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VP_Etch_Dep_ex11.in : 3D Saddle Fin

VP_Etch_Dep_ex11.in : 3D Saddle Fin

VP_Etch_Dep_ex11.in : 3D Saddle Fin

Every software package contains a full set of examples suitable for that version and are installed with the software. If you see examples here that are not in your installation you should consider updating to a later version of the software. These examples can be used by beginners and advanced users for product evaluation, teaching purposes, and self-training.

Required Modules

Victory Process

  • 3D Etch & Deposit

This example demonstrates the building of a saddle fin with features provided by Victory Process, especially for etch dry thickness modulation and profile combination.

Etch dry thickness modulation is used for shaping of bottom geometry by a function, this function is set with absolute coordinates and unit in um, and total etch depth is equal to thickness + thickness modulation. The key point for thickness modulation is to find an appropriate function. Only provided in process mode.

Etch dry profile must be used, combining with a mask. Some points are set to define side wall profiles. Only provided in process mode.

User can combine the thickness modulation and profile to build a complex structure.

Images

VP_Etch_Dep_ex11_01.png

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