1 0.15 0.2
0.25 0.3 0.35 0.4 0.45
0.5 0.55 0.6 0.65 0.7
0.75 0.8 0.85 0.9 0.95
1 1.05 1.1 1.15 1.2
1.25 1.3 1.35 1.4 1.45
1.5 1.55 1.6 1.65 1.7
1.75 1.8 1.85 1.9 1.95
2
Sweep, 3, V, bulk, LIST, 0.1, 0
List, 3
-2 -2 -2 -2 -2
-2 -2 -2 -2 -2
-2 -2 -2 -2 -2
-2 -2 -2 -2 -2
-2 -2 -2 -2 -2
-2 -2 -2 -2 -2
-2 -2 -2 -2 -2
-2 -2 -2 -2 -2
-2
Target, I, vdd
Target, I, bulk
Target, I, vss
Plot, iv, XY (LIN LIN), vvdd, ivdd
DataArray, Ibulk
-3.47483e-11 -3.49106e-11 -3.5138e-11 -3.5398e-11 -3.56948e-11
-3.60312e-11 -3.64062e-11 -3.68149e-11 -3.72484e-11 -3.76956e-11
-3.81449e-11 -3.85866e-11 -3.9014e-11 -3.94231e-11 -3.98125e-11
-4.01824e-11 -4.05343e-11 -4.08703e-11 -4.11927e-11 -4.15037e-11
-4.18058e-11 -4.21009e-11 -4.23909e-11 -4.26778e-11 -4.29629e-11
-4.32479e-11 -4.35341e-11 -4.38228e-11 -4.41154e-11 -4.44133e-11
-4.4718e-11 -4.50311e-11 -4.53546e-11 -4.56911e-11 -4.60435e-11
-4.64155e-11 -4.68115e-11 -4.72364e-11 -4.76954e-11 -4.8193e-11
-4.8732e-11
DataArray, Ivdd
8.93663e-08 4.45822e-07 8.89285e-07 1.33042e-06 1.76923e-06
2.20573e-06 2.63991e-06 3.07179e-06 3.50135e-06 3.92861e-06
4.35356e-06 4.7762e-06 5.19653e-06 5.61455e-06 6.03025e-06
6.44363e-06 6.8547e-06 7.26344e-06 7.66987e-06 8.07397e-06
8.47574e-06 8.8752e-06 9.27234e-06 9.66715e-06 1.00597e-05
1.04498e-05 1.08377e-05 1.12233e-05 1.16066e-05 1.19877e-05
1.23664e-05 1.27429e-05 1.31172e-05 1.34893e-05 1.38591e-05
1.42268e-05 1.45923e-05 1.49557e-05 1.53169e-05 1.56761e-05
1.6033e-05
DataArray, Ivss
-8.93316e-08 -4.45787e-07 -8.8925e-07 -1.33038e-06 -1.76919e-06
-2.20569e-06 -2.63987e-06 -3.07175e-06 -3.50132e-06 -3.92858e-06
-4.35353e-06 -4.77617e-06 -5.19649e-06 -5.61451e-06 -6.03021e-06
-6.44359e-06 -6.85466e-06 -7.2634e-06 -7.66982e-06 -8.07392e-06
-8.4757e-06 -8.87516e-06 -9.27229e-06 -9.66711e-06 -1.00596e-05
-1.04498e-05 -1.08377e-05 -1.12233e-05 -1.16066e-05 -1.19876e-05
-1.23664e-05 -1.27429e-05 -1.31172e-05 -1.34892e-05 -1.38591e-05
-1.42268e-05 -1.45923e-05 -1.49557e-05 -1.53169e-05 -1.5676e-05
-1.6033e-05
DataSetFinish
DataSetStart
DataSetName, Ibulk
MeasurementType, DC_TABLE
BatchName, opt_ex15
WaferName, 1
DieName, center
DeviceName, nwres
Temperature, 125
FabDate, 11 Sep 2014
UserDate, 11 Sep 2014
Attribute, L, 1e-05
Attribute, W, 1e-06
NodeNames, vss vdd bulk
Sweep, 1, V, vss, LIST, 0.1, 0
List, 1
0 0 0 0 0
0 0 0 0 0
0 0 0 0 0
0 0 0 0 0
0
Sweep, 2, V, vdd, LIST, 0.1, 0
List, 2
0 0 0 0 0
0 0 0 0 0
0 0 0 0 0
0 0 0 0 0
0
Sweep, 3, V, bulk, LIST, 0.1, 0
List, 3
0.01 0.05 0.1 0.15 0.2
0.25 0.3 0.35 0.4 0.45
0.5 0.55 0.6 0.65 0.7
0.75 0.8 0.85 0.9 0.95
1
Target, I, vss
Target, I, vdd
Target, I, bulk
Plot, ibulk, XY (LIN LOG), vbulk, ibulk
DataArray, Ibulk
1.25813e-12 9.72034e-12 3.93495e-11 1.42276e-10 5.2984e-10
2.05715e-09 8.10848e-09 3.0328e-08 9.4634e-08 2.23105e-07
4.11567e-07 6.4586e-07 9.16212e-07 1.21782e-06 1.54889e-06
1.90924e-06 2.29957e-06 2.72099e-06 3.17483e-06 3.66242e-06
4.18511e-06
DataArray, Ivdd
-6.29066e-13 -4.85165e-12 -1.96747e-11 -7.11381e-11 -2.6492e-10
-1.02856e-09 -4.05424e-09 -1.5164e-08 -4.7317e-08 -1.11552e-07
-2.05783e-07 -3.2293e-07 -4.58106e-07 -6.08911e-07 -7.74444e-07
-9.5462e-07 -1.14978e-06 -1.3605e-06 -1.58741e-06 -1.83121e-06
-2.09255e-06
DataArray, Ivss
-6.29064e-13 -4.85165e-12 -1.96747e-11 -7.11381e-11 -2.6492e-10
-1.02856e-09 -4.05424e-09 -1.5164e-08 -4.7317e-08 -1.11552e-07
-2.05783e-07 -3.2293e-07 -4.58106e-07 -6.08911e-07 -7.74444e-07
-9.5462e-07 -1.14978e-06 -1.3605e-06 -1.58741e-06 -1.83121e-06
-2.09255e-06
DataSetFinish