Requires: Utmost IV, SmartSpice, SmartView
Minimum Versions: Utmost IV 1.10.6.R, SmartSpice 4.10.2.R, SmartView 2.28.2.R
This example describes how to extract a standard BSIM3v3 model. To extract a
model which is scalable with geometry, multiple different device sizes must be
included. In this example, nine device geometries are included.
The project file
opt_ex09.prj
and the data file
opt_ex09.uds
for this example should be loaded into your database. When opened, the
project will look as shown in
opt_ex09_project.png
.
The optimization sequence, which fully automates the extraction of this BSIM3v3
model, has nine sections. The objective of each section is to isolate a device
characteristic and then to optimize only those model parameters which account
for this device behavior.
Section 1 : idvglin_large_rtp
This section optimizes the parameters for wide and long channel devices. The
data in this section is the drain current versus gate voltage characteristic
in the linear region and at room temperature. The following model parameters
are extracted.
- VTH0 Threshold voltage @Vb=0 for large L
- U0 Mobility at nominal temperature
- UA First-order mobility degradation coefficient
- UB Second-order mobility degradation coefficient
- K1 First-order body effect coefficient
- K2 Second-order body effect coefficient
- UC Body-effect of mobility degradation coefficient
- NFACTOR Subthreshold swing factor
- VOFF Offset voltage in the subthreshold region at large W and L
After this step has been completed, the fit to measured data will be as shown in
opt_ex09_01.png
.
Section 2: idvglin_larray_rtp
In this section, the parameters for short channel effect are optimized using
devices of multiple lengths and wide channel value. The following model parameters
are extracted.
- LINT Length offset fitting parameter form I-V without bias
- DVT0 First coefficient of short-channel effect on Vth
- DVT1 Second coefficient of short-channel effect on Vth
- NLX Lateral non-uniform doping coefficient
- RDSW Width coefficient of parasitic resistance
- DVT2 Body-bias coefficient of short-channel effect on Vth
- PRWG Gate bias coefficient of RDSW
- PRWB Body bias coefficient of RDSW
After this step has been completed, the fit to measured data will be as shown in
opt_ex09_02.png
.
Section 3 : idvglin_warray_rtp
The narrow width parameters are now extracted using data from devices with
various channel widths and with a long channel value. The following model
parameters are extracted.
- WINT Width offset fitting parameter form I-V without bias
- K3 Narrow width coefficient
- W0 Narrow width parameter
- K3B Body effect coefficient of K3
After this step has been completed, the fit to measured data will be as shown in
opt_ex09_03.png
.
Section 4 : idvglin_small_rtp
This section extracts parameters from devices with both short and narrow channels.
The binning parameters PVTH0, PK1, PK2, PUA and PRDSW are extracted. These
parameters are the variation of VTH0, K1, K2, UA and RDSW for short and narrow
devices.
After this step has been completed, the fit to measured data will be as shown in
opt_ex09_04.png
.
At this point, the fit to the measured data should be verified and if necessary,
steps 1 through 4 should be repeated until the fit to all measured data is good.
Section 5 : idvdlow_all_rtp
The first 4 sections concentrated only on the linear regions drain current versus
gate voltage for each of the different geometries. This section will use the
saturation region drain current versus drain voltage data for all device geometries.
The following parameters are optimized.
- A0 Bulk charge effect coefficient for channel length
- AGS Gate bias coefficient of the bulk
- VSAT Saturation velocity at nominal temperature
- PCLM Channel length modulation parameter
- PDIBLC1 First output resistance DIBL effect correction parameter
- ETA0 DIBL coefficient in subthreshold region
- PVAG Gate dependence of Early voltage
- B0 Bulk charge effect for narrow width
- B1 Bulk charge effect width offset
- PVSAT VSAT variation for short and narrow devices
After this step has been completed, the fit to measured data will be as shown in
opt_ex09_05.png
.
Section 6 : idvdhigh_all_rtp
This section extracts parameters responsible for the saturation drain current
versus drain voltage characteristics with back bias. The following parameters
are optimized.
- KETA Body-bias coefficient of the bulk charge effect
- LKETA KETA variation for short devices
- WKETA KETA variation for narrow devices
- PKETA KETA variatino for short and narrow devices
- ETAB Body-bias coefficient for the subthreshold DIBL effect
- PDIBLCB Body effect coefficient of DIBL correction parameters
After this step has been completed, the fit to measured data will be as shown in
opt_ex09_06.png
.
This completes the room temperature DC model, the following sections will deal
with the temperature model.
Section 7: idvglin_large_temp
This section extracts the model parameters for the large geometry drain
current versus gate voltage linear temperature measurements. The following
parameters are optimized.
- KT1 Temperature coefficient for threshold voltage
- KT2 Body-bias coefficient of the Vth temperature effect
- UTE Mobility temperature exponent
- UA1 Temperature coefficient for UA
- UB1 Temperature coefficient for UB
- UC1 Temperature coefficient for UC
After this step has been completed, the fit to measured data will be as shown in
opt_ex09_07.png
.
Section 8 : idvglin_all_temp
Now we select all of the device geometries at temperature for the linear drain
current versus gate voltage characteristics and optimize the following parameters.
- KT1L Channel length sensitivity of temperature coefficient for threshold voltage
- PRT Temperature coefficient for RDSW
- LUTE UTE variation for short devices
- LUA1 UA1 variation for short devices
- PUTE UTE variation for short and narrow devices
- PUA1 UA1 variation for short and narrow devices
After this step has been completed, the fit to measured data will be as shown in
opt_ex09_08.png
.
Section 9 : idvdlow_all_temp
This section will extract the parameters for the saturation drain current versus
drain voltage characteristics versus temperature. The parameters to be optimized
are as follows.
- AT Temperature coefficient for saturation velocity
- LAT AT variation for short devices
- WAT AT variation for narrow devices
- PAT AT variation for short and narrow devices
After this step has been completed, the fit to measured data will be as shown in
opt_ex09_09.png
.
The sequence may be run multiple times in order to improve the fit of the model
to the measured data as necessary. When complete, the model card can then be
exported into an external model library file as shown in the output file
opt_ex09.lib.
Graphics
Files
opt_ex09.lib
.LIB demo
.MODEL nmos NMOS (
+LEVEL = 49 VERSION = 3.3 TNOM = 27
+TOX = 2.18e-08 XJ = 1.5e-07 NCH = 1.7e+17
+VTH0 = 0.766284 K1 = 0.719298 K2 = 0
+K3 = 100 K3B = -10 W0 = 8.89337e-06
+NLX = 4.50569e-07 DVT0W = 0 DVT1W = 0
+DVT2W = -0.032 DVT0 = 1.0321 DVT1 = 0.445706
+DVT2 = 0 U0 = 0.0748973 UA = 2.06682e-09
+UB = 5.44473e-19 UC = 3.23153e-11 VSAT = 139516
+A0 = 1.49279 AGS = 0.0900472 B0 = 1.70433e-07
+B1 = -4.30051e-09 KETA = -0.00727749 A1 = 0
+A2 = 1 RDSW = 363.667 PRWG = 0.0996686
+PRWB = 0.0140903 WR = 1 WINT = 4.69032e-08
+LINT = 1.09353e-07 XL = 0 XW = 0
+DWG = -4.39996e-09 DWB = -1.67886e-08 VOFF = -0.0938246
+NFACTOR = 1.33465 CIT = 0 CDSC = 0.00024
+CDSCD = 0 CDSCB = 0 ETA0 = 0.0287797
+ETAB = -0.0174275 DSUB = 0.56 PCLM = 1.12804
+PDIBLC1 = 0.0787551 PDIBLC2 = 0.0086 PDIBLCB = 0
+DROUT = 0.56 PSCBE1 = 4.2e+08 PSCBE2 = 5e-05
+PVAG = 0.00932328 DELTA = 0.01 MOBMOD = 1
+PRT = 13.6177 UTE = -1.97817 KT1 = -0.297089
+KT1L = -5.04536e-08 KT2 = 0.0376609 UA1 = 1.12997e-09
+UB1 = -7.75175e-19 UC1 = -3.79363e-11 AT = 78208.3
+NQSMOD = 0 WL = 0 WLN = 1
+WW = 0 WWN = 1 WWL = 0
+LL = 0 LLN = 1 LW = 0
+LWN = 1 LWL = 0 CAPMOD = 2
+TPB = 0 TPBSW = 0 TPBSWG = 0
+TCJ = 0 TCJSW = 0 TCJSWG = 0
+NOFF = 1 ACDE = 1 MOIN = 15
+PVTH0 = -0.00215142 PK1 = 0.0227542 PK2 = 0.004996
+PUA = -1.51414e-10 PRDSW = 32.6984 PVSAT = 10030
+LKETA = -0.00128138 WKETA = -0.0656127 PKETA = 0.0514952
+LUA1 = 5.41891e-10 LUTE = 0.0348892 PUA1 = -1.73109e-10
+PUTE = -0.00743763 LAT = -2130.88 WAT = -19757.8
+PAT = 2339.36 )
.ENDL demoopt_ex09.uds
Utmost IV CSV Data Logfile
Format Version 1
Copyright (c) 1984 - 2016 Silvaco, Inc. All rights reserved
DataSetStart
DataSetName, idvdhigh
MeasurementType, DC
BatchName, opt_ex09
WaferName, wafer1
DieName, x0y0
DeviceName, n10_0p5
Temperature, -40
FabDate, 11 May 2010
UserDate, 11 May 2010
WaferDiameter, 0.2
DieLayout, FOUR_CROSSING
DieSize, 0.02, 0.02
DieType, PARTIAL
Attribute, W, 1e-05
Attribute, L, 5e-07
NodeNames, d g s b
Sweep, 1, V, D, LIN, 0, 5, 0.1, CALCULATED, 0.1, 0
Sweep, 2, V, G, LIN, 2, 5, CALCULATED, 5, 0.1, 0
Constant, V, S, 0, 0.1, 0
Constant, V, B, -3, 0.1, 0
Target, I, D
Function, gds, derivative (Vd, ID)
Plot, idvd, XY (LIN LIN), vd, id
Plot, gds, XY (LIN LOG), vd, gds
DataArray, ID
0 9.8141e-06 1.1837e-05 1.36139e-05 1.54288e-05
1.73309e-05 1.93422e-05 2.14758e-05 2.37406e-05 2.61431e-05
2.86886e-05 3.13813e-05 3.42245e-05 3.7221e-05 4.03731e-05
4.36826e-05 4.71506e-05 5.07784e-05 5.45663e-05 5.85148e-05
6.26238e-05 6.68929e-05 7.13217e-05 7.59095e-05 8.06552e-05
8.55579e-05 9.06166e-05 9.58303e-05 0.000101198 0.00010672
0.000112396 0.000118227 0.000124217 0.000130369 0.000136692
0.000143196 0.000149895 0.00015681 0.000163966 0.000171398
0.000179148 0.000187269 0.000195825 0.000204894 0.000214571
0.000224965 0.000236204 0.00024844 0.000261844 0.000276612
0.000292967 0 0.000283625 0.000491348 0.000637289
0.00073376 0.000795652 0.000838595 0.000871549 0.000898702
0.000922197 0.000943243 0.000962574 0.000980659 0.000997814
0.00101426 0.00103015 0.00104561 0.00106071 0.00107553
0.00109012 0.00110452 0.00111876 0.00113286 0.00114686
0.00116077 0.00117459 0.00118836 0.00120207 0.00121574
0.00122938 0.00124299 0.0012566 0.00127022 0.00128388
0.0012976 0.00131142 0.00132541 0.00133963 0.00135418
0.00136918 0.00138478 0.00140116 0.00141855 0.00143721
0.00145746 0.00147967 0.00150428 0.00153177 0.00156271
0.00159773 0.00163754 0 0.000495531 0.000901949
0.00123318 0.00150039 0.00171258 0.00187675 0.00199827
0.00208499 0.00214844 0.0021976 0.00223776 0.00227195
0.00230201 0.00232909 0.00235396 0.00237714 0.00239901
0.00241984 0.00243982 0.00245912 0.00247785 0.00249611
0.00251396 0.00253147 0.00254869 0.00256566 0.0025824
0.00259896 0.00261536 0.00263161 0.00264774 0.00266377
0.00267974 0.00269568 0.00271163 0.00272766 0.00274384
0.00276029 0.00277714 0.00279458 0.00281284 0.0028322
0.00285302 0.00287572 0.00290081 0.00292888 0.00296064
0.00299688 0.00303853 0.00308662 0 0.000650993
0.00120911 0.00168708 0.00209539 0.00244273 0.00273628
0.00298162 0.00318187 0.00333693 0.00345033 0.00353341
0.00359703 0.00364816 0.00369096 0.00372796 0.0037608
0.00379053 0.00381789 0.00384341 0.00386747 0.00389034
0.00391224 0.00393335 0.00395378 0.00397364 0.00399302
0.00401198 0.00403058 0.00404887 0.00406689 0.00408467
0.00410224 0.00411964 0.00413691 0.00415409 0.00417122
0.00418839 0.00420568 0.00422323 0.00424121 0.00425982
0.00427937 0.0043002 0.00432275 0.00434756 0.00437529
0.00440671 0.00444272 0.00448438 0.0045329 0
0.000769344 0.00144625 0.002042 0.00256611 0.00302662
0.00343039 0.0037832 0.00408969 0.00435279 0.00457195
0.00474348 0.00487024 0.004964 0.00503609 0.00509398
0.00514227 0.00518382 0.00522047 0.00525347 0.00528366
0.00531166 0.00533791 0.00536274 0.00538642 0.00540913
0.00543104 0.00545225 0.00547289 0.00549302 0.00551271
0.00553202 0.005551 0.00556969 0.00558814 0.00560638
0.00562446 0.00564245 0.00566041 0.00567846 0.00569672
0.00571538 0.00573468 0.00575493 0.00577653 0.00579998
0.0058259 0.00585505 0.00588832 0.00592679 0.00597171
DataSetFinish
DataSetStart
DataSetName, idvdhigh
MeasurementType, DC
BatchName, opt_ex09
WaferName, wafer1
DieName, x0y0
DeviceName, n10_0p8
Temperature, -40
FabDate, 11 May 2010
UserDate, 11 May 2010
WaferDiameter, 0.2
DieLayout, FOUR_CROSSING
DieSize, 0.02, 0.02
DieType, PARTIAL
Attribute, W, 1e-05
Attribute, L, 8e-07
NodeNames, d g s b
Sweep, 1, V, D, LIN, 0, 5, 0.1, CALCULATED, 0.1, 0
Sweep, 2, V, G, LIN, 2, 5, CALCULATED, 5, 0.1, 0
Constant, V, S, 0, 0.1, 0
Constant, V, B, -3, 0.1, 0
Target, I, D
Function, gds, derivative (Vd, ID)
Plot, idvd, XY (LIN LIN), vd, id
Plot, gds, XY (LIN LOG), vd, gds
DataArray, ID
0 1.74989e-05 2.08397e-05 2.19656e-05 2.28283e-05
2.35939e-05 2.43089e-05 2.49945e-05 2.56623e-05 2.63193e-05
2.697e-05 2.76176e-05 2.82641e-05 2.89112e-05 2.956e-05
3.02114e-05 3.0866e-05 3.15245e-05 3.21872e-05 3.28544e-05
3.35265e-05 3.42037e-05 3.48862e-05 3.55741e-05 3.62676e-05
3.69668e-05 3.7672e-05 3.83832e-05 3.91006e-05 3.98246e-05
4.05555e-05 4.12938e-05 4.20402e-05 4.27958e-05 4.35617e-05
4.43396e-05 4.51317e-05 4.59406e-05 4.67697e-05 4.76231e-05
4.85057e-05 4.94234e-05 5.03833e-05 5.13935e-05 5.24635e-05
5.36042e-05 5.4828e-05 5.61489e-05 5.75825e-05 5.91465e-05
6.08601e-05 0 0.000171486 0.000307713 0.000412388
0.000488827 0.000540425 0.000572289 0.000592158 0.000605945
0.000616411 0.000624858 0.00063198 0.000638187 0.000643734
0.000648789 0.00065347 0.000657857 0.000662012 0.000665979
0.000669792 0.000673478 0.000677056 0.000680545 0.000683957
0.000687304 0.000690594 0.000693835 0.000697033 0.000700194
0.000703323 0.000706424 0.000709502 0.000712563 0.00071561
0.000718652 0.000721698 0.000724758 0.000727847 0.000730985
0.000734195 0.000737507 0.000740958 0.000744593 0.000748468
0.000752647 0.000757205 0.00076223 0.000767825 0.000774103
0.000781195 0.000789246 0 0.00029785 0.000555466
0.000776617 0.000964616 0.00112239 0.00125253 0.00135736
0.00143895 0.00149947 0.00154248 0.00157319 0.0015961
0.00161403 0.00162865 0.00164098 0.00165164 0.00166108
0.00166958 0.00167735 0.00168454 0.00169126 0.00169759
0.00170361 0.00170936 0.00171488 0.00172021 0.00172537
0.00173039 0.00173529 0.00174007 0.00174476 0.00174937
0.0017539 0.00175837 0.0017628 0.00176718 0.00177155
0.00177591 0.0017803 0.00178476 0.00178932 0.00179404
0.00179899 0.00180426 0.00180995 0.00181619 0.00182314
0.00183096 0.00183987 0.00185009 0 0.000400273
0.000757957 0.00107668 0.00135967 0.0016098 0.00182965
0.00202151 0.00218745 0.00232922 0.00244823 0.00254518
0.00262034 0.00267588 0.00271675 0.00274775 0.00277219
0.00279213 0.00280889 0.00282333 0.00283601 0.00284735
0.00285764 0.00286708 0.00287583 0.00288402 0.00289173
0.00289906 0.00290604 0.00291274 0.00291919 0.00292543
0.00293147 0.00293736 0.0029431 0.00294871 0.00295421
0.00295963 0.00296497 0.00297026 0.00297554 0.00298083
0.0029862 0.00299169 0.00299739 0.0030034 0.00300985
0.00301688 0.0030247 0.00303352 0.00304362 0
0.000484552 0.000925632 0.00132664 0.00169062 0.00202032
0.00231822 0.00258657 0.00282738 0.0030425 0.00323353
0.00340185 0.0035484 0.00367328 0.00377537 0.00385422
0.0039131 0.00395745 0.00399188 0.00401949 0.0040423
0.00406163 0.00407836 0.0040931 0.0041063 0.00411826
0.00412923 0.00413939 0.00414887 0.00415778 0.00416622
0.00417424 0.00418192 0.00418929 0.0041964 0.00420327
0.00420994 0.00421643 0.00422277 0.00422898 0.00423508
0.00424111 0.0042471 0.0042531 0.00425918 0.00426541
0.00427189 0.00427876 0.00428618 0.00429436 0.00430354
DataSetFinish
DataSetStart
DataSetName, idvdhigh
MeasurementType, DC
BatchName, opt_ex09
WaferName, wafer1
DieName, x0y0
DeviceName, n10_1
Temperature, -40
FabDate, 11 May 2010
UserDate, 11 May 2010
WaferDiameter, 0.2
DieLayout, FOUR_CROSSING
DieSize, 0.02, 0.02
DieType, PARTIAL
Attribute, W, 1e-05
Attribute, L, 1e-06
NodeNames, d g s b
Sweep, 1, V, D, LIN, 0, 5, 0.1, CALCULATED, 0.1, 0
Sweep, 2, V, G, LIN, 2, 5, CALCULATED, 5, 0.1, 0
Constant, V, S, 0, 0.1, 0
Constant, V, B, -3, 0.1, 0
Target, I, D
Function, gds, derivative (Vd, ID)
Plot, idvd, XY (LIN LIN), vd, id
Plot, gds, XY (LIN LOG), vd, gds
DataArray, ID
0 1.52255e-05 1.8353e-05 1.91049e-05 1.96059e-05
2.00254e-05 2.04031e-05 2.07556e-05 2.10918e-05 2.1417e-05
2.17344e-05 2.20463e-05 2.23543e-05 2.26594e-05 2.29626e-05
2.32643e-05 2.35652e-05 2.38655e-05 2.41657e-05 2.44658e-05
2.47661e-05 2.50669e-05 2.53681e-05 2.56699e-05 2.59725e-05
2.62758e-05 2.65801e-05 2.68854e-05 2.71918e-05 2.74995e-05
2.78086e-05 2.81195e-05 2.84325e-05 2.87481e-05 2.90668e-05
2.93895e-05 2.97171e-05 3.0051e-05 3.03927e-05 3.0744e-05
3.11072e-05 3.1485e-05 3.18805e-05 3.22972e-05 3.27394e-05
3.32117e-05 3.37194e-05 3.42685e-05 3.48656e-05 3.55179e-05
3.62335e-05 0 0.000133614 0.000241863 0.000326829
0.000390427 0.0004346 0.000462138 0.000478248 0.000488516
0.000495865 0.000501549 0.000506181 0.000510106 0.000513529
0.000516585 0.000519363 0.000521926 0.000524319 0.000526576
0.000528722 0.000530776 0.000532753 0.000534666 0.000536524
0.000538335 0.000540105 0.00054184 0.000543544 0.000545221
0.000546875 0.000548508 0.000550123 0.000551724 0.000553313
0.000554895 0.000556474 0.000558056 0.000559649 0.000561264
0.000562912 0.000564609 0.000566376 0.000568235 0.000570215
0.000572352 0.000574685 0.000577261 0.000580133 0.000583364
0.000587022 0.000591185 0 0.000233519 0.00043859
0.000617318 0.000771608 0.000903188 0.00101363 0.00110438
0.00117678 0.00123218 0.00127239 0.00130056 0.00132061
0.00133553 0.00134718 0.00135663 0.00136454 0.00137135
0.00137732 0.00138265 0.00138749 0.00139193 0.00139605
0.0013999 0.00140354 0.00140699 0.00141028 0.00141344
0.00141649 0.00141943 0.00142229 0.00142507 0.00142778
0.00143044 0.00143304 0.0014356 0.00143813 0.00144062
0.0014431 0.00144558 0.00144807 0.0014506 0.0014532
0.00145589 0.00145873 0.00146177 0.00146507 0.00146871
0.00147279 0.00147741 0.0014827 0 0.000316737
0.000603449 0.000862179 0.00109479 0.00130298 0.00148831
0.00165219 0.00179594 0.00192073 0.00202764 0.00211754
0.00219106 0.00224859 0.00229151 0.00232302 0.00234666
0.00236504 0.00237982 0.00239205 0.00240244 0.00241145
0.0024194 0.00242651 0.00243296 0.00243888 0.00244435
0.00244946 0.00245426 0.0024588 0.00246312 0.00246725
0.0024712 0.00247502 0.0024787 0.00248227 0.00248575
0.00248914 0.00249245 0.00249571 0.00249892 0.0025021
0.00250528 0.00250849 0.00251176 0.00251514 0.00251868
0.00252248 0.00252661 0.00253118 0.00253635 0
0.000386772 0.000742825 0.00107009 0.00137036 0.00164524
0.00189625 0.00212478 0.00233209 0.00251937 0.0026877
0.00283806 0.00297134 0.00308824 0.00318912 0.00327379
0.00334164 0.00339346 0.00343236 0.00346201 0.00348527
0.00350407 0.00351967 0.0035329 0.00354435 0.00355442
0.00356341 0.00357152 0.00357892 0.00358574 0.00359207
0.00359799 0.00360356 0.00360884 0.00361385 0.00361865
0.00362324 0.00362767 0.00363194 0.00363608 0.00364011
0.00364404 0.00364789 0.00365168 0.00365545 0.00365923
0.00366306 0.00366699 0.00367111 0.0036755 0.00368029
DataSetFinish
DataSetStart
DataSetName, idvdhigh
MeasurementType, DC
BatchName, opt_ex09
WaferName, wafer1
DieName, x0y0
DeviceName, n10_10
Temperature, -40
FabDate, 11 May 2010
UserDate, 11 May 2010
WaferDiameter, 0.2
DieLayout, FOUR_CROSSING
DieSize, 0.02, 0.02
DieType, PARTIAL
Attribute, W, 1e-05
Attribute, L, 1e-05
NodeNames, d g s b
Sweep, 1, V, D, LIN, 0, 5, 0.1, CALCULATED, 0.1, 0
Sweep, 2, V, G, LIN, 2, 5, CALCULATED, 5, 0.1, 0
Constant, V, S, 0, 0.1, 0
Constant, V, B, -3, 0.1, 0
Target, I, D
Function, gds, derivative (Vd, ID)
Plot, idvd, XY (LIN LIN), vd, id
Plot, gds, XY (LIN LOG), vd, gds
DataArray, ID
0 2.87495e-06 4.22418e-06 4.52673e-06 4.5742e-06
4.5927e-06 4.60583e-06 4.61732e-06 4.62814e-06 4.63863e-06
4.64894e-06 4.65913e-06 4.66925e-06 4.67932e-06 4.68936e-06
4.69937e-06 4.70936e-06 4.71933e-06 4.7293e-06 4.73925e-06
4.7492e-06 4.75914e-06 4.76907e-06 4.779e-06 4.78893e-06
4.79885e-06 4.80877e-06 4.81869e-06 4.82861e-06 4.83853e-06
4.84845e-06 4.85837e-06 4.86831e-06 4.87825e-06 4.88821e-06
4.8982e-06 4.90823e-06 4.9183e-06 4.92844e-06 4.93866e-06
4.94899e-06 4.95944e-06 4.97006e-06 4.98088e-06 4.99193e-06
5.00327e-06 5.01495e-06 5.02702e-06 5.03954e-06 5.0526e-06
5.06625e-06 0 1.33352e-05 2.4954e-05 3.48699e-05
4.30973e-05 4.9653e-05 5.45605e-05 5.78693e-05 5.97288e-05
6.0548e-05 6.08879e-05 6.1069e-05 6.11951e-05 6.12978e-05
6.13887e-05 6.14727e-05 6.15523e-05 6.1629e-05 6.17037e-05
6.17768e-05 6.18488e-05 6.19198e-05 6.19902e-05 6.20599e-05
6.21292e-05 6.21982e-05 6.22667e-05 6.2335e-05 6.24031e-05
6.24709e-05 6.25386e-05 6.26061e-05 6.26735e-05 6.27408e-05
6.2808e-05 6.28751e-05 6.29422e-05 6.30093e-05 6.30764e-05
6.31437e-05 6.32111e-05 6.32788e-05 6.33469e-05 6.34157e-05
6.34852e-05 6.35557e-05 6.36275e-05 6.37009e-05 6.37764e-05
6.38544e-05 6.39353e-05 0 2.2883e-05 4.40823e-05
6.361e-05 8.14781e-05 9.76986e-05 0.000112283 0.000125245
0.000136595 0.000146347 0.000154516 0.00016112 0.00016619
0.000169789 0.00017207 0.000173356 0.000174066 0.000174505
0.00017482 0.000175071 0.000175286 0.000175479 0.000175658
0.000175825 0.000175985 0.00017614 0.00017629 0.000176436
0.00017658 0.000176721 0.00017686 0.000176998 0.000177135
0.00017727 0.000177405 0.000177538 0.000177671 0.000177803
0.000177935 0.000178066 0.000178196 0.000178327 0.000178457
0.000178587 0.000178717 0.000178847 0.000178978 0.000179109
0.000179242 0.000179376 0.000179512 0 3.15216e-05
6.14113e-05 8.968e-05 0.000116339 0.000141399 0.000164871
0.000186765 0.000207093 0.000225865 0.000243091 0.000258783
0.000272951 0.000285606 0.000296759 0.000306423 0.000314612
0.000321347 0.000326659 0.000330614 0.000333347 0.00033511
0.000336234 0.000336993 0.000337552 0.000337998 0.000338374
0.000338705 0.000339005 0.000339283 0.000339543 0.000339791
0.00034003 0.00034026 0.000340484 0.000340702 0.000340917
0.000341127 0.000341335 0.000341539 0.000341742 0.000341942
0.000342141 0.000342338 0.000342534 0.000342729 0.000342923
0.000343116 0.000343308 0.0003435 0.000343692 0
3.93337e-05 7.70925e-05 0.000113287 0.000147926 0.000181022
0.000212583 0.000242619 0.000271141 0.000298157 0.000323679
0.000347714 0.000370274 0.000391367 0.000411002 0.00042919
0.000445939 0.00046126 0.000475161 0.000487652 0.000498744
0.000508448 0.000516779 0.000523755 0.000529408 0.000533793
0.000537025 0.000539299 0.000540877 0.000542006 0.000542859
0.00054354 0.000544111 0.000544607 0.000545051 0.000545456
0.000545832 0.000546186 0.000546522 0.000546844 0.000547155
0.000547456 0.000547749 0.000548036 0.000548317 0.000548593
0.000548865 0.000549133 0.000549398 0.000549661 0.000549921
DataSetFinish
DataSetStart
DataSetName, idvdhigh
MeasurementType, DC
BatchName, opt_ex09
WaferName, wafer1
DieName, x0y0
DeviceName, n10_2
Temperature, -40
FabDate, 11 May 2010
UserDate, 11 May 2010
WaferDiameter, 0.2
DieLayout, FOUR_CROSSING
DieSize, 0.02, 0.02
DieType, PARTIAL
Attribute, W, 1e-05
Attribute, L, 2e-06
NodeNames, d g s b
Sweep, 1, V, D, LIN, 0, 5, 0.1, CALCULATED, 0.1, 0
Sweep, 2, V, G, LIN, 2, 5, CALCULATED, 5, 0.1, 0
Constant, V, S, 0, 0.1, 0
Constant, V, B, -3, 0.1, 0
Target, I, D
Function, gds, derivative (Vd, ID)
Plot, idvd, XY (LIN LIN), vd, id
Plot, gds, XY (LIN LOG), vd, gds
DataArray, ID
0 9.8855e-06 1.28178e-05 1.32611e-05 1.34353e-05
1.3561e-05 1.36679e-05 1.3765e-05 1.38561e-05 1.39431e-05
1.40274e-05 1.41096e-05 1.41903e-05 1.42698e-05 1.43484e-05
1.44262e-05 1.45033e-05 1.458e-05 1.46562e-05 1.47321e-05
1.48077e-05 1.4883e-05 1.49581e-05 1.50329e-05 1.51077e-05
1.51822e-05 1.52567e-05 1.5331e-05 1.54053e-05 1.54796e-05
1.55538e-05 1.56282e-05 1.57026e-05 1.57773e-05 1.58524e-05
1.5928e-05 1.60044e-05 1.60818e-05 1.61606e-05 1.62411e-05
1.63238e-05 1.64093e-05 1.64981e-05 1.65911e-05 1.66891e-05
1.6793e-05 1.69038e-05 1.70228e-05 1.71512e-05 1.72904e-05
1.7442e-05 0 6.49151e-05 0.000119597 0.000164448
0.00019986 0.000226243 0.000244119 0.000254569 0.000259998
0.000263085 0.000265169 0.000266742 0.000268012 0.000269086
0.000270023 0.000270862 0.000271627 0.000272337 0.000273001
0.000273631 0.000274232 0.000274809 0.000275367 0.000275907
0.000276434 0.000276949 0.000277453 0.000277948 0.000278435
0.000278916 0.00027939 0.000279859 0.000280323 0.000280783
0.00028124 0.000281695 0.000282149 0.000282603 0.000283059
0.000283519 0.000283986 0.000284463 0.000284956 0.000285468
0.000286007 0.000286579 0.000287194 0.000287862 0.000288595
0.000289405 0.000290307 0 0.0001136 0.000216363
0.000308681 0.000390928 0.000463462 0.000526623 0.000580742
0.000626137 0.000663129 0.000692072 0.000713457 0.000728219
0.000738024 0.000744725 0.000749595 0.000753343 0.000756361
0.000758879 0.000761039 0.000762936 0.000764631 0.00076617
0.000767585 0.0007689 0.000770133 0.000771298 0.000772407
0.000773467 0.000774487 0.000775471 0.000776424 0.000777351
0.000778254 0.000779137 0.000780002 0.000780851 0.000781686
0.000782509 0.000783324 0.000784131 0.000784936 0.000785742
0.000786553 0.000787377 0.000788223 0.000789099 0.000790018
0.000790997 0.000792052 0.000793206 0 0.000156174
0.000301223 0.000435525 0.000559442 0.000673317 0.000777482
0.000872251 0.000957928 0.0010348 0.00110315 0.00116324
0.00121533 0.00125967 0.0012965 0.00132612 0.00134894
0.00136579 0.00137803 0.0013871 0.00139405 0.00139958
0.00140412 0.00140795 0.00141125 0.00141415 0.00141674
0.00141908 0.00142122 0.0014232 0.00142505 0.00142679
0.00142843 0.00142999 0.00143148 0.0014329 0.00143428
0.00143561 0.0014369 0.00143816 0.00143938 0.00144058
0.00144175 0.0014429 0.00144404 0.00144518 0.00144631
0.00144744 0.0014486 0.00144979 0.00145103 0
0.000193524 0.000375819 0.000547243 0.00070814 0.000858839
0.000999658 0.0011309 0.00125285 0.0013658 0.00147001
0.00156573 0.00165322 0.0017327 0.00180442 0.00186857
0.00192538 0.001975 0.00201761 0.00205332 0.00208225
0.00210479 0.00212191 0.00213492 0.00214502 0.00215308
0.00215969 0.00216524 0.00217 0.00217415 0.00217783
0.00218113 0.00218413 0.00218688 0.00218943 0.0021918
0.00219402 0.00219613 0.00219812 0.00220002 0.00220184
0.00220359 0.00220528 0.00220691 0.00220849 0.00221003
0.00221154 0.00221301 0.00221447 0.00221591 0.00221734
DataSetFinish
DataSetStart
DataSetName, idvdhigh
MeasurementType, DC
BatchName, opt_ex09
WaferName, wafer1
DieName, x0y0
DeviceName, n10_5
Temperature, -40
FabDate, 11 May 2010
UserDate, 11 May 2010
WaferDiameter, 0.2
DieLayout, FOUR_CROSSING
DieSize, 0.02, 0.02
DieType, PARTIAL
Attribute, W, 1e-05
Attribute, L, 5e-06
NodeNames, d g s b
Sweep, 1, V, D, LIN, 0, 5, 0.1, CALCULATED, 0.1, 0
Sweep, 2, V, G, LIN, 2, 5, CALCULATED, 5, 0.1, 0
Constant, V, S, 0, 0.1, 0
Constant, V, B, -3, 0.1, 0
Target, I, D
Function, gds, derivative (Vd, ID)
Plot, idvd, XY (LIN LIN), vd, id
Plot, gds, XY (LIN LOG), vd, gds
DataArray, ID
0 5.25441e-06 7.48678e-06 7.91275e-06 7.99622e-06
8.0398e-06 8.07428e-06 8.1054e-06 8.13488e-06 8.16345e-06
8.19144e-06 8.21905e-06 8.24639e-06 8.27354e-06 8.30053e-06
8.32741e-06 8.3542e-06 8.38092e-06 8.40758e-06 8.43418e-06
8.46075e-06 8.48728e-06 8.51378e-06 8.54025e-06 8.5667e-06
8.59313e-06 8.61955e-06 8.64596e-06 8.67235e-06 8.69875e-06
8.72515e-06 8.75156e-06 8.778e-06 8.80449e-06 8.83104e-06
8.85769e-06 8.88449e-06 8.91147e-06 8.93869e-06 8.96624e-06
8.99419e-06 9.02265e-06 9.05175e-06 9.08161e-06 9.11239e-06
9.14427e-06 9.17746e-06 9.21217e-06 9.24865e-06 9.28716e-06
9.32799e-06 0 2.64299e-05 4.92672e-05 6.85678e-05
8.4389e-05 9.67929e-05 0.000105861 0.000111749 0.000114904
0.000116329 0.00011704 0.000117493 0.000117836 0.000118122
0.000118374 0.000118604 0.000118819 0.000119022 0.000119217
0.000119405 0.000119588 0.000119767 0.000119943 0.000120117
0.000120287 0.000120456 0.000120624 0.00012079 0.000120954
0.000121118 0.000121281 0.000121443 0.000121604 0.000121764
0.000121924 0.000122084 0.000122243 0.000122403 0.000122562
0.000122722 0.000122883 0.000123045 0.000123209 0.000123375
0.000123544 0.000123718 0.000123898 0.000124084 0.00012428
0.000124485 0.000124704 0 4.56096e-05 8.76155e-05
0.000126069 0.000161022 0.000192523 0.000220623 0.00024537
0.000266813 0.000285004 0.000299996 0.000311858 0.000320697
0.000326738 0.000330486 0.000332729 0.000334171 0.000335203
0.000336009 0.000336677 0.000337255 0.000337771 0.000338241
0.000338678 0.000339089 0.00033948 0.000339854 0.000340215
0.000340565 0.000340907 0.00034124 0.000341567 0.000341888
0.000342205 0.000342517 0.000342826 0.000343131 0.000343434
0.000343734 0.000344032 0.000344328 0.000344623 0.000344917
0.00034521 0.000345504 0.000345799 0.000346097 0.000346398
0.000346704 0.000347018 0.000347343 0 6.28218e-05
0.000122085 0.000177837 0.000230126 0.000278999 0.000324501
0.000366678 0.000405574 0.000441233 0.000473697 0.00050301
0.000529214 0.000552352 0.000572466 0.000589603 0.000603819
0.000615189 0.000623846 0.000630062 0.000634326 0.000637256
0.000639366 0.000640977 0.000642274 0.000643361 0.000644302
0.000645138 0.000645895 0.000646591 0.00064724 0.000647851
0.000648432 0.000648987 0.000649521 0.000650038 0.000650539
0.000651028 0.000651506 0.000651974 0.000652434 0.000652886
0.000653332 0.000653772 0.000654207 0.000654638 0.000655066
0.000655491 0.000655914 0.000656337 0.00065676 0
7.82729e-05 0.000153056 0.000224394 0.000292332 0.000356913
0.00041818 0.000476175 0.00053094 0.000582516 0.000630942
0.000676258 0.000718503 0.000757716 0.000793933 0.000827193
0.000857531 0.000884985 0.000909591 0.000931385 0.000950406
0.000966697 0.000980311 0.00099133 0.000999905 0.00100632
0.00101103 0.00101452 0.0010172 0.00101932 0.00102108
0.00102257 0.00102387 0.00102502 0.00102607 0.00102703
0.00102792 0.00102875 0.00102954 0.00103029 0.00103101
0.0010317 0.00103237 0.00103302 0.00103366 0.00103427
0.00103488 0.00103547 0.00103605 0.00103663 0.00103719
DataSetFinish
DataSetStart
DataSetName, idvdhigh
MeasurementType, DC
BatchName, opt_ex09
WaferName, wafer1
DieName, x0y0
DeviceName, n2_0p5
Temperature, -40
FabDate, 11 May 2010
UserDate, 11 May 2010
WaferDiameter, 0.2
DieLayout, FOUR_CROSSING
DieSize, 0.02, 0.02
DieType, PARTIAL
Attribute, W, 2e-06
Attribute, L, 5e-07
NodeNames, d g s b
Sweep, 1, V, D, LIN, 0, 5, 0.1, CALCULATED, 0.1, 0
Sweep, 2, V, G, LIN, 2, 5, CALCULATED, 5, 0.1, 0
Constant, V, S, 0, 0.1, 0
Constant, V, B, -3, 0.1, 0
Target, I, D
Function, gds, derivative (Vd, ID)
Plot, idvd, XY (LIN LIN), vd, id
Plot, gds, XY (LIN LOG), vd, gds
DataArray, ID
0 3.78671e-08 4.64126e-08 5.56026e-08 6.60052e-08
7.78907e-08 9.15005e-08 1.07082e-07 1.24903e-07 1.45253e-07
1.68451e-07 1.94845e-07 2.24819e-07 2.58791e-07 2.97216e-07
3.40593e-07 3.89457e-07 4.44392e-07 5.06021e-07 5.75015e-07
6.5209e-07 7.38005e-07 8.33565e-07 9.39616e-07 1.05705e-06
1.18678e-06 1.32979e-06 1.48706e-06 1.65965e-06 1.84861e-06
2.05507e-06 2.28019e-06 2.5252e-06 2.79139e-06 3.08019e-06
3.39315e-06 3.732e-06 4.09876e-06 4.49572e-06 4.9256e-06
5.39165e-06 5.89773e-06 6.44849e-06 7.04949e-06 7.70744e-06
8.43033e-06 9.22767e-06 1.01107e-05 1.10928e-05 1.21894e-05
1.34187e-05 0 4.29493e-05 7.16705e-05 8.88768e-05
9.85302e-05 0.000104945 0.00010994 0.000114144 0.000117852
0.000121229 0.000124374 0.000127351 0.000130204 0.000132962
0.000135648 0.000138277 0.000140861 0.000143411 0.000145932
0.00014843 0.000150911 0.000153378 0.000155834 0.000158281
0.000160721 0.000163157 0.000165589 0.00016802 0.00017045
0.000172881 0.000175315 0.000177755 0.000180203 0.000182663
0.000185142 0.000187646 0.000190187 0.000192776 0.000195431
0.000198173 0.000201028 0.000204027 0.000207209 0.00021062
0.000214314 0.000218353 0.00022281 0.000227767 0.000233318
0.000239568 0.000246635 0 8.62622e-05 0.000156379
0.000212494 0.000256405 0.000289671 0.000313841 0.000330975
0.000343504 0.00035322 0.000361161 0.000367921 0.000373862
0.00037921 0.000384117 0.000388686 0.000392992 0.000397089
0.000401017 0.000404807 0.000408483 0.000412063 0.000415562
0.000418992 0.000422364 0.000425685 0.000428963 0.000432202
0.000435408 0.000438586 0.000441739 0.000444872 0.000447989
0.000451096 0.000454202 0.000457313 0.000460445 0.000463612
0.000466837 0.000470148 0.000473581 0.000477179 0.000481
0.000485109 0.000489588 0.000494532 0.000500053 0.000506282
0.000513366 0.000521476 0.000530802 0 0.000116461
0.000216711 0.000302586 0.000375657 0.000437267 0.000488564
0.00053047 0.000563583 0.000588523 0.000606984 0.00062108
0.000632333 0.000641682 0.000649706 0.000656774 0.00066313
0.000668944 0.000674335 0.00067939 0.000684173 0.000688734
0.000693111 0.000697333 0.000701426 0.000705406 0.000709292
0.000713094 0.000716825 0.000720492 0.000724105 0.00072767
0.000731193 0.000734681 0.000738143 0.000741586 0.000745022
0.000748467 0.000751939 0.000755464 0.000759078 0.000762823
0.000766757 0.000770948 0.000775483 0.000780467 0.000786026
0.000792308 0.000799486 0.000807762 0.000817365 0
0.000138589 0.000261521 0.000370347 0.000466419 0.000550919
0.000624882 0.000689205 0.000744626 0.000791613 0.000830122
0.000860009 0.000882494 0.0008997 0.000913364 0.000924621
0.00093419 0.000942535 0.000949968 0.000956702 0.000962892
0.000968647 0.000974053 0.000979171 0.00098405 0.00098873
0.00099324 0.000997606 0.00100185 0.00100598 0.00101002
0.00101398 0.00101787 0.00102169 0.00102546 0.00102918
0.00103287 0.00103654 0.0010402 0.00104387 0.00104759
0.00105138 0.0010553 0.0010594 0.00106377 0.00106849
0.0010737 0.00107954 0.00108617 0.00109381 0.00110269
DataSetFinish
DataSetStart
DataSetName, idvdhigh
MeasurementType, DC
BatchName, opt_ex09
WaferName, wafer1
DieName, x0y0
DeviceName, n2_10
Temperature, -40
FabDate, 11 May 2010
UserDate, 11 May 2010
WaferDiameter, 0.2
DieLayout, FOUR_CROSSING
DieSize, 0.02, 0.02
DieType, PARTIAL
Attribute, W, 2e-06
Attribute, L, 1e-05
NodeNames, d g s b
Sweep, 1, V, D, LIN, 0, 5, 0.1, CALCULATED, 0.1, 0
Sweep, 2, V, G, LIN, 2, 5, CALCULATED, 5, 0.1, 0
Constant, V, S, 0, 0.1, 0
Constant, V, B, -3, 0.1, 0
Target, I, D
Function, gds, derivative (Vd, ID)
Plot, idvd, XY (LIN LIN), vd, id
Plot, gds, XY (LIN LOG), vd, gds
DataArray, ID
0 3.39763e-07 4.37733e-07 4.48559e-07 4.51061e-07
4.52567e-07 4.5383e-07 4.55006e-07 4.56143e-07 4.5726e-07
4.58365e-07 4.59463e-07 4.60556e-07 4.61646e-07 4.62733e-07
4.63819e-07 4.64904e-07 4.65987e-07 4.6707e-07 4.68152e-07
4.69234e-07 4.70315e-07 4.71396e-07 4.72476e-07 4.73557e-07
4.74637e-07 4.75717e-07 4.76797e-07 4.77877e-07 4.78957e-07
4.80038e-07 4.81119e-07 4.82202e-07 4.83286e-07 4.84372e-07
4.85461e-07 4.86555e-07 4.87655e-07 4.88762e-07 4.89878e-07
4.91007e-07 4.9215e-07 4.93312e-07 4.94495e-07 4.95706e-07
4.96947e-07 4.98226e-07 4.99547e-07 5.00918e-07 5.02346e-07
5.03838e-07 0 2.36726e-06 4.40887e-06 6.12745e-06
7.52584e-06 8.6076e-06 9.37864e-06 9.8545e-06 1.00854e-05
1.01762e-05 1.02168e-05 1.02417e-05 1.02608e-05 1.02772e-05
1.02922e-05 1.03063e-05 1.03199e-05 1.0333e-05 1.03459e-05
1.03586e-05 1.03711e-05 1.03834e-05 1.03957e-05 1.04079e-05
1.042e-05 1.04321e-05 1.04441e-05 1.04561e-05 1.0468e-05
1.048e-05 1.04918e-05 1.05037e-05 1.05156e-05 1.05274e-05
1.05392e-05 1.0551e-05 1.05628e-05 1.05747e-05 1.05865e-05
1.05983e-05 1.06102e-05 1.06222e-05 1.06342e-05 1.06464e-05
1.06587e-05 1.06712e-05 1.06839e-05 1.0697e-05 1.07104e-05
1.07243e-05 1.07387e-05 0 4.23347e-06 8.14648e-06
1.17413e-05 1.50203e-05 1.79856e-05 2.06396e-05 2.29846e-05
2.5023e-05 2.67572e-05 2.81905e-05 2.93268e-05 3.01736e-05
3.07478e-05 3.10906e-05 3.12762e-05 3.1381e-05 3.14496e-05
3.15013e-05 3.1544e-05 3.15814e-05 3.16155e-05 3.16473e-05
3.16775e-05 3.17065e-05 3.17347e-05 3.17621e-05 3.17889e-05
3.18153e-05 3.18413e-05 3.1867e-05 3.18925e-05 3.19177e-05
3.19427e-05 3.19676e-05 3.19923e-05 3.20169e-05 3.20414e-05
3.20658e-05 3.20902e-05 3.21144e-05 3.21387e-05 3.21628e-05
3.2187e-05 3.22112e-05 3.22354e-05 3.22598e-05 3.22843e-05
3.2309e-05 3.23341e-05 3.23596e-05 0 5.92314e-06
1.15353e-05 1.68385e-05 2.18348e-05 2.65265e-05 3.09154e-05
3.50037e-05 3.87933e-05 4.22864e-05 4.54849e-05 4.83909e-05
5.10063e-05 5.33334e-05 5.53743e-05 5.71314e-05 5.86078e-05
5.98077e-05 6.07386e-05 6.14156e-05 6.18711e-05 6.21599e-05
6.2345e-05 6.24729e-05 6.25696e-05 6.26482e-05 6.27155e-05
6.27755e-05 6.28302e-05 6.28813e-05 6.29295e-05 6.29756e-05
6.30199e-05 6.3063e-05 6.31049e-05 6.31459e-05 6.31862e-05
6.32258e-05 6.32649e-05 6.33035e-05 6.33417e-05 6.33796e-05
6.34171e-05 6.34544e-05 6.34915e-05 6.35283e-05 6.3565e-05
6.36016e-05 6.3638e-05 6.36744e-05 6.37108e-05 0
7.45196e-06 1.46035e-05 2.14567e-05 2.80133e-05 3.42752e-05
4.02445e-05 4.59229e-05 5.13124e-05 5.64147e-05 6.12317e-05
6.57653e-05 7.00172e-05 7.39893e-05 7.76833e-05 8.1101e-05
8.42443e-05 8.71148e-05 8.97145e-05 9.20453e-05 9.41091e-05
9.59082e-05 9.74454e-05 9.87246e-05 9.97525e-05 0.000100541
0.000101116 0.000101517 0.000101795 0.000101996 0.000102149
0.000102273 0.000102378 0.00010247 0.000102552 0.000102628
0.000102698 0.000102765 0.000102828 0.000102889 0.000102948
0.000103005 0.000103061 0.000103115 0.000103169 0.000103221
0.000103273 0.000103324 0.000103375 0.000103425 0.000103475
DataSetFinish
DataSetStart
DataSetName, idvdhigh
MeasurementType, DC
BatchName, opt_ex09
WaferName, wafer1
DieName, x0y0
DeviceName, n5_10
Temperature, -40
FabDate, 11 May 2010
UserDate, 11 May 2010
WaferDiameter, 0.2
DieLayout, FOUR_CROSSING
DieSize, 0.02, 0.02
DieType, PARTIAL
Attribute, W, 5e-06
Attribute, L, 1e-05
NodeNames, d g s b
Sweep, 1, V, D, LIN, 0, 5, 0.1, CALCULATED, 0.1, 0
Sweep, 2, V, G, LIN, 2, 5, CALCULATED, 5, 0.1, 0
Constant, V, S, 0, 0.1, 0
Constant, V, B, -3, 0.1, 0
Target, I, D
Function, gds, derivative (Vd, ID)
Plot, idvd, XY (LIN LIN), vd, id
Plot, gds, XY (LIN LOG), vd, gds
DataArray, ID
0 1.1432e-06 1.58172e-06 1.64967e-06 1.66169e-06
1.66765e-06 1.67231e-06 1.67654e-06 1.68058e-06 1.68453e-06
1.68843e-06 1.69229e-06 1.69614e-06 1.69996e-06 1.70378e-06
1.70759e-06 1.71139e-06 1.71519e-06 1.71899e-06 1.72278e-06
1.72657e-06 1.73036e-06 1.73414e-06 1.73793e-06 1.74171e-06
1.74549e-06 1.74928e-06 1.75306e-06 1.75684e-06 1.76062e-06
1.76441e-06 1.76819e-06 1.77198e-06 1.77578e-06 1.77958e-06
1.78339e-06 1.78722e-06 1.79106e-06 1.79493e-06 1.79884e-06
1.80278e-06 1.80678e-06 1.81084e-06 1.81497e-06 1.8192e-06
1.82354e-06 1.82801e-06 1.83262e-06 1.83741e-06 1.8424e-06
1.84762e-06 0 6.32877e-06 1.18124e-05 1.64577e-05
2.02719e-05 2.32637e-05 2.54466e-05 2.68524e-05 2.75829e-05
2.78826e-05 2.80108e-05 2.80847e-05 2.81392e-05 2.8185e-05
2.82262e-05 2.82648e-05 2.83016e-05 2.83372e-05 2.83719e-05
2.84061e-05 2.84397e-05 2.8473e-05 2.85059e-05 2.85387e-05
2.85712e-05 2.86036e-05 2.86358e-05 2.86679e-05 2.86999e-05
2.87318e-05 2.87636e-05 2.87954e-05 2.88271e-05 2.88588e-05
2.88904e-05 2.8922e-05 2.89536e-05 2.89852e-05 2.90169e-05
2.90486e-05 2.90804e-05 2.91123e-05 2.91445e-05 2.91769e-05
2.92097e-05 2.92431e-05 2.92771e-05 2.93119e-05 2.93476e-05
2.93846e-05 2.9423e-05 0 1.10772e-05 2.13244e-05
3.07474e-05 3.93521e-05 4.71446e-05 5.41306e-05 6.03162e-05
6.57075e-05 7.03111e-05 7.41346e-05 7.71882e-05 7.94893e-05
8.10767e-05 8.2045e-05 8.25757e-05 8.28722e-05 8.30623e-05
8.32029e-05 8.33177e-05 8.34176e-05 8.3508e-05 8.3592e-05
8.36716e-05 8.37478e-05 8.38215e-05 8.38932e-05 8.39634e-05
8.40323e-05 8.41002e-05 8.41673e-05 8.42336e-05 8.42994e-05
8.43646e-05 8.44294e-05 8.44938e-05 8.45578e-05 8.46216e-05
8.46851e-05 8.47484e-05 8.48115e-05 8.48745e-05 8.49373e-05
8.50002e-05 8.5063e-05 8.5126e-05 8.51893e-05 8.52529e-05
8.53171e-05 8.53821e-05 8.54482e-05 0 1.53748e-05
2.99446e-05 4.37149e-05 5.6691e-05 6.88785e-05 8.02826e-05
9.09085e-05 0.000100762 0.000109847 0.000118171 0.000125737
0.000132551 0.00013862 0.000143947 0.00014854 0.000152407
0.000155557 0.000158011 0.000159804 0.000161017 0.000161789
0.000162283 0.000162622 0.000162877 0.000163084 0.00016326
0.000163416 0.000163559 0.000163691 0.000163817 0.000163936
0.000164051 0.000164162 0.00016427 0.000164376 0.00016448
0.000164582 0.000164683 0.000164783 0.000164881 0.000164979
0.000165075 0.000165171 0.000165267 0.000165362 0.000165456
0.00016555 0.000165644 0.000165738 0.000165831 0
1.9262e-05 3.7747e-05 5.546e-05 7.2406e-05 8.859e-05
0.000104017 0.000118691 0.000132619 0.000145803 0.00015825
0.000169963 0.000180948 0.00019121 0.000200752 0.00020958
0.000217698 0.00022511 0.000231823 0.000237839 0.000243166
0.000247808 0.000251773 0.000255071 0.000257719 0.00025975
0.000261227 0.000262257 0.000262973 0.000263489 0.000263884
0.000264202 0.000264472 0.000264708 0.00026492 0.000265114
0.000265295 0.000265466 0.000265629 0.000265785 0.000265936
0.000266082 0.000266225 0.000266365 0.000266502 0.000266637
0.000266769 0.000266901 0.00026703 0.000267159 0.000267286
DataSetFinish
DataSetStart
DataSetName, idvdlow
MeasurementType, DC
BatchName, opt_ex09
WaferName, wafer1
DieName, x0y0
DeviceName, n10_0p5
Temperature, -40
FabDate, 11 May 2010
UserDate, 11 May 2010
WaferDiameter, 0.2
DieLayout, FOUR_CROSSING
DieSize, 0.02, 0.02
DieType, PARTIAL
Attribute, W, 1e-05
Attribute, L, 5e-07
NodeNames, d g s b
Sweep, 1, V, D, LIN, 0, 5, 0.1, CALCULATED, 0.1, 0
Sweep, 2, V, G, LIN, 1.5, 5, CALCULATED, 5, 0.1, 0
Constant, V, S, 0, 0.1, 0
Constant, V, B, 0, 0.1, 0
Target, I, D
Function, gds, derivative (Vd, ID)
Plot, idvd, XY (LIN LIN), vd, id
Plot, gds, XY (LIN LOG), vd, gds
DataArray, ID
0 9.13296e-05 0.000126295 0.000140167 0.000149775
0.000157738 0.000164806 0.000171329 0.000177502 0.000183441
0.000189219 0.000194888 0.000200481 0.000206024 0.000211535
0.000217028 0.000222512 0.000227997 0.000233488 0.000238991
0.000244509 0.000250045 0.000255603 0.000261184 0.000266791
0.000272425 0.000278087 0.00028378 0.000289506 0.000295267
0.00030107 0.000306919 0.000312823 0.000318795 0.00032485
0.00033101 0.000337304 0.000343766 0.000350444 0.000357391
0.000364678 0.000372387 0.000380615 0.00038948 0.000399115
0.000409676 0.000421342 0.000434315 0.000448824 0.000465122
0.000483495 0 0.000409195 0.000724028 0.000960822
0.0011326 0.00125083 0.00132892 0.00138222 0.00142142
0.00145223 0.0014777 0.00149959 0.00151894 0.00153644
0.00155256 0.00156762 0.00158183 0.00159537 0.00160837
0.00162092 0.0016331 0.00164497 0.00165657 0.00166795
0.00167913 0.00169015 0.00170102 0.00171177 0.00172241
0.00173296 0.00174343 0.00175385 0.00176423 0.0017746
0.00178501 0.00179549 0.00180613 0.001817 0.00182823
0.00183994 0.00185232 0.0018656 0.00188004 0.00189596
0.00191374 0.00193382 0.00195673 0.00198305 0.00201345
0.00204867 0.00208956 0 0.000620563 0.00114016
0.00157345 0.00193235 0.00222661 0.00246393 0.00264934
0.00278553 0.00288089 0.00294915 0.00300072 0.0030417
0.00307564 0.00310467 0.00313016 0.00315302 0.00317387
0.00319314 0.00321115 0.00322816 0.00324434 0.00325983
0.00327474 0.00328916 0.00330317 0.00331682 0.00333015
0.00334322 0.00335605 0.00336868 0.00338113 0.00339344
0.00340563 0.00341774 0.00342983 0.00344196 0.00345422
0.00346673 0.00347963 0.00349313 0.00350747 0.00352299
0.00354006 0.00355916 0.00358087 0.00360585 0.0036349
0.00366892 0.00370895 0.00375618 0 0.000769752
0.00143965 0.00202223 0.002528 0.00296583 0.00334316
0.00366613 0.00393911 0.00416311 0.00433549 0.00445979
0.00454924 0.00461627 0.00466886 0.0047118 0.00474802
0.0047794 0.00480717 0.00483219 0.00485507 0.00487625
0.00489605 0.00491472 0.00493246 0.00494942 0.00496572
0.00498145 0.00499669 0.00501151 0.00502597 0.0050401
0.00505396 0.00506758 0.00508101 0.00509428 0.00510745
0.0051206 0.00513382 0.00514723 0.00516101 0.00517537
0.0051906 0.00520708 0.00522527 0.00524572 0.00526914
0.00529635 0.00532832 0.00536621 0.00541134 0
0.000880026 0.00166417 0.00236305 0.00298574 0.00354008
0.00403284 0.00446984 0.00485603 0.00519528 0.0054896
0.00573704 0.0059319 0.00607544 0.00617999 0.00625857
0.00632007 0.00637005 0.00641195 0.00644801 0.00647971
0.00650808 0.00653385 0.00655756 0.00657959 0.00660026
0.00661978 0.00663836 0.00665613 0.00667321 0.0066897
0.00670568 0.00672121 0.00673635 0.00675115 0.00676567
0.00677994 0.00679404 0.00680803 0.006822 0.00683609
0.00685045 0.00686531 0.00688098 0.00689782 0.00691633
0.00693713 0.00696097 0.00698876 0.00702161 0.0070608
DataSetFinish
DataSetStart
DataSetName, idvdlow
MeasurementType, DC
BatchName, opt_ex09
WaferName, wafer1
DieName, x0y0
DeviceName, n10_0p8
Temperature, -40
FabDate, 11 May 2010
UserDate, 11 May 2010
WaferDiameter, 0.2
DieLayout, FOUR_CROSSING
DieSize, 0.02, 0.02
DieType, PARTIAL
Attribute, W, 1e-05
Attribute, L, 8e-07
NodeNames, d g s b
Sweep, 1, V, D, LIN, 0, 5, 0.1, CALCULATED, 0.1, 0
Sweep, 2, V, G, LIN, 1.5, 5, CALCULATED, 5, 0.1, 0
Constant, V, S, 0, 0.1, 0
Constant, V, B, 0, 0.1, 0
Target, I, D
Function, gds, derivative (Vd, ID)
Plot, idvd, XY (LIN LIN), vd, id
Plot, gds, XY (LIN LOG), vd, gds
DataArray, ID
0 7.19131e-05 0.000108709 0.000121628 0.000126957
0.000130445 0.000133138 0.00013538 0.000137336 0.000139099
0.000140725 0.000142249 0.000143698 0.000145087 0.000146431
0.000147738 0.000149015 0.000150268 0.000151501 0.000152717
0.00015392 0.000155111 0.000156292 0.000157465 0.000158631
0.000159791 0.000160947 0.000162099 0.000163248 0.000164395
0.000165542 0.000166691 0.000167843 0.000169001 0.000170169
0.000171352 0.000172556 0.000173788 0.000175058 0.000176378
0.000177761 0.000179225 0.000180788 0.000182473 0.000184306
0.000186318 0.000188541 0.000191013 0.000193777 0.000196878
0.000200367 0 0.000248793 0.000452241 0.000614931
0.0007409 0.000833839 0.00089772 0.000938674 0.000965162
0.000983602 0.000997381 0.00100825 0.00101719 0.00102479
0.00103141 0.0010373 0.00104263 0.00104752 0.00105207
0.00105633 0.00106036 0.00106419 0.00106787 0.0010714
0.00107482 0.00107813 0.00108136 0.00108451 0.00108759
0.00109061 0.00109359 0.00109651 0.00109941 0.00110227
0.00110511 0.00110795 0.00111079 0.00111366 0.00111658
0.00111959 0.00112271 0.00112601 0.00112954 0.00113338
0.00113761 0.00114234 0.00114769 0.0011538 0.00116082
0.00116894 0.00117836 0 0.000383668 0.000719009
0.00101033 0.00126145 0.00147575 0.00165624 0.00180558
0.00192608 0.00201959 0.00208818 0.00213652 0.00217104
0.0021968 0.00221687 0.0022331 0.00224665 0.00225824
0.00226835 0.00227735 0.00228545 0.00229285 0.00229968
0.00230604 0.002312 0.00231764 0.00232299 0.00232811
0.00233302 0.00233775 0.00234233 0.00234676 0.00235108
0.0023553 0.00235942 0.00236347 0.00236746 0.00237141
0.00237534 0.00237929 0.0023833 0.00238742 0.00239171
0.00239626 0.00240118 0.00240658 0.00241263 0.00241951
0.00242744 0.00243666 0.00244747 0 0.000488892
0.000928948 0.00132408 0.00167779 0.00199322 0.00227321
0.0025203 0.00273677 0.00292464 0.00308555 0.00322047
0.00332925 0.00341191 0.00347221 0.00351651 0.00355013
0.00357659 0.00359809 0.00361604 0.00363137 0.00364472
0.00365653 0.00366712 0.00367674 0.00368556 0.00369372
0.00370133 0.00370848 0.00371524 0.00372166 0.00372778
0.00373365 0.0037393 0.00374475 0.00375004 0.00375517
0.00376018 0.00376508 0.0037699 0.00377469 0.00377947
0.0037843 0.00378924 0.0037944 0.00379988 0.00380581
0.00381239 0.00381982 0.00382835 0.0038383 0
0.000572729 0.00109736 0.0015774 0.00201599 0.00241601
0.00278007 0.00311053 0.00340957 0.00367914 0.00392101
0.00413673 0.00432751 0.00449394 0.00463533 0.00474966
0.00483688 0.00490169 0.00495046 0.00498825 0.00501845
0.00504325 0.00506411 0.00508201 0.00509764 0.00511149
0.00512391 0.00513519 0.00514552 0.00515506 0.00516394
0.00517226 0.0051801 0.00518753 0.0051946 0.00520136
0.00520785 0.00521409 0.00522013 0.00522598 0.00523169
0.00523728 0.00524279 0.00524827 0.00525379 0.00525942
0.00526528 0.0052715 0.00527826 0.00528578 0.00529431
DataSetFinish
DataSetStart
DataSetName, idvdlow
MeasurementType, DC
BatchName, opt_ex09
WaferName, wafer1
DieName, x0y0
DeviceName, n10_1
Temperature, -40
FabDate, 11 May 2010
UserDate, 11 May 2010
WaferDiameter, 0.2
DieLayout, FOUR_CROSSING
DieSize, 0.02, 0.02
DieType, PARTIAL
Attribute, W, 1e-05
Attribute, L, 1e-06
NodeNames, d g s b
Sweep, 1, V, D, LIN, 0, 5, 0.1, CALCULATED, 0.1, 0
Sweep, 2, V, G, LIN, 1.5, 5, CALCULATED, 5, 0.1, 0
Constant, V, S, 0, 0.1, 0
Constant, V, B, 0, 0.1, 0
Target, I, D
Function, gds, derivative (Vd, ID)
Plot, idvd, XY (LIN LIN), vd, id
Plot, gds, XY (LIN LOG), vd, gds
DataArray, ID
0 6.00277e-05 9.28885e-05 0.000105121 0.00010935
0.000111789 0.00011357 0.000115002 0.000116218 0.000117291
0.000118263 0.000119162 0.000120005 0.000120806 0.000121573
0.000122313 0.000123031 0.000123731 0.000124417 0.00012509
0.000125752 0.000126406 0.000127051 0.000127691 0.000128324
0.000128952 0.000129576 0.000130197 0.000130814 0.000131429
0.000132043 0.000132656 0.00013327 0.000133887 0.000134507
0.000135135 0.000135773 0.000136427 0.0001371 0.000137799
0.000138533 0.00013931 0.000140142 0.00014104 0.000142019
0.000143095 0.000144287 0.000145616 0.000147103 0.000148775
0.000150659 0 0.000197276 0.000361466 0.000495201
0.000600864 0.000680683 0.000737004 0.000773354 0.000795854
0.000810639 0.000821199 0.000829248 0.000835684 0.000841025
0.000845588 0.000849577 0.000853133 0.000856353 0.000859306
0.000862045 0.000864609 0.000867029 0.000869328 0.000871525
0.000873635 0.00087567 0.00087764 0.000879555 0.000881419
0.000883241 0.000885025 0.000886776 0.000888498 0.000890198
0.000891879 0.00089355 0.000895217 0.000896892 0.000898587
0.000900321 0.000902113 0.000903991 0.000905988 0.000908143
0.000910506 0.000913132 0.000916088 0.000919451 0.00092331
0.000927764 0.000932926 0 0.000305815 0.000576765
0.000815329 0.00102375 0.00120409 0.0013582 0.00148779
0.00159441 0.00167947 0.00174435 0.00179116 0.00182398
0.00184747 0.00186505 0.00187876 0.00188985 0.00189909
0.00190696 0.00191381 0.00191988 0.00192532 0.00193027
0.00193481 0.00193902 0.00194296 0.00194666 0.00195016
0.00195349 0.00195667 0.00195973 0.00196267 0.00196552
0.00196828 0.00197096 0.00197358 0.00197615 0.00197867
0.00198116 0.00198364 0.00198612 0.00198864 0.00199123
0.00199392 0.00199678 0.00199987 0.00200327 0.00200707
0.0020114 0.00201639 0.0020222 0 0.00039295
0.000750703 0.00107553 0.00136951 0.00163456 0.00187241
0.00208469 0.00227288 0.00243833 0.00258225 0.00270569
0.00280937 0.00289349 0.00295824 0.00300593 0.00304092
0.00306729 0.00308785 0.0031044 0.00311809 0.00312967
0.00313966 0.00314843 0.00315622 0.00316324 0.00316963
0.0031755 0.00318093 0.003186 0.00319076 0.00319525
0.00319951 0.00320357 0.00320746 0.00321119 0.00321479
0.00321827 0.00322164 0.00322494 0.00322816 0.00323134
0.0032345 0.00323766 0.00324089 0.00324422 0.00324772
0.00325149 0.00325562 0.00326025 0.00326554 0
0.000463972 0.000893189 0.0012897 0.00165541 0.00199206
0.00230128 0.00258456 0.00284329 0.00307876 0.00329217
0.0034846 0.00365705 0.00381036 0.00394508 0.00406128
0.00415812 0.00423474 0.00429271 0.00433618 0.00436939
0.00439549 0.00441657 0.00443403 0.0044488 0.00446151
0.00447264 0.0044825 0.00449135 0.00449937 0.00450671
0.00451347 0.00451976 0.00452562 0.00453114 0.00453635
0.00454129 0.00454601 0.00455051 0.00455484 0.00455901
0.00456305 0.00456697 0.0045708 0.00457458 0.00457834
0.00458212 0.004586 0.00459003 0.00459434 0.00459903
DataSetFinish
DataSetStart
DataSetName, idvdlow
MeasurementType, DC
BatchName, opt_ex09
WaferName, wafer1
DieName, x0y0
DeviceName, n10_10
Temperature, -40
FabDate, 11 May 2010
UserDate, 11 May 2010
WaferDiameter, 0.2
DieLayout, FOUR_CROSSING
DieSize, 0.02, 0.02
DieType, PARTIAL
Attribute, W, 1e-05
Attribute, L, 1e-05
NodeNames, d g s b
Sweep, 1, V, D, LIN, 0, 5, 0.1, CALCULATED, 0.1, 0
Sweep, 2, V, G, LIN, 1.5, 5, CALCULATED, 5, 0.1, 0
Constant, V, S, 0, 0.1, 0
Constant, V, B, 0, 0.1, 0
Target, I, D
Function, gds, derivative (Vd, ID)
Plot, idvd, XY (LIN LIN), vd, id
Plot, gds, XY (LIN LOG), vd, gds
DataArray, ID
0 7.62244e-06 1.28951e-05 1.58956e-05 1.70107e-05
1.72688e-05 1.73523e-05 1.74014e-05 1.74401e-05 1.74746e-05
1.75068e-05 1.75379e-05 1.75682e-05 1.75979e-05 1.76273e-05
1.76564e-05 1.76853e-05 1.77141e-05 1.77427e-05 1.77713e-05
1.77998e-05 1.78282e-05 1.78565e-05 1.78848e-05 1.79131e-05
1.79413e-05 1.79695e-05 1.79977e-05 1.80258e-05 1.8054e-05
1.80821e-05 1.81102e-05 1.81383e-05 1.81665e-05 1.81947e-05
1.82229e-05 1.82512e-05 1.82796e-05 1.83082e-05 1.8337e-05
1.8366e-05 1.83954e-05 1.84252e-05 1.84556e-05 1.84867e-05
1.85185e-05 1.85514e-05 1.85854e-05 1.86207e-05 1.86577e-05
1.86964e-05 0 2.01886e-05 3.80738e-05 5.36737e-05
6.70065e-05 7.80918e-05 8.69528e-05 9.36227e-05 9.81718e-05
0.000100802 0.000102035 0.000102582 0.00010288 0.000103084
0.000103246 0.000103385 0.000103511 0.000103628 0.000103739
0.000103846 0.00010395 0.000104051 0.000104151 0.000104249
0.000104346 0.000104442 0.000104537 0.000104631 0.000104725
0.000104818 0.00010491 0.000105003 0.000105095 0.000105186
0.000105278 0.000105369 0.00010546 0.000105551 0.000105642
0.000105733 0.000105824 0.000105916 0.000106007 0.0001061
0.000106193 0.000106288 0.000106385 0.000106483 0.000106585
0.000106689 0.000106798 0 3.12466e-05 6.03192e-05
8.72332e-05 0.000112004 0.000134647 0.000155177 0.00017361
0.000189961 0.000204246 0.000216482 0.000226689 0.000234894
0.000241142 0.000245529 0.000248288 0.00024986 0.000250761
0.000251337 0.000251756 0.000252089 0.000252373 0.000252624
0.000252853 0.000253067 0.000253269 0.000253462 0.000253648
0.000253829 0.000254006 0.000254179 0.000254349 0.000254516
0.000254682 0.000254845 0.000255007 0.000255167 0.000255327
0.000255485 0.000255643 0.000255799 0.000255955 0.000256111
0.000256266 0.00025642 0.000256575 0.000256731 0.000256886
0.000257043 0.000257202 0.000257363 0 4.09616e-05
7.98849e-05 0.000116783 0.000151671 0.000184561 0.000215466
0.000244401 0.000271377 0.000296409 0.000319508 0.000340689
0.000359964 0.000377346 0.000392849 0.000406487 0.000418275
0.000428233 0.000436388 0.000442785 0.000447516 0.000450772
0.000452888 0.000454261 0.000455206 0.000455909 0.00045647
0.00045694 0.000457351 0.00045772 0.000458058 0.000458373
0.000458671 0.000458954 0.000459227 0.000459491 0.000459747
0.000459997 0.000460242 0.000460482 0.000460719 0.000460952
0.000461182 0.00046141 0.000461636 0.000461859 0.000462081
0.000462302 0.000462521 0.00046274 0.000462958 0
4.95021e-05 9.70984e-05 0.000142801 0.000186622 0.000228572
0.000268665 0.000306911 0.000343323 0.000377911 0.000410688
0.000441664 0.00047085 0.000498259 0.000523901 0.000547787
0.000569928 0.000590335 0.00060902 0.000625993 0.000641267
0.000654853 0.000666765 0.00067702 0.000685639 0.000692659
0.000698146 0.000702231 0.00070514 0.000707179 0.000708643
0.000709744 0.000710617 0.000711339 0.00071196 0.000712507
0.000713002 0.000713456 0.000713879 0.000714278 0.000714657
0.00071502 0.000715369 0.000715708 0.000716037 0.000716359
0.000716673 0.000716982 0.000717286 0.000717585 0.00071788
DataSetFinish
DataSetStart
DataSetName, idvdlow
MeasurementType, DC
BatchName, opt_ex09
WaferName, wafer1
DieName, x0y0
DeviceName, n10_2
Temperature, -40
FabDate, 11 May 2010
UserDate, 11 May 2010
WaferDiameter, 0.2
DieLayout, FOUR_CROSSING
DieSize, 0.02, 0.02
DieType, PARTIAL
Attribute, W, 1e-05
Attribute, L, 2e-06
NodeNames, d g s b
Sweep, 1, V, D, LIN, 0, 5, 0.1, CALCULATED, 0.1, 0
Sweep, 2, V, G, LIN, 1.5, 5, CALCULATED, 5, 0.1, 0
Constant, V, S, 0, 0.1, 0
Constant, V, B, 0, 0.1, 0
Target, I, D
Function, gds, derivative (Vd, ID)
Plot, idvd, XY (LIN LIN), vd, id
Plot, gds, XY (LIN LOG), vd, gds
DataArray, ID
0 3.39145e-05 5.52191e-05 6.52145e-05 6.82154e-05
6.93006e-05 6.99542e-05 7.04431e-05 7.08455e-05 7.11952e-05
7.151e-05 7.18002e-05 7.20724e-05 7.23312e-05 7.25794e-05
7.28194e-05 7.30527e-05 7.32807e-05 7.35041e-05 7.37237e-05
7.39402e-05 7.4154e-05 7.43655e-05 7.45749e-05 7.47826e-05
7.49887e-05 7.51935e-05 7.53972e-05 7.55998e-05 7.58017e-05
7.60028e-05 7.62036e-05 7.64042e-05 7.6605e-05 7.68065e-05
7.70093e-05 7.7214e-05 7.74216e-05 7.76334e-05 7.78506e-05
7.8075e-05 7.83087e-05 7.8554e-05 7.88138e-05 7.90913e-05
7.939e-05 7.97142e-05 8.00685e-05 8.04581e-05 8.08884e-05
8.13658e-05 0 9.89288e-05 0.000184202 0.000256348
0.000315871 0.000363269 0.000399062 0.00042393 0.000439235
0.000447843 0.000452983 0.000456462 0.000459046 0.00046109
0.00046278 0.000464226 0.000465495 0.000466632 0.000467668
0.000468625 0.000469518 0.00047036 0.000471159 0.000471924
0.000472659 0.000473368 0.000474057 0.000474726 0.00047538
0.000476019 0.000476646 0.000477262 0.000477869 0.000478467
0.000479059 0.000479645 0.000480227 0.000480806 0.000481386
0.00048197 0.00048256 0.000483163 0.000483783 0.000484428
0.000485108 0.000485833 0.000486615 0.00048747 0.000488415
0.000489469 0.000490656 0 0.000153702 0.000293639
0.000420299 0.000534146 0.000635624 0.000725157 0.000803152
0.000870001 0.000926086 0.000971795 0.00100756 0.00103403
0.00105245 0.00106492 0.0010736 0.00107996 0.00108487
0.00108881 0.00109209 0.00109488 0.00109732 0.00109948
0.00110142 0.0011032 0.00110483 0.00110636 0.00110779
0.00110914 0.00111043 0.00111166 0.00111284 0.00111398
0.00111508 0.00111614 0.00111718 0.0011182 0.00111919
0.00112016 0.00112112 0.00112206 0.001123 0.00112393
0.00112487 0.00112582 0.00112679 0.00112779 0.00112885
0.00112997 0.00113118 0.00113251 0 0.000200032
0.000386472 0.000559766 0.000720342 0.000868607 0.00100495
0.00112976 0.00124338 0.00134616 0.00143843 0.00152051
0.0015927 0.0016553 0.00170858 0.0017528 0.00178826
0.00181547 0.00183553 0.00185017 0.00186108 0.0018695
0.00187622 0.00188173 0.00188638 0.00189038 0.00189388
0.00189699 0.00189979 0.00190235 0.0019047 0.00190688
0.00190891 0.00191083 0.00191265 0.00191437 0.00191602
0.0019176 0.00191912 0.00192059 0.00192202 0.0019234
0.00192475 0.00192608 0.00192738 0.00192866 0.00192993
0.00193121 0.0019325 0.00193382 0.00193519 0
0.000239457 0.000465645 0.000678972 0.000879826 0.00106858
0.0012456 0.00141123 0.0015658 0.00170962 0.00184301
0.00196626 0.00207966 0.00218347 0.00227796 0.00236337
0.00243994 0.00250788 0.00256738 0.00261855 0.00266145
0.00269613 0.00272308 0.00274354 0.00275912 0.00277124
0.00278093 0.00278888 0.00279554 0.00280124 0.00280619
0.00281057 0.00281449 0.00281803 0.00282126 0.00282424
0.002827 0.00282958 0.00283201 0.0028343 0.00283648
0.00283855 0.00284054 0.00284245 0.00284429 0.00284607
0.00284779 0.00284948 0.00285112 0.00285274 0.00285435
DataSetFinish
DataSetStart
DataSetName, idvdlow
MeasurementType, DC
BatchName, opt_ex09
WaferName, wafer1
DieName, x0y0
DeviceName, n10_5
Temperature, -40
FabDate, 11 May 2010
UserDate, 11 May 2010
WaferDiameter, 0.2
DieLayout, FOUR_CROSSING
DieSize, 0.02, 0.02
DieType, PARTIAL
Attribute, W, 1e-05
Attribute, L, 5e-06
NodeNames, d g s b
Sweep, 1, V, D, LIN, 0, 5, 0.1, CALCULATED, 0.1, 0
Sweep, 2, V, G, LIN, 1.5, 5, CALCULATED, 5, 0.1, 0
Constant, V, S, 0, 0.1, 0
Constant, V, B, 0, 0.1, 0
Target, I, D
Function, gds, derivative (Vd, ID)
Plot, idvd, XY (LIN LIN), vd, id
Plot, gds, XY (LIN LOG), vd, gds
DataArray, ID
0 1.48395e-05 2.48887e-05 3.03732e-05 3.22797e-05
3.27593e-05 3.29585e-05 3.30912e-05 3.31989e-05 3.32943e-05
3.33826e-05 3.34664e-05 3.3547e-05 3.36254e-05 3.37022e-05
3.37777e-05 3.38522e-05 3.39259e-05 3.3999e-05 3.40716e-05
3.41437e-05 3.42155e-05 3.42869e-05 3.43581e-05 3.4429e-05
3.44997e-05 3.45703e-05 3.46407e-05 3.4711e-05 3.47812e-05
3.48513e-05 3.49213e-05 3.49913e-05 3.50614e-05 3.51316e-05
3.5202e-05 3.52726e-05 3.53438e-05 3.54155e-05 3.54881e-05
3.55618e-05 3.56369e-05 3.57138e-05 3.57929e-05 3.58748e-05
3.596e-05 3.60492e-05 3.61431e-05 3.62425e-05 3.63484e-05
3.64617e-05 0 4.01648e-05 7.55116e-05 0.000106114
0.000132047 0.000153386 0.000170214 0.000182642 0.000190884
0.000195516 0.000197778 0.000198965 0.000199721 0.000200281
0.000200734 0.000201123 0.000201468 0.000201784 0.000202078
0.000202356 0.000202621 0.000202876 0.000203124 0.000203365
0.0002036 0.000203831 0.000204058 0.000204282 0.000204503
0.000204722 0.000204938 0.000205153 0.000205366 0.000205578
0.000205789 0.000205998 0.000206207 0.000206415 0.000206623
0.000206831 0.00020704 0.00020725 0.000207462 0.000207677
0.000207896 0.00020812 0.000208352 0.000208593 0.000208846
0.000209113 0.000209398 0 6.22194e-05 0.0001198
0.000172807 0.000221305 0.000265359 0.00030503 0.00034038
0.000371472 0.000398367 0.000421129 0.000439831 0.000454564
0.000465483 0.000472925 0.00047759 0.000480469 0.000482375
0.000483755 0.000484832 0.000485719 0.000486478 0.000487148
0.000487752 0.000488307 0.000488825 0.000489312 0.000489776
0.000490219 0.000490647 0.000491061 0.000491464 0.000491857
0.000492241 0.000492618 0.000492989 0.000493355 0.000493715
0.000494072 0.000494424 0.000494774 0.000495121 0.000495466
0.000495809 0.000496152 0.000496496 0.000496842 0.000497191
0.000497546 0.000497909 0.000498284 0 8.14177e-05
0.000158409 0.000231034 0.000299349 0.000363413 0.00042328
0.000479005 0.000530644 0.000578249 0.000621872 0.000661567
0.000697382 0.000729371 0.000757584 0.000782073 0.000802897
0.000820125 0.000833855 0.000844274 0.000851754 0.000856929
0.000860538 0.000863168 0.000865187 0.000866812 0.000868168
0.000869335 0.000870363 0.000871288 0.000872132 0.000872913
0.000873643 0.000874332 0.000874987 0.000875614 0.000876217
0.0008768 0.000877365 0.000877915 0.000878452 0.000878978
0.000879493 0.00088 0.000880499 0.000880991 0.000881477
0.000881959 0.000882437 0.000882913 0.000883389 0
9.81602e-05 0.000192116 0.000281921 0.000367627 0.000449284
0.000526943 0.000600654 0.000670465 0.000736424 0.000798578
0.000856973 0.000911656 0.00096267 0.00101006 0.00105387
0.00109414 0.00113092 0.00116425 0.00119416 0.00122071
0.00124393 0.00126388 0.00128061 0.00129422 0.00130487
0.00131291 0.00131885 0.00132327 0.00132665 0.00132933
0.00133153 0.00133339 0.00133499 0.00133641 0.00133768
0.00133883 0.0013399 0.00134089 0.00134182 0.0013427
0.00134353 0.00134433 0.00134511 0.00134585 0.00134657
0.00134727 0.00134795 0.00134862 0.00134928 0.00134992
DataSetFinish
DataSetStart
DataSetName, idvdlow
MeasurementType, DC
BatchName, opt_ex09
WaferName, wafer1
DieName, x0y0
DeviceName, n2_0p5
Temperature, -40
FabDate, 11 May 2010
UserDate, 11 May 2010
WaferDiameter, 0.2
DieLayout, FOUR_CROSSING
DieSize, 0.02, 0.02
DieType, PARTIAL
Attribute, W, 2e-06
Attribute, L, 5e-07
NodeNames, d g s b
Sweep, 1, V, D, LIN, 0, 5, 0.1, CALCULATED, 0.1, 0
Sweep, 2, V, G, LIN, 1.5, 5, CALCULATED, 5, 0.1, 0
Constant, V, S, 0, 0.1, 0
Constant, V, B, 0, 0.1, 0
Target, I, D
Function, gds, derivative (Vd, ID)
Plot, idvd, XY (LIN LIN), vd, id
Plot, gds, XY (LIN LOG), vd, gds
DataArray, ID
0 8.86828e-06 1.09182e-05 1.19655e-05 1.2837e-05
1.36319e-05 1.43865e-05 1.5119e-05 1.584e-05 1.65559e-05
1.72712e-05 1.79885e-05 1.87101e-05 1.94374e-05 2.01714e-05
2.0913e-05 2.16627e-05 2.24211e-05 2.31885e-05 2.39652e-05
2.47513e-05 2.55471e-05 2.63527e-05 2.71681e-05 2.79934e-05
2.88288e-05 2.96743e-05 3.05301e-05 3.13964e-05 3.22735e-05
3.31619e-05 3.40625e-05 3.49763e-05 3.5905e-05 3.68506e-05
3.78161e-05 3.88053e-05 3.9823e-05 4.08754e-05 4.197e-05
4.31163e-05 4.43255e-05 4.56111e-05 4.69892e-05 4.84784e-05
5.01003e-05 5.18798e-05 5.38454e-05 5.60291e-05 5.8467e-05
6.11995e-05 0 7.25202e-05 0.000128399 0.000170122
0.000199809 0.00021969 0.000232801 0.00024202 0.000249017
0.000254653 0.0002594 0.000263533 0.000267228 0.000270597
0.000273719 0.000276649 0.000279426 0.00028208 0.000284634
0.000287106 0.000289508 0.000291853 0.000294148 0.000296401
0.000298617 0.000300803 0.000302961 0.000305095 0.000307209
0.000309306 0.000311388 0.00031346 0.000315526 0.000317591
0.000319662 0.000321748 0.000323863 0.000326022 0.000328246
0.000330562 0.000333003 0.000335611 0.000338433 0.000341531
0.000344974 0.000348844 0.000353235 0.000358256 0.00036403
0.000370695 0.000378405 0 0.000112844 0.000208624
0.000289404 0.000356928 0.000412672 0.000457871 0.000493454
0.000520091 0.000539213 0.000553162 0.000563829 0.00057237
0.000579476 0.000585572 0.000590931 0.000595738 0.000600119
0.000604167 0.000607948 0.000611512 0.000614898 0.000618136
0.00062125 0.000624257 0.000627174 0.000630014 0.000632785
0.000635498 0.000638158 0.000640774 0.000643351 0.000645895
0.000648413 0.000650911 0.0006534 0.000655891 0.000658401
0.000660951 0.000663569 0.000666292 0.000669166 0.00067225
0.000675615 0.000679349 0.000683559 0.000688368 0.000693925
0.000700398 0.000707983 0.0007169 0 0.000140094
0.000263853 0.000372953 0.000468847 0.000552799 0.000625911
0.000689125 0.000743197 0.00078853 0.000824926 0.000852384
0.00087257 0.000887771 0.000899682 0.000909373 0.000917512
0.000924528 0.000930709 0.00093625 0.000941293 0.000945939
0.000950264 0.000954327 0.000958173 0.000961836 0.000965344
0.00096872 0.000971982 0.000975147 0.000978225 0.000981229
0.000984167 0.000987048 0.000989881 0.000992674 0.000995437
0.000998184 0.00100093 0.0010037 0.00100652 0.00100943
0.00101248 0.00101573 0.00101927 0.0010232 0.00102764
0.00103274 0.00103868 0.00104566 0.00105393 0
0.000159622 0.000303941 0.000434321 0.000551969 0.000657953
0.000753224 0.000838626 0.000914902 0.000982686 0.00104244
0.00109429 0.00113766 0.00117177 0.0011974 0.0012167
0.00123169 0.00124374 0.00125373 0.00126224 0.00126965
0.00127622 0.00128213 0.00128753 0.00129251 0.00129716
0.00130152 0.00130564 0.00130957 0.00131333 0.00131694
0.00132042 0.00132379 0.00132707 0.00133027 0.00133339
0.00133645 0.00133945 0.00134242 0.00134537 0.00134831
0.00135128 0.0013543 0.00135744 0.00136075 0.00136431
0.00136822 0.00137262 0.00137766 0.00138353 0.00139046
DataSetFinish
DataSetStart
DataSetName, idvdlow
MeasurementType, DC
BatchName, opt_ex09
WaferName, wafer1
DieName, x0y0
DeviceName, n2_10
Temperature, -40
FabDate, 11 May 2010
UserDate, 11 May 2010
WaferDiameter, 0.2
DieLayout, FOUR_CROSSING
DieSize, 0.02, 0.02
DieType, PARTIAL
Attribute, W, 2e-06
Attribute, L, 1e-05
NodeNames, d g s b
Sweep, 1, V, D, LIN, 0, 5, 0.1, CALCULATED, 0.1, 0
Sweep, 2, V, G, LIN, 1.5, 5, CALCULATED, 5, 0.1, 0
Constant, V, S, 0, 0.1, 0
Constant, V, B, 0, 0.1, 0
Target, I, D
Function, gds, derivative (Vd, ID)
Plot, idvd, XY (LIN LIN), vd, id
Plot, gds, XY (LIN LOG), vd, gds
DataArray, ID
0 1.28685e-06 2.11712e-06 2.5184e-06 2.62693e-06
2.6504e-06 2.66026e-06 2.66708e-06 2.67286e-06 2.67817e-06
2.68324e-06 2.68817e-06 2.693e-06 2.69777e-06 2.7025e-06
2.70719e-06 2.71186e-06 2.71651e-06 2.72114e-06 2.72576e-06
2.73037e-06 2.73497e-06 2.73957e-06 2.74416e-06 2.74874e-06
2.75332e-06 2.7579e-06 2.76247e-06 2.76704e-06 2.77161e-06
2.77617e-06 2.78074e-06 2.78531e-06 2.78988e-06 2.79446e-06
2.79905e-06 2.80365e-06 2.80828e-06 2.81293e-06 2.81761e-06
2.82235e-06 2.82714e-06 2.83201e-06 2.83696e-06 2.84204e-06
2.84724e-06 2.85261e-06 2.85817e-06 2.86395e-06 2.87e-06
2.87634e-06 0 3.74007e-06 7.02775e-06 9.86656e-06
1.22602e-05 1.42126e-05 1.57289e-05 1.68179e-05 1.75023e-05
1.78501e-05 1.79981e-05 1.80677e-05 1.81103e-05 1.8142e-05
1.81684e-05 1.81919e-05 1.82135e-05 1.8234e-05 1.82535e-05
1.82725e-05 1.8291e-05 1.83091e-05 1.83269e-05 1.83445e-05
1.83619e-05 1.83791e-05 1.83962e-05 1.84132e-05 1.84301e-05
1.8447e-05 1.84637e-05 1.84804e-05 1.84971e-05 1.85136e-05
1.85302e-05 1.85467e-05 1.85632e-05 1.85797e-05 1.85962e-05
1.86127e-05 1.86293e-05 1.86459e-05 1.86626e-05 1.86794e-05
1.86965e-05 1.87138e-05 1.87314e-05 1.87495e-05 1.87681e-05
1.87874e-05 1.88074e-05 0 5.90191e-06 1.13764e-05
1.64265e-05 2.10553e-05 2.52656e-05 2.90606e-05 3.24431e-05
3.54162e-05 3.79833e-05 4.01478e-05 4.19141e-05 4.32892e-05
4.42865e-05 4.49382e-05 4.53159e-05 4.55243e-05 4.56493e-05
4.57353e-05 4.58015e-05 4.58565e-05 4.59046e-05 4.59481e-05
4.59884e-05 4.60264e-05 4.60626e-05 4.60974e-05 4.61312e-05
4.61641e-05 4.61964e-05 4.6228e-05 4.62592e-05 4.62899e-05
4.63203e-05 4.63504e-05 4.63803e-05 4.64099e-05 4.64393e-05
4.64686e-05 4.64977e-05 4.65266e-05 4.65555e-05 4.65843e-05
4.6613e-05 4.66418e-05 4.66705e-05 4.66994e-05 4.67284e-05
4.67577e-05 4.67873e-05 4.68175e-05 0 7.80258e-06
1.52043e-05 2.22078e-05 2.88158e-05 3.50308e-05 4.08554e-05
4.62923e-05 5.13439e-05 5.60129e-05 6.03018e-05 6.42131e-05
6.77494e-05 7.09133e-05 7.37075e-05 7.6135e-05 7.81993e-05
7.99049e-05 8.12591e-05 8.22764e-05 8.29874e-05 8.34504e-05
8.37449e-05 8.39413e-05 8.40833e-05 8.41941e-05 8.42857e-05
8.43649e-05 8.44355e-05 8.44999e-05 8.45597e-05 8.4616e-05
8.46696e-05 8.4721e-05 8.47707e-05 8.48189e-05 8.4866e-05
8.4912e-05 8.49571e-05 8.50016e-05 8.50454e-05 8.50886e-05
8.51314e-05 8.51737e-05 8.52157e-05 8.52574e-05 8.52988e-05
8.53399e-05 8.53809e-05 8.54218e-05 8.54626e-05 0
9.47461e-06 1.85743e-05 2.73014e-05 3.56583e-05 4.36473e-05
5.12706e-05 5.85306e-05 6.54295e-05 7.19696e-05 7.81531e-05
8.39823e-05 8.94592e-05 9.45861e-05 9.93651e-05 0.000103799
0.000107888 0.000111637 0.000115047 0.000118119 0.000120857
0.000123263 0.000125341 0.000127093 0.000128527 0.000129655
0.000130498 0.000131098 0.000131514 0.000131809 0.000132027
0.000132198 0.000132338 0.000132457 0.000132562 0.000132656
0.000132743 0.000132823 0.000132899 0.00013297 0.000133039
0.000133105 0.000133169 0.000133231 0.000133292 0.000133351
0.00013341 0.000133467 0.000133523 0.000133579 0.000133634
DataSetFinish
DataSetStart
DataSetName, idvdlow
MeasurementType, DC
BatchName, opt_ex09
WaferName, wafer1
DieName, x0y0
DeviceName, n5_10
Temperature, -40
FabDate, 11 May 2010
UserDate, 11 May 2010
WaferDiameter, 0.2
DieLayout, FOUR_CROSSING
DieSize, 0.02, 0.02
DieType, PARTIAL
Attribute, W, 5e-06
Attribute, L, 1e-05
NodeNames, d g s b
Sweep, 1, V, D, LIN, 0, 5, 0.1, CALCULATED, 0.1, 0
Sweep, 2, V, G, LIN, 1.5, 5, CALCULATED, 5, 0.1, 0
Constant, V, S, 0, 0.1, 0
Constant, V, B, 0, 0.1, 0
Target, I, D
Function, gds, derivative (Vd, ID)
Plot, idvd, XY (LIN LIN), vd, id
Plot, gds, XY (LIN LOG), vd, gds
DataArray, ID
0 3.53585e-06 5.90911e-06 7.1699e-06 7.5762e-06
7.66488e-06 7.69722e-06 7.71787e-06 7.73478e-06 7.75009e-06
7.76456e-06 7.77856e-06 7.79225e-06 7.80573e-06 7.81907e-06
7.83231e-06 7.84546e-06 7.85855e-06 7.87159e-06 7.88459e-06
7.89756e-06 7.9105e-06 7.92342e-06 7.93633e-06 7.94921e-06
7.96208e-06 7.97494e-06 7.98779e-06 8.00063e-06 8.01347e-06
8.0263e-06 8.03913e-06 8.05196e-06 8.06481e-06 8.07766e-06
8.09055e-06 8.10347e-06 8.11644e-06 8.12949e-06 8.14264e-06
8.15591e-06 8.16934e-06 8.18298e-06 8.19688e-06 8.21108e-06
8.22566e-06 8.24069e-06 8.25625e-06 8.27243e-06 8.28934e-06
8.30708e-06 0 9.78244e-06 1.84198e-05 2.59211e-05
3.22953e-05 3.75526e-05 4.17049e-05 4.47708e-05 4.67934e-05
4.7901e-05 4.83952e-05 4.86184e-05 4.87462e-05 4.88373e-05
4.89112e-05 4.89758e-05 4.90348e-05 4.909e-05 4.91427e-05
4.91936e-05 4.92431e-05 4.92915e-05 4.9339e-05 4.93859e-05
4.94323e-05 4.94782e-05 4.95237e-05 4.95689e-05 4.96138e-05
4.96585e-05 4.9703e-05 4.97474e-05 4.97915e-05 4.98356e-05
4.98795e-05 4.99234e-05 4.99671e-05 5.00108e-05 5.00546e-05
5.00983e-05 5.01421e-05 5.01861e-05 5.02303e-05 5.02749e-05
5.03199e-05 5.03656e-05 5.04122e-05 5.04598e-05 5.05087e-05
5.05594e-05 5.06121e-05 0 1.52825e-05 2.94838e-05
4.26115e-05 5.46732e-05 6.56766e-05 7.56291e-05 8.45384e-05
9.24123e-05 9.92587e-05 0.000105086 0.000109906 0.000113731
0.000116589 0.000118541 0.000119725 0.000120388 0.000120773
0.000121027 0.000121216 0.00012137 0.000121502 0.000121621
0.000121729 0.000121831 0.000121928 0.000122021 0.00012211
0.000122198 0.000122283 0.000122366 0.000122448 0.000122529
0.00012261 0.000122689 0.000122767 0.000122845 0.000122922
0.000122999 0.000123076 0.000123152 0.000123227 0.000123303
0.000123378 0.000123453 0.000123529 0.000123604 0.00012368
0.000123757 0.000123834 0.000123913 0 2.01161e-05
3.92182e-05 5.73132e-05 7.44077e-05 9.05084e-05 0.000105622
0.000119755 0.000132914 0.000145105 0.000156335 0.00016661
0.000175938 0.000184323 0.000191774 0.000198297 0.0002039
0.000208595 0.000212394 0.000215327 0.00021745 0.000218877
0.000219792 0.000220391 0.000220811 0.00022113 0.000221388
0.000221607 0.000221801 0.000221975 0.000222137 0.000222287
0.00022243 0.000222567 0.000222698 0.000222826 0.00022295
0.000223071 0.00022319 0.000223307 0.000223422 0.000223535
0.000223647 0.000223758 0.000223868 0.000223977 0.000224085
0.000224193 0.0002243 0.000224406 0.000224513 0
2.43664e-05 4.77846e-05 7.02607e-05 9.18006e-05 0.00011241
0.000132095 0.000150862 0.000168715 0.000185661 0.000201706
0.000216855 0.000231113 0.000244487 0.000256981 0.000268602
0.000279355 0.000289244 0.000298277 0.000306458 0.000313793
0.000320289 0.000325952 0.000330792 0.000334821 0.00033806
0.000340551 0.000342372 0.000343653 0.000344551 0.000345203
0.0003457 0.0003461 0.000346435 0.000346726 0.000346984
0.000347219 0.000347436 0.000347638 0.00034783 0.000348012
0.000348188 0.000348357 0.000348521 0.000348681 0.000348837
0.00034899 0.00034914 0.000349288 0.000349434 0.000349578
DataSetFinish
DataSetStart
DataSetName, idvglin
MeasurementType, DC
BatchName, opt_ex09
WaferName, wafer1
DieName, x0y0
DeviceName, n10_0p5
Temperature, -40
FabDate, 11 May 2010
UserDate, 11 May 2010
WaferDiameter, 0.2
DieLayout, FOUR_CROSSING
DieSize, 0.02, 0.02
DieType, PARTIAL
Attribute, W, 1e-05
Attribute, L, 5e-07
NodeNames, d g s b
Sweep, 1, V, G, LIN, 0, 5, 0.1, CALCULATED, 0.1, 0
Sweep, 2, V, B, LIN, 0, -3, CALCULATED, 5, 0.1, 0
Constant, V, S, 0, 0.1, 0
Constant, V, D, 0.1, 0.1, 0
Target, I, D
Function, gm, derivative (VG, ID)
Plot, idvg, XY (LIN LIN), vg, id
Plot, gm, XY (LIN LIN), vg, gm
DataArray, ID
0 7.29808e-17 7.13935e-16 6.99936e-15 6.86314e-14
6.72812e-13 6.59086e-12 6.44143e-11 6.25061e-10 5.93891e-09
5.33987e-08 4.33133e-07 3.10654e-06 1.63808e-05 4.87608e-05
9.13296e-05 0.000134809 0.000176573 0.00021624 0.000253891
0.000289665 0.000323694 0.000356094 0.000386974 0.00041643
0.000444556 0.000471433 0.000497141 0.00052175 0.000545327
0.000567934 0.000589626 0.000610456 0.000630472 0.000649721
0.000668242 0.000686076 0.000703258 0.000719822 0.000735799
0.000751219 0.000766109 0.000780495 0.0007944 0.000807848
0.00082086 0.000833455 0.000845652 0.000857468 0.000868921
0.000880026 0 0 0 0
2.08838e-17 2.6522e-16 3.50439e-15 4.64423e-14 6.15431e-13
8.14629e-12 1.07389e-10 1.39525e-09 1.72779e-08 1.88555e-07
1.68503e-06 1.09693e-05 3.88433e-05 7.93458e-05 0.000121915
0.000163215 0.000202635 0.000240153 0.000275859 0.00030986
0.00034226 0.00037316 0.000402653 0.000430829 0.00045777
0.000483551 0.000508242 0.000531909 0.000554611 0.000576404
0.00059734 0.000617467 0.000636828 0.000655466 0.000673417
0.000690719 0.000707404 0.000723504 0.000739047 0.00075406
0.00076857 0.000782599 0.00079617 0.000809305 0.000822022
0.000834341 0.000846279 0 0 0
0 0 0 0 8.68837e-17
1.33351e-15 2.08225e-14 3.25416e-13 5.08056e-12 7.89888e-11
1.20838e-09 1.74463e-08 2.14316e-07 2.03102e-06 1.29838e-05
4.29304e-05 8.3555e-05 0.000125424 0.000165938 0.000204637
0.000241509 0.000276636 0.000310113 0.000342041 0.000372514
0.000401622 0.00042945 0.000456076 0.000481573 0.000506008
0.000529444 0.000551938 0.000573544 0.000594312 0.000614287
0.000633513 0.00065203 0.000669873 0.000687079 0.000703679
0.000719704 0.000735181 0.000750137 0.000764596 0.000778583
0.000792118 0.000805222 0.000817914 0 0
0 0 0 0 0
0 0 9.14538e-17 1.55358e-15 2.70326e-14
4.70861e-13 8.18976e-12 1.41551e-10 2.38531e-09 3.6686e-08
4.48328e-07 3.97822e-06 2.0979e-05 5.59618e-05 9.71836e-05
0.000138258 0.000177762 0.000215478 0.000251435 0.000285716
0.000318415 0.000349626 0.000379439 0.000407941 0.00043521
0.000461322 0.000486345 0.000510343 0.000533375 0.000555497
0.00057676 0.00059721 0.000616891 0.000635845 0.00065411
0.000671721 0.00068871 0.000705111 0.00072095 0.000736255
0.000751052 0.000765364 0.000779213 0.000792621 0
0 0 0 0 0
0 0 0 0 1.38856e-17
2.04644e-16 3.80065e-15 7.15783e-14 1.34816e-12 2.53191e-11
4.69619e-10 8.28241e-09 1.23766e-07 1.35061e-06 9.8141e-06
3.66268e-05 7.58104e-05 0.000116956 0.000156982 0.000195312
0.000231892 0.000266785 0.000300075 0.000331856 0.000362216
0.000391242 0.000419013 0.000445606 0.00047109 0.000495531
0.000518988 0.000541517 0.000563171 0.000583998 0.000604041
0.000623344 0.000641944 0.000659879 0.000677181 0.000693882
0.000710012 0.000725598 0.000740666 0.000755241 0.000769344
DataSetFinish
DataSetStart
DataSetName, idvglin
MeasurementType, DC
BatchName, opt_ex09
WaferName, wafer1
DieName, x0y0
DeviceName, n10_0p8
Temperature, -40
FabDate, 11 May 2010
UserDate, 11 May 2010
WaferDiameter, 0.2
DieLayout, FOUR_CROSSING
DieSize, 0.02, 0.02
DieType, PARTIAL
Attribute, W, 1e-05
Attribute, L, 8e-07
NodeNames, d g s b
Sweep, 1, V, G, LIN, 0, 5, 0.1, CALCULATED, 0.1, 0
Sweep, 2, V, B, LIN, 0, -3, CALCULATED, 5, 0.1, 0
Constant, V, S, 0, 0.1, 0
Constant, V, D, 0.1, 0.1, 0
Target, I, D
Function, gm, derivative (VG, ID)
Plot, idvg, XY (LIN LIN), vg, id
Plot, gm, XY (LIN LIN), vg, gm
DataArray, ID
1.28723e-17 1.39134e-16 1.52339e-15 1.66985e-14 1.8302e-13
2.00455e-12 2.19041e-11 2.37549e-10 2.51612e-09 2.498e-08
2.19393e-07 1.66642e-06 8.91132e-06 2.62098e-05 4.86852e-05
7.19131e-05 9.46901e-05 0.000116791 0.000138195 0.000158919
0.000178987 0.000198421 0.000217246 0.000235485 0.000253161
0.000270297 0.000286916 0.000303037 0.000318681 0.000333867
0.000348614 0.000362938 0.000376857 0.000390385 0.000403538
0.00041633 0.000428774 0.000440884 0.000452672 0.000464148
0.000475325 0.000486214 0.000496823 0.000507163 0.000517243
0.000527071 0.000536657 0.000546008 0.000555133 0.000564037
0.000572729 0 0 0 0
3.18381e-17 4.79359e-16 7.41032e-15 1.14726e-13 1.77473e-12
2.73537e-11 4.15708e-10 6.00547e-09 7.50082e-08 7.36514e-07
5.15508e-06 1.9259e-05 4.0345e-05 6.2945e-05 8.53405e-05
0.000107165 0.000128348 0.000148886 0.000168792 0.000188083
0.000206782 0.00022491 0.000242489 0.000259541 0.000276086
0.000292145 0.000307737 0.00032288 0.000337592 0.000351889
0.000365789 0.000379304 0.000392451 0.000405242 0.000417692
0.000429811 0.000441613 0.000453109 0.000464308 0.000475223
0.000485862 0.000496234 0.00050635 0.000516217 0.000525844
0.000535238 0.000544407 0 0 0
0 0 0 0 1.39692e-16
2.59125e-15 4.8588e-14 9.10865e-13 1.70168e-11 3.13236e-10
5.43628e-09 7.85296e-08 8.2954e-07 5.83545e-06 2.08142e-05
4.19381e-05 6.41947e-05 8.61887e-05 0.000107625 0.000128444
0.00014864 0.000168226 0.00018722 0.00020564 0.000223508
0.000240845 0.000257671 0.000274007 0.000289871 0.000305282
0.000320257 0.000334813 0.000348966 0.000362731 0.000376123
0.000389155 0.000401841 0.000414193 0.000426223 0.000437942
0.000449362 0.000460493 0.000471344 0.000481925 0.000492246
0.000502314 0.000512139 0.000521728 0 0
0 0 0 0 0
0 0 1.46833e-16 3.07944e-15 6.55611e-14
1.39522e-12 2.95389e-11 6.10976e-10 1.14968e-08 1.6536e-07
1.63284e-06 9.60313e-06 2.73891e-05 4.8978e-05 7.09479e-05
9.25117e-05 0.000113504 0.000133891 0.000153676 0.000172871
0.000191495 0.000209567 0.000227106 0.000244134 0.000260669
0.00027673 0.000292336 0.000307504 0.00032225 0.000336591
0.000350542 0.000364117 0.00037733 0.000390193 0.000402721
0.000414924 0.000426814 0.000438402 0.000449698 0.000460712
0.000471454 0.000481933 0.000492158 0.000502136 0
0 0 0 0 0
0 0 0 0 1.83531e-17
3.57349e-16 8.27933e-15 1.9332e-13 4.5055e-12 1.03896e-10
2.28244e-09 4.18063e-08 5.22959e-07 4.24949e-06 1.74989e-05
3.77903e-05 5.95567e-05 8.11601e-05 0.000102256 0.00012277
0.000142693 0.000162031 0.000180801 0.000199021 0.00021671
0.000233887 0.000250571 0.000266781 0.000282535 0.00029785
0.000312742 0.000327228 0.000341323 0.00035504 0.000368394
0.000381397 0.000394063 0.000406403 0.000418428 0.00043015
0.000441578 0.000452723 0.000463594 0.000474201 0.000484552
DataSetFinish
DataSetStart
DataSetName, idvglin
MeasurementType, DC
BatchName, opt_ex09
WaferName, wafer1
DieName, x0y0
DeviceName, n10_1
Temperature, -40
FabDate, 11 May 2010
UserDate, 11 May 2010
WaferDiameter, 0.2
DieLayout, FOUR_CROSSING
DieSize, 0.02, 0.02
DieType, PARTIAL
Attribute, W, 1e-05
Attribute, L, 1e-06
NodeNames, d g s b
Sweep, 1, V, G, LIN, 0, 5, 0.1, CALCULATED, 0.1, 0
Sweep, 2, V, B, LIN, 0, -3, CALCULATED, 5, 0.1, 0
Constant, V, S, 0, 0.1, 0
Constant, V, D, 0.1, 0.1, 0
Target, I, D
Function, gm, derivative (VG, ID)
Plot, idvg, XY (LIN LIN), vg, id
Plot, gm, XY (LIN LIN), vg, gm
DataArray, ID
1.49266e-17 1.66475e-16 1.87752e-15 2.11942e-14 2.39199e-13
2.69695e-12 3.03072e-11 3.36901e-10 3.62131e-09 3.57045e-08
3.06805e-07 2.20105e-06 9.96511e-06 2.48411e-05 4.23212e-05
6.00277e-05 7.73984e-05 9.43289e-05 0.000110808 0.000126842
0.000142442 0.000157618 0.000172384 0.000186753 0.000200737
0.00021435 0.000227604 0.000240511 0.000253084 0.000265333
0.00027727 0.000288905 0.000300249 0.000311311 0.000322101
0.000332627 0.000342898 0.000352922 0.000362708 0.000372262
0.000381592 0.000390705 0.000399608 0.000408306 0.000416807
0.000425116 0.000433238 0.00044118 0.000448946 0.000456542
0.000463972 0 0 0 0
3.04873e-17 4.80506e-16 7.78625e-15 1.26352e-13 2.04806e-12
3.30336e-11 5.22597e-10 7.71471e-09 9.47856e-08 8.9369e-07
5.60173e-06 1.79909e-05 3.45121e-05 5.17628e-05 6.88373e-05
8.55395e-05 0.000101827 0.000117692 0.000133141 0.000148181
0.000162824 0.000177081 0.000190965 0.000204487 0.00021766
0.000230495 0.000243003 0.000255196 0.000267085 0.000278678
0.000289986 0.000301019 0.000311784 0.000322291 0.000332549
0.000342564 0.000352344 0.000361898 0.000371231 0.000380351
0.000389263 0.000397975 0.000406492 0.000414819 0.000422963
0.000430929 0.000438721 0 0 0
0 0 0 0 1.18595e-16
2.3305e-15 4.63858e-14 9.22926e-13 1.82814e-11 3.55106e-10
6.37939e-09 9.11481e-08 9.24691e-07 5.90942e-06 1.85852e-05
3.4964e-05 5.19259e-05 6.86974e-05 8.51092e-05 0.000101122
0.000116729 0.000131933 0.000146743 0.00016117 0.000175224
0.000188917 0.00020226 0.000215266 0.000227944 0.000240306
0.000252361 0.000264121 0.000275595 0.000286791 0.00029772
0.000308388 0.000318806 0.000328979 0.000338917 0.000348626
0.000358113 0.000367385 0.000376448 0.000385309 0.000393973
0.000402447 0.000410735 0.000418843 0 0
0 0 0 0 0
0 0 1.11953e-16 2.50399e-15 5.71325e-14
1.30295e-12 2.95229e-11 6.49178e-10 1.26364e-08 1.78487e-07
1.68789e-06 8.99159e-06 2.32934e-05 3.98317e-05 5.65578e-05
7.3019e-05 8.91135e-05 0.000104817 0.000120126 0.000135047
0.000149587 0.000163758 0.000177568 0.000191031 0.000204156
0.000216955 0.000229438 0.000241615 0.000253496 0.00026509
0.000276408 0.000287456 0.000298245 0.000308782 0.000319075
0.000329131 0.000338957 0.000348561 0.00035795 0.000367129
0.000376104 0.000384882 0.000393469 0.00040187 0
0 0 0 0 0
0 0 0 0 1.31641e-17
2.54764e-16 6.35377e-15 1.60234e-13 4.03208e-12 1.0014e-10
2.3389e-09 4.35806e-08 5.3055e-07 4.07837e-06 1.52255e-05
3.09504e-05 4.75258e-05 6.39852e-05 8.0121e-05 9.58836e-05
0.000111262 0.000126257 0.000140877 0.00015513 0.000169025
0.000182575 0.000195788 0.000208677 0.00022125 0.000233519
0.000245492 0.00025718 0.000268591 0.000279733 0.000290616
0.000301246 0.000311633 0.000321783 0.000331703 0.000341401
0.000350882 0.000360154 0.000369223 0.000378093 0.000386771
DataSetFinish
DataSetStart
DataSetName, idvglin
MeasurementType, DC
BatchName, opt_ex09
WaferName, wafer1
DieName, x0y0
DeviceName, n10_10
Temperature, -40
FabDate, 11 May 2010
UserDate, 11 May 2010
WaferDiameter, 0.2
DieLayout, FOUR_CROSSING
DieSize, 0.02, 0.02
DieType, PARTIAL
Attribute, W, 1e-05
Attribute, L, 1e-05
NodeNames, d g s b
Sweep, 1, V, G, LIN, 0, 5, 0.1, CALCULATED, 0.1, 0
Sweep, 2, V, B, LIN, 0, -3, CALCULATED, 5, 0.1, 0
Constant, V, S, 0, 0.1, 0
Constant, V, D, 0.1, 0.1, 0
Target, I, D
Function, gm, derivative (VG, ID)
Plot, idvg, XY (LIN LIN), vg, id
Plot, gm, XY (LIN LIN), vg, gm
DataArray, ID
4.62236e-17 5.37589e-16 6.2738e-15 7.31936e-14 8.52117e-13
9.84927e-12 1.11225e-10 1.17533e-09 1.08973e-08 8.69328e-08
4.94517e-07 1.55251e-06 3.00227e-06 4.54342e-06 6.08981e-06
7.62244e-06 9.13687e-06 1.06317e-05 1.21064e-05 1.35606e-05
1.49943e-05 1.64074e-05 1.78001e-05 1.91725e-05 2.05248e-05
2.18574e-05 2.31704e-05 2.4464e-05 2.57387e-05 2.69946e-05
2.82321e-05 2.94513e-05 3.06526e-05 3.18363e-05 3.30025e-05
3.41516e-05 3.52839e-05 3.63995e-05 3.74988e-05 3.8582e-05
3.96494e-05 4.07011e-05 4.17374e-05 4.27586e-05 4.37649e-05
4.47565e-05 4.57337e-05 4.66966e-05 4.76455e-05 4.85806e-05
4.95021e-05 0 0 0 0
9.33039e-17 1.5994e-15 2.76512e-14 4.77179e-13 8.15626e-12
1.34255e-10 1.94998e-09 2.19689e-08 1.8221e-07 8.66176e-07
2.13458e-06 3.6002e-06 5.09943e-06 6.5942e-06 8.0749e-06
9.53839e-06 1.09834e-05 1.24092e-05 1.38157e-05 1.52027e-05
1.65703e-05 1.79187e-05 1.9248e-05 2.05585e-05 2.18503e-05
2.31236e-05 2.43788e-05 2.56161e-05 2.68358e-05 2.8038e-05
2.9223e-05 3.03911e-05 3.15425e-05 3.26775e-05 3.37964e-05
3.48992e-05 3.59864e-05 3.7058e-05 3.81144e-05 3.91558e-05
4.01824e-05 4.11943e-05 4.21919e-05 4.31754e-05 4.41448e-05
4.51005e-05 4.60427e-05 0 0 0
0 0 0 1.64035e-17 3.22377e-16
6.99304e-15 1.52175e-13 3.2871e-12 6.86292e-11 1.25594e-09
1.67253e-08 1.53218e-07 7.93237e-07 2.02809e-06 3.46246e-06
4.93103e-06 6.39618e-06 7.84829e-06 9.28414e-06 1.07024e-05
1.21023e-05 1.34838e-05 1.48466e-05 1.6191e-05 1.75169e-05
1.88245e-05 2.01141e-05 2.13858e-05 2.26399e-05 2.38765e-05
2.50959e-05 2.62984e-05 2.74841e-05 2.86533e-05 2.98063e-05
3.09432e-05 3.20643e-05 3.31697e-05 3.42598e-05 3.53348e-05
3.63948e-05 3.744e-05 3.84708e-05 3.94872e-05 4.04895e-05
4.14779e-05 4.24526e-05 4.34138e-05 0 0
0 0 0 0 0
0 1.20144e-17 2.47262e-16 6.26629e-15 1.59959e-13
4.045e-12 9.76093e-11 1.95619e-09 2.61129e-08 2.27317e-07
1.02213e-06 2.31874e-06 3.74716e-06 5.19423e-06 6.63468e-06
8.06161e-06 9.47251e-06 1.08663e-05 1.22424e-05 1.36008e-05
1.49412e-05 1.62638e-05 1.75687e-05 1.88561e-05 2.01261e-05
2.13789e-05 2.26147e-05 2.38338e-05 2.50363e-05 2.62225e-05
2.73925e-05 2.85466e-05 2.9685e-05 3.08079e-05 3.19156e-05
3.30081e-05 3.40859e-05 3.51489e-05 3.61975e-05 3.72318e-05
3.82521e-05 3.92585e-05 4.02512e-05 4.12305e-05 0
0 0 0 0 0
0 0 0 0 1.95486e-17
4.75286e-16 1.36266e-14 3.91809e-13 1.10679e-11 2.86429e-10
5.44489e-09 6.39067e-08 4.56926e-07 1.51067e-06 2.87495e-06
4.30006e-06 5.72857e-06 7.14699e-06 8.55108e-06 9.93917e-06
1.13105e-05 1.26646e-05 1.40015e-05 1.53212e-05 1.66236e-05
1.7909e-05 1.91774e-05 2.04291e-05 2.16643e-05 2.2883e-05
2.40856e-05 2.52722e-05 2.6443e-05 2.75982e-05 2.8738e-05
2.98627e-05 3.09724e-05 3.20673e-05 3.31476e-05 3.42135e-05
3.52652e-05 3.63028e-05 3.73267e-05 3.83369e-05 3.93337e-05
DataSetFinish
DataSetStart
DataSetName, idvglin
MeasurementType, DC
BatchName, opt_ex09
WaferName, wafer1
DieName, x0y0
DeviceName, n10_2
Temperature, -40
FabDate, 11 May 2010
UserDate, 11 May 2010
WaferDiameter, 0.2
DieLayout, FOUR_CROSSING
DieSize, 0.02, 0.02
DieType, PARTIAL
Attribute, W, 1e-05
Attribute, L, 2e-06
NodeNames, d g s b
Sweep, 1, V, G, LIN, 0, 5, 0.1, CALCULATED, 0.1, 0
Sweep, 2, V, B, LIN, 0, -3, CALCULATED, 5, 0.1, 0
Constant, V, S, 0, 0.1, 0
Constant, V, D, 0.1, 0.1, 0
Target, I, D
Function, gm, derivative (VG, ID)
Plot, idvg, XY (LIN LIN), vg, id
Plot, gm, XY (LIN LIN), vg, gm
DataArray, ID
3.47705e-17 4.02998e-16 4.69308e-15 5.46631e-14 6.36224e-13
7.38559e-12 8.4984e-11 9.5077e-10 9.8469e-09 8.88148e-08
6.80082e-07 3.48496e-06 9.73807e-06 1.76214e-05 2.57954e-05
3.39145e-05 4.19057e-05 4.97535e-05 5.74545e-05 6.50085e-05
7.24162e-05 7.96796e-05 8.68008e-05 9.37825e-05 0.000100627
0.000107339 0.000113919 0.000120371 0.000126699 0.000132904
0.00013899 0.00014496 0.000150815 0.00015656 0.000162196
0.000167726 0.000173153 0.000178478 0.000183704 0.000188833
0.000193868 0.000198811 0.000203663 0.000208427 0.000213104
0.000217697 0.000222207 0.000226637 0.000230987 0.00023526
0.000239457 0 0 0 0
5.49634e-17 9.3054e-16 1.59967e-14 2.75038e-13 4.7146e-12
7.98105e-11 1.28756e-09 1.78784e-08 1.89972e-07 1.44012e-06
5.89345e-06 1.30319e-05 2.0892e-05 2.88156e-05 3.66532e-05
4.43675e-05 5.19472e-05 5.93887e-05 6.66912e-05 7.38557e-05
8.0884e-05 8.77784e-05 9.45414e-05 0.000101176 0.000107684
0.000114069 0.000120333 0.000126479 0.00013251 0.000138428
0.000144237 0.000149937 0.000155533 0.000161025 0.000166417
0.000171711 0.000176909 0.000182012 0.000187024 0.000191946
0.000196779 0.000201527 0.00020619 0.000210771 0.000215272
0.000219693 0.000224037 0 0 0
0 0 0 0 1.69302e-16
3.62148e-15 7.81414e-14 1.68295e-12 3.58692e-11 7.30227e-10
1.25898e-08 1.53967e-07 1.27405e-06 5.55611e-06 1.25508e-05
2.02594e-05 2.80335e-05 3.57281e-05 4.33059e-05 5.07552e-05
5.80718e-05 6.52552e-05 7.2306e-05 7.92258e-05 8.60169e-05
9.26814e-05 9.92219e-05 0.000105641 0.000111941 0.000118125
0.000124195 0.000130153 0.000136003 0.000141746 0.000147385
0.000152923 0.00015836 0.0001637 0.000168945 0.000174097
0.000179157 0.000184128 0.000189011 0.000193809 0.000198523
0.000203155 0.000207707 0.00021218 0 0
0 0 0 0 0
0 0 1.24107e-16 3.07368e-15 7.7492e-14
1.94958e-12 4.8366e-11 1.12398e-09 2.06375e-08 2.47818e-07
1.89118e-06 7.01264e-06 1.42252e-05 2.18705e-05 2.95214e-05
3.7082e-05 4.45259e-05 5.18443e-05 5.90343e-05 6.60954e-05
7.30287e-05 7.98358e-05 8.65187e-05 9.30796e-05 9.9521e-05
0.000105845 0.000112055 0.000118152 0.000124139 0.000130019
0.000135793 0.000141464 0.000147035 0.000152507 0.000157882
0.000163163 0.000168351 0.000173449 0.000178458 0.00018338
0.000188217 0.000192971 0.000197644 0.000202237 0
0 0 0 0 0
0 0 0 0 1.12703e-17
2.32157e-16 6.49757e-15 1.84037e-13 5.18829e-12 1.42421e-10
3.45592e-09 5.78477e-08 6.04888e-07 3.59141e-06 9.8855e-06
1.73104e-05 2.48955e-05 3.24293e-05 3.98609e-05 4.71745e-05
5.43645e-05 6.14295e-05 6.83696e-05 7.51861e-05 8.18807e-05
8.84554e-05 9.49123e-05 0.000101254 0.000107482 0.0001136
0.000119609 0.000125512 0.00013131 0.000137007 0.000142604
0.000148103 0.000153507 0.000158817 0.000164036 0.000169164
0.000174205 0.00017916 0.00018403 0.000188818 0.000193524
DataSetFinish
DataSetStart
DataSetName, idvglin
MeasurementType, DC
BatchName, opt_ex09
WaferName, wafer1
DieName, x0y0
DeviceName, n10_5
Temperature, -40
FabDate, 11 May 2010
UserDate, 11 May 2010
WaferDiameter, 0.2
DieLayout, FOUR_CROSSING
DieSize, 0.02, 0.02
DieType, PARTIAL
Attribute, W, 1e-05
Attribute, L, 5e-06
NodeNames, d g s b
Sweep, 1, V, G, LIN, 0, 5, 0.1, CALCULATED, 0.1, 0
Sweep, 2, V, B, LIN, 0, -3, CALCULATED, 5, 0.1, 0
Constant, V, S, 0, 0.1, 0
Constant, V, D, 0.1, 0.1, 0
Target, I, D
Function, gm, derivative (VG, ID)
Plot, idvg, XY (LIN LIN), vg, id
Plot, gm, XY (LIN LIN), vg, gm
DataArray, ID
5.73065e-17 6.67008e-16 7.78512e-15 9.0844e-14 1.05832e-12
1.22604e-11 1.3945e-10 1.50198e-09 1.43541e-08 1.18491e-07
7.42148e-07 2.63295e-06 5.48629e-06 8.5977e-06 1.17329e-05
1.48395e-05 1.7906e-05 2.09292e-05 2.39079e-05 2.68415e-05
2.973e-05 3.25735e-05 3.53725e-05 3.81273e-05 4.08386e-05
4.3507e-05 4.61331e-05 4.87177e-05 5.12613e-05 5.37647e-05
5.62285e-05 5.86535e-05 6.10402e-05 6.33893e-05 6.57015e-05
6.79774e-05 7.02176e-05 7.24228e-05 7.45936e-05 7.67305e-05
7.88341e-05 8.0905e-05 8.29437e-05 8.49509e-05 8.6927e-05
8.88726e-05 9.07882e-05 9.26742e-05 9.45312e-05 9.63598e-05
9.81602e-05 0 0 0 0
1.06123e-16 1.82134e-15 3.14961e-14 5.43958e-13 9.32759e-12
1.5544e-10 2.34354e-09 2.79869e-08 2.49793e-07 1.36144e-06
3.76534e-06 6.7023e-06 9.73853e-06 1.27696e-05 1.57704e-05
1.87332e-05 2.16552e-05 2.45349e-05 2.73721e-05 3.01666e-05
3.29187e-05 3.56288e-05 3.82973e-05 4.09249e-05 4.35121e-05
4.60595e-05 4.85677e-05 5.10373e-05 5.3469e-05 5.58634e-05
5.82211e-05 6.05427e-05 6.28288e-05 6.508e-05 6.72968e-05
6.94799e-05 7.16298e-05 7.3747e-05 7.58322e-05 7.78857e-05
7.99082e-05 8.19002e-05 8.38621e-05 8.57945e-05 8.76978e-05
8.95725e-05 9.14192e-05 0 0 0
0 0 0 1.76039e-17 3.48557e-16
7.56455e-15 1.64705e-13 3.56711e-12 7.5345e-11 1.43747e-09
2.06893e-08 2.05349e-07 1.22702e-06 3.5576e-06 6.4313e-06
9.40586e-06 1.23776e-05 1.53212e-05 1.8229e-05 2.10979e-05
2.39265e-05 2.67143e-05 2.94613e-05 3.21677e-05 3.48339e-05
3.74602e-05 4.00472e-05 4.25955e-05 4.51055e-05 4.75779e-05
5.00133e-05 5.24121e-05 5.47751e-05 5.71027e-05 5.93955e-05
6.16541e-05 6.3879e-05 6.60708e-05 6.82299e-05 7.0357e-05
7.24526e-05 7.45171e-05 7.6551e-05 7.85549e-05 8.05292e-05
8.24744e-05 8.43909e-05 8.62792e-05 0 0
0 0 0 0 0
0 1.24269e-17 2.57813e-16 6.53682e-15 1.66975e-13
4.23693e-12 1.03918e-10 2.20766e-09 3.23444e-08 3.09287e-07
1.63075e-06 4.13645e-06 7.01255e-06 9.94626e-06 1.28683e-05
1.57609e-05 1.86181e-05 2.14374e-05 2.42178e-05 2.69589e-05
2.96607e-05 3.23234e-05 3.49474e-05 3.75331e-05 4.00809e-05
4.25915e-05 4.50653e-05 4.75028e-05 4.99045e-05 5.22712e-05
5.46031e-05 5.6901e-05 5.91652e-05 6.13964e-05 6.35951e-05
6.57617e-05 6.78968e-05 7.00008e-05 7.20742e-05 7.41176e-05
7.61313e-05 7.81159e-05 8.00718e-05 8.19994e-05 0
0 0 0 0 0
0 0 0 0 1.97889e-17
4.82199e-16 1.3828e-14 3.98058e-13 1.13166e-11 3.01872e-10
6.27591e-09 8.10081e-08 6.56086e-07 2.54785e-06 5.25441e-06
8.13736e-06 1.10356e-05 1.39127e-05 1.67583e-05 1.95685e-05
2.23415e-05 2.50766e-05 2.77737e-05 3.04328e-05 3.30542e-05
3.56382e-05 3.81853e-05 4.06959e-05 4.31705e-05 4.56096e-05
4.80137e-05 5.03833e-05 5.27189e-05 5.5021e-05 5.72901e-05
5.95267e-05 6.17314e-05 6.39045e-05 6.60465e-05 6.8158e-05
7.02394e-05 7.22911e-05 7.43137e-05 7.63074e-05 7.82729e-05
DataSetFinish
DataSetStart
DataSetName, idvglin
MeasurementType, DC
BatchName, opt_ex09
WaferName, wafer1
DieName, x0y0
DeviceName, n2_0p5
Temperature, -40
FabDate, 11 May 2010
UserDate, 11 May 2010
WaferDiameter, 0.2
DieLayout, FOUR_CROSSING
DieSize, 0.02, 0.02
DieType, PARTIAL
Attribute, W, 2e-06
Attribute, L, 5e-07
NodeNames, d g s b
Sweep, 1, V, G, LIN, 0, 5, 0.1, CALCULATED, 0.1, 0
Sweep, 2, V, B, LIN, 0, -3, CALCULATED, 5, 0.1, 0
Constant, V, S, 0, 0.1, 0
Constant, V, D, 0.1, 0.1, 0
Target, I, D
Function, gm, derivative (VG, ID)
Plot, idvg, XY (LIN LIN), vg, id
Plot, gm, XY (LIN LIN), vg, gm
DataArray, ID
0 0 1.16545e-17 1.1253e-16 1.10176e-15
1.08018e-14 1.05895e-13 1.03745e-12 1.01427e-11 9.85219e-11
9.38821e-10 8.50109e-09 6.97038e-08 5.07769e-07 2.80733e-06
8.86828e-06 1.71791e-05 2.57136e-05 3.38662e-05 4.15505e-05
4.87881e-05 5.56143e-05 6.20618e-05 6.816e-05 7.3935e-05
7.94108e-05 8.46089e-05 8.95492e-05 9.42497e-05 9.87268e-05
0.000102996 0.00010707 0.000110963 0.000114685 0.000118247
0.000121659 0.00012493 0.000128069 0.000131082 0.000133978
0.000136762 0.00013944 0.000142019 0.000144504 0.000146898
0.000149208 0.000151437 0.00015359 0.000155669 0.000157678
0.000159622 0 0 0 0
0 0 2.43355e-17 3.10976e-16 4.11078e-15
5.44709e-14 7.21363e-13 9.52641e-12 1.2455e-10 1.57365e-09
1.80121e-08 1.71536e-07 1.26961e-06 5.53452e-06 1.30548e-05
2.14273e-05 2.95985e-05 3.73567e-05 4.4687e-05 5.16114e-05
5.81571e-05 6.43513e-05 7.02192e-05 7.57845e-05 8.10688e-05
8.60919e-05 9.08721e-05 9.54259e-05 9.97685e-05 0.000103914
0.000107875 0.000111663 0.000115288 0.000118762 0.000122092
0.000125288 0.000128356 0.000131305 0.000134141 0.000136869
0.000139496 0.000142027 0.000144468 0.000146821 0.000149093
0.000151287 0.000153406 0 0 0
0 0 0 0 0
0 6.93971e-17 1.06009e-15 1.65464e-14 2.58482e-13
4.0294e-12 6.22749e-11 9.31898e-10 1.25579e-08 1.35408e-07
1.08595e-06 5.04975e-06 1.23563e-05 2.06058e-05 2.86925e-05
3.63897e-05 4.36738e-05 5.05619e-05 5.70789e-05 6.32501e-05
6.90999e-05 7.46511e-05 7.99248e-05 8.49404e-05 8.97157e-05
9.42669e-05 9.86089e-05 0.000102755 0.000106719 0.000110511
0.000114142 0.000117621 0.000120959 0.000124162 0.000127239
0.000130197 0.000133042 0.00013578 0.000138417 0.000140959
0.00014341 0.000145774 0.000148057 0 0
0 0 0 0 0
0 0 0 0 4.86944e-17
8.08367e-16 1.40453e-14 2.44544e-13 4.24743e-12 7.2994e-11
1.20326e-09 1.73002e-08 1.89294e-07 1.45322e-06 6.05735e-06
1.36063e-05 2.17812e-05 2.97313e-05 3.7294e-05 4.44559e-05
5.12342e-05 5.76525e-05 6.37349e-05 6.95049e-05 7.49842e-05
8.01933e-05 8.51507e-05 8.98734e-05 9.43773e-05 9.86766e-05
0.000102785 0.000106713 0.000110474 0.000114076 0.00011753
0.000120845 0.000124027 0.000127086 0.000130027 0.000132857
0.000135582 0.000138207 0.000140738 0.000143179 0
0 0 0 0 0
0 0 0 0 0
0 0 7.0713e-17 1.27588e-15 2.3989e-14
4.51635e-13 8.46956e-12 1.56134e-10 2.6906e-09 3.78671e-08
3.84189e-07 2.50285e-06 8.30024e-06 1.6174e-05 2.42487e-05
3.20209e-05 3.94043e-05 4.6399e-05 5.30239e-05 5.9302e-05
6.52565e-05 7.09097e-05 7.62824e-05 8.1394e-05 8.62622e-05
9.09033e-05 9.53323e-05 9.95629e-05 0.000103608 0.000107478
0.000111185 0.000114739 0.000118147 0.00012142 0.000124564
0.000127586 0.000130494 0.000133294 0.00013599 0.000138589
DataSetFinish
DataSetStart
DataSetName, idvglin
MeasurementType, DC
BatchName, opt_ex09
WaferName, wafer1
DieName, x0y0
DeviceName, n2_10
Temperature, -40
FabDate, 11 May 2010
UserDate, 11 May 2010
WaferDiameter, 0.2
DieLayout, FOUR_CROSSING
DieSize, 0.02, 0.02
DieType, PARTIAL
Attribute, W, 2e-06
Attribute, L, 1e-05
NodeNames, d g s b
Sweep, 1, V, G, LIN, 0, 5, 0.1, CALCULATED, 0.1, 0
Sweep, 2, V, B, LIN, 0, -3, CALCULATED, 5, 0.1, 0
Constant, V, S, 0, 0.1, 0
Constant, V, D, 0.1, 0.1, 0
Target, I, D
Function, gm, derivative (VG, ID)
Plot, idvg, XY (LIN LIN), vg, id
Plot, gm, XY (LIN LIN), vg, gm
DataArray, ID
0 2.2425e-17 2.59696e-16 3.02915e-15 3.53201e-14
4.10467e-13 4.7167e-12 5.2316e-11 5.29576e-10 4.64823e-09
3.39749e-08 1.56683e-07 3.98868e-07 6.89377e-07 9.88581e-07
1.28685e-06 1.58205e-06 1.87365e-06 2.16145e-06 2.44535e-06
2.72531e-06 3.00131e-06 3.27337e-06 3.54151e-06 3.80578e-06
4.0662e-06 4.32282e-06 4.5757e-06 4.82489e-06 5.07044e-06
5.31239e-06 5.5508e-06 5.78573e-06 6.01723e-06 6.24534e-06
6.47012e-06 6.69161e-06 6.90988e-06 7.12496e-06 7.33691e-06
7.54578e-06 7.7516e-06 7.95443e-06 8.15431e-06 8.35129e-06
8.54541e-06 8.73671e-06 8.92524e-06 9.11104e-06 9.29415e-06
9.47461e-06 0 0 0 0
0 4.61277e-17 7.82799e-16 1.35195e-14 2.32876e-13
3.95131e-12 6.33015e-11 8.55607e-10 8.79361e-09 6.30966e-08
2.3867e-07 5.02898e-07 7.89997e-07 1.08e-06 1.36831e-06
1.65366e-06 1.93561e-06 2.21395e-06 2.48859e-06 2.7595e-06
3.02668e-06 3.29013e-06 3.54989e-06 3.806e-06 4.05848e-06
4.3074e-06 4.55278e-06 4.79469e-06 5.03316e-06 5.26824e-06
5.49999e-06 5.72844e-06 5.95365e-06 6.17567e-06 6.39453e-06
6.6103e-06 6.823e-06 7.03269e-06 7.23941e-06 7.4432e-06
7.64411e-06 7.84217e-06 8.03744e-06 8.22995e-06 8.41974e-06
8.60686e-06 8.79133e-06 0 0 0
0 0 0 0 0
1.47883e-16 3.18799e-15 6.92775e-14 1.48884e-12 3.04165e-11
5.1905e-10 6.22951e-09 5.04199e-08 2.12115e-07 4.68049e-07
7.48732e-07 1.03285e-06 1.31556e-06 1.59552e-06 1.87227e-06
2.14558e-06 2.41536e-06 2.68158e-06 2.94423e-06 3.20331e-06
3.45886e-06 3.71091e-06 3.95949e-06 4.20464e-06 4.44641e-06
4.68484e-06 4.91997e-06 5.15184e-06 5.38051e-06 5.60601e-06
5.82839e-06 6.04769e-06 6.26396e-06 6.47723e-06 6.68755e-06
6.89497e-06 7.09951e-06 7.30123e-06 7.50017e-06 7.69635e-06
7.88983e-06 8.08063e-06 8.26881e-06 0 0
0 0 0 0 0
0 0 0 1.02542e-16 2.5629e-15
6.53166e-14 1.64286e-12 3.86916e-11 7.18011e-10 8.68564e-09
6.70631e-08 2.51312e-07 5.12169e-07 7.90084e-07 1.06977e-06
1.34771e-06 1.62289e-06 1.89493e-06 2.16364e-06 2.42895e-06
2.69082e-06 2.94926e-06 3.20427e-06 3.45588e-06 3.70413e-06
3.94904e-06 4.19065e-06 4.42901e-06 4.66414e-06 4.89611e-06
5.12493e-06 5.35066e-06 5.57334e-06 5.793e-06 6.00969e-06
6.22345e-06 6.43432e-06 6.64233e-06 6.84753e-06 7.04995e-06
7.24964e-06 7.44662e-06 7.64094e-06 7.83264e-06 0
0 0 0 0 0
0 0 0 0 0
0 1.72499e-16 4.88747e-15 1.40269e-13 3.93253e-12
9.84063e-11 1.71954e-09 1.86648e-08 1.17689e-07 3.39763e-07
6.07632e-07 8.83651e-07 1.15952e-06 1.43321e-06 1.70406e-06
1.97178e-06 2.23626e-06 2.49743e-06 2.75528e-06 3.00981e-06
3.26104e-06 3.50899e-06 3.75369e-06 3.99517e-06 4.23347e-06
4.46863e-06 4.70068e-06 4.92966e-06 5.15561e-06 5.37857e-06
5.59858e-06 5.81567e-06 6.02989e-06 6.24127e-06 6.44984e-06
6.65565e-06 6.85873e-06 7.05912e-06 7.25685e-06 7.45196e-06
DataSetFinish
DataSetStart
DataSetName, idvglin
MeasurementType, DC
BatchName, opt_ex09
WaferName, wafer1
DieName, x0y0
DeviceName, n5_10
Temperature, -40
FabDate, 11 May 2010
UserDate, 11 May 2010
WaferDiameter, 0.2
DieLayout, FOUR_CROSSING
DieSize, 0.02, 0.02
DieType, PARTIAL
Attribute, W, 5e-06
Attribute, L, 1e-05
NodeNames, d g s b
Sweep, 1, V, G, LIN, 0, 5, 0.1, CALCULATED, 0.1, 0
Sweep, 2, V, B, LIN, 0, -3, CALCULATED, 5, 0.1, 0
Constant, V, S, 0, 0.1, 0
Constant, V, D, 0.1, 0.1, 0
Target, I, D
Function, gm, derivative (VG, ID)
Plot, idvg, XY (LIN LIN), vg, id
Plot, gm, XY (LIN LIN), vg, gm
DataArray, ID
1.0809e-17 1.24078e-16 1.44649e-15 1.68787e-14 1.96687e-13
2.2807e-12 2.60185e-11 2.82585e-10 2.7414e-09 2.30049e-08
1.50883e-07 5.73403e-07 1.25283e-06 2.00891e-06 2.77496e-06
3.53585e-06 4.28819e-06 5.03102e-06 5.76397e-06 6.48686e-06
7.19961e-06 7.9022e-06 8.59468e-06 9.27713e-06 9.94965e-06
1.06123e-05 1.12653e-05 1.19088e-05 1.25428e-05 1.31675e-05
1.3783e-05 1.43895e-05 1.4987e-05 1.55759e-05 1.61561e-05
1.67277e-05 1.72911e-05 1.78461e-05 1.83931e-05 1.8932e-05
1.94631e-05 1.99864e-05 2.05021e-05 2.10103e-05 2.15111e-05
2.20045e-05 2.24908e-05 2.29701e-05 2.34423e-05 2.39077e-05
2.43664e-05 0 0 0 0
1.8577e-17 3.06057e-16 5.28021e-15 9.12149e-14 1.56653e-12
2.62631e-11 4.03727e-10 4.99417e-09 4.64799e-08 2.75454e-07
8.27551e-07 1.53499e-06 2.27471e-06 3.01585e-06 3.75106e-06
4.47815e-06 5.19627e-06 5.90502e-06 6.60424e-06 7.29385e-06
7.97389e-06 8.6444e-06 9.30545e-06 9.95715e-06 1.05996e-05
1.12329e-05 1.18573e-05 1.24727e-05 1.30793e-05 1.36774e-05
1.42668e-05 1.48479e-05 1.54208e-05 1.59854e-05 1.6542e-05
1.70907e-05 1.76317e-05 1.81649e-05 1.86905e-05 1.92087e-05
1.97195e-05 2.02231e-05 2.07195e-05 2.12089e-05 2.16914e-05
2.2167e-05 2.26359e-05 0 0 0
0 0 0 0 5.442e-17
1.15131e-15 2.50463e-14 5.43207e-13 1.15478e-11 2.25766e-10
3.42882e-09 3.60015e-08 2.37775e-07 7.65347e-07 1.4556e-06
2.17971e-06 2.90601e-06 3.62697e-06 4.34032e-06 5.04515e-06
5.74105e-06 6.42785e-06 7.10548e-06 7.77395e-06 8.4333e-06
9.0836e-06 9.72495e-06 1.03574e-05 1.09812e-05 1.15963e-05
1.22028e-05 1.2801e-05 1.33908e-05 1.39724e-05 1.4546e-05
1.51116e-05 1.56693e-05 1.62193e-05 1.67617e-05 1.72965e-05
1.78239e-05 1.8344e-05 1.88569e-05 1.93627e-05 1.98615e-05
2.03534e-05 2.08384e-05 2.13168e-05 0 0
0 0 0 0 0
0 0 3.76841e-17 9.04162e-16 2.30548e-14
5.86226e-13 1.45249e-11 3.20952e-10 5.07801e-09 5.22899e-08
3.14166e-07 8.89304e-07 1.58269e-06 2.29748e-06 3.01188e-06
3.72048e-06 4.42151e-06 5.11426e-06 5.79837e-06 6.47371e-06
7.14022e-06 7.79792e-06 8.44686e-06 9.0871e-06 9.71874e-06
1.03418e-05 1.09565e-05 1.15629e-05 1.21611e-05 1.27511e-05
1.33332e-05 1.39073e-05 1.44736e-05 1.50323e-05 1.55834e-05
1.6127e-05 1.66632e-05 1.71921e-05 1.77139e-05 1.82286e-05
1.87363e-05 1.92371e-05 1.97311e-05 2.02184e-05 0
0 0 0 0 0
0 0 0 0 0
6.3191e-17 1.73508e-15 4.99146e-14 1.42527e-12 3.88343e-11
8.6769e-10 1.23181e-08 1.10816e-07 5.05601e-07 1.1432e-06
1.84203e-06 2.54923e-06 3.25316e-06 3.95062e-06 4.64044e-06
5.32209e-06 5.99533e-06 6.66007e-06 7.31628e-06 7.96398e-06
8.60323e-06 9.2341e-06 9.85666e-06 1.0471e-05 1.10772e-05
1.16754e-05 1.22657e-05 1.28481e-05 1.34228e-05 1.39899e-05
1.45494e-05 1.51015e-05 1.56463e-05 1.61838e-05 1.67141e-05
1.72374e-05 1.77538e-05 1.82633e-05 1.8766e-05 1.9262e-05
DataSetFinish
DataSetStart
DataSetName, idvgsat
MeasurementType, DC
BatchName, opt_ex09
WaferName, wafer1
DieName, x0y0
DeviceName, n10_0p5
Temperature, -40
FabDate, 11 May 2010
UserDate, 11 May 2010
WaferDiameter, 0.2
DieLayout, FOUR_CROSSING
DieSize, 0.02, 0.02
DieType, PARTIAL
Attribute, W, 1e-05
Attribute, L, 5e-07
NodeNames, d g s b
Sweep, 1, V, G, LIN, 0, 5, 0.1, CALCULATED, 0.1, 0
Sweep, 2, V, B, LIN, 0, -3, CALCULATED, 5, 0.1, 0
Constant, V, D, 5, 0.1, 0
Constant, V, S, 0, 0.1, 0
Target, I, D
Function, gm, derivative (VG, ID)
Plot, idvg, XY (LIN LIN), vg, id
Plot, gm, XY (LIN LIN), vg, gm
DataArray, ID
7.08749e-16 6.86233e-15 6.72057e-14 6.58878e-13 6.4582e-12
6.32373e-11 6.1721e-10 5.96468e-09 5.59808e-08 4.86611e-07
3.62516e-06 2.08568e-05 7.75258e-05 0.000183985 0.000324592
0.000483495 0.000652759 0.000828731 0.00100939 0.00119338
0.00137974 0.00156776 0.00175691 0.00194681 0.00213718
0.00232782 0.00251856 0.00270931 0.00289999 0.00309055
0.00328096 0.00347119 0.00366123 0.00385109 0.00404076
0.00423025 0.00441957 0.00460874 0.00479777 0.00498668
0.00517547 0.00536418 0.0055528 0.00574137 0.00592988
0.00611837 0.00630684 0.00649531 0.00668378 0.00687228
0.0070608 1.09269e-17 1.3095e-17 4.18382e-17 4.22899e-16
5.47471e-15 7.24443e-14 9.60064e-13 1.27167e-11 1.68052e-10
2.20238e-09 2.80359e-08 3.25851e-07 3.05903e-06 2.0164e-05
7.88361e-05 0.000188268 0.000331083 0.000491952 0.00066343
0.000841853 0.00102506 0.00121159 0.00140044 0.00159088
0.0017824 0.0019746 0.00216723 0.00236009 0.00255302
0.00274595 0.00293878 0.00313148 0.00332402 0.00351638
0.00370855 0.00390053 0.00409232 0.00428394 0.00447539
0.00466668 0.00485784 0.00504887 0.00523979 0.00543062
0.00562136 0.00581205 0.00600269 0.00619329 0.00638386
0.00657443 0.006765 1.15003e-17 1.15043e-17 1.15669e-17
1.25453e-17 2.78437e-17 2.67032e-16 4.00664e-15 6.24708e-14
9.76281e-13 1.52469e-11 2.37336e-10 3.64751e-09 5.34628e-08
6.75134e-07 6.2219e-06 3.57865e-05 0.000115468 0.000240603
0.000391884 0.000557689 0.000732546 0.000913489 0.00109864
0.00128672 0.00147683 0.00166831 0.00186072 0.00205372
0.00224707 0.0024406 0.00263418 0.00282772 0.00302116
0.00321447 0.00340762 0.00360059 0.00379337 0.00398598
0.0041784 0.00437066 0.00456276 0.00475472 0.00494655
0.00513826 0.00532987 0.00552139 0.00571284 0.00590423
0.00609557 0.00628689 0.00647818 1.225e-17 1.225e-17
1.22503e-17 1.22561e-17 1.23556e-17 1.40899e-17 4.43157e-17
5.71091e-16 9.75151e-15 1.69727e-13 2.95622e-12 5.14045e-11
8.87502e-10 1.48886e-08 2.24998e-07 2.57944e-06 1.89207e-05
7.74365e-05 0.000187173 0.00032983 0.000490468 0.000661932
0.000840553 0.0010241 0.00121107 0.00140042 0.00159143
0.00178354 0.0019764 0.00216971 0.00236328 0.00255697
0.00275066 0.0029443 0.00313783 0.00333122 0.00352444
0.00371749 0.00391037 0.00410307 0.00429561 0.00448798
0.00468022 0.00487232 0.0050643 0.00525617 0.00544796
0.00563966 0.0058313 0.00602289 0.00621445 1.3e-17
1.3e-17 1.3e-17 1.30001e-17 1.30012e-17 1.3022e-17
1.34147e-17 2.0817e-17 1.60367e-16 2.79111e-15 5.23819e-14
9.86938e-13 1.85782e-11 3.48019e-10 6.38577e-09 1.08021e-07
1.4286e-06 1.2158e-05 5.82119e-05 0.00015689 0.000292967
0.000449562 0.000618279 0.000794929 0.000977023 0.00116291
0.00135146 0.00154184 0.0017335 0.001926 0.00211905
0.00231243 0.00250597 0.00269957 0.00289314 0.00308662
0.00327998 0.00347318 0.00366623 0.00385911 0.00405182
0.00424437 0.00443676 0.00462901 0.00482112 0.00501311
0.00520499 0.00539678 0.00558849 0.00578012 0.00597171
DataSetFinish
DataSetStart
DataSetName, idvgsat
MeasurementType, DC
BatchName, opt_ex09
WaferName, wafer1
DieName, x0y0
DeviceName, n10_0p8
Temperature, -40
FabDate, 11 May 2010
UserDate, 11 May 2010
WaferDiameter, 0.2
DieLayout, FOUR_CROSSING
DieSize, 0.02, 0.02
DieType, PARTIAL
Attribute, W, 1e-05
Attribute, L, 8e-07
NodeNames, d g s b
Sweep, 1, V, G, LIN, 0, 5, 0.1, CALCULATED, 0.1, 0
Sweep, 2, V, B, LIN, 0, -3, CALCULATED, 5, 0.1, 0
Constant, V, D, 5, 0.1, 0
Constant, V, S, 0, 0.1, 0
Target, I, D
Function, gm, derivative (VG, ID)
Plot, idvg, XY (LIN LIN), vg, id
Plot, gm, XY (LIN LIN), vg, gm
DataArray, ID
8.12977e-17 7.91679e-16 8.57977e-15 9.39543e-14 1.02954e-12
1.12714e-11 1.22996e-10 1.32796e-09 1.38727e-08 1.32629e-07
1.06892e-06 6.62814e-06 2.6491e-05 6.7407e-05 0.000126876
0.000200367 0.000284958 0.000378853 0.000480758 0.000589625
0.000704574 0.000824863 0.000949858 0.00107902 0.0012119
0.0013481 0.00148727 0.00162913 0.00177342 0.00191993
0.00206844 0.0022188 0.00237085 0.00252446 0.00267951
0.0028359 0.00299352 0.00315229 0.00331215 0.003473
0.00363481 0.0037975 0.00396102 0.00412533 0.00429039
0.00445615 0.00462258 0.00478964 0.0049573 0.00512553
0.00529431 1.07539e-17 1.08103e-17 1.16832e-17 2.52045e-17
2.3463e-16 3.47827e-15 5.37113e-14 8.31338e-13 1.28503e-11
1.97468e-10 2.96722e-09 4.12303e-08 4.65672e-07 3.75223e-06
1.87405e-05 5.50147e-05 0.000111758 0.00018414 0.000268796
0.000363617 0.000467078 0.000577969 0.000695294 0.000818227
0.000946073 0.00107825 0.00121426 0.00135368 0.00149615
0.00164136 0.00178904 0.00193895 0.00209088 0.00224466
0.00240014 0.00255715 0.0027156 0.00287535 0.00303632
0.00319841 0.00336154 0.00352565 0.00369066 0.00385652
0.00402316 0.00419056 0.00435865 0.00452739 0.00469675
0.0048667 0.00503719 1.15e-17 1.15e-17 1.15005e-17
1.15102e-17 1.16915e-17 1.50944e-17 7.8955e-17 1.2774e-15
2.37663e-14 4.45621e-13 8.34681e-12 1.5536e-10 2.81611e-09
4.61688e-08 5.75854e-07 4.71686e-06 2.25692e-05 6.28332e-05
0.000123148 0.000198672 0.000286277 0.000383936 0.00049014
0.000603682 0.000723573 0.000848994 0.000979259 0.00111379
0.0012521 0.00139376 0.00153843 0.00168579 0.00183558
0.00198757 0.00214154 0.00229732 0.00245476 0.00261371
0.00277406 0.00293569 0.0030985 0.0032624 0.00342732
0.00359318 0.00375991 0.00392747 0.00409578 0.00426481
0.00443451 0.00460484 0.00477575 1.225e-17 1.225e-17
1.225e-17 1.225e-17 1.22504e-17 1.22581e-17 1.24222e-17
1.592e-17 9.04678e-17 1.67924e-15 3.55355e-14 7.56624e-13
1.60779e-11 3.38064e-10 6.78731e-09 1.14875e-07 1.31877e-06
9.21777e-06 3.57349e-05 8.50118e-05 0.000152372 0.000233601
0.000326106 0.00042809 0.000538163 0.000655199 0.000778273
0.000906614 0.00103958 0.00117662 0.00131728 0.00146117
0.00160793 0.00175729 0.00190898 0.00206278 0.0022185
0.00237596 0.00253503 0.00269555 0.00285742 0.00302053
0.00318477 0.00335007 0.00351635 0.00368354 0.00385157
0.00402038 0.00418993 0.00436016 0.00453104 1.3e-17
1.3e-17 1.3e-17 1.3e-17 1.3e-17 1.3e-17
1.30007e-17 1.30172e-17 1.34022e-17 2.24006e-17 2.32708e-16
5.1477e-15 1.19988e-13 2.8003e-12 6.50286e-11 1.47429e-09
3.01505e-08 4.4934e-07 4.08127e-06 2.10308e-05 6.08601e-05
0.000121211 0.000197077 0.000285274 0.000383725 0.000490878
0.000605494 0.000726561 0.000853241 0.000984835 0.00112075
0.0012605 0.00140364 0.00154983 0.00169873 0.00185009
0.00200366 0.00215924 0.00231664 0.00247571 0.00263629
0.00279827 0.00296154 0.00312598 0.00329151 0.00345806
0.00362554 0.00379388 0.00396303 0.00413294 0.00430354
DataSetFinish
DataSetStart
DataSetName, idvgsat
MeasurementType, DC
BatchName, opt_ex09
WaferName, wafer1
DieName, x0y0
DeviceName, n10_1
Temperature, -40
FabDate, 11 May 2010
UserDate, 11 May 2010
WaferDiameter, 0.2
DieLayout, FOUR_CROSSING
DieSize, 0.02, 0.02
DieType, PARTIAL
Attribute, W, 1e-05
Attribute, L, 1e-06
NodeNames, d g s b
Sweep, 1, V, G, LIN, 0, 5, 0.1, CALCULATED, 0.1, 0
Sweep, 2, V, B, LIN, 0, -3, CALCULATED, 5, 0.1, 0
Constant, V, D, 5, 0.1, 0
Constant, V, S, 0, 0.1, 0
Target, I, D
Function, gm, derivative (VG, ID)
Plot, idvg, XY (LIN LIN), vg, id
Plot, gm, XY (LIN LIN), vg, gm
DataArray, ID
5.72409e-17 5.43386e-16 6.03215e-15 6.79957e-14 7.67255e-13
8.64872e-12 9.71186e-11 1.07694e-09 1.14852e-08 1.10623e-07
8.88627e-07 5.40882e-06 2.07869e-05 5.13852e-05 9.55662e-05
0.000150659 0.000214938 0.000287288 0.000366854 0.00045291
0.000544823 0.000642036 0.000744062 0.000850471 0.000960886
0.00107497 0.00119243 0.00131299 0.00143643 0.00156252
0.00169109 0.00182195 0.00195495 0.00208994 0.00222681
0.00236543 0.0025057 0.00264752 0.00279079 0.00293544
0.00308139 0.00322856 0.0033769 0.00352634 0.00367683
0.00382831 0.00398074 0.00413406 0.00428824 0.00444325
0.00459903 1.07515e-17 1.07745e-17 1.11482e-17 1.72145e-17
1.15707e-16 1.71479e-15 2.76741e-14 4.4893e-13 7.27399e-12
1.17151e-10 1.84276e-09 2.66585e-08 3.09486e-07 2.54789e-06
1.29702e-05 3.86269e-05 7.95255e-05 0.000132784 0.00019631
0.000268739 0.000349038 0.00043635 0.000529943 0.000629184
0.000733525 0.000842486 0.000955648 0.00107264 0.00119314
0.00131685 0.00144352 0.00157292 0.00170484 0.00183908
0.0019755 0.00211392 0.00225422 0.00239627 0.00253995
0.00268516 0.0028318 0.00297978 0.00312903 0.00327947
0.00343103 0.00358364 0.00373725 0.0038918 0.00404724
0.00420351 0.00436059 1.15e-17 1.15e-17 1.15001e-17
1.15029e-17 1.15579e-17 1.26534e-17 3.44795e-17 4.69321e-16
9.1321e-15 1.81657e-13 3.61291e-12 7.14453e-11 1.37785e-09
2.40809e-08 3.18986e-07 2.76953e-06 1.41693e-05 4.15411e-05
8.42778e-05 0.000139407 0.000204892 0.000279368 0.000361781
0.000451253 0.000547039 0.000648495 0.000755063 0.000866259
0.000981657 0.00110088 0.00122361 0.00134954 0.00147842
0.00161 0.00174409 0.00188049 0.00201903 0.00215956
0.00230195 0.00244605 0.00259176 0.00273897 0.00288759
0.00303751 0.00318868 0.00334099 0.0034944 0.00364882
0.00380421 0.0039605 0.00411765 1.225e-17 1.225e-17
1.225e-17 1.225e-17 1.22501e-17 1.22517e-17 1.22896e-17
1.31546e-17 3.29157e-17 4.84373e-16 1.07974e-14 2.4629e-13
5.61332e-12 1.2682e-10 2.75225e-09 5.10075e-08 6.42665e-07
4.96459e-06 2.13784e-05 5.46016e-05 0.000102306 0.000161732
0.000231117 0.000309207 0.000394999 0.000487649 0.000586435
0.000690738 0.000800017 0.000913804 0.00103169 0.0011533
0.00127833 0.00140648 0.0015375 0.00167117 0.00180728
0.00194564 0.00208609 0.00222848 0.00237267 0.00251853
0.00266596 0.00281484 0.00296509 0.00311661 0.00326933
0.00342316 0.00357805 0.00373392 0.00389072 1.3e-17
1.3e-17 1.3e-17 1.3e-17 1.3e-17 1.3e-17
1.30001e-17 1.30029e-17 1.30742e-17 1.48728e-17 6.02844e-17
1.20678e-15 3.01474e-14 7.60121e-13 1.91007e-11 4.71131e-10
1.06725e-08 1.80815e-07 1.86147e-06 1.11119e-05 3.62335e-05
7.75215e-05 0.000131832 0.000196955 0.000271431 0.000354139
0.000444153 0.000540687 0.000643068 0.000750713 0.000863116
0.000979833 0.00110047 0.0012247 0.0013522 0.0014827
0.00161597 0.00175178 0.00188993 0.00203026 0.00217261
0.00231682 0.00246276 0.00261032 0.00275939 0.00290986
0.00306164 0.00321465 0.00336881 0.00352404 0.00368029
DataSetFinish
DataSetStart
DataSetName, idvgsat
MeasurementType, DC
BatchName, opt_ex09
WaferName, wafer1
DieName, x0y0
DeviceName, n10_10
Temperature, -40
FabDate, 11 May 2010
UserDate, 11 May 2010
WaferDiameter, 0.2
DieLayout, FOUR_CROSSING
DieSize, 0.02, 0.02
DieType, PARTIAL
Attribute, W, 1e-05
Attribute, L, 1e-05
NodeNames, d g s b
Sweep, 1, V, G, LIN, 0, 5, 0.1, CALCULATED, 0.1, 0
Sweep, 2, V, B, LIN, 0, -3, CALCULATED, 5, 0.1, 0
Constant, V, D, 5, 0.1, 0
Constant, V, S, 0, 0.1, 0
Target, I, D
Function, gm, derivative (VG, ID)
Plot, idvg, XY (LIN LIN), vg, id
Plot, gm, XY (LIN LIN), vg, gm
DataArray, ID
6.52613e-17 6.55251e-16 7.54281e-15 8.78945e-14 1.02316e-12
1.18262e-11 1.33549e-10 1.41111e-09 1.30744e-08 1.04067e-07
5.97085e-07 2.03533e-06 4.63529e-06 8.32586e-06 1.30267e-05
1.86964e-05 2.53115e-05 3.28536e-05 4.1306e-05 5.06523e-05
6.08772e-05 7.19658e-05 8.39037e-05 9.66773e-05 0.000110273
0.000124679 0.000139883 0.000155872 0.000172636 0.000190162
0.000208442 0.000227463 0.000247215 0.00026769 0.000288876
0.000310766 0.00033335 0.000356618 0.000380563 0.000405176
0.00043045 0.000456375 0.000482946 0.000510154 0.000537992
0.000566453 0.000595531 0.000625219 0.000655511 0.0006864
0.00071788 1.07512e-17 1.07713e-17 1.11179e-17 1.71187e-17
1.20994e-16 1.91884e-15 3.30171e-14 5.69624e-13 9.73622e-12
1.6026e-10 2.32749e-09 2.62048e-08 2.17625e-07 1.08229e-06
3.12047e-06 6.3807e-06 1.07728e-05 1.62382e-05 2.27426e-05
3.02603e-05 3.8769e-05 4.82478e-05 5.86773e-05 7.00388e-05
8.23146e-05 9.54878e-05 0.000109542 0.000124461 0.00014023
0.000156834 0.000174259 0.00019249 0.000211514 0.000231318
0.000251888 0.000273212 0.000295278 0.000318074 0.000341588
0.000365808 0.000390724 0.000416324 0.000442599 0.000469538
0.00049713 0.000525367 0.000554238 0.000583734 0.000613846
0.000644565 0.000675883 1.15e-17 1.15e-17 1.15001e-17
1.15017e-17 1.15368e-17 1.23018e-17 2.89885e-17 3.92916e-16
8.32706e-15 1.81008e-13 3.90972e-12 8.1628e-11 1.49377e-09
1.98863e-08 1.82559e-07 9.92032e-07 3.00563e-06 6.29122e-06
1.07566e-05 1.63408e-05 2.3007e-05 3.07272e-05 3.94766e-05
4.92326e-05 5.99739e-05 7.16803e-05 8.43324e-05 9.79117e-05
0.0001124 0.000127781 0.000144037 0.000161151 0.000179109
0.000197895 0.000217493 0.000237889 0.000259068 0.000281017
0.000303723 0.00032717 0.000351348 0.000376243 0.000401842
0.000428134 0.000455107 0.00048275 0.00051105 0.000539998
0.000569582 0.000599792 0.000630618 1.225e-17 1.225e-17
1.225e-17 1.225e-17 1.225e-17 1.22507e-17 1.22673e-17
1.26933e-17 2.35965e-17 3.02678e-16 7.44324e-15 1.89773e-13
4.79872e-12 1.15797e-10 2.32062e-09 3.09743e-08 2.71492e-07
1.32602e-06 3.67309e-06 7.30276e-06 1.21243e-05 1.80839e-05
2.51465e-05 3.32837e-05 4.24702e-05 5.26827e-05 6.38991e-05
7.60983e-05 8.92604e-05 0.000103366 0.000118396 0.000134334
0.00015116 0.000168858 0.000187412 0.000206805 0.000227022
0.000248046 0.000269863 0.000292458 0.000315817 0.000339926
0.00036477 0.000390337 0.000416614 0.000443587 0.000471245
0.000499574 0.000528564 0.000558202 0.000588477 1.3e-17
1.3e-17 1.3e-17 1.3e-17 1.3e-17 1.3e-17
1.3e-17 1.30008e-17 1.30232e-17 1.36703e-17 3.23567e-17
5.71947e-16 1.6143e-14 4.63909e-13 1.31043e-11 3.39129e-10
6.44652e-09 7.57304e-08 5.55771e-07 2.13616e-06 5.06625e-06
9.26081e-06 1.46443e-05 2.11723e-05 2.88128e-05 3.7538e-05
4.73227e-05 5.81434e-05 6.99779e-05 8.28049e-05 9.6604e-05
0.000111355 0.00012704 0.00014364 0.000161136 0.000179512
0.00019875 0.000218833 0.000239745 0.00026147 0.000283993
0.000307299 0.000331372 0.000356198 0.000381764 0.000408054
0.000435056 0.000462757 0.000491143 0.000520201 0.00054992
DataSetFinish
DataSetStart
DataSetName, idvgsat
MeasurementType, DC
BatchName, opt_ex09
WaferName, wafer1
DieName, x0y0
DeviceName, n10_2
Temperature, -40
FabDate, 11 May 2010
UserDate, 11 May 2010
WaferDiameter, 0.2
DieLayout, FOUR_CROSSING
DieSize, 0.02, 0.02
DieType, PARTIAL
Attribute, W, 1e-05
Attribute, L, 2e-06
NodeNames, d g s b
Sweep, 1, V, G, LIN, 0, 5, 0.1, CALCULATED, 0.1, 0
Sweep, 2, V, B, LIN, 0, -3, CALCULATED, 5, 0.1, 0
Constant, V, D, 5, 0.1, 0
Constant, V, S, 0, 0.1, 0
Target, I, D
Function, gm, derivative (VG, ID)
Plot, idvg, XY (LIN LIN), vg, id
Plot, gm, XY (LIN LIN), vg, gm
DataArray, ID
7.17367e-17 7.29324e-16 8.39063e-15 9.7628e-14 1.13619e-12
1.31891e-11 1.51755e-10 1.69721e-09 1.75321e-08 1.55404e-07
1.11877e-06 5.35448e-06 1.56023e-05 3.21784e-05 5.42958e-05
8.13658e-05 0.000113039 0.000149061 0.000189211 0.000233283
0.000281085 0.000332439 0.000387179 0.000445148 0.000506201
0.000570203 0.000637026 0.000706551 0.000778665 0.000853262
0.000930242 0.00100951 0.00109098 0.00117456 0.00126018
0.00134775 0.00143721 0.00152848 0.00162151 0.00171622
0.00181256 0.00191047 0.00200991 0.00211081 0.00221313
0.00231682 0.00242183 0.00252813 0.00263568 0.00274443
0.00285435 1.07511e-17 1.07687e-17 1.10725e-17 1.63002e-17
1.06274e-16 1.65476e-15 2.82996e-14 4.8642e-13 8.33773e-12
1.41133e-10 2.27567e-09 3.14625e-08 3.24958e-07 2.29294e-06
9.26458e-06 2.30937e-05 4.32556e-05 6.90025e-05 9.98668e-05
0.00013552 0.000175685 0.000220115 0.000268583 0.000320878
0.000376807 0.000436189 0.000498856 0.000564652 0.000633431
0.000705055 0.000779395 0.000856329 0.000935744 0.00101753
0.00110159 0.00118782 0.00127613 0.00136644 0.00145866
0.00155272 0.00164853 0.00174604 0.00184518 0.00194588
0.00204807 0.00215171 0.00225674 0.00236311 0.00247076
0.00257966 0.00268974 1.15e-17 1.15e-17 1.15001e-17
1.15014e-17 1.15293e-17 1.21318e-17 2.51478e-17 3.06288e-16
6.37818e-15 1.37448e-13 2.96002e-12 6.30831e-11 1.2837e-09
2.20581e-08 2.63453e-07 2.03905e-06 8.8155e-06 2.26874e-05
4.31155e-05 6.93234e-05 0.000100825 0.000137271 0.000178368
0.000223853 0.000273485 0.000327043 0.000384323 0.000445135
0.000509303 0.000576662 0.000647057 0.000720345 0.00079639
0.000875064 0.000956247 0.00103983 0.00112569 0.00121375
0.00130389 0.00139603 0.00149009 0.00158598 0.00168363
0.00178296 0.0018839 0.00198639 0.00209036 0.00219575
0.00230251 0.00241058 0.00251992 1.225e-17 1.225e-17
1.225e-17 1.225e-17 1.225e-17 1.22505e-17 1.22632e-17
1.25845e-17 2.06955e-17 2.25481e-16 5.39528e-15 1.3583e-13
3.417e-12 8.47606e-11 1.96841e-09 3.59562e-08 4.1834e-07
2.98998e-06 1.15049e-05 2.72845e-05 4.95214e-05 7.75066e-05
0.000110793 0.000149039 0.000191952 0.000239266 0.000290738
0.000346146 0.000405282 0.000467954 0.000533986 0.000603209
0.000675467 0.000750614 0.000828513 0.000909034 0.000992054
0.00107746 0.00116514 0.00125499 0.00134692 0.00144083
0.00153664 0.00163426 0.00173361 0.00183463 0.00193723
0.00204136 0.00214695 0.00225393 0.00236226 1.3e-17
1.3e-17 1.3e-17 1.3e-17 1.3e-17 1.3e-17
1.3e-17 1.30006e-17 1.30175e-17 1.34974e-17 2.71132e-17
4.13395e-16 1.13702e-14 3.21844e-13 9.07266e-12 2.48987e-10
6.03216e-09 9.98191e-08 9.93323e-07 5.66661e-06 1.7442e-05
3.63079e-05 6.1367e-05 9.20409e-05 0.000127935 0.000168725
0.000214126 0.000263876 0.000317738 0.00037549 0.000436928
0.000501864 0.000570121 0.000641531 0.000715942 0.000793206
0.000873187 0.000955755 0.00104079 0.00112818 0.0012178
0.00130957 0.00140338 0.00149915 0.00159677 0.00169618
0.00179729 0.00190003 0.00200433 0.00211012 0.00221734
DataSetFinish
DataSetStart
DataSetName, idvgsat
MeasurementType, DC
BatchName, opt_ex09
WaferName, wafer1
DieName, x0y0
DeviceName, n10_5
Temperature, -40
FabDate, 11 May 2010
UserDate, 11 May 2010
WaferDiameter, 0.2
DieLayout, FOUR_CROSSING
DieSize, 0.02, 0.02
DieType, PARTIAL
Attribute, W, 1e-05
Attribute, L, 5e-06
NodeNames, d g s b
Sweep, 1, V, G, LIN, 0, 5, 0.1, CALCULATED, 0.1, 0
Sweep, 2, V, B, LIN, 0, -3, CALCULATED, 5, 0.1, 0
Constant, V, D, 5, 0.1, 0
Constant, V, S, 0, 0.1, 0
Target, I, D
Function, gm, derivative (VG, ID)
Plot, idvg, XY (LIN LIN), vg, id
Plot, gm, XY (LIN LIN), vg, gm
DataArray, ID
8.80509e-17 9.21367e-16 1.06501e-14 1.24172e-13 1.44647e-12
1.67569e-11 1.90589e-10 2.05224e-09 1.95681e-08 1.59666e-07
9.81107e-07 3.6157e-06 8.63814e-06 1.59082e-05 2.52201e-05
3.64617e-05 4.95683e-05 6.44903e-05 8.11816e-05 9.95986e-05
0.000119699 0.000141442 0.00016479 0.000189705 0.000216151
0.000244096 0.000273505 0.000304347 0.000336592 0.000370211
0.000405173 0.000441453 0.000479023 0.000517857 0.000557931
0.00059922 0.000641699 0.000685348 0.000730143 0.000776063
0.000823087 0.000871195 0.000920368 0.000970586 0.00102183
0.00107409 0.00112733 0.00118156 0.00123674 0.00129286
0.00134992 1.07516e-17 1.07775e-17 1.12253e-17 1.89775e-17
1.5317e-16 2.47583e-15 4.26598e-14 7.36608e-13 1.26309e-11
2.10483e-10 3.17233e-09 3.77548e-08 3.3233e-07 1.81939e-06
5.64683e-06 1.20002e-05 2.06564e-05 3.14582e-05 4.43138e-05
5.91555e-05 7.59243e-05 9.45652e-05 0.000115027 0.00013726
0.000161218 0.000186856 0.000214132 0.000243005 0.000273434
0.000305383 0.000338813 0.000373689 0.000409977 0.000447644
0.000486656 0.000526982 0.000568592 0.000611457 0.000655547
0.000700835 0.000747295 0.000794899 0.000843622 0.000893441
0.00094433 0.000996268 0.00104923 0.0011032 0.00115815
0.00121406 0.00127091 1.15e-17 1.15e-17 1.15001e-17
1.15021e-17 1.1545e-17 1.24817e-17 3.29121e-17 4.78487e-16
1.01937e-14 2.21758e-13 4.80254e-12 1.01439e-10 1.93494e-09
2.77838e-08 2.72695e-07 1.64105e-06 5.39596e-06 1.17795e-05
2.0561e-05 3.15763e-05 4.47273e-05 5.99403e-05 7.7151e-05
9.63001e-05 0.000117332 0.000140194 0.000164835 0.000191208
0.000219267 0.000248968 0.000280267 0.000313123 0.000347497
0.000383349 0.000420643 0.000459342 0.000499411 0.000540816
0.000583524 0.000627503 0.000672721 0.00071915 0.000766759
0.00081552 0.000865406 0.000916389 0.000968445 0.00102155
0.00107567 0.0011308 0.0011869 1.225e-17 1.225e-17
1.225e-17 1.225e-17 1.225e-17 1.22508e-17 1.22704e-17
1.27726e-17 2.56261e-17 3.5462e-16 8.77298e-15 2.23875e-13
5.68053e-12 1.39322e-10 2.95903e-09 4.32172e-08 4.08771e-07
2.22745e-06 6.65384e-06 1.37254e-05 2.32042e-05 3.49445e-05
4.88537e-05 6.48579e-05 8.28913e-05 0.000102893 0.000124806
0.000148576 0.00017415 0.00020148 0.000230517 0.000261216
0.000293533 0.000327423 0.000362847 0.000399763 0.000438133
0.000477919 0.000519085 0.000561595 0.000605414 0.000650509
0.000696848 0.0007444 0.000793134 0.00084302 0.00089403
0.000946136 0.000999311 0.00105353 0.00110876 1.3e-17
1.3e-17 1.3e-17 1.3e-17 1.3e-17 1.3e-17
1.3e-17 1.30009e-17 1.30266e-17 1.37677e-17 3.51695e-17
6.5314e-16 1.84886e-14 5.31978e-13 1.51236e-11 4.0341e-10
8.38131e-09 1.07572e-07 8.67374e-07 3.70866e-06 9.32799e-06
1.7532e-05 2.81154e-05 4.09595e-05 5.59797e-05 7.31042e-05
9.22678e-05 0.000113409 0.000136471 0.000161399 0.000188139
0.000216643 0.000246861 0.000278747 0.000312255 0.000347343
0.000383967 0.000422086 0.000461661 0.000502654 0.000545027
0.000588743 0.000633768 0.000680067 0.000727608 0.000776358
0.000826287 0.000877363 0.000929558 0.000982844 0.00103719
DataSetFinish
DataSetStart
DataSetName, idvgsat
MeasurementType, DC
BatchName, opt_ex09
WaferName, wafer1
DieName, x0y0
DeviceName, n2_0p5
Temperature, -40
FabDate, 11 May 2010
UserDate, 11 May 2010
WaferDiameter, 0.2
DieLayout, FOUR_CROSSING
DieSize, 0.02, 0.02
DieType, PARTIAL
Attribute, W, 2e-06
Attribute, L, 5e-07
NodeNames, d g s b
Sweep, 1, V, G, LIN, 0, 5, 0.1, CALCULATED, 0.1, 0
Sweep, 2, V, B, LIN, 0, -3, CALCULATED, 5, 0.1, 0
Constant, V, D, 5, 0.1, 0
Constant, V, S, 0, 0.1, 0
Target, I, D
Function, gm, derivative (VG, ID)
Plot, idvg, XY (LIN LIN), vg, id
Plot, gm, XY (LIN LIN), vg, gm
DataArray, ID
2.10321e-17 1.18189e-16 1.07096e-15 1.04141e-14 1.02026e-13
1.00002e-12 9.79331e-12 9.5629e-11 9.25453e-10 8.72113e-09
7.65769e-08 5.81479e-07 3.46991e-06 1.36118e-05 3.37496e-05
6.11995e-05 9.27042e-05 0.000126534 0.000161875 0.000198274
0.000235429 0.000273124 0.000311198 0.000349534 0.000388046
0.000426669 0.000465358 0.00050408 0.000542812 0.000581537
0.000620245 0.000658928 0.000697583 0.000736208 0.000774803
0.000813369 0.000851909 0.000890425 0.000928919 0.000967397
0.00100586 0.00104431 0.00108276 0.0011212 0.00115964
0.00119809 0.00123654 0.001275 0.00131347 0.00135196
0.00139046 1.07512e-17 1.07654e-17 1.09542e-17 1.34576e-17
4.66453e-17 4.86626e-16 6.31937e-15 8.36334e-14 1.10797e-12
1.46566e-11 1.92777e-10 2.4848e-09 2.99769e-08 3.04395e-07
2.27776e-06 1.06188e-05 2.91198e-05 5.55438e-05 8.64806e-05
0.000120056 0.00015535 0.000191832 0.000229149 0.000267054
0.000305369 0.000343966 0.000382751 0.000421658 0.000460637
0.000499654 0.000538684 0.00057771 0.000616719 0.000655706
0.000694664 0.000733593 0.000772491 0.00081136 0.000850202
0.000889018 0.000927812 0.000966588 0.00100535 0.00104409
0.00108283 0.00112156 0.00116029 0.00119902 0.00123775
0.00127649 0.00131523 1.15e-17 1.15e-17 1.15002e-17
1.15033e-17 1.15524e-17 1.23187e-17 2.43009e-17 2.11639e-16
3.14054e-15 4.89265e-14 7.64345e-13 1.19227e-11 1.84725e-10
2.78901e-09 3.84919e-08 4.20267e-07 3.10415e-06 1.32753e-05
3.3487e-05 6.07096e-05 9.19169e-05 0.000125563 0.000160844
0.000197267 0.000234497 0.000272296 0.000310494 0.000348968
0.000387628 0.000426408 0.000465263 0.000504157 0.000543066
0.000581974 0.000620868 0.00065974 0.000698587 0.000737406
0.000776196 0.000814957 0.000853692 0.000892403 0.000931091
0.000969761 0.00100841 0.00104705 0.00108568 0.00112431
0.00116293 0.00120154 0.00124016 1.225e-17 1.225e-17
1.225e-17 1.225e-17 1.22502e-17 1.22531e-17 1.23042e-17
1.31939e-17 2.86999e-17 2.98938e-16 5.00842e-15 8.70669e-14
1.51581e-12 2.63161e-11 4.51419e-10 7.38588e-09 1.03219e-07
1.02271e-06 6.18348e-06 2.06711e-05 4.40111e-05 7.2715e-05
0.000104581 0.000138511 0.000173871 0.000210246 0.000247344
0.000284956 0.00032293 0.000361156 0.000399553 0.000438062
0.000476639 0.000515254 0.000553884 0.000592512 0.000631128
0.000669723 0.000708294 0.000746839 0.000785356 0.000823846
0.00086231 0.00090075 0.000939169 0.000977569 0.00101595
0.00105432 0.00109268 0.00113104 0.00116939 1.3e-17
1.3e-17 1.3e-17 1.3e-17 1.3e-17 1.3e-17
1.30004e-17 1.30073e-17 1.31375e-17 1.55925e-17 6.18735e-17
9.34342e-16 1.73803e-14 3.27268e-13 6.15688e-12 1.15054e-10
2.08995e-09 3.4099e-08 4.15092e-07 3.1697e-06 1.34187e-05
3.32262e-05 5.95409e-05 8.96675e-05 0.000122233 0.000156481
0.000191928 0.000228237 0.000265164 0.000302536 0.000340222
0.000378129 0.000416186 0.00045434 0.000492555 0.000530802
0.00056906 0.000607316 0.000645558 0.000683781 0.000721981
0.000760154 0.000798301 0.000836422 0.000874518 0.00091259
0.000950642 0.000988675 0.00102669 0.0010647 0.00110269
DataSetFinish
DataSetStart
DataSetName, idvgsat
MeasurementType, DC
BatchName, opt_ex09
WaferName, wafer1
DieName, x0y0
DeviceName, n2_10
Temperature, -40
FabDate, 11 May 2010
UserDate, 11 May 2010
WaferDiameter, 0.2
DieLayout, FOUR_CROSSING
DieSize, 0.02, 0.02
DieType, PARTIAL
Attribute, W, 2e-06
Attribute, L, 1e-05
NodeNames, d g s b
Sweep, 1, V, G, LIN, 0, 5, 0.1, CALCULATED, 0.1, 0
Sweep, 2, V, B, LIN, 0, -3, CALCULATED, 5, 0.1, 0
Constant, V, D, 5, 0.1, 0
Constant, V, S, 0, 0.1, 0
Target, I, D
Function, gm, derivative (VG, ID)
Plot, idvg, XY (LIN LIN), vg, id
Plot, gm, XY (LIN LIN), vg, gm
DataArray, ID
1.22827e-17 3.66543e-17 3.21211e-16 3.64259e-15 4.23689e-14
4.9228e-13 5.6567e-12 6.27408e-11 6.34975e-10 5.5664e-09
4.06179e-08 1.92135e-07 5.50294e-07 1.12795e-06 1.90736e-06
2.87634e-06 4.02872e-06 5.36058e-06 6.8686e-06 8.54961e-06
1.04006e-05 1.24186e-05 1.4601e-05 1.69449e-05 1.94479e-05
2.21075e-05 2.49213e-05 2.7887e-05 3.10024e-05 3.42653e-05
3.76736e-05 4.12254e-05 4.49185e-05 4.87511e-05 5.27214e-05
5.68276e-05 6.10677e-05 6.54403e-05 6.99436e-05 7.45759e-05
7.93358e-05 8.42216e-05 8.9232e-05 9.43655e-05 9.96206e-05
0.000104996 0.000110491 0.000116103 0.000121832 0.000127676
0.000133634 1.075e-17 1.07506e-17 1.07604e-17 1.09297e-17
1.38614e-17 6.4607e-17 9.42802e-16 1.61264e-14 2.77624e-13
4.71042e-12 7.54614e-11 1.01978e-09 1.0472e-08 7.56664e-08
3.09984e-07 7.81364e-07 1.48273e-06 2.39794e-06 3.51774e-06
4.8363e-06 6.34898e-06 8.05158e-06 9.94021e-06 1.20112e-05
1.4261e-05 1.66863e-05 1.92838e-05 2.20505e-05 2.49834e-05
2.80795e-05 3.1336e-05 3.47502e-05 3.83195e-05 4.20411e-05
4.59126e-05 4.99315e-05 5.40953e-05 5.84019e-05 6.28488e-05
6.74338e-05 7.21547e-05 7.70096e-05 8.19961e-05 8.71125e-05
9.23566e-05 9.77265e-05 0.000103221 0.000108837 0.000114573
0.000120428 0.0001264 1.15e-17 1.15e-17 1.15e-17
1.15e-17 1.15008e-17 1.15167e-17 1.1865e-17 1.94613e-17
1.85123e-16 3.7959e-15 8.22914e-14 1.76833e-12 3.6126e-11
6.1644e-10 7.39613e-09 6.02837e-08 2.7524e-07 7.36032e-07
1.43909e-06 2.3674e-06 3.5109e-06 4.86311e-06 6.41883e-06
8.17342e-06 1.01226e-05 1.22622e-05 1.45885e-05 1.70977e-05
1.97863e-05 2.26509e-05 2.56881e-05 2.88947e-05 3.22676e-05
3.58037e-05 3.95e-05 4.33538e-05 4.7362e-05 5.15221e-05
5.58312e-05 6.02868e-05 6.48863e-05 6.96272e-05 7.4507e-05
7.95235e-05 8.46742e-05 8.99568e-05 9.53692e-05 0.000100909
0.000106575 0.000112364 0.000118274 1.225e-17 1.225e-17
1.225e-17 1.225e-17 1.225e-17 1.225e-17 1.22503e-17
1.22571e-17 1.2431e-17 1.68824e-17 1.30817e-16 3.0453e-15
7.73818e-14 1.9461e-12 4.5833e-11 8.50502e-10 1.02908e-08
8.06671e-08 3.40412e-07 8.58021e-07 1.62203e-06 2.6163e-06
3.8315e-06 5.26121e-06 6.90007e-06 8.74325e-06 1.07862e-05
1.30248e-05 1.54549e-05 1.80726e-05 2.08741e-05 2.3856e-05
2.70146e-05 3.03466e-05 3.38486e-05 3.75174e-05 4.13498e-05
4.53428e-05 4.94933e-05 5.37985e-05 5.82554e-05 6.28612e-05
6.76133e-05 7.2509e-05 7.75456e-05 8.27206e-05 8.80316e-05
9.3476e-05 9.90516e-05 0.000104756 0.000110587 1.3e-17
1.3e-17 1.3e-17 1.3e-17 1.3e-17 1.3e-17
1.3e-17 1.3e-17 1.30003e-17 1.30083e-17 1.324e-17
1.99315e-17 2.13145e-16 5.78717e-15 1.65835e-13 4.64904e-12
1.16336e-10 2.03288e-09 2.21171e-08 1.45691e-07 5.03838e-07
1.12631e-06 1.99446e-06 3.09487e-06 4.41945e-06 5.96209e-06
7.71745e-06 9.68065e-06 1.18471e-05 1.42125e-05 1.67726e-05
1.95235e-05 2.24614e-05 2.55824e-05 2.8883e-05 3.23596e-05
3.60088e-05 3.98272e-05 4.38115e-05 4.79587e-05 5.22654e-05
5.67287e-05 6.13457e-05 6.61133e-05 7.10287e-05 7.60892e-05
8.12921e-05 8.66346e-05 9.21142e-05 9.77284e-05 0.000103475
DataSetFinish
DataSetStart
DataSetName, idvgsat
MeasurementType, DC
BatchName, opt_ex09
WaferName, wafer1
DieName, x0y0
DeviceName, n5_10
Temperature, -40
FabDate, 11 May 2010
UserDate, 11 May 2010
WaferDiameter, 0.2
DieLayout, FOUR_CROSSING
DieSize, 0.02, 0.02
DieType, PARTIAL
Attribute, W, 5e-06
Attribute, L, 1e-05
NodeNames, d g s b
Sweep, 1, V, G, LIN, 0, 5, 0.1, CALCULATED, 0.1, 0
Sweep, 2, V, B, LIN, 0, -3, CALCULATED, 5, 0.1, 0
Constant, V, D, 5, 0.1, 0
Constant, V, S, 0, 0.1, 0
Target, I, D
Function, gm, derivative (VG, ID)
Plot, idvg, XY (LIN LIN), vg, id
Plot, gm, XY (LIN LIN), vg, gm
DataArray, ID
2.27308e-17 1.58654e-16 1.74556e-15 2.02643e-14 2.36035e-13
2.73685e-12 3.12222e-11 3.39087e-10 3.2883e-09 2.75441e-08
1.809e-07 7.23328e-07 1.82929e-06 3.48856e-06 5.65629e-06
8.30708e-06 1.14276e-05 1.50084e-05 1.9041e-05 2.35174e-05
2.84299e-05 3.3771e-05 3.95336e-05 4.57109e-05 5.22963e-05
5.92836e-05 6.66666e-05 7.44395e-05 8.25965e-05 9.11322e-05
0.000100041 0.000109318 0.000118958 0.000128956 0.000139307
0.000150008 0.000161052 0.000172436 0.000184156 0.000196207
0.000208585 0.000221287 0.000234309 0.000247647 0.000261298
0.000275257 0.000289523 0.000304091 0.000318958 0.000334121
0.000349578 1.07502e-17 1.07541e-17 1.08202e-17 1.19648e-17
3.17783e-17 3.7473e-16 6.30869e-15 1.08825e-13 1.86882e-12
3.13307e-11 4.8161e-10 5.95538e-09 5.53933e-08 3.35069e-07
1.13674e-06 2.5516e-06 4.5402e-06 7.06733e-06 1.01132e-05
1.36643e-05 1.77091e-05 2.22371e-05 2.72386e-05 3.27042e-05
3.8625e-05 4.49926e-05 5.17987e-05 5.90356e-05 6.66955e-05
7.4771e-05 8.3255e-05 9.21405e-05 0.000101421 0.000111089
0.000121139 0.000131564 0.000142358 0.000153516 0.000165031
0.000176898 0.000189111 0.000201665 0.000214554 0.000227774
0.000241319 0.000255185 0.000269367 0.00028386 0.000298659
0.000313761 0.000329161 1.15e-17 1.15e-17 1.15e-17
1.15003e-17 1.1506e-17 1.16317e-17 1.43732e-17 7.41646e-17
1.37796e-15 2.97803e-14 6.45682e-13 1.37261e-11 2.68348e-10
4.07488e-09 4.27874e-08 2.88535e-07 1.05688e-06 2.46362e-06
4.47033e-06 7.04012e-06 1.01517e-05 1.37902e-05 1.7943e-05
2.25984e-05 2.77457e-05 3.33749e-05 3.94761e-05 4.604e-05
5.30578e-05 6.05208e-05 6.84205e-05 7.67489e-05 8.54981e-05
9.46602e-05 0.000104228 0.000114194 0.000124551 0.000135292
0.00014641 0.000157899 0.000169752 0.000181963 0.000194525
0.000207434 0.000220682 0.000234264 0.000248175 0.000262408
0.000276959 0.000291823 0.000306994 1.225e-17 1.225e-17
1.225e-17 1.225e-17 1.225e-17 1.22501e-17 1.22525e-17
1.23137e-17 1.38818e-17 5.40211e-17 1.08126e-15 2.73416e-14
6.94999e-13 1.72197e-11 3.80494e-10 6.01947e-09 6.20873e-08
3.88137e-07 1.29935e-06 2.86296e-06 5.03296e-06 7.77616e-06
1.10727e-05 1.49077e-05 1.92681e-05 2.41419e-05 2.95181e-05
3.53861e-05 4.17357e-05 4.85573e-05 5.58415e-05 6.35792e-05
7.17616e-05 8.03802e-05 8.94266e-05 9.88927e-05 0.000108771
0.000119053 0.000129731 0.000140799 0.000152248 0.000164073
0.000176265 0.000188819 0.000201728 0.000214985 0.000228585
0.00024252 0.000256786 0.000271376 0.000286284 1.3e-17
1.3e-17 1.3e-17 1.3e-17 1.3e-17 1.3e-17
1.3e-17 1.30001e-17 1.30029e-17 1.30851e-17 1.54579e-17
8.39799e-17 2.06212e-15 5.9067e-14 1.68635e-12 4.59477e-11
1.02662e-09 1.45761e-08 1.32235e-07 6.61714e-07 1.84762e-06
3.68246e-06 6.12072e-06 9.13562e-06 1.27094e-05 1.68277e-05
2.14776e-05 2.6647e-05 3.23248e-05 3.85001e-05 4.51626e-05
5.23026e-05 5.99103e-05 6.79764e-05 7.6492e-05 8.54482e-05
9.48365e-05 0.000104648 0.000114876 0.000125511 0.000136545
0.000147972 0.000159784 0.000171973 0.000184532 0.000197454
0.000210733 0.000224363 0.000238335 0.000252645 0.000267286
DataSetFinish
DataSetStart
DataSetName, idvdhigh
MeasurementType, DC
BatchName, opt_ex09
WaferName, wafer1
DieName, x0y0
DeviceName, n10_0p5
Temperature, 27
FabDate, 11 May 2010
UserDate, 11 May 2010
WaferDiameter, 0.2
DieLayout, FOUR_CROSSING
DieSize, 0.02, 0.02
DieType, PARTIAL
Attribute, W, 1e-05
Attribute, L, 5e-07
NodeNames, d g s b
Sweep, 1, V, D, LIN, 0, 5, 0.1, CALCULATED, 0.1, 0
Sweep, 2, V, G, LIN, 2, 5, CALCULATED, 5, 0.1, 0
Constant, V, S, 0, 0.1, 0
Constant, V, B, -3, 0.1, 0
Target, I, D
Function, gds, derivative (Vd, ID)
Plot, idvd, XY (LIN LIN), vd, id
Plot, gds, XY (LIN LOG), vd, gds
DataArray, ID
0 2.91653e-05 3.83247e-05 4.26917e-05 4.65319e-05
5.02377e-05 5.39066e-05 5.75844e-05 6.12976e-05 6.50628e-05
6.88912e-05 7.27901e-05 7.6765e-05 8.08195e-05 8.49562e-05
8.91769e-05 9.34829e-05 9.78748e-05 0.000102353 0.000106918
0.00011157 0.000116307 0.000121131 0.000126041 0.000131035
0.000136115 0.000141278 0.000146526 0.000151858 0.000157274
0.000162777 0.000168367 0.000174049 0.000179829 0.000185714
0.000191715 0.000197849 0.000204135 0.000210599 0.000217275
0.000224205 0.000231439 0.000239039 0.000247081 0.000255653
0.000264859 0.00027482 0.000285675 0.000297585 0.00031073
0.000325317 0 0.000207198 0.000371028 0.000497117
0.000590368 0.000655852 0.000701038 0.00073473 0.000762074
0.000785418 0.000806026 0.000824671 0.000841859 0.000857939
0.000873157 0.000887692 0.000901679 0.00091522 0.000928396
0.000941268 0.000953886 0.00096629 0.000978515 0.000990585
0.00100253 0.00101435 0.00102608 0.00103773 0.00104931
0.00106083 0.00107231 0.00108374 0.00109515 0.00110656
0.00111797 0.00112942 0.00114095 0.00115259 0.00116441
0.00117648 0.00118891 0.00120181 0.00121534 0.00122967
0.00124504 0.0012617 0.00127996 0.00130017 0.00132274
0.00134815 0.0013769 0 0.00034254 0.000636086
0.000886148 0.00109744 0.00127406 0.00141955 0.00153715
0.00163009 0.00170241 0.00175929 0.00180544 0.00184416
0.00187759 0.00190715 0.00193379 0.00195817 0.00198078
0.00200198 0.00202202 0.00204111 0.00205941 0.00207705
0.00209413 0.00211073 0.00212691 0.00214273 0.00215824
0.00217348 0.00218847 0.00220326 0.00221785 0.00223229
0.00224659 0.00226077 0.00227487 0.00228891 0.00230296
0.00231706 0.00233129 0.00234576 0.0023606 0.00237598
0.0023921 0.00240923 0.00242768 0.00244784 0.00247016
0.00249518 0.00252351 0.00255585 0 0.000446399
0.000842005 0.0011919 0.00150049 0.00177167 0.00200883
0.00221497 0.00239271 0.00254429 0.00267141 0.0027753
0.00285841 0.00292521 0.0029802 0.00302668 0.00306694
0.00310252 0.00313451 0.00316369 0.00319063 0.00321575
0.00323939 0.00326179 0.00328315 0.00330364 0.00332337
0.00334246 0.00336098 0.00337902 0.00339663 0.00341386
0.00343076 0.00344736 0.00346371 0.00347983 0.00349577
0.00351156 0.00352725 0.00354292 0.00355864 0.00357452
0.00359072 0.00360741 0.00362483 0.0036433 0.00366316
0.0036849 0.00370904 0.00373624 0.00376727 0
0.000528266 0.00100579 0.00143714 0.00182635 0.002177
0.00249227 0.002775 0.00302772 0.00325267 0.00345181
0.00362663 0.00377785 0.00390508 0.00400879 0.00409248
0.004161 0.0042184 0.00426761 0.00431065 0.00434897
0.00438359 0.00441526 0.00444455 0.00447188 0.00449759
0.00452195 0.00454515 0.00456736 0.00458873 0.00460937
0.00462936 0.0046488 0.00466774 0.00468624 0.00470436
0.00472214 0.00473963 0.00475687 0.00477391 0.00479083
0.00480771 0.00482465 0.0048418 0.00485935 0.00487754
0.00489669 0.00491719 0.00493953 0.0049643 0.00499223
DataSetFinish
DataSetStart
DataSetName, idvdhigh
MeasurementType, DC
BatchName, opt_ex09
WaferName, wafer1
DieName, x0y0
DeviceName, n10_0p8
Temperature, 27
FabDate, 11 May 2010
UserDate, 11 May 2010
WaferDiameter, 0.2
DieLayout, FOUR_CROSSING
DieSize, 0.02, 0.02
DieType, PARTIAL
Attribute, W, 1e-05
Attribute, L, 8e-07
NodeNames, d g s b
Sweep, 1, V, D, LIN, 0, 5, 0.1, CALCULATED, 0.1, 0
Sweep, 2, V, G, LIN, 2, 5, CALCULATED, 5, 0.1, 0
Constant, V, S, 0, 0.1, 0
Constant, V, B, -3, 0.1, 0
Target, I, D
Function, gds, derivative (Vd, ID)
Plot, idvd, XY (LIN LIN), vd, id
Plot, gds, XY (LIN LOG), vd, gds
DataArray, ID
0 2.42925e-05 3.4837e-05 3.77411e-05 3.91474e-05
4.02574e-05 4.12356e-05 4.21349e-05 4.29815e-05 4.37914e-05
4.45746e-05 4.53384e-05 4.60875e-05 4.68258e-05 4.75559e-05
4.828e-05 4.89998e-05 4.97164e-05 5.04311e-05 5.11445e-05
5.18575e-05 5.25706e-05 5.32842e-05 5.39988e-05 5.47147e-05
5.54323e-05 5.61518e-05 5.68736e-05 5.75978e-05 5.8325e-05
5.90555e-05 5.97901e-05 6.05293e-05 6.12745e-05 6.20268e-05
6.27883e-05 6.35612e-05 6.43486e-05 6.51541e-05 6.59825e-05
6.68392e-05 6.77309e-05 6.86656e-05 6.96524e-05 7.07022e-05
7.18271e-05 7.30412e-05 7.43602e-05 7.58019e-05 7.73859e-05
7.9134e-05 0 0.000118175 0.000216606 0.000296705
0.000359776 0.000407082 0.000440093 0.000461385 0.000475316
0.000485508 0.000493614 0.000500379 0.000506211 0.000511362
0.000515999 0.000520238 0.000524162 0.000527835 0.000531301
0.000534597 0.000537752 0.000540786 0.000543719 0.000546565
0.000549335 0.00055204 0.000554688 0.000557286 0.000559841
0.000562356 0.000564837 0.000567288 0.000569714 0.000572118
0.000574505 0.000576882 0.000579255 0.000581633 0.000584027
0.000586453 0.000588929 0.000591477 0.000594127 0.000596913
0.000599877 0.000603071 0.000606551 0.000610387 0.000614657
0.000619451 0.00062487 0 0.000196012 0.00037039
0.000524531 0.000659714 0.000777117 0.000877825 0.00096285
0.00103315 0.00108969 0.00113364 0.00116683 0.00119192
0.00121149 0.00122729 0.00124046 0.00125171 0.00126153
0.00127024 0.00127808 0.00128523 0.00129182 0.00129795
0.0013037 0.00130912 0.00131427 0.00131918 0.00132389
0.00132843 0.00133281 0.00133706 0.00134119 0.00134521
0.00134914 0.00135299 0.00135676 0.00136048 0.00136414
0.00136776 0.00137135 0.00137494 0.00137854 0.00138219
0.00138592 0.00138977 0.00139381 0.00139811 0.00140275
0.00140784 0.0014135 0.00141986 0 0.000260671
0.000498844 0.000715852 0.000912924 0.0010912 0.00125172
0.00139547 0.00152336 0.00163622 0.00173484 0.00181996
0.00189226 0.00195239 0.00200114 0.00203986 0.0020706
0.00209543 0.00211597 0.00213333 0.0021483 0.00216144
0.00217312 0.00218366 0.00219325 0.00220208 0.00221026
0.00221791 0.0022251 0.0022319 0.00223836 0.00224452
0.00225044 0.00225612 0.00226161 0.00226693 0.00227208
0.0022771 0.002282 0.00228679 0.00229149 0.00229613
0.00230071 0.00230528 0.00230987 0.00231452 0.00231929
0.00232426 0.00232952 0.00233519 0.00234139 0
0.000314997 0.000607212 0.000877894 0.0011282 0.0013592
0.0015719 0.00176724 0.00194607 0.00210923 0.00225746
0.00239148 0.00251194 0.00261945 0.00271455 0.00279767
0.00286907 0.00292886 0.00297766 0.00301707 0.00304919
0.00307583 0.00309836 0.00311774 0.00313469 0.00314971
0.00316319 0.00317541 0.00318659 0.00319691 0.0032065
0.00321547 0.00322391 0.00323189 0.00323947 0.00324671
0.00325364 0.00326029 0.00326671 0.00327291 0.00327892
0.00328477 0.00329047 0.00329605 0.00330154 0.00330697
0.00331238 0.00331783 0.00332337 0.00332911 0.00333513
DataSetFinish
DataSetStart
DataSetName, idvdhigh
MeasurementType, DC
BatchName, opt_ex09
WaferName, wafer1
DieName, x0y0
DeviceName, n10_1
Temperature, 27
FabDate, 11 May 2010
UserDate, 11 May 2010
WaferDiameter, 0.2
DieLayout, FOUR_CROSSING
DieSize, 0.02, 0.02
DieType, PARTIAL
Attribute, W, 1e-05
Attribute, L, 1e-06
NodeNames, d g s b
Sweep, 1, V, D, LIN, 0, 5, 0.1, CALCULATED, 0.1, 0
Sweep, 2, V, G, LIN, 2, 5, CALCULATED, 5, 0.1, 0
Constant, V, S, 0, 0.1, 0
Constant, V, B, -3, 0.1, 0
Target, I, D
Function, gds, derivative (Vd, ID)
Plot, idvd, XY (LIN LIN), vd, id
Plot, gds, XY (LIN LOG), vd, gds
DataArray, ID
0 1.93108e-05 2.80906e-05 3.03875e-05 3.12456e-05
3.18572e-05 3.23723e-05 3.28318e-05 3.32549e-05 3.36522e-05
3.40307e-05 3.43949e-05 3.47482e-05 3.5093e-05 3.54309e-05
3.57634e-05 3.60915e-05 3.6416e-05 3.67377e-05 3.7057e-05
3.73744e-05 3.76902e-05 3.80047e-05 3.83183e-05 3.86311e-05
3.89433e-05 3.92551e-05 3.95666e-05 3.98781e-05 4.01898e-05
4.05019e-05 4.08147e-05 4.11287e-05 4.14443e-05 4.17623e-05
4.20837e-05 4.24094e-05 4.27412e-05 4.30806e-05 4.343e-05
4.37919e-05 4.41696e-05 4.45666e-05 4.49874e-05 4.54369e-05
4.59207e-05 4.64451e-05 4.70174e-05 4.76454e-05 4.83378e-05
4.91045e-05 0 9.08334e-05 0.000167442 0.000230613
0.000281087 0.000319592 0.000346957 0.000364564 0.000375264
0.00038239 0.000387745 0.000392059 0.000395681 0.000398811
0.000401575 0.00040406 0.000406327 0.000408419 0.00041037
0.000412206 0.000413944 0.000415602 0.00041719 0.00041872
0.000420199 0.000421634 0.00042303 0.000424393 0.000425725
0.000427032 0.000428315 0.000429577 0.000430822 0.000432051
0.000433268 0.000434475 0.000435676 0.000436876 0.000438082
0.0004393 0.00044054 0.000441815 0.000443139 0.00044453
0.000446011 0.000447607 0.000449349 0.000451273 0.00045342
0.000455836 0.000458576 0 0.000151598 0.000287865
0.000409575 0.000517448 0.000612159 0.000694346 0.000764607
0.000823516 0.000871647 0.000909635 0.000938399 0.000959545
0.000975267 0.000987426 0.0009972 0.00100531 0.0010122
0.00101818 0.00102346 0.00102819 0.00103247 0.0010364
0.00104002 0.0010434 0.00104657 0.00104957 0.00105241
0.00105512 0.00105772 0.00106021 0.00106262 0.00106495
0.00106722 0.00106942 0.00107156 0.00107366 0.00107572
0.00107774 0.00107974 0.00108172 0.00108369 0.00108568
0.00108768 0.00108974 0.00109188 0.00109413 0.00109653
0.00109915 0.00110204 0.00110527 0 0.000203151
0.00039046 0.000562664 0.000720458 0.000864493 0.000995381
0.0011137 0.00121999 0.00131478 0.00139854 0.00147174
0.00153483 0.00158824 0.00163243 0.00166804 0.00169611
0.00171817 0.00173579 0.00175019 0.00176223 0.0017725
0.00178141 0.00178927 0.00179628 0.00180261 0.00180837
0.00181367 0.00181859 0.00182317 0.00182747 0.00183152
0.00183537 0.00183903 0.00184253 0.00184588 0.00184911
0.00185223 0.00185525 0.00185818 0.00186103 0.00186382
0.00186655 0.00186924 0.00187191 0.00187458 0.00187727
0.00188002 0.00188287 0.00188588 0.00188911 0
0.000247242 0.000478468 0.000694373 0.000895613 0.0010828
0.00125653 0.00141735 0.00156578 0.00170231 0.00182741
0.00194154 0.0020451 0.00213849 0.0022221 0.00229627
0.00236131 0.00241749 0.00246503 0.00250424 0.00253597
0.00256159 0.00258253 0.00259994 0.0026147 0.00262741
0.00263852 0.00264835 0.00265715 0.00266511 0.00267238
0.00267905 0.00268523 0.00269099 0.00269639 0.00270147
0.00270627 0.00271084 0.00271519 0.00271936 0.00272336
0.00272721 0.00273092 0.00273453 0.00273803 0.00274145
0.0027448 0.00274811 0.00275141 0.00275473 0.00275812
DataSetFinish
DataSetStart
DataSetName, idvdhigh
MeasurementType, DC
BatchName, opt_ex09
WaferName, wafer1
DieName, x0y0
DeviceName, n10_10
Temperature, 27
FabDate, 11 May 2010
UserDate, 11 May 2010
WaferDiameter, 0.2
DieLayout, FOUR_CROSSING
DieSize, 0.02, 0.02
DieType, PARTIAL
Attribute, W, 1e-05
Attribute, L, 1e-05
NodeNames, d g s b
Sweep, 1, V, D, LIN, 0, 5, 0.1, CALCULATED, 0.1, 0
Sweep, 2, V, G, LIN, 2, 5, CALCULATED, 5, 0.1, 0
Constant, V, S, 0, 0.1, 0
Constant, V, B, -3, 0.1, 0
Target, I, D
Function, gds, derivative (Vd, ID)
Plot, idvd, XY (LIN LIN), vd, id
Plot, gds, XY (LIN LOG), vd, gds
DataArray, ID
0 2.51346e-06 4.08877e-06 4.79534e-06 4.96231e-06
4.99704e-06 5.012e-06 5.02255e-06 5.03163e-06 5.04008e-06
5.04822e-06 5.05616e-06 5.064e-06 5.07175e-06 5.07946e-06
5.08713e-06 5.09477e-06 5.10239e-06 5.11e-06 5.11759e-06
5.12517e-06 5.13274e-06 5.1403e-06 5.14786e-06 5.15541e-06
5.16296e-06 5.17051e-06 5.17805e-06 5.18559e-06 5.19313e-06
5.20067e-06 5.20822e-06 5.21577e-06 5.22332e-06 5.23089e-06
5.23848e-06 5.2461e-06 5.25377e-06 5.26148e-06 5.26926e-06
5.27714e-06 5.28513e-06 5.29327e-06 5.30158e-06 5.31011e-06
5.3189e-06 5.328e-06 5.33746e-06 5.34735e-06 5.35773e-06
5.36868e-06 0 8.65382e-06 1.63136e-05 2.29844e-05
2.86718e-05 3.33818e-05 3.71222e-05 3.99062e-05 4.17657e-05
4.27998e-05 4.32575e-05 4.34523e-05 4.35579e-05 4.36319e-05
4.36923e-05 4.37458e-05 4.37953e-05 4.38422e-05 4.38873e-05
4.39312e-05 4.39742e-05 4.40164e-05 4.40581e-05 4.40994e-05
4.41403e-05 4.41809e-05 4.42212e-05 4.42613e-05 4.43013e-05
4.43411e-05 4.43807e-05 4.44203e-05 4.44597e-05 4.44991e-05
4.45384e-05 4.45776e-05 4.46168e-05 4.46559e-05 4.46951e-05
4.47343e-05 4.47736e-05 4.4813e-05 4.48526e-05 4.48926e-05
4.49329e-05 4.49738e-05 4.50155e-05 4.50581e-05 4.51019e-05
4.51471e-05 4.51941e-05 0 1.42216e-05 2.74773e-05
3.97718e-05 5.11095e-05 6.1495e-05 7.09327e-05 7.94273e-05
8.69834e-05 9.3606e-05 9.93006e-05 0.000104074 0.000107935
0.000110901 0.000113008 0.000114346 0.0001151 0.000115514
0.000115767 0.000115949 0.000116093 0.000116218 0.00011633
0.000116434 0.000116532 0.000116625 0.000116715 0.000116802
0.000116888 0.000116971 0.000117054 0.000117135 0.000117215
0.000117294 0.000117373 0.000117451 0.000117529 0.000117606
0.000117682 0.000117759 0.000117835 0.00011791 0.000117986
0.000118061 0.000118136 0.000118212 0.000118287 0.000118363
0.000118439 0.000118516 0.000118594 0 1.92451e-05
3.75624e-05 5.49558e-05 7.14295e-05 8.69875e-05 0.000101634
0.000115373 0.000128208 0.000140144 0.000151184 0.000161332
0.000170594 0.000178972 0.000186471 0.000193096 0.000198852
0.000203747 0.000207789 0.000210996 0.000213401 0.000215077
0.000216161 0.000216843 0.000217295 0.000217625 0.000217886
0.000218107 0.000218301 0.000218478 0.000218642 0.000218796
0.000218942 0.000219083 0.000219219 0.000219351 0.00021948
0.000219606 0.00021973 0.000219852 0.000219972 0.000220091
0.000220209 0.000220325 0.000220441 0.000220556 0.00022067
0.000220783 0.000220896 0.000221008 0.00022112 0
2.37797e-05 4.66712e-05 6.86783e-05 8.98046e-05 0.000110054
0.00012943 0.000147936 0.000165577 0.000182355 0.000198274
0.000213338 0.00022755 0.000240915 0.000253434 0.000265114
0.000275955 0.000285964 0.000295142 0.000303494 0.000311024
0.000317737 0.000323636 0.00032873 0.000333026 0.00033654
0.0003393 0.00034136 0.00034282 0.000343825 0.00034453
0.000345053 0.000345467 0.000345812 0.000346111 0.000346378
0.000346622 0.000346849 0.000347062 0.000347264 0.000347458
0.000347644 0.000347825 0.000348001 0.000348172 0.00034834
0.000348505 0.000348667 0.000348827 0.000348985 0.000349141
DataSetFinish
DataSetStart
DataSetName, idvdhigh
MeasurementType, DC
BatchName, opt_ex09
WaferName, wafer1
DieName, x0y0
DeviceName, n10_2
Temperature, 27
FabDate, 11 May 2010
UserDate, 11 May 2010
WaferDiameter, 0.2
DieLayout, FOUR_CROSSING
DieSize, 0.02, 0.02
DieType, PARTIAL
Attribute, W, 1e-05
Attribute, L, 2e-06
NodeNames, d g s b
Sweep, 1, V, D, LIN, 0, 5, 0.1, CALCULATED, 0.1, 0
Sweep, 2, V, G, LIN, 2, 5, CALCULATED, 5, 0.1, 0
Constant, V, S, 0, 0.1, 0
Constant, V, B, -3, 0.1, 0
Target, I, D
Function, gds, derivative (Vd, ID)
Plot, idvd, XY (LIN LIN), vd, id
Plot, gds, XY (LIN LOG), vd, gds
DataArray, ID
0 1.03326e-05 1.57743e-05 1.74329e-05 1.77996e-05
1.79746e-05 1.81044e-05 1.82148e-05 1.83141e-05 1.84062e-05
1.84932e-05 1.85767e-05 1.86573e-05 1.87357e-05 1.88125e-05
1.88878e-05 1.8962e-05 1.90353e-05 1.91077e-05 1.91795e-05
1.92507e-05 1.93214e-05 1.93917e-05 1.94616e-05 1.95311e-05
1.96004e-05 1.96694e-05 1.97382e-05 1.98069e-05 1.98754e-05
1.99438e-05 2.00121e-05 2.00806e-05 2.01491e-05 2.0218e-05
2.02874e-05 2.03574e-05 2.04284e-05 2.05007e-05 2.05748e-05
2.06511e-05 2.07303e-05 2.0813e-05 2.09001e-05 2.09924e-05
2.10911e-05 2.11973e-05 2.13124e-05 2.14378e-05 2.15752e-05
2.17262e-05 0 4.30293e-05 8.02515e-05 0.000111818
0.000137877 0.00015858 0.0001741 0.000184695 0.000190973
0.000194305 0.000196255 0.000197622 0.000198691 0.000199578
0.000200342 0.000201017 0.000201626 0.000202183 0.0002027
0.000203185 0.000203643 0.000204079 0.000204496 0.000204898
0.000205286 0.000205663 0.000206031 0.000206389 0.00020674
0.000207084 0.000207422 0.000207755 0.000208083 0.000208408
0.000208728 0.000209046 0.000209362 0.000209676 0.00020999
0.000210305 0.000210623 0.000210945 0.000211275 0.000211615
0.000211969 0.000212342 0.00021274 0.000213169 0.000213636
0.00021415 0.000214721 0 7.19425e-05 0.00013792
0.000198074 0.000252545 0.000301468 0.000344972 0.000383187
0.000416238 0.000444251 0.000467358 0.000485716 0.000499556
0.000509334 0.00051594 0.000520512 0.000523902 0.000526572
0.000528768 0.000530629 0.000532244 0.000533673 0.000534955
0.000536122 0.000537195 0.000538191 0.000539122 0.00054
0.000540832 0.000541625 0.000542384 0.000543114 0.000543819
0.0005445 0.000545162 0.000545807 0.000546435 0.00054705
0.000547652 0.000548244 0.000548827 0.000549402 0.000549973
0.000550542 0.000551112 0.000551687 0.000552273 0.000552876
0.000553504 0.000554167 0.000554877 0 9.73893e-05
0.000188787 0.000274329 0.000354146 0.000428366 0.000497111
0.000560502 0.000618656 0.000671687 0.000719704 0.000762817
0.000801131 0.000834752 0.000863787 0.000888351 0.000908582
0.00092469 0.000937053 0.000946325 0.000953336 0.000958801
0.000963207 0.000966862 0.000969967 0.000972658 0.000975027
0.000977142 0.000979053 0.000980798 0.000982404 0.000983896
0.00098529 0.000986601 0.000987841 0.000989019 0.000990144
0.000991221 0.000992257 0.000993255 0.000994222 0.000995159
0.00099607 0.000996958 0.000997827 0.000998679 0.000999518
0.00100035 0.00100117 0.001002 0.00100284 0
0.000119855 0.00023376 0.000341843 0.000444225 0.000541027
0.000632366 0.000718354 0.000799102 0.000874716 0.000945301
0.00101096 0.00107179 0.00112788 0.00117934 0.00122625
0.00126871 0.00130679 0.0013406 0.00137022 0.00139574
0.00141729 0.00143505 0.00144931 0.0014606 0.00146956
0.00147678 0.00148273 0.00148774 0.00149202 0.00149575
0.00149904 0.00150198 0.00150463 0.00150705 0.00150928
0.00151133 0.00151325 0.00151505 0.00151674 0.00151834
0.00151987 0.00152132 0.00152271 0.00152405 0.00152534
0.00152658 0.00152779 0.00152896 0.0015301 0.00153122
DataSetFinish
DataSetStart
DataSetName, idvdhigh
MeasurementType, DC
BatchName, opt_ex09
WaferName, wafer1
DieName, x0y0
DeviceName, n10_5
Temperature, 27
FabDate, 11 May 2010
UserDate, 11 May 2010
WaferDiameter, 0.2
DieLayout, FOUR_CROSSING
DieSize, 0.02, 0.02
DieType, PARTIAL
Attribute, W, 1e-05
Attribute, L, 5e-06
NodeNames, d g s b
Sweep, 1, V, D, LIN, 0, 5, 0.1, CALCULATED, 0.1, 0
Sweep, 2, V, G, LIN, 2, 5, CALCULATED, 5, 0.1, 0
Constant, V, S, 0, 0.1, 0
Constant, V, B, -3, 0.1, 0
Target, I, D
Function, gds, derivative (Vd, ID)
Plot, idvd, XY (LIN LIN), vd, id
Plot, gds, XY (LIN LOG), vd, gds
DataArray, ID
0 4.77604e-06 7.65342e-06 8.82927e-06 9.08435e-06
9.15135e-06 9.18869e-06 9.21812e-06 9.24438e-06 9.26902e-06
9.29271e-06 9.31579e-06 9.33846e-06 9.36081e-06 9.38295e-06
9.4049e-06 9.42672e-06 9.44843e-06 9.47005e-06 9.49159e-06
9.51308e-06 9.5345e-06 9.55589e-06 9.57724e-06 9.59855e-06
9.61983e-06 9.64109e-06 9.66233e-06 9.68355e-06 9.70476e-06
9.72597e-06 9.74718e-06 9.76841e-06 9.78966e-06 9.81097e-06
9.83236e-06 9.85386e-06 9.87552e-06 9.89739e-06 9.91955e-06
9.94207e-06 9.96505e-06 9.98861e-06 1.00129e-05 1.0038e-05
1.00642e-05 1.00916e-05 1.01205e-05 1.01511e-05 1.01836e-05
1.02184e-05 0 1.72416e-05 3.2416e-05 4.55443e-05
5.66479e-05 6.57499e-05 7.28774e-05 7.80722e-05 8.14296e-05
8.32272e-05 8.40516e-05 8.44722e-05 8.47468e-05 8.49588e-05
8.51379e-05 8.5297e-05 8.54427e-05 8.5579e-05 8.57082e-05
8.58321e-05 8.59517e-05 8.6068e-05 8.61816e-05 8.62928e-05
8.64022e-05 8.651e-05 8.66164e-05 8.67216e-05 8.68258e-05
8.69292e-05 8.70317e-05 8.71336e-05 8.72348e-05 8.73355e-05
8.74358e-05 8.75357e-05 8.76353e-05 8.77347e-05 8.78341e-05
8.79335e-05 8.80333e-05 8.81336e-05 8.82347e-05 8.83372e-05
8.84414e-05 8.85481e-05 8.86578e-05 8.87716e-05 8.88905e-05
8.90155e-05 8.91482e-05 0 2.84777e-05 5.49155e-05
7.93324e-05 0.000101747 0.000122179 0.000140647 0.000157169
0.000171763 0.00018445 0.00019525 0.000204186 0.00021129
0.000216619 0.000220294 0.000222589 0.000223958 0.000224834
0.000225463 0.00022596 0.000226378 0.000226742 0.00022707
0.00022737 0.000227649 0.000227911 0.000228161 0.0002284
0.00022863 0.000228853 0.00022907 0.000229282 0.000229489
0.000229692 0.000229892 0.000230089 0.000230283 0.000230475
0.000230665 0.000230853 0.000231039 0.000231224 0.000231409
0.000231592 0.000231775 0.000231958 0.000232141 0.000232326
0.000232513 0.000232704 0.000232899 0 3.8556e-05
7.51257e-05 0.000109727 0.000142376 0.000173092 0.00020189
0.000228788 0.000253803 0.000276951 0.000298248 0.000317712
0.000335357 0.000351202 0.000365262 0.000377555 0.000388102
0.000396927 0.000404066 0.000409583 0.00041361 0.000416396
0.0004183 0.000419659 0.000420697 0.000421535 0.000422243
0.000422859 0.000423408 0.000423906 0.000424365 0.000424792
0.000425194 0.000425576 0.00042594 0.000426289 0.000426626
0.000426953 0.00042727 0.000427579 0.000427882 0.000428178
0.000428469 0.000428755 0.000429037 0.000429315 0.00042959
0.000429863 0.000430132 0.000430401 0.000430668 0
4.7605e-05 9.3286e-05 0.000137059 0.00017894 0.000218946
0.000257091 0.000293392 0.000327863 0.000360521 0.000391379
0.000420453 0.000447758 0.000473308 0.000497118 0.000519203
0.000539575 0.000558251 0.000575244 0.000590569 0.000604242
0.000616279 0.000626698 0.000635526 0.0006428 0.000648587
0.000653015 0.000656301 0.000658733 0.000660584 0.000662052
0.000663261 0.000664289 0.000665185 0.000665981 0.000666701
0.000667361 0.000667971 0.000668542 0.00066908 0.00066959
0.000670077 0.000670544 0.000670994 0.000671429 0.00067185
0.000672261 0.000672661 0.000673053 0.000673436 0.000673813
DataSetFinish
DataSetStart
DataSetName, idvdhigh
MeasurementType, DC
BatchName, opt_ex09
WaferName, wafer1
DieName, x0y0
DeviceName, n2_0p5
Temperature, 27
FabDate, 11 May 2010
UserDate, 11 May 2010
WaferDiameter, 0.2
DieLayout, FOUR_CROSSING
DieSize, 0.02, 0.02
DieType, PARTIAL
Attribute, W, 2e-06
Attribute, L, 5e-07
NodeNames, d g s b
Sweep, 1, V, D, LIN, 0, 5, 0.1, CALCULATED, 0.1, 0
Sweep, 2, V, G, LIN, 2, 5, CALCULATED, 5, 0.1, 0
Constant, V, S, 0, 0.1, 0
Constant, V, B, -3, 0.1, 0
Target, I, D
Function, gds, derivative (Vd, ID)
Plot, idvd, XY (LIN LIN), vd, id
Plot, gds, XY (LIN LOG), vd, gds
DataArray, ID
0 5.49366e-07 6.44616e-07 7.3437e-07 8.29064e-07
9.30661e-07 1.04024e-06 1.15862e-06 1.28652e-06 1.42459e-06
1.57345e-06 1.73371e-06 1.90595e-06 2.09074e-06 2.28864e-06
2.50017e-06 2.72587e-06 2.96623e-06 3.22174e-06 3.49287e-06
3.78005e-06 4.0837e-06 4.40422e-06 4.74197e-06 5.0973e-06
5.47054e-06 5.86198e-06 6.27194e-06 6.70071e-06 7.1486e-06
7.61596e-06 8.1032e-06 8.61085e-06 9.13954e-06 9.69014e-06
1.02638e-05 1.08619e-05 1.14864e-05 1.21398e-05 1.2825e-05
1.35461e-05 1.43078e-05 1.51161e-05 1.5978e-05 1.69024e-05
1.78992e-05 1.89808e-05 2.01611e-05 2.14566e-05 2.28861e-05
2.44712e-05 0 3.28516e-05 5.72902e-05 7.43024e-05
8.50519e-05 9.16742e-05 9.64973e-05 0.000100488 0.000103974
0.000107114 0.000110005 0.000112711 0.000115275 0.000117729
0.000120096 0.000122393 0.000124634 0.000126829 0.000128987
0.000131113 0.000133214 0.000135293 0.000137355 0.000139402
0.000141437 0.000143462 0.000145479 0.00014749 0.000149496
0.000151498 0.000153498 0.000155499 0.000157501 0.000159509
0.000161526 0.000163556 0.000165608 0.000167688 0.00016981
0.000171987 0.000174238 0.000176585 0.000179056 0.000181684
0.000184508 0.000187574 0.000190936 0.000194657 0.000198805
0.000203463 0.000208718 0 6.06594e-05 0.000112123
0.000155254 0.000190816 0.000219497 0.000241965 0.000259018
0.000271882 0.000281955 0.000290209 0.000297217 0.000303331
0.000308784 0.000313733 0.000318289 0.000322534 0.000326528
0.000330317 0.000333936 0.000337413 0.000340771 0.000344026
0.000347195 0.000350288 0.000353315 0.000356286 0.000359207
0.000362083 0.000364921 0.000367725 0.000370499 0.000373248
0.000375975 0.000378686 0.000381387 0.000384085 0.000386791
0.000389516 0.000392278 0.000395099 0.000398005 0.000401033
0.000404224 0.000407632 0.000411319 0.000415361 0.000419847
0.000424879 0.000430576 0.000437073 0 8.13486e-05
0.000153449 0.000217058 0.000272854 0.000321445 0.00036338
0.000399157 0.000429239 0.000454073 0.000474171 0.000490275
0.00050333 0.000514175 0.000523415 0.000531465 0.000538611
0.000545057 0.000550949 0.000556397 0.000561481 0.000566266
0.0005708 0.000575124 0.000579268 0.000583258 0.000587115
0.000590857 0.000594497 0.000598049 0.000601522 0.000604926
0.000608268 0.000611555 0.000614795 0.000617994 0.00062116
0.000624302 0.000627431 0.000630561 0.000633711 0.000636904
0.000640174 0.000643558 0.000647109 0.000650888 0.000654974
0.000659458 0.000664452 0.000670087 0.000676515 0
9.72618e-05 0.000185505 0.000265385 0.000337498 0.000402382
0.000460529 0.000512386 0.000558361 0.000598824 0.000634106
0.000664475 0.00069012 0.000711283 0.000728582 0.00074288
0.000754938 0.00076532 0.000774428 0.000782547 0.000789885
0.000796597 0.000802799 0.00080858 0.00081401 0.000819145
0.000824028 0.000828696 0.000833177 0.000837496 0.000841674
0.000845728 0.000849671 0.000853518 0.000857277 0.00086096
0.000864575 0.000868132 0.000871641 0.000875114 0.000878564
0.000882011 0.000885479 0.000888998 0.000892611 0.000896368
0.000900336 0.000904597 0.000909253 0.000914426 0.000920261
DataSetFinish
DataSetStart
DataSetName, idvdhigh
MeasurementType, DC
BatchName, opt_ex09
WaferName, wafer1
DieName, x0y0
DeviceName, n2_10
Temperature, 27
FabDate, 11 May 2010
UserDate, 11 May 2010
WaferDiameter, 0.2
DieLayout, FOUR_CROSSING
DieSize, 0.02, 0.02
DieType, PARTIAL
Attribute, W, 2e-06
Attribute, L, 1e-05
NodeNames, d g s b
Sweep, 1, V, D, LIN, 0, 5, 0.1, CALCULATED, 0.1, 0
Sweep, 2, V, G, LIN, 2, 5, CALCULATED, 5, 0.1, 0
Constant, V, S, 0, 0.1, 0
Constant, V, B, -3, 0.1, 0
Target, I, D
Function, gds, derivative (Vd, ID)
Plot, idvd, XY (LIN LIN), vd, id
Plot, gds, XY (LIN LOG), vd, gds
DataArray, ID
0 3.53562e-07 5.38407e-07 5.90976e-07 5.99122e-07
6.01514e-07 6.02965e-07 6.04155e-07 6.05245e-07 6.06288e-07
6.07306e-07 6.08309e-07 6.09303e-07 6.10291e-07 6.11274e-07
6.12254e-07 6.13232e-07 6.14207e-07 6.15182e-07 6.16155e-07
6.17128e-07 6.18099e-07 6.1907e-07 6.20041e-07 6.21011e-07
6.21981e-07 6.2295e-07 6.2392e-07 6.24889e-07 6.25858e-07
6.26828e-07 6.27798e-07 6.28769e-07 6.29742e-07 6.30716e-07
6.31694e-07 6.32676e-07 6.33664e-07 6.3466e-07 6.35665e-07
6.36684e-07 6.37718e-07 6.38772e-07 6.39851e-07 6.40959e-07
6.42101e-07 6.43285e-07 6.44518e-07 6.45807e-07 6.4716e-07
6.48588e-07 0 1.54859e-06 2.90854e-06 4.08084e-06
5.06655e-06 5.86691e-06 6.48371e-06 6.9205e-06 7.18761e-06
7.31695e-06 7.36899e-06 7.39286e-06 7.40764e-06 7.41897e-06
7.4287e-06 7.43757e-06 7.44591e-06 7.45391e-06 7.46167e-06
7.46925e-06 7.47671e-06 7.48406e-06 7.49134e-06 7.49855e-06
7.50571e-06 7.51282e-06 7.5199e-06 7.52695e-06 7.53397e-06
7.54096e-06 7.54794e-06 7.5549e-06 7.56185e-06 7.56879e-06
7.57571e-06 7.58263e-06 7.58954e-06 7.59645e-06 7.60336e-06
7.61029e-06 7.61723e-06 7.62421e-06 7.63123e-06 7.63831e-06
7.64547e-06 7.65274e-06 7.66016e-06 7.66776e-06 7.67558e-06
7.68367e-06 7.6921e-06 0 2.63677e-06 5.08969e-06
7.35962e-06 9.44742e-06 1.13539e-05 1.308e-05 1.46266e-05
1.59945e-05 1.71848e-05 1.81984e-05 1.90369e-05 1.97024e-05
2.01989e-05 2.05365e-05 2.07387e-05 2.08481e-05 2.09093e-05
2.09489e-05 2.09787e-05 2.10034e-05 2.10251e-05 2.10449e-05
2.10634e-05 2.10809e-05 2.10978e-05 2.11142e-05 2.11301e-05
2.11457e-05 2.11611e-05 2.11762e-05 2.11911e-05 2.12059e-05
2.12205e-05 2.1235e-05 2.12494e-05 2.12637e-05 2.1278e-05
2.12922e-05 2.13063e-05 2.13203e-05 2.13344e-05 2.13484e-05
2.13623e-05 2.13763e-05 2.13903e-05 2.14043e-05 2.14184e-05
2.14325e-05 2.14469e-05 2.14614e-05 0 3.61935e-06
7.06184e-06 1.03283e-05 1.34194e-05 1.6336e-05 1.90788e-05
2.16486e-05 2.40462e-05 2.62723e-05 2.83277e-05 3.02132e-05
3.19295e-05 3.34774e-05 3.48579e-05 3.60717e-05 3.71201e-05
3.80042e-05 3.87265e-05 3.92905e-05 3.97045e-05 3.99853e-05
4.01632e-05 4.02754e-05 4.03514e-05 4.04082e-05 4.04542e-05
4.04937e-05 4.05289e-05 4.05611e-05 4.05912e-05 4.06196e-05
4.06467e-05 4.06728e-05 4.06982e-05 4.07228e-05 4.07469e-05
4.07706e-05 4.07938e-05 4.08168e-05 4.08394e-05 4.08618e-05
4.08839e-05 4.09059e-05 4.09277e-05 4.09493e-05 4.09708e-05
4.09922e-05 4.10135e-05 4.10347e-05 4.10559e-05 0
4.50684e-06 8.84426e-06 1.3013e-05 1.70137e-05 2.08471e-05
2.45139e-05 2.80148e-05 3.13505e-05 3.45217e-05 3.7529e-05
4.03731e-05 4.30548e-05 4.55747e-05 4.79335e-05 5.01319e-05
5.21705e-05 5.405e-05 5.57712e-05 5.73348e-05 5.87415e-05
5.99922e-05 6.10879e-05 6.20299e-05 6.282e-05 6.34615e-05
6.39604e-05 6.43284e-05 6.45864e-05 6.47636e-05 6.48886e-05
6.49825e-05 6.50575e-05 6.51207e-05 6.51759e-05 6.52255e-05
6.52709e-05 6.53133e-05 6.53533e-05 6.53914e-05 6.54279e-05
6.54631e-05 6.54973e-05 6.55305e-05 6.55631e-05 6.55949e-05
6.56262e-05 6.56571e-05 6.56875e-05 6.57175e-05 6.57472e-05
DataSetFinish
DataSetStart
DataSetName, idvdhigh
MeasurementType, DC
BatchName, opt_ex09
WaferName, wafer1
DieName, x0y0
DeviceName, n5_10
Temperature, 27
FabDate, 11 May 2010
UserDate, 11 May 2010
WaferDiameter, 0.2
DieLayout, FOUR_CROSSING
DieSize, 0.02, 0.02
DieType, PARTIAL
Attribute, W, 5e-06
Attribute, L, 1e-05
NodeNames, d g s b
Sweep, 1, V, D, LIN, 0, 5, 0.1, CALCULATED, 0.1, 0
Sweep, 2, V, G, LIN, 2, 5, CALCULATED, 5, 0.1, 0
Constant, V, S, 0, 0.1, 0
Constant, V, B, -3, 0.1, 0
Target, I, D
Function, gds, derivative (Vd, ID)
Plot, idvd, XY (LIN LIN), vd, id
Plot, gds, XY (LIN LOG), vd, gds
DataArray, ID
0 1.07433e-06 1.69665e-06 1.92509e-06 1.96713e-06
1.97714e-06 1.98234e-06 1.98634e-06 1.98991e-06 1.99329e-06
1.99657e-06 1.99978e-06 2.00296e-06 2.00612e-06 2.00925e-06
2.01238e-06 2.01549e-06 2.0186e-06 2.0217e-06 2.0248e-06
2.0279e-06 2.03099e-06 2.03408e-06 2.03717e-06 2.04025e-06
2.04334e-06 2.04642e-06 2.0495e-06 2.05258e-06 2.05567e-06
2.05875e-06 2.06183e-06 2.06492e-06 2.06801e-06 2.07111e-06
2.07421e-06 2.07733e-06 2.08047e-06 2.08363e-06 2.08682e-06
2.09005e-06 2.09332e-06 2.09666e-06 2.10008e-06 2.10358e-06
2.1072e-06 2.11094e-06 2.11483e-06 2.1189e-06 2.12318e-06
2.12769e-06 0 4.12274e-06 7.75597e-06 1.09022e-05
1.35643e-05 1.57452e-05 1.74492e-05 1.86842e-05 1.94714e-05
1.9877e-05 2.00458e-05 2.01201e-05 2.01635e-05 2.01956e-05
2.02227e-05 2.0247e-05 2.02697e-05 2.02914e-05 2.03124e-05
2.03329e-05 2.03529e-05 2.03727e-05 2.03922e-05 2.04116e-05
2.04308e-05 2.04498e-05 2.04688e-05 2.04877e-05 2.05065e-05
2.05252e-05 2.05439e-05 2.05625e-05 2.05811e-05 2.05996e-05
2.06181e-05 2.06366e-05 2.06551e-05 2.06735e-05 2.0692e-05
2.07105e-05 2.0729e-05 2.07476e-05 2.07664e-05 2.07853e-05
2.08043e-05 2.08237e-05 2.08435e-05 2.08637e-05 2.08845e-05
2.0906e-05 2.09283e-05 0 6.89167e-06 1.33071e-05
1.92486e-05 2.47182e-05 2.97183e-05 3.4251e-05 3.83187e-05
4.19237e-05 4.50684e-05 4.77556e-05 4.99889e-05 5.17734e-05
5.31188e-05 5.4048e-05 5.4616e-05 5.49271e-05 5.50994e-05
5.5209e-05 5.52899e-05 5.53562e-05 5.5414e-05 5.54664e-05
5.55153e-05 5.55616e-05 5.5606e-05 5.56489e-05 5.56907e-05
5.57316e-05 5.57717e-05 5.58112e-05 5.58502e-05 5.58887e-05
5.59269e-05 5.59648e-05 5.60023e-05 5.60397e-05 5.60768e-05
5.61137e-05 5.61505e-05 5.61871e-05 5.62237e-05 5.62601e-05
5.62965e-05 5.63328e-05 5.63692e-05 5.64056e-05 5.64422e-05
5.64791e-05 5.65163e-05 5.65541e-05 0 9.39082e-06
1.83239e-05 2.68011e-05 3.48247e-05 4.23965e-05 4.95185e-05
5.61928e-05 6.24213e-05 6.82059e-05 7.35488e-05 7.84518e-05
8.2917e-05 8.69465e-05 9.05424e-05 9.37072e-05 9.64435e-05
9.8755e-05 0.000100647 0.000102129 0.000103221 0.000103966
0.00010444 0.000104738 0.000104939 0.000105089 0.00010521
0.000105313 0.000105405 0.000105489 0.000105567 0.000105641
0.000105711 0.000105779 0.000105844 0.000105908 0.00010597
0.000106032 0.000106092 0.000106151 0.000106209 0.000106267
0.000106324 0.000106381 0.000106437 0.000106493 0.000106548
0.000106603 0.000106658 0.000106713 0.000106768 0
1.16473e-05 2.28563e-05 3.36288e-05 4.39667e-05 5.38718e-05
6.33459e-05 7.23908e-05 8.10083e-05 8.92002e-05 9.69683e-05
0.000104314 0.00011124 0.000117747 0.000123838 0.000129513
0.000134776 0.000139626 0.000144068 0.000148101 0.000151729
0.000154954 0.000157777 0.000160203 0.000162236 0.000163886
0.000165166 0.00016611 0.00016677 0.000167224 0.000167545
0.000167785 0.000167978 0.000168141 0.000168283 0.00016841
0.000168527 0.000168636 0.000168739 0.000168836 0.00016893
0.000169021 0.000169108 0.000169194 0.000169277 0.000169359
0.000169439 0.000169518 0.000169596 0.000169673 0.000169749
DataSetFinish
DataSetStart
DataSetName, idvdlow
MeasurementType, DC
BatchName, opt_ex09
WaferName, wafer1
DieName, x0y0
DeviceName, n10_0p5
Temperature, 27
FabDate, 11 May 2010
UserDate, 11 May 2010
WaferDiameter, 0.2
DieLayout, FOUR_CROSSING
DieSize, 0.02, 0.02
DieType, PARTIAL
Attribute, W, 1e-05
Attribute, L, 5e-07
NodeNames, d g s b
Sweep, 1, V, D, LIN, 0, 5, 0.1, CALCULATED, 0.1, 0
Sweep, 2, V, G, LIN, 1.5, 5, CALCULATED, 5, 0.1, 0
Constant, V, S, 0, 0.1, 0
Constant, V, B, 0, 0.1, 0
Target, I, D
Function, gds, derivative (Vd, ID)
Plot, idvd, XY (LIN LIN), vd, id
Plot, gds, XY (LIN LOG), vd, gds
DataArray, ID
0 8.39927e-05 0.000128797 0.000147638 0.000158106
0.000166326 0.000173437 0.000179857 0.000185809 0.000191432
0.000196815 0.00020202 0.000207092 0.000212063 0.000216958
0.000221793 0.000226585 0.000231344 0.000236079 0.000240797
0.000245505 0.000250207 0.000254906 0.000259608 0.000264314
0.000269027 0.000273749 0.000278483 0.000283231 0.000287996
0.000292782 0.000297594 0.000302439 0.000307326 0.000312269
0.000317285 0.000322396 0.00032763 0.000333025 0.000338624
0.000344485 0.000350674 0.000357272 0.000364373 0.00037209
0.00038055 0.000389902 0.000400314 0.000411975 0.000425099
0.000439921 0 0.00028579 0.000518044 0.000703447
0.000847697 0.000955908 0.00103366 0.00108888 0.00113001
0.00116242 0.00118912 0.00121185 0.00123173 0.00124947
0.0012656 0.00128045 0.0012943 0.00130732 0.00131968
0.00133149 0.00134283 0.00135378 0.00136439 0.00137472
0.0013848 0.00139466 0.00140434 0.00141385 0.00142321
0.00143245 0.00144158 0.00145061 0.00145957 0.00146847
0.00147734 0.00148621 0.00149512 0.00150412 0.0015133
0.00152273 0.00153253 0.00154286 0.00155388 0.00156581
0.00157892 0.00159351 0.00160994 0.00162863 0.00165006
0.00167477 0.00170337 0 0.000426831 0.000797178
0.00111707 0.00139171 0.00162561 0.00182272 0.0019865
0.00211997 0.00222586 0.00230774 0.0023711 0.00242142
0.00246267 0.00249745 0.00252748 0.00255394 0.00257764
0.00259916 0.00261895 0.00263732 0.00265453 0.00267077
0.00268619 0.00270091 0.00271504 0.00272866 0.00274183
0.00275461 0.00276705 0.00277918 0.00279106 0.00280269
0.00281413 0.00282539 0.00283651 0.00284753 0.0028585
0.0028695 0.00288059 0.0028919 0.00290356 0.00291577
0.00292876 0.00294281 0.00295828 0.00297559 0.00299527
0.0030179 0.00304419 0.00307493 0 0.000530721
0.00100542 0.00142934 0.00180709 0.00214272 0.00243984
0.00270164 0.00293094 0.00313019 0.0033013 0.00344527
0.00356235 0.00365481 0.00372787 0.00378686 0.00383573
0.00387719 0.00391311 0.00394478 0.00397311 0.0039988
0.00402235 0.00404413 0.00406446 0.00408356 0.00410163
0.00411881 0.00413523 0.00415098 0.00416616 0.00418084
0.00419506 0.0042089 0.00422238 0.00423556 0.00424848
0.00426119 0.00427373 0.00428618 0.00429862 0.00431117
0.00432396 0.0043372 0.00435112 0.00436604 0.00438236
0.00440055 0.00442119 0.00444499 0.00447277 0
0.00061 0.00116585 0.00167205 0.00213262 0.00255117
0.00293091 0.00327475 0.0035853 0.0038649 0.00411563
0.00433926 0.00453703 0.00470913 0.00485431 0.00497211
0.00506602 0.00514159 0.00520368 0.00525584 0.00530058
0.00533963 0.00537425 0.00540534 0.0054336 0.00545953
0.00548353 0.00550593 0.00552696 0.00554683 0.0055657
0.00558371 0.00560096 0.00561755 0.00563356 0.00564906
0.00566411 0.00567875 0.00569305 0.00570707 0.00572087
0.00573452 0.00574814 0.00576186 0.00577585 0.00579035
0.00580567 0.00582219 0.00584039 0.00586087 0.00588436
DataSetFinish
DataSetStart
DataSetName, idvdlow
MeasurementType, DC
BatchName, opt_ex09
WaferName, wafer1
DieName, x0y0
DeviceName, n10_0p8
Temperature, 27
FabDate, 11 May 2010
UserDate, 11 May 2010
WaferDiameter, 0.2
DieLayout, FOUR_CROSSING
DieSize, 0.02, 0.02
DieType, PARTIAL
Attribute, W, 1e-05
Attribute, L, 8e-07
NodeNames, d g s b
Sweep, 1, V, D, LIN, 0, 5, 0.1, CALCULATED, 0.1, 0
Sweep, 2, V, G, LIN, 1.5, 5, CALCULATED, 5, 0.1, 0
Constant, V, S, 0, 0.1, 0
Constant, V, B, 0, 0.1, 0
Target, I, D
Function, gds, derivative (Vd, ID)
Plot, idvd, XY (LIN LIN), vd, id
Plot, gds, XY (LIN LOG), vd, gds
DataArray, ID
0 5.58254e-05 9.0198e-05 0.000106362 0.000112407
0.000115744 0.000118237 0.00012029 0.000122061 0.000123637
0.000125073 0.000126402 0.000127651 0.000128835 0.000129967
0.000131059 0.000132116 0.000133145 0.00013415 0.000135136
0.000136104 0.000137058 0.000138 0.00013893 0.000139852
0.000140766 0.000141673 0.000142573 0.000143469 0.000144362
0.000145251 0.000146139 0.000147027 0.000147918 0.000148814
0.000149719 0.000150637 0.000151575 0.000152539 0.000153538
0.000154584 0.000155689 0.000156868 0.000158139 0.000159523
0.000161044 0.000162727 0.000164604 0.000166707 0.000169075
0.000171747 0 0.000165135 0.000304931 0.000421166
0.000515472 0.000589378 0.000644441 0.000682729 0.000708043
0.000725469 0.000738474 0.000748758 0.000757216 0.00076438
0.000770591 0.000776077 0.000781001 0.000785479 0.000789597
0.000793422 0.000797002 0.000800379 0.000803583 0.00080664
0.000809571 0.000812391 0.000815117 0.000817758 0.000820326
0.000822829 0.000825274 0.000827668 0.000830018 0.00083233
0.00083461 0.000836867 0.000839109 0.000841349 0.000843601
0.000845884 0.000848221 0.000850644 0.000853189 0.000855902
0.000858837 0.000862062 0.000865653 0.000869701 0.00087431
0.000879599 0.000885704 0 0.000250781 0.000475238
0.000675017 0.000851629 0.00100647 0.00114082 0.00125588
0.00135276 0.00143255 0.00149636 0.00154569 0.00158294
0.00161126 0.00163339 0.00165124 0.00166602 0.00167856
0.0016894 0.00169893 0.00170742 0.00171507 0.00172205
0.00172847 0.00173443 0.00173999 0.00174521 0.00175015
0.00175484 0.00175931 0.00176359 0.00176771 0.00177168
0.00177552 0.00177924 0.00178286 0.00178639 0.00178985
0.00179325 0.0017966 0.00179994 0.00180328 0.00180666
0.00181012 0.00181373 0.00181754 0.00182166 0.00182617
0.00183122 0.00183693 0.0018435 0 0.000319296
0.000612278 0.000880433 0.00112514 0.00134768 0.00154924
0.00173092 0.00189375 0.0020387 0.00216664 0.00227841
0.00237477 0.00245638 0.00252381 0.00257791 0.00262052
0.00265424 0.00268144 0.00270388 0.00272277 0.00273898
0.0027531 0.00276558 0.00277674 0.00278682 0.00279602
0.00280447 0.0028123 0.0028196 0.00282644 0.00283289
0.00283899 0.00284479 0.00285033 0.00285564 0.00286074
0.00286565 0.0028704 0.00287502 0.00287951 0.0028839
0.00288822 0.0028925 0.00289678 0.00290112 0.00290557
0.00291023 0.0029152 0.00292062 0.00292663 0
0.000375029 0.000724254 0.00104901 0.00135054 0.00163
0.00188848 0.002127 0.00234649 0.00254786 0.00273193
0.00289949 0.00305127 0.00318794 0.0033101 0.00341827
0.00351274 0.00359351 0.00366053 0.00371472 0.00375827
0.00379366 0.00382292 0.00384757 0.00386867 0.00388702
0.00390319 0.00391758 0.00393054 0.00394231 0.00395308
0.00396302 0.00397223 0.00398083 0.0039889 0.00399651
0.00400371 0.00401055 0.00401707 0.00402332 0.00402932
0.00403509 0.00404067 0.00404609 0.00405138 0.00405657
0.0040617 0.00406684 0.00407205 0.00407743 0.00408309
DataSetFinish
DataSetStart
DataSetName, idvdlow
MeasurementType, DC
BatchName, opt_ex09
WaferName, wafer1
DieName, x0y0
DeviceName, n10_1
Temperature, 27
FabDate, 11 May 2010
UserDate, 11 May 2010
WaferDiameter, 0.2
DieLayout, FOUR_CROSSING
DieSize, 0.02, 0.02
DieType, PARTIAL
Attribute, W, 1e-05
Attribute, L, 1e-06
NodeNames, d g s b
Sweep, 1, V, D, LIN, 0, 5, 0.1, CALCULATED, 0.1, 0
Sweep, 2, V, G, LIN, 1.5, 5, CALCULATED, 5, 0.1, 0
Constant, V, S, 0, 0.1, 0
Constant, V, B, 0, 0.1, 0
Target, I, D
Function, gds, derivative (Vd, ID)
Plot, idvd, XY (LIN LIN), vd, id
Plot, gds, XY (LIN LOG), vd, gds
DataArray, ID
0 4.50941e-05 7.3843e-05 8.81057e-05 9.31775e-05
9.55085e-05 9.71166e-05 9.83921e-05 9.94662e-05 0.000100404
0.000101245 0.000102013 0.000102725 0.000103394 0.000104029
0.000104635 0.000105218 0.000105782 0.000106329 0.000106863
0.000107385 0.000107898 0.000108401 0.000108897 0.000109387
0.00010987 0.000110349 0.000110823 0.000111293 0.00011176
0.000112225 0.000112688 0.00011315 0.000113613 0.000114077
0.000114546 0.000115021 0.000115506 0.000116004 0.000116521
0.000117062 0.000117635 0.000118247 0.000118909 0.00011963
0.000120425 0.000121307 0.000122293 0.0001234 0.000124649
0.000126061 0 0.000129128 0.000239728 0.00033281
0.000409318 0.000470157 0.000516246 0.000548752 0.000569862
0.000583429 0.000592946 0.000600191 0.000605996 0.000610816
0.000614923 0.0006185 0.000621669 0.000624518 0.00062711
0.000629495 0.000631709 0.00063378 0.00063573 0.000637579
0.00063934 0.000641026 0.000642646 0.000644208 0.00064572
0.000647188 0.000648616 0.000650009 0.000651371 0.000652706
0.000654018 0.000655313 0.000656594 0.000657868 0.000659144
0.000660431 0.000661741 0.000663092 0.000664502 0.000665996
0.000667603 0.000669359 0.000671306 0.000673492 0.000675975
0.000678818 0.000682095 0 0.000196917 0.000374842
0.000534705 0.000677379 0.000803682 0.000914381 0.0010102
0.00109184 0.00115995 0.00121523 0.00125851 0.00129112
0.00131528 0.00133351 0.00134774 0.00135921 0.00136871
0.00137676 0.00138371 0.0013898 0.00139523 0.0014001
0.00140454 0.00140861 0.00141237 0.00141587 0.00141915
0.00142224 0.00142516 0.00142794 0.0014306 0.00143315
0.00143559 0.00143795 0.00144024 0.00144245 0.00144461
0.00144672 0.00144878 0.00145082 0.00145284 0.00145486
0.00145691 0.00145901 0.0014612 0.00146352 0.00146603
0.00146878 0.00147186 0.00147536 0 0.000252395
0.000485897 0.000701355 0.000899565 0.00108128 0.0012472
0.001398 0.00153431 0.00165673 0.00176582 0.00186212
0.00194614 0.00201835 0.00207924 0.0021293 0.0021693
0.00220067 0.00222534 0.0022451 0.00226127 0.00227481
0.00228633 0.00229632 0.00230508 0.00231287 0.00231987
0.00232622 0.00233202 0.00233736 0.00234232 0.00234694
0.00235128 0.00235537 0.00235923 0.00236291 0.00236641
0.00236977 0.00237299 0.00237609 0.00237909 0.00238199
0.00238482 0.0023876 0.00239033 0.00239305 0.00239579
0.00239858 0.00240147 0.00240454 0.00240785 0
0.000298361 0.000578224 0.000840351 0.00108547 0.00131425
0.00152735 0.00172538 0.00190893 0.00207854 0.00223474
0.00237802 0.00250887 0.00262772 0.00273501 0.00283112
0.0029164 0.00299115 0.00305555 0.0031097 0.00315399
0.00318963 0.00321836 0.00324185 0.0032614 0.00327794
0.00329216 0.00330456 0.0033155 0.00332526 0.00333404
0.00334202 0.00334932 0.00335604 0.00336227 0.00336808
0.00337351 0.00337863 0.00338346 0.00338804 0.0033924
0.00339657 0.00340056 0.00340439 0.00340809 0.00341168
0.00341517 0.0034186 0.00342199 0.00342538 0.00342882
DataSetFinish
DataSetStart
DataSetName, idvdlow
MeasurementType, DC
BatchName, opt_ex09
WaferName, wafer1
DieName, x0y0
DeviceName, n10_10
Temperature, 27
FabDate, 11 May 2010
UserDate, 11 May 2010
WaferDiameter, 0.2
DieLayout, FOUR_CROSSING
DieSize, 0.02, 0.02
DieType, PARTIAL
Attribute, W, 1e-05
Attribute, L, 1e-05
NodeNames, d g s b
Sweep, 1, V, D, LIN, 0, 5, 0.1, CALCULATED, 0.1, 0
Sweep, 2, V, G, LIN, 1.5, 5, CALCULATED, 5, 0.1, 0
Constant, V, S, 0, 0.1, 0
Constant, V, B, 0, 0.1, 0
Target, I, D
Function, gds, derivative (Vd, ID)
Plot, idvd, XY (LIN LIN), vd, id
Plot, gds, XY (LIN LOG), vd, gds
DataArray, ID
0 5.19925e-06 9.01216e-06 1.14628e-05 1.26539e-05
1.30071e-05 1.30974e-05 1.31368e-05 1.31636e-05 1.31859e-05
1.32062e-05 1.32253e-05 1.32438e-05 1.32619e-05 1.32796e-05
1.32971e-05 1.33145e-05 1.33318e-05 1.33489e-05 1.3366e-05
1.33831e-05 1.34e-05 1.3417e-05 1.34339e-05 1.34507e-05
1.34676e-05 1.34844e-05 1.35012e-05 1.3518e-05 1.35348e-05
1.35515e-05 1.35683e-05 1.3585e-05 1.36018e-05 1.36186e-05
1.36354e-05 1.36523e-05 1.36692e-05 1.36862e-05 1.37034e-05
1.37207e-05 1.37383e-05 1.37562e-05 1.37744e-05 1.37931e-05
1.38123e-05 1.38322e-05 1.38529e-05 1.38745e-05 1.38972e-05
1.39211e-05 0 1.26411e-05 2.39377e-05 3.38967e-05
4.25252e-05 4.98309e-05 5.58227e-05 6.05132e-05 6.39261e-05
6.61238e-05 6.7291e-05 6.78087e-05 6.8051e-05 6.81956e-05
6.83014e-05 6.83889e-05 6.84661e-05 6.8537e-05 6.86037e-05
6.86674e-05 6.87289e-05 6.87888e-05 6.88473e-05 6.89048e-05
6.89615e-05 6.90175e-05 6.90729e-05 6.91279e-05 6.91824e-05
6.92366e-05 6.92904e-05 6.9344e-05 6.93974e-05 6.94506e-05
6.95036e-05 6.95564e-05 6.96092e-05 6.96618e-05 6.97144e-05
6.9767e-05 6.98196e-05 6.98724e-05 6.99254e-05 6.99787e-05
7.00326e-05 7.00871e-05 7.01426e-05 7.01993e-05 7.02576e-05
7.03178e-05 7.03805e-05 0 1.91577e-05 3.70575e-05
5.37052e-05 6.91068e-05 8.3268e-05 9.61947e-05 0.000107893
0.000118368 0.000127628 0.000135677 0.000142525 0.000148182
0.000152662 0.000155999 0.000158267 0.000159638 0.000160401
0.000160844 0.000161139 0.00016136 0.000161542 0.0001617
0.000161842 0.000161973 0.000162096 0.000162214 0.000162326
0.000162435 0.00016254 0.000162644 0.000162745 0.000162844
0.000162942 0.000163039 0.000163135 0.00016323 0.000163324
0.000163417 0.000163509 0.000163602 0.000163693 0.000163784
0.000163875 0.000163966 0.000164056 0.000164147 0.000164238
0.000164329 0.000164421 0.000164514 0 2.48676e-05
4.85658e-05 7.10997e-05 9.24744e-05 0.000112695 0.000131767
0.000149694 0.000166483 0.000182137 0.000196662 0.000210064
0.000222346 0.000233515 0.000243575 0.000252533 0.000260393
0.000267165 0.000272857 0.000277486 0.000281081 0.000283703
0.000285478 0.000286615 0.000287349 0.000287859 0.000288244
0.000288557 0.000288824 0.000289061 0.000289275 0.000289473
0.000289658 0.000289834 0.000290002 0.000290164 0.000290321
0.000290473 0.000290622 0.000290768 0.00029091 0.000291051
0.00029119 0.000291326 0.000291462 0.000291596 0.000291728
0.00029186 0.000291991 0.000292121 0.00029225 0
2.98801e-05 5.86753e-05 8.63902e-05 0.000113029 0.000138597
0.000163097 0.000186535 0.000208915 0.000230241 0.000250517
0.000269748 0.000287939 0.000305092 0.000321214 0.000336307
0.000350376 0.000363426 0.000375461 0.000386486 0.000396504
0.000405521 0.000413543 0.000420575 0.000426627 0.00043171
0.000435845 0.000439073 0.000441469 0.000443167 0.000444347
0.00044519 0.000445825 0.000446332 0.000446755 0.000447121
0.000447447 0.000447742 0.000448015 0.000448271 0.000448511
0.000448741 0.000448961 0.000449172 0.000449378 0.000449577
0.000449772 0.000449962 0.000450148 0.000450332 0.000450512
DataSetFinish
DataSetStart
DataSetName, idvdlow
MeasurementType, DC
BatchName, opt_ex09
WaferName, wafer1
DieName, x0y0
DeviceName, n10_2
Temperature, 27
FabDate, 11 May 2010
UserDate, 11 May 2010
WaferDiameter, 0.2
DieLayout, FOUR_CROSSING
DieSize, 0.02, 0.02
DieType, PARTIAL
Attribute, W, 1e-05
Attribute, L, 2e-06
NodeNames, d g s b
Sweep, 1, V, D, LIN, 0, 5, 0.1, CALCULATED, 0.1, 0
Sweep, 2, V, G, LIN, 1.5, 5, CALCULATED, 5, 0.1, 0
Constant, V, S, 0, 0.1, 0
Constant, V, B, 0, 0.1, 0
Target, I, D
Function, gds, derivative (Vd, ID)
Plot, idvd, XY (LIN LIN), vd, id
Plot, gds, XY (LIN LOG), vd, gds
DataArray, ID
0 2.40381e-05 4.06198e-05 5.01336e-05 5.38997e-05
5.50644e-05 5.56319e-05 5.60299e-05 5.63497e-05 5.66234e-05
5.68667e-05 5.70883e-05 5.72941e-05 5.74877e-05 5.76718e-05
5.78483e-05 5.80186e-05 5.81839e-05 5.8345e-05 5.85026e-05
5.86571e-05 5.88091e-05 5.89588e-05 5.91066e-05 5.92526e-05
5.93972e-05 5.95405e-05 5.96826e-05 5.98238e-05 5.9964e-05
6.01035e-05 6.02425e-05 6.03811e-05 6.05197e-05 6.06584e-05
6.07978e-05 6.09383e-05 6.10806e-05 6.12255e-05 6.13741e-05
6.15274e-05 6.16871e-05 6.18548e-05 6.20325e-05 6.22227e-05
6.24278e-05 6.26511e-05 6.28959e-05 6.31659e-05 6.34655e-05
6.37992e-05 0 6.31231e-05 0.000118483 0.000166279
0.000206709 0.000239966 0.000266254 0.000285816 0.000299063
0.000306977 0.000311458 0.00031429 0.000316337 0.000317944
0.000319267 0.000320396 0.000321381 0.00032226 0.000323055
0.000323784 0.00032446 0.000325093 0.00032569 0.000326256
0.000326797 0.000327317 0.000327817 0.000328301 0.000328771
0.000329229 0.000329675 0.000330112 0.00033054 0.000330961
0.000331375 0.000331783 0.000332187 0.000332587 0.000332985
0.000333383 0.000333783 0.000334188 0.000334601 0.000335026
0.000335469 0.000335937 0.000336436 0.000336977 0.000337569
0.000338225 0.000338959 0 9.62455e-05 0.000184854
0.000266008 0.000339881 0.000406643 0.000466461 0.000519496
0.000565904 0.000605844 0.000639473 0.000666966 0.000688545
0.000704587 0.000715855 0.000723625 0.000729202 0.000733443
0.000736824 0.000739614 0.000741979 0.000744027 0.000745832
0.000747446 0.000748907 0.000750244 0.000751479 0.000752629
0.000753707 0.000754723 0.000755688 0.000756607 0.000757486
0.000758331 0.000759146 0.000759934 0.000760698 0.000761441
0.000762165 0.000762873 0.000763567 0.00076425 0.000764924
0.000765592 0.000766259 0.000766931 0.000767612 0.000768313
0.000769042 0.000769813 0.000770639 0 0.000124465
0.000241525 0.000351345 0.000454082 0.00054989 0.000638919
0.000721314 0.000797216 0.000866764 0.00093009 0.000987326
0.0010386 0.00108404 0.00112377 0.00115791 0.00118663
0.00121009 0.00122863 0.0012428 0.0012535 0.00126171
0.00126818 0.00127344 0.00127783 0.00128156 0.00128479
0.00128764 0.00129017 0.00129246 0.00129454 0.00129645
0.00129822 0.00129986 0.00130141 0.00130286 0.00130424
0.00130555 0.0013068 0.001308 0.00130916 0.00131027
0.00131134 0.00131239 0.0013134 0.00131439 0.00131536
0.00131632 0.00131727 0.00131821 0.00131917 0
0.000148645 0.000290164 0.000424703 0.000552405 0.000673409
0.000787851 0.000895861 0.00099757 0.0010931 0.00118257
0.00126611 0.00134383 0.00141583 0.00148223 0.00154315
0.00159867 0.00164891 0.00169397 0.00173394 0.00176893
0.00179905 0.00182443 0.00184531 0.00186207 0.00187537
0.00188596 0.00189454 0.00190162 0.00190759 0.0019127
0.00191714 0.00192106 0.00192456 0.0019277 0.00193056
0.00193318 0.0019356 0.00193785 0.00193995 0.00194192
0.00194378 0.00194554 0.00194722 0.00194882 0.00195035
0.00195182 0.00195324 0.00195461 0.00195594 0.00195723
DataSetFinish
DataSetStart
DataSetName, idvdlow
MeasurementType, DC
BatchName, opt_ex09
WaferName, wafer1
DieName, x0y0
DeviceName, n10_5
Temperature, 27
FabDate, 11 May 2010
UserDate, 11 May 2010
WaferDiameter, 0.2
DieLayout, FOUR_CROSSING
DieSize, 0.02, 0.02
DieType, PARTIAL
Attribute, W, 1e-05
Attribute, L, 5e-06
NodeNames, d g s b
Sweep, 1, V, D, LIN, 0, 5, 0.1, CALCULATED, 0.1, 0
Sweep, 2, V, G, LIN, 1.5, 5, CALCULATED, 5, 0.1, 0
Constant, V, S, 0, 0.1, 0
Constant, V, B, 0, 0.1, 0
Target, I, D
Function, gds, derivative (Vd, ID)
Plot, idvd, XY (LIN LIN), vd, id
Plot, gds, XY (LIN LOG), vd, gds
DataArray, ID
0 1.02091e-05 1.75932e-05 2.22224e-05 2.43645e-05
2.49858e-05 2.51773e-05 2.52808e-05 2.5358e-05 2.54238e-05
2.54833e-05 2.55389e-05 2.5592e-05 2.56432e-05 2.56931e-05
2.57419e-05 2.57899e-05 2.58372e-05 2.5884e-05 2.59304e-05
2.59764e-05 2.60221e-05 2.60676e-05 2.61128e-05 2.61578e-05
2.62027e-05 2.62474e-05 2.6292e-05 2.63364e-05 2.63808e-05
2.64251e-05 2.64694e-05 2.65136e-05 2.65578e-05 2.66021e-05
2.66465e-05 2.6691e-05 2.67358e-05 2.67811e-05 2.68268e-05
2.68733e-05 2.69207e-05 2.69693e-05 2.70195e-05 2.70714e-05
2.71257e-05 2.71827e-05 2.72429e-05 2.73069e-05 2.73754e-05
2.74491e-05 0 2.52646e-05 4.77398e-05 6.74537e-05
8.44349e-05 9.8713e-05 0.00011032 0.000119298 0.000125716
0.000129749 0.000131873 0.000132903 0.000133483 0.000133882
0.000134194 0.000134457 0.000134687 0.000134896 0.000135089
0.00013527 0.000135442 0.000135607 0.000135765 0.000135919
0.000136069 0.000136215 0.000136359 0.0001365 0.000136639
0.000136776 0.000136912 0.000137046 0.000137179 0.000137311
0.000137441 0.000137571 0.000137701 0.00013783 0.000137958
0.000138086 0.000138215 0.000138344 0.000138474 0.000138605
0.000138739 0.000138875 0.000139016 0.000139161 0.000139314
0.000139475 0.000139646 0 3.83465e-05 7.40456e-05
0.000107122 0.0001376 0.000165505 0.000190859 0.000213688
0.000234014 0.000251863 0.000267259 0.000280232 0.000290815
0.00029906 0.000305071 0.000309078 0.000311549 0.00031308
0.000314121 0.000314902 0.000315531 0.000316062 0.000316526
0.000316941 0.00031732 0.00031767 0.000317998 0.000318307
0.000318602 0.000318885 0.000319157 0.00031942 0.000319677
0.000319926 0.00032017 0.00032041 0.000320645 0.000320876
0.000321104 0.000321329 0.000321551 0.000321771 0.00032199
0.000322206 0.000322422 0.000322637 0.000322853 0.00032307
0.000323289 0.000323512 0.00032374 0 4.9732e-05
9.69708e-05 0.000141738 0.000184056 0.000223945 0.000261427
0.000296523 0.000329253 0.000359637 0.000387697 0.000413452
0.000436923 0.000458129 0.000477092 0.000493833 0.000508373
0.000520742 0.000530973 0.000539125 0.000545307 0.000549742
0.000552809 0.000554955 0.000556538 0.000557775 0.000558787
0.000559646 0.000560395 0.000561061 0.000561664 0.000562217
0.000562729 0.00056321 0.000563663 0.000564094 0.000564506
0.000564902 0.000565284 0.000565654 0.000566014 0.000566364
0.000566706 0.000567041 0.00056737 0.000567693 0.000568011
0.000568325 0.000568635 0.000568942 0.000569248 0
5.96685e-05 0.000116996 0.000172002 0.000224705 0.000275124
0.000323279 0.000369187 0.000412867 0.000454337 0.000493615
0.000530719 0.000565666 0.000598474 0.00062916 0.000657742
0.000684236 0.000708659 0.000731029 0.000751362 0.000769677
0.000785991 0.000800325 0.000812703 0.000823158 0.000831741
0.000838546 0.000843748 0.00084763 0.000850536 0.000852775
0.000854564 0.000856042 0.000857298 0.000858391 0.000859358
0.000860229 0.000861023 0.000861754 0.000862434 0.000863071
0.000863673 0.000864244 0.00086479 0.000865313 0.000865817
0.000866304 0.000866776 0.000867235 0.000867682 0.000868119
DataSetFinish
DataSetStart
DataSetName, idvdlow
MeasurementType, DC
BatchName, opt_ex09
WaferName, wafer1
DieName, x0y0
DeviceName, n2_0p5
Temperature, 27
FabDate, 11 May 2010
UserDate, 11 May 2010
WaferDiameter, 0.2
DieLayout, FOUR_CROSSING
DieSize, 0.02, 0.02
DieType, PARTIAL
Attribute, W, 2e-06
Attribute, L, 5e-07
NodeNames, d g s b
Sweep, 1, V, D, LIN, 0, 5, 0.1, CALCULATED, 0.1, 0
Sweep, 2, V, G, LIN, 1.5, 5, CALCULATED, 5, 0.1, 0
Constant, V, S, 0, 0.1, 0
Constant, V, B, 0, 0.1, 0
Target, I, D
Function, gds, derivative (Vd, ID)
Plot, idvd, XY (LIN LIN), vd, id
Plot, gds, XY (LIN LOG), vd, gds
DataArray, ID
0 1.04542e-05 1.4474e-05 1.59282e-05 1.69671e-05
1.78736e-05 1.8707e-05 1.94945e-05 2.02514e-05 2.09878e-05
2.17102e-05 2.24234e-05 2.31308e-05 2.38348e-05 2.45374e-05
2.524e-05 2.59437e-05 2.66494e-05 2.73579e-05 2.80697e-05
2.87852e-05 2.9505e-05 3.02291e-05 3.09581e-05 3.1692e-05
3.2431e-05 3.31754e-05 3.39254e-05 3.46813e-05 3.54434e-05
3.62122e-05 3.69885e-05 3.77733e-05 3.85679e-05 3.93743e-05
4.01951e-05 4.10334e-05 4.18937e-05 4.27814e-05 4.37031e-05
4.46671e-05 4.56835e-05 4.67641e-05 4.7923e-05 4.91769e-05
5.05448e-05 5.20488e-05 5.37139e-05 5.55685e-05 5.76443e-05
5.99769e-05 0 5.14206e-05 9.31825e-05 0.000126309
0.000151709 0.000170273 0.000183205 0.000192358 0.000199342
0.000204995 0.000209755 0.00021388 0.000217539 0.000220845
0.000223876 0.00022669 0.00022933 0.000231828 0.000234209
0.000236491 0.000238691 0.000240821 0.00024289 0.000244908
0.000246881 0.000248815 0.000250715 0.000252584 0.000254427
0.000256247 0.000258047 0.00025983 0.000261599 0.000263358
0.000265112 0.000266868 0.000268632 0.000270415 0.000272231
0.000274097 0.000276036 0.000278073 0.000280243 0.000282586
0.000285152 0.000287997 0.000291189 0.000294806 0.000298937
0.000303683 0.000309157 0 7.90163e-05 0.000148162
0.000208312 0.000260238 0.000304632 0.000342113 0.000373244
0.000398558 0.000418636 0.000434287 0.000446582 0.000456499
0.000464731 0.000471741 0.000477841 0.000483247 0.00048811
0.000492543 0.000496628 0.000500428 0.000503992 0.000507358
0.000510557 0.000513612 0.000516545 0.000519371 0.000522105
0.000524757 0.000527338 0.000529855 0.000532316 0.000534728
0.000537096 0.000539428 0.000541728 0.000544007 0.000546272
0.000548537 0.000550818 0.000553135 0.000555516 0.000557996
0.000560618 0.000563438 0.000566522 0.00056995 0.000573819
0.000578243 0.000583354 0.000589303 0 9.87918e-05
0.000188031 0.000268449 0.000340703 0.000405389 0.000463043
0.000514154 0.000559164 0.00059847 0.000632416 0.000661252
0.000685131 0.000704391 0.000719846 0.000732447 0.000742953
0.000751904 0.000759678 0.000766543 0.000772691 0.000778265
0.000783371 0.000788093 0.000792495 0.000796627 0.000800529
0.000804235 0.000807772 0.00081116 0.00081442 0.000817567
0.000820614 0.000823572 0.000826452 0.000829262 0.000832012
0.000834711 0.000837369 0.000839998 0.000842615 0.00084524
0.000847899 0.000850626 0.000853467 0.000856478 0.00085973
0.000863311 0.000867329 0.000871913 0.000877216 0
0.000113576 0.00021809 0.000314152 0.000402319 0.000483101
0.000556964 0.000624335 0.000685607 0.000741141 0.000791263
0.000836266 0.000876394 0.000911791 0.000942413 0.000968104
0.000989096 0.00100619 0.00102029 0.00103216 0.00104233
0.0010512 0.00105904 0.00106607 0.00107245 0.00107828
0.00108366 0.00108867 0.00109337 0.00109779 0.00110197
0.00110596 0.00110977 0.00111342 0.00111693 0.00112033
0.00112362 0.00112681 0.00112992 0.00113296 0.00113593
0.00113887 0.00114177 0.00114468 0.00114761 0.0011506
0.00115372 0.00115702 0.00116059 0.00116453 0.00116898
DataSetFinish
DataSetStart
DataSetName, idvdlow
MeasurementType, DC
BatchName, opt_ex09
WaferName, wafer1
DieName, x0y0
DeviceName, n2_10
Temperature, 27
FabDate, 11 May 2010
UserDate, 11 May 2010
WaferDiameter, 0.2
DieLayout, FOUR_CROSSING
DieSize, 0.02, 0.02
DieType, PARTIAL
Attribute, W, 2e-06
Attribute, L, 1e-05
NodeNames, d g s b
Sweep, 1, V, D, LIN, 0, 5, 0.1, CALCULATED, 0.1, 0
Sweep, 2, V, G, LIN, 1.5, 5, CALCULATED, 5, 0.1, 0
Constant, V, S, 0, 0.1, 0
Constant, V, B, 0, 0.1, 0
Target, I, D
Function, gds, derivative (Vd, ID)
Plot, idvd, XY (LIN LIN), vd, id
Plot, gds, XY (LIN LOG), vd, gds
DataArray, ID
0 8.93062e-07 1.51619e-06 1.87698e-06 2.01554e-06
2.04739e-06 2.05676e-06 2.06186e-06 2.06576e-06 2.06917e-06
2.07235e-06 2.0754e-06 2.07836e-06 2.08128e-06 2.08415e-06
2.087e-06 2.08983e-06 2.09264e-06 2.09544e-06 2.09824e-06
2.10102e-06 2.10379e-06 2.10656e-06 2.10933e-06 2.11209e-06
2.11485e-06 2.11761e-06 2.12036e-06 2.12311e-06 2.12586e-06
2.12861e-06 2.13136e-06 2.13411e-06 2.13686e-06 2.13961e-06
2.14237e-06 2.14514e-06 2.14793e-06 2.15073e-06 2.15355e-06
2.15641e-06 2.15931e-06 2.16225e-06 2.16526e-06 2.16835e-06
2.17153e-06 2.17483e-06 2.17826e-06 2.18184e-06 2.18561e-06
2.18959e-06 0 2.34648e-06 4.42877e-06 6.24825e-06
7.80634e-06 9.1046e-06 1.0145e-05 1.09307e-05 1.14689e-05
1.17813e-05 1.19263e-05 1.1988e-05 1.202e-05 1.20413e-05
1.20582e-05 1.20727e-05 1.20858e-05 1.2098e-05 1.21097e-05
1.21209e-05 1.21318e-05 1.21424e-05 1.21528e-05 1.21631e-05
1.21733e-05 1.21833e-05 1.21933e-05 1.22031e-05 1.2213e-05
1.22227e-05 1.22324e-05 1.22421e-05 1.22517e-05 1.22613e-05
1.22709e-05 1.22804e-05 1.229e-05 1.22995e-05 1.2309e-05
1.23185e-05 1.23281e-05 1.23376e-05 1.23472e-05 1.23569e-05
1.23667e-05 1.23767e-05 1.23868e-05 1.23972e-05 1.24079e-05
1.2419e-05 1.24306e-05 0 3.62047e-06 6.99349e-06
1.01202e-05 1.30017e-05 1.56392e-05 1.80337e-05 2.01866e-05
2.20989e-05 2.37719e-05 2.52071e-05 2.64062e-05 2.73716e-05
2.81079e-05 2.86255e-05 2.89497e-05 2.91308e-05 2.92308e-05
2.92929e-05 2.93374e-05 2.9373e-05 2.94033e-05 2.94302e-05
2.94549e-05 2.94781e-05 2.95e-05 2.95209e-05 2.95412e-05
2.95608e-05 2.958e-05 2.95988e-05 2.96173e-05 2.96355e-05
2.96535e-05 2.96712e-05 2.96888e-05 2.97062e-05 2.97235e-05
2.97407e-05 2.97577e-05 2.97747e-05 2.97916e-05 2.98084e-05
2.98252e-05 2.9842e-05 2.98587e-05 2.98755e-05 2.98924e-05
2.99094e-05 2.99265e-05 2.99439e-05 0 4.7377e-06
9.24521e-06 1.35235e-05 1.75736e-05 2.13965e-05 2.49932e-05
2.83646e-05 3.15118e-05 3.44356e-05 3.71371e-05 3.96173e-05
4.18771e-05 4.39177e-05 4.574e-05 4.73452e-05 4.87347e-05
4.99103e-05 5.08746e-05 5.16322e-05 5.21929e-05 5.25774e-05
5.28233e-05 5.29784e-05 5.30826e-05 5.31592e-05 5.32203e-05
5.32717e-05 5.33168e-05 5.33575e-05 5.3395e-05 5.343e-05
5.34632e-05 5.34948e-05 5.35252e-05 5.35546e-05 5.35832e-05
5.3611e-05 5.36383e-05 5.36651e-05 5.36915e-05 5.37174e-05
5.3743e-05 5.37684e-05 5.37934e-05 5.38183e-05 5.38429e-05
5.38674e-05 5.38917e-05 5.3916e-05 5.39401e-05 0
5.7192e-06 1.12248e-05 1.65175e-05 2.15984e-05 2.64683e-05
3.11279e-05 3.55783e-05 3.98202e-05 4.38545e-05 4.7682e-05
5.13035e-05 5.472e-05 5.79323e-05 6.09411e-05 6.37474e-05
6.63519e-05 6.87556e-05 7.09592e-05 7.29638e-05 7.47702e-05
7.63794e-05 7.77927e-05 7.90117e-05 8.00385e-05 8.08768e-05
8.15337e-05 8.20228e-05 8.23686e-05 8.26068e-05 8.27741e-05
8.28982e-05 8.2996e-05 8.30771e-05 8.31469e-05 8.32088e-05
8.32648e-05 8.33164e-05 8.33646e-05 8.341e-05 8.34532e-05
8.34946e-05 8.35345e-05 8.35731e-05 8.36107e-05 8.36473e-05
8.36831e-05 8.37182e-05 8.37527e-05 8.37867e-05 8.38202e-05
DataSetFinish
DataSetStart
DataSetName, idvdlow
MeasurementType, DC
BatchName, opt_ex09
WaferName, wafer1
DieName, x0y0
DeviceName, n5_10
Temperature, 27
FabDate, 11 May 2010
UserDate, 11 May 2010
WaferDiameter, 0.2
DieLayout, FOUR_CROSSING
DieSize, 0.02, 0.02
DieType, PARTIAL
Attribute, W, 5e-06
Attribute, L, 1e-05
NodeNames, d g s b
Sweep, 1, V, D, LIN, 0, 5, 0.1, CALCULATED, 0.1, 0
Sweep, 2, V, G, LIN, 1.5, 5, CALCULATED, 5, 0.1, 0
Constant, V, S, 0, 0.1, 0
Constant, V, B, 0, 0.1, 0
Target, I, D
Function, gds, derivative (Vd, ID)
Plot, idvd, XY (LIN LIN), vd, id
Plot, gds, XY (LIN LOG), vd, gds
DataArray, ID
0 2.43112e-06 4.17578e-06 5.24863e-06 5.72034e-06
5.84334e-06 5.87623e-06 5.89224e-06 5.90379e-06 5.91365e-06
5.92273e-06 5.93137e-06 5.93975e-06 5.94795e-06 5.95604e-06
5.96404e-06 5.97197e-06 5.97986e-06 5.9877e-06 5.99552e-06
6.0033e-06 6.01107e-06 6.01882e-06 6.02656e-06 6.03428e-06
6.042e-06 6.0497e-06 6.0574e-06 6.06509e-06 6.07277e-06
6.08046e-06 6.08813e-06 6.09582e-06 6.1035e-06 6.1112e-06
6.1189e-06 6.12664e-06 6.13441e-06 6.14222e-06 6.1501e-06
6.15806e-06 6.16613e-06 6.17434e-06 6.18272e-06 6.19131e-06
6.20016e-06 6.20932e-06 6.21884e-06 6.2288e-06 6.23926e-06
6.25031e-06 0 6.13108e-06 1.15937e-05 1.63912e-05
2.05272e-05 2.40057e-05 2.68312e-05 2.90106e-05 3.05581e-05
3.15134e-05 3.19916e-05 3.21976e-05 3.2298e-05 3.2361e-05
3.24088e-05 3.24491e-05 3.24851e-05 3.25184e-05 3.25499e-05
3.25801e-05 3.26093e-05 3.26378e-05 3.26657e-05 3.26932e-05
3.27203e-05 3.2747e-05 3.27736e-05 3.27999e-05 3.2826e-05
3.28519e-05 3.28778e-05 3.29035e-05 3.29291e-05 3.29546e-05
3.298e-05 3.30054e-05 3.30307e-05 3.3056e-05 3.30812e-05
3.31065e-05 3.31318e-05 3.31571e-05 3.31826e-05 3.32083e-05
3.32342e-05 3.32605e-05 3.32873e-05 3.33147e-05 3.33428e-05
3.33719e-05 3.34023e-05 0 9.37233e-06 1.81189e-05
2.62426e-05 3.37463e-05 4.06329e-05 4.69054e-05 5.25667e-05
5.76198e-05 6.20678e-05 6.59142e-05 6.91629e-05 7.18197e-05
7.38935e-05 7.54039e-05 7.63976e-05 7.69775e-05 7.72971e-05
7.74872e-05 7.76177e-05 7.77185e-05 7.78027e-05 7.78766e-05
7.79437e-05 7.8006e-05 7.80647e-05 7.81208e-05 7.81747e-05
7.8227e-05 7.82779e-05 7.83276e-05 7.83765e-05 7.84245e-05
7.84719e-05 7.85187e-05 7.8565e-05 7.86109e-05 7.86564e-05
7.87016e-05 7.87464e-05 7.87911e-05 7.88355e-05 7.88797e-05
7.89238e-05 7.89678e-05 7.90117e-05 7.90557e-05 7.90999e-05
7.91443e-05 7.91891e-05 7.92346e-05 0 1.22133e-05
2.38447e-05 3.48968e-05 4.5372e-05 5.52729e-05 6.4602e-05
7.33618e-05 8.15548e-05 8.91833e-05 9.62501e-05 0.000102757
0.000108708 0.000114104 0.000118949 0.000123245 0.000126995
0.000130204 0.000132877 0.000135022 0.000136659 0.000137825
0.000138595 0.000139083 0.000139402 0.000139628 0.000139804
0.000139948 0.000140073 0.000140184 0.000140286 0.00014038
0.000140469 0.000140553 0.000140634 0.000140712 0.000140788
0.000140861 0.000140933 0.000141004 0.000141073 0.000141141
0.000141209 0.000141275 0.000141341 0.000141406 0.000141471
0.000141535 0.000141599 0.000141662 0.000141725 0
1.47081e-05 2.88762e-05 4.25066e-05 5.56016e-05 6.81633e-05
8.0194e-05 9.16957e-05 0.000102671 0.000113121 0.000123049
0.000132457 0.000141347 0.00014972 0.00015758 0.000164928
0.000171767 0.000178098 0.000183923 0.000189246 0.000194068
0.000198392 0.00020222 0.000205557 0.000208406 0.000210775
0.000212676 0.000214135 0.000215197 0.000215939 0.000216455
0.000216828 0.000217114 0.000217346 0.000217542 0.000217713
0.000217867 0.000218007 0.000218137 0.000218259 0.000218375
0.000218485 0.000218591 0.000218693 0.000218793 0.000218889
0.000218984 0.000219076 0.000219167 0.000219256 0.000219344
DataSetFinish
DataSetStart
DataSetName, idvglin
MeasurementType, DC
BatchName, opt_ex09
WaferName, wafer1
DieName, x0y0
DeviceName, n10_0p5
Temperature, 27
FabDate, 11 May 2010
UserDate, 11 May 2010
WaferDiameter, 0.2
DieLayout, FOUR_CROSSING
DieSize, 0.02, 0.02
DieType, PARTIAL
Attribute, W, 1e-05
Attribute, L, 5e-07
NodeNames, d g s b
Sweep, 1, V, G, LIN, 0, 5, 0.1, CALCULATED, 0.1, 0
Sweep, 2, V, B, LIN, 0, -3, CALCULATED, 5, 0.1, 0
Constant, V, S, 0, 0.1, 0
Constant, V, D, 0.1, 0.1, 0
Target, I, D
Function, gm, derivative (VG, ID)
Plot, idvg, XY (LIN LIN), vg, id
Plot, gm, XY (LIN LIN), vg, gm
DataArray, ID
1.39924e-14 8.24216e-14 4.8544e-13 2.85818e-12 1.68152e-11
9.87392e-11 5.77184e-10 3.33874e-09 1.88772e-08 1.02294e-07
5.24375e-07 2.54275e-06 1.04544e-05 2.93204e-05 5.57644e-05
8.39927e-05 0.000111501 0.000137695 0.000162586 0.000186299
0.000208951 0.000230633 0.000251416 0.000271357 0.000290506
0.000308908 0.000326605 0.000343635 0.000360032 0.00037583
0.00039106 0.00040575 0.000419927 0.000433617 0.000446843
0.000459627 0.000471991 0.000483953 0.000495532 0.000506745
0.000517609 0.000528139 0.000538348 0.000548252 0.000557862
0.000567191 0.00057625 0.000585051 0.000593603 0.000601916
0.00061 1.51286e-17 1.06519e-16 7.8697e-16 5.85321e-15
4.35712e-14 3.24336e-13 2.41338e-12 1.79387e-11 1.3295e-10
9.77722e-10 7.04837e-09 4.85263e-08 3.07755e-07 1.76636e-06
8.36352e-06 2.57313e-05 5.09452e-05 7.81123e-05 0.000104775
0.000130347 0.000154792 0.00017818 0.000200585 0.000222072
0.000242694 0.000262502 0.000281539 0.000299847 0.000317465
0.000334429 0.000350773 0.000366529 0.000381726 0.000396393
0.000410555 0.000424238 0.000437463 0.000450253 0.000462627
0.000474605 0.000486205 0.000497443 0.000508335 0.000518896
0.000529141 0.000539082 0.000548732 0.000558103 0.000567207
0.000576053 0.000584653 0 0 0
3.61422e-17 2.93197e-16 2.46872e-15 2.08798e-14 1.76669e-13
1.49439e-12 1.26273e-11 1.06373e-10 8.8834e-10 7.24457e-09
5.57557e-08 3.85799e-07 2.3297e-06 1.07246e-05 3.00572e-05
5.55403e-05 8.21135e-05 0.000108032 0.000132925 0.00015678
0.00017965 0.000201592 0.000222659 0.000242899 0.000262354
0.000281068 0.000299079 0.000316423 0.000333135 0.000349247
0.000364789 0.00037979 0.000394276 0.000408272 0.000421802
0.000434886 0.000447547 0.000459803 0.000471672 0.000483172
0.000494319 0.000505128 0.000515613 0.000525788 0.000535666
0.000545259 0.000554579 0.000563636 0 0
0 0 0 3.45869e-17 2.98372e-16
2.7273e-15 2.50916e-14 2.30974e-13 2.12531e-12 1.95277e-11
1.78638e-10 1.61317e-09 1.4053e-08 1.12465e-07 7.83664e-07
4.51871e-06 1.73956e-05 3.98987e-05 6.58091e-05 9.17915e-05
0.000116934 0.000141083 0.000164257 0.000186502 0.000207869
0.000228402 0.000248146 0.000267141 0.000285425 0.000303036
0.000320008 0.000336373 0.000352161 0.000367401 0.00038212
0.000396342 0.000410092 0.000423392 0.000436262 0.000448721
0.000460789 0.000472483 0.000483818 0.000494811 0.000505476
0.000515826 0.000525875 0.000535635 0.000545118 0
0 0 0 0 0
0 6.20586e-17 5.7927e-16 5.64124e-15 5.51785e-14
5.39821e-13 5.27706e-12 5.14545e-11 4.97772e-10 4.70387e-09
4.17416e-08 3.25743e-07 2.13443e-06 1.02728e-05 2.91653e-05
5.39552e-05 7.97792e-05 0.000105028 0.00012935 0.000152717
0.000175162 0.000196729 0.000217463 0.000237405 0.000256595
0.000275071 0.000292871 0.000310028 0.000326574 0.00034254
0.000357954 0.000372843 0.000387232 0.000401145 0.000414604
0.00042763 0.000440243 0.00045246 0.0004643 0.000475778
0.000486911 0.000497713 0.000508197 0.000518377 0.000528266
DataSetFinish
DataSetStart
DataSetName, idvglin
MeasurementType, DC
BatchName, opt_ex09
WaferName, wafer1
DieName, x0y0
DeviceName, n10_0p8
Temperature, 27
FabDate, 11 May 2010
UserDate, 11 May 2010
WaferDiameter, 0.2
DieLayout, FOUR_CROSSING
DieSize, 0.02, 0.02
DieType, PARTIAL
Attribute, W, 1e-05
Attribute, L, 8e-07
NodeNames, d g s b
Sweep, 1, V, G, LIN, 0, 5, 0.1, CALCULATED, 0.1, 0
Sweep, 2, V, B, LIN, 0, -3, CALCULATED, 5, 0.1, 0
Constant, V, S, 0, 0.1, 0
Constant, V, D, 0.1, 0.1, 0
Target, I, D
Function, gm, derivative (VG, ID)
Plot, idvg, XY (LIN LIN), vg, id
Plot, gm, XY (LIN LIN), vg, gm
DataArray, ID
1.40242e-14 9.00779e-14 5.78438e-13 3.71215e-12 2.37854e-11
1.51807e-10 9.59623e-10 5.93305e-09 3.50866e-08 1.9467e-07
1.01511e-06 4.51205e-06 1.35649e-05 2.68554e-05 4.13808e-05
5.58254e-05 6.98506e-05 8.34218e-05 9.65684e-05 0.000109322
0.000121706 0.00013374 0.000145437 0.00015681 0.000167872
0.000178632 0.000189104 0.000199296 0.000209218 0.00021888
0.000228292 0.000237462 0.000246398 0.000255108 0.000263601
0.000271884 0.000279963 0.000287845 0.000295537 0.000303045
0.000310375 0.000317533 0.000324524 0.000331353 0.000338026
0.000344547 0.00035092 0.000357151 0.000363243 0.000369201
0.000375029 0 6.9261e-17 5.74885e-16 4.82289e-15
4.05091e-14 3.40214e-13 2.85521e-12 2.39109e-11 1.99023e-10
1.62879e-09 1.27669e-08 9.16156e-08 5.84152e-07 3.10723e-06
1.08337e-05 2.31861e-05 3.70551e-05 5.10068e-05 6.46559e-05
7.79331e-05 9.084e-05 0.00010339 0.000115594 0.000127466
0.000139015 0.000150253 0.00016119 0.000171836 0.000182202
0.000192297 0.000202131 0.000211712 0.000221049 0.000230152
0.000239027 0.000247682 0.000256125 0.000264363 0.000272403
0.00028025 0.000287912 0.000295393 0.000302701 0.00030984
0.000316815 0.000323632 0.000330295 0.000336809 0.000343179
0.000349408 0.000355502 0 0 0
2.06805e-17 1.86819e-16 1.80714e-15 1.76086e-14 1.71671e-13
1.67267e-12 1.62637e-11 1.57121e-10 1.48895e-09 1.33832e-08
1.07289e-07 7.33275e-07 3.89628e-06 1.2565e-05 2.51276e-05
3.8752e-05 5.23576e-05 6.56722e-05 7.86443e-05 9.12719e-05
0.000103562 0.000115524 0.000127167 0.000138501 0.000149536
0.000160282 0.000170748 0.000180944 0.000190879 0.000200562
0.000210001 0.000219205 0.000228181 0.000236938 0.000245482
0.000253821 0.000261961 0.000269908 0.000277669 0.000285249
0.000292654 0.000299891 0.000306963 0.000313875 0.000320634
0.000327243 0.000333706 0.000340029 0 0
0 0 0 1.94033e-17 1.84969e-16
1.96739e-15 2.11547e-14 2.27639e-13 2.44756e-12 2.62383e-11
2.78608e-10 2.87229e-09 2.73214e-08 2.21922e-07 1.46756e-06
6.65879e-06 1.72451e-05 3.02654e-05 4.37205e-05 5.70102e-05
6.99959e-05 8.26529e-05 9.49815e-05 0.000106988 0.00011868
0.000130066 0.000141156 0.000151959 0.000162484 0.000172741
0.000182739 0.000192485 0.000201989 0.000211259 0.000220302
0.000229125 0.000237737 0.000246144 0.000254351 0.000262367
0.000270197 0.000277846 0.00028532 0.000292625 0.000299766
0.000306748 0.000313575 0.000320252 0.000326784 0
0 0 0 0 0
0 3.53448e-17 3.74971e-16 4.30273e-15 4.97204e-14
5.74628e-13 6.6307e-12 7.60964e-11 8.57767e-10 9.15262e-09
8.53896e-08 6.47303e-07 3.6562e-06 1.20868e-05 2.42925e-05
3.75145e-05 5.07372e-05 6.37042e-05 7.63606e-05 8.86982e-05
0.00010072 0.000112432 0.000123843 0.000134961 0.000145795
0.000156354 0.000166647 0.000176681 0.000186467 0.000196012
0.000205324 0.000214411 0.000223279 0.000231937 0.00024039
0.000248645 0.000256709 0.000264588 0.000272286 0.00027981
0.000287166 0.000294357 0.00030139 0.000308268 0.000314997
DataSetFinish
DataSetStart
DataSetName, idvglin
MeasurementType, DC
BatchName, opt_ex09
WaferName, wafer1
DieName, x0y0
DeviceName, n10_1
Temperature, 27
FabDate, 11 May 2010
UserDate, 11 May 2010
WaferDiameter, 0.2
DieLayout, FOUR_CROSSING
DieSize, 0.02, 0.02
DieType, PARTIAL
Attribute, W, 1e-05
Attribute, L, 1e-06
NodeNames, d g s b
Sweep, 1, V, G, LIN, 0, 5, 0.1, CALCULATED, 0.1, 0
Sweep, 2, V, B, LIN, 0, -3, CALCULATED, 5, 0.1, 0
Constant, V, S, 0, 0.1, 0
Constant, V, D, 0.1, 0.1, 0
Target, I, D
Function, gm, derivative (VG, ID)
Plot, idvg, XY (LIN LIN), vg, id
Plot, gm, XY (LIN LIN), vg, gm
DataArray, ID
1.38668e-14 9.11217e-14 5.98607e-13 3.92939e-12 2.57425e-11
1.67808e-10 1.08065e-09 6.76843e-09 4.02109e-08 2.23417e-07
1.15451e-06 4.76309e-06 1.27026e-05 2.3159e-05 3.41903e-05
4.50941e-05 5.57106e-05 6.60313e-05 7.60753e-05 8.58603e-05
9.53993e-05 0.000104702 0.000113776 0.000122629 0.000131268
0.000139699 0.000147928 0.000155962 0.000163807 0.000171468
0.000178952 0.000186263 0.000193407 0.000200388 0.000207213
0.000213885 0.000220408 0.000226788 0.000233029 0.000239134
0.000245107 0.000250953 0.000256674 0.000262274 0.000267757
0.000273126 0.000278384 0.000283533 0.000288577 0.000293519
0.000298361 0 5.31347e-17 4.5574e-16 3.9643e-15
3.45369e-14 3.00852e-13 2.61851e-12 2.27326e-11 1.95897e-10
1.65353e-09 1.32441e-08 9.57895e-08 6.09101e-07 3.09123e-06
9.77219e-06 1.94577e-05 2.99908e-05 4.05336e-05 5.08734e-05
6.09718e-05 7.08285e-05 8.04492e-05 8.984e-05 9.90067e-05
0.000107955 0.000116691 0.000125221 0.000133551 0.000141686
0.000149632 0.000157396 0.000164982 0.000172395 0.000179642
0.000186726 0.000193653 0.000200428 0.000207054 0.000213536
0.000219878 0.000226084 0.000232158 0.000238104 0.000243925
0.000249625 0.000255207 0.000260674 0.000266029 0.000271275
0.000276416 0.000281454 0 0 0
1.40071e-17 1.27438e-16 1.28631e-15 1.3125e-14 1.34035e-13
1.3679e-12 1.39271e-11 1.40736e-10 1.38998e-09 1.28899e-08
1.04778e-07 7.14357e-07 3.62265e-06 1.07763e-05 2.04638e-05
3.07766e-05 4.10615e-05 5.11575e-05 6.1032e-05 7.06809e-05
8.01068e-05 8.93135e-05 9.83058e-05 0.000107089 0.000115668
0.000124049 0.000132237 0.000140239 0.000148059 0.000155702
0.000163174 0.00017048 0.000177625 0.000184613 0.000191449
0.000198138 0.000204682 0.000211088 0.000217357 0.000223495
0.000229505 0.000235391 0.000241155 0.000246801 0.000252332
0.000257752 0.000263063 0.000268268 0 0
0 0 0 1.23089e-17 1.14477e-16
1.27538e-15 1.44651e-14 1.64275e-13 1.86404e-12 2.1082e-11
2.35848e-10 2.54925e-09 2.50808e-08 2.06484e-07 1.35222e-06
5.80305e-06 1.41453e-05 2.40476e-05 3.42124e-05 4.42692e-05
5.4131e-05 6.37795e-05 7.32122e-05 8.24312e-05 9.14399e-05
0.000100243 0.000108845 0.000117251 0.000125467 0.000133498
0.00014135 0.000149026 0.000156533 0.000163875 0.000171057
0.000178084 0.000184959 0.000191688 0.000198274 0.000204722
0.000211034 0.000217216 0.00022327 0.000229199 0.000235008
0.0002407 0.000246277 0.000251743 0.0002571 0
0 0 0 0 0
0 2.06774e-17 2.17828e-16 2.63878e-15 3.2363e-14
3.97121e-13 4.865e-12 5.92431e-11 7.0692e-10 7.91811e-09
7.60419e-08 5.80516e-07 3.19062e-06 9.96834e-06 1.93108e-05
2.93035e-05 3.92969e-05 4.9128e-05 5.8759e-05 6.8182e-05
7.73966e-05 8.64052e-05 9.52116e-05 0.00010382 0.000112236
0.000120464 0.000128509 0.000136376 0.000144071 0.000151598
0.000158961 0.000166166 0.000173217 0.000180118 0.000186873
0.000193487 0.000199963 0.000206305 0.000212517 0.000218602
0.000224564 0.000230406 0.000236131 0.000241742 0.000247242
DataSetFinish
DataSetStart
DataSetName, idvglin
MeasurementType, DC
BatchName, opt_ex09
WaferName, wafer1
DieName, x0y0
DeviceName, n10_10
Temperature, 27
FabDate, 11 May 2010
UserDate, 11 May 2010
WaferDiameter, 0.2
DieLayout, FOUR_CROSSING
DieSize, 0.02, 0.02
DieType, PARTIAL
Attribute, W, 1e-05
Attribute, L, 1e-05
NodeNames, d g s b
Sweep, 1, V, G, LIN, 0, 5, 0.1, CALCULATED, 0.1, 0
Sweep, 2, V, B, LIN, 0, -3, CALCULATED, 5, 0.1, 0
Constant, V, S, 0, 0.1, 0
Constant, V, D, 0.1, 0.1, 0
Target, I, D
Function, gm, derivative (VG, ID)
Plot, idvg, XY (LIN LIN), vg, id
Plot, gm, XY (LIN LIN), vg, gm
DataArray, ID
1.57354e-14 1.06076e-13 7.14192e-13 4.79306e-12 3.19062e-11
2.08269e-10 1.30376e-09 7.63754e-09 4.19572e-08 2.02888e-07
6.87398e-07 1.48884e-06 2.41061e-06 3.35155e-06 4.28288e-06
5.19925e-06 6.1008e-06 6.98836e-06 7.86253e-06 8.72364e-06
9.5719e-06 1.04075e-05 1.12305e-05 1.20412e-05 1.28396e-05
1.3626e-05 1.44004e-05 1.51632e-05 1.59145e-05 1.66545e-05
1.73833e-05 1.81011e-05 1.88082e-05 1.95046e-05 2.01906e-05
2.08663e-05 2.1532e-05 2.21877e-05 2.28337e-05 2.347e-05
2.4097e-05 2.47146e-05 2.53231e-05 2.59227e-05 2.65134e-05
2.70954e-05 2.76689e-05 2.82339e-05 2.87907e-05 2.93394e-05
2.98801e-05 0 5.1562e-17 4.64531e-16 4.24655e-15
3.88673e-14 3.55361e-13 3.23702e-12 2.9164e-11 2.54791e-10
2.06663e-09 1.47976e-08 9.12501e-08 4.07797e-07 1.08014e-06
1.93243e-06 2.82876e-06 3.72641e-06 4.61495e-06 5.49216e-06
6.35757e-06 7.21105e-06 8.05255e-06 8.88207e-06 9.69967e-06
1.05054e-05 1.12995e-05 1.20819e-05 1.28529e-05 1.36126e-05
1.43612e-05 1.50988e-05 1.58256e-05 1.65418e-05 1.72476e-05
1.7943e-05 1.86283e-05 1.93037e-05 1.99692e-05 2.0625e-05
2.12714e-05 2.19084e-05 2.25362e-05 2.3155e-05 2.37648e-05
2.43659e-05 2.49584e-05 2.55424e-05 2.6118e-05 2.66854e-05
2.72447e-05 2.7796e-05 0 0 0
1.11979e-17 1.05805e-16 1.1427e-15 1.25035e-14 1.36854e-13
1.49347e-12 1.6136e-11 1.69e-10 1.62643e-09 1.33123e-08
8.90071e-08 4.10467e-07 1.07944e-06 1.9129e-06 2.78589e-06
3.66071e-06 4.52785e-06 5.38489e-06 6.23105e-06 7.06601e-06
7.88962e-06 8.70184e-06 9.50271e-06 1.02923e-05 1.10707e-05
1.1838e-05 1.25944e-05 1.334e-05 1.4075e-05 1.47995e-05
1.55136e-05 1.62176e-05 1.69115e-05 1.75956e-05 1.827e-05
1.89348e-05 1.95902e-05 2.02363e-05 2.08732e-05 2.15012e-05
2.21204e-05 2.27308e-05 2.33326e-05 2.3926e-05 2.45111e-05
2.5088e-05 2.56568e-05 2.62177e-05 0 0
0 0 0 0 7.82296e-17
9.42978e-16 1.1672e-14 1.44634e-13 1.78569e-12 2.17573e-11
2.5391e-10 2.63299e-09 2.21175e-08 1.42795e-07 5.70417e-07
1.29878e-06 2.13568e-06 2.99445e-06 3.85132e-06 4.70021e-06
5.53933e-06 6.36799e-06 7.1859e-06 7.99291e-06 8.78899e-06
9.57418e-06 1.03485e-05 1.11122e-05 1.18652e-05 1.26078e-05
1.334e-05 1.4062e-05 1.47739e-05 1.5476e-05 1.61682e-05
1.68508e-05 1.7524e-05 1.81878e-05 1.88423e-05 1.94878e-05
2.01244e-05 2.07522e-05 2.13713e-05 2.19819e-05 2.2584e-05
2.31779e-05 2.37636e-05 2.43413e-05 2.49111e-05 0
0 0 0 0 0
0 1.21875e-17 1.25713e-16 1.67302e-15 2.27515e-14
3.09362e-13 4.17996e-12 5.51955e-11 6.76424e-10 6.90094e-09
5.41239e-08 2.9462e-07 8.85754e-07 1.67354e-06 2.51346e-06
3.35984e-06 4.20087e-06 5.0333e-06 5.856e-06 6.66848e-06
7.47052e-06 8.26202e-06 9.04299e-06 9.81347e-06 1.05735e-05
1.13233e-05 1.20628e-05 1.27923e-05 1.35118e-05 1.42216e-05
1.49216e-05 1.56121e-05 1.62932e-05 1.6965e-05 1.76276e-05
1.82813e-05 1.8926e-05 1.95621e-05 2.01895e-05 2.08084e-05
2.14189e-05 2.20212e-05 2.26153e-05 2.32014e-05 2.37797e-05
DataSetFinish
DataSetStart
DataSetName, idvglin
MeasurementType, DC
BatchName, opt_ex09
WaferName, wafer1
DieName, x0y0
DeviceName, n10_2
Temperature, 27
FabDate, 11 May 2010
UserDate, 11 May 2010
WaferDiameter, 0.2
DieLayout, FOUR_CROSSING
DieSize, 0.02, 0.02
DieType, PARTIAL
Attribute, W, 1e-05
Attribute, L, 2e-06
NodeNames, d g s b
Sweep, 1, V, G, LIN, 0, 5, 0.1, CALCULATED, 0.1, 0
Sweep, 2, V, B, LIN, 0, -3, CALCULATED, 5, 0.1, 0
Constant, V, S, 0, 0.1, 0
Constant, V, D, 0.1, 0.1, 0
Target, I, D
Function, gm, derivative (VG, ID)
Plot, idvg, XY (LIN LIN), vg, id
Plot, gm, XY (LIN LIN), vg, gm
DataArray, ID
1.99983e-14 1.34641e-13 9.05959e-13 6.08657e-12 4.07313e-11
2.69904e-10 1.74729e-09 1.07846e-08 6.21313e-08 3.34866e-07
1.52057e-06 4.60818e-06 9.14235e-06 1.4121e-05 1.91228e-05
2.40381e-05 2.88514e-05 3.35667e-05 3.81896e-05 4.27242e-05
4.71729e-05 5.15378e-05 5.58207e-05 6.00231e-05 6.41467e-05
6.81931e-05 7.21641e-05 7.60611e-05 7.98859e-05 8.364e-05
8.73251e-05 9.09426e-05 9.4494e-05 9.7981e-05 0.000101405
0.000104767 0.000108069 0.000111312 0.000114497 0.000117625
0.000120699 0.000123718 0.000126685 0.0001296 0.000132464
0.000135279 0.000138045 0.000140764 0.000143436 0.000146063
0.000148645 0 5.51126e-17 4.94852e-16 4.50452e-15
4.10587e-14 3.74113e-13 3.40337e-12 3.08126e-11 2.75075e-10
2.36327e-09 1.86102e-08 1.28575e-07 7.48611e-07 2.95125e-06
6.91601e-06 1.15856e-05 1.63844e-05 2.1147e-05 2.58356e-05
3.04435e-05 3.49701e-05 3.94158e-05 4.37814e-05 4.8068e-05
5.22765e-05 5.64085e-05 6.04651e-05 6.4448e-05 6.83586e-05
7.21984e-05 7.5969e-05 7.96717e-05 8.3308e-05 8.68795e-05
9.03874e-05 9.38332e-05 9.72182e-05 0.000100544 0.000103811
0.000107022 0.000110176 0.000113277 0.000116323 0.000119318
0.000122261 0.000125155 0.000127999 0.000130795 0.000133545
0.000136248 0.000138906 0 0 0
1.12053e-17 1.05105e-16 1.12656e-15 1.22368e-14 1.33031e-13
1.44456e-12 1.56212e-11 1.66681e-10 1.7078e-09 1.57791e-08
1.22447e-07 7.59421e-07 3.02203e-06 6.96304e-06 1.15294e-05
1.62078e-05 2.08552e-05 2.5437e-05 2.99449e-05 3.43767e-05
3.8732e-05 4.30111e-05 4.72146e-05 5.13435e-05 5.53991e-05
5.93826e-05 6.32953e-05 6.71388e-05 7.09143e-05 7.46232e-05
7.82671e-05 8.18471e-05 8.53647e-05 8.88212e-05 9.22179e-05
9.5556e-05 9.88368e-05 0.000102061 0.000105231 0.000108347
0.00011141 0.000114422 0.000117383 0.000120294 0.000123157
0.000125973 0.000128742 0.000131465 0 0
0 0 0 0 7.55807e-17
9.00511e-16 1.10294e-14 1.35339e-13 1.65844e-12 2.02137e-11
2.41907e-10 2.73299e-09 2.67291e-08 2.0927e-07 1.21079e-06
4.06709e-06 8.23315e-06 1.27802e-05 1.73717e-05 2.19204e-05
2.64041e-05 3.08168e-05 3.51565e-05 3.94226e-05 4.36155e-05
4.77359e-05 5.17847e-05 5.5763e-05 5.96722e-05 6.35134e-05
6.72881e-05 7.09974e-05 7.46428e-05 7.82255e-05 8.17469e-05
8.52081e-05 8.86105e-05 9.19552e-05 9.52434e-05 9.84763e-05
0.000101655 0.000104781 0.000107854 0.000110877 0.00011385
0.000116774 0.000119649 0.000122478 0.000125261 0
0 0 0 0 0
0 1.19043e-17 1.20228e-16 1.57655e-15 2.11515e-14
2.84069e-13 3.80576e-12 5.05139e-11 6.4905e-10 7.55058e-09
7.1019e-08 5.08239e-07 2.34772e-06 5.96635e-06 1.03326e-05
1.48555e-05 1.93667e-05 2.38236e-05 2.82146e-05 3.25361e-05
3.67866e-05 4.09661e-05 4.50749e-05 4.91138e-05 5.30839e-05
5.69863e-05 6.08221e-05 6.45925e-05 6.82989e-05 7.19425e-05
7.55245e-05 7.90461e-05 8.25086e-05 8.59132e-05 8.92609e-05
9.2553e-05 9.57906e-05 9.89748e-05 0.000102107 0.000105187
0.000108217 0.000111198 0.000114131 0.000117016 0.000119855
DataSetFinish
DataSetStart
DataSetName, idvglin
MeasurementType, DC
BatchName, opt_ex09
WaferName, wafer1
DieName, x0y0
DeviceName, n10_5
Temperature, 27
FabDate, 11 May 2010
UserDate, 11 May 2010
WaferDiameter, 0.2
DieLayout, FOUR_CROSSING
DieSize, 0.02, 0.02
DieType, PARTIAL
Attribute, W, 1e-05
Attribute, L, 5e-06
NodeNames, d g s b
Sweep, 1, V, G, LIN, 0, 5, 0.1, CALCULATED, 0.1, 0
Sweep, 2, V, B, LIN, 0, -3, CALCULATED, 5, 0.1, 0
Constant, V, S, 0, 0.1, 0
Constant, V, D, 0.1, 0.1, 0
Target, I, D
Function, gm, derivative (VG, ID)
Plot, idvg, XY (LIN LIN), vg, id
Plot, gm, XY (LIN LIN), vg, gm
DataArray, ID
2.22548e-14 1.50046e-13 1.01059e-12 6.78828e-12 4.52891e-11
2.97183e-10 1.87996e-09 1.11669e-08 6.20789e-08 3.12093e-07
1.15042e-06 2.68998e-06 4.54025e-06 6.45112e-06 8.346e-06
1.02091e-05 1.204e-05 1.38405e-05 1.56119e-05 1.73551e-05
1.90707e-05 2.0759e-05 2.24205e-05 2.40555e-05 2.56645e-05
2.72477e-05 2.88057e-05 3.03389e-05 3.18477e-05 3.33325e-05
3.47937e-05 3.62318e-05 3.76472e-05 3.90402e-05 4.04114e-05
4.1761e-05 4.30895e-05 4.43972e-05 4.56845e-05 4.69519e-05
4.81995e-05 4.94279e-05 5.06373e-05 5.1828e-05 5.30005e-05
5.4155e-05 5.52918e-05 5.64113e-05 5.75137e-05 5.85993e-05
5.96685e-05 0 6.80916e-17 6.15938e-16 5.63337e-15
5.15688e-14 4.71662e-13 4.30108e-12 3.88744e-11 3.42588e-10
2.8329e-09 2.08312e-08 1.32975e-07 6.46594e-07 1.89299e-06
3.58614e-06 5.4011e-06 7.22594e-06 9.03245e-06 1.08146e-05
1.25711e-05 1.43019e-05 1.60068e-05 1.7686e-05 1.93395e-05
2.09676e-05 2.25707e-05 2.41489e-05 2.57028e-05 2.72325e-05
2.87387e-05 3.02215e-05 3.16815e-05 3.3119e-05 3.45343e-05
3.5928e-05 3.73002e-05 3.86515e-05 3.99822e-05 4.12926e-05
4.25831e-05 4.3854e-05 4.51057e-05 4.63386e-05 4.75528e-05
4.87488e-05 4.99268e-05 5.10873e-05 5.22304e-05 5.33564e-05
5.44658e-05 5.55586e-05 0 0 0
1.38242e-17 1.3459e-16 1.45819e-15 1.59613e-14 1.74752e-13
1.90879e-12 2.0685e-11 2.18628e-10 2.15313e-09 1.82791e-08
1.27809e-07 6.48111e-07 1.89362e-06 3.55255e-06 5.32088e-06
7.09922e-06 8.8622e-06 1.06035e-05 1.23213e-05 1.40149e-05
1.5684e-05 1.73286e-05 1.89488e-05 2.05447e-05 2.21167e-05
2.3665e-05 2.519e-05 2.6692e-05 2.81713e-05 2.96283e-05
3.10634e-05 3.2477e-05 3.38694e-05 3.52408e-05 3.65918e-05
3.79227e-05 3.92337e-05 4.05252e-05 4.17976e-05 4.30511e-05
4.42862e-05 4.5503e-05 4.67019e-05 4.78832e-05 4.90472e-05
5.01942e-05 5.13244e-05 5.24382e-05 0 0
0 0 0 1.00347e-17 9.6591e-17
1.17085e-15 1.45002e-14 1.79739e-13 2.22165e-12 2.71781e-11
3.21257e-10 3.4394e-09 3.02455e-08 2.07672e-07 9.30045e-07
2.32672e-06 4.00672e-06 5.74951e-06 7.49182e-06 9.21758e-06
1.09223e-05 1.26045e-05 1.42634e-05 1.58988e-05 1.75107e-05
1.90991e-05 2.06643e-05 2.22065e-05 2.3726e-05 2.52232e-05
2.66982e-05 2.81515e-05 2.95835e-05 3.09944e-05 3.23845e-05
3.37543e-05 3.5104e-05 3.6434e-05 3.77445e-05 3.9036e-05
4.03087e-05 4.15629e-05 4.2799e-05 4.40172e-05 4.52178e-05
4.64011e-05 4.75674e-05 4.87169e-05 4.985e-05 0
0 0 0 0 0
0 1.41367e-17 1.52275e-16 2.03499e-15 2.76848e-14
3.76633e-13 5.09886e-12 6.78051e-11 8.49355e-10 9.07525e-09
7.51454e-08 4.48388e-07 1.52053e-06 3.07731e-06 4.77604e-06
6.49625e-06 8.20652e-06 9.8985e-06 1.15695e-05 1.32184e-05
1.48447e-05 1.64483e-05 1.80292e-05 1.95876e-05 2.11236e-05
2.26374e-05 2.41295e-05 2.56e-05 2.70493e-05 2.84777e-05
2.98855e-05 3.1273e-05 3.26406e-05 3.39885e-05 3.53171e-05
3.66267e-05 3.79175e-05 3.919e-05 4.04442e-05 4.16807e-05
4.28996e-05 4.41012e-05 4.52858e-05 4.64536e-05 4.7605e-05
DataSetFinish
DataSetStart
DataSetName, idvglin
MeasurementType, DC
BatchName, opt_ex09
WaferName, wafer1
DieName, x0y0
DeviceName, n2_0p5
Temperature, 27
FabDate, 11 May 2010
UserDate, 11 May 2010
WaferDiameter, 0.2
DieLayout, FOUR_CROSSING
DieSize, 0.02, 0.02
DieType, PARTIAL
Attribute, W, 2e-06
Attribute, L, 5e-07
NodeNames, d g s b
Sweep, 1, V, G, LIN, 0, 5, 0.1, CALCULATED, 0.1, 0
Sweep, 2, V, B, LIN, 0, -3, CALCULATED, 5, 0.1, 0
Constant, V, S, 0, 0.1, 0
Constant, V, D, 0.1, 0.1, 0
Target, I, D
Function, gm, derivative (VG, ID)
Plot, idvg, XY (LIN LIN), vg, id
Plot, gm, XY (LIN LIN), vg, gm
DataArray, ID
3.90177e-16 2.2975e-15 1.35326e-14 7.97039e-14 4.69301e-13
2.76126e-12 1.62182e-11 9.48594e-11 5.4945e-10 3.11528e-09
1.69622e-08 8.74184e-08 4.27476e-07 1.80955e-06 5.31877e-06
1.04542e-05 1.6005e-05 2.14148e-05 2.65472e-05 3.14021e-05
3.60064e-05 4.03858e-05 4.45606e-05 4.85468e-05 5.23575e-05
5.6004e-05 5.94964e-05 6.28441e-05 6.60554e-05 6.91382e-05
7.20998e-05 7.49469e-05 7.76857e-05 8.03221e-05 8.28615e-05
8.53089e-05 8.76691e-05 8.99465e-05 9.21451e-05 9.42689e-05
9.63214e-05 9.83059e-05 0.000100226 0.000102084 0.000103883
0.000105626 0.000107314 0.000108952 0.00011054 0.000112081
0.000113576 0 0 1.19803e-17 8.30775e-17
6.1243e-16 4.55354e-15 3.38922e-14 2.52226e-13 1.87561e-12
1.39172e-11 1.02666e-10 7.45948e-10 5.22535e-09 3.40671e-08
2.0201e-07 1.04117e-06 3.75126e-06 8.39975e-06 1.37202e-05
1.90118e-05 2.4084e-05 2.89127e-05 3.35114e-05 3.78973e-05
4.20855e-05 4.60891e-05 4.99196e-05 5.35873e-05 5.7102e-05
6.04726e-05 6.37072e-05 6.68137e-05 6.97991e-05 7.26702e-05
7.5433e-05 7.80935e-05 8.06569e-05 8.31282e-05 8.55122e-05
8.78132e-05 9.00353e-05 9.21822e-05 9.42577e-05 9.62651e-05
9.82075e-05 0.000100088 0.000101909 0.000103673 0.000105384
0.000107042 0.000108651 0 0 0
0 0 2.13822e-17 1.68277e-16 1.41146e-15
1.19318e-14 1.00937e-13 8.53431e-13 7.20253e-12 6.04627e-11
5.00046e-10 3.97771e-09 2.90987e-08 1.88474e-07 1.02499e-06
3.74641e-06 8.34483e-06 1.35574e-05 1.87374e-05 2.37155e-05
2.84685e-05 3.3005e-05 3.73384e-05 4.14813e-05 4.54451e-05
4.92404e-05 5.2877e-05 5.6364e-05 5.971e-05 6.29229e-05
6.60102e-05 6.89788e-05 7.18351e-05 7.45851e-05 7.72344e-05
7.97883e-05 8.22515e-05 8.46286e-05 8.6924e-05 8.91415e-05
9.12849e-05 9.33577e-05 9.53632e-05 9.73045e-05 9.91844e-05
0.000101006 0.000102771 0.000104483 0 0
0 0 0 0 0
1.55619e-17 1.23186e-16 1.11417e-15 1.02382e-14 9.42223e-14
8.66659e-13 7.9542e-12 7.25252e-11 6.4877e-10 5.51617e-09
4.21489e-08 2.77803e-07 1.44316e-06 4.68051e-06 9.46539e-06
1.46213e-05 1.96841e-05 2.45455e-05 2.91934e-05 3.3636e-05
3.78848e-05 4.19506e-05 4.58439e-05 4.95746e-05 5.31518e-05
5.65843e-05 5.98801e-05 6.3047e-05 6.60918e-05 6.90213e-05
7.18417e-05 7.45585e-05 7.71773e-05 7.9703e-05 8.21403e-05
8.44936e-05 8.6767e-05 8.89643e-05 9.10891e-05 9.31447e-05
9.51345e-05 9.70612e-05 9.89279e-05 0.000100737 0
0 0 0 0 0
0 0 0 2.01539e-17 1.69133e-16
1.62718e-15 1.58954e-14 1.5547e-13 1.51925e-12 1.47976e-11
1.42683e-10 1.33573e-09 1.15903e-08 8.73902e-08 5.49366e-07
2.44038e-06 6.42135e-06 1.13915e-05 1.64735e-05 2.14058e-05
2.61359e-05 3.06623e-05 3.49933e-05 3.91392e-05 4.311e-05
4.69154e-05 5.05646e-05 5.40663e-05 5.74287e-05 6.06594e-05
6.37658e-05 6.67545e-05 6.96317e-05 7.24034e-05 7.50749e-05
7.76515e-05 8.01378e-05 8.25384e-05 8.48574e-05 8.70988e-05
8.92662e-05 9.13631e-05 9.33926e-05 9.53579e-05 9.72618e-05
DataSetFinish
DataSetStart
DataSetName, idvglin
MeasurementType, DC
BatchName, opt_ex09
WaferName, wafer1
DieName, x0y0
DeviceName, n2_10
Temperature, 27
FabDate, 11 May 2010
UserDate, 11 May 2010
WaferDiameter, 0.2
DieLayout, FOUR_CROSSING
DieSize, 0.02, 0.02
DieType, PARTIAL
Attribute, W, 2e-06
Attribute, L, 1e-05
NodeNames, d g s b
Sweep, 1, V, G, LIN, 0, 5, 0.1, CALCULATED, 0.1, 0
Sweep, 2, V, B, LIN, 0, -3, CALCULATED, 5, 0.1, 0
Constant, V, S, 0, 0.1, 0
Constant, V, D, 0.1, 0.1, 0
Target, I, D
Function, gm, derivative (VG, ID)
Plot, idvg, XY (LIN LIN), vg, id
Plot, gm, XY (LIN LIN), vg, gm
DataArray, ID
9.15446e-16 6.17234e-15 4.15943e-14 2.798e-13 1.87358e-12
1.24031e-11 7.99502e-11 4.89088e-10 2.79266e-09 1.48947e-08
6.48609e-08 1.84861e-07 3.51994e-07 5.32677e-07 7.14096e-07
8.93062e-07 1.06914e-06 1.24244e-06 1.41311e-06 1.58125e-06
1.7469e-06 1.91009e-06 2.07087e-06 2.22925e-06 2.38526e-06
2.53893e-06 2.69031e-06 2.83941e-06 2.98628e-06 3.13095e-06
3.27346e-06 3.41383e-06 3.55211e-06 3.68833e-06 3.82251e-06
3.95471e-06 4.08494e-06 4.21323e-06 4.33964e-06 4.46417e-06
4.58687e-06 4.70776e-06 4.82687e-06 4.94424e-06 5.05989e-06
5.17384e-06 5.28614e-06 5.39679e-06 5.50584e-06 5.6133e-06
5.7192e-06 0 0 2.10454e-17 1.85009e-16
1.68646e-15 1.54268e-14 1.40928e-13 1.28065e-12 1.14584e-11
9.83018e-11 7.68608e-10 5.26462e-09 3.01286e-08 1.14464e-07
2.60103e-07 4.29221e-07 6.02942e-07 7.75944e-07 9.4699e-07
1.11582e-06 1.28239e-06 1.44666e-06 1.60863e-06 1.76831e-06
1.92571e-06 2.08084e-06 2.23372e-06 2.3844e-06 2.53288e-06
2.6792e-06 2.8234e-06 2.9655e-06 3.10554e-06 3.24355e-06
3.37955e-06 3.51359e-06 3.64568e-06 3.77587e-06 3.90419e-06
4.03065e-06 4.15529e-06 4.27815e-06 4.39924e-06 4.5186e-06
4.63626e-06 4.75223e-06 4.86656e-06 4.97925e-06 5.09035e-06
5.19987e-06 5.30784e-06 0 0 0
0 0 4.08944e-17 4.31249e-16 4.70748e-15
5.14871e-14 5.60895e-13 6.02685e-12 6.21043e-11 5.75487e-10
4.47016e-09 2.77159e-08 1.098e-07 2.51879e-07 4.1644e-07
5.85574e-07 7.54286e-07 9.21333e-07 1.08639e-06 1.24933e-06
1.41012e-06 1.56873e-06 1.72515e-06 1.8794e-06 2.03148e-06
2.18142e-06 2.32925e-06 2.47499e-06 2.61866e-06 2.7603e-06
2.89993e-06 3.03758e-06 3.17329e-06 3.30708e-06 3.43898e-06
3.56903e-06 3.69724e-06 3.82364e-06 3.94827e-06 4.07115e-06
4.19231e-06 4.31178e-06 4.42957e-06 4.54572e-06 4.66025e-06
4.77319e-06 4.88456e-06 4.99439e-06 0 0
0 0 0 0 0
2.87058e-17 3.28307e-16 4.04493e-15 5.00792e-14 6.17182e-13
7.47515e-12 8.56538e-11 8.52011e-10 6.78465e-09 4.02454e-08
1.39532e-07 2.8786e-07 4.51335e-07 6.17355e-07 7.82588e-07
9.46171e-07 1.10784e-06 1.26748e-06 1.42505e-06 1.58052e-06
1.7339e-06 1.8852e-06 2.03442e-06 2.18158e-06 2.32672e-06
2.46985e-06 2.611e-06 2.7502e-06 2.88747e-06 3.02284e-06
3.15635e-06 3.288e-06 3.41785e-06 3.5459e-06 3.67219e-06
3.79674e-06 3.91958e-06 4.04073e-06 4.16022e-06 4.27808e-06
4.39432e-06 4.50898e-06 4.62208e-06 4.73363e-06 0
0 0 0 0 0
0 0 0 4.15905e-17 5.26428e-16
7.13001e-15 9.68605e-14 1.30571e-12 1.7105e-11 2.04757e-10
1.99851e-09 1.4887e-08 7.35221e-08 1.98171e-07 3.53562e-07
5.16381e-07 6.79751e-07 8.4191e-07 1.00236e-06 1.16091e-06
1.31749e-06 1.47206e-06 1.62462e-06 1.77515e-06 1.92366e-06
2.07019e-06 2.21474e-06 2.35733e-06 2.498e-06 2.63677e-06
2.77365e-06 2.90868e-06 3.04188e-06 3.17328e-06 3.3029e-06
3.43077e-06 3.55692e-06 3.68136e-06 3.80412e-06 3.92524e-06
4.04472e-06 4.1626e-06 4.2789e-06 4.39364e-06 4.50684e-06
DataSetFinish
DataSetStart
DataSetName, idvglin
MeasurementType, DC
BatchName, opt_ex09
WaferName, wafer1
DieName, x0y0
DeviceName, n5_10
Temperature, 27
FabDate, 11 May 2010
UserDate, 11 May 2010
WaferDiameter, 0.2
DieLayout, FOUR_CROSSING
DieSize, 0.02, 0.02
DieType, PARTIAL
Attribute, W, 5e-06
Attribute, L, 1e-05
NodeNames, d g s b
Sweep, 1, V, G, LIN, 0, 5, 0.1, CALCULATED, 0.1, 0
Sweep, 2, V, B, LIN, 0, -3, CALCULATED, 5, 0.1, 0
Constant, V, S, 0, 0.1, 0
Constant, V, D, 0.1, 0.1, 0
Target, I, D
Function, gm, derivative (VG, ID)
Plot, idvg, XY (LIN LIN), vg, id
Plot, gm, XY (LIN LIN), vg, gm
DataArray, ID
4.29769e-15 2.89768e-14 1.95197e-13 1.31175e-12 8.76123e-12
5.76425e-11 3.66646e-10 2.19544e-09 1.22936e-08 6.30628e-08
2.44426e-07 6.02376e-07 1.04777e-06 1.51275e-06 1.97546e-06
2.43112e-06 2.87937e-06 3.32061e-06 3.75517e-06 4.18326e-06
4.60497e-06 5.02041e-06 5.42964e-06 5.83274e-06 6.22978e-06
6.62085e-06 7.00603e-06 7.38541e-06 7.75908e-06 8.12713e-06
8.48965e-06 8.84672e-06 9.19845e-06 9.54491e-06 9.88619e-06
1.02224e-05 1.05536e-05 1.08798e-05 1.12012e-05 1.15179e-05
1.18298e-05 1.21372e-05 1.244e-05 1.27384e-05 1.30323e-05
1.3322e-05 1.36074e-05 1.38887e-05 1.41658e-05 1.44389e-05
1.47081e-05 0 1.28916e-17 1.10332e-16 1.00276e-15
9.17378e-15 8.39174e-14 7.65717e-13 6.93346e-12 6.1413e-11
5.13891e-10 3.84835e-09 2.51161e-08 1.29029e-07 4.07795e-07
8.10351e-07 1.25018e-06 1.69491e-06 2.13612e-06 2.57195e-06
3.002e-06 3.42619e-06 3.84447e-06 4.25685e-06 4.66334e-06
5.06397e-06 5.4588e-06 5.84789e-06 6.23131e-06 6.60914e-06
6.98145e-06 7.34832e-06 7.70984e-06 8.06609e-06 8.41715e-06
8.7631e-06 9.10402e-06 9.43999e-06 9.77109e-06 1.00974e-05
1.0419e-05 1.0736e-05 1.10483e-05 1.13562e-05 1.16597e-05
1.19588e-05 1.22537e-05 1.25443e-05 1.28308e-05 1.31131e-05
1.33915e-05 1.36659e-05 0 0 0
0 2.35823e-17 2.4154e-16 2.62997e-15 2.87858e-14
3.14605e-13 3.41598e-12 3.63234e-11 3.63495e-10 3.17469e-09
2.2963e-08 1.25035e-07 4.0099e-07 7.94651e-07 1.2229e-06
1.6561e-06 2.08653e-06 2.51225e-06 2.9327e-06 3.34767e-06
3.75707e-06 4.16086e-06 4.55904e-06 4.95163e-06 5.3387e-06
5.72028e-06 6.09644e-06 6.46726e-06 6.83281e-06 7.19316e-06
7.54838e-06 7.89856e-06 8.24376e-06 8.58407e-06 8.91956e-06
9.25029e-06 9.57636e-06 9.89781e-06 1.02147e-05 1.05272e-05
1.08353e-05 1.1139e-05 1.14385e-05 1.17338e-05 1.2025e-05
1.23121e-05 1.25952e-05 1.28743e-05 0 0
0 0 0 0 1.68193e-17
1.80801e-16 2.2157e-15 2.74493e-14 3.39565e-13 4.16634e-12
4.97195e-11 5.45961e-10 5.00352e-09 3.61723e-08 1.7923e-07
4.94819e-07 8.96239e-07 1.31907e-06 1.74372e-06 2.16514e-06
2.58198e-06 2.99376e-06 3.40028e-06 3.80145e-06 4.19723e-06
4.58763e-06 4.97269e-06 5.35243e-06 5.72692e-06 6.09622e-06
6.46039e-06 6.8195e-06 7.17362e-06 7.52282e-06 7.86718e-06
8.20676e-06 8.54163e-06 8.87186e-06 9.19752e-06 9.51868e-06
9.83541e-06 1.01478e-05 1.04558e-05 1.07597e-05 1.10593e-05
1.13548e-05 1.16463e-05 1.19338e-05 1.22174e-05 0
0 0 0 0 0
0 0 2.42958e-17 2.90751e-16 3.92163e-15
5.33436e-14 7.23341e-13 9.67453e-12 1.23431e-10 1.37686e-09
1.20517e-08 7.82574e-08 3.0217e-07 6.64927e-07 1.07433e-06
1.49267e-06 1.90986e-06 2.32324e-06 2.73199e-06 3.13577e-06
3.53445e-06 3.92794e-06 4.31624e-06 4.69935e-06 5.07731e-06
5.45016e-06 5.81797e-06 6.18078e-06 6.53866e-06 6.89167e-06
7.23989e-06 7.58336e-06 7.92217e-06 8.25638e-06 8.58606e-06
8.91126e-06 9.23205e-06 9.5485e-06 9.86068e-06 1.01686e-05
1.04724e-05 1.07721e-05 1.10678e-05 1.13595e-05 1.16473e-05
DataSetFinish
DataSetStart
DataSetName, idvgsat
MeasurementType, DC
BatchName, opt_ex09
WaferName, wafer1
DieName, x0y0
DeviceName, n10_0p5
Temperature, 27
FabDate, 11 May 2010
UserDate, 11 May 2010
WaferDiameter, 0.2
DieLayout, FOUR_CROSSING
DieSize, 0.02, 0.02
DieType, PARTIAL
Attribute, W, 1e-05
Attribute, L, 5e-07
NodeNames, d g s b
Sweep, 1, V, G, LIN, 0, 5, 0.1, CALCULATED, 0.1, 0
Sweep, 2, V, B, LIN, 0, -3, CALCULATED, 5, 0.1, 0
Constant, V, D, 5, 0.1, 0
Constant, V, S, 0, 0.1, 0
Target, I, D
Function, gm, derivative (VG, ID)
Plot, idvg, XY (LIN LIN), vg, id
Plot, gm, XY (LIN LIN), vg, gm
DataArray, ID
5.59285e-13 3.29377e-12 1.93899e-11 1.1403e-10 6.68951e-10
3.90151e-09 2.2448e-08 1.25384e-07 6.61867e-07 3.20629e-06
1.36366e-05 4.5381e-05 0.000109803 0.000203595 0.000316228
0.000439921 0.000570745 0.000706807 0.000847026 0.000990642
0.00113705 0.00128574 0.00143632 0.00158843 0.00174182
0.00189626 0.00205157 0.00220762 0.00236429 0.00252149
0.00267915 0.0028372 0.00299561 0.00315432 0.00331332
0.00347258 0.00363207 0.00379179 0.00395171 0.00411183
0.00427213 0.00443262 0.00459328 0.00475412 0.00491512
0.00507628 0.00523759 0.00539906 0.00556068 0.00572245
0.00588436 1.30719e-15 9.66339e-15 7.18772e-14 5.35026e-13
3.98196e-12 2.96159e-11 2.19857e-10 1.6239e-09 1.18351e-08
8.34109e-08 5.46091e-07 3.151e-06 1.49731e-05 5.12889e-05
0.000121441 0.000218852 0.000333207 0.00045813 0.000590419
0.000728306 0.000870619 0.00101648 0.00116519 0.00131621
0.00146909 0.00162351 0.00177917 0.00193587 0.00209343
0.00225171 0.00241061 0.00257003 0.0027299 0.00289017
0.00305078 0.0032117 0.0033729 0.00353435 0.00369604
0.00385795 0.00402005 0.00418235 0.00434483 0.00450748
0.0046703 0.00483327 0.0049964 0.00515967 0.00532309
0.00548664 0.00565033 2.26397e-17 1.0578e-16 8.09429e-16
6.76461e-15 5.7163e-14 4.83634e-13 4.09125e-12 3.45799e-11
2.91538e-10 2.44015e-09 2.00148e-08 1.558e-07 1.08401e-06
6.29089e-06 2.73713e-05 7.96654e-05 0.000163839 0.000269693
0.000388955 0.000517238 0.000652196 0.000792341 0.0009366
0.00108415 0.00123434 0.00138666 0.00154072 0.00169621
0.00185286 0.00201049 0.00216894 0.00232807 0.0024878
0.00264803 0.00280869 0.00296974 0.00313114 0.00329283
0.00345481 0.00361703 0.00377949 0.00394215 0.00410502
0.00426808 0.00443132 0.00459472 0.00475829 0.00492201
0.00508588 0.00524989 0.00541403 1.24498e-17 1.40897e-17
2.91902e-17 1.68239e-16 1.44862e-15 1.32383e-14 1.21791e-13
1.12109e-12 1.03149e-11 9.47546e-11 8.6623e-10 7.80656e-09
6.75904e-08 5.3087e-07 3.49079e-06 1.75273e-05 5.88608e-05
0.000133542 0.00023292 0.000347726 0.000472738 0.000605185
0.000743359 0.00088605 0.00103234 0.00118152 0.00133303
0.00148644 0.00164139 0.00179763 0.00195493 0.00211311
0.00227205 0.00243163 0.00259176 0.00275236 0.00291339
0.00307477 0.00323649 0.0033985 0.00356078 0.0037233
0.00388605 0.00404901 0.00421217 0.00437551 0.00453902
0.0047027 0.00486654 0.00503052 0.00519465 1.30059e-17
1.30573e-17 1.35611e-17 1.84918e-17 6.6751e-17 5.39083e-16
5.16193e-15 5.0405e-14 4.93132e-13 4.8236e-12 4.71255e-11
4.5865e-10 4.41186e-09 4.10037e-08 3.48447e-07 2.48035e-06
1.3497e-05 4.91918e-05 0.000118301 0.00021354 0.000325317
0.00044799 0.00057856 0.000715192 0.000856596 0.0010018
0.00115005 0.00130077 0.00145348 0.00160784 0.00176355
0.00192039 0.00207817 0.00223675 0.00239601 0.00255585
0.0027162 0.00287698 0.00303816 0.00319968 0.00336151
0.00352362 0.00368599 0.0038486 0.00401142 0.00417445
0.00433766 0.00450106 0.00466462 0.00482835 0.00499223
DataSetFinish
DataSetStart
DataSetName, idvgsat
MeasurementType, DC
BatchName, opt_ex09
WaferName, wafer1
DieName, x0y0
DeviceName, n10_0p8
Temperature, 27
FabDate, 11 May 2010
UserDate, 11 May 2010
WaferDiameter, 0.2
DieLayout, FOUR_CROSSING
DieSize, 0.02, 0.02
DieType, PARTIAL
Attribute, W, 1e-05
Attribute, L, 8e-07
NodeNames, d g s b
Sweep, 1, V, G, LIN, 0, 5, 0.1, CALCULATED, 0.1, 0
Sweep, 2, V, B, LIN, 0, -3, CALCULATED, 5, 0.1, 0
Constant, V, D, 5, 0.1, 0
Constant, V, S, 0, 0.1, 0
Target, I, D
Function, gm, derivative (VG, ID)
Plot, idvg, XY (LIN LIN), vg, id
Plot, gm, XY (LIN LIN), vg, gm
DataArray, ID
5.7324e-14 3.68127e-13 2.3636e-12 1.51636e-11 9.70822e-11
6.18372e-10 3.88986e-09 2.37776e-08 1.37295e-07 7.27591e-07
3.43239e-06 1.28654e-05 3.46805e-05 7.0098e-05 0.000116631
0.000171747 0.000233911 0.000302228 0.000376076 0.000454951
0.000538404 0.000626031 0.000717469 0.000812396 0.00091052
0.00101158 0.00111536 0.00122164 0.00133023 0.00144098
0.00155373 0.00166835 0.0017847 0.00190269 0.0020222
0.00214315 0.00226544 0.002389 0.00251375 0.00263962
0.00276656 0.00289449 0.00302338 0.00315316 0.00328379
0.00341522 0.00354742 0.00368034 0.00381395 0.00394821
0.00408309 5.11012e-17 3.49775e-16 2.85915e-15 2.39412e-14
2.01034e-13 1.68803e-12 1.41594e-11 1.18404e-10 9.81458e-10
7.94158e-09 6.0529e-08 4.10453e-07 2.35358e-06 1.02708e-05
3.04269e-05 6.45934e-05 0.000110413 0.000165427 0.000228106
0.000297483 0.000372833 0.000453555 0.000539124 0.00062908
0.000723017 0.00082058 0.000921453 0.00102536 0.00113205
0.0012413 0.00135292 0.00146672 0.00158256 0.00170027
0.00181974 0.00194084 0.00206346 0.0021875 0.00231288
0.00243949 0.00256728 0.00269616 0.00282606 0.00295694
0.00308872 0.00322136 0.0033548 0.003489 0.00362391
0.0037595 0.00389573 1.16217e-17 1.26872e-17 2.30787e-17
1.24428e-16 1.11289e-15 1.0753e-14 1.04758e-13 1.02111e-12
9.94333e-12 9.65059e-11 9.27178e-10 8.64524e-09 7.45238e-08
5.49743e-07 3.24395e-06 1.35407e-05 3.72675e-05 7.47201e-05
0.000123243 0.000180679 0.000245697 0.000317382 0.000395015
0.000477986 0.000565764 0.00065789 0.000753959 0.000853616
0.000956551 0.00106248 0.00117117 0.00128239 0.00139595
0.00151167 0.00162939 0.00174897 0.00187026 0.00199317
0.00211756 0.00224335 0.00237044 0.00249875 0.00262819
0.0027587 0.00289021 0.00302265 0.00315597 0.00329012
0.00342504 0.00356069 0.00369702 1.22508e-17 1.2259e-17
1.23465e-17 1.32891e-17 2.34366e-17 1.32685e-16 1.30884e-15
1.39706e-14 1.50258e-13 1.61645e-12 1.73631e-11 1.85551e-10
1.95063e-09 1.95223e-08 1.72718e-07 1.23429e-06 6.54904e-06
2.27537e-05 5.33087e-05 9.64207e-05 0.000149519 0.000210915
0.000279516 0.000354501 0.000435194 0.000521014 0.000611458
0.000706087 0.000804518 0.000906413 0.00101147 0.00111944
0.00123007 0.00134315 0.0014585 0.00157594 0.00169532
0.0018165 0.00193935 0.00206376 0.00218961 0.00231681
0.00244528 0.00257491 0.00270565 0.00283742 0.00297015
0.00310378 0.00323825 0.00337352 0.00350953 1.3e-17
1.30001e-17 1.30013e-17 1.30152e-17 1.3176e-17 1.50353e-17
3.65396e-17 2.8525e-16 3.16165e-15 3.64253e-14 4.20987e-13
4.86259e-12 5.5994e-11 6.38177e-10 7.03625e-09 7.05769e-08
5.80566e-07 3.60364e-06 1.50019e-05 4.02995e-05 7.9134e-05
0.000128826 0.00018739 0.000253571 0.000326466 0.000405345
0.00048959 0.000578667 0.000672111 0.000769518 0.000870531
0.000974837 0.00108216 0.00119225 0.00130488 0.00141986
0.00153701 0.00165616 0.00177717 0.00189991 0.00202425
0.00215007 0.00227729 0.00240581 0.00253553 0.00266637
0.00279828 0.00293117 0.00306498 0.00319965 0.00333513
DataSetFinish
DataSetStart
DataSetName, idvgsat
MeasurementType, DC
BatchName, opt_ex09
WaferName, wafer1
DieName, x0y0
DeviceName, n10_1
Temperature, 27
FabDate, 11 May 2010
UserDate, 11 May 2010
WaferDiameter, 0.2
DieLayout, FOUR_CROSSING
DieSize, 0.02, 0.02
DieType, PARTIAL
Attribute, W, 1e-05
Attribute, L, 1e-06
NodeNames, d g s b
Sweep, 1, V, G, LIN, 0, 5, 0.1, CALCULATED, 0.1, 0
Sweep, 2, V, B, LIN, 0, -3, CALCULATED, 5, 0.1, 0
Constant, V, D, 5, 0.1, 0
Constant, V, S, 0, 0.1, 0
Target, I, D
Function, gm, derivative (VG, ID)
Plot, idvg, XY (LIN LIN), vg, id
Plot, gm, XY (LIN LIN), vg, gm
DataArray, ID
3.58253e-14 2.35358e-13 1.546e-12 1.01467e-11 6.64475e-11
4.32724e-10 2.7797e-09 1.73045e-08 1.01343e-07 5.43993e-07
2.59275e-06 9.66402e-06 2.56965e-05 5.14714e-05 8.54349e-05
0.000126061 0.000172428 0.000223989 0.000280347 0.000341163
0.000406129 0.000474959 0.00054739 0.000623181 0.000702111
0.000783979 0.000868601 0.000955809 0.00104545 0.00113738
0.00123147 0.00132759 0.00142565 0.00152552 0.00162713
0.00173036 0.00183515 0.00194142 0.00204908 0.00215807
0.00226833 0.0023798 0.00249242 0.00260613 0.00272088
0.00283663 0.00295333 0.00307094 0.00318942 0.00330873
0.00342882 2.74565e-17 1.56349e-16 1.27964e-15 1.10686e-14
9.63646e-14 8.39309e-13 7.30336e-12 6.33622e-11 5.44983e-10
4.57552e-09 3.61426e-08 2.53259e-07 1.49989e-06 6.76132e-06
2.05507e-05 4.44669e-05 7.71912e-05 0.000117204 0.000163539
0.000215572 0.000272825 0.000334885 0.000401385 0.000471992
0.000546406 0.000624355 0.000705595 0.000789903 0.000877076
0.000966929 0.00105929 0.00115401 0.00125094 0.00134995
0.00145092 0.00155374 0.00165829 0.00176448 0.00187223
0.00198144 0.00209204 0.00220394 0.00231709 0.00243142
0.00254686 0.00266335 0.00278085 0.0028993 0.00301866
0.00313887 0.0032599 1.15347e-17 1.18542e-17 1.51191e-17
4.8476e-17 3.89274e-16 3.87101e-15 3.94385e-14 4.02664e-13
4.10839e-12 4.17973e-11 4.21366e-10 4.13187e-09 3.75777e-08
2.92579e-07 1.82665e-06 8.14385e-06 2.37062e-05 4.94175e-05
8.3766e-05 0.000125365 0.000173336 0.000227074 0.000286085
0.000349945 0.000418274 0.00049073 0.000567009 0.000646834
0.000729958 0.000816154 0.000905216 0.000996957 0.0010912
0.0011878 0.0012866 0.00138746 0.00149028 0.00159491
0.00170127 0.00180926 0.00191877 0.00202972 0.00214203
0.00225563 0.00237044 0.0024864 0.00260345 0.00272152
0.00284057 0.00296054 0.00308137 1.22502e-17 1.22519e-17
1.22717e-17 1.24969e-17 1.50553e-17 4.41267e-17 3.74464e-16
4.12794e-15 4.67721e-14 5.3107e-13 6.02379e-12 6.80431e-11
7.58101e-10 8.09115e-09 7.7015e-08 5.93506e-07 3.43834e-06
1.31442e-05 3.30742e-05 6.26868e-05 0.000100368 0.000144982
0.000195788 0.000252223 0.000313817 0.000380152 0.000450859
0.000525606 0.000604096 0.000686061 0.000771257 0.000859464
0.00095048 0.00104412 0.00114022 0.00123862 0.00133917
0.00144175 0.00154623 0.00165249 0.00176044 0.00186997
0.001981 0.00209342 0.00220717 0.00232217 0.00243835
0.00255565 0.00267399 0.00279334 0.00291361 1.3e-17
1.3e-17 1.30002e-17 1.30027e-17 1.30328e-17 1.34033e-17
1.79522e-17 7.38156e-17 7.59828e-16 9.18372e-15 1.12604e-13
1.38143e-12 1.69104e-11 2.05382e-10 2.42924e-09 2.65071e-08
2.40026e-07 1.65073e-06 7.79162e-06 2.33052e-05 4.91045e-05
8.36613e-05 0.000125619 0.000174107 0.000228501 0.00028829
0.00035303 0.000422328 0.000495834 0.000573234 0.000654244
0.000738609 0.000826098 0.000916497 0.00100961 0.00110527
0.00120331 0.00130357 0.00140592 0.00151023 0.00161639
0.00172427 0.00183377 0.00194481 0.00205729 0.00217113
0.00228625 0.00240257 0.00252004 0.00263857 0.00275812
DataSetFinish
DataSetStart
DataSetName, idvgsat
MeasurementType, DC
BatchName, opt_ex09
WaferName, wafer1
DieName, x0y0
DeviceName, n10_10
Temperature, 27
FabDate, 11 May 2010
UserDate, 11 May 2010
WaferDiameter, 0.2
DieLayout, FOUR_CROSSING
DieSize, 0.02, 0.02
DieType, PARTIAL
Attribute, W, 1e-05
Attribute, L, 1e-05
NodeNames, d g s b
Sweep, 1, V, G, LIN, 0, 5, 0.1, CALCULATED, 0.1, 0
Sweep, 2, V, B, LIN, 0, -3, CALCULATED, 5, 0.1, 0
Constant, V, D, 5, 0.1, 0
Constant, V, S, 0, 0.1, 0
Target, I, D
Function, gm, derivative (VG, ID)
Plot, idvg, XY (LIN LIN), vg, id
Plot, gm, XY (LIN LIN), vg, gm
DataArray, ID
1.80617e-14 1.21702e-13 8.19343e-13 5.49869e-12 3.66034e-11
2.3893e-10 1.49572e-09 8.76303e-09 4.81911e-08 2.35387e-07
8.48799e-07 2.14396e-06 4.15836e-06 6.8246e-06 1.00878e-05
1.39211e-05 1.83118e-05 2.32516e-05 2.87333e-05 3.47491e-05
4.12913e-05 4.83521e-05 5.59236e-05 6.39984e-05 7.25693e-05
8.16291e-05 9.11711e-05 0.000101189 0.000111676 0.000122626
0.000134033 0.000145892 0.000158196 0.000170941 0.000184122
0.000197732 0.000211768 0.000226224 0.000241096 0.00025638
0.000272071 0.000288164 0.000304657 0.000321544 0.000338823
0.000356489 0.000374539 0.00039297 0.000411778 0.00043096
0.000450512 1.70631e-17 6.85772e-17 5.40419e-16 4.8616e-15
4.44179e-14 4.06031e-13 3.6985e-12 3.33217e-11 2.91118e-10
2.36149e-09 1.69204e-08 1.04915e-07 4.88506e-07 1.49434e-06
3.25493e-06 5.73046e-06 8.86649e-06 1.26324e-05 1.70111e-05
2.19903e-05 2.75588e-05 3.37057e-05 4.04206e-05 4.76934e-05
5.55142e-05 6.38735e-05 7.27623e-05 8.21717e-05 9.20932e-05
0.000102519 0.00011344 0.000124849 0.000136738 0.000149101
0.000161929 0.000175217 0.000188956 0.00020314 0.000217764
0.00023282 0.000248303 0.000264206 0.000280524 0.000297252
0.000314382 0.000331911 0.000349833 0.000368143 0.000386835
0.000405905 0.000425348 1.15082e-17 1.15901e-17 1.24876e-17
2.23248e-17 1.3015e-16 1.3119e-15 1.42598e-14 1.55983e-13
1.70213e-12 1.83903e-11 1.92612e-10 1.85387e-09 1.5187e-08
1.02243e-07 4.95848e-07 1.5348e-06 3.34764e-06 5.89403e-06
9.12389e-06 1.30085e-05 1.75302e-05 2.26751e-05 2.84305e-05
3.47844e-05 4.17251e-05 4.92415e-05 5.7323e-05 6.59592e-05
7.51402e-05 8.48564e-05 9.50984e-05 0.000105857 0.000117124
0.00012889 0.000141147 0.000153887 0.000167101 0.000180783
0.000194924 0.000209517 0.000224556 0.000240032 0.00025594
0.000272271 0.000289021 0.000306182 0.000323749 0.000341714
0.000360073 0.000378819 0.000397947 1.225e-17 1.22503e-17
1.22536e-17 1.22951e-17 1.28095e-17 1.91955e-17 9.8461e-17
1.08225e-15 1.32882e-14 1.64553e-13 2.03151e-12 2.47524e-11
2.88869e-10 2.99612e-09 2.52129e-08 1.65126e-07 7.21057e-07
2.00298e-06 4.06868e-06 6.86564e-06 1.03519e-05 1.45034e-05
1.93031e-05 2.47369e-05 3.07916e-05 3.74544e-05 4.47135e-05
5.25572e-05 6.09746e-05 6.99548e-05 7.94876e-05 8.95628e-05
0.000100171 0.000111302 0.000122947 0.000135098 0.000147744
0.000160878 0.000174491 0.000188575 0.000203123 0.000218125
0.000233576 0.000249466 0.00026579 0.00028254 0.000299708
0.000317289 0.000335275 0.00035366 0.000372437 1.3e-17
1.3e-17 1.3e-17 1.30003e-17 1.3004e-17 1.30549e-17
1.3749e-17 2.32106e-17 1.52186e-16 1.91006e-15 2.58571e-14
3.51471e-13 4.74882e-12 6.27073e-11 7.68529e-10 7.84559e-09
6.18576e-08 3.50745e-07 1.23707e-06 2.91689e-06 5.36868e-06
8.54073e-06 1.24014e-05 1.69308e-05 2.2113e-05 2.79339e-05
3.438e-05 4.14388e-05 4.90981e-05 5.73462e-05 6.61718e-05
7.55641e-05 8.55126e-05 9.6007e-05 0.000107037 0.000118594
0.000130667 0.000143248 0.000156327 0.000169896 0.000183946
0.000198468 0.000213455 0.000228898 0.00024479 0.000261123
0.000277889 0.00029508 0.000312691 0.000330714 0.000349141
DataSetFinish
DataSetStart
DataSetName, idvgsat
MeasurementType, DC
BatchName, opt_ex09
WaferName, wafer1
DieName, x0y0
DeviceName, n10_2
Temperature, 27
FabDate, 11 May 2010
UserDate, 11 May 2010
WaferDiameter, 0.2
DieLayout, FOUR_CROSSING
DieSize, 0.02, 0.02
DieType, PARTIAL
Attribute, W, 1e-05
Attribute, L, 2e-06
NodeNames, d g s b
Sweep, 1, V, G, LIN, 0, 5, 0.1, CALCULATED, 0.1, 0
Sweep, 2, V, B, LIN, 0, -3, CALCULATED, 5, 0.1, 0
Constant, V, D, 5, 0.1, 0
Constant, V, S, 0, 0.1, 0
Target, I, D
Function, gm, derivative (VG, ID)
Plot, idvg, XY (LIN LIN), vg, id
Plot, gm, XY (LIN LIN), vg, gm
DataArray, ID
3.16015e-14 2.12705e-13 1.43117e-12 9.615e-12 6.43423e-11
4.26327e-10 2.75896e-09 1.69983e-08 9.71219e-08 5.09978e-07
2.23847e-06 7.03219e-06 1.59115e-05 2.86556e-05 4.47349e-05
6.37992e-05 8.56597e-05 0.000110198 0.000137319 0.000166931
0.000198946 0.000233276 0.000269839 0.000308555 0.000349348
0.000392146 0.000436881 0.000483487 0.000531904 0.00058207
0.00063393 0.000687429 0.000742516 0.000799141 0.000857255
0.000916814 0.000977773 0.00104009 0.00110372 0.00116864
0.00123479 0.00130214 0.00137067 0.00144033 0.0015111
0.00158294 0.00165582 0.00172972 0.00180461 0.00188045
0.00195723 2.00491e-17 9.55485e-17 7.84017e-16 7.06166e-15
6.42919e-14 5.85729e-13 5.32836e-12 4.82393e-11 4.30606e-10
3.69767e-09 2.90377e-08 1.97995e-07 1.11769e-06 4.44531e-06
1.17822e-05 2.32936e-05 3.84995e-05 5.70211e-05 7.86361e-05
0.000103193 0.000130567 0.000160641 0.000193305 0.000228455
0.000265993 0.000305825 0.000347863 0.000392024 0.000438229
0.000486403 0.000536473 0.000588371 0.000642033 0.000697394
0.000754396 0.00081298 0.000873092 0.00093468 0.000997691
0.00106208 0.0011278 0.0011948 0.00126304 0.00133248
0.00140308 0.00147481 0.00154762 0.00162149 0.00169637
0.00177223 0.00184905 1.15115e-17 1.16251e-17 1.28609e-17
2.63045e-17 1.72553e-16 1.76347e-15 1.90676e-14 2.07204e-13
2.24988e-12 2.43292e-11 2.59572e-10 2.6584e-09 2.4503e-08
1.87872e-07 1.1331e-06 4.61346e-06 1.22363e-05 2.40992e-05
3.9726e-05 5.87618e-05 8.09897e-05 0.000106251 0.000134411
0.000165342 0.000198929 0.00023506 0.000273632 0.000314547
0.000357712 0.00040304 0.000450447 0.000499853 0.000551184
0.000604366 0.000659332 0.000716014 0.000774349 0.000834277
0.00089574 0.000958682 0.00102305 0.00108879 0.00115586
0.00122421 0.00129379 0.00136455 0.00143647 0.0015095
0.0015836 0.00165873 0.00173486 1.225e-17 1.22504e-17
1.2255e-17 1.23113e-17 1.30026e-17 2.14925e-17 1.25755e-16
1.40611e-15 1.7127e-14 2.10065e-13 2.57401e-12 3.13717e-11
3.75385e-10 4.23811e-09 4.12957e-08 3.18099e-07 1.80127e-06
6.4971e-06 1.55766e-05 2.88104e-05 4.57379e-05 6.60614e-05
8.95858e-05 0.000116157 0.000145636 0.000177897 0.000212821
0.000250295 0.000290216 0.000332483 0.000377004 0.000423689
0.000472453 0.000523215 0.0005759 0.000630432 0.000686741
0.000744761 0.000804426 0.000865675 0.000928448 0.000992689
0.00105834 0.00112536 0.00119369 0.00126328 0.00133409
0.00140607 0.00147918 0.00155339 0.00162864 1.3e-17
1.3e-17 1.3e-17 1.30004e-17 1.30055e-17 1.30746e-17
1.40024e-17 2.64769e-17 1.94195e-16 2.44902e-15 3.27569e-14
4.3983e-13 5.89233e-12 7.82029e-11 1.00451e-09 1.16683e-08
1.08901e-07 7.61744e-07 3.56889e-06 1.04409e-05 2.17262e-05
3.69641e-05 5.57757e-05 7.79248e-05 0.000103238 0.000131567
0.000162777 0.000196742 0.000233345 0.000272476 0.00031403
0.000357909 0.00040402 0.000452274 0.000502586 0.000554877
0.000609068 0.000665087 0.000722862 0.000782326 0.000843414
0.000906065 0.000970219 0.00103582 0.00110281 0.00117114
0.00124077 0.00131163 0.00138369 0.0014569 0.00153122
DataSetFinish
DataSetStart
DataSetName, idvgsat
MeasurementType, DC
BatchName, opt_ex09
WaferName, wafer1
DieName, x0y0
DeviceName, n10_5
Temperature, 27
FabDate, 11 May 2010
UserDate, 11 May 2010
WaferDiameter, 0.2
DieLayout, FOUR_CROSSING
DieSize, 0.02, 0.02
DieType, PARTIAL
Attribute, W, 1e-05
Attribute, L, 5e-06
NodeNames, d g s b
Sweep, 1, V, G, LIN, 0, 5, 0.1, CALCULATED, 0.1, 0
Sweep, 2, V, B, LIN, 0, -3, CALCULATED, 5, 0.1, 0
Constant, V, D, 5, 0.1, 0
Constant, V, S, 0, 0.1, 0
Target, I, D
Function, gm, derivative (VG, ID)
Plot, idvg, XY (LIN LIN), vg, id
Plot, gm, XY (LIN LIN), vg, gm
DataArray, ID
2.82008e-14 1.90078e-13 1.28016e-12 8.59897e-12 5.73691e-11
3.76442e-10 2.38096e-09 1.41306e-08 7.82986e-08 3.92246e-07
1.49322e-06 3.96137e-06 7.92675e-06 1.3243e-05 1.97741e-05
2.74491e-05 3.62334e-05 4.61046e-05 5.70428e-05 6.90283e-05
8.20408e-05 9.60602e-05 0.000111067 0.000127041 0.000143964
0.000161819 0.000180587 0.000200252 0.000220798 0.000242209
0.000264469 0.000287564 0.000311479 0.000336201 0.000361715
0.00038801 0.000415071 0.000442887 0.000471445 0.000500734
0.000530742 0.000561459 0.000592874 0.000624976 0.000657755
0.000691201 0.000725305 0.000760058 0.000795451 0.000831474
0.000868119 1.9968e-17 9.51858e-17 7.84146e-16 7.09395e-15
6.48613e-14 5.93161e-13 5.40895e-12 4.88875e-11 4.30821e-10
3.5619e-09 2.61648e-08 1.66613e-07 8.23303e-07 2.68806e-06
6.10976e-06 1.10141e-05 1.72653e-05 2.47827e-05 3.35215e-05
4.34496e-05 5.45385e-05 6.67613e-05 8.00916e-05 9.45042e-05
0.000109974 0.000126479 0.000143995 0.000162501 0.000181975
0.000202398 0.000223748 0.000246008 0.000269157 0.000293179
0.000318055 0.000343767 0.0003703 0.000397638 0.000425763
0.000454661 0.000484317 0.000514716 0.000545844 0.000577687
0.000610232 0.000643466 0.000677376 0.000711949 0.000747174
0.000783038 0.000819529 1.15115e-17 1.16263e-17 1.28847e-17
2.6678e-17 1.77863e-16 1.83485e-15 1.9991e-14 2.18778e-13
2.38959e-12 2.58951e-11 2.73693e-10 2.69517e-09 2.28654e-08
1.59702e-07 8.28739e-07 2.75108e-06 6.27041e-06 1.13069e-05
1.77331e-05 2.5473e-05 3.44807e-05 4.47209e-05 5.61618e-05
6.87735e-05 8.25274e-05 9.73959e-05 0.000113353 0.000130373
0.000148431 0.000167504 0.000187569 0.000208605 0.000230588
0.000253499 0.000277317 0.000302023 0.000327596 0.000354019
0.000381273 0.00040934 0.000438203 0.000467845 0.000498251
0.000529403 0.000561287 0.000593887 0.000627189 0.000661178
0.000695841 0.000731163 0.00076713 1.225e-17 1.22504e-17
1.22549e-17 1.23114e-17 1.30124e-17 2.17136e-17 1.29713e-16
1.4701e-15 1.81015e-14 2.24276e-13 2.77204e-12 3.3911e-11
4.00838e-10 4.2909e-09 3.77082e-08 2.59481e-07 1.22543e-06
3.6356e-06 7.67062e-06 1.32084e-05 2.01391e-05 2.8399e-05
3.7945e-05 4.87414e-05 6.07553e-05 7.39556e-05 8.83127e-05
0.000103798 0.000120386 0.000138048 0.00015676 0.000176498
0.000197238 0.000218956 0.000241631 0.000265241 0.000289764
0.000315179 0.000341468 0.00036861 0.000396585 0.000425377
0.000454966 0.000485335 0.000516467 0.000548346 0.000580954
0.000614277 0.000648299 0.000683004 0.000718378 1.3e-17
1.3e-17 1.3e-17 1.30004e-17 1.30054e-17 1.30733e-17
1.39985e-17 2.66108e-17 1.98525e-16 2.54157e-15 3.4463e-14
4.68731e-13 6.34557e-12 8.43837e-11 1.057e-09 1.12917e-08
9.34791e-08 5.67562e-07 2.16971e-06 5.39547e-06 1.02184e-05
1.65068e-05 2.41769e-05 3.31766e-05 4.34663e-05 5.50106e-05
6.77765e-05 8.17329e-05 9.685e-05 0.000113099 0.000130454
0.000148886 0.000168371 0.000188885 0.000210402 0.000232899
0.000256354 0.000280744 0.000306047 0.000332243 0.000359312
0.000387232 0.000415985 0.000445552 0.000475914 0.000507053
0.000538953 0.000571595 0.000604963 0.000639041 0.000673813
DataSetFinish
DataSetStart
DataSetName, idvgsat
MeasurementType, DC
BatchName, opt_ex09
WaferName, wafer1
DieName, x0y0
DeviceName, n2_0p5
Temperature, 27
FabDate, 11 May 2010
UserDate, 11 May 2010
WaferDiameter, 0.2
DieLayout, FOUR_CROSSING
DieSize, 0.02, 0.02
DieType, PARTIAL
Attribute, W, 2e-06
Attribute, L, 5e-07
NodeNames, d g s b
Sweep, 1, V, G, LIN, 0, 5, 0.1, CALCULATED, 0.1, 0
Sweep, 2, V, B, LIN, 0, -3, CALCULATED, 5, 0.1, 0
Constant, V, D, 5, 0.1, 0
Constant, V, S, 0, 0.1, 0
Target, I, D
Function, gm, derivative (VG, ID)
Plot, idvg, XY (LIN LIN), vg, id
Plot, gm, XY (LIN LIN), vg, gm
DataArray, ID
1.52524e-14 8.9794e-14 5.28791e-13 3.11304e-12 1.83098e-11
1.07448e-10 6.27141e-10 3.61464e-09 2.02652e-08 1.07715e-07
5.2762e-07 2.29261e-06 7.91229e-06 1.98713e-05 3.78908e-05
5.99769e-05 8.45165e-05 0.00011066 0.000137988 0.000166264
0.000195317 0.000225013 0.000255242 0.000285911 0.000316946
0.000348285 0.000379879 0.000411688 0.000443679 0.000475826
0.000508108 0.000540509 0.000573015 0.000605613 0.000638295
0.000671054 0.000703883 0.000736778 0.000769733 0.000802745
0.000835811 0.000868929 0.000902096 0.00093531 0.000968569
0.00100187 0.00103522 0.0010686 0.00110202 0.00113548
0.00116898 2.85435e-17 1.43234e-16 9.97167e-16 7.35498e-15
5.46875e-14 4.06994e-13 3.02781e-12 2.24943e-11 1.66485e-10
1.21985e-09 8.71069e-09 5.86148e-08 3.53517e-07 1.80964e-06
6.9861e-06 1.85258e-05 3.60756e-05 5.76543e-05 8.17759e-05
0.000107656 0.00013487 0.000163143 0.000192271 0.000222096
0.000252488 0.000283345 0.000314585 0.000346142 0.000377965
0.00041001 0.000442245 0.000474643 0.00050718 0.000539839
0.000572607 0.000605469 0.000638418 0.000671444 0.000704541
0.000737703 0.000770926 0.000804205 0.000837537 0.000870919
0.000904348 0.000937821 0.000971337 0.00100489 0.00103849
0.00107212 0.00110578 1.1587e-17 1.22366e-17 1.7734e-17
6.42612e-17 4.58037e-16 3.79062e-15 3.19928e-14 2.70609e-13
2.28835e-12 1.93219e-11 1.62427e-10 1.34838e-09 1.08203e-08
8.01024e-08 5.11903e-07 2.61836e-06 9.35641e-06 2.2575e-05
4.10876e-05 6.30372e-05 8.72674e-05 0.000113162 0.000140352
0.000168577 0.000197638 0.000227377 0.00025767 0.000288417
0.000319541 0.000350977 0.000382676 0.000414596 0.000446705
0.000478977 0.000511388 0.000543923 0.000576565 0.000609304
0.00064213 0.000675033 0.000708008 0.000741048 0.000774148
0.000807305 0.000840514 0.000873772 0.000907076 0.000940424
0.000973813 0.00100724 0.0010407 1.22509e-17 1.22587e-17
1.233e-17 1.29864e-17 1.90307e-17 7.46881e-17 5.87187e-16
5.30619e-15 4.87538e-14 4.48659e-13 4.12632e-12 3.78588e-11
3.44844e-10 3.07541e-09 2.59094e-08 1.92489e-07 1.16695e-06
5.16632e-06 1.50266e-05 3.08231e-05 5.07664e-05 7.3431e-05
9.80327e-05 0.00012412 0.000151386 0.000179602 0.00020859
0.000238206 0.000268339 0.000298898 0.000329812 0.000361023
0.000392484 0.000424158 0.000456014 0.000488027 0.000520178
0.000552448 0.000584825 0.000617296 0.000649853 0.000682486
0.00071519 0.000747959 0.000780786 0.00081367 0.000846604
0.000879587 0.000912616 0.000945687 0.000978797 1.3e-17
1.30002e-17 1.30017e-17 1.30162e-17 1.31589e-17 1.45554e-17
2.82236e-17 1.61999e-16 1.47129e-15 1.42849e-14 1.39665e-13
1.36584e-12 1.33369e-11 1.29593e-10 1.24055e-09 1.13741e-08
9.37181e-08 6.35991e-07 3.2329e-06 1.08257e-05 2.44712e-05
4.27072e-05 6.39831e-05 8.73972e-05 0.000112438 0.000138767
0.000166135 0.000194346 0.000223246 0.000252713 0.000282648
0.000312973 0.000343625 0.000374552 0.000405712 0.000437073
0.000468606 0.000500288 0.000532101 0.000564029 0.000596059
0.00062818 0.000660384 0.000692663 0.00072501 0.000757419
0.000789887 0.000822409 0.00085498 0.000887599 0.000920261
DataSetFinish
DataSetStart
DataSetName, idvgsat
MeasurementType, DC
BatchName, opt_ex09
WaferName, wafer1
DieName, x0y0
DeviceName, n2_10
Temperature, 27
FabDate, 11 May 2010
UserDate, 11 May 2010
WaferDiameter, 0.2
DieLayout, FOUR_CROSSING
DieSize, 0.02, 0.02
DieType, PARTIAL
Attribute, W, 2e-06
Attribute, L, 1e-05
NodeNames, d g s b
Sweep, 1, V, G, LIN, 0, 5, 0.1, CALCULATED, 0.1, 0
Sweep, 2, V, B, LIN, 0, -3, CALCULATED, 5, 0.1, 0
Constant, V, D, 5, 0.1, 0
Constant, V, S, 0, 0.1, 0
Target, I, D
Function, gm, derivative (VG, ID)
Plot, idvg, XY (LIN LIN), vg, id
Plot, gm, XY (LIN LIN), vg, gm
DataArray, ID
1.0589e-15 7.08346e-15 4.76781e-14 3.20669e-13 2.14718e-12
1.42143e-11 9.16257e-11 5.60527e-10 3.20134e-09 1.71157e-08
7.60951e-08 2.38681e-07 5.38707e-07 9.71861e-07 1.5249e-06
2.18959e-06 2.96216e-06 3.84064e-06 4.82361e-06 5.90963e-06
7.09727e-06 8.38502e-06 9.7714e-06 1.1255e-05 1.28343e-05
1.4508e-05 1.62748e-05 1.81335e-05 2.00827e-05 2.21213e-05
2.42481e-05 2.6462e-05 2.8762e-05 3.1147e-05 3.36159e-05
3.61678e-05 3.88017e-05 4.15168e-05 4.4312e-05 4.71866e-05
5.01396e-05 5.31704e-05 5.6278e-05 5.94618e-05 6.27209e-05
6.60547e-05 6.94625e-05 7.29436e-05 7.64973e-05 8.0123e-05
8.38202e-05 1.10233e-17 1.32538e-17 3.36847e-17 2.20815e-16
1.93441e-15 1.76161e-14 1.6085e-13 1.4616e-12 1.30774e-11
1.12194e-10 8.77383e-10 6.01779e-09 3.48155e-08 1.41757e-07
3.82464e-07 7.67841e-07 1.28712e-06 1.93136e-06 2.69579e-06
3.57757e-06 4.57445e-06 5.68432e-06 6.90513e-06 8.23489e-06
9.67169e-06 1.12137e-05 1.2859e-05 1.4606e-05 1.6453e-05
1.83984e-05 2.04405e-05 2.25779e-05 2.48091e-05 2.71327e-05
2.95471e-05 3.20512e-05 3.46435e-05 3.73227e-05 4.00876e-05
4.2937e-05 4.58696e-05 4.88842e-05 5.19798e-05 5.51553e-05
5.84095e-05 6.17414e-05 6.51499e-05 6.86341e-05 7.2193e-05
7.58256e-05 7.9531e-05 1.15003e-17 1.15031e-17 1.15339e-17
1.18714e-17 1.55709e-17 5.612e-17 5.00511e-16 5.36869e-15
5.8624e-14 6.38549e-13 6.86117e-12 7.0703e-11 6.55296e-10
5.09821e-09 3.20101e-08 1.37303e-07 3.80064e-07 7.72359e-07
1.30398e-06 1.96644e-06 2.755e-06 3.66655e-06 4.69849e-06
5.84842e-06 7.11402e-06 8.4931e-06 9.98352e-06 1.15833e-05
1.32903e-05 1.51028e-05 1.70189e-05 1.90367e-05 2.11547e-05
2.33709e-05 2.56839e-05 2.8092e-05 3.05936e-05 3.31873e-05
3.58714e-05 3.86446e-05 4.15054e-05 4.44525e-05 4.74844e-05
5.06e-05 5.37978e-05 5.70767e-05 6.04354e-05 6.38726e-05
6.73873e-05 7.09783e-05 7.46444e-05 1.225e-17 1.225e-17
1.22501e-17 1.22513e-17 1.22656e-17 1.24437e-17 1.46538e-17
4.20873e-17 3.82556e-16 4.60616e-15 5.69198e-14 7.0138e-13
8.49486e-12 9.73416e-11 9.6863e-10 7.73681e-09 4.7006e-08
1.84109e-07 4.69785e-07 9.06793e-07 1.4845e-06 2.1957e-06
3.03616e-06 4.00278e-06 5.09283e-06 6.30378e-06 7.6332e-06
9.07877e-06 1.06383e-05 1.23096e-05 1.40906e-05 1.59794e-05
1.79739e-05 2.00723e-05 2.22728e-05 2.45735e-05 2.69728e-05
2.94688e-05 3.206e-05 3.47447e-05 3.75213e-05 4.03882e-05
4.33441e-05 4.63873e-05 4.95165e-05 5.27302e-05 5.6027e-05
5.94057e-05 6.28648e-05 6.64031e-05 7.00193e-05 1.3e-17
1.3e-17 1.3e-17 1.3e-17 1.30001e-17 1.30013e-17
1.30172e-17 1.32345e-17 1.61962e-17 5.65691e-17 6.06807e-16
8.10116e-15 1.09936e-13 1.48185e-12 1.94125e-11 2.32405e-10
2.27067e-09 1.70543e-08 8.94495e-08 2.90423e-07 6.48588e-07
1.15662e-06 1.805e-06 2.58811e-06 3.50224e-06 4.54438e-06
5.71177e-06 7.00184e-06 8.41211e-06 9.94022e-06 1.15839e-05
1.3341e-05 1.52093e-05 1.71868e-05 1.92715e-05 2.14614e-05
2.37547e-05 2.61495e-05 2.86439e-05 3.12363e-05 3.39248e-05
3.67078e-05 3.95837e-05 4.25508e-05 4.56076e-05 4.87525e-05
5.1984e-05 5.53006e-05 5.8701e-05 6.21836e-05 6.57472e-05
DataSetFinish
DataSetStart
DataSetName, idvgsat
MeasurementType, DC
BatchName, opt_ex09
WaferName, wafer1
DieName, x0y0
DeviceName, n5_10
Temperature, 27
FabDate, 11 May 2010
UserDate, 11 May 2010
WaferDiameter, 0.2
DieLayout, FOUR_CROSSING
DieSize, 0.02, 0.02
DieType, PARTIAL
Attribute, W, 5e-06
Attribute, L, 1e-05
NodeNames, d g s b
Sweep, 1, V, G, LIN, 0, 5, 0.1, CALCULATED, 0.1, 0
Sweep, 2, V, B, LIN, 0, -3, CALCULATED, 5, 0.1, 0
Constant, V, D, 5, 0.1, 0
Constant, V, S, 0, 0.1, 0
Target, I, D
Function, gm, derivative (VG, ID)
Plot, idvg, XY (LIN LIN), vg, id
Plot, gm, XY (LIN LIN), vg, gm
DataArray, ID
4.93772e-15 3.3236e-14 2.23832e-13 1.50412e-12 1.00461e-11
6.60958e-11 4.20419e-10 2.51758e-09 1.41046e-08 7.27231e-08
2.92785e-07 8.20417e-07 1.70678e-06 2.92573e-06 4.44587e-06
6.25031e-06 8.33131e-06 1.06845e-05 1.33061e-05 1.61926e-05
1.93401e-05 2.27447e-05 2.64026e-05 3.031e-05 3.44635e-05
3.88594e-05 4.34944e-05 4.83653e-05 5.34688e-05 5.8802e-05
6.43618e-05 7.01455e-05 7.61502e-05 8.23732e-05 8.88121e-05
9.54642e-05 0.000102327 0.000109398 0.000116676 0.000124157
0.00013184 0.000139723 0.000147804 0.00015608 0.00016455
0.000173213 0.000182065 0.000191106 0.000200334 0.000209747
0.000219344 1.22388e-17 2.4387e-17 1.35661e-16 1.15479e-15
1.04859e-14 9.58411e-14 8.74438e-13 7.91785e-12 7.01325e-11
5.86881e-10 4.39649e-09 2.87719e-08 1.51072e-07 5.31419e-07
1.2769e-06 2.38574e-06 3.82875e-06 5.58714e-06 7.65093e-06
1.00136e-05 1.26694e-05 1.5613e-05 1.88393e-05 2.23432e-05
2.61197e-05 3.01642e-05 3.4472e-05 3.90389e-05 4.38606e-05
4.89329e-05 5.42518e-05 5.98135e-05 6.56142e-05 7.16502e-05
7.79179e-05 8.44139e-05 9.11347e-05 9.80771e-05 0.000105238
0.000112614 0.000120202 0.000127999 0.000136003 0.00014421
0.000152618 0.000161224 0.000170025 0.00017902 0.000188204
0.000197577 0.000207135 1.15017e-17 1.15189e-17 1.17075e-17
1.37741e-17 3.64264e-17 2.84705e-16 3.0054e-15 3.28e-14
3.58381e-13 3.89121e-12 4.13768e-11 4.14085e-10 3.61805e-09
2.62565e-08 1.46731e-07 5.31991e-07 1.29251e-06 2.42648e-06
3.90644e-06 5.71483e-06 7.84155e-06 1.02793e-05 1.30217e-05
1.60626e-05 1.93963e-05 2.30172e-05 2.692e-05 3.10994e-05
3.55506e-05 4.02686e-05 4.5249e-05 5.0487e-05 5.59783e-05
6.17187e-05 6.7704e-05 7.393e-05 8.03928e-05 8.70886e-05
9.40136e-05 0.000101164 0.000108537 0.000116127 0.000123933
0.000131951 0.000140177 0.000148608 0.000157241 0.000166073
0.000175102 0.000184323 0.000193735 1.225e-17 1.22501e-17
1.22507e-17 1.22585e-17 1.2356e-17 1.35663e-17 2.85889e-17
2.15047e-16 2.52887e-15 3.12212e-14 3.86119e-13 4.73743e-12
5.65351e-11 6.20857e-10 5.69457e-09 4.14394e-08 2.15634e-07
7.03681e-07 1.58186e-06 2.83335e-06 4.43334e-06 6.36717e-06
8.62558e-06 1.12012e-05 1.40873e-05 1.72775e-05 2.07658e-05
2.45464e-05 2.86137e-05 3.29624e-05 3.75873e-05 4.24834e-05
4.76457e-05 5.30695e-05 5.87503e-05 6.46835e-05 7.08647e-05
7.72895e-05 8.3954e-05 9.08538e-05 9.79852e-05 0.000105344
0.000112927 0.000120729 0.000128749 0.000136981 0.000145422
0.00015407 0.00016292 0.000171969 0.000181215 1.3e-17
1.3e-17 1.3e-17 1.30001e-17 1.30007e-17 1.30095e-17
1.31289e-17 1.47573e-17 3.69545e-17 3.39517e-16 4.46241e-15
6.05815e-14 8.2137e-13 1.09855e-11 1.4016e-10 1.56388e-09
1.37205e-08 9.07589e-08 3.90161e-07 1.06215e-06 2.12769e-06
3.56029e-06 5.34032e-06 7.45618e-06 9.89945e-06 1.26628e-05
1.57396e-05 1.91233e-05 2.28078e-05 2.67873e-05 3.10561e-05
3.56087e-05 4.04399e-05 4.55445e-05 5.09175e-05 5.65541e-05
6.24494e-05 6.8599e-05 7.49981e-05 8.16425e-05 8.85278e-05
9.56498e-05 0.000103004 0.000110587 0.000118395 0.000126424
0.000134669 0.000143128 0.000151797 0.000160672 0.000169749
DataSetFinish
DataSetStart
DataSetName, idvdhigh
MeasurementType, DC
BatchName, opt_ex09
WaferName, wafer1
DieName, x0y0
DeviceName, n10_0p5
Temperature, 150
FabDate, 11 May 2010
UserDate, 11 May 2010
WaferDiameter, 0.2
DieLayout, FOUR_CROSSING
DieSize, 0.02, 0.02
DieType, PARTIAL
Attribute, W, 1e-05
Attribute, L, 5e-07
NodeNames, d g s b
Sweep, 1, V, D, LIN, 0, 5, 0.1, CALCULATED, 0.1, 0
Sweep, 2, V, G, LIN, 2, 5, CALCULATED, 5, 0.1, 0
Constant, V, S, 0, 0.1, 0
Constant, V, B, -3, 0.1, 0
Target, I, D
Function, gds, derivative (Vd, ID)
Plot, idvd, XY (LIN LIN), vd, id
Plot, gds, XY (LIN LOG), vd, gds
DataArray, ID
0 4.455e-05 7.3602e-05 8.94788e-05 9.75126e-05
0.000103336 0.000108563 0.000113497 0.000118245 0.000122865
0.000127394 0.000131861 0.000136285 0.00014068 0.000145059
0.00014943 0.000153801 0.000158177 0.000162562 0.000166962
0.000171378 0.000175813 0.00018027 0.00018475 0.000189255
0.000193787 0.000198345 0.000202932 0.000207548 0.000212195
0.000216875 0.00022159 0.000226342 0.000231138 0.000235983
0.000240886 0.000245859 0.000250918 0.000256084 0.000261383
0.000266848 0.000272521 0.000278452 0.000284701 0.00029134
0.000298456 0.000306147 0.000314528 0.000323732 0.000333907
0.000345223 0 0.000133969 0.000247513 0.000342348
0.000420018 0.000481951 0.000529594 0.0005649 0.000591264
0.000612559 0.000630962 0.000647412 0.000662413 0.00067629
0.000689273 0.000701534 0.000713201 0.000724376 0.000735139
0.000745554 0.000755672 0.000765537 0.000775183 0.000784639
0.000793931 0.000803079 0.000812101 0.000821013 0.000829827
0.000838556 0.000847209 0.000855798 0.00086433 0.000872816
0.000881266 0.000889695 0.000898118 0.000906557 0.00091504
0.000923604 0.000932296 0.000941178 0.000950327 0.00095984
0.000969835 0.000980457 0.000991877 0.0010043 0.00101797
0.00103315 0.00105017 0 0.000203821 0.000385528
0.000546777 0.000689065 0.000813748 0.000922063 0.00101515
0.00109407 0.00115992 0.00121401 0.00125831 0.00129532
0.00132716 0.00135517 0.00138024 0.00140301 0.00142391
0.00144331 0.00146145 0.00147855 0.00149476 0.00151023
0.00152505 0.00153932 0.0015531 0.00156646 0.00157945
0.00159212 0.00160449 0.0016166 0.00162848 0.00164016
0.00165165 0.00166297 0.00167415 0.00168521 0.00169615
0.00170702 0.00171784 0.00172866 0.00173952 0.00175049
0.00176167 0.00177315 0.0017851 0.00179767 0.00181109
0.00182561 0.00184155 0.00185927 0 0.000259934
0.000497197 0.000713323 0.000909712 0.00108764 0.00124829
0.00139273 0.00152196 0.00163689 0.00173837 0.00182723
0.00190429 0.00197047 0.00202701 0.00207549 0.00211756
0.00215459 0.00218762 0.00221745 0.00224468 0.00226977
0.00229309 0.00231491 0.00233546 0.00235494 0.00237348
0.00239121 0.00240823 0.00242463 0.00244049 0.00245586
0.00247079 0.00248534 0.00249955 0.00251344 0.00252705
0.00254041 0.00255356 0.00256651 0.0025793 0.00259197
0.00260458 0.00261719 0.00262988 0.00264276 0.00265597
0.00266969 0.00268415 0.00269961 0.00271641 0
0.000305857 0.000589071 0.000851042 0.00109306 0.0013163
0.00152187 0.00171077 0.00188394 0.00204224 0.00218648
0.00231742 0.00243574 0.0025421 0.00263711 0.00272133
0.00279531 0.00285974 0.00291575 0.00296474 0.00300805
0.00304676 0.00308173 0.00311364 0.00314301 0.00317025
0.00319568 0.00321958 0.00324215 0.00326357 0.003284
0.00330355 0.00332233 0.00334042 0.00335791 0.00337485
0.00339131 0.00340733 0.00342296 0.00343823 0.00345318
0.00346786 0.0034823 0.00349656 0.00351068 0.00352476
0.00353887 0.00355315 0.00356777 0.00358293 0.00359889
DataSetFinish
DataSetStart
DataSetName, idvdhigh
MeasurementType, DC
BatchName, opt_ex09
WaferName, wafer1
DieName, x0y0
DeviceName, n10_0p8
Temperature, 150
FabDate, 11 May 2010
UserDate, 11 May 2010
WaferDiameter, 0.2
DieLayout, FOUR_CROSSING
DieSize, 0.02, 0.02
DieType, PARTIAL
Attribute, W, 1e-05
Attribute, L, 8e-07
NodeNames, d g s b
Sweep, 1, V, D, LIN, 0, 5, 0.1, CALCULATED, 0.1, 0
Sweep, 2, V, G, LIN, 2, 5, CALCULATED, 5, 0.1, 0
Constant, V, S, 0, 0.1, 0
Constant, V, B, -3, 0.1, 0
Target, I, D
Function, gds, derivative (Vd, ID)
Plot, idvd, XY (LIN LIN), vd, id
Plot, gds, XY (LIN LOG), vd, gds
DataArray, ID
0 2.5353e-05 4.29834e-05 5.34435e-05 5.81349e-05
6.01662e-05 6.15447e-05 6.27073e-05 6.37506e-05 6.47127e-05
6.56146e-05 6.64701e-05 6.72891e-05 6.80787e-05 6.88444e-05
6.95904e-05 7.032e-05 7.10361e-05 7.17407e-05 7.24356e-05
7.31224e-05 7.38022e-05 7.44761e-05 7.51451e-05 7.58098e-05
7.64709e-05 7.71291e-05 7.77848e-05 7.84385e-05 7.90907e-05
7.9742e-05 8.0393e-05 8.10444e-05 8.16971e-05 8.23525e-05
8.30121e-05 8.3678e-05 8.43529e-05 8.50401e-05 8.57438e-05
8.64691e-05 8.72223e-05 8.80109e-05 8.88438e-05 8.97312e-05
9.06853e-05 9.17197e-05 9.28502e-05 9.40944e-05 9.54719e-05
9.70046e-05 0 7.14541e-05 0.000133765 0.000187347
0.000232593 0.00026988 0.00029958 0.000322109 0.000338087
0.000348799 0.000356297 0.000362175 0.000367133 0.000371467
0.000375337 0.000378846 0.000382066 0.000385051 0.000387841
0.000390468 0.000392956 0.000395328 0.000397598 0.00039978
0.000401886 0.000403925 0.000405905 0.000407833 0.000409714
0.000411555 0.000413358 0.000415128 0.000416868 0.000418582
0.000420272 0.000421943 0.000423598 0.000425241 0.000426878
0.000428516 0.000430163 0.00043183 0.000433531 0.000435284
0.00043711 0.000439035 0.000441089 0.000443311 0.000445743
0.000448436 0.000451447 0 0.000110144 0.000210671
0.00030198 0.000384449 0.000458433 0.000524274 0.000582294
0.000632802 0.000676099 0.000712488 0.000742304 0.000766011
0.000784413 0.000798806 0.000810517 0.00082042 0.000829013
0.000836605 0.000843407 0.00084957 0.000855209 0.000860413
0.000865249 0.000869774 0.000874032 0.000878059 0.000881887
0.000885539 0.000889037 0.000892399 0.00089564 0.000898773
0.00090181 0.000904759 0.000907631 0.000910433 0.000913171
0.000915854 0.000918488 0.000921081 0.000923643 0.000926185
0.000928721 0.000931269 0.000933851 0.000936495 0.000939238
0.000942123 0.000945203 0.000948542 0 0.000142984
0.000276184 0.000399974 0.000514713 0.000620737 0.00071837
0.000807918 0.000889673 0.000963913 0.00103091 0.00109091
0.00114417 0.00119092 0.00123143 0.00126597 0.00129492
0.00131889 0.00133877 0.00135553 0.00136992 0.00138248
0.00139359 0.00140354 0.00141254 0.00142074 0.00142828
0.00143526 0.00144176 0.00144784 0.00145357 0.00145899
0.00146413 0.00146902 0.0014737 0.0014782 0.00148251
0.00148668 0.00149071 0.00149461 0.0014984 0.00150208
0.00150568 0.0015092 0.00151266 0.00151607 0.00151944
0.00152281 0.00152621 0.00152967 0.00153323 0
0.000171115 0.000332447 0.000484344 0.000627139 0.000761149
0.000886678 0.00100401 0.00111343 0.0012152 0.00130956
0.00139677 0.00147705 0.00155063 0.00161771 0.00167851
0.00173323 0.00178206 0.00182521 0.00186291 0.00189547
0.00192335 0.0019472 0.00196775 0.00198563 0.00200137
0.00201538 0.00202796 0.00203936 0.00204977 0.00205934
0.0020682 0.00207644 0.00208414 0.00209138 0.00209822
0.00210469 0.00211084 0.00211672 0.00212233 0.00212772
0.0021329 0.0021379 0.00214273 0.00214741 0.00215196
0.00215638 0.00216071 0.00216495 0.00216913 0.00217329
DataSetFinish
DataSetStart
DataSetName, idvdhigh
MeasurementType, DC
BatchName, opt_ex09
WaferName, wafer1
DieName, x0y0
DeviceName, n10_1
Temperature, 150
FabDate, 11 May 2010
UserDate, 11 May 2010
WaferDiameter, 0.2
DieLayout, FOUR_CROSSING
DieSize, 0.02, 0.02
DieType, PARTIAL
Attribute, W, 1e-05
Attribute, L, 1e-06
NodeNames, d g s b
Sweep, 1, V, D, LIN, 0, 5, 0.1, CALCULATED, 0.1, 0
Sweep, 2, V, G, LIN, 2, 5, CALCULATED, 5, 0.1, 0
Constant, V, S, 0, 0.1, 0
Constant, V, B, -3, 0.1, 0
Target, I, D
Function, gds, derivative (Vd, ID)
Plot, idvd, XY (LIN LIN), vd, id
Plot, gds, XY (LIN LOG), vd, gds
DataArray, ID
0 1.91737e-05 3.26176e-05 4.06611e-05 4.42074e-05
4.55265e-05 4.62983e-05 4.69121e-05 4.74468e-05 4.79297e-05
4.83751e-05 4.87918e-05 4.91859e-05 4.95618e-05 4.99229e-05
5.02717e-05 5.06102e-05 5.094e-05 5.12625e-05 5.15786e-05
5.18893e-05 5.21953e-05 5.24972e-05 5.27955e-05 5.30907e-05
5.33832e-05 5.36732e-05 5.39611e-05 5.42472e-05 5.45318e-05
5.48151e-05 5.50975e-05 5.53794e-05 5.56613e-05 5.59438e-05
5.62278e-05 5.65142e-05 5.68046e-05 5.71005e-05 5.7404e-05
5.77176e-05 5.80446e-05 5.83884e-05 5.87535e-05 5.91449e-05
5.95683e-05 6.00304e-05 6.05387e-05 6.11015e-05 6.17282e-05
6.2429e-05 0 5.40904e-05 0.000101585 0.000142714
0.000177697 0.000206749 0.000230086 0.000247944 0.000260668
0.000268977 0.000274293 0.000278101 0.000281155 0.000283752
0.000286026 0.000288055 0.000289893 0.000291575 0.000293131
0.00029458 0.000295941 0.000297226 0.000298446 0.00029961
0.000300725 0.000301798 0.000302833 0.000303835 0.000304807
0.000305753 0.000306676 0.000307577 0.00030846 0.000309325
0.000310175 0.000311013 0.000311839 0.000312657 0.000313469
0.000314278 0.00031509 0.000315911 0.000316746 0.000317605
0.0003185 0.000319443 0.00032045 0.000321541 0.000322739
0.000324068 0.000325559 0 8.39191e-05 0.000160998
0.000231455 0.000295501 0.000353335 0.000405153 0.000451138
0.000491473 0.000526334 0.000555896 0.00058035 0.000599932
0.000615023 0.000626348 0.00063499 0.00064193 0.000647753
0.000652777 0.000657196 0.000661137 0.000664692 0.00066793
0.000670905 0.000673657 0.00067622 0.000678622 0.000680883
0.000683023 0.000685056 0.000686994 0.00068885 0.000690632
0.000692347 0.000694003 0.000695606 0.000697161 0.000698673
0.000700146 0.000701584 0.000702993 0.000704377 0.000705742
0.000707095 0.000708445 0.000709803 0.000711182 0.000712601
0.00071408 0.000715645 0.00071733 0 0.000109601
0.000212299 0.000308297 0.000397794 0.00048098 0.000558036
0.000629139 0.000694457 0.000754154 0.000808387 0.000857309
0.000901067 0.000939809 0.00097368 0.00100283 0.00102746
0.00104781 0.00106435 0.00107776 0.00108885 0.00109823
0.00110633 0.00111344 0.00111975 0.00112541 0.00113054
0.00113523 0.00113954 0.00114352 0.00114723 0.00115071
0.00115397 0.00115705 0.00115997 0.00116275 0.0011654
0.00116794 0.00117037 0.00117271 0.00117497 0.00117716
0.00117927 0.00118133 0.00118334 0.0011853 0.00118722
0.00118912 0.00119101 0.00119291 0.00119484 0
0.000131872 0.000256872 0.000375191 0.000487012 0.000592514
0.000691868 0.000785239 0.000872786 0.000954662 0.00103102
0.00110199 0.00116773 0.00122836 0.00128401 0.00133482
0.0013809 0.00142237 0.00145936 0.001492 0.00152043
0.00154484 0.00156555 0.00158302 0.00159784 0.00161055
0.0016216 0.00163133 0.00163997 0.00164772 0.00165474
0.00166114 0.00166701 0.00167243 0.00167746 0.00168216
0.00168655 0.00169069 0.0016946 0.00169831 0.00170183
0.00170519 0.00170841 0.00171149 0.00171445 0.00171731
0.00172007 0.00172274 0.00172533 0.00172786 0.00173034
DataSetFinish
DataSetStart
DataSetName, idvdhigh
MeasurementType, DC
BatchName, opt_ex09
WaferName, wafer1
DieName, x0y0
DeviceName, n10_10
Temperature, 150
FabDate, 11 May 2010
UserDate, 11 May 2010
WaferDiameter, 0.2
DieLayout, FOUR_CROSSING
DieSize, 0.02, 0.02
DieType, PARTIAL
Attribute, W, 1e-05
Attribute, L, 1e-05
NodeNames, d g s b
Sweep, 1, V, D, LIN, 0, 5, 0.1, CALCULATED, 0.1, 0
Sweep, 2, V, G, LIN, 2, 5, CALCULATED, 5, 0.1, 0
Constant, V, S, 0, 0.1, 0
Constant, V, B, -3, 0.1, 0
Target, I, D
Function, gds, derivative (Vd, ID)
Plot, idvd, XY (LIN LIN), vd, id
Plot, gds, XY (LIN LOG), vd, gds
DataArray, ID
0 1.95068e-06 3.43901e-06 4.46963e-06 5.05932e-06
5.28808e-06 5.34652e-06 5.36508e-06 5.3751e-06 5.38259e-06
5.38909e-06 5.39512e-06 5.40089e-06 5.4065e-06 5.41202e-06
5.41747e-06 5.42286e-06 5.42822e-06 5.43356e-06 5.43887e-06
5.44417e-06 5.44945e-06 5.45472e-06 5.45998e-06 5.46523e-06
5.47048e-06 5.47572e-06 5.48096e-06 5.48619e-06 5.49142e-06
5.49665e-06 5.50188e-06 5.50711e-06 5.51234e-06 5.51758e-06
5.52283e-06 5.52809e-06 5.53338e-06 5.53871e-06 5.54408e-06
5.54952e-06 5.55504e-06 5.56067e-06 5.56643e-06 5.57236e-06
5.57849e-06 5.58486e-06 5.59153e-06 5.59855e-06 5.60597e-06
5.61387e-06 0 4.88417e-06 9.2971e-06 1.32403e-05
1.67153e-05 1.97237e-05 2.22675e-05 2.43492e-05 2.59727e-05
2.71468e-05 2.78961e-05 2.82905e-05 2.84646e-05 2.85454e-05
2.85933e-05 2.86284e-05 2.86577e-05 2.8684e-05 2.87084e-05
2.87316e-05 2.8754e-05 2.87757e-05 2.8797e-05 2.8818e-05
2.88386e-05 2.88591e-05 2.88793e-05 2.88994e-05 2.89193e-05
2.89392e-05 2.89589e-05 2.89785e-05 2.89981e-05 2.90176e-05
2.90371e-05 2.90565e-05 2.90759e-05 2.90952e-05 2.91145e-05
2.91338e-05 2.91532e-05 2.91725e-05 2.9192e-05 2.92115e-05
2.92312e-05 2.92511e-05 2.92713e-05 2.9292e-05 2.93131e-05
2.93349e-05 2.93576e-05 0 7.51025e-06 1.4567e-05
2.11715e-05 2.7325e-05 3.30289e-05 3.82845e-05 4.30931e-05
4.7456e-05 5.13747e-05 5.48507e-05 5.78856e-05 6.04815e-05
6.26413e-05 6.43698e-05 6.56767e-05 6.65847e-05 6.71467e-05
6.74596e-05 6.76337e-05 6.77434e-05 6.78236e-05 6.7889e-05
6.79461e-05 6.79979e-05 6.80463e-05 6.80921e-05 6.8136e-05
6.81785e-05 6.82198e-05 6.82602e-05 6.82998e-05 6.83388e-05
6.83772e-05 6.84152e-05 6.84528e-05 6.849e-05 6.8527e-05
6.85637e-05 6.86001e-05 6.86364e-05 6.86725e-05 6.87084e-05
6.87442e-05 6.87799e-05 6.88155e-05 6.88511e-05 6.88867e-05
6.89225e-05 6.89584e-05 6.89947e-05 0 9.86354e-06
1.92949e-05 2.82954e-05 3.6866e-05 4.5008e-05 5.27226e-05
6.00108e-05 6.68738e-05 7.33128e-05 7.9329e-05 8.49235e-05
9.00974e-05 9.48522e-05 9.91888e-05 0.000103109 0.000106613
0.000109704 0.000112384 0.000114654 0.000116521 0.000117992
0.000119086 0.00011984 0.000120323 0.000120624 0.000120822
0.000120967 0.000121084 0.000121183 0.000121271 0.000121352
0.000121427 0.000121499 0.000121567 0.000121633 0.000121696
0.000121758 0.000121819 0.000121878 0.000121937 0.000121994
0.000122051 0.000122107 0.000122162 0.000122217 0.000122271
0.000122325 0.000122379 0.000122432 0.000122485 0
1.19773e-05 2.35442e-05 3.47016e-05 4.54506e-05 5.57923e-05
6.57278e-05 7.52579e-05 8.43839e-05 9.31067e-05 0.000101427
0.000109347 0.000116866 0.000123987 0.000130709 0.000137034
0.000142964 0.000148498 0.000153639 0.000158387 0.000162743
0.000166709 0.000170286 0.000173475 0.000176279 0.0001787
0.000180742 0.000182411 0.000183722 0.000184698 0.000185387
0.000185855 0.000186178 0.000186415 0.0001866 0.000186756
0.000186892 0.000187014 0.000187126 0.000187231 0.00018733
0.000187425 0.000187516 0.000187604 0.000187689 0.000187772
0.000187853 0.000187932 0.00018801 0.000188086 0.000188162
DataSetFinish
DataSetStart
DataSetName, idvdhigh
MeasurementType, DC
BatchName, opt_ex09
WaferName, wafer1
DieName, x0y0
DeviceName, n10_2
Temperature, 150
FabDate, 11 May 2010
UserDate, 11 May 2010
WaferDiameter, 0.2
DieLayout, FOUR_CROSSING
DieSize, 0.02, 0.02
DieType, PARTIAL
Attribute, W, 1e-05
Attribute, L, 2e-06
NodeNames, d g s b
Sweep, 1, V, D, LIN, 0, 5, 0.1, CALCULATED, 0.1, 0
Sweep, 2, V, G, LIN, 2, 5, CALCULATED, 5, 0.1, 0
Constant, V, S, 0, 0.1, 0
Constant, V, B, -3, 0.1, 0
Target, I, D
Function, gds, derivative (Vd, ID)
Plot, idvd, XY (LIN LIN), vd, id
Plot, gds, XY (LIN LOG), vd, gds
DataArray, ID
0 9.12375e-06 1.57376e-05 1.99184e-05 2.19061e-05
2.2533e-05 2.27639e-05 2.29091e-05 2.30252e-05 2.31263e-05
2.32179e-05 2.33029e-05 2.33828e-05 2.34589e-05 2.35319e-05
2.36024e-05 2.36708e-05 2.37375e-05 2.38028e-05 2.38668e-05
2.39298e-05 2.39918e-05 2.4053e-05 2.41136e-05 2.41735e-05
2.42328e-05 2.42917e-05 2.43501e-05 2.44081e-05 2.44658e-05
2.45232e-05 2.45804e-05 2.46375e-05 2.46945e-05 2.47515e-05
2.48087e-05 2.48664e-05 2.49246e-05 2.49838e-05 2.50443e-05
2.51065e-05 2.5171e-05 2.52385e-05 2.53098e-05 2.53857e-05
2.54672e-05 2.55556e-05 2.56522e-05 2.57584e-05 2.58759e-05
2.60065e-05 0 2.48992e-05 4.70829e-05 6.65949e-05
8.34784e-05 9.7777e-05 0.000109536 0.000118806 0.000125658
0.000130237 0.000132913 0.00013439 0.000135328 0.000136032
0.000136612 0.000137114 0.000137559 0.000137962 0.000138331
0.000138673 0.000138993 0.000139294 0.00013958 0.000139853
0.000140114 0.000140365 0.000140608 0.000140843 0.000141071
0.000141294 0.000141511 0.000141724 0.000141932 0.000142137
0.000142338 0.000142536 0.000142732 0.000142926 0.000143117
0.000143308 0.000143499 0.00014369 0.000143883 0.00014408
0.000144282 0.000144491 0.00014471 0.000144943 0.000145193
0.000145466 0.000145765 0 3.87718e-05 7.4828e-05
0.000108209 0.000138955 0.000167104 0.000192696 0.000215768
0.000236357 0.000254501 0.000270238 0.000283607 0.000294655
0.000303441 0.00031007 0.000314762 0.000317945 0.000320174
0.000321871 0.000323257 0.000324437 0.00032547 0.000326389
0.00032722 0.000327978 0.000328677 0.000329326 0.000329933
0.000330503 0.000331043 0.000331556 0.000332046 0.000332515
0.000332965 0.0003334 0.00033382 0.000334227 0.000334622
0.000335007 0.000335383 0.00033575 0.00033611 0.000336463
0.000336811 0.000337156 0.000337497 0.000337839 0.000338183
0.000338533 0.000338891 0.000339264 0 5.10085e-05
9.93454e-05 0.000145048 0.000188154 0.000228698 0.000266716
0.000302244 0.000335315 0.000365962 0.000394221 0.000420122
0.000443698 0.000464982 0.000484005 0.000500801 0.000515404
0.000527855 0.000538204 0.000546534 0.000552997 0.000557875
0.000561574 0.00056449 0.000566892 0.000568938 0.000570721
0.000572301 0.000573719 0.000575004 0.000576181 0.000577265
0.000578272 0.000579212 0.000580095 0.000580927 0.000581716
0.000582466 0.000583181 0.000583867 0.000584525 0.000585159
0.000585771 0.000586363 0.000586937 0.000587495 0.00058804
0.000588571 0.000589092 0.000589605 0.000590113 0
6.18461e-05 0.000121083 0.000177745 0.000231865 0.000283479
0.000332618 0.000379314 0.000423599 0.000465505 0.000505062
0.0005423 0.000577249 0.000609938 0.000640396 0.000668651
0.000694731 0.000718664 0.000740478 0.0007602 0.00077786
0.000793487 0.000807117 0.000818793 0.000828582 0.000836596
0.000843034 0.000848193 0.000852398 0.000855916 0.000858931
0.000861563 0.000863893 0.000865981 0.000867869 0.000869592
0.000871174 0.000872637 0.000873998 0.00087527 0.000876464
0.000877591 0.000878657 0.000879671 0.000880637 0.00088156
0.000882446 0.000883297 0.000884118 0.00088491 0.000885677
DataSetFinish
DataSetStart
DataSetName, idvdhigh
MeasurementType, DC
BatchName, opt_ex09
WaferName, wafer1
DieName, x0y0
DeviceName, n10_5
Temperature, 150
FabDate, 11 May 2010
UserDate, 11 May 2010
WaferDiameter, 0.2
DieLayout, FOUR_CROSSING
DieSize, 0.02, 0.02
DieType, PARTIAL
Attribute, W, 1e-05
Attribute, L, 5e-06
NodeNames, d g s b
Sweep, 1, V, D, LIN, 0, 5, 0.1, CALCULATED, 0.1, 0
Sweep, 2, V, G, LIN, 2, 5, CALCULATED, 5, 0.1, 0
Constant, V, S, 0, 0.1, 0
Constant, V, B, -3, 0.1, 0
Target, I, D
Function, gds, derivative (Vd, ID)
Plot, idvd, XY (LIN LIN), vd, id
Plot, gds, XY (LIN LOG), vd, gds
DataArray, ID
0 3.82151e-06 6.69998e-06 8.64926e-06 9.71496e-06
1.00993e-05 1.02023e-05 1.02441e-05 1.02715e-05 1.02939e-05
1.0314e-05 1.03329e-05 1.03509e-05 1.03684e-05 1.03855e-05
1.04022e-05 1.04188e-05 1.04352e-05 1.04514e-05 1.04675e-05
1.04834e-05 1.04993e-05 1.05152e-05 1.05309e-05 1.05467e-05
1.05623e-05 1.05779e-05 1.05935e-05 1.06091e-05 1.06246e-05
1.06401e-05 1.06556e-05 1.06711e-05 1.06866e-05 1.07021e-05
1.07177e-05 1.07333e-05 1.0749e-05 1.07649e-05 1.07809e-05
1.07973e-05 1.08139e-05 1.0831e-05 1.08486e-05 1.0867e-05
1.08861e-05 1.09063e-05 1.09277e-05 1.09505e-05 1.0975e-05
1.10014e-05 0 9.7915e-06 1.86072e-05 2.64531e-05
3.33355e-05 3.92608e-05 4.4236e-05 4.82693e-05 5.13732e-05
5.35727e-05 5.49354e-05 5.56402e-05 5.59762e-05 5.61644e-05
5.62963e-05 5.64026e-05 5.64949e-05 5.65783e-05 5.66556e-05
5.67284e-05 5.67978e-05 5.68645e-05 5.6929e-05 5.69917e-05
5.70529e-05 5.71129e-05 5.71718e-05 5.72298e-05 5.7287e-05
5.73434e-05 5.73993e-05 5.74547e-05 5.75095e-05 5.7564e-05
5.76181e-05 5.76718e-05 5.77253e-05 5.77785e-05 5.78315e-05
5.78845e-05 5.79374e-05 5.79904e-05 5.80437e-05 5.80974e-05
5.81517e-05 5.8207e-05 5.82635e-05 5.83218e-05 5.83823e-05
5.84456e-05 5.85125e-05 0 1.51139e-05 2.92788e-05
4.25002e-05 5.47836e-05 6.61344e-05 7.65579e-05 8.60596e-05
9.4645e-05 0.00010232 0.000109089 0.00011496 0.000119939
0.000124036 0.000127265 0.000129657 0.000131281 0.000132283
0.000132883 0.000133274 0.000133562 0.000133797 0.000133999
0.000134179 0.000134343 0.000134495 0.000134638 0.000134774
0.000134903 0.000135027 0.000135147 0.000135263 0.000135376
0.000135487 0.000135595 0.000135701 0.000135805 0.000135907
0.000136008 0.000136108 0.000136207 0.000136304 0.000136401
0.000136496 0.000136592 0.000136686 0.000136781 0.000136876
0.000136971 0.000137066 0.000137164 0 1.98657e-05
3.8819e-05 5.68648e-05 7.40081e-05 9.02537e-05 0.000105606
0.000120071 0.000133653 0.000146357 0.000158186 0.000169147
0.000179245 0.000188482 0.000196866 0.0002044 0.000211091
0.000216943 0.000221965 0.000226167 0.000229563 0.000232184
0.000234093 0.000235406 0.000236295 0.000236927 0.000237411
0.000237809 0.000238151 0.000238454 0.000238729 0.000238981
0.000239215 0.000239435 0.000239643 0.000239842 0.000240032
0.000240214 0.000240391 0.000240562 0.000240728 0.00024089
0.000241048 0.000241203 0.000241355 0.000241505 0.000241652
0.000241797 0.00024194 0.000242081 0.000242221 0
2.41198e-05 4.73657e-05 6.97421e-05 9.12536e-05 0.000111905
0.000131699 0.000150643 0.000168739 0.000185992 0.000202406
0.000217986 0.000232736 0.00024666 0.000259762 0.000272047
0.000283519 0.000294181 0.000304039 0.000313097 0.000321359
0.000328829 0.000335512 0.000341415 0.000346545 0.00035091
0.000354526 0.000357421 0.000359646 0.000361295 0.0003625
0.000363405 0.00036412 0.000364712 0.000365222 0.000365672
0.000366077 0.000366447 0.00036679 0.000367109 0.000367409
0.000367693 0.000367964 0.000368222 0.00036847 0.00036871
0.000368941 0.000369165 0.000369384 0.000369596 0.000369804
DataSetFinish
DataSetStart
DataSetName, idvdhigh
MeasurementType, DC
BatchName, opt_ex09
WaferName, wafer1
DieName, x0y0
DeviceName, n2_0p5
Temperature, 150
FabDate, 11 May 2010
UserDate, 11 May 2010
WaferDiameter, 0.2
DieLayout, FOUR_CROSSING
DieSize, 0.02, 0.02
DieType, PARTIAL
Attribute, W, 2e-06
Attribute, L, 5e-07
NodeNames, d g s b
Sweep, 1, V, D, LIN, 0, 5, 0.1, CALCULATED, 0.1, 0
Sweep, 2, V, G, LIN, 2, 5, CALCULATED, 5, 0.1, 0
Constant, V, S, 0, 0.1, 0
Constant, V, B, -3, 0.1, 0
Target, I, D
Function, gds, derivative (Vd, ID)
Plot, idvd, XY (LIN LIN), vd, id
Plot, gds, XY (LIN LOG), vd, gds
DataArray, ID
0 3.91817e-06 5.3487e-06 5.88039e-06 6.31273e-06
6.72946e-06 7.14277e-06 7.55707e-06 7.97476e-06 8.39741e-06
8.82611e-06 9.26165e-06 9.70463e-06 1.01555e-05 1.06145e-05
1.10821e-05 1.15583e-05 1.20434e-05 1.25375e-05 1.30406e-05
1.35528e-05 1.40742e-05 1.46048e-05 1.51447e-05 1.56937e-05
1.6252e-05 1.68195e-05 1.73964e-05 1.79825e-05 1.85781e-05
1.91833e-05 1.97983e-05 2.04237e-05 2.106e-05 2.17082e-05
2.23695e-05 2.30456e-05 2.37387e-05 2.44517e-05 2.51882e-05
2.59528e-05 2.67511e-05 2.75899e-05 2.84773e-05 2.94232e-05
3.04389e-05 3.15377e-05 3.27351e-05 3.40486e-05 3.54983e-05
3.71067e-05 0 2.23841e-05 4.07138e-05 5.52694e-05
6.63219e-05 7.41859e-05 7.94353e-05 8.31344e-05 8.61605e-05
8.88393e-05 9.12851e-05 9.35564e-05 9.56909e-05 9.77156e-05
9.96509e-05 0.000101512 0.000103312 0.00010506 0.000106765
0.000108432 0.000110068 0.000111676 0.00011326 0.000114825
0.000116371 0.000117903 0.000119421 0.000120928 0.000122425
0.000123913 0.000125395 0.00012687 0.000128342 0.000129811
0.000131279 0.000132749 0.000134225 0.000135711 0.000137213
0.000138739 0.000140298 0.000141904 0.000143572 0.00014532
0.000147173 0.000149158 0.000151308 0.00015366 0.00015626
0.000159158 0.000162411 0 3.6789e-05 6.93097e-05
9.78184e-05 0.000122552 0.000143731 0.000161564 0.000176256
0.00018804 0.000197274 0.000204579 0.000210659 0.000215954
0.000220686 0.000224984 0.000228936 0.000232606 0.000236044
0.000239287 0.000242366 0.000245304 0.000248123 0.000250838
0.000253462 0.000256007 0.000258483 0.000260897 0.000263257
0.000265569 0.000267838 0.000270067 0.000272262 0.000274426
0.000276562 0.000278674 0.000280765 0.000282838 0.000284899
0.000286953 0.000289007 0.00029107 0.000293155 0.000295277
0.000297456 0.000299717 0.00030209 0.000304615 0.000307336
0.000310307 0.000313594 0.000317269 0 4.82074e-05
9.21404e-05 0.000132029 0.000168086 0.000200512 0.000229492
0.000255201 0.000277804 0.00029746 0.00031433 0.0003286
0.00034054 0.000350571 0.000359171 0.000366711 0.000373433
0.000379507 0.000385053 0.000390165 0.000394916 0.000399362
0.000403548 0.000407512 0.000411284 0.00041489 0.000418349
0.00042168 0.000424897 0.000428014 0.000431041 0.000433987
0.000436861 0.00043967 0.000442421 0.000445118 0.000447768
0.000450376 0.000452948 0.000455489 0.000458007 0.000460512
0.000463015 0.000465531 0.000468082 0.000470692 0.000473393
0.000476226 0.000479241 0.000482499 0.000486073 0
5.74493e-05 0.000110707 0.000159978 0.000205453 0.000247312
0.000285722 0.000320842 0.000352821 0.0003818 0.000407911
0.000431283 0.000452039 0.00047031 0.000486243 0.000500044
0.000512004 0.000522457 0.0005317 0.000539968 0.000547442
0.000554263 0.000560538 0.000566356 0.000571784 0.000576879
0.000581687 0.000586245 0.000590586 0.000594734 0.000598714
0.000602543 0.000606239 0.000609814 0.000613282 0.000616653
0.000619937 0.000623141 0.000626273 0.000629342 0.000632353
0.000635315 0.000638238 0.000641132 0.00064401 0.000646892
0.0006498 0.000652764 0.000655822 0.000659022 0.000662425
DataSetFinish
DataSetStart
DataSetName, idvdhigh
MeasurementType, DC
BatchName, opt_ex09
WaferName, wafer1
DieName, x0y0
DeviceName, n2_10
Temperature, 150
FabDate, 11 May 2010
UserDate, 11 May 2010
WaferDiameter, 0.2
DieLayout, FOUR_CROSSING
DieSize, 0.02, 0.02
DieType, PARTIAL
Attribute, W, 2e-06
Attribute, L, 1e-05
NodeNames, d g s b
Sweep, 1, V, D, LIN, 0, 5, 0.1, CALCULATED, 0.1, 0
Sweep, 2, V, G, LIN, 2, 5, CALCULATED, 5, 0.1, 0
Constant, V, S, 0, 0.1, 0
Constant, V, B, -3, 0.1, 0
Target, I, D
Function, gds, derivative (Vd, ID)
Plot, idvd, XY (LIN LIN), vd, id
Plot, gds, XY (LIN LOG), vd, gds
DataArray, ID
0 3.11132e-07 5.36452e-07 6.77471e-07 7.41822e-07
7.5903e-07 7.6319e-07 7.64961e-07 7.6615e-07 7.67139e-07
7.68039e-07 7.68896e-07 7.69727e-07 7.70542e-07 7.71346e-07
7.72143e-07 7.72936e-07 7.73724e-07 7.74509e-07 7.75292e-07
7.76073e-07 7.76853e-07 7.77632e-07 7.78409e-07 7.79186e-07
7.79962e-07 7.80737e-07 7.81512e-07 7.82287e-07 7.83061e-07
7.83835e-07 7.84609e-07 7.85384e-07 7.86159e-07 7.86936e-07
7.87715e-07 7.88497e-07 7.89284e-07 7.90076e-07 7.90877e-07
7.91688e-07 7.92514e-07 7.93356e-07 7.9422e-07 7.95112e-07
7.96035e-07 7.96998e-07 7.98007e-07 7.99071e-07 8.00198e-07
8.01399e-07 0 8.83899e-07 1.67839e-06 2.38377e-06
3.00032e-06 3.52837e-06 3.96831e-06 4.3207e-06 4.58657e-06
4.76848e-06 4.87421e-06 4.92361e-06 4.94459e-06 4.95525e-06
4.96228e-06 4.96783e-06 4.97265e-06 4.97707e-06 4.98124e-06
4.98523e-06 4.98911e-06 4.99291e-06 4.99663e-06 5.0003e-06
5.00394e-06 5.00753e-06 5.0111e-06 5.01465e-06 5.01817e-06
5.02168e-06 5.02517e-06 5.02865e-06 5.03212e-06 5.03558e-06
5.03903e-06 5.04247e-06 5.04591e-06 5.04935e-06 5.05278e-06
5.05621e-06 5.05965e-06 5.0631e-06 5.06656e-06 5.07004e-06
5.07356e-06 5.07713e-06 5.08075e-06 5.08446e-06 5.08826e-06
5.0922e-06 5.09629e-06 0 1.39723e-06 2.70816e-06
3.93304e-06 5.07211e-06 6.12562e-06 7.09381e-06 7.97695e-06
8.77528e-06 9.48909e-06 1.01187e-05 1.06643e-05 1.11265e-05
1.15058e-05 1.18035e-05 1.20219e-05 1.21671e-05 1.22524e-05
1.22985e-05 1.23249e-05 1.23424e-05 1.23558e-05 1.2367e-05
1.2377e-05 1.23862e-05 1.23949e-05 1.24032e-05 1.24111e-05
1.24188e-05 1.24264e-05 1.24338e-05 1.2441e-05 1.24482e-05
1.24552e-05 1.24622e-05 1.24691e-05 1.2476e-05 1.24828e-05
1.24896e-05 1.24963e-05 1.2503e-05 1.25097e-05 1.25163e-05
1.25229e-05 1.25295e-05 1.25361e-05 1.25427e-05 1.25493e-05
1.2556e-05 1.25627e-05 1.25694e-05 0 1.85765e-06
3.63297e-06 5.32618e-06 6.9375e-06 8.46715e-06 9.91534e-06
1.12823e-05 1.25683e-05 1.37734e-05 1.4898e-05 1.59422e-05
1.69063e-05 1.77906e-05 1.85951e-05 1.93203e-05 1.99663e-05
2.05335e-05 2.10223e-05 2.14334e-05 2.17677e-05 2.20273e-05
2.22163e-05 2.23434e-05 2.24232e-05 2.24731e-05 2.25067e-05
2.25319e-05 2.25525e-05 2.25703e-05 2.25864e-05 2.26011e-05
2.2615e-05 2.26282e-05 2.26408e-05 2.2653e-05 2.26649e-05
2.26764e-05 2.26877e-05 2.26988e-05 2.27097e-05 2.27205e-05
2.27311e-05 2.27416e-05 2.2752e-05 2.27623e-05 2.27725e-05
2.27827e-05 2.27928e-05 2.28028e-05 2.28128e-05 0
2.27152e-06 4.46477e-06 6.57995e-06 8.61725e-06 1.05769e-05
1.2459e-05 1.42639e-05 1.59917e-05 1.76426e-05 1.92168e-05
2.07145e-05 2.21359e-05 2.34812e-05 2.47506e-05 2.59443e-05
2.70624e-05 2.81053e-05 2.9073e-05 2.99658e-05 3.0784e-05
3.15276e-05 3.21971e-05 3.27927e-05 3.33147e-05 3.37638e-05
3.41406e-05 3.44468e-05 3.4685e-05 3.48606e-05 3.49832e-05
3.50662e-05 3.51237e-05 3.51662e-05 3.52001e-05 3.52286e-05
3.52537e-05 3.52764e-05 3.52973e-05 3.53169e-05 3.53355e-05
3.53533e-05 3.53704e-05 3.53869e-05 3.5403e-05 3.54187e-05
3.5434e-05 3.5449e-05 3.54638e-05 3.54783e-05 3.54926e-05
DataSetFinish
DataSetStart
DataSetName, idvdhigh
MeasurementType, DC
BatchName, opt_ex09
WaferName, wafer1
DieName, x0y0
DeviceName, n5_10
Temperature, 150
FabDate, 11 May 2010
UserDate, 11 May 2010
WaferDiameter, 0.2
DieLayout, FOUR_CROSSING
DieSize, 0.02, 0.02
DieType, PARTIAL
Attribute, W, 5e-06
Attribute, L, 1e-05
NodeNames, d g s b
Sweep, 1, V, D, LIN, 0, 5, 0.1, CALCULATED, 0.1, 0
Sweep, 2, V, G, LIN, 2, 5, CALCULATED, 5, 0.1, 0
Constant, V, S, 0, 0.1, 0
Constant, V, B, -3, 0.1, 0
Target, I, D
Function, gds, derivative (Vd, ID)
Plot, idvd, XY (LIN LIN), vd, id
Plot, gds, XY (LIN LOG), vd, gds
DataArray, ID
0 8.81148e-07 1.53684e-06 1.97005e-06 2.19361e-06
2.26547e-06 2.28262e-06 2.28891e-06 2.29275e-06 2.2958e-06
2.29853e-06 2.30109e-06 2.30356e-06 2.30598e-06 2.30836e-06
2.31071e-06 2.31305e-06 2.31537e-06 2.31768e-06 2.31999e-06
2.32229e-06 2.32458e-06 2.32687e-06 2.32915e-06 2.33144e-06
2.33372e-06 2.336e-06 2.33827e-06 2.34055e-06 2.34282e-06
2.3451e-06 2.34737e-06 2.34965e-06 2.35192e-06 2.3542e-06
2.35649e-06 2.35878e-06 2.36109e-06 2.36341e-06 2.36575e-06
2.36813e-06 2.37054e-06 2.373e-06 2.37553e-06 2.37812e-06
2.38082e-06 2.38362e-06 2.38655e-06 2.38964e-06 2.39291e-06
2.3964e-06 0 2.33943e-06 4.44682e-06 6.32291e-06
7.96847e-06 9.38433e-06 1.05715e-05 1.15312e-05 1.22659e-05
1.27812e-05 1.30932e-05 1.32463e-05 1.33119e-05 1.33438e-05
1.3364e-05 1.33795e-05 1.33927e-05 1.34048e-05 1.34161e-05
1.34268e-05 1.34373e-05 1.34475e-05 1.34574e-05 1.34673e-05
1.3477e-05 1.34866e-05 1.34961e-05 1.35056e-05 1.3515e-05
1.35244e-05 1.35337e-05 1.3543e-05 1.35522e-05 1.35614e-05
1.35706e-05 1.35798e-05 1.3589e-05 1.35981e-05 1.36072e-05
1.36164e-05 1.36255e-05 1.36347e-05 1.36439e-05 1.36532e-05
1.36625e-05 1.3672e-05 1.36816e-05 1.36914e-05 1.37015e-05
1.37119e-05 1.37227e-05 0 3.64555e-06 7.06749e-06
1.02665e-05 1.32431e-05 1.5998e-05 1.85319e-05 2.08454e-05
2.29392e-05 2.48139e-05 2.64704e-05 2.79095e-05 2.91322e-05
3.01402e-05 3.09362e-05 3.1526e-05 3.19237e-05 3.2161e-05
3.22904e-05 3.23635e-05 3.24114e-05 3.24475e-05 3.24775e-05
3.25041e-05 3.25285e-05 3.25513e-05 3.2573e-05 3.25939e-05
3.26142e-05 3.26339e-05 3.26533e-05 3.26723e-05 3.2691e-05
3.27094e-05 3.27277e-05 3.27457e-05 3.27636e-05 3.27814e-05
3.27991e-05 3.28166e-05 3.28341e-05 3.28515e-05 3.28688e-05
3.28861e-05 3.29033e-05 3.29205e-05 3.29376e-05 3.29549e-05
3.29721e-05 3.29895e-05 3.3007e-05 0 4.81645e-06
9.41974e-06 1.38104e-05 1.79891e-05 2.19563e-05 2.57126e-05
2.92586e-05 3.25949e-05 3.57219e-05 3.86404e-05 4.13508e-05
4.38538e-05 4.615e-05 4.82399e-05 5.01243e-05 5.18038e-05
5.32793e-05 5.45518e-05 5.5623e-05 5.64955e-05 5.71742e-05
5.76698e-05 5.80041e-05 5.82144e-05 5.83459e-05 5.84344e-05
5.85005e-05 5.85544e-05 5.86008e-05 5.86426e-05 5.8681e-05
5.87171e-05 5.87513e-05 5.87841e-05 5.88157e-05 5.88464e-05
5.88763e-05 5.89056e-05 5.89343e-05 5.89625e-05 5.89903e-05
5.90178e-05 5.90449e-05 5.90718e-05 5.90984e-05 5.91248e-05
5.9151e-05 5.91771e-05 5.92029e-05 5.92287e-05 0
5.86853e-06 1.15345e-05 1.69984e-05 2.22609e-05 2.73223e-05
3.21832e-05 3.68441e-05 4.13055e-05 4.5568e-05 4.9632e-05
5.34981e-05 5.71667e-05 6.06384e-05 6.39137e-05 6.69931e-05
6.9877e-05 7.25661e-05 7.50608e-05 7.73617e-05 7.94693e-05
8.13843e-05 8.31073e-05 8.46391e-05 8.59807e-05 8.71335e-05
8.80997e-05 8.88831e-05 8.94912e-05 8.99382e-05 9.02494e-05
9.04601e-05 9.06065e-05 9.07151e-05 9.08017e-05 9.08749e-05
9.09393e-05 9.09976e-05 9.10515e-05 9.11019e-05 9.11498e-05
9.11955e-05 9.12394e-05 9.12819e-05 9.13232e-05 9.13635e-05
9.14028e-05 9.14414e-05 9.14793e-05 9.15166e-05 9.15534e-05
DataSetFinish
DataSetStart
DataSetName, idvdlow
MeasurementType, DC
BatchName, opt_ex09
WaferName, wafer1
DieName, x0y0
DeviceName, n10_0p5
Temperature, 150
FabDate, 11 May 2010
UserDate, 11 May 2010
WaferDiameter, 0.2
DieLayout, FOUR_CROSSING
DieSize, 0.02, 0.02
DieType, PARTIAL
Attribute, W, 1e-05
Attribute, L, 5e-07
NodeNames, d g s b
Sweep, 1, V, D, LIN, 0, 5, 0.1, CALCULATED, 0.1, 0
Sweep, 2, V, G, LIN, 1.5, 5, CALCULATED, 5, 0.1, 0
Constant, V, S, 0, 0.1, 0
Constant, V, B, 0, 0.1, 0
Target, I, D
Function, gds, derivative (Vd, ID)
Plot, idvd, XY (LIN LIN), vd, id
Plot, gds, XY (LIN LOG), vd, gds
DataArray, ID
0 6.84143e-05 0.000115887 0.000144934 0.000160043
0.00016896 0.000176011 0.000182187 0.000187796 0.000192994
0.00019788 0.000202526 0.000206981 0.000211283 0.000215462
0.00021954 0.000223535 0.000227462 0.000231332 0.000235155
0.000238939 0.00024269 0.000246414 0.000250116 0.0002538
0.000257469 0.000261127 0.000264775 0.000268418 0.000272058
0.000275697 0.00027934 0.000282992 0.000286658 0.000290349
0.000294074 0.000297849 0.000301693 0.000305631 0.000309695
0.000313923 0.000318362 0.000323071 0.000328118 0.000333583
0.000339561 0.000346162 0.00035351 0.000361747 0.000371033
0.000381546 0 0.000173604 0.000322001 0.00044731
0.000551435 0.000636104 0.000702966 0.000753866 0.000791665
0.000820643 0.00084432 0.000864508 0.000882167 0.0008979
0.000912127 0.000925148 0.000937191 0.000948428 0.000958994
0.000968996 0.000978518 0.000987629 0.000996386 0.00100484
0.00101302 0.00102096 0.0010287 0.00103626 0.00104365
0.00105089 0.00105801 0.00106501 0.0010719 0.00107871
0.00108545 0.00109213 0.00109877 0.0011054 0.00111206
0.00111878 0.00112563 0.00113268 0.00114001 0.00114775
0.00115603 0.00116502 0.00117492 0.00118596 0.00119843
0.00121265 0.00122897 0 0.000250335 0.000474584
0.000674665 0.000852315 0.00100911 0.00114648 0.00126575
0.00136813 0.0014548 0.00152697 0.00158622 0.00163476
0.00167516 0.00170948 0.00173919 0.00176533 0.00178864
0.00180969 0.00182889 0.00184656 0.00186296 0.00187828
0.00189268 0.00190629 0.00191923 0.00193157 0.0019434
0.00195476 0.00196573 0.00197634 0.00198662 0.00199662
0.00200637 0.00201588 0.00202519 0.00203432 0.0020433
0.00205216 0.00206093 0.00206966 0.00207841 0.00208725
0.0020963 0.00210566 0.00211551 0.00212604 0.00213749
0.00215017 0.00216442 0.00218065 0 0.000309486
0.000593131 0.000852626 0.00108952 0.00130523 0.00150105
0.0016782 0.00183776 0.00198077 0.00210818 0.00222087
0.00231968 0.00240542 0.00247896 0.00254144 0.00259448
0.00263989 0.00267926 0.00271386 0.00274463 0.0027723
0.00279743 0.00282045 0.00284169 0.00286143 0.00287988
0.00289723 0.00291362 0.00292918 0.002944 0.00295817
0.00297177 0.00298486 0.00299749 0.00300971 0.00302156
0.00303308 0.00304431 0.00305528 0.00306603 0.00307661
0.00308706 0.00309747 0.00310792 0.00311852 0.00312942
0.00314082 0.00315296 0.00316612 0.00318069 0
0.000356294 0.000687492 0.000995073 0.0012804 0.00154475
0.00178927 0.00201506 0.00222312 0.0024144 0.00258975
0.00274999 0.00289588 0.00302812 0.00314737 0.00325418
0.00334902 0.00343221 0.00350423 0.00356617 0.00361965
0.00366626 0.00370734 0.00374394 0.00377685 0.00380673
0.00383407 0.00385926 0.00388262 0.00390442 0.00392486
0.00394412 0.00396234 0.00397966 0.00399618 0.00401198
0.00402714 0.00404173 0.0040558 0.00406941 0.00408261
0.00409544 0.00410795 0.00412019 0.00413222 0.00414412
0.00415599 0.00416794 0.00418014 0.00419281 0.0042062
DataSetFinish
DataSetStart
DataSetName, idvdlow
MeasurementType, DC
BatchName, opt_ex09
WaferName, wafer1
DieName, x0y0
DeviceName, n10_0p8
Temperature, 150
FabDate, 11 May 2010
UserDate, 11 May 2010
WaferDiameter, 0.2
DieLayout, FOUR_CROSSING
DieSize, 0.02, 0.02
DieType, PARTIAL
Attribute, W, 1e-05
Attribute, L, 8e-07
NodeNames, d g s b
Sweep, 1, V, D, LIN, 0, 5, 0.1, CALCULATED, 0.1, 0
Sweep, 2, V, G, LIN, 1.5, 5, CALCULATED, 5, 0.1, 0
Constant, V, S, 0, 0.1, 0
Constant, V, B, 0, 0.1, 0
Target, I, D
Function, gds, derivative (Vd, ID)
Plot, idvd, XY (LIN LIN), vd, id
Plot, gds, XY (LIN LOG), vd, gds
DataArray, ID
0 3.88974e-05 6.70782e-05 8.52235e-05 9.46101e-05
9.86509e-05 0.000100986 0.00010279 0.00010432 0.000105668
0.000106883 0.000107996 0.00010903 0.000109999 0.000110916
0.000111789 0.000112626 0.000113433 0.000114214 0.000114972
0.000115711 0.000116434 0.000117142 0.000117837 0.000118521
0.000119194 0.00011986 0.000120517 0.000121167 0.000121812
0.000122451 0.000123087 0.00012372 0.000124351 0.000124983
0.000125618 0.000126258 0.000126908 0.000127573 0.000128258
0.00012897 0.000129719 0.000130515 0.000131371 0.0001323
0.00013332 0.000134451 0.000135713 0.000137131 0.000138732
0.000140547 0 9.43977e-05 0.000177005 0.000248362
0.000308978 0.000359341 0.000399927 0.000431246 0.000453994
0.00046953 0.000480257 0.000488389 0.000495032 0.000500678
0.00050559 0.000509938 0.000513841 0.000517382 0.000520628
0.000523628 0.000526422 0.00052904 0.000531509 0.000533848
0.000536075 0.000538203 0.000540245 0.000542211 0.000544109
0.000545947 0.00054773 0.000549466 0.000551158 0.000552811
0.00055443 0.00055602 0.000557585 0.000559132 0.000560667
0.000562199 0.000563741 0.000565305 0.00056691 0.000568579
0.000570338 0.000572221 0.000574268 0.000576527 0.000579053
0.000581911 0.000585175 0 0.000138569 0.000265222
0.000380451 0.00048472 0.000578468 0.000662114 0.000736054
0.000800671 0.000856331 0.000903402 0.000942279 0.000973476
0.000997853 0.00101685 0.00103207 0.0010447 0.00105545
0.00106478 0.00107299 0.00108031 0.0010869 0.00109289
0.00109837 0.00110344 0.00110813 0.00111252 0.00111664
0.00112053 0.00112421 0.0011277 0.00113104 0.00113424
0.0011373 0.00114026 0.00114311 0.00114586 0.00114854
0.00115114 0.00115368 0.00115616 0.0011586 0.00116102
0.00116342 0.00116583 0.00116829 0.00117082 0.00117347
0.00117629 0.00117936 0.00118274 0 0.000174725
0.000337712 0.000489403 0.000630217 0.000760552 0.000880789
0.000991289 0.0010924 0.00118444 0.00126774 0.0013426
0.0014093 0.00146814 0.00151939 0.00156337 0.00160048
0.00163131 0.00165678 0.00167802 0.00169599 0.00171145
0.00172493 0.00173682 0.00174743 0.00175698 0.00176564
0.00177356 0.00178085 0.0017876 0.00179388 0.00179975
0.00180527 0.00181048 0.0018154 0.00182009 0.00182455
0.00182882 0.00183291 0.00183684 0.00184063 0.00184429
0.00184783 0.00185128 0.00185464 0.00185794 0.0018612
0.00186445 0.00186772 0.00187106 0.00187452 0
0.000204738 0.000398059 0.000580358 0.000752013 0.000913382
0.00106481 0.00120662 0.00133914 0.00146266 0.00157747
0.00168384 0.00178205 0.00187235 0.00195497 0.00203016
0.00209815 0.00215915 0.00221339 0.00226111 0.00230257
0.00233817 0.00236852 0.00239443 0.00241671 0.00243607
0.00245307 0.00246815 0.00248164 0.00249382 0.0025049
0.00251503 0.00252435 0.00253298 0.00254101 0.00254851
0.00255555 0.00256218 0.00256845 0.0025744 0.00258005
0.00258544 0.0025906 0.00259555 0.00260031 0.0026049
0.00260933 0.00261364 0.00261784 0.00262196 0.00262603
DataSetFinish
DataSetStart
DataSetName, idvdlow
MeasurementType, DC
BatchName, opt_ex09
WaferName, wafer1
DieName, x0y0
DeviceName, n10_1
Temperature, 150
FabDate, 11 May 2010
UserDate, 11 May 2010
WaferDiameter, 0.2
DieLayout, FOUR_CROSSING
DieSize, 0.02, 0.02
DieType, PARTIAL
Attribute, W, 1e-05
Attribute, L, 1e-06
NodeNames, d g s b
Sweep, 1, V, D, LIN, 0, 5, 0.1, CALCULATED, 0.1, 0
Sweep, 2, V, G, LIN, 1.5, 5, CALCULATED, 5, 0.1, 0
Constant, V, S, 0, 0.1, 0
Constant, V, B, 0, 0.1, 0
Target, I, D
Function, gds, derivative (Vd, ID)
Plot, idvd, XY (LIN LIN), vd, id
Plot, gds, XY (LIN LOG), vd, gds
DataArray, ID
0 3.03702e-05 5.26591e-05 6.72663e-05 7.49657e-05
7.80764e-05 7.96101e-05 8.07074e-05 8.16085e-05 8.23873e-05
8.30793e-05 8.37057e-05 8.42811e-05 8.48158e-05 8.53173e-05
8.57916e-05 8.6243e-05 8.66753e-05 8.70912e-05 8.74931e-05
8.78829e-05 8.82621e-05 8.86321e-05 8.8994e-05 8.93488e-05
8.96972e-05 9.00399e-05 9.03776e-05 9.07109e-05 9.10402e-05
9.13662e-05 9.16894e-05 9.20104e-05 9.23302e-05 9.26496e-05
9.297e-05 9.32929e-05 9.36205e-05 9.39552e-05 9.43004e-05
9.46597e-05 9.5038e-05 9.54409e-05 9.58749e-05 9.63477e-05
9.68683e-05 9.74467e-05 9.80944e-05 9.88242e-05 9.96504e-05
0.000100589 0 7.26387e-05 0.000136637 0.0001923
0.000239917 0.000279771 0.000312144 0.000337335 0.000355746
0.00036815 0.00037617 0.000381779 0.000386149 0.000389769
0.000392867 0.000395576 0.00039798 0.000400142 0.000402107
0.00040391 0.000405576 0.000407128 0.000408582 0.000409952
0.000411248 0.000412482 0.00041366 0.000414788 0.000415874
0.00041692 0.000417932 0.000418913 0.000419866 0.000420794
0.000421701 0.000422587 0.000423458 0.000424315 0.000425163
0.000426006 0.00042685 0.000427704 0.000428576 0.000429478
0.000430424 0.000431432 0.000432524 0.000433724 0.000435062
0.000436573 0.000438295 0 0.000107015 0.000205415
0.000295476 0.000377459 0.000451618 0.000518194 0.000577422
0.000629528 0.000674732 0.000713255 0.000745328 0.000771233
0.000791406 0.000806666 0.000818292 0.000827523 0.000835156
0.000841644 0.000847266 0.000852212 0.000856614 0.000860575
0.000864169 0.000867457 0.000870486 0.000873293 0.00087591
0.000878362 0.000880671 0.000882852 0.000884922 0.000886894
0.000888777 0.000890581 0.000892315 0.000893985 0.000895598
0.000897159 0.000898676 0.000900152 0.000901596 0.000903015
0.000904416 0.000905813 0.000907218 0.00090865 0.000910129
0.000911685 0.00091335 0.000915164 0 0.000135604
0.000262788 0.000381798 0.000492873 0.000596239 0.000692116
0.000780716 0.000862242 0.00093689 0.00100485 0.00106631
0.00112144 0.00117042 0.00121342 0.00125063 0.00128226
0.00130859 0.00133009 0.00134755 0.00136187 0.00137387
0.00138411 0.00139299 0.00140079 0.00140771 0.00141392
0.00141953 0.00142464 0.00142933 0.00143366 0.00143767
0.00144141 0.00144491 0.0014482 0.00145131 0.00145425
0.00145705 0.00145972 0.00146227 0.00146471 0.00146706
0.00146932 0.0014715 0.00147362 0.00147568 0.00147769
0.00147968 0.00148164 0.00148362 0.00148563 0
0.000159648 0.000311146 0.000454716 0.000590571 0.000718915
0.000839947 0.000953859 0.00106083 0.00116105 0.00125469
0.0013419 0.00142286 0.00149772 0.00156663 0.00162974
0.00168718 0.00173911 0.00178567 0.00182698 0.00186322
0.00189456 0.00192131 0.00194392 0.001963 0.00197924
0.00199321 0.00200538 0.00201608 0.0020256 0.00203413
0.00204183 0.00204884 0.00205526 0.00206116 0.00206663
0.00207171 0.00207646 0.00208092 0.00208511 0.00208906
0.00209281 0.00209638 0.00209977 0.00210301 0.00210612
0.0021091 0.00211198 0.00211475 0.00211745 0.00212007
DataSetFinish
DataSetStart
DataSetName, idvdlow
MeasurementType, DC
BatchName, opt_ex09
WaferName, wafer1
DieName, x0y0
DeviceName, n10_10
Temperature, 150
FabDate, 11 May 2010
UserDate, 11 May 2010
WaferDiameter, 0.2
DieLayout, FOUR_CROSSING
DieSize, 0.02, 0.02
DieType, PARTIAL
Attribute, W, 1e-05
Attribute, L, 1e-05
NodeNames, d g s b
Sweep, 1, V, D, LIN, 0, 5, 0.1, CALCULATED, 0.1, 0
Sweep, 2, V, G, LIN, 1.5, 5, CALCULATED, 5, 0.1, 0
Constant, V, S, 0, 0.1, 0
Constant, V, B, 0, 0.1, 0
Target, I, D
Function, gds, derivative (Vd, ID)
Plot, idvd, XY (LIN LIN), vd, id
Plot, gds, XY (LIN LOG), vd, gds
DataArray, ID
0 3.14381e-06 5.6137e-06 7.4148e-06 8.56114e-06
9.11456e-06 9.28761e-06 9.33686e-06 9.35892e-06 9.37368e-06
9.38576e-06 9.39659e-06 9.40676e-06 9.41652e-06 9.42601e-06
9.43533e-06 9.44451e-06 9.45359e-06 9.4626e-06 9.47155e-06
9.48045e-06 9.48931e-06 9.49814e-06 9.50694e-06 9.51572e-06
9.52448e-06 9.53323e-06 9.54196e-06 9.55067e-06 9.55938e-06
9.56808e-06 9.57677e-06 9.58546e-06 9.59415e-06 9.60284e-06
9.61155e-06 9.62029e-06 9.62905e-06 9.63787e-06 9.64676e-06
9.65574e-06 9.66486e-06 9.67413e-06 9.68362e-06 9.69336e-06
9.70343e-06 9.71389e-06 9.72482e-06 9.73632e-06 9.74847e-06
9.76139e-06 0 6.76319e-06 1.28802e-05 1.83531e-05
2.31841e-05 2.73755e-05 3.09298e-05 3.38505e-05 3.61427e-05
3.78177e-05 3.89056e-05 3.94939e-05 3.97594e-05 3.98825e-05
3.99541e-05 4.00055e-05 4.00477e-05 4.00849e-05 4.01189e-05
4.0151e-05 4.01816e-05 4.02111e-05 4.02398e-05 4.02679e-05
4.02955e-05 4.03226e-05 4.03495e-05 4.0376e-05 4.04023e-05
4.04283e-05 4.04542e-05 4.04799e-05 4.05055e-05 4.0531e-05
4.05563e-05 4.05816e-05 4.06068e-05 4.06319e-05 4.0657e-05
4.0682e-05 4.07071e-05 4.07321e-05 4.07573e-05 4.07826e-05
4.08081e-05 4.08339e-05 4.08601e-05 4.08868e-05 4.09143e-05
4.09426e-05 4.09721e-05 0 9.88649e-06 1.91736e-05
2.78631e-05 3.59566e-05 4.3456e-05 5.0363e-05 5.66793e-05
6.24068e-05 6.75474e-05 7.2103e-05 7.6076e-05 7.94691e-05
8.22862e-05 8.4534e-05 8.6226e-05 8.73942e-05 8.81126e-05
8.85125e-05 8.87375e-05 8.88813e-05 8.89872e-05 8.90733e-05
8.9148e-05 8.92154e-05 8.92776e-05 8.93362e-05 8.9392e-05
8.94456e-05 8.94974e-05 8.95478e-05 8.95971e-05 8.96453e-05
8.96928e-05 8.97395e-05 8.97856e-05 8.98311e-05 8.98762e-05
8.99208e-05 8.99651e-05 9.00091e-05 9.00528e-05 9.00962e-05
9.01395e-05 9.01825e-05 9.02255e-05 9.02683e-05 9.03112e-05
9.03543e-05 9.03975e-05 9.04412e-05 0 1.26043e-05
2.46559e-05 3.61564e-05 4.71072e-05 5.75099e-05 6.73658e-05
7.66766e-05 8.54437e-05 9.36685e-05 0.000101353 0.000108497
0.000115105 0.000121176 0.000126712 0.000131716 0.000136188
0.000140132 0.000143549 0.000146444 0.000148822 0.000150695
0.000152086 0.000153045 0.00015366 0.000154046 0.000154303
0.000154491 0.00015464 0.000154768 0.00015488 0.000154982
0.000155077 0.000155166 0.00015525 0.000155331 0.000155409
0.000155484 0.000155557 0.000155628 0.000155698 0.000155767
0.000155835 0.000155901 0.000155967 0.000156031 0.000156095
0.000156159 0.000156222 0.000156284 0.000156346 0
1.49798e-05 2.94507e-05 4.34142e-05 5.68714e-05 6.98237e-05
8.22723e-05 9.42186e-05 0.000105664 0.000116609 0.000127056
0.000137006 0.000146459 0.000155418 0.000163884 0.000171857
0.00017934 0.000186332 0.000192837 0.000198855 0.000204387
0.000209435 0.000214 0.000218085 0.000221692 0.000224823
0.000227483 0.000229679 0.000231426 0.000232749 0.000233698
0.000234352 0.000234802 0.000235126 0.000235377 0.000235584
0.000235761 0.000235919 0.000236062 0.000236194 0.000236318
0.000236435 0.000236547 0.000236654 0.000236757 0.000236856
0.000236953 0.000237048 0.000237141 0.000237231 0.00023732
DataSetFinish
DataSetStart
DataSetName, idvdlow
MeasurementType, DC
BatchName, opt_ex09
WaferName, wafer1
DieName, x0y0
DeviceName, n10_2
Temperature, 150
FabDate, 11 May 2010
UserDate, 11 May 2010
WaferDiameter, 0.2
DieLayout, FOUR_CROSSING
DieSize, 0.02, 0.02
DieType, PARTIAL
Attribute, W, 1e-05
Attribute, L, 2e-06
NodeNames, d g s b
Sweep, 1, V, D, LIN, 0, 5, 0.1, CALCULATED, 0.1, 0
Sweep, 2, V, G, LIN, 1.5, 5, CALCULATED, 5, 0.1, 0
Constant, V, S, 0, 0.1, 0
Constant, V, B, 0, 0.1, 0
Target, I, D
Function, gds, derivative (Vd, ID)
Plot, idvd, XY (LIN LIN), vd, id
Plot, gds, XY (LIN LOG), vd, gds
DataArray, ID
0 1.51934e-05 2.67494e-05 3.47567e-05 3.93958e-05
4.13264e-05 4.1991e-05 4.23317e-05 4.25778e-05 4.27805e-05
4.29569e-05 4.31154e-05 4.32605e-05 4.33955e-05 4.35225e-05
4.3643e-05 4.37582e-05 4.38689e-05 4.3976e-05 4.40799e-05
4.41811e-05 4.428e-05 4.43769e-05 4.4472e-05 4.45655e-05
4.46577e-05 4.47486e-05 4.48385e-05 4.49273e-05 4.50154e-05
4.51026e-05 4.51893e-05 4.52754e-05 4.53613e-05 4.54469e-05
4.55327e-05 4.56188e-05 4.57058e-05 4.57941e-05 4.58842e-05
4.5977e-05 4.60734e-05 4.61745e-05 4.62816e-05 4.63961e-05
4.65198e-05 4.66548e-05 4.68032e-05 4.69677e-05 4.7151e-05
4.73562e-05 0 3.44913e-05 6.53186e-05 9.2542e-05
0.000116221 0.000136413 0.000153181 0.000166591 0.00017673
0.000183757 0.00018807 0.000190511 0.000192025 0.000193126
0.000194011 0.00019476 0.000195413 0.000195993 0.000196517
0.000196996 0.000197439 0.000197851 0.000198238 0.000198603
0.000198949 0.00019928 0.000199597 0.000199902 0.000200196
0.000200481 0.000200758 0.000201027 0.00020129 0.000201546
0.000201798 0.000202044 0.000202287 0.000202526 0.000202762
0.000202996 0.00020323 0.000203464 0.000203699 0.000203939
0.000204186 0.000204442 0.000204711 0.000204999 0.000205309
0.000205649 0.000206026 0 5.07617e-05 9.79973e-05
0.000141759 0.0001821 0.00021907 0.00025272 0.000283099
0.000310255 0.000334238 0.000355096 0.000372881 0.000387651
0.000399482 0.000408501 0.000414973 0.00041942 0.000422546
0.000424912 0.000426825 0.000428436 0.000429829 0.000431057
0.000432155 0.000433147 0.000434054 0.000434888 0.000435663
0.000436386 0.000437065 0.000437705 0.000438313 0.000438891
0.000439444 0.000439974 0.000440484 0.000440975 0.000441451
0.000441912 0.00044236 0.000442796 0.000443222 0.000443639
0.000444049 0.000444453 0.000444853 0.000445253 0.000445656
0.000446065 0.000446485 0.000446924 0 6.46652e-05
0.000125972 0.000183966 0.000238695 0.000290204 0.000338536
0.000383735 0.000425845 0.000464907 0.000500963 0.000534054
0.00056422 0.000591501 0.000615937 0.000637571 0.000656443
0.000672604 0.000686115 0.000697073 0.000705653 0.000712185
0.000717159 0.000721069 0.000724268 0.00072697 0.000729304
0.000731355 0.00073318 0.000734822 0.000736314 0.00073768
0.000738938 0.000740106 0.000741196 0.000742218 0.000743181
0.000744091 0.000744956 0.00074578 0.000746568 0.000747323
0.000748049 0.000748748 0.000749424 0.000750079 0.000750715
0.000751334 0.00075194 0.000752534 0.00075312 0
7.66292e-05 0.000150072 0.000220372 0.000287567 0.0003517
0.000412809 0.000470933 0.000526111 0.00057838 0.000627777
0.000674338 0.000718099 0.000759095 0.000797362 0.000832932
0.000865841 0.000896121 0.000923805 0.000948928 0.000971524
0.000991627 0.00100928 0.00102452 0.00103744 0.00104813
0.0010568 0.00106378 0.00106945 0.00107416 0.00107816
0.00108161 0.00108465 0.00108734 0.00108976 0.00109195
0.00109395 0.00109579 0.00109748 0.00109906 0.00110053
0.00110191 0.00110321 0.00110444 0.0011056 0.00110671
0.00110777 0.00110879 0.00110976 0.00111069 0.0011116
DataSetFinish
DataSetStart
DataSetName, idvdlow
MeasurementType, DC
BatchName, opt_ex09
WaferName, wafer1
DieName, x0y0
DeviceName, n10_5
Temperature, 150
FabDate, 11 May 2010
UserDate, 11 May 2010
WaferDiameter, 0.2
DieLayout, FOUR_CROSSING
DieSize, 0.02, 0.02
DieType, PARTIAL
Attribute, W, 1e-05
Attribute, L, 5e-06
NodeNames, d g s b
Sweep, 1, V, D, LIN, 0, 5, 0.1, CALCULATED, 0.1, 0
Sweep, 2, V, G, LIN, 1.5, 5, CALCULATED, 5, 0.1, 0
Constant, V, S, 0, 0.1, 0
Constant, V, B, 0, 0.1, 0
Target, I, D
Function, gds, derivative (Vd, ID)
Plot, idvd, XY (LIN LIN), vd, id
Plot, gds, XY (LIN LOG), vd, gds
DataArray, ID
0 6.23534e-06 1.1097e-05 1.46009e-05 1.6784e-05
1.77983e-05 1.8115e-05 1.82219e-05 1.82809e-05 1.8325e-05
1.83625e-05 1.83965e-05 1.84282e-05 1.84584e-05 1.84874e-05
1.85156e-05 1.85432e-05 1.85702e-05 1.85968e-05 1.8623e-05
1.8649e-05 1.86747e-05 1.87002e-05 1.87255e-05 1.87507e-05
1.87757e-05 1.88006e-05 1.88254e-05 1.88501e-05 1.88747e-05
1.88993e-05 1.89238e-05 1.89483e-05 1.89727e-05 1.89971e-05
1.90216e-05 1.90462e-05 1.90709e-05 1.90958e-05 1.91209e-05
1.91465e-05 1.91726e-05 1.91993e-05 1.92269e-05 1.92556e-05
1.92857e-05 1.93173e-05 1.93509e-05 1.93869e-05 1.94255e-05
1.94674e-05 0 1.35855e-05 2.58376e-05 3.67648e-05
4.63756e-05 5.4679e-05 6.16844e-05 6.74031e-05 7.1851e-05
7.50584e-05 7.71048e-05 7.82047e-05 7.87385e-05 7.90323e-05
7.92327e-05 7.93902e-05 7.95242e-05 7.96431e-05 7.97515e-05
7.98523e-05 7.99471e-05 8.00372e-05 8.01236e-05 8.02069e-05
8.02876e-05 8.03661e-05 8.04428e-05 8.05179e-05 8.05917e-05
8.06642e-05 8.07357e-05 8.08062e-05 8.08759e-05 8.09449e-05
8.10133e-05 8.1081e-05 8.11483e-05 8.12152e-05 8.12817e-05
8.1348e-05 8.14141e-05 8.14803e-05 8.15468e-05 8.16138e-05
8.16816e-05 8.17506e-05 8.18212e-05 8.18942e-05 8.19702e-05
8.20499e-05 8.21345e-05 0 1.9894e-05 3.85387e-05
5.59414e-05 7.21093e-05 8.70496e-05 0.00010077 0.000113276
0.000124577 0.000134679 0.000143591 0.000151319 0.000157875
0.00016327 0.000167524 0.000170677 0.000172822 0.000174153
0.000174957 0.000175485 0.000175875 0.00017619 0.000176459
0.000176697 0.000176911 0.000177108 0.000177291 0.000177463
0.000177627 0.000177782 0.000177931 0.000178075 0.000178214
0.000178349 0.00017848 0.000178608 0.000178734 0.000178857
0.000178978 0.000179097 0.000179215 0.000179331 0.000179445
0.000179558 0.000179671 0.000179783 0.000179894 0.000180005
0.000180117 0.00018023 0.000180344 0 2.53599e-05
4.95571e-05 7.25981e-05 9.4489e-05 0.000115236 0.000134846
0.000153324 0.000170677 0.000186911 0.000202031 0.000216045
0.000228958 0.000240776 0.000251506 0.000261154 0.000269727
0.000277232 0.000283678 0.000289079 0.000293453 0.00029684
0.000299317 0.000301032 0.000302201 0.000303033 0.000303672
0.000304193 0.000304637 0.000305028 0.000305378 0.000305697
0.000305992 0.000306266 0.000306524 0.000306768 0.000306999
0.000307221 0.000307434 0.000307639 0.000307838 0.000308031
0.000308218 0.000308401 0.00030858 0.000308755 0.000308927
0.000309095 0.000309262 0.000309426 0.000309587 0
3.01196e-05 5.91592e-05 8.71243e-05 0.00011402 0.000139853
0.000164627 0.000188349 0.000211024 0.000232656 0.000253252
0.000272816 0.000291354 0.000308871 0.000325372 0.000340863
0.000355348 0.000368833 0.000381323 0.000392823 0.000403339
0.000412876 0.00042144 0.000429038 0.000435677 0.00044137
0.000446131 0.00044999 0.000453002 0.000455264 0.000456931
0.000458177 0.000459149 0.000459944 0.000460619 0.000461208
0.000461733 0.000462208 0.000462642 0.000463044 0.000463419
0.000463771 0.000464103 0.000464419 0.00046472 0.000465008
0.000465286 0.000465554 0.000465813 0.000466064 0.000466309
DataSetFinish
DataSetStart
DataSetName, idvdlow
MeasurementType, DC
BatchName, opt_ex09
WaferName, wafer1
DieName, x0y0
DeviceName, n2_0p5
Temperature, 150
FabDate, 11 May 2010
UserDate, 11 May 2010
WaferDiameter, 0.2
DieLayout, FOUR_CROSSING
DieSize, 0.02, 0.02
DieType, PARTIAL
Attribute, W, 2e-06
Attribute, L, 5e-07
NodeNames, d g s b
Sweep, 1, V, D, LIN, 0, 5, 0.1, CALCULATED, 0.1, 0
Sweep, 2, V, G, LIN, 1.5, 5, CALCULATED, 5, 0.1, 0
Constant, V, S, 0, 0.1, 0
Constant, V, B, 0, 0.1, 0
Target, I, D
Function, gds, derivative (Vd, ID)
Plot, idvd, XY (LIN LIN), vd, id
Plot, gds, XY (LIN LOG), vd, gds
DataArray, ID
0 1.02104e-05 1.65863e-05 1.97444e-05 2.11898e-05
2.221e-05 2.30996e-05 2.39164e-05 2.46829e-05 2.54123e-05
2.61137e-05 2.67934e-05 2.7456e-05 2.81053e-05 2.8744e-05
2.93743e-05 2.9998e-05 3.06166e-05 3.12313e-05 3.1843e-05
3.24525e-05 3.30605e-05 3.36676e-05 3.42743e-05 3.4881e-05
3.54881e-05 3.60959e-05 3.67047e-05 3.73148e-05 3.79267e-05
3.85408e-05 3.91577e-05 3.97781e-05 4.0403e-05 4.1034e-05
4.16729e-05 4.23221e-05 4.29849e-05 4.36654e-05 4.43688e-05
4.51013e-05 4.58709e-05 4.66869e-05 4.75603e-05 4.85044e-05
4.95344e-05 5.06678e-05 5.19248e-05 5.33282e-05 5.49037e-05
5.66799e-05 0 3.17767e-05 5.89372e-05 8.17988e-05
0.000100654 0.000115778 0.000127454 0.000136063 0.000142312
0.000147152 0.0001512 0.000154724 0.00015786 0.000160696
0.000163293 0.000165695 0.000167937 0.000170046 0.000172042
0.000173942 0.000175761 0.000177509 0.000179196 0.00018083
0.000182416 0.000183961 0.000185469 0.000186945 0.000188391
0.000189812 0.000191209 0.000192585 0.000193944 0.000195286
0.000196616 0.000197935 0.000199249 0.000200563 0.000201882
0.000203216 0.000204575 0.000205973 0.000207428 0.000208962
0.000210601 0.000212378 0.00021433 0.000216503 0.000218948
0.000221727 0.000224907 0 4.71349e-05 8.95995e-05
0.000127671 0.000161605 0.000191639 0.000217994 0.000240875
0.000260479 0.000277001 0.000290668 0.000301806 0.000310923
0.000318573 0.000325154 0.000330923 0.000336056 0.000340679
0.000344887 0.000348751 0.000352328 0.000355664 0.000358793
0.000361745 0.000364545 0.000367211 0.00036976 0.000372207
0.000374563 0.000376838 0.000379041 0.000381179 0.00038326
0.000385288 0.000387269 0.000389208 0.00039111 0.000392981
0.000394825 0.000396651 0.000398466 0.000400283 0.000402116
0.000403984 0.000405912 0.000407929 0.000410074 0.000412393
0.000414944 0.000417792 0.000421019 0 5.88325e-05
0.000113116 0.00016309 0.000208977 0.000250983 0.000289303
0.000324118 0.000355598 0.000383903 0.000409184 0.000431586
0.000451251 0.00046833 0.000483006 0.000495541 0.000506276
0.000515563 0.000523694 0.000530901 0.000537357 0.000543199
0.000548529 0.000553432 0.000557972 0.000562202 0.000566167
0.0005699 0.000573432 0.000576787 0.000579986 0.000583047
0.000585986 0.000588814 0.000591543 0.000594184 0.000596744
0.000599233 0.000601656 0.000604022 0.000606338 0.000608613
0.000610856 0.000613082 0.000615306 0.000617549 0.000619839
0.000622212 0.00062471 0.00062739 0.00063032 0
6.80036e-05 0.000131646 0.000191133 0.000246658 0.0002984
0.000346529 0.000391207 0.000432584 0.000470802 0.000505996
0.000538292 0.000567811 0.000594667 0.000618968 0.000640819
0.000660319 0.000677567 0.000692682 0.000705853 0.000717346
0.000727448 0.000736409 0.000744433 0.000751682 0.000758283
0.000764339 0.000769931 0.000775125 0.000779976 0.000784528
0.00078882 0.000792883 0.000796742 0.000800422 0.000803941
0.000807316 0.000810562 0.000813691 0.000816715 0.000819643
0.000822486 0.000825254 0.000827955 0.000830602 0.000833207
0.000835789 0.000838368 0.000840973 0.000843641 0.000846418
DataSetFinish
DataSetStart
DataSetName, idvdlow
MeasurementType, DC
BatchName, opt_ex09
WaferName, wafer1
DieName, x0y0
DeviceName, n2_10
Temperature, 150
FabDate, 11 May 2010
UserDate, 11 May 2010
WaferDiameter, 0.2
DieLayout, FOUR_CROSSING
DieSize, 0.02, 0.02
DieType, PARTIAL
Attribute, W, 2e-06
Attribute, L, 1e-05
NodeNames, d g s b
Sweep, 1, V, D, LIN, 0, 5, 0.1, CALCULATED, 0.1, 0
Sweep, 2, V, G, LIN, 1.5, 5, CALCULATED, 5, 0.1, 0
Constant, V, S, 0, 0.1, 0
Constant, V, B, 0, 0.1, 0
Target, I, D
Function, gds, derivative (Vd, ID)
Plot, idvd, XY (LIN LIN), vd, id
Plot, gds, XY (LIN LOG), vd, gds
DataArray, ID
0 5.51277e-07 9.71167e-07 1.26103e-06 1.42579e-06
1.48896e-06 1.5051e-06 1.51035e-06 1.51323e-06 1.51539e-06
1.51725e-06 1.51898e-06 1.52062e-06 1.5222e-06 1.52376e-06
1.52529e-06 1.5268e-06 1.5283e-06 1.52979e-06 1.53128e-06
1.53275e-06 1.53422e-06 1.53569e-06 1.53715e-06 1.53861e-06
1.54007e-06 1.54152e-06 1.54297e-06 1.54443e-06 1.54588e-06
1.54732e-06 1.54877e-06 1.55022e-06 1.55167e-06 1.55312e-06
1.55457e-06 1.55603e-06 1.55749e-06 1.55897e-06 1.56045e-06
1.56196e-06 1.56349e-06 1.56505e-06 1.56664e-06 1.56829e-06
1.56999e-06 1.57175e-06 1.57361e-06 1.57556e-06 1.57762e-06
1.57982e-06 0 1.25935e-06 2.39177e-06 3.39764e-06
4.27741e-06 5.03154e-06 5.66058e-06 6.16532e-06 6.54719e-06
6.80975e-06 6.96366e-06 7.03649e-06 7.06776e-06 7.08368e-06
7.09411e-06 7.10223e-06 7.1092e-06 7.1155e-06 7.12138e-06
7.12697e-06 7.13234e-06 7.13756e-06 7.14265e-06 7.14765e-06
7.15257e-06 7.15742e-06 7.16222e-06 7.16698e-06 7.17169e-06
7.17638e-06 7.18103e-06 7.18566e-06 7.19026e-06 7.19485e-06
7.19942e-06 7.20398e-06 7.20852e-06 7.21306e-06 7.21758e-06
7.22211e-06 7.22664e-06 7.23118e-06 7.23574e-06 7.24033e-06
7.24497e-06 7.24966e-06 7.25445e-06 7.25934e-06 7.26438e-06
7.2696e-06 7.27504e-06 0 1.87012e-06 3.62231e-06
5.2569e-06 6.77423e-06 8.17464e-06 9.45848e-06 1.06261e-05
1.16778e-05 1.26141e-05 1.34352e-05 1.41418e-05 1.47344e-05
1.52142e-05 1.5583e-05 1.58453e-05 1.60123e-05 1.61064e-05
1.61573e-05 1.61877e-05 1.6209e-05 1.62258e-05 1.624e-05
1.62528e-05 1.62644e-05 1.62754e-05 1.62858e-05 1.62957e-05
1.63054e-05 1.63147e-05 1.63238e-05 1.63328e-05 1.63415e-05
1.63502e-05 1.63587e-05 1.63671e-05 1.63755e-05 1.63837e-05
1.63919e-05 1.64e-05 1.64081e-05 1.64162e-05 1.64241e-05
1.64321e-05 1.644e-05 1.6448e-05 1.64559e-05 1.64638e-05
1.64718e-05 1.64798e-05 1.64879e-05 0 2.40211e-06
4.69538e-06 6.8801e-06 8.95658e-06 1.09251e-05 1.27859e-05
1.45394e-05 1.61857e-05 1.77253e-05 1.91583e-05 2.04851e-05
2.1706e-05 2.28213e-05 2.38313e-05 2.47363e-05 2.55368e-05
2.62332e-05 2.68262e-05 2.73168e-05 2.77068e-05 2.80001e-05
2.82049e-05 2.83367e-05 2.84182e-05 2.84706e-05 2.85079e-05
2.85369e-05 2.85613e-05 2.85826e-05 2.86019e-05 2.86197e-05
2.86364e-05 2.86522e-05 2.86673e-05 2.86819e-05 2.8696e-05
2.87097e-05 2.8723e-05 2.87361e-05 2.87489e-05 2.87615e-05
2.87739e-05 2.87861e-05 2.87982e-05 2.88102e-05 2.8822e-05
2.88338e-05 2.88454e-05 2.8857e-05 2.88685e-05 0
2.86748e-06 5.63469e-06 8.30188e-06 1.08693e-05 1.33372e-05
1.57058e-05 1.79755e-05 2.01463e-05 2.22187e-05 2.41927e-05
2.60688e-05 2.7847e-05 2.95278e-05 3.11113e-05 3.25977e-05
3.39874e-05 3.52805e-05 3.64774e-05 3.75783e-05 3.85835e-05
3.94933e-05 4.03081e-05 4.10282e-05 4.16542e-05 4.21869e-05
4.26277e-05 4.2979e-05 4.32457e-05 4.3437e-05 4.35678e-05
4.36567e-05 4.37198e-05 4.3768e-05 4.38072e-05 4.38408e-05
4.38705e-05 4.38974e-05 4.39222e-05 4.39455e-05 4.39675e-05
4.39884e-05 4.40084e-05 4.40278e-05 4.40465e-05 4.40647e-05
4.40824e-05 4.40997e-05 4.41167e-05 4.41334e-05 4.41498e-05
DataSetFinish
DataSetStart
DataSetName, idvdlow
MeasurementType, DC
BatchName, opt_ex09
WaferName, wafer1
DieName, x0y0
DeviceName, n5_10
Temperature, 150
FabDate, 11 May 2010
UserDate, 11 May 2010
WaferDiameter, 0.2
DieLayout, FOUR_CROSSING
DieSize, 0.02, 0.02
DieType, PARTIAL
Attribute, W, 5e-06
Attribute, L, 1e-05
NodeNames, d g s b
Sweep, 1, V, D, LIN, 0, 5, 0.1, CALCULATED, 0.1, 0
Sweep, 2, V, G, LIN, 1.5, 5, CALCULATED, 5, 0.1, 0
Constant, V, S, 0, 0.1, 0
Constant, V, B, 0, 0.1, 0
Target, I, D
Function, gds, derivative (Vd, ID)
Plot, idvd, XY (LIN LIN), vd, id
Plot, gds, XY (LIN LOG), vd, gds
DataArray, ID
0 1.48426e-06 2.63466e-06 3.45409e-06 3.95157e-06
4.16919e-06 4.23042e-06 4.24865e-06 4.25766e-06 4.26404e-06
4.26941e-06 4.27429e-06 4.27891e-06 4.28336e-06 4.28771e-06
4.29198e-06 4.2962e-06 4.30037e-06 4.30452e-06 4.30864e-06
4.31274e-06 4.31682e-06 4.32089e-06 4.32495e-06 4.329e-06
4.33304e-06 4.33707e-06 4.3411e-06 4.34512e-06 4.34914e-06
4.35316e-06 4.35717e-06 4.36118e-06 4.36519e-06 4.36921e-06
4.37323e-06 4.37727e-06 4.38132e-06 4.3854e-06 4.38951e-06
4.39367e-06 4.39789e-06 4.40219e-06 4.40659e-06 4.41111e-06
4.41579e-06 4.42065e-06 4.42574e-06 4.43109e-06 4.43675e-06
4.44278e-06 0 3.28519e-06 6.24915e-06 8.8929e-06
1.12175e-05 1.32242e-05 1.49142e-05 1.62894e-05 1.73527e-05
1.81109e-05 1.85835e-05 1.88246e-05 1.89301e-05 1.89807e-05
1.90117e-05 1.90348e-05 1.90543e-05 1.90716e-05 1.90876e-05
1.91027e-05 1.91172e-05 1.91312e-05 1.91449e-05 1.91582e-05
1.91714e-05 1.91844e-05 1.91972e-05 1.92099e-05 1.92224e-05
1.92349e-05 1.92473e-05 1.92596e-05 1.92719e-05 1.92841e-05
1.92962e-05 1.93084e-05 1.93204e-05 1.93325e-05 1.93445e-05
1.93566e-05 1.93686e-05 1.93806e-05 1.93927e-05 1.94049e-05
1.94171e-05 1.94296e-05 1.94422e-05 1.94551e-05 1.94684e-05
1.94821e-05 1.94964e-05 0 4.83888e-06 9.37958e-06
1.3623e-05 1.75699e-05 2.12212e-05 2.45778e-05 2.76405e-05
3.04103e-05 3.28881e-05 3.50749e-05 3.69719e-05 3.85806e-05
3.99031e-05 4.09434e-05 4.17097e-05 4.22223e-05 4.25258e-05
4.26916e-05 4.27869e-05 4.285e-05 4.28979e-05 4.29377e-05
4.29726e-05 4.30044e-05 4.30339e-05 4.30618e-05 4.30885e-05
4.31141e-05 4.3139e-05 4.31633e-05 4.3187e-05 4.32102e-05
4.32331e-05 4.32556e-05 4.32779e-05 4.32999e-05 4.33217e-05
4.33433e-05 4.33647e-05 4.3386e-05 4.34071e-05 4.34282e-05
4.34491e-05 4.347e-05 4.34908e-05 4.35116e-05 4.35324e-05
4.35533e-05 4.35743e-05 4.35956e-05 0 6.19139e-06
1.21077e-05 1.77498e-05 2.31183e-05 2.8214e-05 3.30376e-05
3.75899e-05 4.18716e-05 4.58834e-05 4.96261e-05 5.31004e-05
5.63071e-05 5.92469e-05 6.19207e-05 6.43293e-05 6.64736e-05
6.83548e-05 6.99743e-05 7.13341e-05 7.24379e-05 7.32926e-05
7.39129e-05 7.43288e-05 7.45904e-05 7.47553e-05 7.48676e-05
7.49521e-05 7.50209e-05 7.50801e-05 7.5133e-05 7.51814e-05
7.52264e-05 7.52688e-05 7.53093e-05 7.5348e-05 7.53855e-05
7.54218e-05 7.54571e-05 7.54916e-05 7.55255e-05 7.55587e-05
7.55914e-05 7.56236e-05 7.56555e-05 7.56869e-05 7.5718e-05
7.57489e-05 7.57795e-05 7.58098e-05 7.584e-05 0
7.37397e-06 1.44947e-05 2.13627e-05 2.79787e-05 3.43434e-05
4.04574e-05 4.63213e-05 5.19357e-05 5.73013e-05 6.24187e-05
6.72886e-05 7.19115e-05 7.62882e-05 8.04191e-05 8.43051e-05
8.79467e-05 9.13445e-05 9.44993e-05 9.74116e-05 0.000100082
0.000102512 0.000104701 0.000106652 0.000108364 0.00010984
0.000111082 0.000112095 0.000112887 0.000113475 0.000113888
0.00011417 0.000114366 0.00011451 0.000114624 0.000114719
0.000114801 0.000114875 0.000114943 0.000115006 0.000115065
0.000115121 0.000115175 0.000115226 0.000115276 0.000115324
0.000115371 0.000115417 0.000115462 0.000115506 0.000115549
DataSetFinish
DataSetStart
DataSetName, idvglin
MeasurementType, DC
BatchName, opt_ex09
WaferName, wafer1
DieName, x0y0
DeviceName, n10_0p5
Temperature, 150
FabDate, 11 May 2010
UserDate, 11 May 2010
WaferDiameter, 0.2
DieLayout, FOUR_CROSSING
DieSize, 0.02, 0.02
DieType, PARTIAL
Attribute, W, 1e-05
Attribute, L, 5e-07
NodeNames, d g s b
Sweep, 1, V, G, LIN, 0, 5, 0.1, CALCULATED, 0.1, 0
Sweep, 2, V, B, LIN, 0, -3, CALCULATED, 5, 0.1, 0
Constant, V, S, 0, 0.1, 0
Constant, V, D, 0.1, 0.1, 0
Target, I, D
Function, gm, derivative (VG, ID)
Plot, idvg, XY (LIN LIN), vg, id
Plot, gm, XY (LIN LIN), vg, gm
DataArray, ID
2.87595e-11 1.00934e-10 3.53498e-10 1.23331e-09 4.27359e-09
1.4637e-08 4.92254e-08 1.61593e-07 5.17958e-07 1.62559e-06
4.81707e-06 1.20869e-05 2.38009e-05 3.82067e-05 5.34387e-05
6.84143e-05 8.27202e-05 9.62885e-05 0.000109178 0.000121472
0.000133245 0.000144557 0.00015545 0.000165959 0.000176109
0.000185923 0.000195417 0.000204609 0.000213511 0.000222139
0.000230503 0.000238615 0.000246487 0.000254127 0.000261546
0.000268753 0.000275756 0.000282564 0.000289184 0.000295623
0.000301888 0.000307987 0.000313924 0.000319707 0.00032534
0.00033083 0.000336181 0.000341399 0.000346487 0.000351451
0.000356294 3.49237e-13 1.45021e-12 6.01981e-12 2.497e-11
1.03422e-10 4.27083e-10 1.75331e-09 7.11726e-09 2.83123e-08
1.09085e-07 4.03895e-07 1.43428e-06 4.67182e-06 1.22343e-05
2.40966e-05 3.81809e-05 5.27328e-05 6.69223e-05 8.05037e-05
9.34693e-05 0.000105877 0.00011779 0.000129256 0.000140315
0.000150996 0.00016132 0.000171308 0.000180977 0.00019034
0.000199413 0.000208208 0.000216737 0.000225011 0.000233041
0.000240837 0.00024841 0.000255767 0.000262918 0.00026987
0.000276632 0.00028321 0.000289613 0.000295846 0.000301915
0.000307828 0.000313588 0.000319203 0.000324677 0.000330015
0.000335222 0.000340302 9.90532e-15 4.50517e-14 2.04912e-13
9.31882e-13 4.23649e-12 1.92455e-11 8.72912e-11 3.94619e-10
1.77181e-09 7.84724e-09 3.38815e-08 1.40427e-07 5.53006e-07
2.04721e-06 6.55284e-06 1.57433e-05 2.84299e-05 4.24433e-05
5.64773e-05 7.00448e-05 8.30475e-05 9.55134e-05 0.000107495
0.000119037 0.000130177 0.000140942 0.000151354 0.00016143
0.000171188 0.000180641 0.000189804 0.000198688 0.000207307
0.00021567 0.000223789 0.000231673 0.000239332 0.000246776
0.000254013 0.00026105 0.000267896 0.000274558 0.000281043
0.000287357 0.000293507 0.000299499 0.000305339 0.000311031
0.000316582 0.000321996 0.000327278 4.5996e-16 2.21201e-15
1.06734e-14 5.15352e-14 2.48843e-13 1.20136e-12 5.7973e-12
2.79482e-11 1.34447e-10 6.43781e-10 3.0527e-09 1.41933e-08
6.36667e-08 2.7071e-07 1.08075e-06 3.8844e-06 1.09029e-05
2.21795e-05 3.55659e-05 4.93694e-05 6.28606e-05 7.58421e-05
8.83085e-05 0.000100301 0.000111863 0.000123028 0.000133822
0.000144266 0.000154379 0.000164174 0.000173668 0.000182873
0.000191801 0.000200464 0.000208873 0.000217038 0.00022497
0.000232678 0.00024017 0.000247455 0.000254542 0.000261437
0.000268149 0.000274683 0.000281047 0.000287247 0.000293289
0.000299178 0.00030492 0.00031052 0.000315983 3.25959e-17
1.51448e-16 7.50837e-16 3.77359e-15 1.9017e-14 9.58828e-14
4.8342e-13 2.43659e-12 1.22726e-11 6.17179e-11 3.09297e-10
1.53831e-09 7.52945e-09 3.57205e-08 1.60887e-07 6.77858e-07
2.60859e-06 8.13993e-06 1.82247e-05 3.10076e-05 4.455e-05
5.79226e-05 7.08395e-05 8.32643e-05 9.52281e-05 0.000106769
0.00011792 0.000128706 0.000139147 0.00014926 0.000159061
0.000168562 0.000177777 0.000186717 0.000195395 0.000203821
0.000212005 0.000219956 0.000227686 0.000235201 0.00024251
0.000249622 0.000256543 0.000263281 0.000269843 0.000276235
0.000282464 0.000288535 0.000294454 0.000300226 0.000305857
DataSetFinish
DataSetStart
DataSetName, idvglin
MeasurementType, DC
BatchName, opt_ex09
WaferName, wafer1
DieName, x0y0
DeviceName, n10_0p8
Temperature, 150
FabDate, 11 May 2010
UserDate, 11 May 2010
WaferDiameter, 0.2
DieLayout, FOUR_CROSSING
DieSize, 0.02, 0.02
DieType, PARTIAL
Attribute, W, 1e-05
Attribute, L, 8e-07
NodeNames, d g s b
Sweep, 1, V, G, LIN, 0, 5, 0.1, CALCULATED, 0.1, 0
Sweep, 2, V, B, LIN, 0, -3, CALCULATED, 5, 0.1, 0
Constant, V, S, 0, 0.1, 0
Constant, V, D, 0.1, 0.1, 0
Target, I, D
Function, gm, derivative (VG, ID)
Plot, idvg, XY (LIN LIN), vg, id
Plot, gm, XY (LIN LIN), vg, gm
DataArray, ID
1.67751e-11 6.25648e-11 2.32689e-10 8.60878e-10 3.15484e-09
1.13761e-08 4.00401e-08 1.36984e-07 4.57742e-07 1.47548e-06
4.19123e-06 9.29944e-06 1.61667e-05 2.37667e-05 3.14374e-05
3.88974e-05 4.60752e-05 5.29807e-05 5.96446e-05 6.60965e-05
7.23593e-05 7.84497e-05 8.43797e-05 9.01585e-05 9.57932e-05
0.00010129 0.000106653 0.000111888 0.000116999 0.00012199
0.000126865 0.000131628 0.000136282 0.00014083 0.000145276
0.000149623 0.000153874 0.000158031 0.000162099 0.000166078
0.000169973 0.000173784 0.000177516 0.00018117 0.000184747
0.000188252 0.000191684 0.000195047 0.000198343 0.000201572
0.000204738 1.37174e-13 6.20574e-13 2.80631e-12 1.26793e-11
5.718e-11 2.56865e-10 1.14472e-09 5.02203e-09 2.14181e-08
8.75364e-08 3.40927e-07 1.24833e-06 3.87604e-06 8.90712e-06
1.55632e-05 2.28072e-05 3.00688e-05 3.71441e-05 4.3993e-05
5.06273e-05 5.70677e-05 6.33319e-05 6.9433e-05 7.53806e-05
8.11819e-05 8.68427e-05 9.23681e-05 9.77627e-05 0.000103031
0.000108176 0.000113203 0.000118114 0.000122915 0.000127607
0.000132194 0.00013668 0.000141068 0.00014536 0.000149559
0.000153668 0.00015769 0.000161627 0.000165482 0.000169256
0.000172953 0.000176574 0.000180122 0.000183598 0.000187005
0.000190344 0.000193618 2.83321e-15 1.42452e-14 7.16456e-14
3.60304e-13 1.81128e-12 9.09762e-12 4.56067e-11 2.27654e-10
1.12591e-09 5.46284e-09 2.55683e-08 1.13204e-07 4.69431e-07
1.75778e-06 5.14019e-06 1.07426e-05 1.75015e-05 2.45586e-05
3.1539e-05 3.83343e-05 4.49328e-05 5.13473e-05 5.75926e-05
6.36801e-05 6.96183e-05 7.54138e-05 8.10717e-05 8.65969e-05
9.19934e-05 9.72653e-05 0.000102417 0.000107451 0.000112371
0.000117182 0.000121886 0.000126486 0.000130986 0.000135389
0.000139697 0.000143913 0.00014804 0.00015208 0.000156037
0.000159911 0.000163707 0.000167425 0.000171067 0.000174637
0.000178136 0.000181566 0.000184928 1.0263e-16 5.43001e-16
2.91912e-15 1.57393e-14 8.49031e-14 4.57943e-13 2.46882e-12
1.32943e-11 7.13973e-11 3.81116e-10 2.00718e-09 1.02786e-08
5.00197e-08 2.26501e-07 9.38322e-07 3.22106e-06 7.86433e-06
1.41203e-05 2.09531e-05 2.78249e-05 3.45543e-05 4.1104e-05
4.74787e-05 5.36901e-05 5.97484e-05 6.56613e-05 7.14347e-05
7.70737e-05 8.25824e-05 8.79649e-05 9.3225e-05 9.83664e-05
0.000103393 0.000108307 0.000113113 0.000117814 0.000122413
0.000126913 0.000131316 0.000135627 0.000139846 0.000143978
0.000148023 0.000151986 0.000155868 0.000159671 0.000163398
0.00016705 0.00017063 0.000174139 0.00017758 0
3.22026e-17 1.67851e-16 9.37937e-16 5.30964e-15 3.01257e-14
1.70972e-13 9.70055e-13 5.49952e-12 3.1119e-11 1.75301e-10
9.77371e-10 5.32666e-09 2.77458e-08 1.34373e-07 5.94147e-07
2.24762e-06 6.16298e-06 1.19766e-05 1.85942e-05 2.5353e-05
3.20087e-05 3.85009e-05 4.48265e-05 5.09945e-05 5.70138e-05
6.28914e-05 6.86329e-05 7.42428e-05 7.97252e-05 8.50838e-05
9.03223e-05 9.54442e-05 0.000100453 0.000105352 0.000110144
0.000114833 0.000119421 0.000123911 0.000128307 0.000132611
0.000136825 0.000140952 0.000144995 0.000148955 0.000152836
0.000156639 0.000160366 0.00016402 0.000167603 0.000171115
DataSetFinish
DataSetStart
DataSetName, idvglin
MeasurementType, DC
BatchName, opt_ex09
WaferName, wafer1
DieName, x0y0
DeviceName, n10_1
Temperature, 150
FabDate, 11 May 2010
UserDate, 11 May 2010
WaferDiameter, 0.2
DieLayout, FOUR_CROSSING
DieSize, 0.02, 0.02
DieType, PARTIAL
Attribute, W, 1e-05
Attribute, L, 1e-06
NodeNames, d g s b
Sweep, 1, V, G, LIN, 0, 5, 0.1, CALCULATED, 0.1, 0
Sweep, 2, V, B, LIN, 0, -3, CALCULATED, 5, 0.1, 0
Constant, V, S, 0, 0.1, 0
Constant, V, D, 0.1, 0.1, 0
Target, I, D
Function, gm, derivative (VG, ID)
Plot, idvg, XY (LIN LIN), vg, id
Plot, gm, XY (LIN LIN), vg, gm
DataArray, ID
1.40771e-11 5.33433e-11 2.01502e-10 7.5669e-10 2.81134e-09
1.02585e-08 3.64618e-08 1.25888e-07 4.24547e-07 1.3655e-06
3.7551e-06 7.93181e-06 1.32657e-05 1.90213e-05 2.4777e-05
3.03702e-05 3.57671e-05 4.09797e-05 4.60299e-05 5.0937e-05
5.57157e-05 6.03763e-05 6.49263e-05 6.93712e-05 7.37155e-05
7.79628e-05 8.21163e-05 8.6179e-05 9.01535e-05 9.40424e-05
9.78483e-05 0.000101574 0.00010522 0.000108791 0.000112288
0.000115712 0.000119067 0.000122353 0.000125574 0.00012873
0.000131823 0.000134855 0.000137828 0.000140743 0.000143601
0.000146405 0.000149155 0.000151853 0.000154501 0.000157098
0.000159648 9.38172e-14 4.35587e-13 2.02155e-12 9.37329e-12
4.33753e-11 1.99884e-10 9.1317e-10 4.10076e-09 1.78537e-08
7.42375e-08 2.93318e-07 1.07921e-06 3.27945e-06 7.26837e-06
1.23564e-05 1.78073e-05 2.32503e-05 2.85619e-05 3.37209e-05
3.87364e-05 4.36218e-05 4.83882e-05 5.30435e-05 5.75933e-05
6.2042e-05 6.63931e-05 7.06496e-05 7.48144e-05 7.889e-05
8.28791e-05 8.67839e-05 9.06069e-05 9.43504e-05 9.80165e-05
0.000101607 0.000105125 0.000108572 0.000111949 0.000115259
0.000118503 0.000121684 0.000124802 0.00012786 0.000130859
0.000133801 0.000136687 0.000139518 0.000142296 0.000145022
0.000147697 0.000150324 1.61725e-15 8.4007e-15 4.36636e-14
2.26938e-13 1.17907e-12 6.1206e-12 3.17095e-11 1.63552e-10
8.35366e-10 4.18007e-09 2.01173e-08 9.11734e-08 3.84931e-07
1.44764e-06 4.15201e-06 8.46696e-06 1.35677e-05 1.88578e-05
2.40917e-05 2.92013e-05 3.418e-05 3.90361e-05 4.37783e-05
4.84136e-05 5.29468e-05 5.73817e-05 6.17214e-05 6.59688e-05
7.01263e-05 7.41965e-05 7.81817e-05 8.20842e-05 8.59063e-05
8.96502e-05 9.33179e-05 9.69115e-05 0.000100433 0.000103885
0.000107268 0.000110584 0.000113836 0.000117025 0.000120153
0.000123221 0.00012623 0.000129183 0.00013208 0.000134924
0.000137714 0.000140454 0.000143143 5.11309e-17 2.75375e-16
1.53255e-15 8.58036e-15 4.8087e-14 2.69491e-13 1.50962e-12
8.44688e-12 4.71373e-11 2.61418e-10 1.42959e-09 7.58858e-09
3.81296e-08 1.772e-07 7.46726e-07 2.55833e-06 6.14171e-06
1.08701e-05 1.59923e-05 2.11402e-05 2.6194e-05 3.11291e-05
3.59481e-05 4.06577e-05 4.52639e-05 4.9771e-05 5.41825e-05
5.85011e-05 6.27295e-05 6.68699e-05 7.09248e-05 7.48964e-05
7.87869e-05 8.25984e-05 8.63331e-05 8.9993e-05 9.358e-05
9.70961e-05 0.000100543 0.000103923 0.000107237 0.000110488
0.000113676 0.000116804 0.000119873 0.000122885 0.00012584
0.000128741 0.000131588 0.000134383 0.000137128 0
1.59309e-17 7.86156e-17 4.49945e-16 2.64956e-15 1.56785e-14
9.28409e-14 5.49667e-13 3.25191e-12 1.92033e-11 1.12897e-10
6.56798e-10 3.73174e-09 2.02071e-08 1.01133e-07 4.58212e-07
1.75044e-06 4.76191e-06 9.15435e-06 1.41136e-05 1.91737e-05
2.41678e-05 2.90549e-05 3.3832e-05 3.85039e-05 4.30756e-05
4.75511e-05 5.19334e-05 5.62251e-05 6.04286e-05 6.45461e-05
6.85798e-05 7.25318e-05 7.64044e-05 8.01995e-05 8.39191e-05
8.75653e-05 9.11399e-05 9.46448e-05 9.80818e-05 0.000101453
0.000104759 0.000108003 0.000111185 0.000114308 0.000117372
0.00012038 0.000123333 0.000126232 0.000129078 0.000131872
DataSetFinish
DataSetStart
DataSetName, idvglin
MeasurementType, DC
BatchName, opt_ex09
WaferName, wafer1
DieName, x0y0
DeviceName, n10_10
Temperature, 150
FabDate, 11 May 2010
UserDate, 11 May 2010
WaferDiameter, 0.2
DieLayout, FOUR_CROSSING
DieSize, 0.02, 0.02
DieType, PARTIAL
Attribute, W, 1e-05
Attribute, L, 1e-05
NodeNames, d g s b
Sweep, 1, V, G, LIN, 0, 5, 0.1, CALCULATED, 0.1, 0
Sweep, 2, V, B, LIN, 0, -3, CALCULATED, 5, 0.1, 0
Constant, V, S, 0, 0.1, 0
Constant, V, D, 0.1, 0.1, 0
Target, I, D
Function, gm, derivative (VG, ID)
Plot, idvg, XY (LIN LIN), vg, id
Plot, gm, XY (LIN LIN), vg, gm
DataArray, ID
5.70713e-12 2.19291e-11 8.36479e-11 3.14921e-10 1.16051e-09
4.15436e-09 1.4467e-08 4.92269e-08 1.55826e-07 4.02375e-07
7.88718e-07 1.25054e-06 1.7351e-06 2.21666e-06 2.68661e-06
3.14381e-06 3.58945e-06 4.02502e-06 4.45172e-06 4.87042e-06
5.28168e-06 5.6859e-06 6.08335e-06 6.47423e-06 6.85872e-06
7.23694e-06 7.60905e-06 7.97514e-06 8.33535e-06 8.68979e-06
9.03857e-06 9.38181e-06 9.7196e-06 1.00521e-05 1.03793e-05
1.07014e-05 1.10184e-05 1.13306e-05 1.16379e-05 1.19404e-05
1.22383e-05 1.25317e-05 1.28205e-05 1.3105e-05 1.33851e-05
1.3661e-05 1.39328e-05 1.42004e-05 1.44641e-05 1.47239e-05
1.49798e-05 3.2624e-14 1.56841e-13 7.53272e-13 3.60992e-12
1.72188e-11 8.13238e-11 3.76583e-10 1.6833e-09 7.15295e-09
2.88025e-08 1.0648e-07 3.13798e-07 6.65021e-07 1.09504e-06
1.54927e-06 2.00306e-06 2.44882e-06 2.88539e-06 3.31336e-06
3.73353e-06 4.14648e-06 4.55261e-06 4.9522e-06 5.34541e-06
5.7324e-06 6.11329e-06 6.48818e-06 6.85718e-06 7.22041e-06
7.57796e-06 7.92995e-06 8.27646e-06 8.61761e-06 8.9535e-06
9.28422e-06 9.60987e-06 9.93054e-06 1.02463e-05 1.05573e-05
1.08636e-05 1.11653e-05 1.14625e-05 1.17552e-05 1.20436e-05
1.23276e-05 1.26075e-05 1.28833e-05 1.31549e-05 1.34227e-05
1.36865e-05 1.39464e-05 4.3066e-16 2.34574e-15 1.28087e-14
6.99485e-14 3.81701e-13 2.07882e-12 1.12704e-11 6.04798e-11
3.17468e-10 1.59683e-09 7.51775e-09 3.27532e-08 1.25441e-07
3.58098e-07 7.20338e-07 1.14321e-06 1.58161e-06 2.01788e-06
2.44719e-06 2.86895e-06 3.28351e-06 3.69133e-06 4.09271e-06
4.48786e-06 4.87692e-06 5.26e-06 5.63721e-06 6.00864e-06
6.37439e-06 6.73454e-06 7.0892e-06 7.43847e-06 7.78243e-06
8.12119e-06 8.45483e-06 8.78346e-06 9.10715e-06 9.42601e-06
9.74011e-06 1.00496e-05 1.03544e-05 1.06548e-05 1.09507e-05
1.12424e-05 1.15297e-05 1.18129e-05 1.2092e-05 1.2367e-05
1.26381e-05 1.29053e-05 1.31687e-05 1.19702e-17 5.92761e-17
3.41635e-16 2.02684e-15 1.20828e-14 7.20604e-14 4.29387e-13
2.55237e-12 1.50828e-11 8.79073e-11 4.96993e-10 2.65013e-09
1.29658e-08 5.70344e-08 2.02222e-07 4.94553e-07 8.82059e-07
1.30373e-06 1.73051e-06 2.15292e-06 2.56881e-06 2.97808e-06
3.38098e-06 3.77775e-06 4.16856e-06 4.55351e-06 4.93271e-06
5.30623e-06 5.67417e-06 6.03659e-06 6.3936e-06 6.74527e-06
7.09171e-06 7.43299e-06 7.7692e-06 8.10044e-06 8.4268e-06
8.74835e-06 9.06519e-06 9.3774e-06 9.68506e-06 9.98826e-06
1.02871e-05 1.05816e-05 1.08718e-05 1.11579e-05 1.14399e-05
1.17179e-05 1.1992e-05 1.22621e-05 1.25285e-05 0
0 1.56396e-17 8.25541e-17 5.09391e-16 3.23183e-15
2.05913e-14 1.31208e-13 8.34867e-13 5.29192e-12 3.32281e-11
2.04022e-10 1.19371e-09 6.41788e-09 3.09063e-08 1.25302e-07
3.59405e-07 7.12579e-07 1.11749e-06 1.53492e-06 1.95068e-06
2.36097e-06 2.76516e-06 3.16333e-06 3.55564e-06 3.94223e-06
4.32317e-06 4.69855e-06 5.06843e-06 5.43289e-06 5.792e-06
6.14585e-06 6.49452e-06 6.83808e-06 7.17663e-06 7.51025e-06
7.83902e-06 8.16303e-06 8.48236e-06 8.79708e-06 9.10729e-06
9.41305e-06 9.71445e-06 1.00116e-05 1.03045e-05 1.05932e-05
1.08779e-05 1.11586e-05 1.14353e-05 1.17082e-05 1.19773e-05
DataSetFinish
DataSetStart
DataSetName, idvglin
MeasurementType, DC
BatchName, opt_ex09
WaferName, wafer1
DieName, x0y0
DeviceName, n10_2
Temperature, 150
FabDate, 11 May 2010
UserDate, 11 May 2010
WaferDiameter, 0.2
DieLayout, FOUR_CROSSING
DieSize, 0.02, 0.02
DieType, PARTIAL
Attribute, W, 1e-05
Attribute, L, 2e-06
NodeNames, d g s b
Sweep, 1, V, G, LIN, 0, 5, 0.1, CALCULATED, 0.1, 0
Sweep, 2, V, B, LIN, 0, -3, CALCULATED, 5, 0.1, 0
Constant, V, S, 0, 0.1, 0
Constant, V, D, 0.1, 0.1, 0
Target, I, D
Function, gm, derivative (VG, ID)
Plot, idvg, XY (LIN LIN), vg, id
Plot, gm, XY (LIN LIN), vg, gm
DataArray, ID
1.23806e-11 4.76574e-11 1.82595e-10 6.93548e-10 2.59437e-09
9.47477e-09 3.35768e-08 1.15946e-07 3.88445e-07 1.16818e-06
2.75821e-06 5.00302e-06 7.54661e-06 1.015e-05 1.27088e-05
1.51934e-05 1.7604e-05 1.99486e-05 2.22355e-05 2.4471e-05
2.66595e-05 2.88041e-05 3.0907e-05 3.29698e-05 3.49937e-05
3.69798e-05 3.89292e-05 4.08426e-05 4.2721e-05 4.45652e-05
4.6376e-05 4.81541e-05 4.99004e-05 5.16154e-05 5.33001e-05
5.4955e-05 5.65809e-05 5.81783e-05 5.9748e-05 6.12906e-05
6.28066e-05 6.42967e-05 6.57614e-05 6.72012e-05 6.86168e-05
7.00087e-05 7.13773e-05 7.27232e-05 7.40468e-05 7.53486e-05
7.66292e-05 6.34317e-14 3.04091e-13 1.45696e-12 6.97168e-12
3.32676e-11 1.57808e-10 7.39423e-10 3.38265e-09 1.48586e-08
6.18931e-08 2.43535e-07 8.49799e-07 2.24471e-06 4.31982e-06
6.70268e-06 9.15259e-06 1.15736e-05 1.39403e-05 1.62517e-05
1.85122e-05 2.07263e-05 2.28972e-05 2.50271e-05 2.71176e-05
2.91697e-05 3.11846e-05 3.3163e-05 3.51058e-05 3.70137e-05
3.88877e-05 4.07283e-05 4.25363e-05 4.43125e-05 4.60576e-05
4.77723e-05 4.94572e-05 5.11131e-05 5.27405e-05 5.434e-05
5.59124e-05 5.74582e-05 5.8978e-05 6.04723e-05 6.19417e-05
6.33867e-05 6.48079e-05 6.62057e-05 6.75806e-05 6.89332e-05
7.02639e-05 7.15731e-05 8.10952e-16 4.40041e-15 2.39088e-14
1.29911e-13 7.05572e-13 3.82782e-12 2.07123e-11 1.11409e-10
5.91361e-10 3.05314e-09 1.49856e-08 6.85048e-08 2.87787e-07
1.01349e-06 2.54487e-06 4.65136e-06 6.97844e-06 9.33893e-06
1.16679e-05 1.39505e-05 1.61868e-05 1.83795e-05 2.05313e-05
2.2644e-05 2.47187e-05 2.67565e-05 2.87582e-05 3.07246e-05
3.26564e-05 3.45543e-05 3.6419e-05 3.82513e-05 4.00518e-05
4.18213e-05 4.35604e-05 4.52697e-05 4.695e-05 4.86018e-05
5.02257e-05 5.18225e-05 5.33925e-05 5.49365e-05 5.6455e-05
5.79485e-05 5.94175e-05 6.08627e-05 6.22843e-05 6.3683e-05
6.50593e-05 6.64135e-05 6.77462e-05 2.0498e-17 1.09365e-16
6.35797e-16 3.75414e-15 2.22238e-14 1.31589e-13 7.78762e-13
4.60249e-12 2.711e-11 1.58421e-10 9.09007e-10 5.01772e-09
2.58568e-08 1.21612e-07 5.03241e-07 1.57279e-06 3.38157e-06
5.56896e-06 7.86315e-06 1.0153e-05 1.24064e-05 1.46178e-05
1.67883e-05 1.89197e-05 2.10135e-05 2.30707e-05 2.50923e-05
2.70788e-05 2.9031e-05 3.09495e-05 3.2835e-05 3.46883e-05
3.65098e-05 3.83004e-05 4.00607e-05 4.17912e-05 4.34926e-05
4.51656e-05 4.68108e-05 4.84287e-05 5.00199e-05 5.1585e-05
5.31245e-05 5.4639e-05 5.6129e-05 5.7595e-05 5.90375e-05
6.04569e-05 6.18538e-05 6.32287e-05 6.45818e-05 0
0 2.69059e-17 1.5295e-16 9.49153e-16 5.97833e-15
3.77401e-14 2.38254e-13 1.50289e-12 9.45979e-12 5.92254e-11
3.66013e-10 2.19549e-09 1.23978e-08 6.36802e-08 2.90047e-07
1.05122e-06 2.59622e-06 4.64608e-06 6.87331e-06 9.12375e-06
1.13478e-05 1.35342e-05 1.5682e-05 1.77925e-05 1.98667e-05
2.19056e-05 2.39099e-05 2.58801e-05 2.7817e-05 2.97211e-05
3.15931e-05 3.34335e-05 3.5243e-05 3.70223e-05 3.87718e-05
4.04924e-05 4.21845e-05 4.38487e-05 4.54857e-05 4.7096e-05
4.86801e-05 5.02387e-05 5.17721e-05 5.32811e-05 5.47659e-05
5.62272e-05 5.76654e-05 5.9081e-05 6.04744e-05 6.18461e-05
DataSetFinish
DataSetStart
DataSetName, idvglin
MeasurementType, DC
BatchName, opt_ex09
WaferName, wafer1
DieName, x0y0
DeviceName, n10_5
Temperature, 150
FabDate, 11 May 2010
UserDate, 11 May 2010
WaferDiameter, 0.2
DieLayout, FOUR_CROSSING
DieSize, 0.02, 0.02
DieType, PARTIAL
Attribute, W, 1e-05
Attribute, L, 5e-06
NodeNames, d g s b
Sweep, 1, V, G, LIN, 0, 5, 0.1, CALCULATED, 0.1, 0
Sweep, 2, V, B, LIN, 0, -3, CALCULATED, 5, 0.1, 0
Constant, V, S, 0, 0.1, 0
Constant, V, D, 0.1, 0.1, 0
Target, I, D
Function, gm, derivative (VG, ID)
Plot, idvg, XY (LIN LIN), vg, id
Plot, gm, XY (LIN LIN), vg, gm
DataArray, ID
9.22193e-12 3.54661e-11 1.35509e-10 5.11652e-10 1.89399e-09
6.81693e-09 2.38371e-08 8.14901e-08 2.6311e-07 7.09995e-07
1.45558e-06 2.37827e-06 3.3612e-06 4.34332e-06 5.30268e-06
6.23534e-06 7.14336e-06 8.02984e-06 8.89742e-06 9.74798e-06
1.05828e-05 1.14028e-05 1.22085e-05 1.30004e-05 1.37789e-05
1.45443e-05 1.52969e-05 1.60369e-05 1.67646e-05 1.74803e-05
1.81842e-05 1.88766e-05 1.95576e-05 2.02276e-05 2.08867e-05
2.15352e-05 2.21732e-05 2.2801e-05 2.34188e-05 2.40268e-05
2.46252e-05 2.52141e-05 2.57938e-05 2.63645e-05 2.69262e-05
2.74793e-05 2.80238e-05 2.85599e-05 2.90878e-05 2.96077e-05
3.01196e-05 5.05081e-14 2.42847e-13 1.16662e-12 5.59376e-12
2.67115e-11 1.26454e-10 5.88242e-10 2.64966e-09 1.13688e-08
4.62174e-08 1.74591e-07 5.41863e-07 1.2136e-06 2.07103e-06
2.99198e-06 3.91698e-06 4.82635e-06 5.71642e-06 6.58818e-06
7.44327e-06 8.28302e-06 9.10834e-06 9.91982e-06 1.07179e-05
1.15028e-05 1.2275e-05 1.30345e-05 1.37817e-05 1.45169e-05
1.52401e-05 1.59517e-05 1.66519e-05 1.73409e-05 1.8019e-05
1.86863e-05 1.9343e-05 1.99894e-05 2.06256e-05 2.12519e-05
2.18685e-05 2.24755e-05 2.30731e-05 2.36616e-05 2.4241e-05
2.48116e-05 2.53735e-05 2.59269e-05 2.64719e-05 2.70088e-05
2.75376e-05 2.80585e-05 6.49152e-16 3.53969e-15 1.93324e-14
1.05587e-13 5.76294e-13 3.14012e-12 1.70432e-11 9.16865e-11
4.83812e-10 2.45696e-09 1.17204e-08 5.18137e-08 2.04912e-07
6.22942e-07 1.32422e-06 2.17229e-06 3.06288e-06 3.95232e-06
4.82782e-06 5.68737e-06 6.53161e-06 7.36149e-06 8.17772e-06
8.98078e-06 9.77099e-06 1.05486e-05 1.13139e-05 1.2067e-05
1.28082e-05 1.35377e-05 1.42557e-05 1.49624e-05 1.5658e-05
1.63427e-05 1.70167e-05 1.76803e-05 1.83336e-05 1.89769e-05
1.96102e-05 2.02339e-05 2.08481e-05 2.14529e-05 2.20486e-05
2.26353e-05 2.32132e-05 2.37824e-05 2.43432e-05 2.48956e-05
2.54399e-05 2.59761e-05 2.65045e-05 1.65645e-17 8.66973e-17
5.05295e-16 3.00359e-15 1.79117e-14 1.06837e-13 6.36762e-13
3.78731e-12 2.2413e-11 1.31075e-10 7.46467e-10 4.03251e-09
2.00621e-08 9.0247e-08 3.37186e-07 8.8287e-07 1.64859e-06
2.50093e-06 3.36986e-06 4.2312e-06 5.07905e-06 5.91284e-06
6.7331e-06 7.54036e-06 8.335e-06 9.11729e-06 9.88744e-06
1.06456e-05 1.13921e-05 1.2127e-05 1.28505e-05 1.35628e-05
1.42642e-05 1.49547e-05 1.56347e-05 1.63043e-05 1.69637e-05
1.7613e-05 1.82526e-05 1.88825e-05 1.95029e-05 2.01141e-05
2.07161e-05 2.13092e-05 2.18935e-05 2.24692e-05 2.30364e-05
2.35953e-05 2.41461e-05 2.46888e-05 2.52237e-05 0
0 2.13918e-17 1.19242e-16 7.43392e-16 4.72423e-15
3.01083e-14 1.91878e-13 1.22134e-12 7.74885e-12 4.87697e-11
3.01106e-10 1.78184e-09 9.75218e-09 4.79768e-08 2.0276e-07
6.24927e-07 1.31169e-06 2.12551e-06 2.97399e-06 3.82151e-06
4.65805e-06 5.48171e-06 6.2926e-06 7.09107e-06 7.87741e-06
8.65183e-06 9.41451e-06 1.01656e-05 1.09053e-05 1.16338e-05
1.23512e-05 1.30577e-05 1.37535e-05 1.44389e-05 1.51139e-05
1.57787e-05 1.64337e-05 1.70788e-05 1.77144e-05 1.83405e-05
1.89574e-05 1.95652e-05 2.01641e-05 2.07542e-05 2.13357e-05
2.19088e-05 2.24736e-05 2.30303e-05 2.3579e-05 2.41198e-05
DataSetFinish
DataSetStart
DataSetName, idvglin
MeasurementType, DC
BatchName, opt_ex09
WaferName, wafer1
DieName, x0y0
DeviceName, n2_0p5
Temperature, 150
FabDate, 11 May 2010
UserDate, 11 May 2010
WaferDiameter, 0.2
DieLayout, FOUR_CROSSING
DieSize, 0.02, 0.02
DieType, PARTIAL
Attribute, W, 2e-06
Attribute, L, 5e-07
NodeNames, d g s b
Sweep, 1, V, G, LIN, 0, 5, 0.1, CALCULATED, 0.1, 0
Sweep, 2, V, B, LIN, 0, -3, CALCULATED, 5, 0.1, 0
Constant, V, S, 0, 0.1, 0
Constant, V, D, 0.1, 0.1, 0
Target, I, D
Function, gm, derivative (VG, ID)
Plot, idvg, XY (LIN LIN), vg, id
Plot, gm, XY (LIN LIN), vg, gm
DataArray, ID
1.3999e-12 4.91901e-12 1.7266e-11 6.04849e-11 2.11119e-10
7.32133e-10 2.51086e-09 8.46113e-09 2.78458e-08 8.94872e-08
2.8202e-07 8.46578e-07 2.18167e-06 4.41457e-06 7.21831e-06
1.02104e-05 1.31612e-05 1.59801e-05 1.865e-05 2.11818e-05
2.35924e-05 2.5897e-05 2.81077e-05 3.02337e-05 3.22817e-05
3.42574e-05 3.61651e-05 3.80086e-05 3.97913e-05 4.15161e-05
4.31858e-05 4.48028e-05 4.63697e-05 4.78885e-05 4.93614e-05
5.07903e-05 5.21771e-05 5.35235e-05 5.48312e-05 5.61018e-05
5.73368e-05 5.85375e-05 5.97054e-05 6.08416e-05 6.19473e-05
6.30238e-05 6.40722e-05 6.50933e-05 6.60883e-05 6.70581e-05
6.80036e-05 1.03753e-14 4.30895e-14 1.78938e-13 7.4287e-13
3.08224e-12 1.27731e-11 5.2805e-11 2.17251e-10 8.85507e-10
3.54787e-09 1.38178e-08 5.18081e-08 1.86818e-07 6.34425e-07
1.81841e-06 3.9264e-06 6.61208e-06 9.47365e-06 1.22941e-05
1.49986e-05 1.75769e-05 2.00386e-05 2.23965e-05 2.46616e-05
2.68422e-05 2.89447e-05 3.09741e-05 3.29345e-05 3.48297e-05
3.66627e-05 3.84366e-05 4.01541e-05 4.18177e-05 4.34297e-05
4.49925e-05 4.65082e-05 4.79788e-05 4.94062e-05 5.07921e-05
5.21383e-05 5.34464e-05 5.47178e-05 5.59542e-05 5.71567e-05
5.83267e-05 5.94655e-05 6.05743e-05 6.1654e-05 6.27059e-05
6.37309e-05 6.473e-05 1.97266e-16 8.91338e-16 4.04861e-15
1.84099e-14 8.37252e-14 3.80698e-13 1.73015e-12 7.85432e-12
3.55731e-11 1.60332e-10 7.15502e-10 3.13227e-09 1.3262e-08
5.35728e-08 2.05532e-07 7.24007e-07 2.05275e-06 4.26425e-06
6.94174e-06 9.72256e-06 1.24412e-05 1.50498e-05 1.75459e-05
1.99388e-05 2.22387e-05 2.44538e-05 2.65903e-05 2.86533e-05
3.06468e-05 3.25744e-05 3.44393e-05 3.62444e-05 3.79924e-05
3.96858e-05 4.13271e-05 4.29185e-05 4.44621e-05 4.596e-05
4.74141e-05 4.88261e-05 5.01979e-05 5.15309e-05 5.28268e-05
5.40871e-05 5.5313e-05 5.6506e-05 5.76672e-05 5.87979e-05
5.98991e-05 6.0972e-05 6.20177e-05 0 3.26669e-17
1.48384e-16 7.07242e-16 3.40617e-15 1.64394e-14 7.93684e-14
3.83117e-13 1.84826e-12 8.90481e-12 4.27807e-11 2.04274e-10
9.63036e-10 4.4285e-09 1.9517e-08 8.12805e-08 3.17151e-07
1.07966e-06 2.75763e-06 5.16553e-06 7.85607e-06 1.05607e-05
1.31808e-05 1.56957e-05 1.81092e-05 2.04301e-05 2.26662e-05
2.48238e-05 2.69078e-05 2.89222e-05 3.08706e-05 3.27561e-05
3.45816e-05 3.63497e-05 3.8063e-05 3.97239e-05 4.13346e-05
4.28972e-05 4.44137e-05 4.58862e-05 4.73163e-05 4.87058e-05
5.00563e-05 5.13694e-05 5.26466e-05 5.38891e-05 5.50984e-05
5.62756e-05 5.74221e-05 5.85388e-05 5.9627e-05 0
0 1.04536e-17 3.97811e-17 1.87683e-16 9.33559e-16
4.6949e-15 2.36611e-14 1.19279e-13 6.01125e-13 3.02698e-12
1.5214e-11 7.61515e-11 3.77755e-10 1.83919e-09 8.64303e-09
3.84276e-08 1.59947e-07 6.04492e-07 1.81933e-06 3.91817e-06
6.48152e-06 9.14899e-06 1.17652e-05 1.42868e-05 1.67102e-05
1.90421e-05 2.12899e-05 2.34595e-05 2.5556e-05 2.75831e-05
2.95444e-05 3.14429e-05 3.32814e-05 3.50626e-05 3.6789e-05
3.84628e-05 4.00865e-05 4.1662e-05 4.31914e-05 4.46765e-05
4.61192e-05 4.75212e-05 4.88841e-05 5.02094e-05 5.14986e-05
5.27531e-05 5.39742e-05 5.51631e-05 5.63211e-05 5.74493e-05
DataSetFinish
DataSetStart
DataSetName, idvglin
MeasurementType, DC
BatchName, opt_ex09
WaferName, wafer1
DieName, x0y0
DeviceName, n2_10
Temperature, 150
FabDate, 11 May 2010
UserDate, 11 May 2010
WaferDiameter, 0.2
DieLayout, FOUR_CROSSING
DieSize, 0.02, 0.02
DieType, PARTIAL
Attribute, W, 2e-06
Attribute, L, 1e-05
NodeNames, d g s b
Sweep, 1, V, G, LIN, 0, 5, 0.1, CALCULATED, 0.1, 0
Sweep, 2, V, B, LIN, 0, -3, CALCULATED, 5, 0.1, 0
Constant, V, S, 0, 0.1, 0
Constant, V, D, 0.1, 0.1, 0
Target, I, D
Function, gm, derivative (VG, ID)
Plot, idvg, XY (LIN LIN), vg, id
Plot, gm, XY (LIN LIN), vg, gm
DataArray, ID
4.69584e-13 1.80922e-12 6.9362e-12 2.63494e-11 9.85088e-11
3.59288e-10 1.27177e-09 4.39353e-09 1.47157e-08 4.39517e-08
1.02513e-07 1.83964e-07 2.75592e-07 3.69247e-07 4.6146e-07
5.51277e-07 6.38715e-07 7.2405e-07 8.07552e-07 8.89427e-07
9.69816e-07 1.04881e-06 1.12649e-06 1.20288e-06 1.27803e-06
1.35196e-06 1.4247e-06 1.49628e-06 1.56672e-06 1.63603e-06
1.70425e-06 1.77139e-06 1.83747e-06 1.90252e-06 1.96655e-06
2.02958e-06 2.09164e-06 2.15273e-06 2.21289e-06 2.27212e-06
2.33045e-06 2.38788e-06 2.44445e-06 2.50016e-06 2.55503e-06
2.60908e-06 2.66232e-06 2.71476e-06 2.76643e-06 2.81733e-06
2.86748e-06 2.17975e-15 1.04794e-14 5.03653e-14 2.41761e-13
1.15725e-12 5.50625e-12 2.58742e-11 1.1867e-10 5.22407e-10
2.18105e-09 8.60996e-09 3.0165e-08 7.99727e-08 1.54188e-07
2.39516e-07 3.27449e-07 4.14604e-07 5.00078e-07 5.83816e-07
6.65962e-07 7.46656e-07 8.26e-07 9.04059e-07 9.80878e-07
1.05649e-06 1.13092e-06 1.20418e-06 1.27631e-06 1.34731e-06
1.41722e-06 1.48604e-06 1.5538e-06 1.62053e-06 1.68622e-06
1.75092e-06 1.81463e-06 1.87738e-06 1.93917e-06 2.00004e-06
2.05999e-06 2.11904e-06 2.17721e-06 2.23452e-06 2.29098e-06
2.34661e-06 2.40142e-06 2.45543e-06 2.50864e-06 2.56109e-06
2.61277e-06 2.6637e-06 2.60321e-17 1.34669e-16 7.28283e-16
3.97119e-15 2.16779e-14 1.18242e-13 6.43382e-13 3.4809e-12
1.8594e-11 9.66917e-11 4.78496e-10 2.20644e-09 9.36927e-09
3.36695e-08 8.66612e-08 1.61061e-07 2.44069e-07 3.28733e-07
4.12588e-07 4.95038e-07 5.76054e-07 6.55722e-07 7.34118e-07
8.11297e-07 8.87292e-07 9.6213e-07 1.03583e-06 1.10841e-06
1.1799e-06 1.25029e-06 1.31963e-06 1.38792e-06 1.45518e-06
1.52142e-06 1.58668e-06 1.65096e-06 1.71429e-06 1.77667e-06
1.83813e-06 1.89869e-06 1.95835e-06 2.01714e-06 2.07508e-06
2.13217e-06 2.18843e-06 2.24388e-06 2.29853e-06 2.35239e-06
2.40549e-06 2.45782e-06 2.50942e-06 0 0
1.90863e-17 1.01748e-16 5.95083e-16 3.53869e-15 2.10925e-14
1.25627e-13 7.46052e-13 4.39892e-12 2.55092e-11 1.42712e-10
7.47609e-10 3.57878e-09 1.52065e-08 4.98187e-08 1.11759e-07
1.88845e-07 2.70718e-07 3.52937e-07 4.34155e-07 5.14103e-07
5.92793e-07 6.70277e-07 7.46599e-07 8.21786e-07 8.95859e-07
9.68836e-07 1.04073e-06 1.11156e-06 1.18134e-06 1.25009e-06
1.31782e-06 1.38455e-06 1.45031e-06 1.51509e-06 1.57893e-06
1.64183e-06 1.70382e-06 1.76491e-06 1.82511e-06 1.88445e-06
1.94293e-06 2.00058e-06 2.0574e-06 2.11341e-06 2.16863e-06
2.22307e-06 2.27674e-06 2.32965e-06 2.38183e-06 0
0 0 0 2.48681e-17 1.41417e-16
8.84762e-16 5.62428e-15 3.5819e-14 2.27797e-13 1.44228e-12
9.03127e-12 5.51056e-11 3.18436e-10 1.68078e-09 7.90653e-09
3.04454e-08 8.08194e-08 1.5166e-07 2.30572e-07 3.11132e-07
3.91148e-07 4.70068e-07 5.47818e-07 6.24423e-07 6.99913e-07
7.74312e-07 8.47636e-07 9.19899e-07 9.91114e-07 1.0613e-06
1.13046e-06 1.19862e-06 1.26579e-06 1.33199e-06 1.39723e-06
1.46153e-06 1.52491e-06 1.58738e-06 1.64895e-06 1.70965e-06
1.76948e-06 1.82847e-06 1.88662e-06 1.94396e-06 2.00048e-06
2.05622e-06 2.11118e-06 2.16537e-06 2.21882e-06 2.27152e-06
DataSetFinish
DataSetStart
DataSetName, idvglin
MeasurementType, DC
BatchName, opt_ex09
WaferName, wafer1
DieName, x0y0
DeviceName, n5_10
Temperature, 150
FabDate, 11 May 2010
UserDate, 11 May 2010
WaferDiameter, 0.2
DieLayout, FOUR_CROSSING
DieSize, 0.02, 0.02
DieType, PARTIAL
Attribute, W, 5e-06
Attribute, L, 1e-05
NodeNames, d g s b
Sweep, 1, V, G, LIN, 0, 5, 0.1, CALCULATED, 0.1, 0
Sweep, 2, V, B, LIN, 0, -3, CALCULATED, 5, 0.1, 0
Constant, V, S, 0, 0.1, 0
Constant, V, D, 0.1, 0.1, 0
Target, I, D
Function, gm, derivative (VG, ID)
Plot, idvg, XY (LIN LIN), vg, id
Plot, gm, XY (LIN LIN), vg, gm
DataArray, ID
1.85224e-12 7.12761e-12 2.7263e-11 1.03139e-10 3.82977e-10
1.38395e-09 4.85638e-09 1.6664e-08 5.45619e-08 1.52375e-07
3.24682e-07 5.44788e-07 7.82736e-07 1.02199e-06 1.25628e-06
1.48426e-06 1.70632e-06 1.9232e-06 2.13555e-06 2.34384e-06
2.54839e-06 2.74943e-06 2.94709e-06 3.14148e-06 3.33271e-06
3.52082e-06 3.7059e-06 3.888e-06 4.06719e-06 4.24351e-06
4.41702e-06 4.58778e-06 4.75585e-06 4.92126e-06 5.08409e-06
5.24436e-06 5.40214e-06 5.55747e-06 5.7104e-06 5.86098e-06
6.00924e-06 6.15524e-06 6.29901e-06 6.44061e-06 6.58006e-06
6.71741e-06 6.85269e-06 6.98596e-06 7.11724e-06 7.24656e-06
7.37397e-06 9.53773e-15 4.58592e-14 2.20343e-13 1.05693e-12
5.05136e-12 2.39558e-11 1.11829e-10 5.06796e-10 2.19255e-09
8.98953e-09 3.45362e-08 1.11996e-07 2.64495e-07 4.67802e-07
6.90284e-07 9.15351e-07 1.13718e-06 1.3545e-06 1.56747e-06
1.77647e-06 1.98183e-06 2.18378e-06 2.38247e-06 2.57799e-06
2.77043e-06 2.95984e-06 3.14628e-06 3.32981e-06 3.51047e-06
3.68832e-06 3.8634e-06 4.03578e-06 4.2055e-06 4.3726e-06
4.53714e-06 4.69917e-06 4.85873e-06 5.01586e-06 5.17062e-06
5.32305e-06 5.47319e-06 5.62108e-06 5.76676e-06 5.91028e-06
6.05168e-06 6.19098e-06 6.32824e-06 6.46349e-06 6.59677e-06
6.7281e-06 6.85753e-06 1.17264e-16 6.33214e-16 3.4523e-15
1.88508e-14 1.02901e-13 5.60919e-13 3.04733e-12 1.64286e-11
8.70842e-11 4.4604e-10 2.1547e-09 9.66233e-09 3.92978e-08
1.27017e-07 2.86879e-07 4.886e-07 7.04044e-07 9.20506e-07
1.13401e-06 1.3438e-06 1.54997e-06 1.75275e-06 1.95231e-06
2.14877e-06 2.34221e-06 2.5327e-06 2.72027e-06 2.90498e-06
3.08688e-06 3.26601e-06 3.44241e-06 3.61614e-06 3.78725e-06
3.95577e-06 4.12175e-06 4.28525e-06 4.4463e-06 4.60495e-06
4.76124e-06 4.91522e-06 5.06693e-06 5.2164e-06 5.36369e-06
5.50882e-06 5.65184e-06 5.79279e-06 5.9317e-06 6.06861e-06
6.20355e-06 6.33656e-06 6.46767e-06 0 1.66859e-17
8.74225e-17 5.09617e-16 3.02916e-15 1.80602e-14 1.07659e-13
6.4071e-13 3.79701e-12 2.22777e-11 1.27767e-10 6.99346e-10
3.54336e-09 1.63089e-08 6.41907e-08 1.81887e-07 3.59765e-07
5.64173e-07 7.74989e-07 9.84775e-07 1.19155e-06 1.39505e-06
1.59536e-06 1.79261e-06 1.9869e-06 2.1783e-06 2.36684e-06
2.55258e-06 2.73554e-06 2.91579e-06 3.09334e-06 3.26826e-06
3.44058e-06 3.61034e-06 3.7776e-06 3.94239e-06 4.10475e-06
4.26474e-06 4.42238e-06 4.57773e-06 4.73082e-06 4.8817e-06
5.03039e-06 5.17695e-06 5.32141e-06 5.4638e-06 5.60417e-06
5.74254e-06 5.87895e-06 6.01344e-06 6.14604e-06 0
0 0 2.17719e-17 1.21671e-16 7.58878e-16
4.82256e-15 3.0726e-14 1.95649e-13 1.2426e-12 7.8403e-12
4.86889e-11 2.91688e-10 1.62975e-09 8.22526e-09 3.63326e-08
1.22071e-07 2.76941e-07 4.6995e-07 6.75016e-07 8.81148e-07
1.08503e-06 1.28596e-06 1.48389e-06 1.67892e-06 1.8711e-06
2.06049e-06 2.24713e-06 2.43105e-06 2.61229e-06 2.79088e-06
2.96687e-06 3.14029e-06 3.31118e-06 3.47959e-06 3.64555e-06
3.80911e-06 3.97031e-06 4.12918e-06 4.28578e-06 4.44013e-06
4.59228e-06 4.74226e-06 4.89012e-06 5.03588e-06 5.17959e-06
5.32128e-06 5.46099e-06 5.59874e-06 5.73458e-06 5.86853e-06
DataSetFinish
DataSetStart
DataSetName, idvgsat
MeasurementType, DC
BatchName, opt_ex09
WaferName, wafer1
DieName, x0y0
DeviceName, n10_0p5
Temperature, 150
FabDate, 11 May 2010
UserDate, 11 May 2010
WaferDiameter, 0.2
DieLayout, FOUR_CROSSING
DieSize, 0.02, 0.02
DieType, PARTIAL
Attribute, W, 1e-05
Attribute, L, 5e-07
NodeNames, d g s b
Sweep, 1, V, G, LIN, 0, 5, 0.1, CALCULATED, 0.1, 0
Sweep, 2, V, B, LIN, 0, -3, CALCULATED, 5, 0.1, 0
Constant, V, D, 5, 0.1, 0
Constant, V, S, 0, 0.1, 0
Target, I, D
Function, gm, derivative (VG, ID)
Plot, idvg, XY (LIN LIN), vg, id
Plot, gm, XY (LIN LIN), vg, gm
DataArray, ID
4.7106e-10 1.64828e-09 5.74101e-09 1.98325e-08 6.75539e-08
2.25018e-07 7.26611e-07 2.26209e-06 6.7255e-06 1.83677e-05
4.33917e-05 8.6057e-05 0.00014544 0.000217156 0.000296817
0.000381546 0.000469815 0.00056088 0.000654363 0.000750029
0.000847693 0.000947188 0.00104835 0.00115104 0.00125511
0.00136044 0.00146691 0.00157441 0.00168286 0.00179218
0.00190229 0.00201314 0.00212466 0.0022368 0.00234952
0.00246278 0.00257653 0.00269075 0.00280541 0.00292047
0.0030359 0.00315169 0.00326781 0.00338424 0.00350095
0.00361793 0.00373515 0.00385261 0.00397028 0.00408815
0.0042062 1.02917e-11 4.27061e-11 1.77021e-10 7.3216e-10
3.01498e-09 1.2309e-08 4.94411e-08 1.92996e-07 7.21131e-07
2.54698e-06 8.32996e-06 2.37478e-05 5.5327e-05 0.000104949
0.000169135 0.000243143 0.00032361 0.000408686 0.000497421
0.000589276 0.000683887 0.000780958 0.00088023 0.000981471
0.00108448 0.00118906 0.00129506 0.00140233 0.00151076
0.00162023 0.00173065 0.00184193 0.001954 0.0020668
0.00218026 0.00229434 0.00240898 0.00252415 0.0026398
0.00275591 0.00287242 0.00298933 0.00310659 0.00322418
0.00334208 0.00346026 0.0035787 0.00369738 0.00381629
0.00393539 0.00405468 5.00942e-13 2.27821e-12 1.03579e-11
4.70624e-11 2.13539e-10 9.66092e-10 4.3444e-09 1.92969e-08
8.36936e-08 3.4821e-07 1.36303e-06 4.92875e-06 1.56925e-05
4.06764e-05 8.37234e-05 0.000142528 0.000212363 0.000289555
0.000372011 0.000458628 0.000548765 0.000641978 0.000737911
0.000836258 0.00093675 0.00103915 0.00114325 0.00124888
0.00135587 0.00146408 0.00157342 0.00168376 0.00179501
0.00190711 0.00201997 0.00213353 0.00224774 0.00236254
0.0024779 0.00259376 0.00271008 0.00282684 0.002944
0.00306153 0.0031794 0.00329758 0.00341605 0.00353478
0.00365377 0.00377297 0.00389238 3.91363e-14 1.88951e-13
9.12345e-13 4.40446e-12 2.1253e-11 1.02446e-10 4.92683e-10
2.35769e-09 1.11643e-08 5.17471e-08 2.30476e-07 9.63629e-07
3.70284e-06 1.25329e-05 3.4433e-05 7.40675e-05 0.000129794
0.000197018 0.000272004 0.000352588 0.000437609 0.000526378
0.000618408 0.000713311 0.000810753 0.000910443 0.00101213
0.00111559 0.00122065 0.00132712 0.00143488 0.00154379
0.00165375 0.00176467 0.00187646 0.00198904 0.00210235
0.00221633 0.00233093 0.0024461 0.00256179 0.00267796
0.00279457 0.0029116 0.00302901 0.00314677 0.00326485
0.00338322 0.00350187 0.00362077 0.00373989 4.23691e-15
2.13144e-14 1.07433e-13 5.4167e-13 2.73078e-12 1.37614e-11
6.92847e-11 3.48103e-10 1.74091e-09 8.61973e-09 4.17932e-08
1.94618e-07 8.48063e-07 3.37554e-06 1.17545e-05 3.29394e-05
7.16228e-05 0.000126182 0.00019212 0.000265828 0.000345223
0.000429167 0.000516966 0.000608117 0.000702216 0.000798915
0.000897916 0.000998958 0.00110182 0.0012063 0.00131224
0.00141948 0.00152791 0.00163742 0.0017479 0.00185927
0.00197146 0.00208439 0.00219801 0.00231226 0.00242709
0.00254245 0.00265831 0.00277462 0.00289136 0.00300848
0.00312596 0.00324376 0.00336187 0.00348025 0.00359889
DataSetFinish
DataSetStart
DataSetName, idvgsat
MeasurementType, DC
BatchName, opt_ex09
WaferName, wafer1
DieName, x0y0
DeviceName, n10_0p8
Temperature, 150
FabDate, 11 May 2010
UserDate, 11 May 2010
WaferDiameter, 0.2
DieLayout, FOUR_CROSSING
DieSize, 0.02, 0.02
DieType, PARTIAL
Attribute, W, 1e-05
Attribute, L, 8e-07
NodeNames, d g s b
Sweep, 1, V, G, LIN, 0, 5, 0.1, CALCULATED, 0.1, 0
Sweep, 2, V, B, LIN, 0, -3, CALCULATED, 5, 0.1, 0
Constant, V, D, 5, 0.1, 0
Constant, V, S, 0, 0.1, 0
Target, I, D
Function, gm, derivative (VG, ID)
Plot, idvg, XY (LIN LIN), vg, id
Plot, gm, XY (LIN LIN), vg, gm
DataArray, ID
4.93322e-11 1.83872e-10 6.83015e-10 2.52113e-09 9.20031e-09
3.29326e-08 1.14532e-07 3.84654e-07 1.24612e-06 3.80818e-06
1.02873e-05 2.32198e-05 4.36995e-05 7.09878e-05 0.000103661
0.000140547 0.000180926 0.000224396 0.000270722 0.000319737
0.000371302 0.000425286 0.000481559 0.000539997 0.000600482
0.000662898 0.000727138 0.0007931 0.00086069 0.000929819
0.0010004 0.00107237 0.00114564 0.00122015 0.00129583
0.00137262 0.00145047 0.00152933 0.00160913 0.00168984
0.00177142 0.0018538 0.00193697 0.00202087 0.00210548
0.00219075 0.00227666 0.00236317 0.00245025 0.00253788
0.00262603 4.62462e-13 2.09191e-12 9.45759e-12 4.27092e-11
1.92404e-10 8.62421e-10 3.82619e-09 1.66398e-08 6.98658e-08
2.78606e-07 1.04509e-06 3.58855e-06 1.04245e-05 2.4169e-05
4.55007e-05 7.33561e-05 0.000106387 0.000143653 0.000184607
0.000228915 0.000276345 0.000326698 0.000379797 0.000435471
0.000493562 0.00055392 0.000616406 0.000680889 0.00074725
0.000815376 0.000885163 0.000956515 0.00102934 0.00110356
0.00117909 0.00125586 0.00133379 0.00141283 0.00149292
0.00157399 0.00165599 0.00173887 0.00182259 0.00190709
0.00199233 0.00207828 0.0021649 0.00225214 0.00233998
0.00242838 0.00251731 1.0855e-14 5.45564e-14 2.74354e-13
1.37953e-12 6.93314e-12 3.48021e-11 1.74227e-10 8.67094e-10
4.26112e-09 2.04093e-08 9.3315e-08 3.98559e-07 1.56526e-06
5.37025e-06 1.47328e-05 3.16001e-05 5.56634e-05 8.56025e-05
0.000120301 0.000159072 0.000201501 0.000247306 0.000296255
0.000348143 0.000402779 0.000459987 0.000519599 0.000581463
0.000645438 0.000711392 0.000779203 0.000848759 0.000919956
0.000992695 0.00106689 0.00114245 0.00121929 0.00129736
0.00137656 0.00145685 0.00153815 0.00162041 0.00170357
0.00178759 0.00187242 0.001958 0.0020443 0.00213128
0.00221889 0.0023071 0.00239588 4.46855e-16 2.35729e-15
1.26652e-14 6.82792e-14 3.68284e-13 1.98605e-12 1.07024e-11
5.75748e-11 3.08511e-10 1.63849e-09 8.53475e-09 4.27569e-08
2.00452e-07 8.60102e-07 3.26987e-06 1.00984e-05 2.39665e-05
4.53061e-05 7.29755e-05 0.000105767 0.000142892 0.000183877
0.000228401 0.000276213 0.000327089 0.000380826 0.000437235
0.00049614 0.000557381 0.000620808 0.000686283 0.00075368
0.000822879 0.000893771 0.000966255 0.00104024 0.00111562
0.00119234 0.0012703 0.00134943 0.00142967 0.00151095
0.00159322 0.0016764 0.00176046 0.00184534 0.00193099
0.00201738 0.00210444 0.00219216 0.00228048 3.80822e-17
1.55395e-16 8.21393e-16 4.60225e-15 2.60652e-14 1.47892e-13
8.39222e-13 4.75996e-12 2.69639e-11 1.52287e-10 8.54083e-10
4.71446e-09 2.51558e-08 1.2604e-07 5.76048e-07 2.33714e-06
7.79135e-06 1.98238e-05 3.93817e-05 6.55205e-05 9.70046e-05
0.000132988 0.000172957 0.000216572 0.000263563 0.0003137
0.000366769 0.000422575 0.000480937 0.000541688 0.000604675
0.000669756 0.000736801 0.000805687 0.000876303 0.000948542
0.00102231 0.00109751 0.00117406 0.00125189 0.00133091
0.00141105 0.00149225 0.00157445 0.00165759 0.00174162
0.00182647 0.00191211 0.00199849 0.00208556 0.00217329
DataSetFinish
DataSetStart
DataSetName, idvgsat
MeasurementType, DC
BatchName, opt_ex09
WaferName, wafer1
DieName, x0y0
DeviceName, n10_1
Temperature, 150
FabDate, 11 May 2010
UserDate, 11 May 2010
WaferDiameter, 0.2
DieLayout, FOUR_CROSSING
DieSize, 0.02, 0.02
DieType, PARTIAL
Attribute, W, 1e-05
Attribute, L, 1e-06
NodeNames, d g s b
Sweep, 1, V, G, LIN, 0, 5, 0.1, CALCULATED, 0.1, 0
Sweep, 2, V, B, LIN, 0, -3, CALCULATED, 5, 0.1, 0
Constant, V, D, 5, 0.1, 0
Constant, V, S, 0, 0.1, 0
Target, I, D
Function, gm, derivative (VG, ID)
Plot, idvg, XY (LIN LIN), vg, id
Plot, gm, XY (LIN LIN), vg, gm
DataArray, ID
2.92031e-11 1.10629e-10 4.17669e-10 1.56679e-09 5.8095e-09
2.11205e-08 7.45679e-08 2.54325e-07 8.38283e-07 2.60825e-06
7.14533e-06 1.62678e-05 3.07892e-05 5.02643e-05 7.37813e-05
0.000100589 0.000130226 0.000162438 0.000197073 0.000234022
0.00027319 0.000314487 0.000357822 0.000403106 0.000450251
0.000499173 0.00054979 0.000602026 0.000655807 0.000711063
0.00076773 0.000825745 0.000885047 0.000945582 0.0010073
0.00107014 0.00113406 0.00119901 0.00126496 0.00133185
0.00139965 0.00146833 0.00153783 0.00160814 0.00167921
0.00175102 0.00182353 0.00189672 0.00197056 0.00204501
0.00212007 2.0536e-13 9.53398e-13 4.42424e-12 2.05096e-11
9.4868e-11 4.36772e-10 1.99155e-09 8.90873e-09 3.85018e-08
1.58039e-07 6.10556e-07 2.16926e-06 6.54286e-06 1.56792e-05
3.02755e-05 4.97535e-05 7.3251e-05 0.000100147 0.000130076
0.000162819 0.000198217 0.000236138 0.000276458 0.000319057
0.00036382 0.00041064 0.00045941 0.000510035 0.00056242
0.00061648 0.000672132 0.000729298 0.000787906 0.000847886
0.000909172 0.000971703 0.00103542 0.00110027 0.00116619
0.00123314 0.00130107 0.00136993 0.00143968 0.00151027
0.00158168 0.00165386 0.00172677 0.00180039 0.00187468
0.0019496 0.00202514 3.73477e-15 1.9368e-14 1.00634e-13
5.22981e-13 2.71686e-12 1.41e-11 7.30104e-11 3.76127e-10
1.91612e-09 9.53572e-09 4.54122e-08 2.02169e-07 8.28983e-07
3.00121e-06 8.73574e-06 1.96939e-05 3.5983e-05 5.68232e-05
8.147e-05 0.000109452 0.000140485 0.000174377 0.00021097
0.000250122 0.000291699 0.000335572 0.00038162 0.000429731
0.000479795 0.000531713 0.00058539 0.000640737 0.000697668
0.000756106 0.000815975 0.000877204 0.000939727 0.00100348
0.0010684 0.00113443 0.00120152 0.00126962 0.00133868
0.00140864 0.00147948 0.00155113 0.00162358 0.00169677
0.00177067 0.00184525 0.00192047 1.30337e-16 6.74289e-16
3.72383e-15 2.08195e-14 1.16647e-13 6.53646e-13 3.66096e-12
2.04771e-11 1.14174e-10 6.31963e-10 3.44088e-09 1.80985e-08
8.9426e-08 4.04712e-07 1.63748e-06 5.46889e-06 1.39747e-05
2.79289e-05 4.67809e-05 6.9736e-05 9.62405e-05 0.00012596
0.000158674 0.000194207 0.000232404 0.000273123 0.000316226
0.000361586 0.000409082 0.000458601 0.000510037 0.000563291
0.000618269 0.000674881 0.000733046 0.000792685 0.000853723
0.000916089 0.000979718 0.00104455 0.00111051 0.00117756
0.00124564 0.00131469 0.00138468 0.00145555 0.00152725
0.00159976 0.00167302 0.001747 0.00182167 1.84874e-17
4.55066e-17 2.05564e-16 1.1537e-15 6.77005e-15 4.00364e-14
2.37043e-13 1.40324e-12 8.2994e-12 4.89767e-11 2.8747e-10
1.6661e-09 9.38746e-09 5.00029e-08 2.43628e-07 1.06034e-06
3.87598e-06 1.08481e-05 2.32122e-05 4.06696e-05 6.2429e-05
8.78852e-05 0.000116668 0.000148535 0.0001833 0.000220802
0.000260888 0.000303419 0.000348261 0.00039529 0.000444389
0.000495449 0.000548367 0.000603046 0.000659396 0.00071733
0.000776768 0.000837632 0.000899851 0.000963356 0.00102808
0.00109396 0.00116095 0.00122898 0.001298 0.00136796
0.00143882 0.00151053 0.00158305 0.00165633 0.00173034
DataSetFinish
DataSetStart
DataSetName, idvgsat
MeasurementType, DC
BatchName, opt_ex09
WaferName, wafer1
DieName, x0y0
DeviceName, n10_10
Temperature, 150
FabDate, 11 May 2010
UserDate, 11 May 2010
WaferDiameter, 0.2
DieLayout, FOUR_CROSSING
DieSize, 0.02, 0.02
DieType, PARTIAL
Attribute, W, 1e-05
Attribute, L, 1e-05
NodeNames, d g s b
Sweep, 1, V, G, LIN, 0, 5, 0.1, CALCULATED, 0.1, 0
Sweep, 2, V, B, LIN, 0, -3, CALCULATED, 5, 0.1, 0
Constant, V, D, 5, 0.1, 0
Constant, V, S, 0, 0.1, 0
Target, I, D
Function, gm, derivative (VG, ID)
Plot, idvg, XY (LIN LIN), vg, id
Plot, gm, XY (LIN LIN), vg, gm
DataArray, ID
6.3301e-12 2.43229e-11 9.27798e-11 3.49316e-10 1.28745e-09
4.61119e-09 1.60874e-08 5.51045e-08 1.79038e-07 5.04507e-07
1.16242e-06 2.21338e-06 3.63888e-06 5.39352e-06 7.44113e-06
9.76139e-06 1.23448e-05 1.51872e-05 1.82863e-05 2.16401e-05
2.52464e-05 2.91027e-05 3.3206e-05 3.75533e-05 4.21415e-05
4.69675e-05 5.20282e-05 5.73205e-05 6.28415e-05 6.85882e-05
7.45581e-05 8.07483e-05 8.71563e-05 9.37796e-05 0.000100616
0.000107663 0.000114918 0.00012238 0.000130045 0.000137913
0.000145982 0.000154249 0.000162713 0.000171372 0.000180224
0.000189269 0.000198503 0.000207927 0.000217539 0.000227337
0.00023732 3.61454e-14 1.73733e-13 8.34366e-13 3.99851e-12
1.90724e-11 9.00795e-11 4.17158e-10 1.86526e-09 7.9368e-09
3.21338e-08 1.21598e-07 3.9106e-07 9.85832e-07 1.97748e-06
3.35123e-06 5.06726e-06 7.09627e-06 9.4226e-06 1.20384e-05
1.4939e-05 1.81204e-05 2.15789e-05 2.53103e-05 2.93103e-05
3.35747e-05 3.80992e-05 4.28796e-05 4.79116e-05 5.31914e-05
5.87149e-05 6.44785e-05 7.04784e-05 7.6711e-05 8.3173e-05
8.9861e-05 9.67717e-05 0.000103902 0.000111249 0.000118809
0.000126581 0.00013456 0.000142744 0.000151131 0.000159719
0.000168504 0.000177484 0.000186657 0.000196021 0.000205573
0.000215312 0.000225234 4.86291e-16 2.60598e-15 1.41868e-14
7.74316e-14 4.22492e-13 2.30094e-12 1.24746e-11 6.69427e-11
3.5142e-10 1.76827e-09 8.3393e-09 3.66131e-08 1.45171e-07
4.66335e-07 1.14111e-06 2.21727e-06 3.66973e-06 5.46348e-06
7.57625e-06 9.99635e-06 1.2717e-05 1.57332e-05 1.90401e-05
2.26329e-05 2.65067e-05 3.06565e-05 3.50775e-05 3.97649e-05
4.4714e-05 4.99204e-05 5.53795e-05 6.10872e-05 6.70392e-05
7.32316e-05 7.96604e-05 8.63218e-05 9.32122e-05 0.000100328
0.000107666 0.000115222 0.000122993 0.000130977 0.000139169
0.000147567 0.000156168 0.00016497 0.000173968 0.000183161
0.000192546 0.00020212 0.000211881 2.27826e-17 7.51192e-17
3.87505e-16 2.25192e-15 1.33772e-14 7.97331e-14 4.75059e-13
2.82381e-12 1.66868e-11 9.72585e-11 5.49935e-10 2.93453e-09
1.44068e-08 6.44023e-08 2.44929e-07 7.10745e-07 1.56739e-06
2.82022e-06 4.43576e-06 6.38672e-06 8.65779e-06 1.12404e-05
1.41284e-05 1.73166e-05 2.07995e-05 2.45718e-05 2.86283e-05
3.29637e-05 3.75728e-05 4.24507e-05 4.75925e-05 5.29934e-05
5.8649e-05 6.45548e-05 7.07063e-05 7.70996e-05 8.37304e-05
9.05948e-05 9.76889e-05 0.000105009 0.000112551 0.000120312
0.000128289 0.000136477 0.000144874 0.000153477 0.000162281
0.000171285 0.000180485 0.000189879 0.000199462 1.33381e-17
1.51568e-17 2.67586e-17 1.00768e-16 5.72863e-16 3.58397e-15
2.27841e-14 1.4513e-13 9.23399e-13 5.85306e-12 3.67518e-11
2.25672e-10 1.32085e-09 7.11509e-09 3.45853e-08 1.46547e-07
4.84097e-07 1.18724e-06 2.29465e-06 3.78021e-06 5.61387e-06
7.77742e-06 1.02607e-05 1.30568e-05 1.616e-05 1.95646e-05
2.32648e-05 2.72553e-05 3.15304e-05 3.60848e-05 4.09133e-05
4.60108e-05 5.13725e-05 5.69934e-05 6.2869e-05 6.89947e-05
7.53661e-05 8.1979e-05 8.88292e-05 9.59125e-05 0.000103225
0.000110763 0.000118523 0.000126501 0.000134693 0.000143097
0.000151707 0.000160523 0.000169539 0.000178753 0.000188162
DataSetFinish
DataSetStart
DataSetName, idvgsat
MeasurementType, DC
BatchName, opt_ex09
WaferName, wafer1
DieName, x0y0
DeviceName, n10_2
Temperature, 150
FabDate, 11 May 2010
UserDate, 11 May 2010
WaferDiameter, 0.2
DieLayout, FOUR_CROSSING
DieSize, 0.02, 0.02
DieType, PARTIAL
Attribute, W, 1e-05
Attribute, L, 2e-06
NodeNames, d g s b
Sweep, 1, V, G, LIN, 0, 5, 0.1, CALCULATED, 0.1, 0
Sweep, 2, V, B, LIN, 0, -3, CALCULATED, 5, 0.1, 0
Constant, V, D, 5, 0.1, 0
Constant, V, S, 0, 0.1, 0
Target, I, D
Function, gm, derivative (VG, ID)
Plot, idvg, XY (LIN LIN), vg, id
Plot, gm, XY (LIN LIN), vg, gm
DataArray, ID
1.74781e-11 6.72787e-11 2.57765e-10 9.78987e-10 3.66124e-09
1.33611e-08 4.7244e-08 1.62257e-07 5.39756e-07 1.64701e-06
4.24345e-06 8.9514e-06 1.58788e-05 2.47719e-05 3.53323e-05
4.73562e-05 6.0732e-05 7.54016e-05 9.13307e-05 0.000108493
0.000126862 0.000146411 0.000167113 0.000188938 0.000211857
0.000235841 0.000260861 0.000286891 0.000313902 0.00034187
0.000370767 0.000400571 0.000431257 0.000462803 0.000495186
0.000528385 0.000562379 0.000597148 0.000632672 0.000668933
0.000705912 0.000743593 0.000781957 0.000820988 0.00086067
0.000900988 0.000941926 0.00098347 0.00102561 0.00106832
0.0011116 8.8972e-14 4.26494e-13 2.04338e-12 9.77767e-12
4.66566e-11 2.21313e-10 1.03689e-09 4.74215e-09 2.08112e-08
8.64525e-08 3.38708e-07 1.1984e-06 3.46538e-06 7.84809e-06
1.44794e-05 2.31159e-05 3.34933e-05 4.54433e-05 5.88733e-05
7.37277e-05 8.99647e-05 0.000107546 0.000126435 0.000146592
0.00016798 0.000190563 0.000214303 0.000239166 0.000265118
0.000292125 0.000320156 0.00034918 0.000379169 0.000410092
0.000441922 0.000474633 0.000508199 0.000542595 0.000577795
0.000613778 0.000650521 0.000688001 0.000726197 0.000765089
0.000804657 0.000844882 0.000885746 0.000927229 0.000969315
0.00101199 0.00105523 1.14209e-15 6.15684e-15 3.34116e-14
1.81504e-13 9.85744e-13 5.34772e-12 2.89361e-11 1.55638e-10
8.26058e-10 4.26375e-09 2.09103e-08 9.53698e-08 4.00096e-07
1.45348e-06 4.12601e-06 9.01593e-06 1.61164e-05 2.51654e-05
3.59429e-05 4.83187e-05 6.22171e-05 7.75851e-05 9.43772e-05
0.00011255 0.00013206 0.000152866 0.000174926 0.000198201
0.000222651 0.000248239 0.000274929 0.000302687 0.000331478
0.000361271 0.000392034 0.000423736 0.000456349 0.000489844
0.000524193 0.000559371 0.000595351 0.00063211 0.000669622
0.000707865 0.000746817 0.000786456 0.00082676 0.000867711
0.000909288 0.000951471 0.000994242 3.73975e-17 1.61222e-16
8.94734e-16 5.23973e-15 3.09747e-14 1.8336e-13 1.0851e-12
6.41287e-12 3.77729e-11 2.2072e-10 1.26631e-09 6.98741e-09
3.59678e-08 1.68825e-07 7.04698e-07 2.37816e-06 6.0378e-06
1.1976e-05 2.00105e-05 2.98941e-05 4.1464e-05 5.46256e-05
6.93163e-05 8.54851e-05 0.000103084 0.000122068 0.000142392
0.000164011 0.000186883 0.000210968 0.000236226 0.000262619
0.000290111 0.000318664 0.000348247 0.000378824 0.000410365
0.000442838 0.000476214 0.000510463 0.000545558 0.000581472
0.000618178 0.000655651 0.000693868 0.000732804 0.000772437
0.000812744 0.000853705 0.000895298 0.000937503 1.38261e-17
1.82187e-17 4.59671e-17 2.21254e-16 1.32851e-15 8.32245e-15
5.24926e-14 3.31341e-13 2.09002e-12 1.31552e-11 8.23583e-11
5.08927e-10 3.05201e-09 1.72233e-08 8.83378e-08 4.03334e-07
1.53244e-06 4.3818e-06 9.48465e-06 1.67759e-05 2.60065e-05
3.699e-05 4.96161e-05 6.38143e-05 7.95292e-05 9.67104e-05
0.00011531 0.00013528 0.000156576 0.000179154 0.000202972
0.000227987 0.000254161 0.000281457 0.000309836 0.000339264
0.000369706 0.000401129 0.000433502 0.000466792 0.00050097
0.000536007 0.000571875 0.000608548 0.000645998 0.000684201
0.000723132 0.000762768 0.000803086 0.000844063 0.000885677
DataSetFinish
DataSetStart
DataSetName, idvgsat
MeasurementType, DC
BatchName, opt_ex09
WaferName, wafer1
DieName, x0y0
DeviceName, n10_5
Temperature, 150
FabDate, 11 May 2010
UserDate, 11 May 2010
WaferDiameter, 0.2
DieLayout, FOUR_CROSSING
DieSize, 0.02, 0.02
DieType, PARTIAL
Attribute, W, 1e-05
Attribute, L, 5e-06
NodeNames, d g s b
Sweep, 1, V, G, LIN, 0, 5, 0.1, CALCULATED, 0.1, 0
Sweep, 2, V, B, LIN, 0, -3, CALCULATED, 5, 0.1, 0
Constant, V, D, 5, 0.1, 0
Constant, V, S, 0, 0.1, 0
Target, I, D
Function, gm, derivative (VG, ID)
Plot, idvg, XY (LIN LIN), vg, id
Plot, gm, XY (LIN LIN), vg, gm
DataArray, ID
1.09833e-11 4.22401e-11 1.61391e-10 6.09381e-10 2.2558e-09
8.1198e-09 2.84048e-08 9.73588e-08 3.19253e-07 9.20842e-07
2.18163e-06 4.25161e-06 7.10432e-06 1.06414e-05 1.47788e-05
1.94674e-05 2.46832e-05 3.04149e-05 3.66561e-05 4.34016e-05
5.06456e-05 5.83816e-05 6.66027e-05 7.53015e-05 8.44703e-05
9.41016e-05 0.000104188 0.000114722 0.000125696 0.000137103
0.000148937 0.00016119 0.000173858 0.000186932 0.000200407
0.000214278 0.000228538 0.000243183 0.000258206 0.000273603
0.000289369 0.000305499 0.000321988 0.000338831 0.000356025
0.000373565 0.000391446 0.000409665 0.000428218 0.000447101
0.000466309 5.99185e-14 2.88056e-13 1.38377e-12 6.6349e-12
3.16832e-11 1.49991e-10 6.97751e-10 3.1433e-09 1.34942e-08
5.5e-08 2.10709e-07 6.98207e-07 1.82508e-06 3.76818e-06
6.50886e-06 9.95836e-06 1.40465e-05 1.87344e-05 2.40018e-05
2.9837e-05 3.623e-05 4.31717e-05 5.06523e-05 5.86617e-05
6.71898e-05 7.62266e-05 8.5762e-05 9.57863e-05 0.00010629
0.000117264 0.000128699 0.000140587 0.000152919 0.000165686
0.000178882 0.000192497 0.000206525 0.000220958 0.00023579
0.000251012 0.000266618 0.000282603 0.000298958 0.000315679
0.000332759 0.000350192 0.000367973 0.000386095 0.000404553
0.000423342 0.000442456 7.77539e-16 4.19751e-15 2.28828e-14
1.24936e-13 6.81856e-13 3.71527e-12 2.01648e-11 1.08481e-10
5.7245e-10 2.90759e-09 1.38815e-08 6.16243e-08 2.49244e-07
8.31734e-07 2.11723e-06 4.23325e-06 7.1329e-06 1.07348e-05
1.49841e-05 1.98512e-05 2.53193e-05 3.13757e-05 3.8009e-05
4.52078e-05 5.29606e-05 6.1256e-05 7.00825e-05 7.94291e-05
8.92848e-05 9.96391e-05 0.000110482 0.000121803 0.000133592
0.000145841 0.000158539 0.000171679 0.000185251 0.000199246
0.000213657 0.000228476 0.000243695 0.000259305 0.000275301
0.000291674 0.000308418 0.000325525 0.00034299 0.000360804
0.000378963 0.000397459 0.000416287 2.89196e-17 1.11748e-16
6.06122e-16 3.55667e-15 2.11635e-14 1.26187e-13 7.5204e-13
4.47291e-12 2.64703e-11 1.54805e-10 8.81666e-10 4.76458e-09
2.3748e-08 1.0787e-07 4.2371e-07 1.28569e-06 2.94225e-06
5.42315e-06 8.65449e-06 1.257e-05 1.71312e-05 2.23165e-05
2.81108e-05 3.45014e-05 4.14757e-05 4.90214e-05 5.71259e-05
6.57773e-05 7.49635e-05 8.46731e-05 9.48947e-05 0.000105617
0.000116831 0.000128524 0.000140687 0.000153311 0.000166385
0.000179901 0.000193849 0.000208221 0.000223007 0.000238201
0.000253792 0.000269775 0.00028614 0.00030288 0.000319989
0.000337458 0.00035528 0.000373449 0.000391958 1.35273e-17
1.63634e-17 3.44551e-17 1.49859e-16 8.8597e-16 5.5809e-15
3.55184e-14 2.26307e-13 1.44043e-12 9.13888e-12 5.75186e-11
3.55133e-10 2.10195e-09 1.15161e-08 5.69664e-08 2.47999e-07
8.5716e-07 2.19508e-06 4.36996e-06 7.32936e-06 1.10014e-05
1.53405e-05 2.0321e-05 2.5926e-05 3.21415e-05 3.89541e-05
4.63507e-05 5.43185e-05 6.28446e-05 7.19168e-05 8.15229e-05
9.16512e-05 0.00010229 0.000113429 0.000125057 0.000137164
0.000149738 0.000162771 0.000176252 0.000190173 0.000204523
0.000219294 0.000234478 0.000250065 0.000266047 0.000282417
0.000299166 0.000316287 0.000333772 0.000351613 0.000369804
DataSetFinish
DataSetStart
DataSetName, idvgsat
MeasurementType, DC
BatchName, opt_ex09
WaferName, wafer1
DieName, x0y0
DeviceName, n2_0p5
Temperature, 150
FabDate, 11 May 2010
UserDate, 11 May 2010
WaferDiameter, 0.2
DieLayout, FOUR_CROSSING
DieSize, 0.02, 0.02
DieType, PARTIAL
Attribute, W, 2e-06
Attribute, L, 5e-07
NodeNames, d g s b
Sweep, 1, V, G, LIN, 0, 5, 0.1, CALCULATED, 0.1, 0
Sweep, 2, V, B, LIN, 0, -3, CALCULATED, 5, 0.1, 0
Constant, V, D, 5, 0.1, 0
Constant, V, S, 0, 0.1, 0
Target, I, D
Function, gm, derivative (VG, ID)
Plot, idvg, XY (LIN LIN), vg, id
Plot, gm, XY (LIN LIN), vg, gm
DataArray, ID
2.21878e-11 7.78448e-11 2.72466e-10 9.49523e-10 3.28334e-09
1.12024e-08 3.74152e-08 1.21302e-07 3.79871e-07 1.14113e-06
3.17417e-06 7.68615e-06 1.56298e-05 2.6981e-05 4.0954e-05
5.66799e-05 7.35595e-05 9.1263e-05 0.000109625 0.00012856
0.000148013 0.000167943 0.000188312 0.000209084 0.000230225
0.000251704 0.00027349 0.000295558 0.000317884 0.000340447
0.000363227 0.000386207 0.000409372 0.000432707 0.0004562
0.00047984 0.000503616 0.000527519 0.000551539 0.000575668
0.000599899 0.000624224 0.000648638 0.000673132 0.000697703
0.000722343 0.000747048 0.000771813 0.000796632 0.000821502
0.000846418 2.95344e-13 1.2263e-12 5.08959e-12 2.11053e-11
8.73627e-11 3.60336e-10 1.47578e-09 5.96289e-09 2.35143e-08
8.92037e-08 3.21456e-07 1.08598e-06 3.28099e-06 8.23154e-06
1.67097e-05 2.83567e-05 4.22873e-05 5.77607e-05 7.43371e-05
9.17838e-05 0.000109972 0.000128816 0.000148249 0.000168215
0.00018866 0.000209537 0.000230806 0.000252427 0.000274369
0.000296601 0.000319098 0.000341837 0.000364797 0.000387961
0.000411311 0.000434834 0.000458516 0.000482345 0.000506309
0.000530399 0.000554605 0.000578918 0.000603331 0.000627836
0.000652425 0.000677092 0.000701831 0.000726636 0.000751501
0.000776421 0.000801392 9.57017e-15 4.34915e-14 1.97772e-13
8.99291e-13 4.08747e-12 1.85606e-11 8.41093e-11 3.79517e-10
1.69735e-09 7.45891e-09 3.17346e-08 1.28254e-07 4.84492e-07
1.66569e-06 4.84854e-06 1.12317e-05 2.09811e-05 3.33676e-05
4.75827e-05 6.30969e-05 7.96197e-05 9.6988e-05 0.000115096
0.000133862 0.000153217 0.0001731 0.000193457 0.00021424
0.000235407 0.000256921 0.000278749 0.000300863 0.000323238
0.00034585 0.000368681 0.000391712 0.000414928 0.000438314
0.000461857 0.000485544 0.000509366 0.000533311 0.00055737
0.000581536 0.000605799 0.000630152 0.000654587 0.0006791
0.000703682 0.000728328 0.000753033 5.29819e-16 2.51185e-15
1.20838e-14 5.83065e-14 2.81482e-13 1.35867e-12 6.55408e-12
3.15718e-11 1.51621e-10 7.23374e-10 3.40401e-09 1.55885e-08
6.80482e-08 2.77087e-07 1.03e-06 3.29234e-06 8.362e-06
1.67581e-05 2.79487e-05 4.11314e-05 5.57332e-05 7.14292e-05
8.80359e-05 0.000105434 0.000123534 0.000142259 0.000161544
0.000181328 0.000201563 0.000222201 0.000243205 0.000264539
0.000286174 0.000308083 0.000330242 0.00035263 0.000375229
0.000398022 0.000420993 0.000444129 0.000467418 0.000490848
0.000514408 0.000538088 0.00056188 0.000585775 0.000609766
0.000633844 0.000658003 0.000682237 0.000706539 5.27064e-17
2.13246e-16 1.02286e-15 5.10574e-15 2.56946e-14 1.29507e-13
6.52814e-13 3.28925e-12 1.65549e-11 8.31147e-11 4.14999e-10
2.04773e-09 9.86059e-09 4.53712e-08 1.94515e-07 7.59744e-07
2.56616e-06 6.88743e-06 1.44069e-05 2.4734e-05 3.71067e-05
5.0949e-05 6.59272e-05 8.18502e-05 9.85936e-05 0.000116062
0.000134177 0.000152868 0.000172076 0.000191746 0.000211834
0.000232298 0.000253102 0.000274217 0.000295613 0.000317269
0.000339161 0.000361271 0.000383581 0.000406076 0.000428742
0.000451566 0.000474537 0.000497643 0.000520874 0.000544222
0.000567678 0.000591233 0.000614881 0.000638614 0.000662425
DataSetFinish
DataSetStart
DataSetName, idvgsat
MeasurementType, DC
BatchName, opt_ex09
WaferName, wafer1
DieName, x0y0
DeviceName, n2_10
Temperature, 150
FabDate, 11 May 2010
UserDate, 11 May 2010
WaferDiameter, 0.2
DieLayout, FOUR_CROSSING
DieSize, 0.02, 0.02
DieType, PARTIAL
Attribute, W, 2e-06
Attribute, L, 1e-05
NodeNames, d g s b
Sweep, 1, V, G, LIN, 0, 5, 0.1, CALCULATED, 0.1, 0
Sweep, 2, V, B, LIN, 0, -3, CALCULATED, 5, 0.1, 0
Constant, V, D, 5, 0.1, 0
Constant, V, S, 0, 0.1, 0
Target, I, D
Function, gm, derivative (VG, ID)
Plot, idvg, XY (LIN LIN), vg, id
Plot, gm, XY (LIN LIN), vg, gm
DataArray, ID
5.2031e-13 2.00463e-12 7.68538e-12 2.91959e-11 1.09158e-10
3.9822e-10 1.41073e-09 4.88752e-09 1.65454e-08 5.1516e-08
1.34954e-07 2.88239e-07 5.16457e-07 8.12954e-07 1.16931e-06
1.57982e-06 2.04155e-06 2.55317e-06 3.11409e-06 3.72391e-06
4.38227e-06 5.0887e-06 5.84272e-06 6.64376e-06 7.49123e-06
8.38455e-06 9.32312e-06 1.03064e-05 1.13337e-05 1.24046e-05
1.35184e-05 1.46748e-05 1.58732e-05 1.7113e-05 1.83939e-05
1.97154e-05 2.1077e-05 2.24784e-05 2.39191e-05 2.53988e-05
2.6917e-05 2.84735e-05 3.00679e-05 3.16998e-05 3.3369e-05
3.50751e-05 3.68178e-05 3.85969e-05 4.04122e-05 4.22632e-05
4.41498e-05 2.42171e-15 1.16058e-14 5.57418e-14 2.67532e-13
1.28057e-12 6.09304e-12 2.86323e-11 1.31335e-10 5.78456e-10
2.42015e-09 9.63696e-09 3.50392e-08 1.04522e-07 2.43279e-07
4.58751e-07 7.45279e-07 1.09554e-06 1.50486e-06 1.97085e-06
2.49229e-06 3.06837e-06 3.69835e-06 4.38149e-06 5.117e-06
5.90406e-06 6.74185e-06 7.62956e-06 8.56638e-06 9.55153e-06
1.05842e-05 1.16638e-05 1.27894e-05 1.39605e-05 1.51763e-05
1.64362e-05 1.77396e-05 1.90858e-05 2.04742e-05 2.19043e-05
2.33755e-05 2.48873e-05 2.6439e-05 2.80304e-05 2.96607e-05
3.13296e-05 3.30365e-05 3.47811e-05 3.65628e-05 3.83813e-05
4.02361e-05 4.21268e-05 3.84096e-17 1.58555e-16 8.15053e-16
4.40149e-15 2.3984e-14 1.30778e-13 7.11548e-13 3.84967e-12
2.05644e-11 1.06951e-10 5.29575e-10 2.44852e-09 1.05214e-08
3.98411e-08 1.1882e-07 2.70972e-07 5.00378e-07 8.00725e-07
1.16581e-06 1.59202e-06 2.07746e-06 2.62095e-06 3.22157e-06
3.8784e-06 4.5905e-06 5.35694e-06 6.17675e-06 7.04902e-06
7.97281e-06 8.94726e-06 9.97147e-06 1.10446e-05 1.21659e-05
1.33345e-05 1.45496e-05 1.58106e-05 1.71166e-05 1.84671e-05
1.98611e-05 2.12983e-05 2.27777e-05 2.4299e-05 2.58613e-05
2.74642e-05 2.9107e-05 3.07892e-05 3.25102e-05 3.42695e-05
3.60666e-05 3.79009e-05 3.97719e-05 1.27663e-17 1.53317e-17
3.06443e-17 1.22041e-16 6.6751e-16 3.92218e-15 2.33309e-14
1.38912e-13 8.24902e-13 4.86382e-12 2.82061e-11 1.57832e-10
8.27708e-10 3.9825e-09 1.73305e-08 6.24375e-08 1.69572e-07
3.5463e-07 6.15714e-07 9.46185e-07 1.34131e-06 1.79853e-06
2.31633e-06 2.89359e-06 3.52929e-06 4.22239e-06 4.97187e-06
5.7767e-06 6.63586e-06 7.54837e-06 8.51327e-06 9.52961e-06
1.05965e-05 1.1713e-05 1.28784e-05 1.40917e-05 1.53522e-05
1.6659e-05 1.80114e-05 1.94087e-05 2.08501e-05 2.23349e-05
2.38624e-05 2.5432e-05 2.7043e-05 2.86947e-05 3.03866e-05
3.21181e-05 3.38884e-05 3.56971e-05 3.75436e-05 1.30145e-17
1.30923e-17 1.35887e-17 1.67556e-17 3.69574e-17 1.6582e-16
9.87702e-16 6.22797e-15 3.96128e-14 2.51875e-13 1.59468e-12
9.98564e-12 6.09344e-11 3.52302e-10 1.86459e-09 8.88749e-09
3.63517e-08 1.13832e-07 2.66009e-07 4.97148e-07 8.01399e-07
1.17326e-06 1.60954e-06 2.10843e-06 2.66864e-06 3.28906e-06
3.96858e-06 4.70611e-06 5.50057e-06 6.35089e-06 7.25602e-06
8.21495e-06 9.2267e-06 1.02903e-05 1.14048e-05 1.25694e-05
1.37831e-05 1.50451e-05 1.63545e-05 1.77105e-05 1.91125e-05
2.05594e-05 2.20507e-05 2.35856e-05 2.51634e-05 2.67834e-05
2.84448e-05 3.01471e-05 3.18896e-05 3.36716e-05 3.54926e-05
DataSetFinish
DataSetStart
DataSetName, idvgsat
MeasurementType, DC
BatchName, opt_ex09
WaferName, wafer1
DieName, x0y0
DeviceName, n5_10
Temperature, 150
FabDate, 11 May 2010
UserDate, 11 May 2010
WaferDiameter, 0.2
DieLayout, FOUR_CROSSING
DieSize, 0.02, 0.02
DieType, PARTIAL
Attribute, W, 5e-06
Attribute, L, 1e-05
NodeNames, d g s b
Sweep, 1, V, G, LIN, 0, 5, 0.1, CALCULATED, 0.1, 0
Sweep, 2, V, B, LIN, 0, -3, CALCULATED, 5, 0.1, 0
Constant, V, D, 5, 0.1, 0
Constant, V, S, 0, 0.1, 0
Target, I, D
Function, gm, derivative (VG, ID)
Plot, idvg, XY (LIN LIN), vg, id
Plot, gm, XY (LIN LIN), vg, gm
DataArray, ID
2.05352e-12 7.90212e-12 3.02257e-11 1.1435e-10 4.24649e-10
1.53509e-09 5.39339e-09 1.8588e-08 6.18953e-08 1.84033e-07
4.52097e-07 9.09582e-07 1.55721e-06 2.37405e-06 3.33999e-06
4.44278e-06 5.67644e-06 7.03833e-06 8.52716e-06 1.0142e-05
1.18817e-05 1.37452e-05 1.57311e-05 1.78378e-05 2.0064e-05
2.2408e-05 2.48683e-05 2.74434e-05 3.01319e-05 3.29322e-05
3.58432e-05 3.88633e-05 4.19914e-05 4.52262e-05 4.85666e-05
5.20113e-05 5.55592e-05 5.92094e-05 6.29608e-05 6.68124e-05
7.07632e-05 7.48124e-05 7.89592e-05 8.32025e-05 8.75418e-05
9.19761e-05 9.65048e-05 0.000101127 0.000105842 0.00011065
0.000115549 1.05696e-14 5.07836e-14 2.43967e-13 1.17021e-12
5.59273e-12 2.65234e-11 1.2382e-10 5.6125e-10 2.43016e-09
9.99776e-09 3.89615e-08 1.34028e-07 3.6752e-07 7.91005e-07
1.40853e-06 2.20156e-06 3.1532e-06 4.25378e-06 5.49847e-06
6.8846e-06 8.41021e-06 1.00734e-05 1.18723e-05 1.38046e-05
1.58685e-05 1.80617e-05 2.03821e-05 2.28277e-05 2.53965e-05
2.80865e-05 3.08959e-05 3.38229e-05 3.68656e-05 4.00224e-05
4.32916e-05 4.66715e-05 5.01607e-05 5.37576e-05 5.74607e-05
6.12686e-05 6.51799e-05 6.91933e-05 7.33075e-05 7.75213e-05
8.18333e-05 8.62424e-05 9.07475e-05 9.53473e-05 0.000100041
0.000104827 0.000109705 1.39361e-16 7.10214e-16 3.82928e-15
2.08663e-14 1.1386e-13 6.20617e-13 3.37162e-12 1.8177e-11
9.63558e-11 4.93634e-10 2.38703e-09 1.07529e-08 4.46336e-08
1.56635e-07 4.22218e-07 8.8381e-07 1.53787e-06 2.36647e-06
3.35616e-06 4.49964e-06 5.79298e-06 7.2335e-06 8.81882e-06
1.05466e-05 1.24144e-05 1.44199e-05 1.65605e-05 1.8834e-05
2.12379e-05 2.37702e-05 2.64284e-05 2.92106e-05 3.21147e-05
3.51385e-05 3.82803e-05 4.15381e-05 4.49101e-05 4.83944e-05
5.19894e-05 5.56933e-05 5.95046e-05 6.34215e-05 6.74427e-05
7.15665e-05 7.57914e-05 8.01162e-05 8.45393e-05 8.90594e-05
9.36751e-05 9.83852e-05 0.000103188 1.48877e-17 2.79944e-17
1.06227e-16 5.7316e-16 3.3597e-15 1.99835e-14 1.19077e-13
7.08614e-13 4.19939e-12 2.46388e-11 1.41319e-10 7.73819e-10
3.92827e-09 1.82445e-08 7.4873e-08 2.42751e-07 5.90612e-07
1.13805e-06 1.87186e-06 2.7763e-06 3.8418e-06 5.06315e-06
6.43705e-06 7.96079e-06 9.63174e-06 1.14473e-05 1.34048e-05
1.55016e-05 1.77353e-05 2.01032e-05 2.26031e-05 2.52324e-05
2.7989e-05 3.08707e-05 3.38751e-05 3.70004e-05 4.02444e-05
4.36051e-05 4.70806e-05 5.0669e-05 5.43686e-05 5.81775e-05
6.20939e-05 6.61163e-05 7.02429e-05 7.44722e-05 7.88026e-05
8.32326e-05 8.77606e-05 9.23852e-05 9.7105e-05 1.30791e-17
1.35046e-17 1.62191e-17 3.35354e-17 1.43996e-16 8.48569e-16
5.34187e-15 3.39838e-14 2.16343e-13 1.37398e-12 8.66925e-12
5.38384e-11 3.22596e-10 1.80425e-09 9.15176e-09 4.14134e-08
1.534e-07 4.23259e-07 8.92013e-07 1.55512e-06 2.3964e-06
3.40447e-06 4.57305e-06 5.89828e-06 7.37715e-06 9.00685e-06
1.07846e-05 1.27076e-05 1.47732e-05 1.69786e-05 1.93213e-05
2.17986e-05 2.44083e-05 2.71478e-05 3.00148e-05 3.3007e-05
3.61224e-05 3.93586e-05 4.27137e-05 4.61855e-05 4.97722e-05
5.34718e-05 5.72824e-05 6.12021e-05 6.52293e-05 6.93622e-05
7.3599e-05 7.79382e-05 8.2378e-05 8.69169e-05 9.15534e-05
DataSetFinish