Every software package contains a full set of examples suitable for that version and are installed with the software. If you see examples here that are not in your installation you should consider updating to a later version of the software. These examples can be used by beginners and advanced users for product evaluation, teaching purposes, and self-training.
Required Modules
Victory Process
- 2D Oxidation
- 2D Diffusion & Implantation
This example demonstrates ability to perform oxidation in mixed gas ambient. The gas flows can be specified in relative units for each flow of oxygen, water, hydrogen, and nitrogen by the parameters F.O2, F.H2O, F.H2, and F.N2 on the DIFFUSE statement.
Loops are used to sweep the flow rate parameter in three steps. The initial value is incremented at the end of the loop.
The oxide thickness vertically and horizontally on the trench sidewall are extracted demonstrating orientation dependence oxidation.
Oxidation parameter and settings can be calibrated for each individual ambient (dry or wet) as well as for mixed ambient (dry+wet) with MATERIAL and METHOD statements.
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