IEEE Electron Devices Technology and Manufacturing (IEEE EDTM) Conference was established by the IEEE Electron Devices Society (EDS) to enable further performance/functionality enhancement of semiconductor devices and systems with manufacturing innovations to overcome scaling challenges. IEEE EDTM provides the forum where device, process, material, and tool communities gather and discuss their novel ideas for technological breakthrough. IEEE EDTM rotates among Asian countries where hot-hubs of semiconductor manufacturing are located. Launched in 2017 in Toyama, Japan, IEEE EDTM was subsequently held in Kobe, Japan (2018), in Singapore (2019), in Penang, Malaysia (2020), in Chengdu, China (2021), in Oita, Japan – Full virtual (2022), and will take place first time in Seoul, Korea this year. IEEE EDTM is a premier conference, providing a unique forum for discussions on a broad range of device/manufacturing-related topics.