Requires: Utmost IV, SmartSpice, SmartView
Minimum Versions: Utmost IV 1.10.6.R, SmartSpice 4.10.2.R, SmartView 2.28.2.R
This example describes how to extract a VBIC model for a bipolar
transistor. To extract the model, typical forward and reverse operation
DC characteristics and reverse bias capacitance characteristics of each
junction are required.
The project file
opt_ex07.prj
and the data file
opt_ex07.uds
for this example should be loaded into your database. When opened, the
project will look as shown in
opt_ex07_01.png
and when plotted, the example measured data will look as shown in
opt_ex07_02.png
.
The optimization sequence, which fully automates the extraction of this
VBIC bipolar model example, has five sections. The objective of each
section is to isolate a device characteristic and then to optimize only those
model parameters which account for this device behaviour.
The VBIC bipolar model couples the capacitance and the charge equations
together. Therefore, it is important to extract the capacitance parameters
first to avoid having to readjust the DC model parameters later.
The first section extracts the
CJE
,
PE
,
ME
,
CJC
,
PC
,
MC
,
CJCP
,
PS
, and
MS
model parameters which describe the reverse bias capacitance characteristics of
all three transistor junctions.
Once the capacitance parameters are extracted, the second section will extract
the reverse Gummel parameters
IS
,
NR
,
IBCI
,
IBCN
,
NCN
,
IKR
,
RCI
, and
RBI
. Then the third section will extract the reverse output characteristic parameters
VER
and
IKR
.
As the forward operation of the transistor is more important than the reverse,
these model parameters are extracted last. In this way, the goodness of fit to
the reverse data can be sacrificed if necessary to achieve the best fit to the
forward data.
The fourth section extracts the parameters
IS
,
NF
,
IBEI
,
IBEN
,
NEN
,
RE
,
IKF
to fit to the forward Gummel data and finally the fifth section extracts the model
parameters
IKF
and
VEF
to fit to the forward output characteristics.
If the overall fit to the data is not acceptable at this point, it may be
necessary to repeat the sequence multiple times. Also, if there is a marked
difference in forward and reverse saturation current (
IS
) values, it is possible to use an extension to the VBIC model which utilizes
the parameter
ISRR
which represents the ratio between the saturation current in forward
and reverse. This parameter should be added to the rgummel1 optimization
setup in place of the
IS
parameter and must be extracted after
IS
has already been extracted for the forward data.
On completion of the sequence, the measured versus simulated
characteristics should be as shown in
opt_ex07_03.png
. The model card can then be exported into an external model library file
as shown in the output file
opt_ex07.lib.
Graphics
Files
opt_ex07.lib
.LIB demo
.MODEL npn NPN (
+LEVEL = 4 TNOM = 27 RCI = 46.5798
+RCX = 0 VO = 0 GAMM = 0
+HRCF = 1 RBX = 0 RBI = 138.392
+RE = 18.0501 RS = 0 RBP = 0
+IS = 8.51658e-17 NF = 1 NR = 1.00148
+FC = 0.5 CBEO = 0 CJE = 3.59e-14
+PE = 0.686403 ME = 0.313618 AJE = -0.5
+CBCO = 0 CJC = 5.25e-14 QCO = 0
+CJEP = 0 PC = 0.551297 MC = 0.346841
+AJC = -0.5 CJCP = 7.05e-13 PS = 0.49999
+MS = 0.0493008 AJS = -0.5 IBEI = 2.30653e-18
+WBE = 1 NEI = 1 IBEN = 7.73882e-15
+NEN = 1.77629 IBCI = 7.14413e-17 NCI = 1
+IBCN = 5e-13 NCN = 1.44694 AVC1 = 0.0003
+AVC2 = 1e-05 ISP = 0 WSP = 1
+NFP = 1 IBEIP = 0 IBENP = 0
+IBCIP = 0 NCIP = 1 IBCNP = 0
+NCNP = 2 VEF = 82.0378 VER = 14.8983
+IKF = 0.00177231 IKR = 0.00176481 IKP = 0
+TF = 0 QTF = 0 XTF = 0
+VTF = 0 ITF = 0 TR = 0
+TD = 0 KFN = 0 AFN = 1
+BFN = 1 XRE = 0 XRB = 0
+XRC = 0 XRS = 0 XVO = 0
+EA = 1.12 EAIE = 1.12 EAIC = 1.12
+EAIS = 1.12 EANE = 1.12 EANC = 1.12
+EANS = 1.12 XIS = 3 XII = 3
+XIN = 3 TNF = 0 TAVC = 0
+RTH = 0 CTH = 0 SELFT = 0
+DTMAX = 0 )
.ENDL demoopt_ex07.uds
Utmost IV CSV Data Logfile
Format Version 1
Copyright (c) 1984 - 2016 Silvaco, Inc. All rights reserved
DataSetStart
DataSetName, Cbc
MeasurementType, LCR
BatchName, opt_ex07
WaferName, 1
DieName, 1
GroupName, 1, 0, 12000
DeviceName, npn1
Temperature, 27
FabDate, 23 Apr 2007
UserDate, 23 Apr 2007
WaferDiameter, 200
DieSize, 20, 20
NodeNames, C B E S
LCRSource, B, C, 1e+06, V, 0
LCRTarget, CP
Sweep, 1, V_LCR, LIN, 0.1, -5, -0.1, CALCULATED
Constant, V, E, 0, 0.1, 0.0
Constant, V, C, 0, 0.1, 0.0
Constant, V, S, 0, 0.1, 0.0
Function, VB, VC + V_LCR
Plot, cbc, XY (LIN LIN), VB, CP
DataArray, CP
5.6274e-14 5.25e-14 4.95507e-14 4.71557e-14 4.51556e-14
4.34492e-14 4.19687e-14 4.06667e-14 3.95087e-14 3.8469e-14
3.75281e-14 3.66708e-14 3.58848e-14 3.51604e-14 3.44897e-14
3.38661e-14 3.32841e-14 3.27391e-14 3.22272e-14 3.17451e-14
3.12898e-14 3.08588e-14 3.04501e-14 3.00615e-14 2.96916e-14
2.93387e-14 2.90016e-14 2.8679e-14 2.83699e-14 2.80734e-14
2.77886e-14 2.75146e-14 2.72509e-14 2.69967e-14 2.67515e-14
2.65147e-14 2.62859e-14 2.60645e-14 2.58502e-14 2.56426e-14
2.54413e-14 2.5246e-14 2.50564e-14 2.48722e-14 2.46932e-14
2.4519e-14 2.43496e-14 2.41846e-14 2.40239e-14 2.38672e-14
2.37144e-14 2.35654e-14
DataSetFinish
DataSetStart
DataSetName, Cbe
MeasurementType, LCR
BatchName, opt_ex07
WaferName, 1
DieName, 1
GroupName, 1, 0, 12000
DeviceName, npn1
Temperature, 27
FabDate, 23 Apr 2007
UserDate, 23 Apr 2007
WaferDiameter, 200
DieSize, 20, 20
NodeNames, C B E S
LCRSource, E, B, 1e+06, V, 0
LCRTarget, CP
Sweep, 1, V_LCR, LIN, -0.1, 2, 0.1, CALCULATED
Constant, V, C, 0, 0.1, 0.0
Constant, V, B, 0, 0.01, 0.0
Constant, V, S, 0, 0.1, 0.0
Function, VE, VB + V_LCR
Plot, cbe, XY (LIN LIN), VE, CP
DataArray, CP
3.77173e-14 3.59e-14 3.4401e-14 3.31335e-14 3.20411e-14
3.10853e-14 3.02387e-14 2.94809e-14 2.87968e-14 2.81746e-14
2.76051e-14 2.70809e-14 2.65961e-14 2.61456e-14 2.57255e-14
2.53323e-14 2.4963e-14 2.46154e-14 2.42871e-14 2.39764e-14
2.36818e-14 2.34017e-14
DataSetFinish
DataSetStart
DataSetName, Ccs
MeasurementType, LCR
BatchName, opt_ex07
WaferName, 1
DieName, 1
GroupName, 1, 0, 12000
DeviceName, npn1
Temperature, 27
FabDate, 23 Apr 2007
UserDate, 23 Apr 2007
WaferDiameter, 200
DieSize, 20, 20
NodeNames, C B E S
LCRSource, C, S, 1e+06, V, 0
LCRTarget, CP
Sweep, 1, V_LCR, LIN, -0.1, 5, 0.1, CALCULATED
Constant, V, E, 0, 0.1, 0.0
Constant, V, B, 0, 0.01, 0.0
Constant, V, S, 0, 0.1, 0.0
Function, VC, VS + V_LCR
Plot, ccs, XY (LIN LIN), VC, CP
DataArray, CP
7.12799e-13 7.05e-13 6.98691e-13 6.93402e-13 6.88852e-13
6.84863e-13 6.81315e-13 6.78121e-13 6.75218e-13 6.72559e-13
6.70106e-13 6.67831e-13 6.65709e-13 6.63723e-13 6.61855e-13
6.60093e-13 6.58426e-13 6.56844e-13 6.55339e-13 6.53905e-13
6.52534e-13 6.51222e-13 6.49964e-13 6.48756e-13 6.47594e-13
6.46474e-13 6.45395e-13 6.44352e-13 6.43344e-13 6.42369e-13
6.41424e-13 6.40508e-13 6.39619e-13 6.38756e-13 6.37917e-13
6.371e-13 6.36306e-13 6.35531e-13 6.34777e-13 6.34041e-13
6.33323e-13 6.32621e-13 6.31936e-13 6.31267e-13 6.30612e-13
6.29971e-13 6.29344e-13 6.2873e-13 6.28128e-13 6.27539e-13
6.2696e-13 6.26394e-13
DataSetFinish
DataSetStart
DataSetName, Gummel
MeasurementType, DC
BatchName, opt_ex07
WaferName, 1
DieName, 1
GroupName, 1, 0, 12000
DeviceName, npn1
Temperature, 27
FabDate, 23 Apr 2007
UserDate, 23 Apr 2007
WaferDiameter, 200
DieSize, 20, 20
NodeNames, C B E S
Sweep, 1, V, B, LIN, 0.5, 1, CALCULATED, 51, 0.1
Constant, V, E, 0, 0.1, 0.0
Constant, V, S, 0, 0.1, 0.0
Constant, V, C, 2, 0.1, 0.0
Target, I, B
Target, I, C
Function, beta, IC / IB
Plot, beta, XY (LOG LIN), IC, beta
Plot, gummel, XY (LIN LOG), VB, IC IB
DataArray, IB
9.39533e-10 1.31163e-09 1.83968e-09 2.59186e-09 3.66703e-09
5.2088e-09 7.42606e-09 1.06231e-08 1.52436e-08 2.19352e-08
3.16434e-08 4.57493e-08 6.62701e-08 9.61498e-08 1.3968e-07
2.03102e-07 2.95463e-07 4.2981e-07 6.24814e-07 9.06919e-07
1.31304e-06 1.89372e-06 2.71653e-06 3.86918e-06 5.46176e-06
7.62758e-06 1.05222e-05 1.43209e-05 1.92144e-05 2.54033e-05
3.30923e-05 4.24832e-05 5.37685e-05 6.71257e-05 8.27128e-05
0.000100665 0.000121093 0.000144082 0.000169695 0.00019797
0.000228926 0.000262564 0.000298869 0.000337815 0.000379362
0.000423465 0.000470071 0.000519121 0.000570555 0.000624308
0.000680316
DataArray, IC
2.14005e-08 3.14807e-08 4.63087e-08 6.81202e-08 1.00203e-07
1.47394e-07 2.16802e-07 3.18878e-07 4.68981e-07 6.89668e-07
1.01405e-06 1.49066e-06 2.19057e-06 3.21755e-06 4.72269e-06
6.92482e-06 1.01388e-05 1.48128e-05 2.1576e-05 3.12933e-05
4.51206e-05 6.45428e-05 9.13719e-05 0.000127674 0.000175612
0.000237223 0.000314184 0.000407631 0.000518093 0.000645515
0.000789361 0.000948728 0.00112247 0.00130929 0.00150782
0.0017167 0.00193459 0.00216021 0.00239238 0.00263
0.00287208 0.00311773 0.00336616 0.00361667 0.00386865
0.00412157 0.00437497 0.00462844 0.00488165 0.00513431
0.00538616
DataSetFinish
DataSetStart
DataSetName, ICvsVCE
MeasurementType, DC
BatchName, opt_ex07
WaferName, 1
DieName, 1
GroupName, 1, 0, 12000
DeviceName, npn1
Temperature, 27
FabDate, 23 Apr 2007
UserDate, 23 Apr 2007
WaferDiameter, 200
DieSize, 20, 20
NodeNames, C B E S
Sweep, 1, V, C, LIN, 0, 5, CALCULATED, 51, 0.1
Sweep, 2, I, B, LIN, 1e-06, CALCULATED, 1e-06, 5, 2
Constant, V, S, 0, 0.1, 0.0
Constant, V, E, 0, 0.1, 0.0
Target, I, C
Function, rout, 1 / gout
Function, gout, derivative (VC, IC)
Plot, gout, XY (LIN LOG), VC, gout
Plot, icvce, XY (LIN LIN), VC, IC
Plot, rout, XY (LIN LOG), VC, rout
DataArray, IC
-9.96026e-07 2.85571e-06 2.57363e-05 3.30161e-05 3.35889e-05
3.36736e-05 3.37291e-05 3.37828e-05 3.38364e-05 3.389e-05
3.39437e-05 3.39973e-05 3.40509e-05 3.41045e-05 3.41582e-05
3.42118e-05 3.42654e-05 3.4319e-05 3.43726e-05 3.44263e-05
3.44799e-05 3.45335e-05 3.45871e-05 3.46408e-05 3.46944e-05
3.4748e-05 3.48016e-05 3.48553e-05 3.49089e-05 3.49625e-05
3.50161e-05 3.50697e-05 3.51234e-05 3.5177e-05 3.52306e-05
3.52842e-05 3.53379e-05 3.53915e-05 3.54451e-05 3.54987e-05
3.55523e-05 3.5606e-05 3.56596e-05 3.57132e-05 3.57668e-05
3.58205e-05 3.58741e-05 3.59277e-05 3.59813e-05 3.6035e-05
3.60886e-05 -1.98977e-06 7.23369e-06 5.21727e-05 6.52664e-05
6.62991e-05 6.64604e-05 6.65696e-05 6.66758e-05 6.67818e-05
6.68877e-05 6.69937e-05 6.70996e-05 6.72056e-05 6.73116e-05
6.74175e-05 6.75235e-05 6.76295e-05 6.77354e-05 6.78414e-05
6.79474e-05 6.80533e-05 6.81593e-05 6.82652e-05 6.83712e-05
6.84772e-05 6.85831e-05 6.86891e-05 6.87951e-05 6.8901e-05
6.9007e-05 6.9113e-05 6.92189e-05 6.93249e-05 6.94308e-05
6.95368e-05 6.96428e-05 6.97487e-05 6.98547e-05 6.99607e-05
7.00666e-05 7.01726e-05 7.02786e-05 7.03845e-05 7.04905e-05
7.05964e-05 7.07024e-05 7.08084e-05 7.09143e-05 7.10203e-05
7.11263e-05 7.12322e-05 -2.98148e-06 1.21652e-05 7.76875e-05
9.63592e-05 9.78457e-05 9.80816e-05 9.82428e-05 9.83995e-05
9.85561e-05 9.87125e-05 9.8869e-05 9.90255e-05 9.9182e-05
9.93385e-05 9.9495e-05 9.96515e-05 9.9808e-05 9.99645e-05
0.000100121 0.000100277 0.000100434 0.00010059 0.000100747
0.000100903 0.00010106 0.000101216 0.000101373 0.000101529
0.000101686 0.000101842 0.000101999 0.000102155 0.000102312
0.000102468 0.000102625 0.000102781 0.000102938 0.000103094
0.000103251 0.000103407 0.000103564 0.00010372 0.000103877
0.000104033 0.00010419 0.000104346 0.000104503 0.000104659
0.000104816 0.000104972 0.000105129 -3.97113e-06 1.73663e-05
0.00010214 0.000126358 0.000128309 0.000128619 0.00012883
0.000129036 0.000129241 0.000129446 0.000129652 0.000129857
0.000130062 0.000130268 0.000130473 0.000130678 0.000130884
0.000131089 0.000131294 0.0001315 0.000131705 0.00013191
0.000132116 0.000132321 0.000132526 0.000132732 0.000132937
0.000133142 0.000133347 0.000133553 0.000133758 0.000133963
0.000134169 0.000134374 0.000134579 0.000134785 0.00013499
0.000135195 0.000135401 0.000135606 0.000135811 0.000136017
0.000136222 0.000136427 0.000136633 0.000136838 0.000137043
0.000137249 0.000137454 0.000137659 0.000137865 -4.95867e-06
2.26936e-05 0.000125533 0.000155346 0.00015778 0.000158163
0.000158423 0.000158676 0.000158929 0.000159181 0.000159434
0.000159687 0.000159939 0.000160192 0.000160444 0.000160697
0.00016095 0.000161202 0.000161455 0.000161707 0.00016196
0.000162212 0.000162465 0.000162718 0.00016297 0.000163223
0.000163475 0.000163728 0.000163981 0.000164233 0.000164486
0.000164738 0.000164991 0.000165243 0.000165496 0.000165749
0.000166001 0.000166254 0.000166506 0.000166759 0.000167012
0.000167264 0.000167517 0.000167769 0.000168022 0.000168274
0.000168527 0.00016878 0.000169032 0.000169285 0.000169537
DataSetFinish
DataSetStart
DataSetName, IEvsVCE
MeasurementType, DC
BatchName, opt_ex07
WaferName, 1
DieName, 1
GroupName, 1, 0, 12000
DeviceName, npn1
Temperature, 27
FabDate, 23 Apr 2007
UserDate, 23 Apr 2007
WaferDiameter, 200
DieSize, 20, 20
NodeNames, C B E S
Sweep, 1, V, E, LIN, 0, 0.75, CALCULATED, 51, 0.1
Sweep, 2, I, B, LIN, 1e-06, CALCULATED, 1e-06, 5, 2
Constant, V, S, 0, 0.1, 0.0
Constant, V, C, 0, 0.1, 0.0
Target, I, E
Plot, ievec, XY (LIN LIN), VE, IE
DataArray, IE
-3.97448e-09 3.99618e-08 6.47407e-08 7.87161e-08 8.66105e-08
9.10848e-08 9.36362e-08 9.51063e-08 9.59682e-08 9.64875e-08
9.68139e-08 9.70314e-08 9.71874e-08 9.73086e-08 9.741e-08
9.75001e-08 9.75838e-08 9.76639e-08 9.77418e-08 9.78185e-08
9.78945e-08 9.79701e-08 9.80454e-08 9.81206e-08 9.81957e-08
9.82707e-08 9.83457e-08 9.84207e-08 9.84957e-08 9.85706e-08
9.86456e-08 9.87205e-08 9.87955e-08 9.88704e-08 9.89454e-08
9.90203e-08 9.90953e-08 9.91702e-08 9.92451e-08 9.93201e-08
9.9395e-08 9.947e-08 9.95449e-08 9.96198e-08 9.96948e-08
9.97697e-08 9.98447e-08 9.99196e-08 9.99946e-08 1.00069e-07
1.00144e-07 -1.02257e-08 1.00895e-07 1.63602e-07 1.98969e-07
2.18939e-07 2.3025e-07 2.36694e-07 2.40402e-07 2.42573e-07
2.43879e-07 2.44699e-07 2.45245e-07 2.45637e-07 2.45941e-07
2.46196e-07 2.46423e-07 2.46634e-07 2.46836e-07 2.47033e-07
2.47227e-07 2.47419e-07 2.4761e-07 2.47801e-07 2.47991e-07
2.48181e-07 2.48371e-07 2.48561e-07 2.4875e-07 2.4894e-07
2.4913e-07 2.4932e-07 2.49509e-07 2.49699e-07 2.49889e-07
2.50079e-07 2.50268e-07 2.50458e-07 2.50648e-07 2.50837e-07
2.51027e-07 2.51217e-07 2.51407e-07 2.51596e-07 2.51786e-07
2.51976e-07 2.52165e-07 2.52355e-07 2.52545e-07 2.52735e-07
2.52924e-07 2.53114e-07 -1.85209e-08 1.72496e-07 2.80375e-07
3.41238e-07 3.75603e-07 3.95062e-07 4.06143e-07 4.12516e-07
4.16245e-07 4.18487e-07 4.19893e-07 4.20829e-07 4.21499e-07
4.2202e-07 4.22457e-07 4.22846e-07 4.23208e-07 4.23555e-07
4.23893e-07 4.24225e-07 4.24555e-07 4.24883e-07 4.25211e-07
4.25537e-07 4.25864e-07 4.2619e-07 4.26516e-07 4.26842e-07
4.27168e-07 4.27494e-07 4.2782e-07 4.28145e-07 4.28471e-07
4.28797e-07 4.29123e-07 4.29449e-07 4.29775e-07 4.301e-07
4.30426e-07 4.30752e-07 4.31078e-07 4.31404e-07 4.3173e-07
4.32056e-07 4.32381e-07 4.32707e-07 4.33033e-07 4.33359e-07
4.33685e-07 4.34011e-07 4.34336e-07 -2.88726e-08 2.51567e-07
4.10083e-07 4.9955e-07 5.50071e-07 5.78675e-07 5.9496e-07
6.04324e-07 6.09799e-07 6.13089e-07 6.15151e-07 6.16523e-07
6.17505e-07 6.18268e-07 6.18908e-07 6.19478e-07 6.20008e-07
6.20516e-07 6.21011e-07 6.21498e-07 6.21982e-07 6.22463e-07
6.22943e-07 6.23422e-07 6.239e-07 6.24378e-07 6.24856e-07
6.25334e-07 6.25812e-07 6.26289e-07 6.26767e-07 6.27245e-07
6.27723e-07 6.282e-07 6.28678e-07 6.29156e-07 6.29633e-07
6.30111e-07 6.30589e-07 6.31066e-07 6.31544e-07 6.32022e-07
6.32499e-07 6.32977e-07 6.33455e-07 6.33932e-07 6.3441e-07
6.34888e-07 6.35365e-07 6.35843e-07 6.36321e-07 -4.13292e-08
3.36352e-07 5.50027e-07 6.70678e-07 7.3882e-07 7.77401e-07
7.99362e-07 8.11987e-07 8.19365e-07 8.23798e-07 8.26574e-07
8.28419e-07 8.2974e-07 8.30766e-07 8.31626e-07 8.32391e-07
8.33104e-07 8.33786e-07 8.34452e-07 8.35107e-07 8.35757e-07
8.36404e-07 8.37049e-07 8.37692e-07 8.38335e-07 8.38978e-07
8.39621e-07 8.40263e-07 8.40905e-07 8.41548e-07 8.4219e-07
8.42832e-07 8.43474e-07 8.44117e-07 8.44759e-07 8.45401e-07
8.46043e-07 8.46685e-07 8.47328e-07 8.4797e-07 8.48612e-07
8.49254e-07 8.49896e-07 8.50538e-07 8.51181e-07 8.51823e-07
8.52465e-07 8.53107e-07 8.53749e-07 8.54392e-07 8.55034e-07
DataSetFinish
DataSetStart
DataSetName, RGummel
MeasurementType, DC
BatchName, opt_ex07
WaferName, 1
DieName, 1
GroupName, 1, 0, 12000
DeviceName, npn1
Temperature, 27
FabDate, 23 Apr 2007
UserDate, 23 Apr 2007
WaferDiameter, 200
DieSize, 20, 20
NodeNames, C B E S
Sweep, 1, V, B, LIN, 0.55, 1, CALCULATED, 51, 0.1
Constant, V, E, 2, 0.1, 0.0
Constant, V, S, 0, 0.1, 0.0
Constant, V, C, 0, 0.1, 0.0
Target, I, B
Target, I, E
Function, rbeta, IE / IB
Plot, rbeta, XY (LOG LIN), IE, rbeta
Plot, rgummel, XY (LIN LOG), VB, IE IB
DataArray, IB
1.32684e-06 1.71508e-06 2.21616e-06 2.86211e-06 3.69351e-06
4.76135e-06 6.1291e-06 7.87485e-06 1.00931e-05 1.28963e-05
1.64144e-05 2.07937e-05 2.61927e-05 3.27747e-05 4.06992e-05
5.01107e-05 6.11279e-05 7.38355e-05 8.82786e-05 0.000104463
0.000122358 0.000141905 0.000163022 0.000185615 0.000209582
0.000234821 0.000261233 0.000288723 0.000317203 0.000346593
0.000376821 0.00040782 0.000439533 0.000471906 0.000504894
0.000538453 0.000572547 0.000607143 0.00064221 0.000677721
0.000713653 0.000749984 0.000786693 0.000823763 0.000861178
0.000898923 0.000936983 0.000975348 0.001014 0.00105294
0.00109215
DataArray, IE
1.55404e-07 2.19037e-07 3.08369e-07 4.33501e-07 6.08295e-07
8.51629e-07 1.18894e-06 1.65411e-06 2.2915e-06 3.15819e-06
4.32583e-06 5.88187e-06 7.92936e-06 1.05849e-05 1.39742e-05
1.8225e-05 2.34591e-05 2.97834e-05 3.72823e-05 4.60131e-05
5.6004e-05 6.72554e-05 7.97433e-05 9.34245e-05 0.000108242
0.000124128 0.00014101 0.000158816 0.00017747 0.000196902
0.000217044 0.000237832 0.000259205 0.000281109 0.000303492
0.000326309 0.000349515 0.000373072 0.000396944 0.000421098
0.000445505 0.000470137 0.000494969 0.00051998 0.000545148
0.000570454 0.000595882 0.000621415 0.000647038 0.00067274
0.000698506
DataSetFinish