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VP_Diffusion_ex03.in : Effect of carbon sink on diffusion of dopants and defects

VP_Diffusion_ex03.in : Effect of carbon sink on diffusion of dopants and defects

VP_Diffusion_ex03.in : Effect of carbon sink on diffusion of dopants and defects

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Required Modules

Victory Process

  • 2D Diffusion & Implantation

This example shows the effect of carbon sink on diffusion of dopants and defects.

Carbon sink is the name given to the phenomenon that makes substitutional carbon exchange its place with silicon interstitials, effectively removing them from the pool of free diffusion vectors.

This structure has a peak of boron in between pure silicon and carbon-rich silicon layers.

Because boron is diffusing with interstitials, it will diffuse slowly where there are less interstitials due to the presence of carbon.

Images

VP_Diffusion_ex03_01.png

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