script_ex03 : Writing measured data into CSV files
Requires: Utmost IV
Minimum Versions: Utmost IV 1.11.2.R
This example describes how to use a script to write measured data into CSV files.
The measured data file script_ex03.uds contains the ID vs VG measurement of five different devices. The Utmost IV script shown here script_ex03.sjs will generate five separate CSV files which contain the measured data. The name of each CSV file is automatically generated from the device name in the dataset.
The script file and the input dataset file must be saved into the directory from which you run the following command.
utmost4 -s script_ex03.sjs
When the script runs, the Utmost IV data file will be read in from the directory and then the output CSV files will be generated. An example of one of these CSV files is shown here script_ex03_n1x1.csv.
Note that the ID vs VG dataset includes a function to calculate the gm of the transistor. These calculated gm values are automatically written out into the CSV file for convenience.
script_ex03_n1x1.csv
VG,VB,VS,VD,ID,gm 0,0,0,0.1,0,-1.6038076367111e-13 0.1,0,0,0.1,5.0020572818767e-17,5.2455648977853e-14 0.2,0,0,0.1,6.2804244345337e-16,6.5802614635383e-13 0.3,0,0,0.1,7.9108571889788e-15,-3.8285502003677e-13 0.4,0,0,0.1,9.9607363653323e-14,-4.7043293504051e-12 0.5,0,0,0.1,1.2513106142959e-12,-5.4282749081423e-11 0.6,0,0,0.1,1.5593021319785e-11,-5.1038340252076e-10 0.7,0,0,0.1,1.8909452140395e-10,-2.6706866069222e-09 0.8,0,0,0.1,2.1153053767058e-09,7.9902743705502e-09 0.9,0,0,0.1,2.0003774082009e-08,4.1765901278346e-07 1,0,0,0.1,1.489447002615e-07,3.0125497725558e-06 1.1,0,0,0.1,6.7363343825961e-07,7.5550516113018e-06 1.2,0,0,0.1,1.6160928917306e-06,1.0427842087349e-05 1.3,0,0,0.1,2.6911273722727e-06,1.0922209126583e-05 1.4,0,0,0.1,3.775485667548e-06,1.0781162771468e-05 1.5,0,0,0.1,4.8421246928997e-06,1.0559937886624e-05 1.6,0,0,0.1,5.8866761309846e-06,1.0333229913829e-05 1.7,0,0,0.1,6.9087256158164e-06,1.0108372115179e-05 1.8,0,0,0.1,7.9084171542865e-06,9.8859122528401e-06 1.9,0,0,0.1,8.8860063411003e-06,9.6664375517683e-06 2,0,0,0.1,9.8418272298477e-06,9.4506650612409e-06 2.1,0,0,0.1,1.0776281158184e-05,9.2391784282364e-06 2.2,0,0,0.1,1.1689817617467e-05,9.0323608113781e-06 2.3,0,0,0.1,1.2582915328171e-05,8.8304240592333e-06 2.4,0,0,0.1,1.345606761609e-05,8.6334569241383e-06 2.5,0,0,0.1,1.4309772276088e-05,8.4414658250983e-06 2.6,0,0,0.1,1.5144524891837e-05,8.2544038804642e-06 2.7,0,0,0.1,1.5960814544029e-05,8.0721903372858e-06 2.8,0,0,0.1,1.6759121103061e-05,7.8947233173675e-06 2.9,0,0,0.1,1.7539913561137e-05,7.7218881697433e-06 3,0,0,0.1,1.830364904786e-05,7.5535629812958e-06 3.1,0,0,0.1,1.9050772298729e-05,7.38962224477e-06 3.2,0,0,0.1,1.9781715426242e-05,7.2299393191933e-06 3.3,0,0,0.1,2.0496897894469e-05,7.0743880877517e-06 3.4,0,0,0.1,2.1196726630748e-05,6.9228440743567e-06 3.5,0,0,0.1,2.1881596229475e-05,6.7751851903767e-06 3.6,0,0,0.1,2.2551889217062e-05,6.6312922254367e-06 3.7,0,0,0.1,2.3207976356529e-05,6.4910491593258e-06 3.8,0,0,0.1,2.3850216976656e-05,6.3543433480425e-06 3.9,0,0,0.1,2.4478959315036e-05,6.2210656205809e-06 4,0,0,0.1,2.5094540867467e-05,6.0911103123692e-06 4.1,0,0,0.1,2.569728873832e-05,5.9643752538125e-06 4.2,0,0,0.1,2.6287519988085e-05,5.840761726995e-06 4.3,0,0,0.1,2.6865541975405e-05,5.7201744001516e-06 4.4,0,0,0.1,2.7431652691753e-05,5.6025212468942e-06 4.5,0,0,0.1,2.7986141087482e-05,5.4877134552058e-06 4.6,0,0,0.1,2.8529287388428e-05,5.3756653299675e-06 4.7,0,0,0.1,2.9061363402558e-05,5.2662941917475e-06 4.8,0,0,0.1,2.95826328164e-05,5.1595205037708e-06 4.9,0,0,0.1,3.0093351481161e-05,5.0552668408692e-06 5,0,0,0.1,3.0593767688571e-05,4.9534585277523e-06 0,-2,0,0.1,0,0 0.1,-2,0,0.1,0,0 0.2,-2,0,0.1,0,9.6690441857125e-18 0.3,-2,0,0.1,0,-9.6690441857125e-18 0.4,-2,0,0.1,0,-8.1379561235533e-17 0.5,-2,0,0.1,1.1602853022855e-17,-1.8730304922216e-15 0.6,-2,0,0.1,1.9047829766548e-16,-3.7764197516484e-14 0.7,-2,0,0.1,3.7714629719898e-15,-7.5047084872964e-13 0.8,-2,0,0.1,7.5395917971516e-14,-1.4533917978343e-11 0.9,-2,0,0.1,1.5022201387194e-12,-2.5261460514289e-10 1,-2,0,0.1,2.9428481458289e-11,-3.0179308526135e-09 1.1,-2,0,0.1,5.3796598195698e-10,-1.3820985131008e-08 1.2,-2,0,0.1,7.9133025136003e-09,1.4321776355895e-07 1.3,-2,0,0.1,7.9657676634485e-08,1.9643223849721e-06 1.4,-2,0,0.1,4.6112579743094e-07,6.0714900447749e-06 1.5,-2,0,0.1,1.2690510633542e-06,9.2179641443964e-06 1.6,-2,0,0.1,2.2372723425414e-06,9.9336487578827e-06 1.7,-2,0,0.1,3.2272730642425e-06,9.879095313762e-06 1.8,-2,0,0.1,4.2065232950781e-06,9.7114904102253e-06 1.9,-2,0,0.1,5.1681443071334e-06,9.5214166602681e-06 2,-2,0,0.1,6.1104537933982e-06,9.3247218952152e-06 2.1,-2,0,0.1,7.0330170584816e-06,9.1267426694122e-06 2.2,-2,0,0.1,7.9358390316055e-06,8.9301368267101e-06 2.3,-2,0,0.1,8.8191350094972e-06,8.7363727687023e-06 2.4,-2,0,0.1,9.6832332094709e-06,8.5462649757682e-06 2.5,-2,0,0.1,1.0528523158962e-05,8.3602507369283e-06 2.6,-2,0,0.1,1.1355426256402e-05,8.1785464795649e-06 2.7,-2,0,0.1,1.2164378500632e-05,8.0012374200667e-06 2.8,-2,0,0.1,1.2955820167353e-05,7.8283295923817e-06 2.9,-2,0,0.1,1.373018954249e-05,7.6597806311917e-06 3,-2,0,0.1,1.4487919080408e-05,7.4955184249133e-06 3.1,-2,0,0.1,1.5229433047642e-05,7.3354526996317e-06 3.2,-2,0,0.1,1.5955146098673e-05,7.17948237787e-06 3.3,-2,0,0.1,1.6665462449052e-05,7.0275003450417e-06 3.4,-2,0,0.1,1.7360775438244e-05,6.87939658494e-06 3.5,-2,0,0.1,1.804146735016e-05,6.7350602650883e-06 3.6,-2,0,0.1,1.8707909405609e-05,6.5943811323683e-06 3.7,-2,0,0.1,1.9360461869866e-05,6.4572504470942e-06 3.8,-2,0,0.1,1.999947423705e-05,6.3235616036008e-06 3.9,-2,0,0.1,2.0625285465175e-05,6.1932105351483e-06 4,-2,0,0.1,2.123822424376e-05,6.0660959686783e-06 4.1,-2,0,0.1,2.1838609281368e-05,5.942119574335e-06 4.2,-2,0,0.1,2.242674960418e-05,5.8211860407617e-06 4.3,-2,0,0.1,2.3002944859333e-05,5.703203097835e-06 4.4,-2,0,0.1,2.3567485618566e-05,5.5880815022675e-06 4.5,-2,0,0.1,2.4120653679054e-05,5.4757349971367e-06 4.6,-2,0,0.1,2.4662722359227e-05,5.3660802531633e-06 4.7,-2,0,0.1,2.5193956788057e-05,5.2590367975908e-06 4.8,-2,0,0.1,2.5714614186794e-05,5.1545271555541e-06 4.9,-2,0,0.1,2.6224944142481e-05,5.0524758752025e-06 5,-2,0,0.1,2.672518887287e-05,4.9528101466793e-06 0,-4,0,0.1,0,0 0.1,-4,0,0.1,0,0 0.2,-4,0,0.1,0,0 0.3,-4,0,0.1,0,0 0.4,-4,0,0.1,0,0 0.5,-4,0,0.1,0,0 0.6,-4,0,0.1,0,-5.3826747748835e-17 0.7,-4,0,0.1,0,-7.4837749375674e-16 0.8,-4,0,0.1,6.4592097298602e-17,-1.8009806978834e-14 0.9,-4,0,0.1,1.4147897708969e-15,-4.1934855944733e-13 1,-4,0,0.1,3.2930086541776e-14,-9.5369509388199e-12 1.1,-4,0,0.1,7.6614222689262e-13,-1.9693761252614e-10 1.2,-4,0,0.1,1.7562225215655e-11,-2.8261594987803e-09 1.3,-4,0,0.1,3.7656091085404e-10,-1.5968500350777e-08 1.4,-4,0,0.1,6.3977824776401e-09,1.1127689363665e-07 1.5,-4,0,0.1,7.0204728582555e-08,1.8032805406163e-06 1.6,-4,0,0.1,4.2511063123484e-07,5.6955496230702e-06 1.7,-4,0,0.1,1.1861427022289e-06,8.6920895250644e-06 1.8,-4,0,0.1,2.0992420239641e-06,9.3681438688715e-06 1.9,-4,0,0.1,3.0327484403393e-06,9.3154633781297e-06 2,-4,0,0.1,3.9561838934723e-06,9.1585411951562e-06 2.1,-4,0,0.1,4.8631216045389e-06,8.9806209374689e-06 2.2,-4,0,0.1,5.7519779033735e-06,8.7964817179684e-06 2.3,-4,0,0.1,6.6223553945862e-06,8.611292023583e-06 2.4,-4,0,0.1,7.4742761522886e-06,8.4275631447078e-06 2.5,-4,0,0.1,8.3079571675601e-06,8.2466268494808e-06 2.6,-4,0,0.1,9.1237163135153e-06,8.0691961973992e-06 2.7,-4,0,0.1,9.9219244650229e-06,7.8956419077664e-06 2.8,-4,0,0.1,1.0702979095112e-05,7.7261396752051e-06 2.9,-4,0,0.1,1.1467289131014e-05,7.5607512752841e-06 3,-4,0,0.1,1.2215266031198e-05,7.3994704895042e-06 3.1,-4,0,0.1,1.294731842337e-05,7.2422499002817e-06 3.2,-4,0,0.1,1.3663848846555e-05,7.0890169994642e-06 3.3,-4,0,0.1,1.4365251773532e-05,6.9396841438042e-06 3.4,-4,0,0.1,1.5051912433137e-05,6.79415485727e-06 3.5,-4,0,0.1,1.5724206143461e-05,6.6523279002308e-06 3.6,-4,0,0.1,1.6382497977263e-05,6.5140999372975e-06 3.7,-4,0,0.1,1.7027142646263e-05,6.3793673045817e-06 3.8,-4,0,0.1,1.7658484530796e-05,6.2480271863017e-06 3.9,-4,0,0.1,1.8276857806227e-05,6.1199783969017e-06 4,-4,0,0.1,1.8882586633413e-05,5.9951218956092e-06 4.1,-4,0,0.1,1.9475985390917e-05,5.87336111739e-06 4.2,-4,0,0.1,2.0057358933585e-05,5.7546021762408e-06 4.3,-4,0,0.1,2.0627002866735e-05,5.6387539793325e-06 4.4,-4,0,0.1,2.1185203828468e-05,5.5257282784792e-06 4.5,-4,0,0.1,2.1732239774782e-05,5.4154396774208e-06 4.6,-4,0,0.1,2.2268380263786e-05,5.3078056080275e-06 4.7,-4,0,0.1,2.2793886736374e-05,5.2027462848084e-06 4.8,-4,0,0.1,2.3309012791571e-05,5.1001848623234e-06 4.9,-4,0,0.1,2.3814004455292e-05,5.0000464868508e-06 5,-4,0,0.1,2.4309100441707e-05,4.9022589121575e-06 0,-6,0,0.1,0,0 0.1,-6,0,0.1,0,0 0.2,-6,0,0.1,0,0 0.3,-6,0,0.1,0,0 0.4,-6,0,0.1,0,0 0.5,-6,0,0.1,0,0 0.6,-6,0,0.1,0,0 0.7,-6,0,0.1,0,-1.0297122970169e-17 0.8,-6,0,0.1,0,-5.2756767794855e-17 0.9,-6,0,0.1,1.2356547564203e-17,-2.2156906619668e-15 1,-6,0,0.1,1.6216050186745e-16,-5.6976802062063e-14 1.1,-6,0,0.1,3.9561128092997e-15,-1.4284352426819e-12 1.2,-6,0,0.1,9.992221256836e-14,-3.4386318002585e-11 1.3,-6,0,0.1,2.5122150642978e-12,-6.8990615049878e-10 1.4,-6,0,0.1,6.1329815375512e-11,-7.6236512849422e-09 1.5,-6,0,0.1,1.3177304820149e-09,-1.3935928592213e-08 1.6,-6,0,0.1,1.9670227599748e-08,5.4858799585715e-07 1.7,-6,0,0.1,1.735968088007e-07,3.3838711310519e-06 1.8,-6,0,0.1,7.1998836133628e-07,7.1218413714089e-06 1.9,-6,0,0.1,1.543217443112e-06,8.7832745288665e-06 2,-6,0,0.1,2.4304256563995e-06,8.9345620705255e-06 2.1,-6,0,0.1,3.3171657346667e-06,8.8119329307138e-06 2.2,-6,0,0.1,4.1901002091433e-06,8.6487051527238e-06 2.3,-6,0,0.1,5.0462943482058e-06,8.4752467469068e-06 2.4,-6,0,0.1,5.8850083814437e-06,8.2991679776984e-06 2.5,-6,0,0.1,6.7061350167817e-06,8.123723838126e-06 2.6,-6,0,0.1,7.5098239845124e-06,7.9505649982946e-06 2.7,-6,0,0.1,8.2963505670042e-06,7.7805600102877e-06 2.8,-6,0,0.1,9.0660547852702e-06,7.6141604993642e-06 2.9,-6,0,0.1,9.8193094104989e-06,7.451586731953e-06 3,-6,0,0.1,1.0556502133233e-05,7.2929266605333e-06 3.1,-6,0,0.1,1.1278025272363e-05,7.1381906024441e-06 3.2,-6,0,0.1,1.1984269687543e-05,6.987342444305e-06 3.3,-6,0,0.1,1.2675621122046e-05,6.8403180422175e-06 3.4,-6,0,0.1,1.3352457997531e-05,6.6970364050117e-06 3.5,-6,0,0.1,1.4015150101606e-05,6.55740667281e-06 3.6,-6,0,0.1,1.4664057838009e-05,6.4213325682467e-06 3.7,-6,0,0.1,1.5299531838498e-05,6.2887152847992e-06 3.8,-6,0,0.1,1.5921912810771e-05,6.1594553838733e-06 3.9,-6,0,0.1,1.6531531541943e-05,6.033454049225e-06 4,-6,0,0.1,1.7128709004921e-05,5.9106139165875e-06 4.1,-6,0,0.1,1.7713756532628e-05,5.7908396178267e-06 4.2,-6,0,0.1,1.8286976036346e-05,5.6740381305792e-06 4.3,-6,0,0.1,1.8848660251951e-05,5.5601189940508e-06 4.4,-6,0,0.1,1.939909300281e-05,5.4489944315058e-06 4.5,-6,0,0.1,1.9938549471479e-05,5.3405794077608e-06 4.6,-6,0,0.1,2.0467296474763e-05,5.2347916411192e-06 4.7,-6,0,0.1,2.0985592738262e-05,5.1315515831775e-06 4.8,-6,0,0.1,2.1493689167731e-05,5.0307825932691e-06 4.9,-6,0,0.1,2.199182911541e-05,4.9324100082233e-06 5,-6,0,0.1,2.2480248640039e-05,4.8363617597567e-06 0,-8,0,0.1,0,0 0.1,-8,0,0.1,0,0 0.2,-8,0,0.1,0,0 0.3,-8,0,0.1,0,0 0.4,-8,0,0.1,0,0 0.5,-8,0,0.1,0,0 0.6,-8,0,0.1,0,0 0.7,-8,0,0.1,0,0 0.8,-8,0,0.1,0,-8.4293631961058e-18 0.9,-8,0,0.1,0,1.8126534788307e-17 1,-8,0,0.1,1.0115235835327e-17,-7.425872039166e-16 1.1,-8,0,0.1,5.9170044936648e-17,-2.1029391212277e-14 1.2,-8,0,0.1,1.3644650041931e-15,-5.558947617361e-13 1.3,-8,0,0.1,3.6070067601594e-14,-1.4317007867467e-11 1.4,-8,0,0.1,9.5517100977242e-13,-3.2520657666653e-10 1.5,-8,0,0.1,2.4810920969151e-11,-4.6243667356573e-09 1.6,-8,0,0.1,5.8844806367723e-10,-2.000313408933e-08 1.7,-8,0,0.1,1.0249219294196e-08,2.5539996786175e-07 1.8,-8,0,0.1,1.0579998306402e-07,2.4266412677513e-06 1.9,-8,0,0.1,5.3523712948961e-07,6.1142652495189e-06 2,-8,0,0.1,1.2885222083254e-06,8.2629736135183e-06 2.1,-8,0,0.1,2.1349087219625e-06,8.5830040223394e-06 2.2,-8,0,0.1,2.9876043866252e-06,8.4853403579122e-06 2.3,-8,0,0.1,3.8282897290807e-06,8.3317118287811e-06 2.4,-8,0,0.1,4.6531618357764e-06,8.1660059598533e-06 2.5,-8,0,0.1,5.4613141206348e-06,7.9971755081534e-06 2.6,-8,0,0.1,6.252592367234e-06,7.8287252549517e-06 2.7,-8,0,0.1,7.0271233709574e-06,7.6623796979168e-06 2.8,-8,0,0.1,7.7851655324152e-06,7.4990328069449e-06 2.9,-8,0,0.1,8.5270438045843e-06,7.3391449456086e-06 3,-8,0,0.1,9.2531164679153e-06,7.1829393025133e-06 3.1,-8,0,0.1,9.9637569202279e-06,7.0305050320174e-06 3.2,-8,0,0.1,1.0659343294548e-05,6.8818534519151e-06 3.3,-8,0,0.1,1.1340252379225e-05,6.7369497514807e-06 3.4,-8,0,0.1,1.2006855997594e-05,6.5957315027408e-06 3.5,-8,0,0.1,1.2659518842819e-05,6.4581198126892e-06 3.6,-8,0,0.1,1.3298597200011e-05,6.3240262285275e-06 3.7,-8,0,0.1,1.3924438223334e-05,6.1933571113608e-06 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script_ex03.sjs
var i; var dsets = []; var myDir = Silvaco.Utmost4.openCurrentWorkingDirectory (); dsets = myDir.readDataSets ("script_ex03.uds"); for (i=0; i<dsets.length; ++i) dsets[i].writeCSVFile (myDir, "script_ex03_" + dsets[i].getKeyVal ("deviceName") + ".csv", "measured");
script_ex03.uds
Utmost IV CSV Data Logfile Format Version 2 Copyright (c) 1984-2016 Silvaco, Inc. All rights reserved DataSetStart DataSetName, idvg MeasurementType, DC BatchName, script_ex03 WaferName, wafer1 DieName, x0y0 DeviceName, n10x1 Temperature, 27 FabDate, 18 Nov 2014 UserDate, 18 Nov 2014 WaferDiameter, 0.2 DieLayout, FOUR_CROSSING DieSize, 0.02, 0.02 Attribute, L, 1e-06 Attribute, W, 1e-05 NodeNames, d g s b Sweep, 1, V, G, LIN, 0, 5, 0.1, CALCULATED, 0.1, 0 Sweep, 2, V, B, LIN, 0, -8, CALCULATED, 5, 0.1, 0 Constant, V, S, 0, 0.1, 0 Constant, V, D, 0.1, 0.1, 0 Target, I, D Function, gm, derivative(vg, id) Plot, idvglin, XY (LIN LIN), VG, ID Plot, gm, XY (LIN LIN), VG, gm DataArray, ID 5.6756645291754e-15 7.1510972655223e-14 9.0048919301803e-13 1.1315010038863e-11 1.4111534523505e-10 1.7158661671686e-09 1.9333867019579e-08 1.8501924497927e-07 1.4027866025934e-06 6.5913806254372e-06 1.631083424397e-05 2.7554155658467e-05 3.8922401308401e-05 5.0102265116332e-05 6.1042705802474e-05 7.1739039987521e-05 8.219316340397e-05 9.2408192933833e-05 0.00010238805153363 0.00011213735452685 0.0001216612110168 0.00013096502386377 0.00014005433420478 0.00014893471369496 0.00015761169378003 0.00016609072061269 0.00017437712696999 0.00018247611529801 0.00019039274804825 0.00019813194282292 0.00020569847071384 0.00021309695677142 0.00022033188189427 0.00022740758565903 0.00023432826976168 0.0002410980018426 0.00024772071953663 0.00025420023463659 0.00026054023729192 0.00026674430018716 0.00027281588266193 0.00027875833474569 0.00028457490108915 0.0002902687247807 0.00029584285104057 0.00030130023078874 0.00030664372408522 0.00031187610344284 0.0003170000570143 0.00032201819165565 0.00032693303586957 0 0 0 8.469961541008e-17 1.6541413754201e-15 3.3074177389647e-14 6.6157963270651e-13 1.3187551517504e-11 2.5882265566981e-10 4.7654343275973e-09 7.1421137724386e-08 7.3707645308095e-07 4.4495696191447e-06 1.2722638684216e-05 2.2821197062448e-05 3.3182038325475e-05 4.3431083249661e-05 5.3489884631133e-05 6.3339815846796e-05 7.2976335142752e-05 8.2399733305207e-05 9.1612572992737e-05 0.00010061862226623 0.00010942229480988 0.00011802833203894 0.00012644161736444 0.00013466706573479 0.00014270955703989 0.00015057389566392 0.00015826478600854 0.00016578681800104 0.0001731444589754 0.00018034204969014 0.00018738380306475 0.00019427380471528 0.00020101601468189 0.00020761426994041 0.00021407228742008 0.00022039366733611 0.00022658189670419 0.00023264035294388 0.00023857230750597 0.00024438092947798 0.00025006928913624 0.00025564036142258 0.00026109702933109 0.00026644208719519 0.00027167824386949 0.00027680812580321 0.00028183428000422 0.00028675917689406 0 0 0 0 0 2.6654498160554e-17 5.2874666560958e-16 1.2256325544288e-14 2.8601371420196e-13 6.657413251826e-12 1.5286499060183e-10 3.3012636315833e-09 5.7274670953562e-08 6.4668202854627e-07 4.092611629218e-06 1.1879169218215e-05 2.1397281830965e-05 3.1161271054349e-05 4.0820587528076e-05 5.0302015342103e-05 5.958802592219e-05 6.8674457174113e-05 7.7561759031104e-05 8.6252489304027e-05 9.4750283437843e-05 0.00010305933445274 0.00011118410761728 0.0001191291775834 0.00012689913297631 0.00013449851948749 0.00014193180564923 0.00014920336236566 0.00015631745100505 0.00016327821693682 0.00017008968659006 0.00017675576681678 0.00018328024577277 0.00018966679479682 0.00019591897094024 0.0002020402199102 0.0002080338792643 0.0002139031817437 0.00021965125866646 0.00022528114332628 0.00023079577435864 0.0002361979990479 0.00024149057655754 0.00024667618107168 0.00025175740484035 0.00025673676112423 0.00026161668703677 0 0 0 0 0 0 0 5.9388347065931e-17 1.3535991708696e-15 3.4131872606282e-14 8.6336113776876e-13 2.1722604823354e-11 5.3207261805301e-10 1.1584019186837e-08 1.7789799244113e-07 1.6258154636754e-06 7.0850505961332e-06 1.5610181910221e-05 2.4878641677376e-05 3.4152564462511e-05 4.3278720767307e-05 5.2224050917775e-05 6.0980534748216e-05 6.9547192058123e-05 7.7925844018855e-05 8.611966106292e-05 9.4132499620867e-05 0.00010196855553648 0.00010963217186232 0.00011712772854931 0.0001244595776498 0.00013163200475501 0.0001386492060523 0.0001455152749515 0.00015223419471591 0.00015880983493383 0.00016524595048043 0.00017154618210739 0.0001777140580975 0.00018375299661086 0.00018966630847082 0.00019545720021803 0.00020112877731459 0.00020668404741635 0.00021212592365671 0.00021745722790259 0.00022268069395534 0.00022779897067841 0.00023281462503949 0.00023773014505951 0.00024254794266402 0 0 0 0 0 0 0 0 2.4692486525284e-17 4.4711489755637e-16 1.1687510873789e-14 3.1057768753225e-13 8.229675778475e-12 2.1424858435622e-10 5.1316041399119e-09 9.1796461627665e-08 9.7999238463254e-07 5.2125627617071e-06 1.2973765017164e-05 2.180664218629e-05 3.0722937007803e-05 3.9511657261815e-05 4.8129646936442e-05 5.6566965201174e-05 6.4822101030375e-05 7.2896619514982e-05 8.0793503645267e-05 8.8516443077403e-05 9.6069473689393e-05 0.00010345678111298 0.00011068258936308 0.00011775109608064 0.00012466643433774 0.00013143265010441 0.00013805368922873 0.00014453339034164 0.00015087548152495 0.00015708357940381 0.00016316118981386 0.00016911170949167 0.00017493842842492 0.00018064453261794 0.00018623310710739 0.00019170713911446 0.0001970695212555 0.00020232305475724 0.00020747045263932 0.0002125143428387 0.000217457271259 0.00022230170473346 0.00022705003389465 DataSetFinish DataSetStart DataSetName, idvg MeasurementType, DC BatchName, script_ex03 WaferName, wafer1 DieName, x0y0 DeviceName, n10x10 Temperature, 27 FabDate, 18 Nov 2014 UserDate, 18 Nov 2014 WaferDiameter, 0.2 DieLayout, FOUR_CROSSING DieSize, 0.02, 0.02 Attribute, L, 1e-05 Attribute, W, 1e-05 NodeNames, d g s b Sweep, 1, V, G, LIN, 0, 5, 0.1, CALCULATED, 0.1, 0 Sweep, 2, V, B, LIN, 0, -8, CALCULATED, 5, 0.1, 0 Constant, V, S, 0, 0.1, 0 Constant, V, D, 0.1, 0.1, 0 Target, I, D Function, gm, derivative(vg, id) Plot, idvglin, XY (LIN LIN), VG, ID Plot, gm, XY (LIN LIN), VG, gm DataArray, ID 1.1798416185393e-15 1.4887430729177e-14 1.8771218012732e-13 2.3594319357508e-12 2.9334621371481e-11 3.5178779304183e-10 3.814825812325e-09 3.4472332715558e-08 2.3867034766101e-07 9.3527649563441e-07 2.0179294220424e-06 3.1954322921107e-06 4.3697783822629e-06 5.5211649177467e-06 6.6466183095769e-06 7.7459798433425e-06 8.8195096225313e-06 9.8675870425191e-06 1.0890681150074e-05 1.1889330462138e-05 1.286411877754e-05 1.3815654263236e-05 1.4744554219916e-05 1.5651434863857e-05 1.6536904756752e-05 1.7401560694192e-05 1.824598520526e-05 1.9070745101427e-05 1.9876390711196e-05 2.0663455565696e-05 2.1432456382293e-05 2.2183893245338e-05 2.2918249916567e-05 2.3635994229484e-05 2.4337578536387e-05 2.5023440186454e-05 2.5694002019811e-05 2.6349672867114e-05 2.699084804733e-05 2.761790985865e-05 2.8231228059053e-05 2.8831160334194e-05 2.9418052751114e-05 2.9992240196848e-05 3.0554046801464e-05 3.1103786345346e-05 3.1641762650796e-05 3.2168269958154e-05 3.2683593286776e-05 3.3188008781262e-05 3.368178404342e-05 0 0 0 1.4930078546367e-17 2.5974663936484e-16 5.2115302947814e-15 1.0526237098648e-13 2.1171989607895e-12 4.174010339175e-11 7.5900421288824e-10 1.0846745756252e-08 1.051852910048e-07 5.7040396597463e-07 1.4770138257478e-06 2.5295533176821e-06 3.5972776312794e-06 4.6505600406304e-06 5.6830793101425e-06 6.6932886376298e-06 7.6808478786045e-06 8.6458631246798e-06 9.5886562141324e-06 1.0509663012767e-05 1.1409379228312e-05 1.2288329634519e-05 1.3147050127063e-05 1.3986077079757e-05 1.4805940955606e-05 1.5607162458602e-05 1.6390250240444e-05 1.7155699580787e-05 1.7903991689009e-05 1.8635593408807e-05 1.9350957186498e-05 2.0050521212674e-05 2.0734709677416e-05 2.1403933098905e-05 2.2058588698081e-05 2.2699060800566e-05 2.3325721252825e-05 2.3938929843528e-05 2.4539034723823e-05 2.5126372822162e-05 2.57012702507e-05 2.6264042701263e-05 2.6814995829589e-05 2.7354425627049e-05 2.7882618779418e-05 2.8399853012544e-05 2.890639742494e-05 2.9402512807465e-05 0 0 0 0 0 0 5.4708996051625e-17 1.2090698032262e-15 2.872821230419e-14 6.8274080857011e-13 1.5996622883905e-11 3.5123206903164e-10 6.1263011475415e-09 6.9051546056435e-08 4.3465108986527e-07 1.2444268451508e-06 2.2238412007002e-06 3.2257704264107e-06 4.2160533926938e-06 5.1874943059042e-06 6.138349653405e-06 7.0682196550085e-06 7.9771784587789e-06 8.8655175092106e-06 9.7336384830332e-06 1.058199927154e-05 1.141108446376e-05 1.2221388564346e-05 1.3013406201011e-05 1.3787626313261e-05 1.454452868375e-05 1.528458188914e-05 1.600824213327e-05 1.6715952640344e-05 1.7408143409229e-05 1.8085231203029e-05 1.874761969255e-05 1.9395699700038e-05 2.0029849507281e-05 2.0650435203737e-05 2.1257811057995e-05 2.1852319901067e-05 2.2434293513523e-05 2.3004053010957e-05 2.3561909223974e-05 2.4108163070096e-05 2.4643105915872e-05 2.5167019928067e-05 2.5680178413281e-05 2.6182846145639e-05 2.6675279682454e-05 0 0 0 0 0 0 0 0 8.1318501745669e-17 1.9728000488864e-15 5.1446335745121e-14 1.3394892414521e-12 3.410561946099e-11 7.8399199618193e-10 1.2999225170138e-08 1.2936759131983e-07 6.321948926725e-07 1.4831375179193e-06 2.4272961785274e-06 3.375583756126e-06 4.3092304419086e-06 5.2242106941828e-06 6.1195443709543e-06 6.9950868902271e-06 7.8510173373252e-06 8.6876677760071e-06 9.5054471272049e-06 1.0304802025526e-05 1.1086195343562e-05 1.1850093964395e-05 1.2596961647295e-05 1.3327254809417e-05 1.4041420034213e-05 1.4739892632613e-05 1.5423095861845e-05 1.6091440562963e-05 1.6745325068579e-05 1.7385135286211e-05 1.8011244895794e-05 1.8624015620661e-05 1.9223797544678e-05 1.9810929456982e-05 2.0385739211594e-05 2.0948544093152e-05 2.149965118271e-05 2.203935771944e-05 2.2567951455401e-05 2.3085711001466e-05 2.3592906163184e-05 2.4089798265807e-05 2.4576640468075e-05 0 0 0 0 0 0 0 0 0 2.1341311937649e-17 3.7438178280216e-16 1.020764136497e-14 2.8348436623154e-13 7.790307946687e-12 2.0239500541061e-10 4.1957946337023e-09 5.3336552332791e-08 3.6204433885301e-07 1.0812901245877e-06 1.9663724227251e-06 2.874159298132e-06 3.7716042797804e-06 4.6520417390689e-06 5.513950992324e-06 6.3570281171422e-06 7.1813799637582e-06 7.9872941934342e-06 8.7751469249989e-06 9.5453576473664e-06 1.0298365165459e-05 1.103461415622e-05 1.1754547430372e-05 1.24586014012e-05 1.3147203423468e-05 1.3820770257786e-05 1.4479707230326e-05 1.5124407831194e-05 1.5755253593681e-05 1.6372614154983e-05 1.6976847434281e-05 1.756829988614e-05 1.8147306801164e-05 1.8714192634954e-05 1.9269271352473e-05 1.9812846778955e-05 2.0345212951272e-05 2.0866654465588e-05 2.1377446818462e-05 2.1877856739504e-05 2.2368142514358e-05 2.2848554297253e-05 DataSetFinish DataSetStart DataSetName, idvg MeasurementType, DC BatchName, script_ex03 WaferName, wafer1 DieName, x0y0 DeviceName, n1x1 Temperature, 27 FabDate, 18 Nov 2014 UserDate, 18 Nov 2014 WaferDiameter, 0.2 DieLayout, FOUR_CROSSING DieSize, 0.02, 0.02 Attribute, L, 1e-06 Attribute, W, 1e-06 NodeNames, d g s b Sweep, 1, V, G, LIN, 0, 5, 0.1, CALCULATED, 0.1, 0 Sweep, 2, V, B, LIN, 0, -8, CALCULATED, 5, 0.1, 0 Constant, V, S, 0, 0.1, 0 Constant, V, D, 0.1, 0.1, 0 Target, I, D Function, gm, derivative(vg, id) Plot, idvglin, XY (LIN LIN), VG, ID Plot, gm, XY (LIN LIN), VG, gm DataArray, ID 0 5.0020572818767e-17 6.2804244345337e-16 7.9108571889788e-15 9.9607363653323e-14 1.2513106142959e-12 1.5593021319785e-11 1.8909452140395e-10 2.1153053767058e-09 2.0003774082009e-08 1.489447002615e-07 6.7363343825961e-07 1.6160928917306e-06 2.6911273722727e-06 3.775485667548e-06 4.8421246928997e-06 5.8866761309846e-06 6.9087256158164e-06 7.9084171542865e-06 8.8860063411003e-06 9.8418272298477e-06 1.0776281158184e-05 1.1689817617467e-05 1.2582915328171e-05 1.345606761609e-05 1.4309772276088e-05 1.5144524891837e-05 1.5960814544029e-05 1.6759121103061e-05 1.7539913561137e-05 1.830364904786e-05 1.9050772298729e-05 1.9781715426242e-05 2.0496897894469e-05 2.1196726630748e-05 2.1881596229475e-05 2.2551889217062e-05 2.3207976356529e-05 2.3850216976656e-05 2.4478959315036e-05 2.5094540867467e-05 2.569728873832e-05 2.6287519988085e-05 2.6865541975405e-05 2.7431652691753e-05 2.7986141087482e-05 2.8529287388428e-05 2.9061363402558e-05 2.95826328164e-05 3.0093351481161e-05 3.0593767688571e-05 0 0 0 0 0 1.1602853022855e-17 1.9047829766548e-16 3.7714629719898e-15 7.5395917971516e-14 1.5022201387194e-12 2.9428481458289e-11 5.3796598195698e-10 7.9133025136003e-09 7.9657676634485e-08 4.6112579743094e-07 1.2690510633542e-06 2.2372723425414e-06 3.2272730642425e-06 4.2065232950781e-06 5.1681443071334e-06 6.1104537933982e-06 7.0330170584816e-06 7.9358390316055e-06 8.8191350094972e-06 9.6832332094709e-06 1.0528523158962e-05 1.1355426256402e-05 1.2164378500632e-05 1.2955820167353e-05 1.373018954249e-05 1.4487919080408e-05 1.5229433047642e-05 1.5955146098673e-05 1.6665462449052e-05 1.7360775438244e-05 1.804146735016e-05 1.8707909405609e-05 1.9360461869866e-05 1.999947423705e-05 2.0625285465175e-05 2.123822424376e-05 2.1838609281368e-05 2.242674960418e-05 2.3002944859333e-05 2.3567485618566e-05 2.4120653679054e-05 2.4662722359227e-05 2.5193956788057e-05 2.5714614186794e-05 2.6224944142481e-05 2.672518887287e-05 0 0 0 0 0 0 0 0 6.4592097298602e-17 1.4147897708969e-15 3.2930086541776e-14 7.6614222689262e-13 1.7562225215655e-11 3.7656091085404e-10 6.3977824776401e-09 7.0204728582555e-08 4.2511063123484e-07 1.1861427022289e-06 2.0992420239641e-06 3.0327484403393e-06 3.9561838934723e-06 4.8631216045389e-06 5.7519779033735e-06 6.6223553945862e-06 7.4742761522886e-06 8.3079571675601e-06 9.1237163135153e-06 9.9219244650229e-06 1.0702979095112e-05 1.1467289131014e-05 1.2215266031198e-05 1.294731842337e-05 1.3663848846555e-05 1.4365251773532e-05 1.5051912433137e-05 1.5724206143461e-05 1.6382497977263e-05 1.7027142646263e-05 1.7658484530796e-05 1.8276857806227e-05 1.8882586633413e-05 1.9475985390917e-05 2.0057358933585e-05 2.0627002866735e-05 2.1185203828468e-05 2.1732239774782e-05 2.2268380263786e-05 2.2793886736374e-05 2.3309012791571e-05 2.3814004455292e-05 2.4309100441707e-05 0 0 0 0 0 0 0 0 0 1.2356547564203e-17 1.6216050186745e-16 3.9561128092997e-15 9.992221256836e-14 2.5122150642978e-12 6.1329815375512e-11 1.3177304820149e-09 1.9670227599748e-08 1.735968088007e-07 7.1998836133628e-07 1.543217443112e-06 2.4304256563995e-06 3.3171657346667e-06 4.1901002091433e-06 5.0462943482058e-06 5.8850083814437e-06 6.7061350167817e-06 7.5098239845124e-06 8.2963505670042e-06 9.0660547852702e-06 9.8193094104989e-06 1.0556502133233e-05 1.1278025272363e-05 1.1984269687543e-05 1.2675621122046e-05 1.3352457997531e-05 1.4015150101606e-05 1.4664057838009e-05 1.5299531838498e-05 1.5921912810771e-05 1.6531531541943e-05 1.7128709004921e-05 1.7713756532628e-05 1.8286976036346e-05 1.8848660251951e-05 1.939909300281e-05 1.9938549471479e-05 2.0467296474763e-05 2.0985592738262e-05 2.1493689167731e-05 2.199182911541e-05 2.2480248640039e-05 0 0 0 0 0 0 0 0 0 0 1.0115235835327e-17 5.9170044936648e-17 1.3644650041931e-15 3.6070067601594e-14 9.5517100977242e-13 2.4810920969151e-11 5.8844806367723e-10 1.0249219294196e-08 1.0579998306402e-07 5.3523712948961e-07 1.2885222083254e-06 2.1349087219625e-06 2.9876043866252e-06 3.8282897290807e-06 4.6531618357764e-06 5.4613141206348e-06 6.252592367234e-06 7.0271233709574e-06 7.7851655324152e-06 8.5270438045843e-06 9.2531164679153e-06 9.9637569202279e-06 1.0659343294548e-05 1.1340252379225e-05 1.2006855997594e-05 1.2659518842819e-05 1.3298597200011e-05 1.3924438223334e-05 1.4537379567481e-05 1.5137749248946e-05 1.5725865657817e-05 1.6302037668516e-05 1.6866564815339e-05 1.74197375098e-05 1.7961837284119e-05 1.8493137050054e-05 1.9013901365604e-05 1.9524386704348e-05 2.0024841723799e-05 2.0515507530253e-05 2.0996617938379e-05 DataSetFinish DataSetStart DataSetName, idvg MeasurementType, DC BatchName, script_ex03 WaferName, wafer1 DieName, x0y0 DeviceName, n1x10 Temperature, 27 FabDate, 18 Nov 2014 UserDate, 18 Nov 2014 WaferDiameter, 0.2 DieLayout, FOUR_CROSSING DieSize, 0.02, 0.02 Attribute, L, 1e-05 Attribute, W, 1e-06 NodeNames, d g s b Sweep, 1, V, G, LIN, 0, 5, 0.1, CALCULATED, 0.1, 0 Sweep, 2, V, B, LIN, 0, -8, CALCULATED, 5, 0.1, 0 Constant, V, S, 0, 0.1, 0 Constant, V, D, 0.1, 0.1, 0 Target, I, D Function, gm, derivative(vg, id) Plot, idvglin, XY (LIN LIN), VG, ID Plot, gm, XY (LIN LIN), VG, gm DataArray, ID 0 1.0535714571363e-17 1.3066971664117e-16 1.6466994280683e-15 2.0758761086805e-14 2.6083372705683e-13 3.2390953573294e-12 3.8699397959259e-11 4.1591012666195e-10 3.7123302227031e-09 2.5098363642933e-08 9.4416728932461e-08 1.9854374600276e-07 3.1079311567242e-07 4.2261826880244e-07 5.3231669205292e-07 6.39632904874e-07 7.4455092100762e-07 8.4709084259979e-07 9.4728400238629e-07 1.0451704381825e-06 1.1407969426966e-06 1.2342147626764e-06 1.3254776297119e-06 1.4146403293196e-06 1.5017577388686e-06 1.5868842049813e-06 1.6700731496211e-06 1.7513768262802e-06 1.8308461742359e-06 1.9085307371856e-06 1.9844786244718e-06 2.0587365006753e-06 2.1313495941686e-06 2.2023617183212e-06 2.2718153010671e-06 2.3397514198817e-06 2.4062098401199e-06 2.471229055279e-06 2.5348463281769e-06 2.597097732336e-06 2.6580181930708e-06 2.7176415279307e-06 2.7760004862583e-06 2.8331267876983e-06 2.8890511595555e-06 2.9438033729348e-06 2.997412277634e-06 3.0499058357768e-06 3.1013111541916e-06 3.1516545155552e-06 0 0 0 0 0 0 3.1562637366514e-17 5.9609417616282e-16 1.2000987826112e-14 2.4121179123416e-13 4.7440976691966e-12 8.550302931814e-11 1.1970129347464e-09 1.1308688405781e-08 5.8598405879952e-08 1.4654837796502e-07 2.4720474166461e-07 3.4907481278815e-07 4.4958500900401e-07 5.4817902267746e-07 6.4471598265333e-07 7.3916238093235e-07 8.3152543022846e-07 9.2183235187724e-07 1.0101210743684e-06 1.0964352402339e-06 1.1808213572954e-06 1.2633271299342e-06 1.3440004633172e-06 1.422888860819e-06 1.5000390569258e-06 1.5754967947421e-06 1.6493066943984e-06 1.7215121797678e-06 1.7921554431997e-06 1.8612774353271e-06 1.9289178715201e-06 1.9951152493901e-06 2.0599068735737e-06 2.1233288852184e-06 2.1854162943868e-06 2.246203014142e-06 2.3057218954408e-06 2.364004762227e-06 2.4210824462946e-06 2.4769848216236e-06 2.5317408379814e-06 2.5853785536523e-06 2.6379251672052e-06 2.689407048244e-06 2.7398497671138e-06 0 0 0 0 0 0 0 0 1.002102289163e-17 1.4305573892903e-16 3.3142561758337e-15 7.8650988721021e-14 1.8394394347655e-12 4.0081806597314e-11 6.8405645231778e-10 7.4918504574229e-09 4.506251452474e-08 1.2402680455387e-07 2.1784507646748e-07 3.1352023279507e-07 4.080851632062e-07 5.0090780174134e-07 5.9183029232366e-07 6.8081412944933e-07 7.678639167563e-07 8.5300434757448e-07 9.3627044046167e-07 1.017702571346e-06 1.0973437444574e-06 1.1752380325329e-06 1.2514296608429e-06 1.325962459053e-06 1.3988795302254e-06 1.470223051866e-06 1.5400341593864e-06 1.6083528821293e-06 1.6752181134923e-06 1.7406676034368e-06 1.8047379657874e-06 1.8674646952995e-06 1.9288821911246e-06 1.9890237843739e-06 2.0479217681985e-06 2.1056074292883e-06 2.1621110800202e-06 2.2174620907214e-06 2.2716889216701e-06 2.3248191545749e-06 2.3768795233534e-06 2.4278959440925e-06 2.477893544112e-06 0 0 0 0 0 0 0 0 0 0 1.4910490483035e-17 2.3423533481954e-16 5.9702215938496e-15 1.5521833053609e-13 3.9408965463089e-12 8.9531260294527e-11 1.4435997288949e-09 1.3894206901179e-08 6.4530275983807e-08 1.4679867562677e-07 2.3711869677003e-07 3.2770173154872e-07 4.1691638955046e-07 5.0440628033536e-07 5.9008138425679e-07 6.7392653443615e-07 7.5595618450272e-07 8.3619899580096e-07 9.1469087318748e-07 9.9147135845832e-07 1.0665816407941e-06 1.1400634172517e-06 1.2119582229625e-06 1.2823070311366e-06 1.3511500133954e-06 1.4185263982383e-06 1.4844743910891e-06 1.5490311337647e-06 1.6122326895576e-06 1.6741140451168e-06 1.7347091233783e-06 1.7940508037304e-06 1.8521709468395e-06 1.9091004223805e-06 1.9648691384621e-06 2.0195060719055e-06 2.0730392987915e-06 2.1254960248681e-06 2.1769026155354e-06 2.2272846252147e-06 2.2766668259698e-06 0 0 0 0 0 0 0 0 0 0 0 0 5.0836179084927e-17 1.1957032781122e-15 3.3003604149164e-14 9.0545405867065e-13 2.3362405072655e-11 4.7335811407535e-10 5.8222379574295e-09 3.7700585056992e-08 1.0802591409731e-07 1.9290613755375e-07 2.7966256707645e-07 3.6542870050667e-07 4.4962047109456e-07 5.3210060567532e-07 6.1283972552078e-07 6.9184576272745e-07 7.6914335780038e-07 8.4476544611145e-07 9.1874911339481e-07 9.9113337133943e-07 1.0619579069804e-06 1.1312623577116e-06 1.1990858827464e-06 1.2654669080587e-06 1.330442976132e-06 1.3940506607525e-06 1.4563255230516e-06 1.5173020941387e-06 1.5770138750604e-06 1.6354933480965e-06 1.6927719954502e-06 1.7488803226905e-06 1.8038478851568e-06 1.8577033160964e-06 1.9104743556881e-06 1.9621878803619e-06 2.0128699320077e-06 2.0625457467903e-06 2.1112397833777e-06 DataSetFinish DataSetStart DataSetName, idvg MeasurementType, DC BatchName, script_ex03 WaferName, wafer1 DieName, x0y0 DeviceName, n5x10 Temperature, 27 FabDate, 18 Nov 2014 UserDate, 18 Nov 2014 WaferDiameter, 0.2 DieLayout, FOUR_CROSSING DieSize, 0.02, 0.02 Attribute, L, 1e-05 Attribute, W, 5e-06 NodeNames, d g s b Sweep, 1, V, G, LIN, 0, 5, 0.1, CALCULATED, 0.1, 0 Sweep, 2, V, B, LIN, 0, -8, CALCULATED, 5, 0.1, 0 Constant, V, S, 0, 0.1, 0 Constant, V, D, 0.1, 0.1, 0 Target, I, D Function, gm, derivative(vg, id) Plot, idvglin, XY (LIN LIN), VG, ID Plot, gm, XY (LIN LIN), VG, gm DataArray, ID 1.6275938439385e-16 2.0520576321802e-15 2.5886995542626e-14 3.2605183929688e-13 4.0827590830718e-12 5.0111355499177e-11 5.7797799986982e-10 5.7655427510967e-09 4.6666563487077e-08 2.5359456385467e-07 7.1475111839206e-07 1.2833440000064e-06 1.8663064989384e-06 2.4409582783941e-06 3.0033163948305e-06 3.5529042767375e-06 4.0897812295542e-06 4.6141010614979e-06 5.1260667158217e-06 5.6259212997399e-06 6.1139366479359e-06 6.5904018702212e-06 7.0556143901373e-06 7.5098737166511e-06 7.9534773586694e-06 8.3867182280995e-06 8.8098830289926e-06 9.2232512902193e-06 9.6270948181152e-06 1.0021677424789e-05 1.0407254838544e-05 1.0784074735084e-05 1.1152376848754e-05 1.151239313635e-05 1.186434797479e-05 1.2208458379745e-05 1.2544934236264e-05 1.2873978535153e-05 1.3195787610726e-05 1.3510551376873e-05 1.3818453559339e-05 1.4119671922746e-05 1.4414378491421e-05 1.4702739763379e-05 1.4984916917124e-05 1.5261066011069e-05 1.5531338175532e-05 1.5795879797354e-05 1.6054832697254e-05 1.6308334300083e-05 1.6556517798176e-05 0 0 0 0 3.0210397496151e-17 5.6884711136639e-16 1.1459903068895e-14 2.3118046835881e-13 4.6199703701494e-12 8.8632572951342e-11 1.4667198818242e-09 1.7453665720393e-08 1.325347737981e-07 4.8688663684153e-07 9.84480797209e-07 1.5114779911884e-06 2.0360762026968e-06 2.5515543583411e-06 3.0563821518754e-06 3.5501693063069e-06 4.0328728275827e-06 4.5046004703083e-06 4.9655376473107e-06 5.4159111743918e-06 5.8559691509414e-06 6.2859693509327e-06 6.7061723841641e-06 7.1168376056279e-06 7.5182206463167e-06 7.9105719246908e-06 8.2941357657277e-06 8.6691499046044e-06 9.035845238228e-06 9.3944457385856e-06 9.7451684725753e-06 1.0088223692015e-05 1.0423814969595e-05 1.0752139364383e-05 1.1073387605623e-05 1.1387744287087e-05 1.1695388066566e-05 1.1996491866729e-05 1.2291223074747e-05 1.2579743738844e-05 1.286221076055e-05 1.3138776081819e-05 1.3409586866481e-05 1.3674785675714e-05 1.3934510637375e-05 1.4188895609129e-05 1.4438070335432e-05 0 0 0 0 0 0 0 1.2485082912789e-16 2.88172682818e-15 6.8540875743869e-14 1.6217697817096e-12 3.7210660254533e-11 7.5096130909325e-10 1.0695933498779e-08 9.3578801030114e-08 3.9405091832536e-07 8.5110691717163e-07 1.3444177456256e-06 1.8373893313827e-06 2.3223148968238e-06 2.7974647065069e-06 3.2623978727548e-06 3.7170521962434e-06 4.1615212681994e-06 4.5959751727683e-06 5.0206233980659e-06 5.4356951958599e-06 5.8414285992971e-06 6.238064083202e-06 6.6258408229131e-06 7.0049944583971e-06 7.3757557578867e-06 7.7383498341632e-06 8.0929957084512e-06 8.4399060971039e-06 8.7792873430362e-06 9.1113394419544e-06 9.4362561307445e-06 9.7542250163247e-06 1.0065427730323e-05 1.0370040099587e-05 1.0668232325648e-05 1.0960169168356e-05 1.1246010130382e-05 1.1525909640293e-05 1.1800017232588e-05 1.2068477723659e-05 1.2331431382918e-05 1.2589014098682e-05 1.2841357538516e-05 1.3088589303927e-05 0 0 0 0 0 0 0 0 1.3378515581389e-17 1.9415588597763e-16 4.9255596847721e-15 1.2850530017897e-13 3.3230163735891e-12 8.1847816207218e-11 1.6575740095059e-09 2.150488425943e-08 1.5694217297504e-07 5.0944984604e-07 9.6268627982529e-07 1.4323722738017e-06 1.8978311754932e-06 2.3548215131684e-06 2.8023576317937e-06 3.2402092682844e-06 3.6683948899535e-06 4.0870418178995e-06 4.4963312372659e-06 4.8964714759784e-06 5.28768372801e-06 5.6701940516212e-06 6.0442287452131e-06 6.4100116215928e-06 6.7677623885104e-06 7.1176956945948e-06 7.4600205864709e-06 7.7949402256244e-06 8.1226517721117e-06 8.4433463766367e-06 8.7572092433346e-06 9.0644197385467e-06 9.3651515290872e-06 9.659572738848e-06 9.9478461161144e-06 1.023012920634e-05 1.0506574526754e-05 1.0777329740275e-05 1.1042537827024e-05 1.1302337252233e-05 1.1556862129783e-05 1.180624238086e-05 1.2050603887421e-05 0 0 0 0 0 0 0 0 0 0 4.2119211212719e-17 9.5323985130616e-16 2.6313725222685e-14 7.2863192257081e-13 1.9676690643723e-11 4.7244742008646e-10 7.8540853878409e-09 7.5298000352715e-08 3.3669705438991e-07 7.4759519117049e-07 1.1943615498624e-06 1.6411843647273e-06 2.0807512548648e-06 2.5115023310091e-06 2.9330699648122e-06 3.3454221658429e-06 3.7486592188363e-06 4.142943941353e-06 4.528470234972e-06 4.9054468975395e-06 5.274088751395e-06 5.6346115975211e-06 5.9872292760829e-06 6.3321519339996e-06 6.6695850082994e-06 6.9997286465074e-06 7.3227774003125e-06 7.6389200932871e-06 7.9483398008574e-06 8.2512139031074e-06 8.5477141847565e-06 8.8380069653119e-06 9.1222532479764e-06 9.4006088795506e-06 9.6732247160101e-06 9.9402467901009e-06 1.0201816478427e-05 1.0458070666301e-05 1.0709141909186e-05 1.095515858994e-05 1.1196245071371e-05 DataSetFinish