Requires: Utmost IV, SmartSpice, SmartView
Minimum Versions: Utmost IV 2.2.0.R, SmartSpice 4.30.0.R, SmartView 2.34.0.R
This example describes how to extract a Mextram Level 504 model for a bipolar
transistor. To extract the model, typical forward and reverse operation
DC characteristics and reverse bias capacitance characteristics of each
junction are required.
The project file
opt_ex17.prj
and the data file
opt_ex17.uds
for this example should be loaded into your database. When opened, the
project will look as shown in
opt_ex17_01.png
and when plotted, the example measured data will look as shown in
opt_ex17_02.png
.
The optimization sequence, which fully automates the extraction of this
Mextram bipolar model example, has seven sections. The objective of each
section is to isolate a device characteristic and then to optimize only those
model parameters which account for this device behavior.
The Mextram bipolar model couples the capacitance and the charge equations
together. Therefore, it is important to extract the capacitance parameters
first to avoid having to readjust the DC model parameters later.
The first section extracts the
CJE
,
PE
,
VDE
,
CJC
,
PC
,
VDC
,
CJS
,
PS
,
VDS
, and
XP
model parameters which describe the reverse bias capacitance characteristics of
all three transistor junctions.
Once the capacitance parameters are extracted, the second section will extract
the reverse Gummel parameters
IS
,
VLR
,
IBR
,
BRI
,
RCV
,
RBV
,
RCC
, and
RBC
. Then the third section will extract the reverse output characteristic parameter
VER
.
The fourth section is used to refine all parameters extracted in the previous
two sections.
As the forward operation of the transistor is more important than the reverse,
these model parameters are extracted last. In this way, the goodness of fit to
the reverse data can be sacrificed if necessary to achieve the best fit to the
forward data.
The fifth section extracts the parameters
IS
,
BF
,
IBF
,
MLF
,
RE
,
IK
to fit to the forward Gummel data, and the sixth section extracts the model
parameter
VEF
to fit to the forward output characteristics.
Finally, the last section is used to refine all forward mode parameters that have been
extracted in the previous two sections.
On completion of the sequence, the measured versus simulated
characteristics should be as shown in
opt_ex17_03.png
. The model card can then be exported into an external model library file
as shown in the output file
opt_ex17.lib.
Graphics
Files
opt_ex17.lib
.MODEL npn_mextram NPN (
+LEVEL = 504 TNOM = 27 MULT = 1
+DTA = 0 EXMOD = 0 EXPHI = 1
+EXAVL = 0 SELFT = 0 IS = 8.60708e-17
+IK = 0.00195507 VER = 19.3323 VEF = 32.5963
+BF = 36.236 IBF = 7.50703e-13 MLF = 2.94231
+XIBI = 0 BRI = 0.893107 IBR = 4.61092e-11
+VLR = 0.536101 XEXT = 0.63 WAVL = 1.1e-06
+VAVL = 3 SFH = 0.3 RE = 1.85427
+RBC = 216.715 RBV = 14.05 RCC = 0.1
+RCV = 0.1 SCRCV = 1250 IHC = 0.004
+AXI = 0.3 CJE = 3.58966e-14 VDE = 0.687559
+PE = 0.313848 XCJE = 0 CJC = 5.24888e-14
+VDC = 0.554759 PC = 0.349356 XP = 0.00331876
+MC = 0.5 XCJC = 1 MTAU = 1
+TAUE = 2e-12 TAUB = 4.2e-12 TEPI = 4.1e-11
+TAUR = 5.2e-10 XREC = 0 AQBO = 0.3
+AE = 0 AB = 1 AEPI = 2.5
+AEX = 0.62 AC = 2 DVGBF = 0.05
+DVGBR = 0.045 VGB = 1.17 VGC = 1.18
+VGJ = 1.15 DVGTE = 0.05 AF = 2
+KF = 2e-11 KFN = 2e-11 ISS = 4.8e-17
+IKS = 0.00025 CJS = 7.0283e-13 VDS = 0.57862
+PS = 0.0509052 VGS = 1.2 AS = 1.58
+RTH = 300 CTH = 3e-09 )opt_ex17.uds
Utmost IV CSV Data Logfile
Format Version 2
Copyright (c) 1984-2018 Silvaco, Inc. All rights reserved
DataSetStart
DataSetName, Cbc
MeasurementType, LCR
BatchName, opt_ex17
WaferName, 1
DieName, 1
GroupName, 1, 0, 12000
DeviceName, npn1
Temperature, 27
FabDate, 23 Apr 2007
UserDate, 23 Apr 2007
WaferDiameter, 200
DieSize, 20, 20
NodeNames, C B E S
LCRSource, B, C, 1e+06, V, 0
LCRTarget, CP
Sweep, 1, V_LCR, LIN, 0.1, -5, -0.1, CALCULATED
Constant, V, E, 0, 0.1, 0
Constant, V, C, 0, 0.1, 0
Constant, V, S, 0, 0.1, 0
Function, VB, VC + V_LCR
Plot, cbc, XY (LIN LIN), VB, CP
DataArray, CP
5.6274e-14 5.25e-14 4.95507e-14 4.71557e-14
4.51556e-14 4.34492e-14 4.19687e-14 4.06667e-14
3.95087e-14 3.8469e-14 3.75281e-14 3.66708e-14
3.58848e-14 3.51604e-14 3.44897e-14 3.38661e-14
3.32841e-14 3.27391e-14 3.22272e-14 3.17451e-14
3.12898e-14 3.08588e-14 3.04501e-14 3.00615e-14
2.96916e-14 2.93387e-14 2.90016e-14 2.8679e-14
2.83699e-14 2.80734e-14 2.77886e-14 2.75146e-14
2.72509e-14 2.69967e-14 2.67515e-14 2.65147e-14
2.62859e-14 2.60645e-14 2.58502e-14 2.56426e-14
2.54413e-14 2.5246e-14 2.50564e-14 2.48722e-14
2.46932e-14 2.4519e-14 2.43496e-14 2.41846e-14
2.40239e-14 2.38672e-14 2.37144e-14 2.35654e-14
DataSetFinish
DataSetStart
DataSetName, Cbe
MeasurementType, LCR
BatchName, opt_ex17
WaferName, 1
DieName, 1
GroupName, 1, 0, 12000
DeviceName, npn1
Temperature, 27
FabDate, 23 Apr 2007
UserDate, 23 Apr 2007
WaferDiameter, 200
DieSize, 20, 20
NodeNames, C B E S
LCRSource, E, B, 1e+06, V, 0
LCRTarget, CP
Sweep, 1, V_LCR, LIN, -0.1, 2, 0.1, CALCULATED
Constant, V, C, 0, 0.1, 0
Constant, V, B, 0, 0.01, 0
Constant, V, S, 0, 0.1, 0
Function, VE, VB + V_LCR
Plot, cbe, XY (LIN LIN), VE, CP
DataArray, CP
3.77173e-14 3.59e-14 3.4401e-14 3.31335e-14
3.20411e-14 3.10853e-14 3.02387e-14 2.94809e-14
2.87968e-14 2.81746e-14 2.76051e-14 2.70809e-14
2.65961e-14 2.61456e-14 2.57255e-14 2.53323e-14
2.4963e-14 2.46154e-14 2.42871e-14 2.39764e-14
2.36818e-14 2.34017e-14
DataSetFinish
DataSetStart
DataSetName, Ccs
MeasurementType, LCR
BatchName, opt_ex17
WaferName, 1
DieName, 1
GroupName, 1, 0, 12000
DeviceName, npn1
Temperature, 27
FabDate, 23 Apr 2007
UserDate, 23 Apr 2007
WaferDiameter, 200
DieSize, 20, 20
NodeNames, C B E S
LCRSource, C, S, 1e+06, V, 0
LCRTarget, CP
Sweep, 1, V_LCR, LIN, -0.1, 5, 0.1, CALCULATED
Constant, V, E, 0, 0.1, 0
Constant, V, B, 0, 0.01, 0
Constant, V, S, 0, 0.1, 0
Function, VC, VS + V_LCR
Plot, ccs, XY (LIN LIN), VC, CP
DataArray, CP
7.12799e-13 7.05e-13 6.98691e-13 6.93402e-13
6.88852e-13 6.84863e-13 6.81315e-13 6.78121e-13
6.75218e-13 6.72559e-13 6.70106e-13 6.67831e-13
6.65709e-13 6.63723e-13 6.61855e-13 6.60093e-13
6.58426e-13 6.56844e-13 6.55339e-13 6.53905e-13
6.52534e-13 6.51222e-13 6.49964e-13 6.48756e-13
6.47594e-13 6.46474e-13 6.45395e-13 6.44352e-13
6.43344e-13 6.42369e-13 6.41424e-13 6.40508e-13
6.39619e-13 6.38756e-13 6.37917e-13 6.371e-13
6.36306e-13 6.35531e-13 6.34777e-13 6.34041e-13
6.33323e-13 6.32621e-13 6.31936e-13 6.31267e-13
6.30612e-13 6.29971e-13 6.29344e-13 6.2873e-13
6.28128e-13 6.27539e-13 6.2696e-13 6.26394e-13
DataSetFinish
DataSetStart
DataSetName, Gummel
MeasurementType, DC
BatchName, opt_ex17
WaferName, 1
DieName, 1
GroupName, 1, 0, 12000
DeviceName, npn1
Temperature, 27
FabDate, 23 Apr 2007
UserDate, 23 Apr 2007
WaferDiameter, 200
DieSize, 20, 20
NodeNames, C B E S
Sweep, 1, V, B, LIN, 0.5, 1, CALCULATED, 51, 0.1, 0.0
Constant, V, E, 0, 0.1, 0
Constant, V, S, 0, 0.1, 0
Constant, V, C, 2, 0.1, 0
Target, I, B
Target, I, C
Function, beta, IC / IB
Plot, beta, XY (LOG LIN), IC, beta
Plot, gummel, XY (LIN LOG), VB, IC IB
DataArray, IB
9.39533e-10 1.31163e-09 1.83968e-09 2.59186e-09
3.66703e-09 5.2088e-09 7.42606e-09 1.06231e-08
1.52436e-08 2.19352e-08 3.16434e-08 4.57493e-08
6.62701e-08 9.61498e-08 1.3968e-07 2.03102e-07
2.95463e-07 4.2981e-07 6.24814e-07 9.06919e-07
1.31304e-06 1.89372e-06 2.71653e-06 3.86918e-06
5.46176e-06 7.62758e-06 1.05222e-05 1.43209e-05
1.92144e-05 2.54033e-05 3.30923e-05 4.24832e-05
5.37685e-05 6.71257e-05 8.27128e-05 0.000100665
0.000121093 0.000144082 0.000169695 0.00019797
0.000228926 0.000262564 0.000298869 0.000337815
0.000379362 0.000423465 0.000470071 0.000519121
0.000570555 0.000624308 0.000680316
DataArray, IC
2.14005e-08 3.14807e-08 4.63087e-08 6.81202e-08
1.00203e-07 1.47394e-07 2.16802e-07 3.18878e-07
4.68981e-07 6.89668e-07 1.01405e-06 1.49066e-06
2.19057e-06 3.21755e-06 4.72269e-06 6.92482e-06
1.01388e-05 1.48128e-05 2.1576e-05 3.12933e-05
4.51206e-05 6.45428e-05 9.13719e-05 0.000127674
0.000175612 0.000237223 0.000314184 0.000407631
0.000518093 0.000645515 0.000789361 0.000948728
0.00112247 0.00130929 0.00150782 0.0017167
0.00193459 0.00216021 0.00239238 0.00263
0.00287208 0.00311773 0.00336616 0.00361667
0.00386865 0.00412157 0.00437497 0.00462844
0.00488165 0.00513431 0.00538616
DataSetFinish
DataSetStart
DataSetName, ICvsVCE
MeasurementType, DC
BatchName, opt_ex17
WaferName, 1
DieName, 1
GroupName, 1, 0, 12000
DeviceName, npn1
Temperature, 27
FabDate, 23 Apr 2007
UserDate, 23 Apr 2007
WaferDiameter, 200
DieSize, 20, 20
NodeNames, C B E S
Sweep, 1, V, C, LIN, 0, 5, CALCULATED, 51, 0.1, 0.0
Sweep, 2, I, B, LIN, 1e-06, CALCULATED, 1e-06, 5, 2, 0.0
Constant, V, S, 0, 0.1, 0
Constant, V, E, 0, 0.1, 0
Target, I, C
Function, rout, 1 / gout
Function, gout, derivative (VC, IC)
Plot, gout, XY (LIN LOG), VC, gout
Plot, icvce, XY (LIN LIN), VC, IC
Plot, rout, XY (LIN LOG), VC, rout
DataArray, IC
-9.96026e-07 2.85571e-06 2.57363e-05 3.30161e-05
3.35889e-05 3.36736e-05 3.37291e-05 3.37828e-05
3.38364e-05 3.389e-05 3.39437e-05 3.39973e-05
3.40509e-05 3.41045e-05 3.41582e-05 3.42118e-05
3.42654e-05 3.4319e-05 3.43726e-05 3.44263e-05
3.44799e-05 3.45335e-05 3.45871e-05 3.46408e-05
3.46944e-05 3.4748e-05 3.48016e-05 3.48553e-05
3.49089e-05 3.49625e-05 3.50161e-05 3.50697e-05
3.51234e-05 3.5177e-05 3.52306e-05 3.52842e-05
3.53379e-05 3.53915e-05 3.54451e-05 3.54987e-05
3.55523e-05 3.5606e-05 3.56596e-05 3.57132e-05
3.57668e-05 3.58205e-05 3.58741e-05 3.59277e-05
3.59813e-05 3.6035e-05 3.60886e-05 -1.98977e-06
7.23369e-06 5.21727e-05 6.52664e-05 6.62991e-05
6.64604e-05 6.65696e-05 6.66758e-05 6.67818e-05
6.68877e-05 6.69937e-05 6.70996e-05 6.72056e-05
6.73116e-05 6.74175e-05 6.75235e-05 6.76295e-05
6.77354e-05 6.78414e-05 6.79474e-05 6.80533e-05
6.81593e-05 6.82652e-05 6.83712e-05 6.84772e-05
6.85831e-05 6.86891e-05 6.87951e-05 6.8901e-05
6.9007e-05 6.9113e-05 6.92189e-05 6.93249e-05
6.94308e-05 6.95368e-05 6.96428e-05 6.97487e-05
6.98547e-05 6.99607e-05 7.00666e-05 7.01726e-05
7.02786e-05 7.03845e-05 7.04905e-05 7.05964e-05
7.07024e-05 7.08084e-05 7.09143e-05 7.10203e-05
7.11263e-05 7.12322e-05 -2.98148e-06 1.21652e-05
7.76875e-05 9.63592e-05 9.78457e-05 9.80816e-05
9.82428e-05 9.83995e-05 9.85561e-05 9.87125e-05
9.8869e-05 9.90255e-05 9.9182e-05 9.93385e-05
9.9495e-05 9.96515e-05 9.9808e-05 9.99645e-05
0.000100121 0.000100277 0.000100434 0.00010059
0.000100747 0.000100903 0.00010106 0.000101216
0.000101373 0.000101529 0.000101686 0.000101842
0.000101999 0.000102155 0.000102312 0.000102468
0.000102625 0.000102781 0.000102938 0.000103094
0.000103251 0.000103407 0.000103564 0.00010372
0.000103877 0.000104033 0.00010419 0.000104346
0.000104503 0.000104659 0.000104816 0.000104972
0.000105129 -3.97113e-06 1.73663e-05 0.00010214
0.000126358 0.000128309 0.000128619 0.00012883
0.000129036 0.000129241 0.000129446 0.000129652
0.000129857 0.000130062 0.000130268 0.000130473
0.000130678 0.000130884 0.000131089 0.000131294
0.0001315 0.000131705 0.00013191 0.000132116
0.000132321 0.000132526 0.000132732 0.000132937
0.000133142 0.000133347 0.000133553 0.000133758
0.000133963 0.000134169 0.000134374 0.000134579
0.000134785 0.00013499 0.000135195 0.000135401
0.000135606 0.000135811 0.000136017 0.000136222
0.000136427 0.000136633 0.000136838 0.000137043
0.000137249 0.000137454 0.000137659 0.000137865
-4.95867e-06 2.26936e-05 0.000125533 0.000155346
0.00015778 0.000158163 0.000158423 0.000158676
0.000158929 0.000159181 0.000159434 0.000159687
0.000159939 0.000160192 0.000160444 0.000160697
0.00016095 0.000161202 0.000161455 0.000161707
0.00016196 0.000162212 0.000162465 0.000162718
0.00016297 0.000163223 0.000163475 0.000163728
0.000163981 0.000164233 0.000164486 0.000164738
0.000164991 0.000165243 0.000165496 0.000165749
0.000166001 0.000166254 0.000166506 0.000166759
0.000167012 0.000167264 0.000167517 0.000167769
0.000168022 0.000168274 0.000168527 0.00016878
0.000169032 0.000169285 0.000169537
DataSetFinish
DataSetStart
DataSetName, IEvsVCE
MeasurementType, DC
BatchName, opt_ex17
WaferName, 1
DieName, 1
GroupName, 1, 0, 12000
DeviceName, npn1
Temperature, 27
FabDate, 23 Apr 2007
UserDate, 23 Apr 2007
WaferDiameter, 200
DieSize, 20, 20
NodeNames, C B E S
Sweep, 1, V, E, LIN, 0, 0.75, CALCULATED, 51, 0.1, 0.0
Sweep, 2, I, B, LIN, 1e-06, CALCULATED, 1e-06, 5, 2, 0.0
Constant, V, S, 0, 0.1, 0
Constant, V, C, 0, 0.1, 0
Target, I, E
Plot, ievec, XY (LIN LIN), VE, IE
DataArray, IE
-3.97448e-09 3.99618e-08 6.47407e-08 7.87161e-08
8.66105e-08 9.10848e-08 9.36362e-08 9.51063e-08
9.59682e-08 9.64875e-08 9.68139e-08 9.70314e-08
9.71874e-08 9.73086e-08 9.741e-08 9.75001e-08
9.75838e-08 9.76639e-08 9.77418e-08 9.78185e-08
9.78945e-08 9.79701e-08 9.80454e-08 9.81206e-08
9.81957e-08 9.82707e-08 9.83457e-08 9.84207e-08
9.84957e-08 9.85706e-08 9.86456e-08 9.87205e-08
9.87955e-08 9.88704e-08 9.89454e-08 9.90203e-08
9.90953e-08 9.91702e-08 9.92451e-08 9.93201e-08
9.9395e-08 9.947e-08 9.95449e-08 9.96198e-08
9.96948e-08 9.97697e-08 9.98447e-08 9.99196e-08
9.99946e-08 1.00069e-07 1.00144e-07 -1.02257e-08
1.00895e-07 1.63602e-07 1.98969e-07 2.18939e-07
2.3025e-07 2.36694e-07 2.40402e-07 2.42573e-07
2.43879e-07 2.44699e-07 2.45245e-07 2.45637e-07
2.45941e-07 2.46196e-07 2.46423e-07 2.46634e-07
2.46836e-07 2.47033e-07 2.47227e-07 2.47419e-07
2.4761e-07 2.47801e-07 2.47991e-07 2.48181e-07
2.48371e-07 2.48561e-07 2.4875e-07 2.4894e-07
2.4913e-07 2.4932e-07 2.49509e-07 2.49699e-07
2.49889e-07 2.50079e-07 2.50268e-07 2.50458e-07
2.50648e-07 2.50837e-07 2.51027e-07 2.51217e-07
2.51407e-07 2.51596e-07 2.51786e-07 2.51976e-07
2.52165e-07 2.52355e-07 2.52545e-07 2.52735e-07
2.52924e-07 2.53114e-07 -1.85209e-08 1.72496e-07
2.80375e-07 3.41238e-07 3.75603e-07 3.95062e-07
4.06143e-07 4.12516e-07 4.16245e-07 4.18487e-07
4.19893e-07 4.20829e-07 4.21499e-07 4.2202e-07
4.22457e-07 4.22846e-07 4.23208e-07 4.23555e-07
4.23893e-07 4.24225e-07 4.24555e-07 4.24883e-07
4.25211e-07 4.25537e-07 4.25864e-07 4.2619e-07
4.26516e-07 4.26842e-07 4.27168e-07 4.27494e-07
4.2782e-07 4.28145e-07 4.28471e-07 4.28797e-07
4.29123e-07 4.29449e-07 4.29775e-07 4.301e-07
4.30426e-07 4.30752e-07 4.31078e-07 4.31404e-07
4.3173e-07 4.32056e-07 4.32381e-07 4.32707e-07
4.33033e-07 4.33359e-07 4.33685e-07 4.34011e-07
4.34336e-07 -2.88726e-08 2.51567e-07 4.10083e-07
4.9955e-07 5.50071e-07 5.78675e-07 5.9496e-07
6.04324e-07 6.09799e-07 6.13089e-07 6.15151e-07
6.16523e-07 6.17505e-07 6.18268e-07 6.18908e-07
6.19478e-07 6.20008e-07 6.20516e-07 6.21011e-07
6.21498e-07 6.21982e-07 6.22463e-07 6.22943e-07
6.23422e-07 6.239e-07 6.24378e-07 6.24856e-07
6.25334e-07 6.25812e-07 6.26289e-07 6.26767e-07
6.27245e-07 6.27723e-07 6.282e-07 6.28678e-07
6.29156e-07 6.29633e-07 6.30111e-07 6.30589e-07
6.31066e-07 6.31544e-07 6.32022e-07 6.32499e-07
6.32977e-07 6.33455e-07 6.33932e-07 6.3441e-07
6.34888e-07 6.35365e-07 6.35843e-07 6.36321e-07
-4.13292e-08 3.36352e-07 5.50027e-07 6.70678e-07
7.3882e-07 7.77401e-07 7.99362e-07 8.11987e-07
8.19365e-07 8.23798e-07 8.26574e-07 8.28419e-07
8.2974e-07 8.30766e-07 8.31626e-07 8.32391e-07
8.33104e-07 8.33786e-07 8.34452e-07 8.35107e-07
8.35757e-07 8.36404e-07 8.37049e-07 8.37692e-07
8.38335e-07 8.38978e-07 8.39621e-07 8.40263e-07
8.40905e-07 8.41548e-07 8.4219e-07 8.42832e-07
8.43474e-07 8.44117e-07 8.44759e-07 8.45401e-07
8.46043e-07 8.46685e-07 8.47328e-07 8.4797e-07
8.48612e-07 8.49254e-07 8.49896e-07 8.50538e-07
8.51181e-07 8.51823e-07 8.52465e-07 8.53107e-07
8.53749e-07 8.54392e-07 8.55034e-07
DataSetFinish
DataSetStart
DataSetName, RGummel
MeasurementType, DC
BatchName, opt_ex17
WaferName, 1
DieName, 1
GroupName, 1, 0, 12000
DeviceName, npn1
Temperature, 27
FabDate, 23 Apr 2007
UserDate, 23 Apr 2007
WaferDiameter, 200
DieSize, 20, 20
NodeNames, C B E S
Sweep, 1, V, B, LIN, 0.55, 1, CALCULATED, 51, 0.1, 0.0
Constant, V, E, 2, 0.1, 0
Constant, V, S, 0, 0.1, 0
Constant, V, C, 0, 0.1, 0
Target, I, B
Target, I, E
Function, rbeta, IE / IB
Plot, rbeta, XY (LOG LIN), IE, rbeta
Plot, rgummel, XY (LIN LOG), VB, IE IB
DataArray, IB
1.32684e-06 1.71508e-06 2.21616e-06 2.86211e-06
3.69351e-06 4.76135e-06 6.1291e-06 7.87485e-06
1.00931e-05 1.28963e-05 1.64144e-05 2.07937e-05
2.61927e-05 3.27747e-05 4.06992e-05 5.01107e-05
6.11279e-05 7.38355e-05 8.82786e-05 0.000104463
0.000122358 0.000141905 0.000163022 0.000185615
0.000209582 0.000234821 0.000261233 0.000288723
0.000317203 0.000346593 0.000376821 0.00040782
0.000439533 0.000471906 0.000504894 0.000538453
0.000572547 0.000607143 0.00064221 0.000677721
0.000713653 0.000749984 0.000786693 0.000823763
0.000861178 0.000898923 0.000936983 0.000975348
0.001014 0.00105294 0.00109215
DataArray, IE
1.55404e-07 2.19037e-07 3.08369e-07 4.33501e-07
6.08295e-07 8.51629e-07 1.18894e-06 1.65411e-06
2.2915e-06 3.15819e-06 4.32583e-06 5.88187e-06
7.92936e-06 1.05849e-05 1.39742e-05 1.8225e-05
2.34591e-05 2.97834e-05 3.72823e-05 4.60131e-05
5.6004e-05 6.72554e-05 7.97433e-05 9.34245e-05
0.000108242 0.000124128 0.00014101 0.000158816
0.00017747 0.000196902 0.000217044 0.000237832
0.000259205 0.000281109 0.000303492 0.000326309
0.000349515 0.000373072 0.000396944 0.000421098
0.000445505 0.000470137 0.000494969 0.00051998
0.000545148 0.000570454 0.000595882 0.000621415
0.000647038 0.00067274 0.000698506
DataSetFinish