Local Oxidation (LOCOS)

clex15.in : Local Oxidation (LOCOS)

Requires: CLEVER

This example demonstrates the analytical local oxidation model (LOCOS) included in CLEVER. Oxidation can be included in the process flow to more accurately model the geometry around the active device areas.

The user can choose the resolution of the "birds beak" formed during the LOCOS process by stipulating the Resolution parameter. The resolution can be set to Resolution=low , Resolution=medium or Resolution=high .

Once the process simulation is complete the three-dimensional structure is saved with the Save statement and can be plotted using TonyPlot3d. A two dimensional cross section of the structure is also plotted automatically, further demonstrating the Cut Line facility.

To load and run this example, select the Load example button in DeckBuild. This will copy the input file and any support files to your current working directory. Select the run button to execute the example.