Every software package contains a full set of examples suitable for that version and are installed with the software. If you see examples here that are not in your installation you should consider updating to a later version of the software. These examples can be used by beginners and advanced users for product evaluation, teaching purposes, and self-training.
Required Modules
Victory Process
- 2D Diffusion & Implantation
The example demonstrates the effect of implant angle (tilt), implant energy and dose on the implant profile. The example is set up to contain 3 experiments:
Implants boron at 10 keV and with a dose of 1e14 using bca implant model, with 0, 1, 3, 5 and 7 degree tilts. The output plot compares the profiles of the implanted boron. Each implant is performed independently over a bare silicon surface to obtain comparative results.
Implants boron using bca implant model. The implant is performed at 7 degree tilt and 1e14 cm-3 dose and energy is varied to include 20 keV, 40 keV, 60 keV and 100 keV implants. Each implant is performed independently over a bare silicon surface to obtain comparative results.
Implants boron using bca implant model. The implant is performed at 7 degree tilt at a constant energy of 10 keV. The dose is varied to include 2e11 cm-2, 2e13 cm-2, 2e14 cm-2, and 2e15 cm-2. Each implant is performed independently over a bare silicon surface to obtain comparative results.
The output profiles are plotted and compared. Since the implant is not masked, the simulation in Victory Process remains in 1D mode.
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