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VRCx_ex15.in : Local Oxidation (LOCOS)

VRCx_ex15.in : Local Oxidation (LOCOS)

VRCx_ex15.in : Local Oxidation (LOCOS)

Every software package contains a full set of examples suitable for that version and are installed with the software. If you see examples here that are not in your installation you should consider updating to a later version of the software. These examples can be used by beginners and advanced users for product evaluation, teaching purposes, and self-training.

Required Modules

Victory Process

  • 2D Oxidation

Victory Mesh

  • 2D Meshing

Victory RCx

This example demonstrates the 3D oxidation model (LOCOS) included in Victory Process. Oxidation can be included in the process flow to more accurately model the geometry around the active device areas. Once the process simulation is complete the structure is saved with the Save statement and can be plotted.

Images

VRCx_ex15_01.png

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