• Parasitic Extraction Examples

clex15.in : Local Oxidation (LOCOS)

Requires: Clever, VictoryProcess, VictoryMesh

This example demonstrates the 3D oxidation model (LOCOS) included in Victory Process. Oxidation can be included in the process flow to more accurately model the geometry around the active device areas. Once the process simulation is complete the structure is saved with the Save statement and can be plotted using TonyPlot.

To load and run this example, select the Load button in DeckBuild > Examples. This will copy the input file and any support files to your current working directory. Select the Run button in DeckBuild to execute the example.

Additional Info:

Input Files
Output Results
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