clex08.in : Inverter Cell with Manhattan Geometry
Requires: CLEVER
An inverter is one of the most common cells found in layouts. This example contains one inverter cell designed with 4 NMOS and 4 PMOS transistors. It is an illustration of how Clever inserts auxilliary nodes, as in example clex05.in, where necessary into the layout. The back-annotated layout may then be re-plotted in MaskViews. The etching process in this example is the simplest manhattan type.
This example has been used in the CLEVER tutorial in the manual and more information on it can be found there.
To load and run this example, select the Load button in DeckBuild > Examples. This will copy the input file and any support files to your current working directory. Select the Run button in DeckBuild to execute the example.
Input Deck
go VictoryProcess ## Process Description ## Init Layout=clex08.lay Depth=1 Material=Silicon RuleFile=clex08.lmp Deposit Material=Oxide Thickness=0.25 Max Deposit Material=Polysilicon Thickness=0.3 Max Etch Material=Polysilicon Thickness=0.3 Max Mask=POLY Electrodes Mask=POLY Material=Polysilicon Electrodes Mask=*GATE Material=Polysilicon Deposit Material=Oxide Thickness=0.25 Max Etch Material=Oxide Thickness=0.9 Max Mask=VIA2 Reverse Electrodes Mask=*CONT Material=Silicon Deposit Material=Aluminum Thickness=0.25 Max Etch Material=Aluminum Thickness=0.25 Max Mask=MET1 Electrodes Mask=MET1 Material=Aluminum Deposit Material=Oxide Thickness=0.25 Max Etch Material=Oxide Thickness=0.3 Max Mask=VIA3 Reverse Deposit Aluminum Thickness=0.5 Max Etch Material=Aluminum Thickness=0.6 Max Mask=MET2 Electrodes Mask=MET2 Material=Aluminum Deposit Oxide Thickness=0.25 Max Save Name=clex08_0 go victorymesh load in= clex08_0 remesh delaunay refine region="silicon,sio2" max.size=0.2 save out=clex08_1 mode="clever" go clever Init Layout="clex08.lay" Depth=1 Map="clex08.lmp" Structure="clex08_1.str" Save Spice="clex08.before.net" ## After creating the 3D structure ## ## Perform the Interconnect Analysis ## Interconnect Adapt=(0.04, 0.02) Save Spice="clex08.net" quit