Requires: Utmost IV, SmartSpice, SmartView
Minimum Versions: Utmost IV 2.4.0.R, SmartSpice 4.32.0.R, SmartView 2.34.0.R.
This example describes how to extract an RPI poly-Si TFT (L36) model. To extract a
model which is scalable with geometry, multiple different device sizes must be
included. In this example, five devices with different gate lengths are included.
The project file
opt_ex21.prj
and the data file
opt_ex21.uds
for this example should be loaded into your database. When opened, the
project will look as shown in
opt_ex21_project.png
.
The optimization sequence, which fully automates the extraction of this TFT
model, has seven sections. The objective of each section is to isolate a device
characteristic and then to optimize only those model parameters which account
for this device behavior.
Preliminary information
The RPI TFT model allows independent parameters to describe the source and drain region
resistances. In order to consider symmetric devices, with the same parameter values
for drain and source, respectively, one can assign two model parameters to the same
netlist parameter and optimize the netlist parameter instead:
opt_ex21_model_card.png
and
opt_ex21_netlist_parameters.png
.
The optimization sequence, which automates the parameter extraction, is divided into seven sections.
Some model parameters are optimized in multiple sections for better fitting.
Before starting the optimization sequence, the following device parameters are defined in the model library.
- TOX: Oxide thickness
- TNOM: Nominal (room) temperature
Section 1 : idvg_large
This section optimizes the parameters for wide and long channel devices. The
data in this section is the drain current versus gate voltage characteristic.
The following model parameters are extracted.
- VTO Zero-bias threshold voltage
- ETA Subthreshold ideality factor
- MU0 High-field mobility
- MU1 Low-field mobility parameter
- MMU Low-field mobility exponent
- MUS Subthreshold mobility
- MK Kink effect exponent
After this step has been completed, the fit to measured data will be as shown in
opt_ex21_01.png
.
Section 2: idvg_large
This section extracts preliminary values of the following leakage current parameters.
- BLK Leakage barrier lowering constant
- DD Vds field constant
- DG Vgs field constant
- EB Barrier height of diode
After this step has been completed, the fit to measured data will be as shown in
opt_ex21_02.png
.
Section 3: iv_large
This section uses combined id-vgs and id-vds large geometry data to extract the
model parameters responsible for the saturation region of the device. The following
parameters are optimized.
- VTO Zero-bias threshold voltage
- MU0 High-field mobility
- MU1 Low-field mobility parameter
- MMU Low-field mobility exponent
- MUS Subthreshold mobility
- MK Kink effect exponent
- VKINK Kink effect voltage
- DELTA Transition width parameter
- ASAT Proportionality constant of Vdsat
- VMAX Saturation velocity
- LAMBDA Channel length modulation parameter
After this step has been completed, the fit to measured data will be as shown in
opt_ex21_03.png
.
Section 4: idvg_large
This section refines the values of previously extracted leakage current parameters.
The following parameters are optimized.
- BLK Leakage barrier lowering constant
- DD Vds field constant
- DG Vgs field constant
- EB Barrier height of diode
After this step has been completed, the fit to measured data will be as shown in
opt_ex21_04.png
.
Section 5 : iv_larray
This section uses combined id-vgs and id-vds of devices with multiple gate lengths
to optimize the following model parameters responsible for the saturation region.
- VTO Zero-bias threshold voltage
- MU0 High-field mobility
- MU1 Low-field mobility parameter
- MMU Low-field mobility exponent
- MUS Subthreshold mobility
- MK Kink effect exponent
- VKINK Kink effect voltage
- LKINK Kink effect constant
- DELTA Transition width parameter
- ASAT Proportionality constant of Vdsat
- VMAX Saturation velocity
- LAMBDA Channel length modulation parameter
- AT First DIBL parameter
After this step has been completed, the fit to measured data will be as shown in
opt_ex21_05.png
.
Section 6: idvg_larray
This section optimizes the leakage current parameters using subthreshold id-vgs
data from devices with multiple channel lengths. The following parameters are
optimized.
- ETA Subthreshold ideality factor
- BLK Leakage barrier lowering constant
- DD Vds field constant
- DG Vgs field constant
- EB Barrier height of diode
- I0 Leakage scaling constant
- I00 Reverse diode saturation constant
After this step has been completed, the fit to measured data will be as shown in
opt_ex21_06.png
.
Section 7 : iv_larray
This section refines all previously extracted parameters using combined I-V data
from devices of multiple gate lengths.
After this step has been completed, the fit to measured data will be as shown in
opt_ex21_07.png
.
When complete, the model card and the netlist parameters can be exported into
an external model library file as shown in the output file
opt_ex21.lib.
Graphics
Files
opt_ex21.lib
.PARAM res = 4184.07
.MODEL ntft NTFT (
+LEVEL = 36 VERSION = 2 TNOM = 27
+TOX = 1e-07 VTO = 2.36006 VFB = -0.1
+VON = 0 DVT = 0 VKINK = 18.3367
+VSI = 2 VST = 2 MU1 = 0.0100748
+MMU = 1.90003 MU0 = 10.0945 MK = 8.22365
+MUS = 17.3898 RD = res RS = res
+BT = 1.3e-06 BLK = 0.000294721 DD = 1.12294e-07
+DELTA = 3.99279 DG = 1.09486e-07 EB = 0.507969
+ETA = 10.6987 I0 = 9.82327 I00 = 84.9234
+ASAT = 1.03641 AT = 1.64967e-10 DASAT = 0
+LASAT = 0 LKINK = 4.66355e-06 DVTO = 0
+DMU1 = 0 CAPMOD = 0 ETAC00 = 0
+MC = 3 RDX = 0 RSX = 0
+ZEROC = 0 ME = 2.5 MSS = 1.5
+VMAX = 57247.9 THETA = 0 ISUBMOD = 0
+LAMBDA = 0.0427131 INTDSNOD = 0 SCALERPI = 0 )opt_ex21.uds
Utmost IV CSV Data Logfile
Format Version 2
Copyright (c) 1984-2018 Silvaco, Inc. All rights reserved
DataSetStart
DataSetName, idvd
MeasurementType, DC
BatchName, opt_ex21
WaferName, tcad
DieName, tcad
DeviceName, n10x10
Temperature, 27
FabDate, 1 May 2018
UserDate, 1 May 2018
Attribute, W, 1e-05
Attribute, L, 1e-05
NodeNames, s g d
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Plot, gds, XY (LIN LOG), vd, gds
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DataSetFinish
DataSetStart
DataSetName, idvd
MeasurementType, DC
BatchName, opt_ex21
WaferName, tcad
DieName, tcad
DeviceName, n10x5
Temperature, 27
FabDate, 1 May 2018
UserDate, 1 May 2018
Attribute, W, 1e-05
Attribute, L, 5e-06
NodeNames, s g d
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Plot, gds, XY (LIN LOG), vd, gds
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DataSetFinish
DataSetStart
DataSetName, idvd
MeasurementType, DC
BatchName, opt_ex21
WaferName, tcad
DieName, tcad
DeviceName, n10x6
Temperature, 27
FabDate, 1 May 2018
UserDate, 1 May 2018
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DataSetFinish
DataSetStart
DataSetName, idvd
MeasurementType, DC
BatchName, opt_ex21
WaferName, tcad
DieName, tcad
DeviceName, n10x7
Temperature, 27
FabDate, 1 May 2018
UserDate, 1 May 2018
Attribute, W, 1e-05
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