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VP_Masking_ex04.in : Optical proximity correction (OPC): LER using external PSD file

VP_Masking_ex04.in : Optical proximity correction (OPC): LER using external PSD file

VP_Masking_ex04.in : Optical proximity correction (OPC): LER using external PSD file

Every software package contains a full set of examples suitable for that version and are installed with the software. If you see examples here that are not in your installation you should consider updating to a later version of the software. These examples can be used by beginners and advanced users for product evaluation, teaching purposes, and self-training.

Required Modules

Victory Process

  • Core Simulator

This example demonstrates how to add noise to a pre-existing layout file. The example first creates a layout file using “SPECIFYMASKPOLY ” statement. SPECIFYMASKPOLY statement allows you create a new mask by adding random noise to an existing mask.

“ADDNOISETOMASK ” parameter in “SPECIFYMASKPOLY ” statement indicates that the statement is used for adding noise to an existing mask. The value of the parameter is the name of the mask to which small perturbations will be added. The resulting mask will be given a new name as specified by NEWMASK parameter value.

The example uses an external PSD (Power-Spectral Density) file to specify the Line-Edge Roughness (LER). When the input file is set, noise with the provided PSD will be added to all edges of the mask layout.

Victory Visual is uses to observe the LER (line edge roughness) added to the structure.

Images

VP_Masking_ex04_01.png

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