opt_ex22 : BSIM-BULK MOSFET Model Extraction
Requires: Utmost IV, SmartSpice, SmartView
Minimum Versions: Utmost IV 2.7.1.R, SmartSpice 4.32.0.R, SmartView 2.34.0.R
This example describes how to extract a standard BSIM-BULK model. To extract a model which is scalable with geometry, multiple different device sizes must be included. In this example, seven device geometries are included.
The project file opt_ex22.prj and the data file opt_ex22.uds for this example should be loaded into your database. When opened, the project will look as shown in opt_ex22_project.png .
The extraction and optimization sequence, which fully automates the extraction of this BSIM-BULK model, has fourteen sections. The objective of each section is to isolate a device characteristic and then to optimize only those model parameters which account for this device behavior.
Before starting the optimization sequence, the following device parameters are defined in the model library.
- TOXE: Electrical oxide thickness
- TNOM: Nominal room temperature
Section 1 : idvglin_large_rt
This section performs a preliminary extraction of the flatband voltage for the wide and long channel device, using the drain current versus gate voltage characteristic in the linear region and at room temperature. The extracted value is stored in the VFB model parameter, as shown in opt_ex22_01.png .
Section 2 : cgg
This section first performs a preliminary extraction of the oxide thickness based on Cgg versus gate voltage data. The extracted value is stored in the TOXE model parameter, as shown in opt_ex22_01.png .
Next, the following gate capacitance parameters are optimized using the same data:
- TOXE Electrical oxide thickness
- VFB Flat band voltage @Vb=0
- NDEP Channel doping concentration @Vb=0
After this step has been completed, the fit to measured data will be as shown in opt_ex22_02.png .
Section 3 : cgd
This section performs a preliminary extraction of the overlap capacitances using Cgd and Cgc versus gate voltage data. The extracted values are stored in the CGDO and CGSO model parameters, respectively, as shown in opt_ex22_03.png .
Section 4 : overlap
This section optimizes the overlap capacitance parameters using Cgd and Cgc versus gate voltage data. The following model parameters are optimized.
- CGSO Non LDD region source-gate overlap capacitance per unit length
- CGDO Non LDD region drain-gate overlap capacitance per unit length
- CGSL Overlap capacitance between gate and LDD source region
- CGDL Overlap capacitance between gate and LDD drain region
- CKAPAS Gate-source overlap capacitance coefficient
- CKAPAD Gate-drain overlap capacitance coefficient
After this step has been completed, the fit to measured data will be as shown in opt_ex22_04.png .
Section 5 : cgg
This section refines the parameters previously extracted in section #2 using Cgg data. The following model parameters are optimized.
- TOXE Electrical oxide thickness
- VFB Flat band voltage @Vb=0
- NDEP Channel doping concentration @Vb=0
After this step has been completed, the fit to measured data will be as shown in opt_ex22_05.png .
Section 6 : idvglin_large_rt
This section optimizes the I-V parameters for wide and long channel devices. The data in this section is the drain current versus gate voltage characteristic in the linear region and at room temperature. The following model parameters are extracted.
- VFB Flat band voltage @Vb=0
- U0 Mobility at nominal temperature
- UA First-order mobility degradation coefficient
- EU Phonon / surface roughness scattering parameter
- K1 First-order body effect coefficient
- K2 Second-order body effect coefficient
- UC Body-effect of mobility degradation coefficient
- NFACTOR Subthreshold swing factor
- NDEP Channel doping concentration @Vb=0
- PHIN Non-uniform vertical doping effect parameter
After this step has been completed, the fit to measured data will be as shown in opt_ex22_06.png .
Section 7 : idvglin_warray_rt
The narrow width parameters are now extracted using data from devices with various channel widths and with a long channel value. The following model parameters are extracted.
- WINT Width offset fitting parameter form I-V without bias
- NDEPW Width dependence of NDEP
After this step has been completed, the fit to measured data will be as shown in opt_ex22_07.png .
Section 8: idvglin_larray_rt
In this section, the parameters for short channel effects are optimized using devices of multiple lengths and wide channel value. The following model parameters are extracted.
- LINT Length offset fitting parameter form I-V without bias
- NDEPL1 First length scaling coefficient of NDEP
- NDEPLEXP1 First length scaling exponent of NDEP
- RDSW Zero-bias LDD resistance per unit width (RDSMOD=0)
- PRWG Gate bias coefficient of RDSW
After this step has been completed, the fit to measured data will be as shown in opt_ex22_08.png .
Section 9 : idvglin_all_rt
This section refines the previously extracted I-V parameters using devices of multiple channel lengths and widths in the linear region and at room temperature ID-VG data.
After this step has been completed, the fit to measured data will be as shown in opt_ex22_09.png .
Section 10: idvglin_large_t
This section extracts the model parameters for the large geometry drain current versus gate voltage linear temperature measurements. The following parameters are optimized.
- KT1 Temperature coefficient for threshold voltage
- KT2 Body-bias coefficient of the Vth temperature effect
- UTE Mobility temperature exponent
- UA1 Temperature coefficient for UA
- UB1 Temperature coefficient for UB
- UC1 Temperature coefficient for UC
After this step has been completed, the fit to measured data will be as shown in opt_ex22_10.png .
Section 11 : idvglin_t
Now we select all of the device geometries at temperature for the linear drain current versus gate voltage characteristics and optimize the following parameters.
- KT1L Channel length sensitivity of temperature coefficient for threshold voltage
- PRT Temperature coefficient for RDSW
- KT1 Temperature coefficient for threshold voltage
- KT2 Body-bias coefficient of the Vth temperature effect
- UTE Mobility temperature exponent
- UA1 Temperature coefficient for UA
- UB1 Temperature coefficient for UB
- UC1 Temperature coefficient for UC
After this step has been completed, the fit to measured data will be as shown in opt_ex22_11.png .
Section 12 : idvd_rt
The first 11 sections concentrated only on the linear regions drain current versus gate voltage for each of the different geometries. This section will use the saturation region drain current and conductances versus drain voltage data for all device geometries. The following parameters are optimized.
- A0 Bulk charge effect coefficient for channel length
- AGS Gate bias coefficient of the bulk
- VSAT Saturation velocity at nominal temperature
- PCLM Channel length modulation parameter
- DELTA Effective Vds parameter
- PDIBLC1 First output resistance DIBL effect correction parameter
- PDIBLC2 Second output resistance DIBL effect correction parameter
- DROUT L dependence coefficient of the DIBL correction parameter in Rout
- ETA0 DIBL coefficient in subthreshold region
- DSUB DIBL exponent coefficient in subthreshold region
- PVAG Gate dependence of Early voltage
- PSCBE1 First substrate current body-effect parameter
- PSCBE2 Second substrate current body-effect parameter
After this step has been completed, the fit to measured data will be as shown in opt_ex22_12.png .
Section 13 : idvgsat_rt
This section verifies the fitting of the saturation drain current versus gate voltage characteristics with back bias. No parameters need to be optimized. The fit to measured data will be as shown in opt_ex22_13.png .
Section 14 : idvd_t
This section will extract the parameters for the saturation drain current versus drain voltage characteristics versus temperature. The parameters to be optimized are as follows.
- AT Temperature coefficient for saturation velocity
After this step has been completed, the fit to measured data will be as shown in opt_ex22_14.png .
When complete, the model card can then be exported into an external model library file as shown in the output file opt_ex22.lib.
Files
opt_ex22.lib
.MODEL nmos NMOS ( +LEVEL = 77 VERSION = 106.2 GEOMOD = 0 +RGEOMOD = 0 COVMOD = 1 RDSMOD = 0 +GIDLMOD = 0 RGATEMOD = 0 RBODYMOD = 0 +IGCMOD = 0 IGBMOD = 0 PERMOD = 1 +TNOIMOD = 0 EDGEFET = 0 CVMOD = 0 +WPEMOD = 0 ASYMMOD = 0 SHMOD = 0 +MOBSCALE = 0 FNOIMOD = 0 BINUNIT = 1 +LLONG = 1e-05 WWIDE = 1e-05 XL = 0 +XW = 0 LINT = -1.07771e-08 LL = 0 +LW = 0 LWL = 0 LLN = 1 +LWN = 1 WINT = -1.99785e-09 WL = 0 +WW = 0 WWL = 0 WLN = 1 +WWN = 1 TOXE = 1.08295e-09 DTOX = 0 +NDEP = 1.14853e+24 NDEPL1 = 0.134547 +NDEPLEXP1 = 1.78547 +NDEPL2 = 0 +NDEPLEXP2 = 2 +NDEPW = 0.0211212 NDEPWEXP = 1 NDEPWL = 0 +NDEPWLEXP = 1 +NGATE = 0 EASUB = 4.05 NI0SUB = 1.1e+16 +BG0SUB = 1.17 EPSRSUB = 11.9 EPSROX = 3.9 +XJ = 1.5e-07 VFB = -0.973671 VFBSDOFF = 0 +NSD = 1e+26 DVTP0 = 0 DVTP1 = 0 +DVTP2 = 0 DVTP3 = 0 DVTP4 = 0 +DVTP5 = 0 PHIN = 6.64649e-05 ETA0 = 0.0267163 +DSUB = 0.192751 ETAB = -0.07 ETABEXP = 1 +K2 = 0.0237184 K2L = 0 K2LEXP = 1 +K2W = 0 K2WEXP = 1 K2WL = 0 +K2WLEXP = 1 ADOS = 0 BDOS = 1 +QM0 = 0.001 ETAQM = 0.54 CIT = 0 +NFACTOR = 0.0155065 NFACTORL = 0 +NFACTORLEXP = 1 +NFACTORW = 0 +NFACTORWEXP = 1 +NFACTORWL = 0 +NFACTORWLEXP = 1 +CDSCD = 1e-09 CDSCDL = 0 +CDSCDLEXP = 1 +CDSCB = 0 CDSCBL = 0 +CDSCBLEXP = 1 +VSAT = 20899.6 VSATL = 0 VSATLEXP = 1 +VSATW = 0 VSATWEXP = 1 VSATWL = 0 +VSATWLEXP = 1 +DELTA = 0.246006 DELTAL = 0 +DELTALEXP = 1 +U0 = 0.0136776 U0L = 0 U0LEXP = 1 +ETAMOB = 1 UA = 1.13921 UAL = 0 +UALEXP = 1 UAW = 0 UAWEXP = 1 +UAWL = 0 UAWLEXP = 1 EU = 1.7978 +EUL = 0 EULEXP = 1 EUW = 0 +EUWEXP = 1 EUWL = 0 EUWLEXP = 1 +UD = 0.001 UDL = 0 UDLEXP = 1 +UCS = 2 UC = -0.48109 UCL = 0 +UCLEXP = 1 UCW = 0 UCWEXP = 1 +UCWL = 0 UCWLEXP = 1 PCLM = 0.0117916 +PCLML = 0 PCLMLEXP = 1 PCLMG = 0 +PSCBE1 = 7.16329e+08 PSCBE2 = 6.01536e-08 PDITS = 0 +PDITSL = 0 PDITSD = 0 RSH = 0 +PRWG = 0.000142342 PRWB = 0 PRWBL = 0 +PRWBLEXP = 1 WR = 1 RSWMIN = 0 +RSW = 10 RSWL = 0 RSWLEXP = 1 +RDSWMIN = 0 RDSW = 0.201814 RDSWL = 0 +RDSWLEXP = 1 PSAT = 1 PSATL = 0 +PSATLEXP = 1 PSATB = 0 PSATX = 1 +PTWG = 0.999664 PTWGL = -0.999962 PTWGLEXP = 1.8756 +PDIBLC = 0.00740721 PDIBLCL = 0.000998578 +PDIBLCLEXP = 1.99993 +PDIBLCB = 0 PVAG = 9.99925 FPROUT = 0 +FPROUTL = 0 +FPROUTLEXP = 1 +ALPHA0 = 0 ALPHA0L = 0 +ALPHA0LEXP = 1 +BETA0 = 0 AIGBACC = 0.0136 BIGBACC = 0.00171 +CIGBACC = 0.075 NIGBACC = 1 AIGBINV = 0.0111 +BIGBINV = 0.000949 CIGBINV = 0.006 EIGBINV = 1.1 +NIGBINV = 3 DLCIG = 0 POXEDGE = 1 +NTOX = 1 TOXREF = 3e-09 PIGCD = 1 +AIGCL = 0 AIGCW = 0 AIGSL = 0 +AIGSW = 0 AIGDL = 0 AIGDW = 0 +PIGCDL = 0 AGIDL = 0 AGIDLL = 0 +AGIDLW = 0 BGIDL = 2.3e+09 CGIDL = 0.5 +EGIDL = 0.8 CF = 0 CFRCOEFF = 1 +CGSO = 7.47458e-10 CGDO = 7.47192e-10 CGBO = 0 +CGSL = 2.5323e-10 CGDL = 2.52362e-10 CKAPPAS = 0.0250087 +CKAPPAD = 0.0259013 DMCG = 0 DMDG = 0 +DMCGT = 0 XGW = 0 XGL = 0 +NGCON = 1 RSHG = 0.1 CJS = 0.0005 +CJSWS = 5e-10 CJSWGS = 0 PBS = 1 +PBSWS = 1 MJS = 0.5 MJSWS = 0.33 +JSS = 0.0001 JSWS = 0 JSWGS = 0 +NJS = 1 IJTHSFWD = 0.1 IJTHSREV = 0.1 +BVS = 10 XJBVS = 1 JTSS = 0 +JTSSWS = 0 JTSSWGS = 0 JTWEFF = 0 +NJTS = 20 NJTSSW = 20 NJTSSWG = 20 +VTSS = 10 VTSSWS = 10 VTSSWGS = 10 +XRCRG1 = 12 XRCRG2 = 1 RBPB = 50 +RBDB = 50 RBSB = 50 RBPS = 50 +RBPD = 50 GBMIN = 1e-12 RBPS0 = 50 +RBPSL = 0 RBPSW = 0 RBPSNF = 0 +RBPD0 = 50 RBPDL = 0 RBPDW = 0 +RBPDNF = 0 RBPBX0 = 100 RBPBXL = 0 +RBPBXW = 0 RBPBXNF = 0 RBPBY0 = 100 +RBPBYL = 0 RBPBYW = 0 RBPBYNF = 0 +RBSBX0 = 100 RBSBY0 = 100 RBDBX0 = 100 +RBDBY0 = 100 RBSDBXL = 0 RBSDBXW = 0 +RBSDBXNF = 0 RBSDBYL = 0 RBSDBYW = 0 +RBSDBYNF = 0 EF = 1 EM = 4.1e+07 +NOIA = 6.25e+40 NOIB = 3.125e+25 NOIC = 8.75e+08 +NTNOI = 1 RNOIA = 0.577 RNOIB = 0.5164 +RNOIC = 0.395 TNOIA = 0 TNOIB = 0 +TNOIC = 0 TNOM = 27 TBGASUB = 0.000473 +TBGBSUB = 636 TNFACTOR = 0 UTE = -0.439327 +UTEL = 0 UA1 = 0.00279872 UA1L = 0 +UC1 = -0.00970614 UD1 = 0 UD1L = 0 +UCSTE = -0.004775 TETA0 = 0 PRT = 0.000775442 +AT = -1.40792 ATL = 0 TDELTA = 0 +PTWGT = 0 PTWGTL = 0 KT1 = 0.146069 +KT1EXP = 1 KT1L = -5.51623e-11 KT2 = 0.00661853 +IIT = 0 IGT = 2.5 TGIDL = 0 +TCJ = 0 TCJSW = 0 TCJSWG = 0 +TPB = 0 TPBSW = 0 TPBSWG = 0 +XTIS = 3 XTSS = 0.02 XTSSWS = 0.02 +XTSSWGS = 0.02 TNJTS = 0 TNJTSSW = 0 +TNJTSSWG = 0 SAREF = 1e-06 SBREF = 1e-06 +WLOD = 0 KU0 = 0 KVSAT = 0 +TKU0 = 0 KVTH0 = 0 STK2 = 0 +LODK2 = 0 STETA0 = 0 LODETA0 = 0 +WEB = 0 WEC = 0 KVTH0WE = 0 +K2WE = 0 KU0WE = 0 SCREF = 1e-06 +DLBIN = 0 DWBIN = 0 DLC = 0 +LLC = 0 LWC = 0 LWLC = 0 +DWC = 0 WLC = 0 WWC = 0 +WWLC = 0 VFBCVL = 0 +VFBCVLEXP = 1 +VFBCVW = 0 +VFBCVWEXP = 1 +VFBCVWL = 0 +VFBCVWLEXP = 1 +K1 = 0.201207 K1L = 0 K1LEXP = 1 +K1W = 0 K1WEXP = 1 K1WL = 0 +K1WLEXP = 1 UP1 = 0 LP1 = 1e-08 +UP2 = 0 LP2 = 1e-08 A1 = 0.0249974 +A11 = 0 A2 = 0 A21 = 0 +RTH0 = 0 CTH0 = 1e-05 WTH0 = 0 +LKU0 = 0 WKU0 = 0 PKU0 = 0 +LLODKU0 = 0 WLODKU0 = 0 LKVTH0 = 0 +WKVTH0 = 0 PKVTH0 = 0 LLODVTH = 0 +WLODVTH = 0 SSL0 = 400 SSL1 = 3.36e+08 +SSL2 = 0.185 SSL3 = 0.3 SSL4 = 1.4 +SSLEXP1 = 0.49 SSLEXP2 = 1.42 AVDSX = 20 +WEDGE = 1e-08 +DGAMMAEDGE = 0 +DGAMMAEDGEL = 0 +DGAMMAEDGELEXP = 1 +DVTEDGE = 0 DVT0EDGE = 2.2 DVT1EDGE = 0.53 +DVT2EDGE = 0 IGCLAMP = 1 LP = 1e-05 +RNOIK = 0 TNOIK = 0 TNOIK2 = 0.1 +K0 = 0 K01 = 0 M0 = 1 +M01 = 0 LH = 3e-08 )
opt_ex22.uds
Utmost IV CSV Data Logfile Format Version 1 Copyright (c) 1984-2018 Silvaco, Inc. All rights reserved DataSetStart DataSetName, idvd MeasurementType, DC BatchName, opt_ex22 WaferName, Silvaco DieName, Silvaco DeviceName, n10x1 Temperature, -40 FabDate, 01 Nov 2018 UserDate, 01 Nov 2018 Attribute, L, 1e-06 Attribute, W, 1e-05 NodeNames, d g s b Sweep, 1, V, D, LIN, 0, 1, CALCULATED, 51, 0.1, 0 Sweep, 2, V, G, LIN, 0.4, 1, CALCULATED, 5, 0.1, 0 Constant, V, B, 0, 0.1, 0 Constant, V, S, 0, 0.1, 0 Target, I, D Function, gds, derivative (vd, id) Plot, idvd, XY (LIN LIN), VD, ID Plot, gds, XY (LIN LOG), vd, gds DataArray, ID 0 2.0821e-06 3.51054e-06 4.32465e-06 4.67001e-06 4.8051e-06 4.88505e-06 4.95038e-06 5.01029e-06 5.06752e-06 5.12311e-06 5.17759e-06 5.23126e-06 5.28429e-06 5.33682e-06 5.38893e-06 5.4407e-06 5.49217e-06 5.54339e-06 5.59439e-06 5.6452e-06 5.69583e-06 5.74632e-06 5.79667e-06 5.8469e-06 5.89702e-06 5.94705e-06 5.99698e-06 6.04683e-06 6.09661e-06 6.14631e-06 6.19596e-06 6.24555e-06 6.29508e-06 6.34457e-06 6.39401e-06 6.4434e-06 6.49276e-06 6.54208e-06 6.59137e-06 6.64063e-06 6.68985e-06 6.73906e-06 6.78824e-06 6.83741e-06 6.88657e-06 6.93572e-06 6.98488e-06 7.03405e-06 7.08325e-06 7.13249e-06 0 7.08757e-06 1.32932e-05 1.86176e-05 2.30627e-05 2.66343e-05 2.93473e-05 3.12418e-05 3.24219e-05 3.30949e-05 3.35029e-05 3.37991e-05 3.40469e-05 3.42702e-05 3.4479e-05 3.46781e-05 3.48702e-05 3.50569e-05 3.52394e-05 3.54184e-05 3.55946e-05 3.57682e-05 3.59397e-05 3.61094e-05 3.62775e-05 3.64441e-05 3.66095e-05 3.67738e-05 3.6937e-05 3.70992e-05 3.72607e-05 3.74213e-05 3.75812e-05 3.77405e-05 3.78992e-05 3.80573e-05 3.8215e-05 3.83721e-05 3.85288e-05 3.8685e-05 3.88409e-05 3.89964e-05 3.91516e-05 3.93064e-05 3.9461e-05 3.96152e-05 3.97692e-05 3.9923e-05 4.00766e-05 4.023e-05 4.03832e-05 0 1.17766e-05 2.2687e-05 3.273e-05 4.19043e-05 5.02092e-05 5.7644e-05 6.42089e-05 6.99054e-05 7.47375e-05 7.87142e-05 8.18559e-05 8.42076e-05 8.58631e-05 8.69833e-05 8.77624e-05 8.83546e-05 8.88472e-05 8.92831e-05 8.96832e-05 9.00587e-05 9.0416e-05 9.07593e-05 9.10915e-05 9.14145e-05 9.17299e-05 9.20387e-05 9.23419e-05 9.26402e-05 9.29342e-05 9.32245e-05 9.35113e-05 9.3795e-05 9.4076e-05 9.43546e-05 9.46308e-05 9.49049e-05 9.51772e-05 9.54476e-05 9.57165e-05 9.59838e-05 9.62497e-05 9.65143e-05 9.67777e-05 9.704e-05 9.73012e-05 9.75614e-05 9.78206e-05 9.8079e-05 9.83365e-05 9.85933e-05 0 1.52146e-05 2.96393e-05 4.32726e-05 5.61132e-05 6.81595e-05 7.94103e-05 8.98643e-05 9.95204e-05 0.000108378 0.000116436 0.000123694 0.000130154 0.000135818 0.000140691 0.000144785 0.000148119 0.000150738 0.000152718 0.000154183 0.000155282 0.000156151 0.000156879 0.000157522 0.000158106 0.00015865 0.000159163 0.000159652 0.000160123 0.000160577 0.000161019 0.000161449 0.000161869 0.000162281 0.000162685 0.000163083 0.000163475 0.000163861 0.000164243 0.00016462 0.000164993 0.000165363 0.000165729 0.000166092 0.000166453 0.00016681 0.000167165 0.000167518 0.000167869 0.000168217 0.000168564 0 1.75109e-05 3.43205e-05 5.04274e-05 6.58303e-05 8.0528e-05 9.45191e-05 0.000107802 0.000120377 0.000132241 0.000143393 0.000153834 0.00016356 0.000172573 0.000180871 0.000188455 0.000195324 0.000201481 0.000206927 0.000211671 0.000215722 0.000219101 0.000221846 0.000224019 0.000225717 0.000227054 0.000228143 0.000229068 0.000229885 0.000230627 0.000231314 0.00023196 0.000232574 0.000233161 0.000233727 0.000234274 0.000234805 0.000235322 0.000235828 0.000236323 0.000236808 0.000237286 0.000237755 0.000238218 0.000238674 0.000239125 0.00023957 0.000240011 0.000240447 0.000240879 0.000241307 DataSetFinish DataSetStart DataSetName, idvd MeasurementType, DC BatchName, opt_ex22 WaferName, Silvaco DieName, Silvaco DeviceName, n10x10 Temperature, -40 FabDate, 01 Nov 2018 UserDate, 01 Nov 2018 Attribute, L, 1e-05 Attribute, W, 1e-05 NodeNames, d g s b Sweep, 1, V, D, LIN, 0, 1, CALCULATED, 51, 0.1, 0 Sweep, 2, V, G, LIN, 0.4, 1, CALCULATED, 5, 0.1, 0 Constant, V, B, 0, 0.1, 0 Constant, V, S, 0, 0.1, 0 Target, I, D Function, gds, derivative (vd, id) Plot, idvd, XY (LIN LIN), VD, ID Plot, gds, XY (LIN LOG), vd, gds DataArray, ID 0 2.63238e-07 4.52866e-07 5.71447e-07 6.28981e-07 6.50483e-07 6.60135e-07 6.6689e-07 6.72836e-07 6.78496e-07 6.84034e-07 6.89511e-07 6.94955e-07 7.00377e-07 7.05786e-07 7.11186e-07 7.16578e-07 7.21965e-07 7.27348e-07 7.32727e-07 7.38104e-07 7.43478e-07 7.4885e-07 7.5422e-07 7.59589e-07 7.64956e-07 7.70322e-07 7.75687e-07 7.81051e-07 7.86414e-07 7.91776e-07 7.97137e-07 8.02498e-07 8.07858e-07 8.13217e-07 8.18576e-07 8.23935e-07 8.29293e-07 8.3465e-07 8.40007e-07 8.45364e-07 8.5072e-07 8.56076e-07 8.61432e-07 8.66788e-07 8.72143e-07 8.77498e-07 8.82854e-07 8.88209e-07 8.93565e-07 8.98921e-07 0 7.84532e-07 1.47456e-06 2.07022e-06 2.57174e-06 2.97966e-06 3.29515e-06 3.52119e-06 3.66551e-06 3.7456e-06 3.78767e-06 3.81323e-06 3.83263e-06 3.84966e-06 3.86566e-06 3.88116e-06 3.89639e-06 3.91145e-06 3.92642e-06 3.94131e-06 3.95615e-06 3.97096e-06 3.98573e-06 4.00047e-06 4.0152e-06 4.02991e-06 4.04461e-06 4.05929e-06 4.07396e-06 4.08862e-06 4.10327e-06 4.11792e-06 4.13255e-06 4.14718e-06 4.16181e-06 4.17642e-06 4.19104e-06 4.20564e-06 4.22025e-06 4.23485e-06 4.24944e-06 4.26403e-06 4.27862e-06 4.29321e-06 4.30779e-06 4.32237e-06 4.33694e-06 4.35152e-06 4.36609e-06 4.38066e-06 4.39523e-06 0 1.27125e-06 2.44775e-06 3.52953e-06 4.5166e-06 5.40901e-06 6.20683e-06 6.91022e-06 7.51943e-06 8.03494e-06 8.45771e-06 8.78964e-06 9.03485e-06 9.20199e-06 9.30695e-06 9.37126e-06 9.41414e-06 9.44713e-06 9.47565e-06 9.50203e-06 9.52731e-06 9.55196e-06 9.57622e-06 9.60024e-06 9.62408e-06 9.64779e-06 9.67141e-06 9.69495e-06 9.71843e-06 9.74186e-06 9.76525e-06 9.78859e-06 9.81191e-06 9.83519e-06 9.85845e-06 9.88169e-06 9.90491e-06 9.92811e-06 9.95129e-06 9.97445e-06 9.9976e-06 1.00207e-05 1.00439e-05 1.0067e-05 1.00901e-05 1.01132e-05 1.01362e-05 1.01593e-05 1.01824e-05 1.02054e-05 1.02285e-05 0 1.63932e-06 3.19029e-06 4.65289e-06 6.02712e-06 7.31298e-06 8.51048e-06 9.61962e-06 1.06404e-05 1.1573e-05 1.24173e-05 1.31736e-05 1.3842e-05 1.4423e-05 1.49173e-05 1.5326e-05 1.56515e-05 1.58982e-05 1.60744e-05 1.61937e-05 1.62734e-05 1.63298e-05 1.63741e-05 1.64121e-05 1.6447e-05 1.64802e-05 1.65124e-05 1.65439e-05 1.6575e-05 1.66058e-05 1.66364e-05 1.66669e-05 1.66972e-05 1.67274e-05 1.67575e-05 1.67876e-05 1.68175e-05 1.68475e-05 1.68773e-05 1.69072e-05 1.6937e-05 1.69667e-05 1.69964e-05 1.70261e-05 1.70558e-05 1.70854e-05 1.7115e-05 1.71446e-05 1.71742e-05 1.72037e-05 1.72333e-05 0 1.88942e-06 3.69909e-06 5.429e-06 7.07913e-06 8.64949e-06 1.014e-05 1.15508e-05 1.28818e-05 1.41329e-05 1.53043e-05 1.63959e-05 1.74077e-05 1.83399e-05 1.91924e-05 1.99654e-05 2.06591e-05 2.12737e-05 2.18098e-05 2.22682e-05 2.26501e-05 2.29582e-05 2.31968e-05 2.33733e-05 2.34989e-05 2.35878e-05 2.36535e-05 2.37058e-05 2.3751e-05 2.37922e-05 2.38311e-05 2.38687e-05 2.39055e-05 2.39417e-05 2.39774e-05 2.40129e-05 2.40481e-05 2.40832e-05 2.41181e-05 2.41529e-05 2.41875e-05 2.42221e-05 2.42566e-05 2.42911e-05 2.43255e-05 2.43598e-05 2.4394e-05 2.44283e-05 2.44624e-05 2.44966e-05 2.45307e-05 DataSetFinish DataSetStart DataSetName, idvd MeasurementType, DC BatchName, opt_ex22 WaferName, Silvaco DieName, Silvaco DeviceName, n10x2 Temperature, -40 FabDate, 01 Nov 2018 UserDate, 01 Nov 2018 Attribute, L, 2e-06 Attribute, W, 1e-05 NodeNames, d g s b Sweep, 1, V, D, LIN, 0, 1, CALCULATED, 51, 0.1, 0 Sweep, 2, V, G, LIN, 0.4, 1, CALCULATED, 5, 0.1, 0 Constant, V, B, 0, 0.1, 0 Constant, V, S, 0, 0.1, 0 Target, I, D Function, gds, derivative (vd, id) Plot, idvd, XY (LIN LIN), VD, ID Plot, gds, XY (LIN LOG), vd, gds DataArray, ID 0 1.19405e-06 2.03803e-06 2.54724e-06 2.78081e-06 2.86846e-06 2.91296e-06 2.94671e-06 2.97708e-06 3.00602e-06 3.03422e-06 3.06196e-06 3.0894e-06 3.11661e-06 3.14364e-06 3.17054e-06 3.19733e-06 3.22402e-06 3.25063e-06 3.27717e-06 3.30365e-06 3.33008e-06 3.35646e-06 3.38281e-06 3.40911e-06 3.43538e-06 3.46162e-06 3.48784e-06 3.51403e-06 3.54019e-06 3.56634e-06 3.59247e-06 3.61857e-06 3.64467e-06 3.67074e-06 3.69681e-06 3.72286e-06 3.7489e-06 3.77492e-06 3.80094e-06 3.82695e-06 3.85295e-06 3.87894e-06 3.90492e-06 3.9309e-06 3.95688e-06 3.98285e-06 4.00882e-06 4.03479e-06 4.06077e-06 4.08677e-06 0 3.7559e-06 7.05448e-06 9.89612e-06 1.22819e-05 1.42144e-05 1.56999e-05 1.6755e-05 1.7423e-05 1.77978e-05 1.80074e-05 1.81464e-05 1.82575e-05 1.83564e-05 1.84489e-05 1.85376e-05 1.86239e-05 1.87084e-05 1.87915e-05 1.88736e-05 1.89548e-05 1.90354e-05 1.91153e-05 1.91947e-05 1.92736e-05 1.93521e-05 1.94303e-05 1.95082e-05 1.95858e-05 1.96631e-05 1.97402e-05 1.98171e-05 1.98938e-05 1.99703e-05 2.00466e-05 2.01228e-05 2.01989e-05 2.02748e-05 2.03506e-05 2.04263e-05 2.05019e-05 2.05774e-05 2.06528e-05 2.07281e-05 2.08033e-05 2.08785e-05 2.09536e-05 2.10286e-05 2.11036e-05 2.11785e-05 2.12533e-05 0 6.14514e-06 1.18363e-05 1.70731e-05 2.18554e-05 2.61829e-05 3.00558e-05 3.34743e-05 3.64395e-05 3.89535e-05 4.10207e-05 4.26508e-05 4.38646e-05 4.47062e-05 4.52546e-05 4.56128e-05 4.58687e-05 4.60742e-05 4.6254e-05 4.64193e-05 4.65756e-05 4.67257e-05 4.68715e-05 4.70139e-05 4.71535e-05 4.7291e-05 4.74267e-05 4.75607e-05 4.76935e-05 4.78251e-05 4.79556e-05 4.80852e-05 4.8214e-05 4.83421e-05 4.84695e-05 4.85963e-05 4.87225e-05 4.88483e-05 4.89735e-05 4.90984e-05 4.92228e-05 4.93469e-05 4.94706e-05 4.9594e-05 4.97171e-05 4.98399e-05 4.99625e-05 5.00848e-05 5.02069e-05 5.03287e-05 5.04504e-05 0 7.92679e-06 1.54345e-05 2.25228e-05 2.91912e-05 3.54393e-05 4.12669e-05 4.66735e-05 5.1659e-05 5.62233e-05 6.03663e-05 6.40884e-05 6.73904e-05 7.02737e-05 7.27413e-05 7.47989e-05 7.64575e-05 7.77383e-05 7.86809e-05 7.93493e-05 7.98249e-05 8.01828e-05 8.04743e-05 8.07283e-05 8.09599e-05 8.11769e-05 8.13839e-05 8.15834e-05 8.17772e-05 8.19664e-05 8.21519e-05 8.23343e-05 8.25139e-05 8.26913e-05 8.28666e-05 8.30401e-05 8.32121e-05 8.33826e-05 8.35519e-05 8.372e-05 8.3887e-05 8.40531e-05 8.42183e-05 8.43826e-05 8.45462e-05 8.47092e-05 8.48714e-05 8.50331e-05 8.51942e-05 8.53547e-05 8.55148e-05 0 9.12808e-06 1.78807e-05 2.62576e-05 3.42583e-05 4.18824e-05 4.91297e-05 5.59996e-05 6.2492e-05 6.86064e-05 7.43427e-05 7.97005e-05 8.46796e-05 8.92801e-05 9.35019e-05 9.73453e-05 0.000100811 0.000103899 0.000106613 0.000108956 0.000110933 0.000112556 0.000113845 0.000114834 0.000115574 0.000116131 0.000116565 0.000116925 0.000117239 0.000117525 0.000117791 0.000118044 0.000118286 0.000118521 0.00011875 0.000118973 0.000119192 0.000119407 0.000119619 0.000119828 0.000120035 0.000120239 0.000120441 0.000120642 0.00012084 0.000121038 0.000121234 0.000121428 0.000121622 0.000121814 0.000122006 DataSetFinish DataSetStart DataSetName, idvd MeasurementType, DC BatchName, opt_ex22 WaferName, Silvaco DieName, Silvaco DeviceName, n10x5 Temperature, -40 FabDate, 01 Nov 2018 UserDate, 01 Nov 2018 Attribute, L, 5e-06 Attribute, W, 1e-05 NodeNames, d g s b Sweep, 1, V, D, LIN, 0, 1, CALCULATED, 51, 0.1, 0 Sweep, 2, V, G, LIN, 0.4, 1, CALCULATED, 5, 0.1, 0 Constant, V, B, 0, 0.1, 0 Constant, V, S, 0, 0.1, 0 Target, I, D Function, gds, derivative (vd, id) Plot, idvd, XY (LIN LIN), VD, ID Plot, gds, XY (LIN LOG), vd, gds DataArray, ID 0 5.14288e-07 8.83147e-07 1.11192e-06 1.22145e-06 1.26235e-06 1.28127e-06 1.29481e-06 1.3068e-06 1.31821e-06 1.32937e-06 1.34039e-06 1.35132e-06 1.3622e-06 1.37304e-06 1.38385e-06 1.39463e-06 1.4054e-06 1.41615e-06 1.42689e-06 1.43762e-06 1.44834e-06 1.45905e-06 1.46976e-06 1.48045e-06 1.49114e-06 1.50183e-06 1.51251e-06 1.52319e-06 1.53387e-06 1.54454e-06 1.5552e-06 1.56587e-06 1.57653e-06 1.58719e-06 1.59784e-06 1.6085e-06 1.61915e-06 1.6298e-06 1.64045e-06 1.6511e-06 1.66174e-06 1.67239e-06 1.68303e-06 1.69367e-06 1.70431e-06 1.71495e-06 1.72559e-06 1.73624e-06 1.74688e-06 1.75752e-06 0 1.55246e-06 2.91752e-06 4.0954e-06 5.08655e-06 5.89201e-06 6.51419e-06 6.95917e-06 7.24279e-06 7.40064e-06 7.48486e-06 7.53725e-06 7.5776e-06 7.61313e-06 7.64648e-06 7.67869e-06 7.71024e-06 7.74136e-06 7.77218e-06 7.80279e-06 7.83322e-06 7.86353e-06 7.89372e-06 7.92382e-06 7.95385e-06 7.9838e-06 8.0137e-06 8.04354e-06 8.07334e-06 8.1031e-06 8.13282e-06 8.1625e-06 8.19215e-06 8.22178e-06 8.25138e-06 8.28095e-06 8.3105e-06 8.34003e-06 8.36954e-06 8.39904e-06 8.42851e-06 8.45797e-06 8.48742e-06 8.51685e-06 8.54627e-06 8.57567e-06 8.60507e-06 8.63445e-06 8.66383e-06 8.69319e-06 8.72256e-06 0 2.52117e-06 4.85494e-06 7.00129e-06 8.96022e-06 1.07318e-05 1.23161e-05 1.37134e-05 1.49242e-05 1.59494e-05 1.67908e-05 1.74524e-05 1.79422e-05 1.82777e-05 1.84905e-05 1.86232e-05 1.87135e-05 1.87838e-05 1.88447e-05 1.8901e-05 1.89547e-05 1.90068e-05 1.90579e-05 1.91083e-05 1.91581e-05 1.92075e-05 1.92566e-05 1.93054e-05 1.9354e-05 1.94023e-05 1.94505e-05 1.94986e-05 1.95465e-05 1.95943e-05 1.9642e-05 1.96896e-05 1.97371e-05 1.97845e-05 1.98318e-05 1.98791e-05 1.99263e-05 1.99735e-05 2.00206e-05 2.00676e-05 2.01146e-05 2.01616e-05 2.02085e-05 2.02553e-05 2.03022e-05 2.0349e-05 2.03958e-05 0 3.25115e-06 6.32798e-06 9.23045e-06 1.19585e-05 1.45121e-05 1.68911e-05 1.90957e-05 2.11257e-05 2.29813e-05 2.46626e-05 2.61698e-05 2.75033e-05 2.86638e-05 2.96527e-05 3.04724e-05 3.11273e-05 3.16264e-05 3.19859e-05 3.22324e-05 3.24001e-05 3.2521e-05 3.26169e-05 3.26997e-05 3.27755e-05 3.28472e-05 3.29164e-05 3.29838e-05 3.305e-05 3.31153e-05 3.31799e-05 3.3244e-05 3.33075e-05 3.33707e-05 3.34335e-05 3.3496e-05 3.35583e-05 3.36203e-05 3.36821e-05 3.37438e-05 3.38052e-05 3.38666e-05 3.39277e-05 3.39888e-05 3.40497e-05 3.41105e-05 3.41712e-05 3.42318e-05 3.42924e-05 3.43528e-05 3.44132e-05 0 3.74618e-06 7.33533e-06 1.07674e-05 1.40423e-05 1.716e-05 2.01204e-05 2.29235e-05 2.55693e-05 2.80577e-05 3.03886e-05 3.25622e-05 3.45783e-05 3.64372e-05 3.81388e-05 3.96833e-05 4.10712e-05 4.23029e-05 4.33794e-05 4.43022e-05 4.50739e-05 4.56995e-05 4.61873e-05 4.65519e-05 4.68153e-05 4.70051e-05 4.71476e-05 4.72627e-05 4.73622e-05 4.74529e-05 4.75383e-05 4.76202e-05 4.76998e-05 4.77778e-05 4.78545e-05 4.79302e-05 4.80051e-05 4.80794e-05 4.81531e-05 4.82263e-05 4.82991e-05 4.83716e-05 4.84437e-05 4.85155e-05 4.85871e-05 4.86584e-05 4.87295e-05 4.88004e-05 4.88711e-05 4.89417e-05 4.90121e-05 DataSetFinish DataSetStart DataSetName, idvd MeasurementType, DC BatchName, opt_ex22 WaferName, Silvaco DieName, Silvaco DeviceName, n1x1 Temperature, -40 FabDate, 01 Nov 2018 UserDate, 01 Nov 2018 Attribute, L, 1e-06 Attribute, W, 1e-06 NodeNames, d g s b Sweep, 1, V, D, LIN, 0, 1, CALCULATED, 51, 0.1, 0 Sweep, 2, V, G, LIN, 0.4, 1, CALCULATED, 5, 0.1, 0 Constant, V, B, 0, 0.1, 0 Constant, V, S, 0, 0.1, 0 Target, I, D Function, gds, derivative (vd, id) Plot, idvd, XY (LIN LIN), VD, ID Plot, gds, XY (LIN LOG), vd, gds DataArray, ID 0 1.92081e-07 3.20324e-07 3.89569e-07 4.16919e-07 4.27866e-07 4.34845e-07 4.40744e-07 4.46222e-07 4.51484e-07 4.56611e-07 4.61645e-07 4.66611e-07 4.71523e-07 4.76392e-07 4.81225e-07 4.86029e-07 4.90808e-07 4.95565e-07 5.00303e-07 5.05024e-07 5.09731e-07 5.14425e-07 5.19107e-07 5.23779e-07 5.28442e-07 5.33096e-07 5.37742e-07 5.42382e-07 5.47015e-07 5.51642e-07 5.56263e-07 5.6088e-07 5.65492e-07 5.701e-07 5.74704e-07 5.79305e-07 5.83902e-07 5.88496e-07 5.93087e-07 5.97676e-07 6.02262e-07 6.06847e-07 6.11429e-07 6.16011e-07 6.20591e-07 6.25171e-07 6.29752e-07 6.34335e-07 6.3892e-07 6.4351e-07 0 6.91578e-07 1.29427e-06 1.80815e-06 2.23347e-06 2.57092e-06 2.82233e-06 2.99278e-06 3.09514e-06 3.15268e-06 3.18867e-06 3.21585e-06 3.23914e-06 3.26039e-06 3.2804e-06 3.29956e-06 3.3181e-06 3.33616e-06 3.35383e-06 3.37118e-06 3.38828e-06 3.40514e-06 3.42181e-06 3.43832e-06 3.45467e-06 3.47089e-06 3.487e-06 3.50299e-06 3.5189e-06 3.53472e-06 3.55045e-06 3.56612e-06 3.58172e-06 3.59726e-06 3.61275e-06 3.62818e-06 3.64356e-06 3.6589e-06 3.6742e-06 3.68946e-06 3.70468e-06 3.71987e-06 3.73503e-06 3.75015e-06 3.76525e-06 3.78032e-06 3.79537e-06 3.8104e-06 3.82541e-06 3.8404e-06 3.85538e-06 0 1.16857e-06 2.24954e-06 3.24277e-06 4.14813e-06 4.96552e-06 5.6949e-06 6.3363e-06 6.88988e-06 7.35611e-06 7.7361e-06 8.0323e-06 8.25017e-06 8.40084e-06 8.50215e-06 8.57357e-06 8.62906e-06 8.67604e-06 8.71807e-06 8.75691e-06 8.79353e-06 8.82848e-06 8.86214e-06 8.89477e-06 8.92653e-06 8.95758e-06 8.98801e-06 9.01792e-06 9.04736e-06 9.07639e-06 9.10506e-06 9.13341e-06 9.16147e-06 9.18926e-06 9.21682e-06 9.24416e-06 9.2713e-06 9.29825e-06 9.32504e-06 9.35167e-06 9.37816e-06 9.40451e-06 9.43074e-06 9.45685e-06 9.48285e-06 9.50875e-06 9.53455e-06 9.56026e-06 9.58588e-06 9.61143e-06 9.6369e-06 0 1.51925e-06 2.9586e-06 4.31788e-06 5.59695e-06 6.79564e-06 7.91383e-06 8.95137e-06 9.90816e-06 1.07841e-05 1.15791e-05 1.22932e-05 1.29265e-05 1.34793e-05 1.39522e-05 1.43464e-05 1.46646e-05 1.49117e-05 1.50966e-05 1.52329e-05 1.53359e-05 1.54184e-05 1.54885e-05 1.55508e-05 1.56079e-05 1.56612e-05 1.57116e-05 1.57599e-05 1.58063e-05 1.58513e-05 1.5895e-05 1.59376e-05 1.59793e-05 1.60202e-05 1.60603e-05 1.60998e-05 1.61388e-05 1.61772e-05 1.62152e-05 1.62527e-05 1.62899e-05 1.63267e-05 1.63631e-05 1.63993e-05 1.64352e-05 1.64708e-05 1.65062e-05 1.65414e-05 1.65764e-05 1.66111e-05 1.66457e-05 0 1.75416e-06 3.43738e-06 5.04953e-06 6.59047e-06 8.06005e-06 9.45815e-06 1.07846e-05 1.20393e-05 1.32222e-05 1.4333e-05 1.53718e-05 1.63383e-05 1.72325e-05 1.80544e-05 1.88039e-05 1.94812e-05 2.00863e-05 2.06196e-05 2.10819e-05 2.14745e-05 2.17997e-05 2.20618e-05 2.2268e-05 2.24286e-05 2.25557e-05 2.26601e-05 2.27496e-05 2.28292e-05 2.29019e-05 2.29696e-05 2.30333e-05 2.3094e-05 2.31522e-05 2.32082e-05 2.32625e-05 2.33153e-05 2.33668e-05 2.34171e-05 2.34664e-05 2.35148e-05 2.35624e-05 2.36092e-05 2.36554e-05 2.37009e-05 2.37459e-05 2.37904e-05 2.38344e-05 2.3878e-05 2.39212e-05 2.3964e-05 DataSetFinish DataSetStart DataSetName, idvd MeasurementType, DC BatchName, opt_ex22 WaferName, Silvaco DieName, Silvaco DeviceName, n1x10 Temperature, -40 FabDate, 01 Nov 2018 UserDate, 01 Nov 2018 Attribute, L, 1e-05 Attribute, W, 1e-06 NodeNames, d g s b Sweep, 1, V, D, LIN, 0, 1, CALCULATED, 51, 0.1, 0 Sweep, 2, V, G, LIN, 0.4, 1, CALCULATED, 5, 0.1, 0 Constant, V, B, 0, 0.1, 0 Constant, V, S, 0, 0.1, 0 Target, I, D Function, gds, derivative (vd, id) Plot, idvd, XY (LIN LIN), VD, ID Plot, gds, XY (LIN LOG), vd, gds DataArray, ID 0 2.45924e-08 4.19239e-08 5.23119e-08 5.69949e-08 5.86819e-08 5.94995e-08 6.01101e-08 6.06613e-08 6.11907e-08 6.17105e-08 6.22255e-08 6.27378e-08 6.32483e-08 6.37577e-08 6.42662e-08 6.47742e-08 6.52817e-08 6.57889e-08 6.62957e-08 6.68023e-08 6.73087e-08 6.78149e-08 6.8321e-08 6.88269e-08 6.93327e-08 6.98384e-08 7.0344e-08 7.08496e-08 7.1355e-08 7.18603e-08 7.23656e-08 7.28709e-08 7.33761e-08 7.38812e-08 7.43863e-08 7.48913e-08 7.53963e-08 7.59012e-08 7.64062e-08 7.6911e-08 7.74159e-08 7.79207e-08 7.84255e-08 7.89303e-08 7.94351e-08 7.99399e-08 8.04447e-08 8.09495e-08 8.14543e-08 8.19591e-08 0 7.68282e-08 1.44123e-07 2.01897e-07 2.50179e-07 2.8903e-07 3.18593e-07 3.39238e-07 3.51928e-07 3.58719e-07 3.6231e-07 3.64605e-07 3.66425e-07 3.6806e-07 3.69612e-07 3.71123e-07 3.72612e-07 3.74087e-07 3.75552e-07 3.77012e-07 3.78467e-07 3.79918e-07 3.81366e-07 3.82813e-07 3.84257e-07 3.857e-07 3.87142e-07 3.88582e-07 3.90021e-07 3.9146e-07 3.92897e-07 3.94334e-07 3.9577e-07 3.97205e-07 3.9864e-07 4.00075e-07 4.01508e-07 4.02942e-07 4.04375e-07 4.05807e-07 4.0724e-07 4.08671e-07 4.10103e-07 4.11534e-07 4.12965e-07 4.14396e-07 4.15826e-07 4.17257e-07 4.18687e-07 4.20117e-07 4.21546e-07 0 1.26297e-07 2.43006e-07 3.50127e-07 4.47664e-07 5.35622e-07 6.14008e-07 6.8284e-07 7.42147e-07 7.91985e-07 8.32464e-07 8.63813e-07 8.86528e-07 9.01641e-07 9.10953e-07 9.16688e-07 9.20629e-07 9.2376e-07 9.26524e-07 9.2911e-07 9.31602e-07 9.3404e-07 9.36444e-07 9.38825e-07 9.41191e-07 9.43545e-07 9.45891e-07 9.48229e-07 9.50562e-07 9.52889e-07 9.55213e-07 9.57533e-07 9.5985e-07 9.62164e-07 9.64476e-07 9.66786e-07 9.69094e-07 9.71399e-07 9.73704e-07 9.76006e-07 9.78307e-07 9.80607e-07 9.82906e-07 9.85204e-07 9.875e-07 9.89796e-07 9.9209e-07 9.94384e-07 9.96677e-07 9.98969e-07 1.00126e-06 0 1.63811e-07 3.18675e-07 4.64591e-07 6.01558e-07 7.29576e-07 8.48645e-07 9.58768e-07 1.05995e-06 1.15218e-06 1.23549e-06 1.30989e-06 1.3754e-06 1.43206e-06 1.47995e-06 1.51922e-06 1.55013e-06 1.57322e-06 1.58944e-06 1.60029e-06 1.60758e-06 1.61284e-06 1.61706e-06 1.62077e-06 1.6242e-06 1.62748e-06 1.63068e-06 1.63382e-06 1.63692e-06 1.63999e-06 1.64304e-06 1.64608e-06 1.64911e-06 1.65213e-06 1.65513e-06 1.65814e-06 1.66113e-06 1.66412e-06 1.66711e-06 1.67009e-06 1.67306e-06 1.67604e-06 1.67901e-06 1.68197e-06 1.68494e-06 1.6879e-06 1.69086e-06 1.69382e-06 1.69677e-06 1.69972e-06 1.70268e-06 0 1.89393e-07 3.70708e-07 5.43946e-07 7.09103e-07 8.6618e-07 1.01517e-06 1.15609e-06 1.28892e-06 1.41366e-06 1.53033e-06 1.63891e-06 1.73942e-06 1.83186e-06 1.91623e-06 1.99255e-06 2.06084e-06 2.12113e-06 2.17348e-06 2.21798e-06 2.25479e-06 2.28419e-06 2.30668e-06 2.32312e-06 2.33474e-06 2.34298e-06 2.34917e-06 2.35419e-06 2.3586e-06 2.36266e-06 2.36652e-06 2.37026e-06 2.37393e-06 2.37754e-06 2.38112e-06 2.38467e-06 2.3882e-06 2.39171e-06 2.3952e-06 2.39869e-06 2.40216e-06 2.40563e-06 2.40908e-06 2.41253e-06 2.41598e-06 2.41942e-06 2.42285e-06 2.42628e-06 2.42971e-06 2.43313e-06 2.43655e-06 DataSetFinish DataSetStart DataSetName, idvd MeasurementType, DC BatchName, opt_ex22 WaferName, Silvaco DieName, Silvaco DeviceName, n3x10 Temperature, -40 FabDate, 01 Nov 2018 UserDate, 01 Nov 2018 Attribute, L, 1e-05 Attribute, W, 3e-06 NodeNames, d g s b Sweep, 1, V, D, LIN, 0, 1, CALCULATED, 51, 0.1, 0 Sweep, 2, V, G, LIN, 0.4, 1, CALCULATED, 5, 0.1, 0 Constant, V, B, 0, 0.1, 0 Constant, V, S, 0, 0.1, 0 Target, I, D Function, gds, derivative (vd, id) Plot, idvd, XY (LIN LIN), VD, ID Plot, gds, XY (LIN LOG), vd, gds DataArray, ID 0 7.56176e-08 1.29447e-07 1.62347e-07 1.77682e-07 1.83284e-07 1.85903e-07 1.87806e-07 1.89506e-07 1.91132e-07 1.92727e-07 1.94306e-07 1.95876e-07 1.9744e-07 1.99e-07 2.00558e-07 2.02114e-07 2.03669e-07 2.05222e-07 2.06775e-07 2.08326e-07 2.09877e-07 2.11428e-07 2.12978e-07 2.14527e-07 2.16076e-07 2.17625e-07 2.19173e-07 2.20722e-07 2.22269e-07 2.23817e-07 2.25365e-07 2.26912e-07 2.28459e-07 2.30006e-07 2.31553e-07 2.33099e-07 2.34646e-07 2.36192e-07 2.37739e-07 2.39285e-07 2.40831e-07 2.42377e-07 2.43923e-07 2.45469e-07 2.47015e-07 2.4856e-07 2.50106e-07 2.51652e-07 2.53198e-07 2.54744e-07 0 2.31251e-07 4.34185e-07 6.08843e-07 7.55302e-07 8.73732e-07 9.64527e-07 1.02869e-06 1.06881e-06 1.09063e-06 1.10211e-06 1.10927e-06 1.11485e-06 1.11981e-06 1.1245e-06 1.12906e-06 1.13354e-06 1.13798e-06 1.14239e-06 1.14679e-06 1.15116e-06 1.15553e-06 1.15989e-06 1.16424e-06 1.16858e-06 1.17292e-06 1.17726e-06 1.18159e-06 1.18592e-06 1.19024e-06 1.19456e-06 1.19889e-06 1.2032e-06 1.20752e-06 1.21184e-06 1.21615e-06 1.22046e-06 1.22477e-06 1.22908e-06 1.23339e-06 1.2377e-06 1.242e-06 1.24631e-06 1.25061e-06 1.25491e-06 1.25921e-06 1.26352e-06 1.26782e-06 1.27212e-06 1.27642e-06 1.28072e-06 0 3.77687e-07 7.26936e-07 1.04775e-06 1.34014e-06 1.60411e-06 1.8397e-06 2.04695e-06 2.22594e-06 2.37683e-06 2.49992e-06 2.59585e-06 2.66597e-06 2.71314e-06 2.74244e-06 2.76042e-06 2.77261e-06 2.78216e-06 2.79051e-06 2.79828e-06 2.80576e-06 2.81306e-06 2.82026e-06 2.82739e-06 2.83446e-06 2.84151e-06 2.84852e-06 2.85551e-06 2.86249e-06 2.86945e-06 2.8764e-06 2.88333e-06 2.89026e-06 2.89718e-06 2.90409e-06 2.911e-06 2.9179e-06 2.92479e-06 2.93168e-06 2.93856e-06 2.94544e-06 2.95232e-06 2.95919e-06 2.96606e-06 2.97293e-06 2.97979e-06 2.98665e-06 2.9935e-06 3.00036e-06 3.00721e-06 3.01406e-06 0 4.88598e-07 9.50667e-07 1.3862e-06 1.79521e-06 2.17767e-06 2.53361e-06 2.86301e-06 3.1659e-06 3.44228e-06 3.69218e-06 3.91565e-06 4.11275e-06 4.28361e-06 4.42846e-06 4.54767e-06 4.64203e-06 4.71297e-06 4.76317e-06 4.79692e-06 4.81951e-06 4.83568e-06 4.84853e-06 4.8597e-06 4.87001e-06 4.87984e-06 4.88939e-06 4.89877e-06 4.90802e-06 4.9172e-06 4.92631e-06 4.93538e-06 4.94441e-06 4.95341e-06 4.96238e-06 4.97134e-06 4.98027e-06 4.98919e-06 4.99809e-06 5.00698e-06 5.01586e-06 5.02473e-06 5.03358e-06 5.04243e-06 5.05127e-06 5.06011e-06 5.06893e-06 5.07775e-06 5.08657e-06 5.09538e-06 5.10418e-06 0 5.64112e-07 1.10428e-06 1.62049e-06 2.11275e-06 2.58104e-06 3.02538e-06 3.44575e-06 3.84216e-06 4.21461e-06 4.56309e-06 4.88762e-06 5.1882e-06 5.46484e-06 5.71758e-06 5.94645e-06 6.15151e-06 6.33284e-06 6.49061e-06 6.62506e-06 6.73666e-06 6.82619e-06 6.89506e-06 6.94566e-06 6.98152e-06 7.00694e-06 7.02586e-06 7.04111e-06 7.05438e-06 7.06656e-06 7.07812e-06 7.0893e-06 7.10024e-06 7.11101e-06 7.12167e-06 7.13225e-06 7.14276e-06 7.15322e-06 7.16364e-06 7.17402e-06 7.18437e-06 7.19469e-06 7.20499e-06 7.21527e-06 7.22553e-06 7.23577e-06 7.246e-06 7.25622e-06 7.26642e-06 7.27661e-06 7.2868e-06 DataSetFinish DataSetStart DataSetName, idvglin MeasurementType, DC BatchName, opt_ex22 WaferName, Silvaco DieName, Silvaco DeviceName, n10x1 Temperature, -40 FabDate, 01 Nov 2018 UserDate, 01 Nov 2018 Attribute, L, 1e-06 Attribute, W, 1e-05 NodeNames, d g s b Sweep, 1, V, G, LIN, 0, 1, CALCULATED, 51, 0.1, 0 Sweep, 2, V, B, LIN, 0, -0.4, CALCULATED, 6, 0.1, 0 Constant, V, D, 0.1, 0.1, 0 Constant, V, S, 0, 0.1, 0 Target, I, D Function, gm, derivative (vg, id) Plot, idvg, XYY (LIN LIN LIN), VG, ID, gm DataArray, ID 1.04391e-10 1.9402e-10 3.59881e-10 6.65758e-10 1.22729e-09 2.25212e-09 4.10846e-09 7.43966e-09 1.33502e-08 2.37006e-08 4.15658e-08 7.19419e-08 1.22834e-07 2.06908e-07 3.43843e-07 5.63287e-07 9.07701e-07 1.43368e-06 2.20996e-06 3.31089e-06 4.8051e-06 6.73961e-06 9.11891e-06 1.18882e-05 1.49476e-05 1.81934e-05 2.15431e-05 2.4936e-05 2.8328e-05 3.16869e-05 3.49895e-05 3.82188e-05 4.13627e-05 4.44126e-05 4.73628e-05 5.02092e-05 5.29495e-05 5.55824e-05 5.81076e-05 6.05255e-05 6.28369e-05 6.50432e-05 6.71462e-05 6.91478e-05 7.10503e-05 7.28561e-05 7.45678e-05 7.6188e-05 7.77196e-05 7.91653e-05 8.0528e-05 5.24797e-11 9.7908e-11 1.82391e-10 3.391e-10 6.28786e-10 1.16188e-09 2.13714e-09 3.90796e-09 7.09325e-09 1.2758e-08 2.26994e-08 3.9892e-08 6.91723e-08 1.18291e-07 1.99509e-07 3.31877e-07 5.44113e-07 8.77411e-07 1.38679e-06 2.13926e-06 3.20744e-06 4.65856e-06 6.53865e-06 8.85189e-06 1.15439e-05 1.45162e-05 1.76667e-05 2.09146e-05 2.42006e-05 2.7482e-05 3.07276e-05 3.3915e-05 3.70282e-05 4.0056e-05 4.29903e-05 4.5826e-05 4.85597e-05 5.11895e-05 5.37145e-05 5.61348e-05 5.84509e-05 6.06641e-05 6.27759e-05 6.47883e-05 6.67033e-05 6.85232e-05 7.02506e-05 7.18881e-05 7.34383e-05 7.4904e-05 7.62879e-05 2.70458e-11 5.06105e-11 9.46026e-11 1.76572e-10 3.28907e-10 6.1104e-10 1.13119e-09 2.08449e-09 3.81842e-09 6.94239e-09 1.25062e-08 2.2283e-08 3.92086e-08 6.80563e-08 1.16473e-07 1.96543e-07 3.2703e-07 5.36183e-07 8.64474e-07 1.36587e-06 2.10596e-06 3.15561e-06 4.57999e-06 6.4229e-06 8.68625e-06 1.13143e-05 1.4209e-05 1.7271e-05 2.04222e-05 2.36053e-05 2.67794e-05 2.99147e-05 3.29902e-05 3.59907e-05 3.89059e-05 4.17286e-05 4.44541e-05 4.70796e-05 4.96037e-05 5.20257e-05 5.43461e-05 5.65658e-05 5.86862e-05 6.07088e-05 6.26359e-05 6.44695e-05 6.6212e-05 6.78661e-05 6.94342e-05 7.0919e-05 7.23233e-05 1.42502e-11 2.6732e-11 5.01054e-11 9.38108e-11 1.75375e-10 3.27189e-10 6.08773e-10 1.12863e-09 2.08263e-09 3.81979e-09 6.95258e-09 1.25363e-08 2.23529e-08 3.93515e-08 6.83235e-08 1.16937e-07 1.97295e-07 3.28154e-07 5.37681e-07 8.66075e-07 1.36669e-06 2.10395e-06 3.14689e-06 4.55811e-06 6.37808e-06 8.60479e-06 1.11795e-05 1.40046e-05 1.69839e-05 2.00426e-05 2.31264e-05 2.61963e-05 2.92245e-05 3.21912e-05 3.50825e-05 3.78888e-05 4.06037e-05 4.32232e-05 4.57449e-05 4.81677e-05 5.04915e-05 5.27169e-05 5.4845e-05 5.68773e-05 5.88157e-05 6.06623e-05 6.24192e-05 6.4089e-05 6.56742e-05 6.71772e-05 6.86008e-05 7.65899e-12 1.4397e-11 2.70461e-11 5.07657e-11 9.51783e-11 1.78169e-10 3.3283e-10 6.20014e-10 1.15075e-09 2.12549e-09 3.90156e-09 7.10573e-09 1.28172e-08 2.28564e-08 4.02324e-08 6.9827e-08 1.19441e-07 2.01366e-07 3.34599e-07 5.47549e-07 8.80526e-07 1.38661e-06 2.12924e-06 3.17553e-06 4.58498e-06 6.39373e-06 8.59441e-06 1.11241e-05 1.38857e-05 1.67869e-05 1.97569e-05 2.27445e-05 2.57134e-05 2.86376e-05 3.14987e-05 3.42841e-05 3.69851e-05 3.95961e-05 4.21136e-05 4.45357e-05 4.68617e-05 4.90917e-05 5.12266e-05 5.32677e-05 5.52165e-05 5.70751e-05 5.88455e-05 6.05302e-05 6.21314e-05 6.36516e-05 6.50935e-05 4.1911e-12 7.89195e-12 1.48537e-11 2.79388e-11 5.25049e-11 9.85543e-11 1.84694e-10 3.45376e-10 6.43986e-10 1.19619e-09 2.21081e-09 4.05981e-09 7.39505e-09 1.33372e-08 2.37733e-08 4.18159e-08 7.25053e-08 1.2388e-07 2.08576e-07 3.46053e-07 5.65254e-07 9.0691e-07 1.42408e-06 2.17934e-06 3.23767e-06 4.65496e-06 6.46206e-06 8.64491e-06 1.11358e-05 1.38386e-05 1.66652e-05 1.95495e-05 2.24439e-05 2.53146e-05 2.81377e-05 3.08965e-05 3.35794e-05 3.61788e-05 3.86896e-05 4.11091e-05 4.34357e-05 4.56691e-05 4.78096e-05 4.98583e-05 5.18165e-05 5.36861e-05 5.5469e-05 5.71674e-05 5.87836e-05 6.03201e-05 6.17791e-05 DataSetFinish DataSetStart DataSetName, idvglin MeasurementType, DC BatchName, opt_ex22 WaferName, Silvaco DieName, Silvaco DeviceName, n10x10 Temperature, -40 FabDate, 01 Nov 2018 UserDate, 01 Nov 2018 Attribute, L, 1e-05 Attribute, W, 1e-05 NodeNames, d g s b Sweep, 1, V, G, LIN, 0, 1, CALCULATED, 51, 0.1, 0 Sweep, 2, V, B, LIN, 0, -0.4, CALCULATED, 6, 0.1, 0 Constant, V, D, 0.1, 0.1, 0 Constant, V, S, 0, 0.1, 0 Target, I, D Function, gm, derivative (vg, id) Plot, idvg, XYY (LIN LIN LIN), VG, ID, gm DataArray, ID 1.91797e-11 3.55604e-11 6.57469e-11 1.2111e-10 2.22027e-10 4.04542e-10 7.31451e-10 1.31023e-09 2.32137e-09 4.06244e-09 7.0163e-09 1.19566e-08 2.01079e-08 3.33732e-08 5.46144e-08 8.79175e-08 1.38709e-07 2.13566e-07 3.19633e-07 4.63629e-07 6.50483e-07 8.81503e-07 1.15261e-06 1.45497e-06 1.77868e-06 2.11557e-06 2.45961e-06 2.80634e-06 3.15247e-06 3.49551e-06 3.83356e-06 4.16519e-06 4.4893e-06 4.80504e-06 5.11177e-06 5.40901e-06 5.69638e-06 5.97364e-06 6.24059e-06 6.49715e-06 6.74326e-06 6.97893e-06 7.20421e-06 7.4192e-06 7.62401e-06 7.81881e-06 8.00377e-06 8.17909e-06 8.345e-06 8.50171e-06 8.64949e-06 9.54862e-12 1.77832e-11 3.30504e-11 6.12556e-11 1.13118e-10 2.079e-10 3.79778e-10 6.88462e-10 1.23643e-09 2.19617e-09 3.85258e-09 6.66843e-09 1.13854e-08 1.91775e-08 3.18706e-08 5.22154e-08 8.41515e-08 1.32933e-07 2.0496e-07 3.07219e-07 4.46316e-07 6.27129e-07 8.51e-07 1.11396e-06 1.40729e-06 1.72118e-06 2.04755e-06 2.38045e-06 2.71551e-06 3.04949e-06 3.38001e-06 3.70525e-06 4.02385e-06 4.33479e-06 4.63732e-06 4.93084e-06 5.21494e-06 5.48933e-06 5.75379e-06 6.00819e-06 6.25249e-06 6.48667e-06 6.71078e-06 6.9249e-06 7.12914e-06 7.32366e-06 7.50862e-06 7.68421e-06 7.85065e-06 8.00816e-06 8.15697e-06 4.86978e-12 9.10125e-12 1.69834e-11 3.16263e-11 5.87321e-11 1.08673e-10 2.00123e-10 3.66284e-10 6.65267e-10 1.19697e-09 2.12975e-09 3.74194e-09 6.48574e-09 1.10858e-08 1.86886e-08 3.10764e-08 5.09339e-08 8.21071e-08 1.29727e-07 2.00046e-07 2.99886e-07 4.35683e-07 6.12152e-07 8.30496e-07 1.08666e-06 1.37197e-06 1.67677e-06 1.99318e-06 2.31538e-06 2.63915e-06 2.96139e-06 3.2798e-06 3.59268e-06 3.89876e-06 4.1971e-06 4.48701e-06 4.76798e-06 5.03966e-06 5.30179e-06 5.55422e-06 5.79687e-06 6.02973e-06 6.25281e-06 6.46619e-06 6.66998e-06 6.86431e-06 7.04934e-06 7.22527e-06 7.39227e-06 7.55058e-06 7.70042e-06 2.53797e-12 4.75662e-12 8.90452e-12 1.66436e-11 3.10441e-11 5.77432e-11 1.07009e-10 1.97357e-10 3.61736e-10 6.57875e-10 1.18508e-09 2.11077e-09 3.7117e-09 6.43738e-09 1.10076e-08 1.85602e-08 3.08613e-08 5.0567e-08 8.14733e-08 1.2863e-07 1.98168e-07 2.9674e-07 4.30566e-07 6.04108e-07 8.18276e-07 1.06878e-06 1.34691e-06 1.64325e-06 1.95016e-06 2.26207e-06 2.57494e-06 2.88582e-06 3.19254e-06 3.4935e-06 3.78754e-06 4.07381e-06 4.35167e-06 4.6207e-06 4.8806e-06 5.13115e-06 5.37227e-06 5.60389e-06 5.82603e-06 6.03875e-06 6.24215e-06 6.43634e-06 6.62148e-06 6.79775e-06 6.96532e-06 7.12442e-06 7.27524e-06 1.34886e-12 2.53383e-12 4.75566e-12 8.91528e-12 1.66868e-11 3.11663e-11 5.80447e-11 1.07698e-10 1.98845e-10 3.6482e-10 6.64024e-10 1.1969e-09 2.1327e-09 3.75099e-09 6.50537e-09 1.11214e-08 1.87442e-08 3.11476e-08 5.09905e-08 8.20559e-08 1.29347e-07 1.98892e-07 2.97168e-07 4.30143e-07 6.01934e-07 8.13037e-07 1.05879e-06 1.33044e-06 1.61883e-06 1.91666e-06 2.21864e-06 2.52097e-06 2.82085e-06 3.11627e-06 3.40575e-06 3.68822e-06 3.96291e-06 4.22929e-06 4.48695e-06 4.73567e-06 4.97528e-06 5.20572e-06 5.42696e-06 5.63906e-06 5.84209e-06 6.03616e-06 6.22141e-06 6.398e-06 6.56612e-06 6.72596e-06 6.87772e-06 7.29753e-13 1.37346e-12 2.58328e-12 4.85447e-12 9.11146e-12 1.70737e-11 3.19237e-11 5.95152e-11 1.10525e-10 2.04219e-10 3.74893e-10 6.82601e-10 1.23052e-09 2.19229e-09 3.85427e-09 6.6804e-09 1.14116e-08 1.92148e-08 3.18925e-08 5.21338e-08 8.37394e-08 1.31693e-07 2.01933e-07 3.00753e-07 4.33822e-07 6.0484e-07 8.13769e-07 1.05548e-06 1.32118e-06 1.60202e-06 1.89113e-06 2.18352e-06 2.47563e-06 2.76487e-06 3.04938e-06 3.3278e-06 3.59916e-06 3.86277e-06 4.11817e-06 4.36502e-06 4.60312e-06 4.83237e-06 5.05273e-06 5.2642e-06 5.46686e-06 5.66079e-06 5.84613e-06 6.02303e-06 6.19165e-06 6.35218e-06 6.50482e-06 DataSetFinish DataSetStart DataSetName, idvglin MeasurementType, DC BatchName, opt_ex22 WaferName, Silvaco DieName, Silvaco DeviceName, n10x2 Temperature, -40 FabDate, 01 Nov 2018 UserDate, 01 Nov 2018 Attribute, L, 2e-06 Attribute, W, 1e-05 NodeNames, d g s b Sweep, 1, V, G, LIN, 0, 1, CALCULATED, 51, 0.1, 0 Sweep, 2, V, B, LIN, 0, -0.4, CALCULATED, 6, 0.1, 0 Constant, V, D, 0.1, 0.1, 0 Constant, V, S, 0, 0.1, 0 Target, I, D Function, gm, derivative (vg, id) Plot, idvg, XYY (LIN LIN LIN), VG, ID, gm DataArray, ID 7.37636e-11 1.36921e-10 2.53541e-10 4.67986e-10 8.60191e-10 1.57254e-09 2.85513e-09 5.13998e-09 9.15965e-09 1.61329e-08 2.80516e-08 4.81249e-08 8.14597e-08 1.36065e-07 2.24191e-07 3.63794e-07 5.79581e-07 9.02828e-07 1.36924e-06 2.01463e-06 2.86846e-06 3.94514e-06 5.23381e-06 6.69568e-06 8.27927e-06 9.93874e-06 1.16395e-05 1.33561e-05 1.507e-05 1.67675e-05 1.84382e-05 2.00745e-05 2.16708e-05 2.32228e-05 2.47276e-05 2.61829e-05 2.75873e-05 2.89396e-05 3.02394e-05 3.14865e-05 3.26809e-05 3.3823e-05 3.49134e-05 3.59526e-05 3.69417e-05 3.78816e-05 3.87732e-05 3.96179e-05 4.04168e-05 4.11712e-05 4.18824e-05 3.68669e-11 6.87176e-11 1.27856e-10 2.3732e-10 4.39106e-10 8.09085e-10 1.48278e-09 2.69887e-09 4.87076e-09 8.70107e-09 1.53609e-08 2.67667e-08 4.60076e-08 7.79995e-08 1.30453e-07 2.15172e-07 3.49493e-07 5.5734e-07 8.69113e-07 1.31966e-06 1.94405e-06 2.7713e-06 3.81569e-06 5.06662e-06 6.48585e-06 8.02255e-06 9.63151e-06 1.12787e-05 1.29392e-05 1.45949e-05 1.62326e-05 1.78423e-05 1.94169e-05 2.0951e-05 2.2441e-05 2.38839e-05 2.5278e-05 2.6622e-05 2.79152e-05 2.91572e-05 3.03479e-05 3.14878e-05 3.25772e-05 3.36167e-05 3.46073e-05 3.55498e-05 3.64453e-05 3.72948e-05 3.80996e-05 3.88609e-05 3.95799e-05 1.88822e-11 3.53107e-11 6.59449e-11 1.22936e-10 2.28632e-10 4.23849e-10 7.82471e-10 1.43671e-09 2.61984e-09 4.73647e-09 8.47519e-09 1.49847e-08 2.61454e-08 4.49883e-08 7.63341e-08 1.2774e-07 2.10766e-07 3.42383e-07 5.46004e-07 8.51359e-07 1.29249e-06 1.90359e-06 2.71271e-06 3.73325e-06 4.95384e-06 6.33615e-06 7.83007e-06 9.39149e-06 1.09874e-05 1.25937e-05 1.41931e-05 1.57727e-05 1.73234e-05 1.88384e-05 2.03128e-05 2.17431e-05 2.31269e-05 2.44628e-05 2.57495e-05 2.69867e-05 2.81741e-05 2.9312e-05 3.04007e-05 3.14408e-05 3.2433e-05 3.33783e-05 3.42776e-05 3.51319e-05 3.59425e-05 3.67105e-05 3.74371e-05 9.88496e-12 1.85343e-11 3.47174e-11 6.49432e-11 1.21264e-10 2.25879e-10 4.1939e-10 7.75385e-10 1.42569e-09 2.60309e-09 4.7116e-09 8.43897e-09 1.49324e-08 2.60694e-08 4.48735e-08 7.61499e-08 1.2742e-07 2.1017e-07 3.41216e-07 5.43685e-07 8.46814e-07 1.28389e-06 1.88807e-06 2.68611e-06 3.68978e-06 4.88618e-06 6.23628e-06 7.69084e-06 9.20728e-06 1.07539e-05 1.23079e-05 1.38526e-05 1.53761e-05 1.68697e-05 1.83271e-05 1.97439e-05 2.11171e-05 2.24444e-05 2.37247e-05 2.49571e-05 2.61412e-05 2.72772e-05 2.83652e-05 2.94058e-05 3.03997e-05 3.13477e-05 3.22507e-05 3.31097e-05 3.39258e-05 3.47002e-05 3.5434e-05 5.27794e-12 9.91775e-12 1.86225e-11 3.49317e-11 6.54341e-11 1.22344e-10 2.28183e-10 4.24178e-10 7.851e-10 1.44495e-09 2.64039e-09 4.78204e-09 8.56847e-09 1.51639e-08 2.64715e-08 4.55526e-08 7.72654e-08 1.29199e-07 2.12908e-07 3.45236e-07 5.49205e-07 8.53699e-07 1.29128e-06 1.89394e-06 2.68674e-06 3.67931e-06 4.85641e-06 6.17804e-06 7.59602e-06 9.06964e-06 1.05689e-05 1.20722e-05 1.3564e-05 1.5033e-05 1.64714e-05 1.78733e-05 1.92347e-05 2.05531e-05 2.18264e-05 2.30537e-05 2.42343e-05 2.53682e-05 2.64555e-05 2.74965e-05 2.84919e-05 2.94424e-05 3.03488e-05 3.12122e-05 3.20336e-05 3.2814e-05 3.35546e-05 2.86894e-12 5.40088e-12 1.01616e-11 1.9104e-11 3.58781e-11 6.7285e-11 1.25943e-10 2.35135e-10 4.37499e-10 8.1038e-10 1.49236e-09 2.72804e-09 4.9414e-09 8.85269e-09 1.56603e-08 2.73197e-08 4.69715e-08 7.95896e-08 1.32924e-07 2.18726e-07 3.54016e-07 5.61862e-07 8.70895e-07 1.31295e-06 1.91867e-06 2.71113e-06 3.69722e-06 4.85883e-06 6.15483e-06 7.53837e-06 8.97093e-06 1.04244e-05 1.18785e-05 1.3319e-05 1.47354e-05 1.61204e-05 1.74688e-05 1.8777e-05 2.00427e-05 2.12644e-05 2.24412e-05 2.35727e-05 2.46589e-05 2.57e-05 2.66966e-05 2.76493e-05 2.85589e-05 2.94264e-05 3.02526e-05 3.10387e-05 3.17857e-05 DataSetFinish DataSetStart DataSetName, idvglin MeasurementType, DC BatchName, opt_ex22 WaferName, Silvaco DieName, Silvaco DeviceName, n10x5 Temperature, -40 FabDate, 01 Nov 2018 UserDate, 01 Nov 2018 Attribute, L, 5e-06 Attribute, W, 1e-05 NodeNames, d g s b Sweep, 1, V, G, LIN, 0, 1, CALCULATED, 51, 0.1, 0 Sweep, 2, V, B, LIN, 0, -0.4, CALCULATED, 6, 0.1, 0 Constant, V, D, 0.1, 0.1, 0 Constant, V, S, 0, 0.1, 0 Target, I, D Function, gm, derivative (vg, id) Plot, idvg, XYY (LIN LIN LIN), VG, ID, gm DataArray, ID 3.59645e-11 6.67007e-11 1.23371e-10 2.27378e-10 4.17125e-10 7.60673e-10 1.37684e-09 2.46944e-09 4.38161e-09 7.68023e-09 1.32868e-08 2.26794e-08 3.82014e-08 6.3503e-08 1.041e-07 1.6792e-07 2.65589e-07 4.10131e-07 6.15863e-07 8.9648e-07 1.26235e-06 1.71687e-06 2.2528e-06 2.85287e-06 3.497e-06 4.16839e-06 4.85453e-06 5.54626e-06 6.23676e-06 6.92094e-06 7.59495e-06 8.25588e-06 8.90151e-06 9.53016e-06 1.01406e-05 1.07318e-05 1.13031e-05 1.1854e-05 1.23843e-05 1.28936e-05 1.33821e-05 1.38496e-05 1.42964e-05 1.47226e-05 1.51286e-05 1.55146e-05 1.58811e-05 1.62284e-05 1.6557e-05 1.68673e-05 1.716e-05 1.79214e-11 3.33837e-11 6.20625e-11 1.15071e-10 2.12604e-10 3.91003e-10 7.14857e-10 1.29724e-09 2.33266e-09 4.1493e-09 7.29041e-09 1.26399e-08 2.16163e-08 3.64684e-08 6.07011e-08 9.96182e-08 1.60866e-07 2.54732e-07 3.93883e-07 5.92315e-07 8.63476e-07 1.21761e-06 1.65816e-06 2.17806e-06 2.7603e-06 3.38501e-06 4.03557e-06 4.69965e-06 5.36824e-06 6.03472e-06 6.69415e-06 7.34286e-06 7.97809e-06 8.59778e-06 9.20041e-06 9.78484e-06 1.03503e-05 1.08961e-05 1.14219e-05 1.19276e-05 1.24129e-05 1.2878e-05 1.3323e-05 1.3748e-05 1.41533e-05 1.45391e-05 1.4906e-05 1.52542e-05 1.55842e-05 1.58965e-05 1.61915e-05 9.14911e-12 1.71017e-11 3.19193e-11 5.94568e-11 1.10457e-10 2.04481e-10 3.76799e-10 6.90218e-10 1.2549e-09 2.26062e-09 4.02804e-09 7.08837e-09 1.23062e-08 2.1069e-08 3.55748e-08 5.92481e-08 9.72697e-08 1.57109e-07 2.48816e-07 3.84768e-07 5.78631e-07 8.43508e-07 1.1893e-06 1.61916e-06 2.12582e-06 2.69232e-06 3.2991e-06 3.92994e-06 4.57285e-06 5.2191e-06 5.86233e-06 6.49782e-06 7.1221e-06 7.73259e-06 8.32741e-06 8.90517e-06 9.46488e-06 1.00058e-05 1.05276e-05 1.10298e-05 1.15124e-05 1.19753e-05 1.24187e-05 1.28426e-05 1.32474e-05 1.36333e-05 1.40007e-05 1.43499e-05 1.46813e-05 1.49955e-05 1.52928e-05 4.77332e-12 8.94709e-12 1.67518e-11 3.13177e-11 5.84309e-11 1.08724e-10 2.01586e-10 3.7202e-10 6.82431e-10 1.24237e-09 2.24069e-09 3.9966e-09 7.03886e-09 1.22278e-08 2.09431e-08 3.53683e-08 5.89007e-08 9.66708e-08 1.56058e-07 2.46961e-07 3.81525e-07 5.73084e-07 8.34316e-07 1.1746e-06 1.5965e-06 2.09222e-06 2.64472e-06 3.23486e-06 3.84695e-06 4.46949e-06 5.09416e-06 5.71488e-06 6.32722e-06 6.92792e-06 7.51461e-06 8.08557e-06 8.63957e-06 9.17573e-06 9.69347e-06 1.01924e-05 1.06724e-05 1.11333e-05 1.15752e-05 1.19982e-05 1.24026e-05 1.27886e-05 1.31565e-05 1.35067e-05 1.38395e-05 1.41555e-05 1.4455e-05 2.5397e-12 4.7712e-12 8.95594e-12 1.6792e-11 3.14363e-11 5.87306e-11 1.09422e-10 2.03124e-10 3.75272e-10 6.89066e-10 1.25546e-09 2.26572e-09 4.04287e-09 7.12165e-09 1.23712e-08 2.11836e-08 3.5759e-08 5.95133e-08 9.75884e-08 1.57347e-07 2.48608e-07 3.83325e-07 5.745e-07 8.34304e-07 1.17144e-06 1.58762e-06 2.07427e-06 2.61417e-06 3.1887e-06 3.78288e-06 4.38579e-06 4.98957e-06 5.58851e-06 6.17846e-06 6.75642e-06 7.32022e-06 7.8683e-06 8.39958e-06 8.91331e-06 9.409e-06 9.88638e-06 1.03453e-05 1.07858e-05 1.12079e-05 1.16119e-05 1.1998e-05 1.23664e-05 1.27175e-05 1.30518e-05 1.33695e-05 1.36711e-05 1.37557e-12 2.5891e-12 4.87015e-12 9.15297e-12 1.71821e-11 3.22037e-11 6.02302e-11 1.12329e-10 2.08708e-10 3.85881e-10 7.08954e-10 1.29216e-09 2.33222e-09 4.16092e-09 7.32663e-09 1.27193e-08 2.1762e-08 3.66995e-08 6.10069e-08 9.98916e-08 1.60761e-07 2.5341e-07 3.89633e-07 5.82077e-07 8.42336e-07 1.17828e-06 1.59055e-06 2.06957e-06 2.59794e-06 3.1577e-06 3.73467e-06 4.31861e-06 4.90216e-06 5.48001e-06 6.04833e-06 6.60436e-06 7.14615e-06 7.6723e-06 8.18187e-06 8.67422e-06 9.14895e-06 9.60588e-06 1.00449e-05 1.04662e-05 1.08697e-05 1.12558e-05 1.16247e-05 1.19767e-05 1.23122e-05 1.26315e-05 1.29351e-05 DataSetFinish DataSetStart DataSetName, idvglin MeasurementType, DC BatchName, opt_ex22 WaferName, Silvaco DieName, Silvaco DeviceName, n1x1 Temperature, -40 FabDate, 01 Nov 2018 UserDate, 01 Nov 2018 Attribute, L, 1e-06 Attribute, W, 1e-06 NodeNames, d g s b Sweep, 1, V, G, LIN, 0, 1, CALCULATED, 51, 0.1, 0 Sweep, 2, V, B, LIN, 0, -0.4, CALCULATED, 6, 0.1, 0 Constant, V, D, 0.1, 0.1, 0 Constant, V, S, 0, 0.1, 0 Target, I, D Function, gm, derivative (vg, id) Plot, idvg, XYY (LIN LIN LIN), VG, ID, gm DataArray, ID 8.47692e-12 1.57643e-11 2.92639e-11 5.41933e-11 1.00041e-10 1.83908e-10 3.36266e-10 6.10659e-10 1.09962e-09 1.9601e-09 3.45324e-09 6.00579e-09 1.03047e-08 1.74417e-08 2.91257e-08 4.79644e-08 7.77689e-08 1.23762e-07 1.92514e-07 2.91448e-07 4.27866e-07 6.07502e-07 8.32575e-07 1.0997e-06 1.39993e-06 1.7224e-06 2.05787e-06 2.39945e-06 2.74215e-06 3.08235e-06 3.41741e-06 3.74544e-06 4.06508e-06 4.37538e-06 4.67567e-06 4.96552e-06 5.24466e-06 5.51295e-06 5.77033e-06 6.01683e-06 6.25255e-06 6.47762e-06 6.69221e-06 6.89653e-06 7.0908e-06 7.27527e-06 7.4502e-06 7.61586e-06 7.77253e-06 7.9205e-06 8.06005e-06 4.2517e-12 7.93556e-12 1.47917e-11 2.75221e-11 5.1087e-11 9.4529e-11 1.74187e-10 3.19249e-10 5.81127e-10 1.04888e-09 1.87387e-09 3.30834e-09 5.76491e-09 9.90801e-09 1.67935e-08 2.80739e-08 4.62721e-08 7.50796e-08 1.19565e-07 1.86122e-07 2.81992e-07 4.14316e-07 5.8871e-07 8.07339e-07 1.06685e-06 1.35839e-06 1.6713e-06 1.99651e-06 2.3273e-06 2.65881e-06 2.98754e-06 3.31094e-06 3.62723e-06 3.93511e-06 4.23371e-06 4.52243e-06 4.80088e-06 5.06885e-06 5.32623e-06 5.57301e-06 5.80924e-06 6.03505e-06 6.25059e-06 6.45604e-06 6.65161e-06 6.83756e-06 7.01412e-06 7.18157e-06 7.34017e-06 7.4902e-06 7.63194e-06 2.18684e-12 4.09352e-12 7.65507e-12 1.42963e-11 2.66513e-11 4.95645e-11 9.18839e-11 1.69625e-10 3.11443e-10 5.67892e-10 1.02664e-09 1.83685e-09 3.24723e-09 5.66463e-09 9.74407e-09 1.65257e-08 2.76362e-08 4.55561e-08 7.39109e-08 1.17672e-07 1.83097e-07 2.77257e-07 4.07092e-07 5.77996e-07 7.91908e-07 1.04528e-06 1.32928e-06 1.63343e-06 1.94898e-06 2.26944e-06 2.59014e-06 2.90774e-06 3.21983e-06 3.52471e-06 3.82121e-06 4.10851e-06 4.38608e-06 4.65359e-06 4.91086e-06 5.15784e-06 5.39452e-06 5.62101e-06 5.83743e-06 6.04396e-06 6.24079e-06 6.42815e-06 6.60628e-06 6.77543e-06 6.93587e-06 7.08787e-06 7.2317e-06 1.15027e-12 2.15832e-12 4.04679e-12 7.58005e-12 1.4179e-11 2.64745e-11 4.93115e-11 9.15502e-11 1.69246e-10 3.11151e-10 5.6802e-10 1.0279e-09 1.84059e-09 3.25575e-09 5.68158e-09 9.77458e-09 1.65762e-08 2.77124e-08 4.5657e-08 7.40137e-08 1.17702e-07 1.82882e-07 2.76459e-07 4.05137e-07 5.74003e-07 7.84615e-07 1.03307e-06 1.31043e-06 1.60651e-06 1.9129e-06 2.22343e-06 2.53368e-06 2.84048e-06 3.1416e-06 3.43544e-06 3.72092e-06 3.99732e-06 4.26415e-06 4.52116e-06 4.76819e-06 5.00522e-06 5.2323e-06 5.44952e-06 5.65704e-06 5.85504e-06 6.04373e-06 6.22334e-06 6.39411e-06 6.55629e-06 6.71015e-06 6.85595e-06 6.17318e-13 1.16062e-12 2.18086e-12 4.09487e-12 7.68077e-12 1.43869e-11 2.68976e-11 5.01616e-11 9.32352e-11 1.72537e-10 3.17479e-10 5.79968e-10 1.05001e-09 1.88057e-09 3.32631e-09 5.80302e-09 9.97847e-09 1.69102e-08 2.82456e-08 4.64824e-08 7.52398e-08 1.19424e-07 1.85121e-07 2.79075e-07 4.07719e-07 5.75748e-07 7.84208e-07 1.02869e-06 1.30015e-06 1.58869e-06 1.88635e-06 2.18731e-06 2.48744e-06 2.78377e-06 3.07424e-06 3.35739e-06 3.63222e-06 3.8981e-06 4.15462e-06 4.40154e-06 4.63877e-06 4.8663e-06 5.08421e-06 5.29262e-06 5.49169e-06 5.68161e-06 5.86259e-06 6.03488e-06 6.1987e-06 6.35432e-06 6.50198e-06 3.37365e-13 6.35354e-13 1.19605e-12 2.25026e-12 4.23034e-12 7.9443e-12 1.48974e-11 2.78818e-11 5.20476e-11 9.68228e-11 1.793e-10 3.30085e-10 6.03145e-10 1.09193e-09 1.95501e-09 3.45582e-09 6.02363e-09 1.03465e-08 1.7512e-08 2.92091e-08 4.79862e-08 7.75101e-08 1.22703e-07 1.89595e-07 2.84762e-07 4.14327e-07 5.82512e-07 7.89726e-07 1.03096e-06 1.29704e-06 1.57845e-06 1.86773e-06 2.15945e-06 2.44976e-06 2.73594e-06 3.01609e-06 3.28889e-06 3.55345e-06 3.8092e-06 4.05579e-06 4.29304e-06 4.52088e-06 4.73935e-06 4.94852e-06 5.14854e-06 5.33957e-06 5.52183e-06 5.69551e-06 5.86086e-06 6.01811e-06 6.16752e-06 DataSetFinish DataSetStart DataSetName, idvglin MeasurementType, DC BatchName, opt_ex22 WaferName, Silvaco DieName, Silvaco DeviceName, n1x10 Temperature, -40 FabDate, 01 Nov 2018 UserDate, 01 Nov 2018 Attribute, L, 1e-05 Attribute, W, 1e-06 NodeNames, d g s b Sweep, 1, V, G, LIN, 0, 1, CALCULATED, 51, 0.1, 0 Sweep, 2, V, B, LIN, 0, -0.4, CALCULATED, 6, 0.1, 0 Constant, V, D, 0.1, 0.1, 0 Constant, V, S, 0, 0.1, 0 Target, I, D Function, gm, derivative (vg, id) Plot, idvg, XYY (LIN LIN LIN), VG, ID, gm DataArray, ID 1.5603e-12 2.89531e-12 5.35898e-12 9.88595e-12 1.81575e-11 3.31629e-11 6.01397e-11 1.08112e-10 1.92339e-10 3.38141e-10 5.86818e-10 1.00482e-09 1.69781e-09 2.83121e-09 4.65724e-09 7.54348e-09 1.19918e-08 1.86318e-08 2.81757e-08 4.13323e-08 5.86819e-08 8.0509e-08 1.06603e-07 1.36205e-07 1.68298e-07 2.01974e-07 2.36548e-07 2.71517e-07 3.0651e-07 3.41251e-07 3.75531e-07 4.09191e-07 4.42111e-07 4.742e-07 5.05387e-07 5.35622e-07 5.64864e-07 5.93087e-07 6.2027e-07 6.46404e-07 6.71482e-07 6.95506e-07 7.1848e-07 7.40413e-07 7.61319e-07 7.81211e-07 8.00109e-07 8.18032e-07 8.35002e-07 8.51043e-07 8.6618e-07 7.74789e-13 1.44384e-12 2.6856e-12 4.98292e-12 9.21494e-12 1.69677e-11 3.10691e-11 5.6489e-11 1.01814e-10 1.81599e-10 3.20045e-10 5.56681e-10 9.55138e-10 1.6166e-09 2.69957e-09 4.44601e-09 7.20953e-09 1.14748e-08 1.78528e-08 2.70383e-08 3.97261e-08 5.6489e-08 7.76116e-08 1.02893e-07 1.31587e-07 1.62691e-07 1.95305e-07 2.28752e-07 2.6254e-07 2.96306e-07 3.29781e-07 3.62765e-07 3.95109e-07 4.26699e-07 4.57453e-07 4.87307e-07 5.16215e-07 5.44146e-07 5.71077e-07 5.96995e-07 6.21892e-07 6.45767e-07 6.68624e-07 6.90473e-07 7.11323e-07 7.31189e-07 7.50089e-07 7.68042e-07 7.85069e-07 8.01193e-07 8.16436e-07 3.94279e-13 7.37212e-13 1.37651e-12 2.56543e-12 4.76936e-12 8.83745e-12 1.63048e-11 2.99137e-11 5.4493e-11 9.83995e-11 1.7582e-10 3.10368e-10 5.40628e-10 9.28715e-10 1.57336e-09 2.62916e-09 4.33203e-09 7.02683e-09 1.11864e-08 1.74071e-08 2.63669e-08 3.87431e-08 5.50916e-08 7.56818e-08 1.00302e-07 1.28208e-07 1.58408e-07 1.90024e-07 2.22397e-07 2.55048e-07 2.87629e-07 3.19883e-07 3.5162e-07 3.82699e-07 4.13016e-07 4.42495e-07 4.71081e-07 4.98734e-07 5.25428e-07 5.51145e-07 5.75876e-07 5.99617e-07 6.22372e-07 6.44147e-07 6.64952e-07 6.84801e-07 7.0371e-07 7.21697e-07 7.38783e-07 7.54989e-07 7.70337e-07 2.05102e-13 3.84527e-13 7.20173e-13 1.34692e-12 2.51438e-12 4.68199e-12 8.68924e-12 1.60558e-11 2.94998e-11 5.38123e-11 9.7291e-11 1.74029e-10 3.07486e-10 5.35989e-10 9.21198e-10 1.56104e-09 2.60867e-09 4.29743e-09 6.96773e-09 1.10851e-08 1.72346e-08 2.60784e-08 3.82735e-08 5.4351e-08 7.45522e-08 9.86388e-08 1.25854e-07 1.55224e-07 1.85898e-07 2.17243e-07 2.488e-07 2.80238e-07 3.11313e-07 3.41847e-07 3.71711e-07 4.00808e-07 4.29071e-07 4.56451e-07 4.82914e-07 5.08439e-07 5.33012e-07 5.56628e-07 5.79287e-07 6.00995e-07 6.2176e-07 6.41596e-07 6.60516e-07 6.78538e-07 6.95682e-07 7.11967e-07 7.27416e-07 1.08829e-13 2.04486e-13 3.83924e-13 7.20065e-13 1.34859e-12 2.52092e-12 4.70029e-12 8.73398e-12 1.61569e-11 2.9716e-11 5.42541e-11 9.81581e-11 1.75667e-10 3.10463e-10 5.41207e-10 9.30026e-10 1.57546e-09 2.63132e-09 4.33134e-09 7.01507e-09 1.11444e-08 1.7296e-08 2.61168e-08 3.82404e-08 5.41667e-08 7.40974e-08 9.77527e-08 1.24358e-07 1.52958e-07 1.82738e-07 2.13095e-07 2.43597e-07 2.73931e-07 3.03868e-07 3.33245e-07 3.61941e-07 3.8987e-07 4.16972e-07 4.43203e-07 4.68537e-07 4.92955e-07 5.16448e-07 5.39015e-07 5.60659e-07 5.81386e-07 6.01208e-07 6.20139e-07 6.38194e-07 6.55392e-07 6.71753e-07 6.87296e-07 5.87944e-14 1.10677e-13 2.08221e-13 3.91424e-13 7.35024e-13 1.37823e-12 2.57919e-12 4.81394e-12 8.95356e-12 1.65765e-11 3.05073e-11 5.57232e-11 1.00836e-10 1.8045e-10 3.1882e-10 5.55475e-10 9.53846e-10 1.61436e-09 2.69339e-09 4.42758e-09 7.15876e-09 1.13482e-08 1.75661e-08 2.6444e-08 3.85897e-08 5.44648e-08 7.42212e-08 9.75262e-08 1.23583e-07 1.51461e-07 1.80386e-07 2.09793e-07 2.39275e-07 2.68542e-07 2.97382e-07 3.25644e-07 3.53219e-07 3.80029e-07 4.06022e-07 4.3116e-07 4.5542e-07 4.7879e-07 5.01264e-07 5.22842e-07 5.4353e-07 5.63337e-07 5.82275e-07 6.0036e-07 6.17607e-07 6.34037e-07 6.49667e-07 DataSetFinish DataSetStart DataSetName, idvglin MeasurementType, DC BatchName, opt_ex22 WaferName, Silvaco DieName, Silvaco DeviceName, n3x10 Temperature, -40 FabDate, 01 Nov 2018 UserDate, 01 Nov 2018 Attribute, L, 1e-05 Attribute, W, 3e-06 NodeNames, d g s b Sweep, 1, V, G, LIN, 0, 1, CALCULATED, 51, 0.1, 0 Sweep, 2, V, B, LIN, 0, -0.4, CALCULATED, 6, 0.1, 0 Constant, V, D, 0.1, 0.1, 0 Constant, V, S, 0, 0.1, 0 Target, I, D Function, gm, derivative (vg, id) Plot, idvg, XYY (LIN LIN LIN), VG, ID, gm DataArray, ID 5.10074e-12 9.46156e-12 1.75042e-11 3.22705e-11 5.92229e-11 1.08052e-10 1.95695e-10 3.51248e-10 6.23758e-10 1.09437e-09 1.89515e-09 3.23816e-09 5.45991e-09 9.08568e-09 1.49116e-08 2.40879e-08 3.81659e-08 5.9063e-08 8.891e-08 1.29776e-07 1.83284e-07 2.50084e-07 3.29287e-07 4.18444e-07 5.14543e-07 6.14996e-07 7.17872e-07 8.21754e-07 9.25591e-07 1.0286e-06 1.13018e-06 1.22988e-06 1.32735e-06 1.42234e-06 1.51465e-06 1.60411e-06 1.69063e-06 1.77412e-06 1.85452e-06 1.9318e-06 2.00595e-06 2.07698e-06 2.14488e-06 2.2097e-06 2.27147e-06 2.33023e-06 2.38604e-06 2.43896e-06 2.48905e-06 2.53639e-06 2.58104e-06 2.53574e-12 4.72415e-12 8.78403e-12 1.62904e-11 3.01071e-11 5.53922e-11 1.01323e-10 1.83984e-10 3.31086e-10 5.89456e-10 1.03672e-09 1.79933e-09 3.08047e-09 5.20258e-09 8.66921e-09 1.42448e-08 2.30369e-08 3.65454e-08 5.66334e-08 8.53814e-08 1.24821e-07 1.76555e-07 2.41239e-07 3.18015e-07 4.0447e-07 4.97628e-07 5.94928e-07 6.94463e-07 7.9484e-07 8.95035e-07 9.94285e-07 1.09202e-06 1.18781e-06 1.28134e-06 1.37237e-06 1.46072e-06 1.54625e-06 1.62887e-06 1.70852e-06 1.78516e-06 1.85877e-06 1.92935e-06 1.99691e-06 2.06147e-06 2.12307e-06 2.18175e-06 2.23756e-06 2.29057e-06 2.34083e-06 2.3884e-06 2.43337e-06 1.29165e-12 2.41461e-12 4.50735e-12 8.39744e-12 1.56042e-11 2.88961e-11 5.3269e-11 9.76291e-11 1.77618e-10 3.20222e-10 5.71115e-10 1.00607e-09 1.7486e-09 2.99711e-09 5.06635e-09 8.4476e-09 1.38866e-08 2.24638e-08 3.56435e-08 5.52444e-08 8.32978e-08 1.21784e-07 1.72255e-07 2.35324e-07 3.10104e-07 3.94189e-07 4.84645e-07 5.7897e-07 6.75306e-07 7.72306e-07 8.68982e-07 9.64605e-07 1.05864e-06 1.15067e-06 1.24043e-06 1.32767e-06 1.41225e-06 1.49406e-06 1.57301e-06 1.64905e-06 1.72217e-06 1.79235e-06 1.8596e-06 1.92394e-06 1.98541e-06 2.04403e-06 2.09987e-06 2.15298e-06 2.20341e-06 2.25123e-06 2.29651e-06 6.72464e-13 1.26056e-12 2.36041e-12 4.41344e-12 8.23592e-12 1.53287e-11 2.84303e-11 5.24898e-11 9.634e-11 1.75508e-10 3.16805e-10 5.65621e-10 9.97272e-10 1.73448e-09 2.97425e-09 5.02885e-09 8.38507e-09 1.37805e-08 2.22819e-08 3.53303e-08 5.47099e-08 8.24033e-08 1.20328e-07 1.69963e-07 2.31835e-07 3.04979e-07 3.86969e-07 4.74926e-07 5.66432e-07 6.59701e-07 7.53442e-07 8.46718e-07 9.38839e-07 1.0293e-06 1.11773e-06 1.20386e-06 1.28749e-06 1.3685e-06 1.44677e-06 1.52225e-06 1.5949e-06 1.66471e-06 1.73167e-06 1.79582e-06 1.85716e-06 1.91575e-06 1.97162e-06 2.02483e-06 2.07543e-06 2.12349e-06 2.16906e-06 3.57073e-13 6.70853e-13 1.25935e-12 2.36148e-12 4.42157e-12 8.26222e-12 1.53975e-11 2.8593e-11 5.28495e-11 9.70975e-11 1.77038e-10 3.19779e-10 5.71191e-10 1.00733e-09 1.752e-09 3.00376e-09 5.07682e-09 8.46012e-09 1.38923e-08 2.24369e-08 3.5523e-08 5.49072e-08 8.25237e-08 1.20218e-07 1.69371e-07 2.3039e-07 3.02189e-07 3.82308e-07 4.67934e-07 5.56754e-07 6.47071e-07 7.37667e-07 8.27656e-07 9.16395e-07 1.00342e-06 1.08838e-06 1.17104e-06 1.25123e-06 1.32882e-06 1.40374e-06 1.47594e-06 1.54538e-06 1.61208e-06 1.67603e-06 1.73727e-06 1.79582e-06 1.85172e-06 1.90503e-06 1.95579e-06 2.00407e-06 2.04992e-06 1.93028e-13 3.63334e-13 6.8348e-13 1.28464e-12 2.41183e-12 4.52111e-12 8.45756e-12 1.57777e-11 2.9326e-11 5.42469e-11 9.97256e-11 1.81903e-10 3.2862e-10 5.86928e-10 1.03472e-09 1.79862e-09 3.08133e-09 5.20312e-09 8.66092e-09 1.42023e-08 2.28969e-08 3.61705e-08 5.5757e-08 8.35409e-08 1.21285e-07 1.70253e-07 2.30696e-07 3.0138e-07 3.79798e-07 4.63227e-07 5.49473e-07 6.36944e-07 7.24497e-07 8.11308e-07 8.96782e-07 9.8049e-07 1.06212e-06 1.14146e-06 1.21836e-06 1.29271e-06 1.36444e-06 1.43353e-06 1.49995e-06 1.56372e-06 1.62484e-06 1.68334e-06 1.73927e-06 1.79266e-06 1.84358e-06 1.89206e-06 1.93818e-06 DataSetFinish DataSetStart DataSetName, idvgsat MeasurementType, DC BatchName, opt_ex22 WaferName, Silvaco DieName, Silvaco DeviceName, n10x1 Temperature, -40 FabDate, 01 Nov 2018 UserDate, 01 Nov 2018 Attribute, L, 1e-06 Attribute, W, 1e-05 NodeNames, d g s b Sweep, 1, V, G, LIN, 0, 1, CALCULATED, 51, 0.1, 0 Sweep, 2, V, B, LIN, 0, -0.4, CALCULATED, 6, 0.1, 0 Constant, V, D, 1, 0.1, 0 Constant, V, S, 0, 0.1, 0 Target, I, D Function, gm, derivative (vg, id) Plot, idvg, XYY (LIN LIN LIN), VG, ID, gm DataArray, ID 2.18808e-10 4.06657e-10 7.54246e-10 1.39514e-09 2.57132e-09 4.71657e-09 8.59811e-09 1.55497e-08 2.78413e-08 4.92386e-08 8.58095e-08 1.47027e-07 2.47207e-07 4.07321e-07 6.5713e-07 1.03745e-06 1.60184e-06 2.41664e-06 3.55797e-06 5.10527e-06 7.13249e-06 9.69922e-06 1.28446e-05 1.65857e-05 2.09188e-05 2.58247e-05 3.12733e-05 3.72281e-05 4.36502e-05 5.05005e-05 5.77408e-05 6.53347e-05 7.32482e-05 8.14489e-05 8.99067e-05 9.85933e-05 0.000107482 0.000116547 0.000125765 0.000135113 0.000144571 0.000154117 0.000163735 0.000173404 0.00018311 0.000192837 0.00020257 0.000212295 0.000222001 0.000231675 0.000241307 1.10008e-10 2.0523e-10 3.82307e-10 7.10737e-10 1.31776e-09 2.43445e-09 4.47619e-09 8.1795e-09 1.48282e-08 2.66126e-08 4.71754e-08 8.23979e-08 1.41477e-07 2.38327e-07 3.93337e-07 6.35453e-07 1.00437e-06 1.55222e-06 2.3436e-06 3.45277e-06 4.9573e-06 6.92943e-06 9.4273e-06 1.24889e-05 1.61303e-05 2.03473e-05 2.51202e-05 3.04187e-05 3.62064e-05 4.24448e-05 4.90949e-05 5.61194e-05 6.34827e-05 7.11513e-05 7.9094e-05 8.72816e-05 9.56868e-05 0.000104284 0.000113049 0.000121958 0.000130992 0.000140129 0.000149351 0.000158639 0.000167978 0.000177351 0.000186745 0.000196145 0.000205539 0.000214915 0.000224262 5.66946e-11 1.06091e-10 1.98305e-10 3.70115e-10 6.89386e-10 1.28059e-09 2.37021e-09 4.36604e-09 7.99236e-09 1.45134e-08 2.6089e-08 4.63135e-08 8.09941e-08 1.39211e-07 2.34697e-07 3.87557e-07 6.26295e-07 9.89946e-07 1.52968e-06 2.3088e-06 3.39986e-06 4.87842e-06 6.81449e-06 9.26395e-06 1.22628e-05 1.58252e-05 1.99459e-05 2.46043e-05 2.97699e-05 3.54066e-05 4.14762e-05 4.79404e-05 5.47628e-05 6.19085e-05 6.93454e-05 7.70432e-05 8.49737e-05 9.31109e-05 0.00010143 0.000109908 0.000118524 0.000127257 0.000136088 0.000144999 0.000153974 0.000162996 0.000172052 0.000181127 0.000190209 0.000199286 0.000208347 2.98714e-11 5.60355e-11 1.0503e-10 1.96641e-10 3.67598e-10 6.85771e-10 1.27581e-09 2.36479e-09 4.36199e-09 7.99487e-09 1.45338e-08 2.61489e-08 4.64508e-08 8.12666e-08 1.39696e-07 2.35475e-07 3.8867e-07 6.27662e-07 9.912e-07 1.5299e-06 2.30609e-06 3.39079e-06 4.85743e-06 6.77333e-06 9.19148e-06 1.2145e-05 1.56458e-05 1.96869e-05 2.42469e-05 2.92947e-05 3.47946e-05 4.07088e-05 4.70003e-05 5.36332e-05 6.05743e-05 6.77921e-05 7.52578e-05 8.29444e-05 9.08268e-05 9.88818e-05 0.000107087 0.000115423 0.00012387 0.000132409 0.000141025 0.000149701 0.000158422 0.000167176 0.000175948 0.000184727 0.000193502 1.60541e-11 3.01777e-11 5.66913e-11 1.06409e-10 1.99497e-10 3.73436e-10 6.97555e-10 1.29929e-09 2.41096e-09 4.45141e-09 8.16514e-09 1.48516e-08 2.67283e-08 4.74787e-08 8.30346e-08 1.42633e-07 2.40178e-07 3.9591e-07 6.38356e-07 1.0063e-06 1.55013e-06 2.33145e-06 3.41987e-06 4.8865e-06 6.79564e-06 9.19678e-06 1.21197e-05 1.55734e-05 1.9549e-05 2.40238e-05 2.89667e-05 3.43421e-05 4.01132e-05 4.62436e-05 5.2699e-05 5.94472e-05 6.64581e-05 7.3704e-05 8.11592e-05 8.88e-05 9.66039e-05 0.00010455 0.00011262 0.000120795 0.000129057 0.000137392 0.000145784 0.000154219 0.000162685 0.000171169 0.00017966 8.78438e-12 1.65412e-11 3.11327e-11 5.85581e-11 1.10046e-10 2.06558e-10 3.87082e-10 7.23791e-10 1.34941e-09 2.50591e-09 4.6295e-09 8.49487e-09 1.54525e-08 2.78021e-08 4.93535e-08 8.6221e-08 1.47889e-07 2.48574e-07 4.08885e-07 6.57728e-07 1.03419e-06 1.5887e-06 2.38233e-06 3.48327e-06 4.96018e-06 6.87391e-06 9.27004e-06 1.21745e-05 1.55932e-05 1.95148e-05 2.39158e-05 2.87647e-05 3.40262e-05 3.96646e-05 4.56446e-05 5.19332e-05 5.84994e-05 6.53146e-05 7.23523e-05 7.95882e-05 8.69995e-05 9.45652e-05 0.000102266 0.000110083 0.000117999 0.000125998 0.000134066 0.000142188 0.000150351 0.000158544 0.000166754 DataSetFinish DataSetStart DataSetName, idvgsat MeasurementType, DC BatchName, opt_ex22 WaferName, Silvaco DieName, Silvaco DeviceName, n10x10 Temperature, -40 FabDate, 01 Nov 2018 UserDate, 01 Nov 2018 Attribute, L, 1e-05 Attribute, W, 1e-05 NodeNames, d g s b Sweep, 1, V, G, LIN, 0, 1, CALCULATED, 51, 0.1, 0 Sweep, 2, V, B, LIN, 0, -0.4, CALCULATED, 6, 0.1, 0 Constant, V, D, 1, 0.1, 0 Constant, V, S, 0, 0.1, 0 Target, I, D Function, gm, derivative (vg, id) Plot, idvg, XYY (LIN LIN LIN), VG, ID, gm DataArray, ID 3.89977e-11 7.2299e-11 1.33654e-10 2.46141e-10 4.51039e-10 8.21157e-10 1.48264e-09 2.64928e-09 4.67417e-09 8.12358e-09 1.38777e-08 2.32626e-08 3.82167e-08 6.149e-08 9.68532e-08 1.49254e-07 2.24811e-07 3.3054e-07 4.73769e-07 6.61355e-07 8.98921e-07 1.19033e-06 1.53752e-06 1.94066e-06 2.39851e-06 2.90887e-06 3.46891e-06 4.07549e-06 4.72539e-06 5.41536e-06 6.14227e-06 6.90308e-06 7.69486e-06 8.5148e-06 9.36021e-06 1.02285e-05 1.11171e-05 1.20237e-05 1.2946e-05 1.38818e-05 1.48289e-05 1.57853e-05 1.67491e-05 1.77186e-05 1.8692e-05 1.96676e-05 2.0644e-05 2.16198e-05 2.25937e-05 2.35643e-05 2.45307e-05 1.94184e-11 3.61632e-11 6.72055e-11 1.24543e-10 2.29935e-10 4.22423e-10 7.71073e-10 1.39593e-09 2.50112e-09 4.4248e-09 7.71086e-09 1.32068e-08 2.21915e-08 3.65368e-08 5.89004e-08 9.29303e-08 1.43421e-07 2.16319e-07 3.18463e-07 4.5702e-07 6.38715e-07 8.69066e-07 1.15185e-06 1.48894e-06 1.88042e-06 2.32502e-06 2.82045e-06 3.36387e-06 3.9521e-06 4.58192e-06 5.25011e-06 5.95356e-06 6.68927e-06 7.45439e-06 8.24619e-06 9.06205e-06 9.8995e-06 1.07561e-05 1.16297e-05 1.25179e-05 1.34188e-05 1.43303e-05 1.52506e-05 1.61778e-05 1.71103e-05 1.80465e-05 1.89849e-05 1.9924e-05 2.08626e-05 2.17995e-05 2.27334e-05 9.90455e-12 1.85105e-11 3.45403e-11 6.43164e-11 1.19425e-10 2.20925e-10 4.06673e-10 7.43785e-10 1.34914e-09 2.42184e-09 4.29228e-09 7.49253e-09 1.28523e-08 2.16242e-08 3.5641e-08 5.75039e-08 9.07806e-08 1.40158e-07 2.11446e-07 3.11323e-07 4.46777e-07 6.24352e-07 8.49384e-07 1.12549e-06 1.45438e-06 1.83605e-06 2.26911e-06 2.75124e-06 3.27954e-06 3.85086e-06 4.46198e-06 5.10973e-06 5.79105e-06 6.50301e-06 7.24285e-06 8.00793e-06 8.79574e-06 9.60388e-06 1.04301e-05 1.12722e-05 1.21281e-05 1.29959e-05 1.38737e-05 1.47597e-05 1.56523e-05 1.65498e-05 1.74508e-05 1.83538e-05 1.92577e-05 2.01611e-05 2.10629e-05 5.16236e-12 9.6751e-12 1.81117e-11 3.38518e-11 6.31371e-11 1.17423e-10 2.1756e-10 4.01081e-10 7.34603e-10 1.33424e-09 2.39794e-09 4.25423e-09 7.43213e-09 1.27561e-08 2.14696e-08 3.53895e-08 5.70896e-08 9.00932e-08 1.39017e-07 2.09565e-07 3.08269e-07 4.4193e-07 6.16865e-07 8.38173e-07 1.10923e-06 1.43156e-06 1.80499e-06 2.22802e-06 2.69827e-06 3.21282e-06 3.76854e-06 4.36225e-06 4.99083e-06 5.65131e-06 6.34086e-06 7.05678e-06 7.79656e-06 8.55778e-06 9.33816e-06 1.01356e-05 1.09479e-05 1.17732e-05 1.26097e-05 1.34556e-05 1.43092e-05 1.51689e-05 1.60333e-05 1.69011e-05 1.77708e-05 1.86413e-05 1.95114e-05 2.74381e-12 5.15418e-12 9.67362e-12 1.81345e-11 3.39412e-11 6.33885e-11 1.18042e-10 2.18968e-10 4.04119e-10 7.40874e-10 1.34669e-09 2.42167e-09 4.29769e-09 7.50833e-09 1.28837e-08 2.16728e-08 3.56962e-08 5.75256e-08 9.06692e-08 1.39705e-07 2.10257e-07 3.08721e-07 4.41696e-07 6.15242e-07 8.34168e-07 1.10157e-06 1.41871e-06 1.78522e-06 2.19951e-06 2.65911e-06 3.16111e-06 3.70241e-06 4.27989e-06 4.8905e-06 5.53137e-06 6.19975e-06 6.89308e-06 7.60892e-06 8.34498e-06 9.0991e-06 9.86922e-06 1.06534e-05 1.14498e-05 1.22567e-05 1.30724e-05 1.38954e-05 1.47241e-05 1.55573e-05 1.63937e-05 1.72319e-05 1.80709e-05 1.48448e-12 2.79392e-12 5.25493e-12 9.8749e-12 1.85341e-11 3.4729e-11 6.49306e-11 1.21034e-10 2.24718e-10 4.15035e-10 7.61296e-10 1.38421e-09 2.48918e-09 4.41607e-09 7.71001e-09 1.32164e-08 2.22031e-08 3.65117e-08 5.87334e-08 9.23869e-08 1.42036e-07 2.13245e-07 3.12277e-07 4.45519e-07 6.18739e-07 8.36413e-07 1.10131e-06 1.4144e-06 1.77514e-06 2.18177e-06 2.63179e-06 3.12229e-06 3.65022e-06 4.21252e-06 4.80626e-06 5.42865e-06 6.07706e-06 6.74902e-06 7.44222e-06 8.15449e-06 8.88376e-06 9.62809e-06 1.03856e-05 1.11547e-05 1.19336e-05 1.27208e-05 1.35149e-05 1.43144e-05 1.51181e-05 1.59248e-05 1.67333e-05 DataSetFinish DataSetStart DataSetName, idvgsat MeasurementType, DC BatchName, opt_ex22 WaferName, Silvaco DieName, Silvaco DeviceName, n10x2 Temperature, -40 FabDate, 01 Nov 2018 UserDate, 01 Nov 2018 Attribute, L, 2e-06 Attribute, W, 1e-05 NodeNames, d g s b Sweep, 1, V, G, LIN, 0, 1, CALCULATED, 51, 0.1, 0 Sweep, 2, V, B, LIN, 0, -0.4, CALCULATED, 6, 0.1, 0 Constant, V, D, 1, 0.1, 0 Constant, V, S, 0, 0.1, 0 Target, I, D Function, gm, derivative (vg, id) Plot, idvg, XYY (LIN LIN LIN), VG, ID, gm DataArray, ID 1.5198e-10 2.82094e-10 5.2231e-10 9.63908e-10 1.77115e-09 3.23599e-09 5.86911e-09 1.05463e-08 1.8734e-08 3.28196e-08 5.65729e-08 9.57599e-08 1.58929e-07 2.58373e-07 4.11217e-07 6.40405e-07 9.75127e-07 1.45007e-06 2.10304e-06 2.97119e-06 4.08677e-06 5.47358e-06 7.14532e-06 9.10565e-06 1.13499e-05 1.38672e-05 1.66428e-05 1.96598e-05 2.29006e-05 2.63476e-05 2.99836e-05 3.37921e-05 3.77577e-05 4.18652e-05 4.61006e-05 5.04504e-05 5.49016e-05 5.94421e-05 6.40601e-05 6.87446e-05 7.34848e-05 7.82707e-05 8.30929e-05 8.79424e-05 9.28107e-05 9.76898e-05 0.000102572 0.000107451 0.000112321 0.000117174 0.000122006 7.59697e-11 1.41599e-10 2.63446e-10 4.8895e-10 9.04536e-10 1.66616e-09 3.0518e-09 5.54913e-09 9.99696e-09 1.78037e-08 3.12687e-08 5.4031e-08 9.16663e-08 1.5245e-07 2.4829e-07 3.95786e-07 6.17197e-07 9.40887e-07 1.40063e-06 2.03336e-06 2.87541e-06 3.95837e-06 5.30552e-06 6.93009e-06 8.83543e-06 1.10165e-05 1.34623e-05 1.6158e-05 1.90865e-05 2.22303e-05 2.55719e-05 2.90944e-05 3.27817e-05 3.66184e-05 4.05901e-05 4.46831e-05 4.88844e-05 5.31817e-05 5.75632e-05 6.20179e-05 6.65352e-05 7.11052e-05 7.57182e-05 8.03654e-05 8.50385e-05 8.97294e-05 9.44307e-05 9.91356e-05 0.000103838 0.000108531 0.000113209 3.89126e-11 7.27675e-11 1.35895e-10 2.53326e-10 4.71083e-10 8.73173e-10 1.61148e-09 2.95726e-09 5.38722e-09 9.72268e-09 1.73447e-08 3.05103e-08 5.27944e-08 8.96753e-08 1.49282e-07 2.43303e-07 3.88017e-07 6.0523e-07 9.22699e-07 1.37344e-06 1.99347e-06 2.81818e-06 3.87811e-06 5.1956e-06 6.78305e-06 8.64311e-06 1.07703e-05 1.31532e-05 1.57769e-05 1.86244e-05 2.16784e-05 2.49215e-05 2.83373e-05 3.19099e-05 3.56246e-05 3.94673e-05 4.34249e-05 4.7485e-05 5.16357e-05 5.5866e-05 6.01652e-05 6.45235e-05 6.89314e-05 7.338e-05 7.78609e-05 8.23662e-05 8.68885e-05 9.14208e-05 9.59568e-05 0.00010049 0.000105016 2.03719e-11 3.8197e-11 7.15474e-11 1.33835e-10 2.49889e-10 4.65427e-10 8.64016e-10 1.59694e-09 2.93465e-09 5.35287e-09 9.67165e-09 1.72701e-08 3.04016e-08 5.26325e-08 8.94217e-08 1.48856e-07 2.42544e-07 3.86612e-07 6.02606e-07 9.17861e-07 1.36475e-06 1.9784e-06 2.79305e-06 3.83799e-06 5.13425e-06 6.69305e-06 8.5161e-06 1.05973e-05 1.29248e-05 1.54837e-05 1.8257e-05 2.12277e-05 2.43788e-05 2.76942e-05 3.11587e-05 3.4758e-05 3.84785e-05 4.23078e-05 4.62338e-05 5.02454e-05 5.43321e-05 5.84839e-05 6.26913e-05 6.69455e-05 7.12381e-05 7.55612e-05 7.99074e-05 8.42698e-05 8.8642e-05 9.30178e-05 9.73916e-05 1.08774e-11 2.04396e-11 3.83789e-11 7.19895e-11 1.34847e-10 2.52116e-10 4.70175e-10 8.73877e-10 1.61693e-09 2.97422e-09 5.42926e-09 9.81512e-09 1.75315e-08 3.08617e-08 5.34125e-08 9.06909e-08 1.50833e-07 2.45483e-07 3.90762e-07 6.08115e-07 9.24602e-07 1.37204e-06 1.98466e-06 2.79544e-06 3.83215e-06 5.11423e-06 6.65149e-06 8.44449e-06 1.04864e-05 1.2765e-05 1.52652e-05 1.79704e-05 2.08637e-05 2.39288e-05 2.71499e-05 3.05124e-05 3.40025e-05 3.76074e-05 4.13151e-05 4.51141e-05 4.89939e-05 5.29445e-05 5.69565e-05 6.10209e-05 6.51295e-05 6.92743e-05 7.34479e-05 7.76435e-05 8.18545e-05 8.60749e-05 9.0299e-05 5.91258e-12 1.11306e-11 2.09418e-11 3.93707e-11 7.39388e-11 1.38659e-10 2.59528e-10 4.84489e-10 9.01292e-10 1.66891e-09 3.07156e-09 5.60875e-09 1.01399e-08 1.81061e-08 3.18518e-08 5.50683e-08 9.3372e-08 1.55029e-07 2.51823e-07 3.99992e-07 6.21015e-07 9.4179e-07 1.39365e-06 2.00987e-06 2.82205e-06 3.85622e-06 5.13005e-06 6.65168e-06 8.42043e-06 1.04286e-05 1.26638e-05 1.51107e-05 1.77531e-05 2.05744e-05 2.35587e-05 2.66911e-05 2.99573e-05 3.33443e-05 3.68397e-05 4.04322e-05 4.41109e-05 4.78658e-05 5.16875e-05 5.5567e-05 5.9496e-05 6.34667e-05 6.74716e-05 7.15038e-05 7.55567e-05 7.96244e-05 8.37011e-05 DataSetFinish DataSetStart DataSetName, idvgsat MeasurementType, DC BatchName, opt_ex22 WaferName, Silvaco DieName, Silvaco DeviceName, n10x5 Temperature, -40 FabDate, 01 Nov 2018 UserDate, 01 Nov 2018 Attribute, L, 5e-06 Attribute, W, 1e-05 NodeNames, d g s b Sweep, 1, V, G, LIN, 0, 1, CALCULATED, 51, 0.1, 0 Sweep, 2, V, B, LIN, 0, -0.4, CALCULATED, 6, 0.1, 0 Constant, V, D, 1, 0.1, 0 Constant, V, S, 0, 0.1, 0 Target, I, D Function, gm, derivative (vg, id) Plot, idvg, XYY (LIN LIN LIN), VG, ID, gm DataArray, ID 7.33655e-11 1.36056e-10 2.51622e-10 4.63644e-10 8.50207e-10 1.5493e-09 2.80058e-09 5.01149e-09 8.85722e-09 1.54247e-08 2.64101e-08 4.43779e-08 7.30899e-08 1.17901e-07 1.86183e-07 2.87662e-07 4.34456e-07 6.40584e-07 9.20848e-07 1.28927e-06 1.75752e-06 2.33375e-06 3.02221e-06 3.8235e-06 4.73527e-06 5.75309e-06 6.87124e-06 8.08334e-06 9.38277e-06 1.07629e-05 1.22174e-05 1.37399e-05 1.53246e-05 1.69658e-05 1.86579e-05 2.03958e-05 2.21743e-05 2.39888e-05 2.58345e-05 2.77071e-05 2.96023e-05 3.1516e-05 3.34445e-05 3.53842e-05 3.73316e-05 3.92834e-05 4.12368e-05 4.31889e-05 4.51371e-05 4.70789e-05 4.90121e-05 3.65647e-11 6.81098e-11 1.26613e-10 2.34727e-10 4.33588e-10 7.97108e-10 1.4563e-09 2.63943e-09 4.73576e-09 8.39238e-09 1.46539e-08 2.51544e-08 4.23688e-08 6.99318e-08 1.13021e-07 1.78772e-07 2.76612e-07 4.18314e-07 6.1754e-07 8.88764e-07 1.24573e-06 1.69987e-06 2.25917e-06 2.92774e-06 3.70602e-06 4.59156e-06 5.57982e-06 6.66502e-06 7.84072e-06 9.10031e-06 1.04372e-05 1.18451e-05 1.33179e-05 1.48497e-05 1.6435e-05 1.80686e-05 1.97453e-05 2.14605e-05 2.32094e-05 2.49877e-05 2.67913e-05 2.8616e-05 3.04582e-05 3.23143e-05 3.41809e-05 3.60547e-05 3.79329e-05 3.98126e-05 4.16911e-05 4.35662e-05 4.54355e-05 1.86688e-11 3.48954e-11 6.51282e-11 1.21308e-10 2.25337e-10 4.17065e-10 7.68239e-10 1.4063e-09 2.55368e-09 4.59045e-09 8.14933e-09 1.42531e-08 2.45028e-08 4.13242e-08 6.8279e-08 1.10438e-07 1.74784e-07 2.70537e-07 4.09205e-07 6.04129e-07 8.69424e-07 1.21846e-06 1.66231e-06 2.2086e-06 2.86115e-06 3.62015e-06 4.48297e-06 5.44495e-06 6.50026e-06 7.64247e-06 8.86501e-06 1.01614e-05 1.15254e-05 1.2951e-05 1.44327e-05 1.5965e-05 1.75429e-05 1.91616e-05 2.08164e-05 2.25031e-05 2.42174e-05 2.59554e-05 2.77133e-05 2.94876e-05 3.1275e-05 3.30723e-05 3.48765e-05 3.66848e-05 3.84946e-05 4.03035e-05 4.21093e-05 9.74069e-12 1.82577e-11 3.41837e-11 6.39048e-11 1.19223e-10 2.21817e-10 4.11187e-10 7.58545e-10 1.39052e-09 2.52834e-09 4.55021e-09 8.08595e-09 1.41535e-08 2.43451e-08 4.10712e-08 6.78654e-08 1.0975e-07 1.73625e-07 2.68579e-07 4.05918e-07 5.987e-07 8.60665e-07 1.20473e-06 1.64148e-06 2.17807e-06 2.81788e-06 3.5608e-06 4.40394e-06 5.34254e-06 6.37072e-06 7.48208e-06 8.67015e-06 9.92856e-06 1.12512e-05 1.26324e-05 1.40667e-05 1.55488e-05 1.7074e-05 1.86376e-05 2.02353e-05 2.18629e-05 2.35165e-05 2.51924e-05 2.68871e-05 2.85972e-05 3.03195e-05 3.20513e-05 3.37895e-05 3.55318e-05 3.72756e-05 3.90186e-05 5.18288e-12 9.73675e-12 1.82765e-11 3.42671e-11 6.41491e-11 1.19839e-10 2.23248e-10 4.14336e-10 7.6519e-10 1.40404e-09 2.55491e-09 4.60062e-09 8.17807e-09 1.43151e-08 2.46166e-08 4.15062e-08 6.85281e-08 1.10705e-07 1.74914e-07 2.70176e-07 4.07648e-07 6.00129e-07 8.60965e-07 1.20256e-06 1.6349e-06 2.16457e-06 2.79442e-06 3.52394e-06 4.35001e-06 5.26773e-06 6.2712e-06 7.35409e-06 8.51005e-06 9.73288e-06 1.10167e-05 1.23559e-05 1.37453e-05 1.518e-05 1.66552e-05 1.81667e-05 1.97103e-05 2.1282e-05 2.28782e-05 2.44954e-05 2.61303e-05 2.77796e-05 2.94406e-05 3.11104e-05 3.27864e-05 3.44662e-05 3.61476e-05 2.80724e-12 5.28379e-12 9.93885e-12 1.86789e-11 3.50637e-11 6.57162e-11 1.229e-10 2.29181e-10 4.25726e-10 7.86805e-10 1.44448e-09 2.6293e-09 4.73463e-09 8.41361e-09 1.47175e-08 2.52828e-08 4.25724e-08 7.01751e-08 1.13157e-07 1.78423e-07 2.74976e-07 4.13868e-07 6.0765e-07 8.69248e-07 1.21049e-06 1.6407e-06 2.16577e-06 2.78798e-06 3.50638e-06 4.31757e-06 5.21654e-06 6.19741e-06 7.25393e-06 8.37991e-06 9.56934e-06 1.08165e-05 1.21161e-05 1.34632e-05 1.48529e-05 1.62809e-05 1.77431e-05 1.92354e-05 2.07544e-05 2.22963e-05 2.3858e-05 2.54363e-05 2.70282e-05 2.86312e-05 3.02425e-05 3.18597e-05 3.34806e-05 DataSetFinish DataSetStart DataSetName, idvgsat MeasurementType, DC BatchName, opt_ex22 WaferName, Silvaco DieName, Silvaco DeviceName, n1x1 Temperature, -40 FabDate, 01 Nov 2018 UserDate, 01 Nov 2018 Attribute, L, 1e-06 Attribute, W, 1e-06 NodeNames, d g s b Sweep, 1, V, G, LIN, 0, 1, CALCULATED, 51, 0.1, 0 Sweep, 2, V, B, LIN, 0, -0.4, CALCULATED, 6, 0.1, 0 Constant, V, D, 1, 0.1, 0 Constant, V, S, 0, 0.1, 0 Target, I, D Function, gm, derivative (vg, id) Plot, idvg, XYY (LIN LIN LIN), VG, ID, gm DataArray, ID 1.77689e-11 3.30435e-11 6.13367e-11 1.13577e-10 2.09627e-10 3.8524e-10 7.03983e-10 1.27711e-09 2.29551e-09 4.07893e-09 7.14824e-09 1.2326e-08 2.08698e-08 3.46421e-08 5.63159e-08 8.96034e-08 1.39459e-07 2.12155e-07 3.15097e-07 4.56292e-07 6.4351e-07 8.83356e-07 1.18053e-06 1.53749e-06 1.95452e-06 2.43012e-06 2.96152e-06 3.54517e-06 4.17717e-06 4.85352e-06 5.57029e-06 6.32375e-06 7.11035e-06 7.92678e-06 8.76994e-06 9.6369e-06 1.05249e-05 1.14314e-05 1.2354e-05 1.32903e-05 1.42382e-05 1.51957e-05 1.61608e-05 1.71318e-05 1.81069e-05 1.90847e-05 2.00635e-05 2.10421e-05 2.20191e-05 2.29934e-05 2.3964e-05 8.91282e-12 1.66351e-11 3.10065e-11 5.76893e-11 1.07074e-10 1.98092e-10 3.64908e-10 6.68428e-10 1.21552e-09 2.19004e-09 3.90068e-09 6.85144e-09 1.18396e-08 2.0086e-08 3.33993e-08 5.43765e-08 8.66247e-08 1.34959e-07 2.05483e-07 3.05409e-07 4.42549e-07 6.24488e-07 8.57676e-07 1.14669e-06 1.49388e-06 1.89948e-06 2.36194e-06 2.87846e-06 3.44553e-06 4.05925e-06 4.71567e-06 5.41094e-06 6.14139e-06 6.90356e-06 7.69424e-06 8.51041e-06 9.34927e-06 1.02082e-05 1.10847e-05 1.19764e-05 1.28812e-05 1.37971e-05 1.47221e-05 1.56543e-05 1.65922e-05 1.7534e-05 1.84784e-05 1.94239e-05 2.03693e-05 2.13133e-05 2.22549e-05 4.58435e-12 8.58133e-12 1.60473e-11 2.99684e-11 5.58647e-11 1.03885e-10 1.92552e-10 3.55357e-10 6.52102e-10 1.18788e-09 2.14371e-09 3.82387e-09 6.72543e-09 1.16349e-08 1.97562e-08 3.2872e-08 5.35385e-08 8.53017e-08 1.32888e-07 2.02275e-07 3.00516e-07 4.35223e-07 6.13761e-07 8.42347e-07 1.12534e-06 1.46492e-06 1.86116e-06 2.31244e-06 2.81594e-06 3.36814e-06 3.96519e-06 4.6032e-06 5.27842e-06 5.98726e-06 6.72638e-06 7.49266e-06 8.28322e-06 9.09535e-06 9.92653e-06 1.07744e-05 1.16368e-05 1.25116e-05 1.33968e-05 1.42908e-05 1.51916e-05 1.60979e-05 1.70079e-05 1.79205e-05 1.88341e-05 1.97478e-05 2.06602e-05 2.41131e-12 4.52446e-12 8.48317e-12 1.58896e-11 2.97218e-11 5.54926e-11 1.03352e-10 1.91847e-10 3.54552e-10 6.51463e-10 1.18808e-09 2.14615e-09 3.83109e-09 6.7415e-09 1.16653e-08 1.98065e-08 3.29444e-08 5.36245e-08 8.53678e-08 1.32853e-07 2.01971e-07 2.99638e-07 4.33268e-07 6.09968e-07 8.35668e-07 1.11444e-06 1.4482e-06 1.83685e-06 2.27863e-06 2.7707e-06 3.30953e-06 3.89134e-06 4.51234e-06 5.16885e-06 5.85741e-06 6.5748e-06 7.31803e-06 8.08432e-06 8.87109e-06 9.67595e-06 1.04966e-05 1.13311e-05 1.21773e-05 1.30335e-05 1.38979e-05 1.47689e-05 1.5645e-05 1.65248e-05 1.7407e-05 1.82903e-05 1.91737e-05 1.29402e-12 2.43287e-12 4.57147e-12 8.58349e-12 1.60999e-11 3.01559e-11 5.63765e-11 1.05127e-10 1.95365e-10 3.61419e-10 6.64646e-10 1.2129e-09 2.19183e-09 3.91301e-09 6.88397e-09 1.19049e-08 2.01947e-08 3.35491e-08 5.45281e-08 8.66593e-08 1.34606e-07 2.04206e-07 3.02253e-07 4.35957e-07 6.12142e-07 8.36395e-07 1.11244e-06 1.44189e-06 1.82441e-06 2.25812e-06 2.74011e-06 3.26688e-06 3.83472e-06 4.43993e-06 5.07897e-06 5.74849e-06 6.4454e-06 7.16684e-06 7.91016e-06 8.6729e-06 9.45277e-06 1.02477e-05 1.10556e-05 1.18746e-05 1.27032e-05 1.35395e-05 1.43821e-05 1.52296e-05 1.60806e-05 1.6934e-05 1.77885e-05 7.07129e-13 1.33172e-12 2.50695e-12 4.71657e-12 8.86677e-12 1.6651e-11 3.12235e-11 5.84344e-11 1.0907e-10 2.02863e-10 3.75541e-10 6.90929e-10 1.26109e-09 2.2786e-09 4.06581e-09 7.14621e-09 1.2342e-08 2.09005e-08 3.46517e-08 5.61927e-08 8.90837e-08 1.38001e-07 2.08751e-07 3.08016e-07 4.42793e-07 6.19588e-07 8.43603e-07 1.11817e-06 1.44455e-06 1.82216e-06 2.24897e-06 2.72203e-06 3.23786e-06 3.79283e-06 4.38336e-06 5.00603e-06 5.65764e-06 6.33523e-06 7.03606e-06 7.75763e-06 8.49758e-06 9.25377e-06 1.00242e-05 1.08069e-05 1.16002e-05 1.24025e-05 1.32122e-05 1.40278e-05 1.48481e-05 1.56718e-05 1.64977e-05 DataSetFinish DataSetStart DataSetName, idvgsat MeasurementType, DC BatchName, opt_ex22 WaferName, Silvaco DieName, Silvaco DeviceName, n1x10 Temperature, -40 FabDate, 01 Nov 2018 UserDate, 01 Nov 2018 Attribute, L, 1e-05 Attribute, W, 1e-06 NodeNames, d g s b Sweep, 1, V, G, LIN, 0, 1, CALCULATED, 51, 0.1, 0 Sweep, 2, V, B, LIN, 0, -0.4, CALCULATED, 6, 0.1, 0 Constant, V, D, 1, 0.1, 0 Constant, V, S, 0, 0.1, 0 Target, I, D Function, gm, derivative (vg, id) Plot, idvg, XYY (LIN LIN LIN), VG, ID, gm DataArray, ID 3.1726e-12 5.88676e-12 1.08948e-11 2.00941e-11 3.68937e-11 6.73389e-11 1.21976e-10 2.18832e-10 3.87971e-10 6.78132e-10 1.16594e-09 1.96812e-09 3.25708e-09 5.28008e-09 8.38043e-09 1.30162e-08 1.97669e-08 2.93158e-08 4.24014e-08 5.97431e-08 8.19591e-08 1.09504e-07 1.42637e-07 1.81431e-07 2.258e-07 2.75545e-07 3.30393e-07 3.90033e-07 4.54134e-07 5.22368e-07 5.9441e-07 6.69949e-07 7.48686e-07 8.30332e-07 9.14611e-07 1.00126e-06 1.09003e-06 1.18066e-06 1.27294e-06 1.36663e-06 1.46152e-06 1.5574e-06 1.65409e-06 1.7514e-06 1.84915e-06 1.94718e-06 2.04534e-06 2.14349e-06 2.24149e-06 2.33921e-06 2.43655e-06 1.57566e-12 2.93619e-12 5.46116e-12 1.01317e-11 1.87332e-11 3.44823e-11 6.31013e-11 1.14604e-10 2.06162e-10 3.66503e-10 6.42346e-10 1.10732e-09 1.87382e-09 3.10811e-09 5.0488e-09 8.02756e-09 1.24876e-08 1.89908e-08 2.8202e-08 4.08422e-08 5.76157e-08 7.91292e-08 1.05828e-07 1.37965e-07 1.75605e-07 2.18658e-07 2.66919e-07 3.20113e-07 3.77924e-07 4.40025e-07 5.06086e-07 5.75788e-07 6.48823e-07 7.24899e-07 8.03735e-07 8.85066e-07 9.68637e-07 1.0542e-06 1.14154e-06 1.23041e-06 1.32061e-06 1.41195e-06 1.50422e-06 1.59725e-06 1.69086e-06 1.78489e-06 1.8792e-06 1.97363e-06 2.06805e-06 2.16234e-06 2.25639e-06 8.01926e-13 1.49939e-12 2.79957e-12 5.21733e-12 9.69853e-12 1.79678e-11 3.31391e-11 6.07629e-11 1.10573e-10 1.99289e-10 3.54938e-10 6.23153e-10 1.07594e-09 1.82325e-09 3.02775e-09 4.9228e-09 7.83254e-09 1.21899e-08 1.85435e-08 2.75422e-08 3.9889e-08 5.62694e-08 7.72717e-08 1.03324e-07 1.34663e-07 1.71343e-07 2.13264e-07 2.60214e-07 3.11916e-07 3.68054e-07 4.28301e-07 4.92332e-07 5.59835e-07 6.30509e-07 7.04068e-07 7.80243e-07 8.58778e-07 9.39427e-07 1.02196e-06 1.10616e-06 1.1918e-06 1.27871e-06 1.36667e-06 1.45552e-06 1.54508e-06 1.63519e-06 1.7257e-06 1.81647e-06 1.90737e-06 1.99827e-06 2.08906e-06 4.17191e-13 7.82147e-13 1.46484e-12 2.73958e-12 5.11389e-12 9.52157e-12 1.76678e-11 3.26354e-11 5.99266e-11 1.09199e-10 1.97058e-10 3.51342e-10 6.17388e-10 1.0667e-09 1.80837e-09 3.00359e-09 4.88321e-09 7.76732e-09 1.20824e-08 1.83674e-08 2.72574e-08 3.94373e-08 5.55708e-08 7.62222e-08 1.01795e-07 1.32507e-07 1.68392e-07 2.09339e-07 2.5513e-07 3.05484e-07 3.60088e-07 4.18618e-07 4.80755e-07 5.46194e-07 6.14644e-07 6.85829e-07 7.59489e-07 8.35378e-07 9.13264e-07 9.92926e-07 1.07415e-06 1.15675e-06 1.24053e-06 1.3253e-06 1.41091e-06 1.4972e-06 1.584e-06 1.67119e-06 1.75862e-06 1.84618e-06 1.93375e-06 2.21378e-13 4.15958e-13 7.80958e-13 1.4647e-12 2.74312e-12 5.12743e-12 9.55921e-12 1.77595e-11 3.28421e-11 6.0367e-11 1.10095e-10 1.98803e-10 3.54599e-10 6.232e-10 1.07658e-09 1.82434e-09 3.028e-09 4.91829e-09 7.8141e-09 1.21387e-08 1.84242e-08 2.72937e-08 3.94139e-08 5.54239e-08 7.58594e-08 1.01095e-07 1.3132e-07 1.66551e-07 2.0666e-07 2.51423e-07 3.00557e-07 3.53751e-07 4.10687e-07 4.71054e-07 5.34557e-07 6.00913e-07 6.69858e-07 7.41143e-07 8.14533e-07 8.89806e-07 9.66754e-07 1.04518e-06 1.12489e-06 1.20571e-06 1.28748e-06 1.37004e-06 1.45322e-06 1.53691e-06 1.62095e-06 1.70524e-06 1.78965e-06 1.19603e-13 2.25143e-13 4.23569e-13 7.96237e-13 1.49517e-12 2.80347e-12 5.24608e-12 9.79055e-12 1.82062e-11 3.36949e-11 6.19725e-11 1.13067e-10 2.04193e-10 3.64142e-10 6.39625e-10 1.10398e-09 1.86849e-09 3.09665e-09 5.0211e-09 7.96201e-09 1.2342e-08 1.86889e-08 2.76149e-08 3.97676e-08 5.57593e-08 7.60928e-08 1.01109e-07 1.30968e-07 1.65661e-07 2.05047e-07 2.48894e-07 2.96917e-07 3.48811e-07 4.04264e-07 4.62975e-07 5.24658e-07 5.89042e-07 6.55874e-07 7.24916e-07 7.95944e-07 8.68749e-07 9.43132e-07 1.01891e-06 1.0959e-06 1.17393e-06 1.25286e-06 1.33252e-06 1.41279e-06 1.49353e-06 1.57461e-06 1.65593e-06 DataSetFinish DataSetStart DataSetName, idvgsat MeasurementType, DC BatchName, opt_ex22 WaferName, Silvaco DieName, Silvaco DeviceName, n3x10 Temperature, -40 FabDate, 01 Nov 2018 UserDate, 01 Nov 2018 Attribute, L, 1e-05 Attribute, W, 3e-06 NodeNames, d g s b Sweep, 1, V, G, LIN, 0, 1, CALCULATED, 51, 0.1, 0 Sweep, 2, V, B, LIN, 0, -0.4, CALCULATED, 6, 0.1, 0 Constant, V, D, 1, 0.1, 0 Constant, V, S, 0, 0.1, 0 Target, I, D Function, gm, derivative (vg, id) Plot, idvg, XYY (LIN LIN LIN), VG, ID, gm DataArray, ID 1.03713e-11 1.9237e-11 3.55849e-11 6.55895e-11 1.20323e-10 2.19373e-10 3.9681e-10 7.10652e-10 1.25724e-09 2.19204e-09 3.75819e-09 6.32424e-09 1.04321e-08 1.68551e-08 2.66613e-08 4.12653e-08 6.24393e-08 9.22474e-08 1.32887e-07 1.86463e-07 2.54744e-07 3.38996e-07 4.39904e-07 5.57607e-07 6.91799e-07 8.41854e-07 1.00694e-06 1.18614e-06 1.37846e-06 1.58293e-06 1.79861e-06 2.02456e-06 2.25992e-06 2.50382e-06 2.75547e-06 3.01406e-06 3.27886e-06 3.54914e-06 3.82421e-06 4.1034e-06 4.38608e-06 4.67166e-06 4.95954e-06 5.24919e-06 5.5401e-06 5.83177e-06 6.12376e-06 6.41564e-06 6.70701e-06 6.99751e-06 7.28679e-06 5.1568e-12 9.60696e-12 1.7862e-11 3.31221e-11 6.12024e-11 1.12561e-10 2.05757e-10 3.73171e-10 6.70128e-10 1.18879e-09 2.07828e-09 3.57247e-09 6.02651e-09 9.96326e-09 1.61295e-08 2.55578e-08 3.96177e-08 6.00293e-08 8.88026e-08 1.28085e-07 1.79937e-07 2.46098e-07 3.27805e-07 4.25722e-07 5.3997e-07 6.70224e-07 8.15842e-07 9.75988e-07 1.14972e-06 1.33607e-06 1.53405e-06 1.74274e-06 1.96123e-06 2.18864e-06 2.42416e-06 2.66701e-06 2.91641e-06 3.17167e-06 3.43209e-06 3.69702e-06 3.96582e-06 4.2379e-06 4.5127e-06 4.78966e-06 5.0683e-06 5.34812e-06 5.62867e-06 5.90954e-06 6.19032e-06 6.47066e-06 6.7502e-06 2.62707e-12 4.91097e-12 9.16699e-12 1.70776e-11 3.17305e-11 5.87473e-11 1.0826e-10 1.98284e-10 3.6032e-10 6.48279e-10 1.15212e-09 2.01763e-09 3.47362e-09 5.86771e-09 9.71163e-09 1.5736e-08 2.49501e-08 3.86925e-08 5.86429e-08 8.67636e-08 1.25149e-07 1.75804e-07 2.40412e-07 3.20162e-07 4.15672e-07 5.27028e-07 6.53877e-07 7.9556e-07 9.51231e-07 1.11995e-06 1.30075e-06 1.49266e-06 1.69477e-06 1.9062e-06 2.1261e-06 2.35367e-06 2.58816e-06 2.82885e-06 3.07505e-06 3.32611e-06 3.58141e-06 3.84035e-06 4.10238e-06 4.36696e-06 4.63359e-06 4.90179e-06 5.17111e-06 5.44114e-06 5.71147e-06 5.98175e-06 6.25164e-06 1.36783e-12 2.56402e-12 4.80108e-12 8.97666e-12 1.67504e-11 3.11724e-11 5.78047e-11 1.06684e-10 1.95681e-10 3.56066e-10 6.41403e-10 1.1411e-09 2.00004e-09 3.4455e-09 5.82248e-09 9.63813e-09 1.56154e-08 2.47508e-08 3.83629e-08 5.81017e-08 8.58871e-08 1.23758e-07 1.73654e-07 2.37188e-07 3.15476e-07 4.09076e-07 5.18022e-07 6.41928e-07 7.80116e-07 9.31732e-07 1.09584e-06 1.27148e-06 1.45772e-06 1.65366e-06 1.85843e-06 2.07122e-06 2.29127e-06 2.51786e-06 2.75029e-06 2.98792e-06 3.23012e-06 3.47631e-06 3.72592e-06 3.97844e-06 4.23337e-06 4.49022e-06 4.74855e-06 5.00796e-06 5.26804e-06 5.52843e-06 5.78879e-06 7.26344e-13 1.36462e-12 2.56168e-12 4.80349e-12 8.99363e-12 1.68047e-11 3.13139e-11 5.81377e-11 1.07419e-10 1.97222e-10 3.59165e-10 6.47383e-10 1.15217e-09 2.01962e-09 3.47856e-09 5.87554e-09 9.71879e-09 1.57307e-08 2.4904e-08 3.85466e-08 5.82868e-08 8.60067e-08 1.23688e-07 1.73196e-07 2.36057e-07 3.133e-07 4.05407e-07 5.12353e-07 6.33711e-07 7.68785e-07 9.16716e-07 1.07658e-06 1.24743e-06 1.42836e-06 1.61848e-06 1.81698e-06 2.02307e-06 2.23601e-06 2.45512e-06 2.67975e-06 2.90926e-06 3.14309e-06 3.38066e-06 3.62147e-06 3.86501e-06 4.11081e-06 4.35843e-06 4.60746e-06 4.8575e-06 5.10819e-06 5.35919e-06 3.92663e-13 7.39103e-13 1.39034e-12 2.61321e-12 4.90605e-12 9.19635e-12 1.72024e-11 3.20877e-11 5.96287e-11 1.10258e-10 2.02553e-10 3.69001e-10 6.65158e-10 1.1835e-09 2.07331e-09 3.56767e-09 6.01846e-09 9.9399e-09 1.60602e-08 2.53756e-08 3.91913e-08 5.91203e-08 8.70095e-08 1.24781e-07 1.74216e-07 2.36742e-07 3.13291e-07 4.04255e-07 5.09543e-07 6.28689e-07 7.60975e-07 9.05542e-07 1.06148e-06 1.22786e-06 1.40381e-06 1.58847e-06 1.78105e-06 1.98081e-06 2.18704e-06 2.39908e-06 2.61633e-06 2.83818e-06 3.06408e-06 3.29352e-06 3.526e-06 3.76106e-06 3.99825e-06 4.23715e-06 4.47739e-06 4.7186e-06 4.96043e-06 DataSetFinish DataSetStart DataSetName, cgc MeasurementType, LCR BatchName, opt_ex22 WaferName, Silvaco DieName, Silvaco DeviceName, n500x1 Temperature, 27 FabDate, 01 Nov 2018 UserDate, 01 Nov 2018 Attribute, L, 1e-06 Attribute, W, 0.0005 NodeNames, g s b d LCRSource, G, D S, 100000, V, 0.1 LCRTarget, CP Sweep, 1, V_LCR, LIN, 0, -1, CALCULATED, 51 Constant, V, D S, 0, 0.1, 0 Constant, V, B, 0, 0.1, 0 Plot, cap, XY (LIN LIN), V_LCR, CP DataArray, CP 9.14646e-13 9.03832e-13 8.94072e-13 8.85044e-13 8.76586e-13 8.68625e-13 8.61138e-13 8.54122e-13 8.47577e-13 8.41502e-13 8.35888e-13 8.3072e-13 8.25975e-13 8.21629e-13 8.17653e-13 8.14018e-13 8.10694e-13 8.07655e-13 8.04874e-13 8.02325e-13 7.99986e-13 7.97837e-13 7.95859e-13 7.94034e-13 7.92349e-13 7.90789e-13 7.89342e-13 7.87998e-13 7.86747e-13 7.8558e-13 7.8449e-13 7.8347e-13 7.82514e-13 7.81616e-13 7.80771e-13 7.79976e-13 7.79225e-13 7.78515e-13 7.77844e-13 7.77208e-13 7.76604e-13 7.76031e-13 7.75485e-13 7.74966e-13 7.7447e-13 7.73998e-13 7.73546e-13 7.73114e-13 7.727e-13 7.72303e-13 7.71923e-13 DataSetFinish DataSetStart DataSetName, cgd MeasurementType, LCR BatchName, opt_ex22 WaferName, Silvaco DieName, Silvaco DeviceName, n500x1 Temperature, 27 FabDate, 01 Nov 2018 UserDate, 01 Nov 2018 Attribute, L, 1e-06 Attribute, W, 0.0005 NodeNames, g s b d LCRSource, G, D, 100000, V, 0.1 LCRTarget, CP Sweep, 1, V_LCR, LIN, 0, -1, CALCULATED, 51 Constant, V, B, 0, 0.1, 0 Constant, V, D, 0, 0.1, 0 Constant, V, S, 0, 0.1, 0 Plot, cap, XY (LIN LIN), V_LCR, CP DataArray, CP 4.57462e-13 4.52028e-13 4.47122e-13 4.42584e-13 4.38334e-13 4.34334e-13 4.30574e-13 4.27052e-13 4.23768e-13 4.20722e-13 4.17908e-13 4.15318e-13 4.12942e-13 4.10767e-13 4.08778e-13 4.0696e-13 4.05299e-13 4.03781e-13 4.02393e-13 4.01121e-13 3.99954e-13 3.98883e-13 3.97897e-13 3.96989e-13 3.9615e-13 3.95373e-13 3.94654e-13 3.93986e-13 3.93364e-13 3.92785e-13 3.92243e-13 3.91737e-13 3.91263e-13 3.90817e-13 3.90399e-13 3.90004e-13 3.89633e-13 3.89281e-13 3.88949e-13 3.88634e-13 3.88336e-13 3.88052e-13 3.87783e-13 3.87526e-13 3.87281e-13 3.87048e-13 3.86825e-13 3.86611e-13 3.86407e-13 3.86212e-13 3.86024e-13 DataSetFinish DataSetStart DataSetName, cgg MeasurementType, LCR BatchName, opt_ex22 WaferName, Silvaco DieName, Silvaco DeviceName, n500x1 Temperature, 27 FabDate, 01 Nov 2018 UserDate, 01 Nov 2018 Attribute, L, 1e-06 Attribute, W, 0.0005 NodeNames, g s b d LCRSource, G, D S B, 100000, V, 0.1 LCRTarget, CP Sweep, 1, V_LCR, LIN, 1, -1, CALCULATED, 51 Constant, V, D S B, 0, 0.1, 0 Plot, cap, XY (LIN LIN), V_LCR, CP DataArray, CP 1.5679e-11 1.55914e-11 1.54962e-11 1.53924e-11 1.52785e-11 1.51531e-11 1.50141e-11 1.48589e-11 1.46841e-11 1.44849e-11 1.42543e-11 1.39809e-11 1.36444e-11 1.32056e-11 1.25866e-11 1.16411e-11 1.01622e-11 8.0903e-12 5.9115e-12 4.36178e-12 3.58299e-12 3.27287e-12 3.16992e-12 3.15023e-12 3.16648e-12 3.20017e-12 3.24393e-12 3.29556e-12 3.35514e-12 3.42358e-12 3.50202e-12 3.59169e-12 3.69405e-12 3.81085e-12 3.94427e-12 4.09711e-12 4.27282e-12 4.47571e-12 4.71095e-12 4.98446e-12 5.30252e-12 5.67064e-12 6.09142e-12 6.56137e-12 7.06911e-12 7.79243e-12 1.00181e-11 1.1815e-11 1.34811e-11 1.49479e-11 1.61773e-11 DataSetFinish DataSetStart DataSetName, idvd MeasurementType, DC BatchName, opt_ex22 WaferName, Silvaco DieName, Silvaco DeviceName, n10x1 Temperature, 27 FabDate, 01 Nov 2018 UserDate, 01 Nov 2018 Attribute, L, 1e-06 Attribute, W, 1e-05 NodeNames, d g s b Sweep, 1, V, D, LIN, 0, 1, CALCULATED, 51, 0.1, 0 Sweep, 2, V, G, LIN, 0.4, 1, CALCULATED, 5, 0.1, 0 Constant, V, B, 0, 0.1, 0 Constant, V, S, 0, 0.1, 0 Target, I, D Function, gds, derivative (vd, id) Plot, idvd, XY (LIN LIN), VD, ID Plot, gds, XY (LIN LOG), vd, gds DataArray, ID 0 3.6431e-06 6.71746e-06 9.22635e-06 1.11759e-05 1.25803e-05 1.34789e-05 1.39724e-05 1.42298e-05 1.43906e-05 1.45163e-05 1.46272e-05 1.47306e-05 1.48293e-05 1.49248e-05 1.5018e-05 1.51092e-05 1.5199e-05 1.52876e-05 1.53751e-05 1.54617e-05 1.55475e-05 1.56327e-05 1.57172e-05 1.58012e-05 1.58848e-05 1.59679e-05 1.60506e-05 1.6133e-05 1.6215e-05 1.62967e-05 1.63782e-05 1.64594e-05 1.65404e-05 1.66212e-05 1.67018e-05 1.67822e-05 1.68624e-05 1.69424e-05 1.70223e-05 1.71021e-05 1.71817e-05 1.72612e-05 1.73406e-05 1.74199e-05 1.74991e-05 1.75782e-05 1.76572e-05 1.77362e-05 1.78151e-05 1.7894e-05 0 7.47992e-06 1.43331e-05 2.05604e-05 2.61628e-05 3.11417e-05 3.54987e-05 3.92368e-05 4.23607e-05 4.48794e-05 4.68119e-05 4.81995e-05 4.91265e-05 4.97272e-05 5.01418e-05 5.04635e-05 5.07382e-05 5.09865e-05 5.12181e-05 5.1438e-05 5.16492e-05 5.18537e-05 5.20526e-05 5.22471e-05 5.24377e-05 5.2625e-05 5.28094e-05 5.29913e-05 5.31711e-05 5.33488e-05 5.35248e-05 5.36992e-05 5.38722e-05 5.40438e-05 5.42143e-05 5.43836e-05 5.4552e-05 5.47194e-05 5.48859e-05 5.50516e-05 5.52166e-05 5.53808e-05 5.55444e-05 5.57074e-05 5.58699e-05 5.60317e-05 5.61931e-05 5.6354e-05 5.65145e-05 5.66745e-05 5.68341e-05 0 1.0445e-05 2.02926e-05 2.9543e-05 3.81967e-05 4.6254e-05 5.37153e-05 6.05813e-05 6.68526e-05 7.25301e-05 7.76153e-05 8.21101e-05 8.6018e-05 8.93444e-05 9.20995e-05 9.43025e-05 9.59902e-05 9.72297e-05 9.81227e-05 9.87849e-05 9.93102e-05 9.97563e-05 0.000100154 0.000100521 0.000100865 0.000101192 0.000101506 0.00010181 0.000102104 0.000102391 0.000102672 0.000102946 0.000103216 0.000103482 0.000103744 0.000104002 0.000104257 0.00010451 0.000104759 0.000105007 0.000105252 0.000105495 0.000105736 0.000105976 0.000106214 0.00010645 0.000106685 0.000106919 0.000107151 0.000107383 0.000107613 0 1.24822e-05 2.4421e-05 3.58164e-05 4.66686e-05 5.69777e-05 6.67438e-05 7.59671e-05 8.46478e-05 9.2786e-05 0.000100382 0.000107436 0.00011395 0.000119922 0.000125355 0.000130251 0.00013461 0.000138437 0.000141739 0.000144524 0.000146813 0.000148637 0.000150051 0.000151135 0.00015198 0.000152669 0.000153259 0.000153785 0.000154267 0.000154718 0.000155144 0.000155551 0.000155943 0.000156322 0.000156689 0.000157047 0.000157397 0.00015774 0.000158076 0.000158406 0.000158731 0.000159052 0.000159368 0.00015968 0.000159989 0.000160294 0.000160596 0.000160896 0.000161193 0.000161487 0.00016178 0 1.37764e-05 2.70685e-05 3.98763e-05 5.21998e-05 6.4039e-05 7.53939e-05 8.62645e-05 9.66508e-05 0.000106553 0.000115971 0.000124905 0.000133355 0.000141321 0.000148804 0.000155803 0.000162319 0.000168353 0.000173905 0.000178977 0.00018357 0.000187686 0.000191329 0.000194506 0.000197226 0.000199506 0.000201376 0.000202879 0.000204079 0.000205048 0.000205856 0.000206555 0.00020718 0.000207753 0.000208287 0.000208792 0.000209274 0.000209735 0.000210181 0.000210613 0.000211032 0.000211441 0.000211841 0.000212232 0.000212616 0.000212993 0.000213364 0.00021373 0.000214091 0.000214446 0.000214798 DataSetFinish DataSetStart DataSetName, idvd MeasurementType, DC BatchName, opt_ex22 WaferName, Silvaco DieName, Silvaco DeviceName, n10x10 Temperature, 27 FabDate, 01 Nov 2018 UserDate, 01 Nov 2018 Attribute, L, 1e-05 Attribute, W, 1e-05 NodeNames, d g s b Sweep, 1, V, D, LIN, 0, 1, CALCULATED, 51, 0.1, 0 Sweep, 2, V, G, LIN, 0.4, 1, CALCULATED, 5, 0.1, 0 Constant, V, B, 0, 0.1, 0 Constant, V, S, 0, 0.1, 0 Target, I, D Function, gds, derivative (vd, id) Plot, idvd, XY (LIN LIN), VD, ID Plot, gds, XY (LIN LOG), vd, gds DataArray, ID 0 4.18272e-07 7.75963e-07 1.07325e-06 1.31049e-06 1.48859e-06 1.60995e-06 1.68124e-06 1.71701e-06 1.73522e-06 1.74701e-06 1.7566e-06 1.76537e-06 1.77377e-06 1.78199e-06 1.79011e-06 1.79817e-06 1.80619e-06 1.81419e-06 1.82216e-06 1.83012e-06 1.83807e-06 1.84601e-06 1.85394e-06 1.86187e-06 1.86979e-06 1.8777e-06 1.88561e-06 1.89351e-06 1.90141e-06 1.90931e-06 1.91721e-06 1.9251e-06 1.93299e-06 1.94088e-06 1.94876e-06 1.95665e-06 1.96453e-06 1.97241e-06 1.98029e-06 1.98816e-06 1.99604e-06 2.00391e-06 2.01179e-06 2.01966e-06 2.02753e-06 2.0354e-06 2.04327e-06 2.05114e-06 2.059e-06 2.06687e-06 0 8.04806e-07 1.54354e-06 2.21624e-06 2.82295e-06 3.36373e-06 3.83871e-06 4.24808e-06 4.59218e-06 4.87171e-06 5.0881e-06 5.2445e-06 5.34772e-06 5.41014e-06 5.44755e-06 5.47271e-06 5.49251e-06 5.50996e-06 5.52631e-06 5.54208e-06 5.55753e-06 5.57278e-06 5.58791e-06 5.60294e-06 5.61791e-06 5.63283e-06 5.64771e-06 5.66256e-06 5.67738e-06 5.69218e-06 5.70695e-06 5.72171e-06 5.73646e-06 5.75119e-06 5.76591e-06 5.78062e-06 5.79532e-06 5.81001e-06 5.82469e-06 5.83937e-06 5.85403e-06 5.86869e-06 5.88334e-06 5.89799e-06 5.91263e-06 5.92727e-06 5.9419e-06 5.95653e-06 5.97115e-06 5.98577e-06 6.00038e-06 0 1.10816e-06 2.1526e-06 3.13335e-06 4.05041e-06 4.90379e-06 5.69353e-06 6.41966e-06 7.08222e-06 7.68128e-06 8.21696e-06 8.68943e-06 9.09896e-06 9.44605e-06 9.7316e-06 9.95731e-06 1.01265e-05 1.02455e-05 1.03244e-05 1.03764e-05 1.0413e-05 1.04419e-05 1.0467e-05 1.04901e-05 1.05122e-05 1.05337e-05 1.05548e-05 1.05756e-05 1.05963e-05 1.06169e-05 1.06374e-05 1.06577e-05 1.06781e-05 1.06984e-05 1.07186e-05 1.07388e-05 1.0759e-05 1.07791e-05 1.07992e-05 1.08193e-05 1.08394e-05 1.08594e-05 1.08794e-05 1.08995e-05 1.09194e-05 1.09394e-05 1.09594e-05 1.09794e-05 1.09993e-05 1.10192e-05 1.10392e-05 0 1.32041e-06 2.58223e-06 3.78545e-06 4.9301e-06 6.01616e-06 7.04364e-06 8.01257e-06 8.92294e-06 9.77478e-06 1.05681e-05 1.1303e-05 1.19794e-05 1.25974e-05 1.31572e-05 1.36589e-05 1.41026e-05 1.44888e-05 1.4818e-05 1.50913e-05 1.53104e-05 1.54788e-05 1.56019e-05 1.56885e-05 1.57491e-05 1.57936e-05 1.58291e-05 1.58599e-05 1.58881e-05 1.59149e-05 1.59408e-05 1.59662e-05 1.59912e-05 1.6016e-05 1.60406e-05 1.60651e-05 1.60894e-05 1.61137e-05 1.61378e-05 1.61619e-05 1.6186e-05 1.621e-05 1.6234e-05 1.62579e-05 1.62818e-05 1.63056e-05 1.63295e-05 1.63533e-05 1.6377e-05 1.64008e-05 1.64245e-05 0 1.45527e-06 2.85792e-06 4.20796e-06 5.50538e-06 6.75018e-06 7.94236e-06 9.08194e-06 1.01689e-05 1.12033e-05 1.21851e-05 1.31142e-05 1.39909e-05 1.48149e-05 1.55865e-05 1.63055e-05 1.69721e-05 1.75862e-05 1.8148e-05 1.86576e-05 1.91152e-05 1.9521e-05 1.98753e-05 2.0179e-05 2.04329e-05 2.06391e-05 2.08004e-05 2.0922e-05 2.1011e-05 2.1076e-05 2.11254e-05 2.11654e-05 2.12001e-05 2.12318e-05 2.12617e-05 2.12907e-05 2.13189e-05 2.13467e-05 2.13742e-05 2.14014e-05 2.14285e-05 2.14554e-05 2.14823e-05 2.1509e-05 2.15356e-05 2.15622e-05 2.15887e-05 2.16151e-05 2.16415e-05 2.16679e-05 2.16942e-05 DataSetFinish DataSetStart DataSetName, idvd MeasurementType, DC BatchName, opt_ex22 WaferName, Silvaco DieName, Silvaco DeviceName, n10x2 Temperature, 27 FabDate, 01 Nov 2018 UserDate, 01 Nov 2018 Attribute, L, 2e-06 Attribute, W, 1e-05 NodeNames, d g s b Sweep, 1, V, D, LIN, 0, 1, CALCULATED, 51, 0.1, 0 Sweep, 2, V, G, LIN, 0.4, 1, CALCULATED, 5, 0.1, 0 Constant, V, B, 0, 0.1, 0 Constant, V, S, 0, 0.1, 0 Target, I, D Function, gds, derivative (vd, id) Plot, idvd, XY (LIN LIN), VD, ID Plot, gds, XY (LIN LOG), vd, gds DataArray, ID 0 1.97436e-06 3.65428e-06 5.04091e-06 6.13656e-06 6.94661e-06 7.48572e-06 7.79368e-06 7.94933e-06 8.03571e-06 8.09722e-06 8.14951e-06 8.19776e-06 8.24388e-06 8.28871e-06 8.33266e-06 8.37598e-06 8.41881e-06 8.46125e-06 8.50337e-06 8.54521e-06 8.58683e-06 8.62824e-06 8.66948e-06 8.71056e-06 8.75151e-06 8.79234e-06 8.83305e-06 8.87366e-06 8.91418e-06 8.95461e-06 8.99497e-06 9.03526e-06 9.07548e-06 9.11564e-06 9.15575e-06 9.1958e-06 9.2358e-06 9.27576e-06 9.31568e-06 9.35556e-06 9.39539e-06 9.4352e-06 9.47497e-06 9.51471e-06 9.55442e-06 9.59411e-06 9.63378e-06 9.67343e-06 9.71306e-06 9.75268e-06 0 3.89935e-06 7.47664e-06 1.07321e-05 1.36661e-05 1.6279e-05 1.85716e-05 2.0545e-05 2.2201e-05 2.35436e-05 2.45807e-05 2.53297e-05 2.58274e-05 2.61378e-05 2.63367e-05 2.64806e-05 2.6599e-05 2.67047e-05 2.68033e-05 2.68975e-05 2.69888e-05 2.70778e-05 2.71652e-05 2.72512e-05 2.7336e-05 2.742e-05 2.75031e-05 2.75856e-05 2.76674e-05 2.77487e-05 2.78295e-05 2.79099e-05 2.79899e-05 2.80696e-05 2.81489e-05 2.82279e-05 2.83067e-05 2.83852e-05 2.84635e-05 2.85415e-05 2.86194e-05 2.8697e-05 2.87745e-05 2.88519e-05 2.89291e-05 2.90061e-05 2.9083e-05 2.91598e-05 2.92365e-05 2.9313e-05 2.93895e-05 0 5.39825e-06 1.04876e-05 1.52682e-05 1.97401e-05 2.39034e-05 2.77583e-05 3.13049e-05 3.45435e-05 3.74745e-05 4.00985e-05 4.24164e-05 4.44296e-05 4.61407e-05 4.75543e-05 4.86793e-05 4.95326e-05 5.0146e-05 5.05703e-05 5.08672e-05 5.10902e-05 5.12733e-05 5.14346e-05 5.1583e-05 5.17233e-05 5.18578e-05 5.19881e-05 5.21153e-05 5.22398e-05 5.23621e-05 5.24827e-05 5.26017e-05 5.27193e-05 5.28358e-05 5.29513e-05 5.30658e-05 5.31794e-05 5.32923e-05 5.34046e-05 5.35162e-05 5.36272e-05 5.37377e-05 5.38477e-05 5.39572e-05 5.40664e-05 5.41751e-05 5.42835e-05 5.43915e-05 5.44992e-05 5.46066e-05 5.47137e-05 0 6.43859e-06 1.25945e-05 1.84679e-05 2.40586e-05 2.93668e-05 3.43924e-05 3.91356e-05 4.35962e-05 4.77746e-05 5.16707e-05 5.52847e-05 5.86168e-05 6.16674e-05 6.44369e-05 6.6926e-05 6.91358e-05 7.10681e-05 7.27257e-05 7.41138e-05 7.52412e-05 7.61242e-05 7.67899e-05 7.72796e-05 7.76429e-05 7.79256e-05 7.81605e-05 7.83672e-05 7.85565e-05 7.87343e-05 7.89039e-05 7.90676e-05 7.92265e-05 7.93817e-05 7.95337e-05 7.96831e-05 7.98302e-05 7.99753e-05 8.01187e-05 8.02605e-05 8.0401e-05 8.05402e-05 8.06783e-05 8.08153e-05 8.09514e-05 8.10867e-05 8.12211e-05 8.13549e-05 8.14879e-05 8.16203e-05 8.17521e-05 0 7.09959e-06 1.39462e-05 2.05399e-05 2.68807e-05 3.29685e-05 3.88033e-05 4.43851e-05 4.9714e-05 5.47899e-05 5.96128e-05 6.41829e-05 6.85001e-05 7.25645e-05 7.63762e-05 7.99353e-05 8.3242e-05 8.62966e-05 8.90994e-05 9.16509e-05 9.3952e-05 9.60038e-05 9.78084e-05 9.93687e-05 0.00010069 0.000101781 0.000102656 0.000103338 0.000103861 0.000104266 0.000104589 0.000104861 0.000105102 0.000105322 0.000105527 0.000105723 0.000105912 0.000106095 0.000106273 0.000106447 0.000106618 0.000106785 0.000106951 0.000107114 0.000107275 0.000107434 0.000107592 0.000107748 0.000107903 0.000108057 0.00010821 DataSetFinish DataSetStart DataSetName, idvd MeasurementType, DC BatchName, opt_ex22 WaferName, Silvaco DieName, Silvaco DeviceName, n10x5 Temperature, 27 FabDate, 01 Nov 2018 UserDate, 01 Nov 2018 Attribute, L, 5e-06 Attribute, W, 1e-05 NodeNames, d g s b Sweep, 1, V, D, LIN, 0, 1, CALCULATED, 51, 0.1, 0 Sweep, 2, V, G, LIN, 0.4, 1, CALCULATED, 5, 0.1, 0 Constant, V, B, 0, 0.1, 0 Constant, V, S, 0, 0.1, 0 Target, I, D Function, gds, derivative (vd, id) Plot, idvd, XY (LIN LIN), VD, ID Plot, gds, XY (LIN LOG), vd, gds DataArray, ID 0 8.25013e-07 1.52973e-06 2.11452e-06 2.58018e-06 2.92855e-06 3.16468e-06 3.30249e-06 3.37169e-06 3.40765e-06 3.43154e-06 3.45122e-06 3.46925e-06 3.48651e-06 3.50337e-06 3.51999e-06 3.53645e-06 3.55281e-06 3.56908e-06 3.58528e-06 3.60144e-06 3.61755e-06 3.63362e-06 3.64967e-06 3.66569e-06 3.68168e-06 3.69766e-06 3.71362e-06 3.72956e-06 3.74548e-06 3.76139e-06 3.77729e-06 3.79317e-06 3.80905e-06 3.82491e-06 3.84077e-06 3.85662e-06 3.87246e-06 3.88829e-06 3.90412e-06 3.91994e-06 3.93575e-06 3.95156e-06 3.96736e-06 3.98315e-06 3.99895e-06 4.01473e-06 4.03052e-06 4.0463e-06 4.06208e-06 4.07786e-06 0 1.59722e-06 3.06318e-06 4.39795e-06 5.60162e-06 6.67435e-06 7.61638e-06 8.4281e-06 9.11024e-06 9.66419e-06 1.00929e-05 1.04028e-05 1.06077e-05 1.07327e-05 1.08089e-05 1.08612e-05 1.09028e-05 1.09397e-05 1.09742e-05 1.10074e-05 1.10397e-05 1.10716e-05 1.11031e-05 1.11343e-05 1.11653e-05 1.11961e-05 1.12268e-05 1.12574e-05 1.12878e-05 1.13182e-05 1.13485e-05 1.13787e-05 1.14088e-05 1.14389e-05 1.1469e-05 1.1499e-05 1.15289e-05 1.15589e-05 1.15887e-05 1.16186e-05 1.16484e-05 1.16782e-05 1.17079e-05 1.17377e-05 1.17674e-05 1.1797e-05 1.18267e-05 1.18564e-05 1.1886e-05 1.19156e-05 1.19452e-05 0 2.20198e-06 4.27757e-06 6.22678e-06 8.04964e-06 9.74619e-06 1.13165e-05 1.27606e-05 1.40786e-05 1.52706e-05 1.63369e-05 1.72778e-05 1.80939e-05 1.87861e-05 1.93563e-05 1.98079e-05 2.01476e-05 2.03879e-05 2.05492e-05 2.06572e-05 2.07347e-05 2.07966e-05 2.08504e-05 2.09001e-05 2.09474e-05 2.09932e-05 2.1038e-05 2.10821e-05 2.11257e-05 2.11689e-05 2.12117e-05 2.12543e-05 2.12966e-05 2.13388e-05 2.13807e-05 2.14225e-05 2.14642e-05 2.15057e-05 2.15472e-05 2.15885e-05 2.16298e-05 2.16709e-05 2.1712e-05 2.1753e-05 2.1794e-05 2.18349e-05 2.18757e-05 2.19165e-05 2.19572e-05 2.19979e-05 2.20385e-05 0 2.62428e-06 5.13246e-06 7.52455e-06 9.80056e-06 1.19605e-05 1.40044e-05 1.59322e-05 1.7744e-05 1.94399e-05 2.10197e-05 2.24838e-05 2.3832e-05 2.50646e-05 2.61816e-05 2.71835e-05 2.80707e-05 2.88438e-05 2.9504e-05 3.00533e-05 3.04955e-05 3.08369e-05 3.10889e-05 3.12682e-05 3.13958e-05 3.14912e-05 3.15684e-05 3.16354e-05 3.16969e-05 3.1755e-05 3.1811e-05 3.18656e-05 3.19192e-05 3.1972e-05 3.20242e-05 3.2076e-05 3.21273e-05 3.21783e-05 3.2229e-05 3.22794e-05 3.23296e-05 3.23796e-05 3.24294e-05 3.24791e-05 3.25286e-05 3.2578e-05 3.26272e-05 3.26764e-05 3.27254e-05 3.27743e-05 3.28232e-05 0 2.89259e-06 5.68102e-06 8.36528e-06 1.09454e-05 1.34213e-05 1.57931e-05 1.80607e-05 2.02241e-05 2.22834e-05 2.42386e-05 2.60896e-05 2.78365e-05 2.94794e-05 3.10183e-05 3.24531e-05 3.37841e-05 3.50113e-05 3.61349e-05 3.7155e-05 3.80721e-05 3.88866e-05 3.95993e-05 4.02115e-05 4.07253e-05 4.11443e-05 4.14746e-05 4.17259e-05 4.19123e-05 4.20508e-05 4.21575e-05 4.22451e-05 4.23215e-05 4.23913e-05 4.2457e-05 4.25202e-05 4.25816e-05 4.26418e-05 4.27009e-05 4.27594e-05 4.28172e-05 4.28745e-05 4.29313e-05 4.29878e-05 4.3044e-05 4.30999e-05 4.31555e-05 4.32109e-05 4.32661e-05 4.33211e-05 4.33759e-05 DataSetFinish DataSetStart DataSetName, idvd MeasurementType, DC BatchName, opt_ex22 WaferName, Silvaco DieName, Silvaco DeviceName, n1x1 Temperature, 27 FabDate, 01 Nov 2018 UserDate, 01 Nov 2018 Attribute, L, 1e-06 Attribute, W, 1e-06 NodeNames, d g s b Sweep, 1, V, D, LIN, 0, 1, CALCULATED, 51, 0.1, 0 Sweep, 2, V, G, LIN, 0.4, 1, CALCULATED, 5, 0.1, 0 Constant, V, B, 0, 0.1, 0 Constant, V, S, 0, 0.1, 0 Target, I, D Function, gds, derivative (vd, id) Plot, idvd, XY (LIN LIN), VD, ID Plot, gds, XY (LIN LOG), vd, gds DataArray, ID 0 3.50203e-07 6.43528e-07 8.80334e-07 1.06133e-06 1.18827e-06 1.2661e-06 1.30702e-06 1.32855e-06 1.34276e-06 1.35431e-06 1.3647e-06 1.37447e-06 1.38384e-06 1.39293e-06 1.40182e-06 1.41054e-06 1.41914e-06 1.42762e-06 1.436e-06 1.44431e-06 1.45255e-06 1.46072e-06 1.46884e-06 1.47692e-06 1.48495e-06 1.49294e-06 1.50089e-06 1.50881e-06 1.51671e-06 1.52457e-06 1.53242e-06 1.54024e-06 1.54803e-06 1.55581e-06 1.56357e-06 1.57132e-06 1.57905e-06 1.58676e-06 1.59446e-06 1.60215e-06 1.60982e-06 1.61748e-06 1.62514e-06 1.63278e-06 1.64041e-06 1.64804e-06 1.65566e-06 1.66328e-06 1.67089e-06 1.6785e-06 0 7.39134e-07 1.41496e-06 2.02755e-06 2.57701e-06 3.06349e-06 3.48715e-06 3.84833e-06 4.14756e-06 4.3859e-06 4.56566e-06 4.69188e-06 4.7745e-06 4.82802e-06 4.86584e-06 4.89599e-06 4.92219e-06 4.94611e-06 4.96856e-06 4.98997e-06 5.01058e-06 5.03057e-06 5.05005e-06 5.06911e-06 5.08781e-06 5.10621e-06 5.12434e-06 5.14223e-06 5.15992e-06 5.17742e-06 5.19475e-06 5.21193e-06 5.22898e-06 5.2459e-06 5.2627e-06 5.27941e-06 5.29601e-06 5.31253e-06 5.32896e-06 5.34532e-06 5.36161e-06 5.37783e-06 5.39398e-06 5.41008e-06 5.42613e-06 5.44212e-06 5.45806e-06 5.47396e-06 5.48982e-06 5.50564e-06 5.52142e-06 0 1.0416e-06 2.02278e-06 2.94357e-06 3.80398e-06 4.60405e-06 5.34384e-06 6.02338e-06 6.64275e-06 7.20205e-06 7.70143e-06 8.14109e-06 8.52142e-06 8.84305e-06 9.10714e-06 9.31597e-06 9.47388e-06 9.58856e-06 9.67105e-06 9.73291e-06 9.78279e-06 9.82572e-06 9.86439e-06 9.90019e-06 9.93394e-06 9.96613e-06 9.99709e-06 1.0027e-05 1.00561e-05 1.00845e-05 1.01123e-05 1.01396e-05 1.01663e-05 1.01927e-05 1.02187e-05 1.02443e-05 1.02697e-05 1.02948e-05 1.03196e-05 1.03442e-05 1.03686e-05 1.03927e-05 1.04167e-05 1.04406e-05 1.04643e-05 1.04878e-05 1.05112e-05 1.05345e-05 1.05577e-05 1.05807e-05 1.06037e-05 0 1.24971e-06 2.44445e-06 3.58424e-06 4.66907e-06 5.69895e-06 6.6739e-06 7.59392e-06 8.45903e-06 9.26924e-06 1.00246e-05 1.07251e-05 1.13709e-05 1.19619e-05 1.24983e-05 1.29803e-05 1.34082e-05 1.37822e-05 1.41031e-05 1.43721e-05 1.45914e-05 1.47646e-05 1.4898e-05 1.50001e-05 1.50803e-05 1.51464e-05 1.52035e-05 1.52549e-05 1.53022e-05 1.53465e-05 1.53886e-05 1.54289e-05 1.54677e-05 1.55053e-05 1.55418e-05 1.55774e-05 1.56122e-05 1.56463e-05 1.56798e-05 1.57127e-05 1.57451e-05 1.5777e-05 1.58085e-05 1.58397e-05 1.58705e-05 1.5901e-05 1.59312e-05 1.59611e-05 1.59908e-05 1.60202e-05 1.60494e-05 0 1.38245e-06 2.71591e-06 4.00039e-06 5.23587e-06 6.42237e-06 7.55986e-06 8.64836e-06 9.68787e-06 1.06784e-05 1.16199e-05 1.25124e-05 1.3356e-05 1.41505e-05 1.48961e-05 1.55928e-05 1.62407e-05 1.68396e-05 1.73899e-05 1.78914e-05 1.83445e-05 1.87495e-05 1.91066e-05 1.94166e-05 1.96807e-05 1.99008e-05 2.00801e-05 2.02236e-05 2.0338e-05 2.04309e-05 2.05089e-05 2.0577e-05 2.06382e-05 2.06946e-05 2.07474e-05 2.07974e-05 2.08451e-05 2.0891e-05 2.09353e-05 2.09782e-05 2.102e-05 2.10608e-05 2.11007e-05 2.11397e-05 2.11781e-05 2.12157e-05 2.12528e-05 2.12894e-05 2.13254e-05 2.1361e-05 2.13962e-05 DataSetFinish DataSetStart DataSetName, idvd MeasurementType, DC BatchName, opt_ex22 WaferName, Silvaco DieName, Silvaco DeviceName, n1x10 Temperature, 27 FabDate, 01 Nov 2018 UserDate, 01 Nov 2018 Attribute, L, 1e-05 Attribute, W, 1e-06 NodeNames, d g s b Sweep, 1, V, D, LIN, 0, 1, CALCULATED, 51, 0.1, 0 Sweep, 2, V, G, LIN, 0.4, 1, CALCULATED, 5, 0.1, 0 Constant, V, B, 0, 0.1, 0 Constant, V, S, 0, 0.1, 0 Target, I, D Function, gds, derivative (vd, id) Plot, idvd, XY (LIN LIN), VD, ID Plot, gds, XY (LIN LOG), vd, gds DataArray, ID 0 4.04794e-08 7.48785e-08 1.03217e-07 1.25539e-07 1.41952e-07 1.52761e-07 1.58804e-07 1.61734e-07 1.63277e-07 1.64342e-07 1.65243e-07 1.66081e-07 1.66889e-07 1.67684e-07 1.6847e-07 1.69251e-07 1.70028e-07 1.70804e-07 1.71577e-07 1.72349e-07 1.73121e-07 1.73891e-07 1.74661e-07 1.7543e-07 1.76198e-07 1.76966e-07 1.77734e-07 1.78501e-07 1.79268e-07 1.80035e-07 1.80801e-07 1.81567e-07 1.82333e-07 1.83099e-07 1.83864e-07 1.84629e-07 1.85394e-07 1.86159e-07 1.86924e-07 1.87689e-07 1.88453e-07 1.89218e-07 1.89982e-07 1.90746e-07 1.9151e-07 1.92274e-07 1.93038e-07 1.93802e-07 1.94566e-07 1.9533e-07 0 7.97007e-08 1.5272e-07 2.1906e-07 2.78726e-07 3.31727e-07 3.78074e-07 4.1779e-07 4.50916e-07 4.77531e-07 4.9781e-07 5.12137e-07 5.2133e-07 5.26784e-07 5.30094e-07 5.32405e-07 5.34286e-07 5.35977e-07 5.37577e-07 5.39129e-07 5.40654e-07 5.42161e-07 5.43657e-07 5.45145e-07 5.46627e-07 5.48104e-07 5.49578e-07 5.51049e-07 5.52517e-07 5.53983e-07 5.55447e-07 5.5691e-07 5.58371e-07 5.59831e-07 5.6129e-07 5.62748e-07 5.64204e-07 5.6566e-07 5.67115e-07 5.6857e-07 5.70023e-07 5.71476e-07 5.72929e-07 5.74381e-07 5.75832e-07 5.77283e-07 5.78733e-07 5.80183e-07 5.81632e-07 5.83081e-07 5.8453e-07 0 1.10618e-07 2.14784e-07 3.125e-07 4.03767e-07 4.88587e-07 5.66962e-07 6.38895e-07 7.04393e-07 7.63462e-07 8.16114e-07 8.62369e-07 9.02259e-07 9.35839e-07 9.63215e-07 9.84587e-07 1.00035e-06 1.01123e-06 1.01837e-06 1.0231e-06 1.02651e-06 1.02927e-06 1.03171e-06 1.03398e-06 1.03617e-06 1.0383e-06 1.0404e-06 1.04248e-06 1.04454e-06 1.04659e-06 1.04863e-06 1.05067e-06 1.05269e-06 1.05472e-06 1.05674e-06 1.05875e-06 1.06077e-06 1.06278e-06 1.06479e-06 1.06679e-06 1.06879e-06 1.0708e-06 1.07279e-06 1.07479e-06 1.07679e-06 1.07878e-06 1.08078e-06 1.08277e-06 1.08476e-06 1.08675e-06 1.08874e-06 0 1.3229e-07 2.58644e-07 3.79065e-07 4.93551e-07 6.02104e-07 7.04725e-07 8.01413e-07 8.92171e-07 9.77001e-07 1.0559e-06 1.12888e-06 1.19595e-06 1.2571e-06 1.31235e-06 1.36172e-06 1.40522e-06 1.44291e-06 1.47484e-06 1.50113e-06 1.52201e-06 1.53784e-06 1.54927e-06 1.55725e-06 1.56285e-06 1.56704e-06 1.57045e-06 1.57345e-06 1.57624e-06 1.57889e-06 1.58147e-06 1.58401e-06 1.58651e-06 1.58898e-06 1.59144e-06 1.59389e-06 1.59633e-06 1.59875e-06 1.60118e-06 1.60359e-06 1.606e-06 1.6084e-06 1.6108e-06 1.6132e-06 1.61559e-06 1.61798e-06 1.62037e-06 1.62275e-06 1.62514e-06 1.62752e-06 1.62989e-06 0 1.46124e-07 2.86919e-07 4.22382e-07 5.52516e-07 6.7732e-07 7.96793e-07 9.10937e-07 1.01975e-06 1.12324e-06 1.2214e-06 1.31423e-06 1.40173e-06 1.48392e-06 1.56078e-06 1.63232e-06 1.69855e-06 1.75946e-06 1.81508e-06 1.86542e-06 1.91048e-06 1.9503e-06 1.98493e-06 2.01443e-06 2.03894e-06 2.05866e-06 2.07394e-06 2.08534e-06 2.09363e-06 2.09972e-06 2.1044e-06 2.10825e-06 2.11164e-06 2.11478e-06 2.11775e-06 2.12064e-06 2.12346e-06 2.12624e-06 2.129e-06 2.13173e-06 2.13444e-06 2.13714e-06 2.13983e-06 2.14251e-06 2.14519e-06 2.14785e-06 2.15051e-06 2.15317e-06 2.15582e-06 2.15846e-06 2.1611e-06 DataSetFinish DataSetStart DataSetName, idvd MeasurementType, DC BatchName, opt_ex22 WaferName, Silvaco DieName, Silvaco DeviceName, n3x10 Temperature, 27 FabDate, 01 Nov 2018 UserDate, 01 Nov 2018 Attribute, L, 1e-05 Attribute, W, 3e-06 NodeNames, d g s b Sweep, 1, V, D, LIN, 0, 1, CALCULATED, 51, 0.1, 0 Sweep, 2, V, G, LIN, 0.4, 1, CALCULATED, 5, 0.1, 0 Constant, V, B, 0, 0.1, 0 Constant, V, S, 0, 0.1, 0 Target, I, D Function, gds, derivative (vd, id) Plot, idvd, XY (LIN LIN), VD, ID Plot, gds, XY (LIN LOG), vd, gds DataArray, ID 0 1.22495e-07 2.26889e-07 3.13238e-07 3.81662e-07 4.32456e-07 4.66439e-07 4.85868e-07 4.95422e-07 5.00367e-07 5.03685e-07 5.06446e-07 5.08992e-07 5.11445e-07 5.13849e-07 5.16228e-07 5.1859e-07 5.20941e-07 5.23285e-07 5.25623e-07 5.27958e-07 5.30289e-07 5.32617e-07 5.34943e-07 5.37267e-07 5.3959e-07 5.41911e-07 5.44231e-07 5.4655e-07 5.48867e-07 5.51184e-07 5.535e-07 5.55815e-07 5.58129e-07 5.60443e-07 5.62756e-07 5.65069e-07 5.67381e-07 5.69693e-07 5.72004e-07 5.74314e-07 5.76625e-07 5.78935e-07 5.81244e-07 5.83554e-07 5.85862e-07 5.88171e-07 5.9048e-07 5.92788e-07 5.95096e-07 5.97404e-07 0 2.38686e-07 4.57548e-07 6.56596e-07 8.35845e-07 9.95317e-07 1.13505e-06 1.2551e-06 1.35558e-06 1.43673e-06 1.49901e-06 1.54347e-06 1.57236e-06 1.58963e-06 1.60005e-06 1.60719e-06 1.61293e-06 1.61804e-06 1.62285e-06 1.62751e-06 1.63209e-06 1.6366e-06 1.64109e-06 1.64554e-06 1.64998e-06 1.6544e-06 1.65882e-06 1.66322e-06 1.66762e-06 1.67201e-06 1.67639e-06 1.68077e-06 1.68514e-06 1.68952e-06 1.69388e-06 1.69825e-06 1.70261e-06 1.70697e-06 1.71132e-06 1.71568e-06 1.72003e-06 1.72438e-06 1.72872e-06 1.73307e-06 1.73741e-06 1.74176e-06 1.7461e-06 1.75044e-06 1.75478e-06 1.75912e-06 1.76345e-06 0 3.30091e-07 6.41052e-07 9.32887e-07 1.2056e-06 1.4592e-06 1.69368e-06 1.90907e-06 2.10538e-06 2.28262e-06 2.44083e-06 2.58007e-06 2.70043e-06 2.80206e-06 2.88526e-06 2.95058e-06 2.99911e-06 3.03288e-06 3.05515e-06 3.06985e-06 3.08034e-06 3.08873e-06 3.09608e-06 3.10291e-06 3.10946e-06 3.11584e-06 3.12211e-06 3.12831e-06 3.13447e-06 3.14059e-06 3.14669e-06 3.15276e-06 3.15881e-06 3.16485e-06 3.17088e-06 3.1769e-06 3.1829e-06 3.1889e-06 3.19489e-06 3.20088e-06 3.20685e-06 3.21282e-06 3.21879e-06 3.22475e-06 3.23071e-06 3.23666e-06 3.24261e-06 3.24856e-06 3.2545e-06 3.26044e-06 3.26637e-06 0 3.94111e-07 7.70627e-07 1.12955e-06 1.47088e-06 1.79462e-06 2.10076e-06 2.38933e-06 2.66031e-06 2.91371e-06 3.14955e-06 3.36782e-06 3.56855e-06 3.75175e-06 3.91746e-06 4.06572e-06 4.1966e-06 4.3102e-06 4.40673e-06 4.48651e-06 4.55013e-06 4.59866e-06 4.63391e-06 4.65857e-06 4.67586e-06 4.68868e-06 4.69903e-06 4.70808e-06 4.71643e-06 4.72437e-06 4.73208e-06 4.73964e-06 4.74709e-06 4.75448e-06 4.76181e-06 4.76911e-06 4.77637e-06 4.7836e-06 4.79081e-06 4.79801e-06 4.80519e-06 4.81235e-06 4.8195e-06 4.82664e-06 4.83377e-06 4.84089e-06 4.848e-06 4.8551e-06 4.8622e-06 4.86929e-06 4.87637e-06 0 4.34896e-07 8.53989e-07 1.25728e-06 1.64477e-06 2.01646e-06 2.37235e-06 2.71243e-06 3.03672e-06 3.34521e-06 3.63791e-06 3.91482e-06 4.17593e-06 4.42127e-06 4.65083e-06 4.86462e-06 5.06265e-06 5.24495e-06 5.41154e-06 5.56244e-06 5.69773e-06 5.81747e-06 5.92179e-06 6.0109e-06 6.08516e-06 6.14513e-06 6.19183e-06 6.22682e-06 6.25234e-06 6.27101e-06 6.28528e-06 6.29696e-06 6.30717e-06 6.31655e-06 6.32546e-06 6.33406e-06 6.34248e-06 6.35077e-06 6.35897e-06 6.36711e-06 6.37519e-06 6.38323e-06 6.39124e-06 6.39922e-06 6.40718e-06 6.41511e-06 6.42303e-06 6.43093e-06 6.43882e-06 6.44669e-06 6.45456e-06 DataSetFinish DataSetStart DataSetName, idvglin MeasurementType, DC BatchName, opt_ex22 WaferName, Silvaco DieName, Silvaco DeviceName, n10x1 Temperature, 27 FabDate, 01 Nov 2018 UserDate, 01 Nov 2018 Attribute, L, 1e-06 Attribute, W, 1e-05 NodeNames, d g s b Sweep, 1, V, G, LIN, 0, 1, CALCULATED, 51, 0.1, 0 Sweep, 2, V, B, LIN, 0, -0.4, CALCULATED, 6, 0.1, 0 Constant, V, D, 0.1, 0.1, 0 Constant, V, S, 0, 0.1, 0 Target, I, D Function, gm, derivative (vg, id) Plot, idvg, XYY (LIN LIN LIN), VG, ID, gm DataArray, ID 5.06911e-09 8.10052e-09 1.28977e-08 2.04511e-08 3.22809e-08 5.07079e-08 7.92612e-08 1.23292e-07 1.90881e-07 2.94141e-07 4.50914e-07 6.86708e-07 1.03633e-06 1.54427e-06 2.26261e-06 3.24513e-06 4.53612e-06 6.15338e-06 8.07352e-06 1.02385e-05 1.25803e-05 1.50371e-05 1.75576e-05 2.01009e-05 2.2635e-05 2.51361e-05 2.75867e-05 2.99742e-05 3.22904e-05 3.45297e-05 3.66889e-05 3.87661e-05 4.07608e-05 4.26731e-05 4.45038e-05 4.6254e-05 4.79251e-05 4.95186e-05 5.10363e-05 5.248e-05 5.38515e-05 5.51529e-05 5.63861e-05 5.75531e-05 5.86559e-05 5.96966e-05 6.06772e-05 6.15997e-05 6.24662e-05 6.32786e-05 6.4039e-05 3.03575e-09 4.87529e-09 7.80491e-09 1.24493e-08 1.97748e-08 3.12665e-08 4.9194e-08 7.70107e-08 1.19955e-07 1.8594e-07 2.86825e-07 4.40082e-07 6.70693e-07 1.01275e-06 1.5098e-06 2.21279e-06 3.17417e-06 4.43676e-06 6.01695e-06 7.89044e-06 9.99947e-06 1.2277e-05 1.46625e-05 1.71061e-05 1.9568e-05 2.20176e-05 2.4432e-05 2.67944e-05 2.90933e-05 3.1321e-05 3.34725e-05 3.55451e-05 3.75373e-05 3.94488e-05 4.12802e-05 4.30323e-05 4.47065e-05 4.63044e-05 4.78275e-05 4.92777e-05 5.06569e-05 5.19671e-05 5.32102e-05 5.43882e-05 5.55032e-05 5.6557e-05 5.75518e-05 5.84896e-05 5.93722e-05 6.02017e-05 6.09801e-05 1.84496e-09 2.97514e-09 4.78485e-09 7.67099e-09 1.22525e-08 1.94881e-08 3.08522e-08 4.85994e-08 7.61626e-08 1.18749e-07 1.84224e-07 2.84371e-07 4.36531e-07 6.65463e-07 1.00487e-06 1.49768e-06 2.19381e-06 3.1442e-06 4.38959e-06 5.94374e-06 7.78023e-06 9.84093e-06 1.206e-05 1.43789e-05 1.67492e-05 1.91329e-05 2.15006e-05 2.38308e-05 2.61079e-05 2.83211e-05 3.04635e-05 3.25306e-05 3.45202e-05 3.64312e-05 3.82637e-05 4.00183e-05 4.16961e-05 4.32987e-05 4.48277e-05 4.62848e-05 4.7672e-05 4.89911e-05 5.02442e-05 5.14331e-05 5.256e-05 5.36267e-05 5.46353e-05 5.55878e-05 5.6486e-05 5.73319e-05 5.81274e-05 1.13653e-09 1.83902e-09 2.96906e-09 4.7805e-09 7.67235e-09 1.22674e-08 1.95306e-08 3.0947e-08 4.87883e-08 7.65136e-08 1.19371e-07 1.85282e-07 2.86105e-07 4.39261e-07 6.69542e-07 1.01055e-06 1.5048e-06 2.20129e-06 3.14928e-06 4.38679e-06 5.92394e-06 7.73113e-06 9.74963e-06 1.19151e-05 1.4171e-05 1.64711e-05 1.87792e-05 2.10677e-05 2.33164e-05 2.55108e-05 2.76412e-05 2.97013e-05 3.16873e-05 3.35974e-05 3.54309e-05 3.7188e-05 3.88697e-05 4.04773e-05 4.20123e-05 4.34764e-05 4.48715e-05 4.61996e-05 4.74624e-05 4.86621e-05 4.98006e-05 5.08798e-05 5.19017e-05 5.28682e-05 5.37813e-05 5.46429e-05 5.54547e-05 7.08923e-10 1.15039e-09 1.86328e-09 3.01103e-09 4.85231e-09 7.79392e-09 1.24709e-08 1.98677e-08 3.14991e-08 4.96829e-08 7.79481e-08 1.21647e-07 1.88856e-07 2.91644e-07 4.47691e-07 6.8205e-07 1.02845e-06 1.52918e-06 2.23234e-06 3.18528e-06 4.42267e-06 5.95003e-06 7.73393e-06 9.71493e-06 1.18305e-05 1.40264e-05 1.6259e-05 1.84939e-05 2.07056e-05 2.28751e-05 2.49895e-05 2.70399e-05 2.90208e-05 3.09289e-05 3.27628e-05 3.45222e-05 3.62077e-05 3.78201e-05 3.93611e-05 4.08321e-05 4.22351e-05 4.35718e-05 4.48442e-05 4.60543e-05 4.7204e-05 4.82951e-05 4.93298e-05 5.03098e-05 5.12371e-05 5.21136e-05 5.29409e-05 4.47354e-10 7.27679e-10 1.18181e-09 1.91566e-09 3.09789e-09 4.99554e-09 8.02851e-09 1.28524e-08 2.04832e-08 3.24843e-08 5.12472e-08 8.04124e-08 1.25499e-07 1.94827e-07 3.00803e-07 4.61538e-07 7.02537e-07 1.05784e-06 1.56963e-06 2.28508e-06 3.24931e-06 4.49299e-06 6.01618e-06 7.7812e-06 9.72813e-06 1.17965e-05 1.39349e-05 1.6102e-05 1.8266e-05 2.04031e-05 2.2496e-05 2.4533e-05 2.65061e-05 2.84107e-05 3.0244e-05 3.2005e-05 3.36937e-05 3.53108e-05 3.68574e-05 3.83351e-05 3.97457e-05 4.10908e-05 4.23724e-05 4.35925e-05 4.47529e-05 4.58555e-05 4.69024e-05 4.78953e-05 4.88361e-05 4.97266e-05 5.05687e-05 DataSetFinish DataSetStart DataSetName, idvglin MeasurementType, DC BatchName, opt_ex22 WaferName, Silvaco DieName, Silvaco DeviceName, n10x10 Temperature, 27 FabDate, 01 Nov 2018 UserDate, 01 Nov 2018 Attribute, L, 1e-05 Attribute, W, 1e-05 NodeNames, d g s b Sweep, 1, V, G, LIN, 0, 1, CALCULATED, 51, 0.1, 0 Sweep, 2, V, B, LIN, 0, -0.4, CALCULATED, 6, 0.1, 0 Constant, V, D, 0.1, 0.1, 0 Constant, V, S, 0, 0.1, 0 Target, I, D Function, gm, derivative (vg, id) Plot, idvg, XYY (LIN LIN LIN), VG, ID, gm DataArray, ID 8.08441e-10 1.28595e-09 2.03691e-09 3.21165e-09 5.03967e-09 7.87021e-09 1.22335e-08 1.89316e-08 2.91672e-08 4.471e-08 6.80813e-08 1.02703e-07 1.52923e-07 2.23805e-07 3.20577e-07 4.47617e-07 6.06874e-07 7.964e-07 1.01078e-06 1.24349e-06 1.48859e-06 1.7412e-06 1.99738e-06 2.25404e-06 2.50881e-06 2.7599e-06 3.00599e-06 3.24612e-06 3.47962e-06 3.706e-06 3.92495e-06 4.13628e-06 4.33986e-06 4.53564e-06 4.7236e-06 4.90379e-06 5.07625e-06 5.24107e-06 5.39835e-06 5.5482e-06 5.69075e-06 5.82615e-06 5.95454e-06 6.07608e-06 6.19096e-06 6.29933e-06 6.40139e-06 6.49731e-06 6.58729e-06 6.67151e-06 6.75018e-06 4.82604e-10 7.72014e-10 1.23034e-09 1.95248e-09 3.08413e-09 4.84794e-09 7.58295e-09 1.18041e-08 1.82904e-08 2.82104e-08 4.32847e-08 6.59676e-08 9.95945e-08 1.48409e-07 2.1736e-07 3.11559e-07 4.35277e-07 5.90389e-07 7.74922e-07 9.83494e-07 1.20965e-06 1.44753e-06 1.69234e-06 1.94022e-06 2.18817e-06 2.4339e-06 2.67571e-06 2.91234e-06 3.1429e-06 3.36677e-06 3.58354e-06 3.79295e-06 3.99483e-06 4.1891e-06 4.37575e-06 4.5548e-06 4.7263e-06 4.89034e-06 5.04702e-06 5.19645e-06 5.33876e-06 5.4741e-06 5.60263e-06 5.72449e-06 5.83985e-06 5.94889e-06 6.05178e-06 6.1487e-06 6.23984e-06 6.32537e-06 6.40549e-06 2.92024e-10 4.69381e-10 7.51993e-10 1.20021e-09 1.9074e-09 3.01708e-09 4.74871e-09 7.4366e-09 1.15886e-08 1.7973e-08 2.77418e-08 4.25906e-08 6.49363e-08 9.80603e-08 1.46129e-07 2.13989e-07 3.06616e-07 4.28116e-07 5.80176e-07 7.60671e-07 9.64191e-07 1.18436e-06 1.41547e-06 1.65283e-06 1.89271e-06 2.13224e-06 2.36922e-06 2.60205e-06 2.82956e-06 3.05093e-06 3.2656e-06 3.47323e-06 3.67357e-06 3.86653e-06 4.05205e-06 4.23014e-06 4.40086e-06 4.56429e-06 4.72051e-06 4.86966e-06 5.01186e-06 5.14725e-06 5.27598e-06 5.39822e-06 5.51411e-06 5.62384e-06 5.72757e-06 5.82549e-06 5.91775e-06 6.00456e-06 6.08607e-06 1.78942e-10 2.88773e-10 4.64718e-10 7.45397e-10 1.19103e-09 1.89484e-09 3.00023e-09 4.72658e-09 7.40814e-09 1.15527e-08 1.79281e-08 2.76848e-08 4.2514e-08 6.48204e-08 9.78582e-08 1.45741e-07 2.13218e-07 3.05119e-07 4.25326e-07 5.75241e-07 7.52482e-07 9.5157e-07 1.16624e-06 1.39094e-06 1.62116e-06 1.85332e-06 2.0847e-06 2.31321e-06 2.53736e-06 2.75608e-06 2.96862e-06 3.1745e-06 3.3734e-06 3.56515e-06 3.74966e-06 3.92693e-06 4.097e-06 4.25992e-06 4.41581e-06 4.56476e-06 4.70692e-06 4.84243e-06 4.97142e-06 5.09406e-06 5.21052e-06 5.32094e-06 5.4255e-06 5.52438e-06 5.61774e-06 5.70576e-06 5.78861e-06 1.10946e-10 1.79643e-10 2.9019e-10 4.67439e-10 7.5043e-10 1.20007e-09 1.91067e-09 3.02738e-09 4.77224e-09 7.48363e-09 1.16755e-08 1.81245e-08 2.79928e-08 4.29848e-08 6.55149e-08 9.8833e-08 1.47016e-07 2.14726e-07 3.06622e-07 4.26312e-07 5.74825e-07 7.49439e-07 9.44585e-07 1.15413e-06 1.37274e-06 1.59608e-06 1.82078e-06 2.04425e-06 2.26457e-06 2.48034e-06 2.69059e-06 2.89466e-06 3.09212e-06 3.2827e-06 3.46628e-06 3.64281e-06 3.8123e-06 3.9748e-06 4.13042e-06 4.27925e-06 4.42142e-06 4.55708e-06 4.68636e-06 4.80943e-06 4.92643e-06 5.03754e-06 5.14292e-06 5.24272e-06 5.33713e-06 5.42631e-06 5.51043e-06 6.95495e-11 1.12929e-10 1.83005e-10 2.9585e-10 4.76896e-10 7.66107e-10 1.22583e-09 1.95264e-09 3.09513e-09 4.88062e-09 7.65549e-09 1.19456e-08 1.85451e-08 2.864e-08 4.39636e-08 6.69593e-08 1.00891e-07 1.49813e-07 2.18297e-07 3.10809e-07 4.30632e-07 5.78337e-07 7.50806e-07 9.42383e-07 1.14711e-06 1.35987e-06 1.57657e-06 1.79403e-06 2.00984e-06 2.22222e-06 2.4299e-06 2.632e-06 2.82794e-06 3.01734e-06 3.2e-06 3.37582e-06 3.54477e-06 3.70691e-06 3.8623e-06 4.01104e-06 4.15326e-06 4.28909e-06 4.41867e-06 4.54216e-06 4.65972e-06 4.77149e-06 4.87764e-06 4.97833e-06 5.07374e-06 5.16401e-06 5.24933e-06 DataSetFinish DataSetStart DataSetName, idvglin MeasurementType, DC BatchName, opt_ex22 WaferName, Silvaco DieName, Silvaco DeviceName, n10x2 Temperature, 27 FabDate, 01 Nov 2018 UserDate, 01 Nov 2018 Attribute, L, 2e-06 Attribute, W, 1e-05 NodeNames, d g s b Sweep, 1, V, G, LIN, 0, 1, CALCULATED, 51, 0.1, 0 Sweep, 2, V, B, LIN, 0, -0.4, CALCULATED, 6, 0.1, 0 Constant, V, D, 0.1, 0.1, 0 Constant, V, S, 0, 0.1, 0 Target, I, D Function, gm, derivative (vg, id) Plot, idvg, XYY (LIN LIN LIN), VG, ID, gm DataArray, ID 3.30926e-09 5.27493e-09 8.37482e-09 1.32378e-08 2.0826e-08 3.26045e-08 5.07992e-08 7.87815e-08 1.21628e-07 1.86884e-07 2.85483e-07 4.32645e-07 6.48363e-07 9.56952e-07 1.38505e-06 1.95745e-06 2.69007e-06 3.5813e-06 4.60938e-06 5.74183e-06 6.94661e-06 8.19647e-06 9.46931e-06 1.07477e-05 1.20181e-05 1.32705e-05 1.44975e-05 1.56937e-05 1.68554e-05 1.79803e-05 1.90667e-05 2.01137e-05 2.11208e-05 2.2088e-05 2.30155e-05 2.39034e-05 2.47524e-05 2.55629e-05 2.63358e-05 2.70715e-05 2.77711e-05 2.84352e-05 2.90647e-05 2.96606e-05 3.02237e-05 3.07551e-05 3.12556e-05 3.17262e-05 3.21679e-05 3.25817e-05 3.29685e-05 1.97765e-09 3.16929e-09 5.06125e-09 8.05035e-09 1.27478e-08 2.00897e-08 3.15027e-08 4.91556e-08 7.63337e-08 1.17985e-07 1.81465e-07 2.77439e-07 4.20766e-07 6.30979e-07 9.31846e-07 1.3494e-06 1.9078e-06 2.62241e-06 3.49122e-06 4.49244e-06 5.59392e-06 6.76413e-06 7.97634e-06 9.20897e-06 1.04451e-05 1.16716e-05 1.2879e-05 1.40602e-05 1.52102e-05 1.63257e-05 1.74045e-05 1.84453e-05 1.94473e-05 2.04103e-05 2.13343e-05 2.22197e-05 2.30668e-05 2.38762e-05 2.46487e-05 2.53849e-05 2.60855e-05 2.67516e-05 2.73838e-05 2.79831e-05 2.85504e-05 2.90866e-05 2.95926e-05 3.00695e-05 3.05181e-05 3.09393e-05 3.13342e-05 1.19861e-09 1.92946e-09 3.09664e-09 4.95241e-09 7.88837e-09 1.25083e-08 1.97376e-08 3.09876e-08 4.84042e-08 7.52381e-08 1.16384e-07 1.79115e-07 2.73967e-07 4.15598e-07 6.23239e-07 9.20214e-07 1.33193e-06 1.88174e-06 2.58394e-06 3.4355e-06 4.41411e-06 5.48792e-06 6.62606e-06 7.80258e-06 8.99661e-06 1.01919e-05 1.1376e-05 1.25398e-05 1.36767e-05 1.47822e-05 1.58533e-05 1.68881e-05 1.78854e-05 1.88447e-05 1.97659e-05 2.06493e-05 2.14951e-05 2.2304e-05 2.30766e-05 2.38137e-05 2.45159e-05 2.51841e-05 2.58192e-05 2.64221e-05 2.69936e-05 2.75346e-05 2.80461e-05 2.85291e-05 2.89843e-05 2.94128e-05 2.98154e-05 7.35963e-10 1.18916e-09 1.91653e-09 3.07945e-09 4.93039e-09 7.86158e-09 1.24782e-08 1.97081e-08 3.0967e-08 4.84074e-08 7.52897e-08 1.1652e-07 1.79379e-07 2.74391e-07 4.16151e-07 6.23718e-07 9.20055e-07 1.32993e-06 1.87567e-06 2.57014e-06 3.40867e-06 4.36811e-06 5.4169e-06 6.52506e-06 7.66757e-06 8.82444e-06 9.98018e-06 1.11231e-05 1.22447e-05 1.3339e-05 1.44017e-05 1.54301e-05 1.64227e-05 1.73786e-05 1.82974e-05 1.91791e-05 2.0024e-05 2.08327e-05 2.16058e-05 2.23439e-05 2.30479e-05 2.37185e-05 2.43565e-05 2.4963e-05 2.55387e-05 2.60845e-05 2.66013e-05 2.70901e-05 2.75517e-05 2.79871e-05 2.83971e-05 4.57392e-10 7.41355e-10 1.19904e-09 1.93428e-09 3.11072e-09 4.98453e-09 7.95387e-09 1.26332e-08 1.99647e-08 3.13862e-08 4.90836e-08 7.63665e-08 1.1821e-07 1.81983e-07 2.78301e-07 4.21811e-07 6.31504e-07 9.30043e-07 1.34151e-06 1.88703e-06 2.57758e-06 3.40645e-06 4.34942e-06 5.3753e-06 6.45515e-06 7.56504e-06 8.68601e-06 9.80349e-06 1.09066e-05 1.19874e-05 1.30403e-05 1.40618e-05 1.50493e-05 1.60016e-05 1.6918e-05 1.77982e-05 1.86425e-05 1.94512e-05 2.02248e-05 2.09642e-05 2.167e-05 2.2343e-05 2.29841e-05 2.35941e-05 2.41738e-05 2.47242e-05 2.52462e-05 2.57406e-05 2.62084e-05 2.66503e-05 2.70673e-05 2.87487e-10 4.67188e-10 7.5786e-10 1.22669e-09 1.9803e-09 3.18677e-09 5.10929e-09 8.15686e-09 1.29607e-08 2.04885e-08 3.22171e-08 5.03908e-08 7.84056e-08 1.2136e-07 1.86782e-07 2.85472e-07 4.32225e-07 6.46047e-07 9.49323e-07 1.36539e-06 1.91391e-06 2.60366e-06 3.42546e-06 4.35397e-06 5.35852e-06 6.41136e-06 7.4898e-06 8.576e-06 9.65636e-06 1.07208e-05 1.17621e-05 1.27753e-05 1.3757e-05 1.47053e-05 1.56191e-05 1.64977e-05 1.73413e-05 1.81501e-05 1.89245e-05 1.96651e-05 2.03728e-05 2.10482e-05 2.16922e-05 2.23056e-05 2.28893e-05 2.34441e-05 2.3971e-05 2.44708e-05 2.49443e-05 2.53925e-05 2.58161e-05 DataSetFinish DataSetStart DataSetName, idvglin MeasurementType, DC BatchName, opt_ex22 WaferName, Silvaco DieName, Silvaco DeviceName, n10x5 Temperature, 27 FabDate, 01 Nov 2018 UserDate, 01 Nov 2018 Attribute, L, 5e-06 Attribute, W, 1e-05 NodeNames, d g s b Sweep, 1, V, G, LIN, 0, 1, CALCULATED, 51, 0.1, 0 Sweep, 2, V, B, LIN, 0, -0.4, CALCULATED, 6, 0.1, 0 Constant, V, D, 0.1, 0.1, 0 Constant, V, S, 0, 0.1, 0 Target, I, D Function, gm, derivative (vg, id) Plot, idvg, XYY (LIN LIN LIN), VG, ID, gm DataArray, ID 1.53963e-09 2.45032e-09 3.88351e-09 6.12704e-09 9.62054e-09 1.50331e-08 2.33807e-08 3.62008e-08 5.58017e-08 8.55894e-08 1.30439e-07 1.9701e-07 2.93837e-07 4.30971e-07 6.18951e-07 8.66859e-07 1.17924e-06 1.55298e-06 1.97768e-06 2.44024e-06 2.92855e-06 3.43254e-06 3.94414e-06 4.45697e-06 4.96614e-06 5.46796e-06 5.95972e-06 6.43945e-06 6.90577e-06 7.35774e-06 7.79471e-06 8.21631e-06 8.6223e-06 9.01259e-06 9.3872e-06 9.74619e-06 1.00897e-05 1.04179e-05 1.0731e-05 1.10293e-05 1.1313e-05 1.15824e-05 1.18379e-05 1.20797e-05 1.23083e-05 1.25239e-05 1.2727e-05 1.29179e-05 1.3097e-05 1.32647e-05 1.34213e-05 9.19307e-10 1.47127e-09 2.34596e-09 3.72503e-09 5.88768e-09 9.26068e-09 1.44941e-08 2.25754e-08 3.4999e-08 5.40093e-08 8.29199e-08 1.26478e-07 1.91178e-07 2.8535e-07 4.18818e-07 6.01881e-07 8.434e-07 1.14775e-06 1.51174e-06 1.92502e-06 2.37463e-06 2.84865e-06 3.33717e-06 3.8323e-06 4.32784e-06 4.81906e-06 5.30246e-06 5.77545e-06 6.23621e-06 6.68349e-06 7.11645e-06 7.53454e-06 7.93748e-06 8.3251e-06 8.6974e-06 9.05442e-06 9.39631e-06 9.72324e-06 1.00354e-05 1.03331e-05 1.06166e-05 1.08861e-05 1.11421e-05 1.13847e-05 1.16145e-05 1.18316e-05 1.20365e-05 1.22295e-05 1.2411e-05 1.25814e-05 1.2741e-05 5.56472e-10 8.94782e-10 1.43417e-09 2.29017e-09 3.64166e-09 5.76382e-09 9.07762e-09 1.42246e-08 2.21793e-08 3.44168e-08 5.31516e-08 8.16517e-08 1.24595e-07 1.88375e-07 2.81177e-07 4.12622e-07 5.92747e-07 8.30077e-07 1.1286e-06 1.48479e-06 1.88821e-06 2.32607e-06 2.7867e-06 3.26047e-06 3.73974e-06 4.21856e-06 4.69242e-06 5.15799e-06 5.61288e-06 6.05542e-06 6.48446e-06 6.89929e-06 7.29946e-06 7.68475e-06 8.05508e-06 8.41048e-06 8.75108e-06 9.07703e-06 9.38856e-06 9.68592e-06 9.96938e-06 1.02392e-05 1.04958e-05 1.07394e-05 1.09703e-05 1.1189e-05 1.13957e-05 1.15908e-05 1.17747e-05 1.19477e-05 1.21102e-05 3.41147e-10 5.5071e-10 8.86584e-10 1.42269e-09 2.2744e-09 3.62045e-09 5.736e-09 9.04218e-09 1.41809e-08 2.21273e-08 3.43571e-08 5.30836e-08 8.1569e-08 1.24473e-07 1.8814e-07 2.8066e-07 4.11474e-07 5.90329e-07 8.25315e-07 1.11984e-06 1.46983e-06 1.86467e-06 2.29176e-06 2.73976e-06 3.19942e-06 3.66339e-06 4.12602e-06 4.58306e-06 5.0314e-06 5.46884e-06 5.89385e-06 6.30544e-06 6.70298e-06 7.08612e-06 7.4547e-06 7.80871e-06 8.14823e-06 8.47343e-06 8.7845e-06 9.08168e-06 9.36526e-06 9.63552e-06 9.89277e-06 1.01373e-05 1.03695e-05 1.05897e-05 1.07982e-05 1.09953e-05 1.11815e-05 1.1357e-05 1.15223e-05 2.11632e-10 3.42761e-10 5.53862e-10 8.92498e-10 1.43346e-09 2.2935e-09 3.65363e-09 5.79253e-09 9.1368e-09 1.43367e-08 2.23802e-08 3.4761e-08 5.37173e-08 8.254e-08 1.25913e-07 1.9018e-07 2.83369e-07 4.14758e-07 5.93771e-07 8.27964e-07 1.11999e-06 1.46506e-06 1.85232e-06 2.26942e-06 2.70543e-06 3.15151e-06 3.60068e-06 4.04763e-06 4.48838e-06 4.92008e-06 5.3407e-06 5.74888e-06 6.14375e-06 6.52479e-06 6.89173e-06 7.24448e-06 7.58308e-06 7.90765e-06 8.21838e-06 8.51551e-06 8.79929e-06 9.07003e-06 9.32801e-06 9.57356e-06 9.80701e-06 1.00287e-05 1.02389e-05 1.0438e-05 1.06264e-05 1.08043e-05 1.09721e-05 1.32749e-10 2.15595e-10 3.49467e-10 5.65136e-10 9.11316e-10 1.46463e-09 2.3447e-09 3.737e-09 5.92708e-09 9.35202e-09 1.4678e-08 2.29168e-08 3.55969e-08 5.50047e-08 8.44914e-08 1.28802e-07 1.94318e-07 2.89034e-07 4.22064e-07 6.02471e-07 8.3717e-07 1.1279e-06 1.46904e-06 1.84948e-06 2.25718e-06 2.68171e-06 3.11467e-06 3.5495e-06 3.98125e-06 4.40623e-06 4.82184e-06 5.22626e-06 5.61828e-06 5.99715e-06 6.36245e-06 6.71399e-06 7.05172e-06 7.37574e-06 7.68621e-06 7.98334e-06 8.26738e-06 8.53862e-06 8.79735e-06 9.04388e-06 9.27854e-06 9.50164e-06 9.71352e-06 9.91451e-06 1.01049e-05 1.02851e-05 1.04554e-05 DataSetFinish DataSetStart DataSetName, idvglin MeasurementType, DC BatchName, opt_ex22 WaferName, Silvaco DieName, Silvaco DeviceName, n1x1 Temperature, 27 FabDate, 01 Nov 2018 UserDate, 01 Nov 2018 Attribute, L, 1e-06 Attribute, W, 1e-06 NodeNames, d g s b Sweep, 1, V, G, LIN, 0, 1, CALCULATED, 51, 0.1, 0 Sweep, 2, V, B, LIN, 0, -0.4, CALCULATED, 6, 0.1, 0 Constant, V, D, 0.1, 0.1, 0 Constant, V, S, 0, 0.1, 0 Target, I, D Function, gm, derivative (vg, id) Plot, idvg, XYY (LIN LIN LIN), VG, ID, gm DataArray, ID 4.35018e-10 6.95993e-10 1.10968e-09 1.76227e-09 2.78632e-09 4.38453e-09 6.86552e-09 1.06976e-08 1.65893e-08 2.56057e-08 3.93272e-08 6.00411e-08 9.09261e-08 1.36148e-07 2.00754e-07 2.9022e-07 4.09535e-07 5.61657e-07 7.45749e-07 9.56902e-07 1.18827e-06 1.43323e-06 1.6862e-06 1.94265e-06 2.19907e-06 2.45276e-06 2.70175e-06 2.94464e-06 3.18047e-06 3.4086e-06 3.62865e-06 3.8404e-06 4.04379e-06 4.2388e-06 4.42552e-06 4.60405e-06 4.77454e-06 4.93715e-06 5.09205e-06 5.23944e-06 5.3795e-06 5.51245e-06 5.63847e-06 5.75778e-06 5.87059e-06 5.97709e-06 6.07751e-06 6.17204e-06 6.26089e-06 6.34426e-06 6.42237e-06 2.59816e-10 4.17675e-10 6.6946e-10 1.0693e-09 1.70116e-09 2.69433e-09 4.24678e-09 6.66016e-09 1.03924e-08 1.61365e-08 2.49343e-08 3.8332e-08 5.85674e-08 8.87506e-08 1.32958e-07 1.96123e-07 2.83592e-07 4.00205e-07 5.48773e-07 7.28346e-07 9.34002e-07 1.15899e-06 1.39682e-06 1.64206e-06 1.89032e-06 2.13819e-06 2.3831e-06 2.62317e-06 2.85709e-06 3.08395e-06 3.30319e-06 3.51447e-06 3.71762e-06 3.91259e-06 4.09942e-06 4.2782e-06 4.44905e-06 4.61214e-06 4.76764e-06 4.91574e-06 5.05662e-06 5.1905e-06 5.31757e-06 5.43803e-06 5.55209e-06 5.65996e-06 5.76184e-06 5.85794e-06 5.94845e-06 6.03358e-06 6.11352e-06 1.57534e-10 2.54252e-10 4.09326e-10 6.57016e-10 1.05089e-09 1.67412e-09 2.65492e-09 4.18974e-09 6.57809e-09 1.02748e-08 1.5968e-08 2.46922e-08 3.79814e-08 5.80527e-08 8.79818e-08 1.31788e-07 1.94313e-07 2.80767e-07 3.95799e-07 5.4197e-07 7.18081e-07 9.1911e-07 1.13839e-06 1.36964e-06 1.60757e-06 1.84797e-06 2.0876e-06 2.32402e-06 2.55546e-06 2.7807e-06 2.99892e-06 3.20961e-06 3.41249e-06 3.60742e-06 3.79438e-06 3.97344e-06 4.14471e-06 4.30832e-06 4.46445e-06 4.61328e-06 4.75501e-06 4.88982e-06 5.01792e-06 5.13952e-06 5.25482e-06 5.36402e-06 5.46732e-06 5.56492e-06 5.65703e-06 5.74383e-06 5.82551e-06 9.68492e-11 1.56824e-10 2.53407e-10 4.08435e-10 6.56311e-10 1.05087e-09 1.67574e-09 2.65994e-09 4.20121e-09 6.60107e-09 1.03175e-08 1.60432e-08 2.48189e-08 3.81853e-08 5.83639e-08 8.84239e-08 1.32354e-07 1.94921e-07 2.81193e-07 3.95581e-07 5.40306e-07 7.13807e-07 9.10905e-07 1.12504e-06 1.35012e-06 1.58109e-06 1.81395e-06 2.04562e-06 2.27382e-06 2.49691e-06 2.71377e-06 2.92366e-06 3.12614e-06 3.32096e-06 3.50803e-06 3.68737e-06 3.85905e-06 4.02319e-06 4.17996e-06 4.32953e-06 4.47209e-06 4.60783e-06 4.73695e-06 4.85966e-06 4.97615e-06 5.08663e-06 5.1913e-06 5.29034e-06 5.38397e-06 5.47236e-06 5.55571e-06 6.03061e-11 9.79185e-11 1.58712e-10 2.56702e-10 4.14117e-10 6.65997e-10 1.06719e-09 1.70294e-09 2.70474e-09 4.27417e-09 6.71863e-09 1.05049e-08 1.63389e-08 2.52796e-08 3.88915e-08 5.94219e-08 8.99576e-08 1.34478e-07 1.97684e-07 2.8449e-07 3.99024e-07 5.43075e-07 7.14636e-07 9.08339e-07 1.11774e-06 1.337e-06 1.56132e-06 1.7869e-06 2.01087e-06 2.23112e-06 2.44613e-06 2.6549e-06 2.85676e-06 3.05134e-06 3.23845e-06 3.41801e-06 3.59008e-06 3.75474e-06 3.91213e-06 4.06242e-06 4.20579e-06 4.34244e-06 4.47255e-06 4.59633e-06 4.71397e-06 4.82568e-06 4.93164e-06 5.03207e-06 5.12714e-06 5.21705e-06 5.30197e-06 3.79976e-11 6.18382e-11 1.00491e-10 1.63013e-10 2.63853e-10 4.2594e-10 6.8542e-10 1.09888e-09 1.75423e-09 2.78709e-09 4.40533e-09 6.92585e-09 1.08297e-08 1.6844e-08 2.60575e-08 4.00743e-08 6.11864e-08 9.25182e-08 1.38054e-07 2.02436e-07 2.90401e-07 4.05743e-07 5.49735e-07 7.19859e-07 9.10561e-07 1.11555e-06 1.32926e-06 1.54716e-06 1.7657e-06 1.98221e-06 2.19475e-06 2.40195e-06 2.60291e-06 2.79705e-06 2.98405e-06 3.16376e-06 3.33615e-06 3.50128e-06 3.65926e-06 3.81025e-06 3.9544e-06 4.09191e-06 4.22297e-06 4.34777e-06 4.46651e-06 4.57939e-06 4.6866e-06 4.78833e-06 4.88478e-06 4.97612e-06 5.06255e-06 DataSetFinish DataSetStart DataSetName, idvglin MeasurementType, DC BatchName, opt_ex22 WaferName, Silvaco DieName, Silvaco DeviceName, n1x10 Temperature, 27 FabDate, 01 Nov 2018 UserDate, 01 Nov 2018 Attribute, L, 1e-05 Attribute, W, 1e-06 NodeNames, d g s b Sweep, 1, V, G, LIN, 0, 1, CALCULATED, 51, 0.1, 0 Sweep, 2, V, B, LIN, 0, -0.4, CALCULATED, 6, 0.1, 0 Constant, V, D, 0.1, 0.1, 0 Constant, V, S, 0, 0.1, 0 Target, I, D Function, gm, derivative (vg, id) Plot, idvg, XYY (LIN LIN LIN), VG, ID, gm DataArray, ID 6.95673e-11 1.10814e-10 1.758e-10 2.77655e-10 4.36447e-10 6.8274e-10 1.06297e-09 1.6475e-09 2.5422e-09 3.90413e-09 5.95993e-09 9.02314e-09 1.35022e-08 1.98888e-08 2.87157e-08 4.04716e-08 5.54607e-08 7.36328e-08 9.45383e-08 1.17524e-07 1.41952e-07 1.67288e-07 1.93098e-07 2.19042e-07 2.44855e-07 2.70338e-07 2.95342e-07 3.19762e-07 3.4352e-07 3.66564e-07 3.88858e-07 4.10381e-07 4.31119e-07 4.51066e-07 4.70221e-07 4.88587e-07 5.06169e-07 5.22977e-07 5.3902e-07 5.5431e-07 5.68862e-07 5.82689e-07 5.95806e-07 6.08231e-07 6.19981e-07 6.31072e-07 6.41525e-07 6.51357e-07 6.60587e-07 6.69235e-07 6.7732e-07 4.14031e-11 6.63135e-11 1.05832e-10 1.68214e-10 2.66163e-10 4.19122e-10 6.56726e-10 1.02402e-09 1.58926e-09 2.45519e-09 3.77431e-09 5.76692e-09 8.73813e-09 1.30861e-08 1.92907e-08 2.78724e-08 3.93083e-08 5.38937e-08 7.15741e-08 9.19022e-08 1.14231e-07 1.37934e-07 1.62483e-07 1.87456e-07 2.12519e-07 2.37418e-07 2.6196e-07 2.86007e-07 3.09458e-07 3.32243e-07 3.54315e-07 3.75644e-07 3.96213e-07 4.16011e-07 4.35036e-07 4.5329e-07 4.70779e-07 4.87512e-07 5.03498e-07 5.1875e-07 5.33281e-07 5.47106e-07 5.6024e-07 5.72699e-07 5.84501e-07 5.95662e-07 6.06201e-07 6.16136e-07 6.25485e-07 6.34267e-07 6.425e-07 2.49874e-11 4.02055e-11 6.4493e-11 1.0308e-10 1.64079e-10 2.59985e-10 4.09938e-10 6.43128e-10 1.00394e-09 1.55961e-09 2.41136e-09 3.70935e-09 5.67038e-09 8.59447e-09 1.28725e-08 1.89746e-08 2.74084e-08 3.86349e-08 5.2931e-08 7.02249e-08 9.0062e-08 1.11802e-07 1.34831e-07 1.58635e-07 1.82804e-07 2.07018e-07 2.31034e-07 2.54669e-07 2.77794e-07 3.00315e-07 3.2217e-07 3.43316e-07 3.63729e-07 3.83395e-07 4.02308e-07 4.20469e-07 4.37882e-07 4.54555e-07 4.70499e-07 4.85725e-07 5.00247e-07 5.14079e-07 5.27237e-07 5.39736e-07 5.51594e-07 5.62826e-07 5.73452e-07 5.83488e-07 5.92953e-07 6.01864e-07 6.1024e-07 1.52767e-11 2.46751e-11 3.97515e-11 6.38406e-11 1.02155e-10 1.62784e-10 2.58199e-10 4.07513e-10 6.39882e-10 9.99638e-10 1.55395e-09 2.40383e-09 3.699e-09 5.65519e-09 8.57008e-09 1.28299e-08 1.88966e-08 2.72644e-08 3.83744e-08 5.24767e-08 6.94707e-08 8.88876e-08 1.10094e-07 1.32492e-07 1.55586e-07 1.78984e-07 2.02379e-07 2.25541e-07 2.48301e-07 2.70538e-07 2.92166e-07 3.1313e-07 3.33394e-07 3.52937e-07 3.7175e-07 3.89828e-07 4.07177e-07 4.23802e-07 4.39713e-07 4.54922e-07 4.69442e-07 4.83287e-07 4.96473e-07 5.09015e-07 5.2093e-07 5.32234e-07 5.42945e-07 5.5308e-07 5.62656e-07 5.7169e-07 5.80202e-07 9.45308e-12 1.53177e-11 2.47661e-11 3.99365e-11 6.41961e-11 1.02811e-10 1.63959e-10 2.60249e-10 4.1101e-10 6.45732e-10 1.00925e-09 1.56946e-09 2.42841e-09 3.73697e-09 5.71192e-09 8.65095e-09 1.29378e-08 1.90272e-08 2.73991e-08 3.84712e-08 5.24584e-08 6.92223e-08 8.82754e-08 1.08992e-07 1.30795e-07 1.5321e-07 1.75863e-07 1.98467e-07 2.20805e-07 2.4272e-07 2.64101e-07 2.84873e-07 3.04985e-07 3.24408e-07 3.43124e-07 3.61128e-07 3.78419e-07 3.95003e-07 4.10888e-07 4.26085e-07 4.40608e-07 4.5447e-07 4.67686e-07 4.80272e-07 4.92244e-07 5.03618e-07 5.14411e-07 5.24641e-07 5.34323e-07 5.43475e-07 5.52114e-07 5.91573e-12 9.6115e-12 1.55875e-11 2.52224e-11 4.07023e-11 6.5471e-11 1.04915e-10 1.67401e-10 2.65828e-10 4.19969e-10 6.59989e-10 1.03174e-09 1.60461e-09 2.48274e-09 3.81969e-09 5.83512e-09 8.82867e-09 1.31832e-08 1.93468e-08 2.7784e-08 3.88845e-08 5.28207e-08 6.9409e-08 8.81412e-08 1.08403e-07 1.29639e-07 1.51401e-07 1.73335e-07 1.95172e-07 2.16713e-07 2.37813e-07 2.58371e-07 2.78321e-07 2.97618e-07 3.16239e-07 3.34169e-07 3.51406e-07 3.67952e-07 3.83815e-07 3.99005e-07 4.13533e-07 4.27413e-07 4.4066e-07 4.5329e-07 4.65317e-07 4.76758e-07 4.8763e-07 4.97949e-07 5.07732e-07 5.16995e-07 5.25755e-07 DataSetFinish DataSetStart DataSetName, idvglin MeasurementType, DC BatchName, opt_ex22 WaferName, Silvaco DieName, Silvaco DeviceName, n3x10 Temperature, 27 FabDate, 01 Nov 2018 UserDate, 01 Nov 2018 Attribute, L, 1e-05 Attribute, W, 3e-06 NodeNames, d g s b Sweep, 1, V, G, LIN, 0, 1, CALCULATED, 51, 0.1, 0 Sweep, 2, V, B, LIN, 0, -0.4, CALCULATED, 6, 0.1, 0 Constant, V, D, 0.1, 0.1, 0 Constant, V, S, 0, 0.1, 0 Target, I, D Function, gm, derivative (vg, id) Plot, idvg, XYY (LIN LIN LIN), VG, ID, gm DataArray, ID 2.21803e-10 3.5309e-10 5.59772e-10 8.83434e-10 1.3876e-09 2.16899e-09 3.3745e-09 5.22654e-09 8.05933e-09 1.23669e-08 1.88586e-08 2.85071e-08 4.25662e-08 6.25239e-08 8.99595e-08 1.26268e-07 1.7222e-07 2.27471e-07 2.90547e-07 3.59489e-07 4.32456e-07 5.07914e-07 5.84624e-07 6.61615e-07 7.38136e-07 8.1362e-07 8.87647e-07 9.59914e-07 1.03021e-06 1.09837e-06 1.16431e-06 1.22796e-06 1.28929e-06 1.34827e-06 1.4049e-06 1.4592e-06 1.51117e-06 1.56085e-06 1.60826e-06 1.65345e-06 1.69644e-06 1.73728e-06 1.77602e-06 1.8127e-06 1.84739e-06 1.88012e-06 1.91095e-06 1.93995e-06 1.96716e-06 1.99264e-06 2.01646e-06 1.32184e-10 2.11598e-10 3.37487e-10 5.36042e-10 8.47533e-10 1.33354e-09 2.0879e-09 3.25316e-09 5.04523e-09 7.78861e-09 1.19633e-08 1.82591e-08 2.76234e-08 4.12791e-08 6.06792e-08 8.73673e-08 1.22705e-07 1.67439e-07 2.21213e-07 2.82561e-07 3.49547e-07 4.20355e-07 4.93476e-07 5.67698e-07 6.42077e-07 7.15885e-07 7.88581e-07 8.59768e-07 9.29163e-07 9.96568e-07 1.06185e-06 1.12493e-06 1.18574e-06 1.24428e-06 1.30052e-06 1.35448e-06 1.40618e-06 1.45563e-06 1.50287e-06 1.54793e-06 1.59085e-06 1.63169e-06 1.67047e-06 1.70725e-06 1.74209e-06 1.77502e-06 1.80611e-06 1.83541e-06 1.86297e-06 1.88885e-06 1.9131e-06 7.98673e-11 1.2845e-10 2.05932e-10 3.28938e-10 5.23221e-10 8.28415e-10 1.30518e-09 2.04598e-09 3.19133e-09 4.95404e-09 7.65388e-09 1.17637e-08 1.79624e-08 2.7182e-08 4.06231e-08 5.97088e-08 8.59435e-08 1.20641e-07 1.6449e-07 2.17089e-07 2.76954e-07 3.4217e-07 4.10963e-07 4.81861e-07 5.53694e-07 6.25549e-07 6.96736e-07 7.6674e-07 8.35191e-07 9.01827e-07 9.66472e-07 1.02901e-06 1.08937e-06 1.14751e-06 1.20342e-06 1.25709e-06 1.30856e-06 1.35783e-06 1.40494e-06 1.44992e-06 1.49281e-06 1.53366e-06 1.57252e-06 1.60942e-06 1.64441e-06 1.67756e-06 1.7089e-06 1.7385e-06 1.7664e-06 1.79266e-06 1.81734e-06 4.8878e-11 7.89177e-11 1.27077e-10 2.03972e-10 3.26179e-10 5.19396e-10 8.23199e-10 1.29819e-09 2.03676e-09 3.17935e-09 4.93856e-09 7.63365e-09 1.17361e-08 1.79215e-08 2.71144e-08 4.05007e-08 5.94772e-08 8.55065e-08 1.1984e-07 1.63085e-07 2.14755e-07 2.73335e-07 3.36938e-07 4.03836e-07 4.72612e-07 5.42142e-07 6.1156e-07 6.80211e-07 7.47615e-07 8.1343e-07 8.77418e-07 9.39422e-07 9.99341e-07 1.05712e-06 1.11273e-06 1.16616e-06 1.21743e-06 1.26655e-06 1.31356e-06 1.35849e-06 1.40138e-06 1.44227e-06 1.4812e-06 1.51822e-06 1.55339e-06 1.58674e-06 1.61834e-06 1.64823e-06 1.67646e-06 1.70308e-06 1.72816e-06 3.02716e-11 4.90359e-11 7.92516e-11 1.27736e-10 2.05215e-10 3.28444e-10 5.23408e-10 8.30141e-10 1.30995e-09 2.05633e-09 3.21136e-09 4.99e-09 7.71476e-09 1.18608e-08 1.81069e-08 2.73768e-08 4.08477e-08 5.98929e-08 8.59291e-08 1.20133e-07 1.63002e-07 2.13942e-07 2.71397e-07 3.33508e-07 3.98612e-07 4.65351e-07 5.32659e-07 5.99718e-07 6.65916e-07 7.3081e-07 7.94086e-07 8.55532e-07 9.1501e-07 9.72434e-07 1.02776e-06 1.08097e-06 1.13207e-06 1.18107e-06 1.228e-06 1.27289e-06 1.31578e-06 1.35672e-06 1.39574e-06 1.43289e-06 1.46823e-06 1.50179e-06 1.53363e-06 1.56379e-06 1.59234e-06 1.61931e-06 1.64477e-06 1.89583e-11 3.07939e-11 4.99236e-11 8.07497e-11 1.30246e-10 2.09385e-10 3.35313e-10 5.34623e-10 8.48285e-10 1.33904e-09 2.10255e-09 3.28414e-09 5.10357e-09 7.88994e-09 1.21268e-08 1.85014e-08 2.79428e-08 4.16237e-08 6.08949e-08 8.7122e-08 1.21392e-07 1.6407e-07 2.14436e-07 2.70884e-07 3.31601e-07 3.9499e-07 4.59765e-07 5.24922e-07 5.89697e-07 6.53522e-07 7.15993e-07 7.76826e-07 8.35833e-07 8.92894e-07 9.47938e-07 1.00093e-06 1.05187e-06 1.10076e-06 1.14762e-06 1.19249e-06 1.2354e-06 1.27639e-06 1.3155e-06 1.35278e-06 1.38828e-06 1.42204e-06 1.45411e-06 1.48455e-06 1.51339e-06 1.54069e-06 1.56651e-06 DataSetFinish DataSetStart DataSetName, idvgsat MeasurementType, DC BatchName, opt_ex22 WaferName, Silvaco DieName, Silvaco DeviceName, n10x1 Temperature, 27 FabDate, 01 Nov 2018 UserDate, 01 Nov 2018 Attribute, L, 1e-06 Attribute, W, 1e-05 NodeNames, d g s b Sweep, 1, V, G, LIN, 0, 1, CALCULATED, 51, 0.1, 0 Sweep, 2, V, B, LIN, 0, -0.4, CALCULATED, 6, 0.1, 0 Constant, V, D, 1, 0.1, 0 Constant, V, S, 0, 0.1, 0 Target, I, D Function, gm, derivative (vg, id) Plot, idvg, XYY (LIN LIN LIN), VG, ID, gm DataArray, ID 9.51537e-09 1.51914e-08 2.41521e-08 3.82093e-08 6.01018e-08 9.39194e-08 1.4569e-07 2.2418e-07 3.41957e-07 5.16747e-07 7.73029e-07 1.14364e-06 1.67091e-06 2.40649e-06 3.4092e-06 4.7405e-06 6.45815e-06 8.60956e-06 1.12265e-05 1.43227e-05 1.7894e-05 2.19215e-05 2.63755e-05 3.12199e-05 3.6416e-05 4.19253e-05 4.77108e-05 5.37389e-05 5.99788e-05 6.64032e-05 7.29876e-05 7.971e-05 8.65509e-05 9.34923e-05 0.000100518 0.000107613 0.000114763 0.000121957 0.00012918 0.000136423 0.000143675 0.000150926 0.000158166 0.000165387 0.000172582 0.000179741 0.00018686 0.00019393 0.000200947 0.000207905 0.000214798 5.70241e-09 9.15251e-09 1.4639e-08 2.33165e-08 3.69542e-08 5.82309e-08 9.11525e-08 1.4163e-07 2.18266e-07 3.334e-07 5.04435e-07 7.55398e-07 1.11851e-06 1.63525e-06 2.3562e-06 3.33886e-06 4.64314e-06 6.3251e-06 8.43045e-06 1.09894e-05 1.40142e-05 1.74998e-05 2.14267e-05 2.57653e-05 3.04796e-05 3.55316e-05 4.08833e-05 4.6499e-05 5.23457e-05 5.83939e-05 6.46171e-05 7.09919e-05 7.74972e-05 8.41143e-05 9.08263e-05 9.76177e-05 0.000104474 0.000111383 0.000118333 0.000125311 0.000132307 0.000139311 0.000146315 0.00015331 0.000160287 0.000167239 0.000174159 0.00018104 0.000187877 0.000194664 0.000201396 3.46692e-09 5.58867e-09 8.98297e-09 1.43882e-08 2.29489e-08 3.64201e-08 5.74622e-08 9.00558e-08 1.40078e-07 2.16081e-07 3.30329e-07 5.00105e-07 7.49241e-07 1.10963e-06 1.62223e-06 2.33679e-06 3.30958e-06 4.59888e-06 6.25873e-06 8.3326e-06 1.08485e-05 1.38167e-05 1.72309e-05 2.10708e-05 2.53063e-05 2.99021e-05 3.48205e-05 4.00249e-05 4.54803e-05 5.11551e-05 5.70209e-05 6.30523e-05 6.9227e-05 7.55249e-05 8.19283e-05 8.84211e-05 9.49887e-05 0.000101618 0.000108296 0.000115013 0.000121756 0.000128517 0.000135286 0.000142055 0.000148815 0.000155559 0.000162279 0.000168971 0.000175626 0.00018224 0.000188808 2.1361e-09 3.45566e-09 5.57704e-09 8.9744e-09 1.439e-08 2.29749e-08 3.64954e-08 5.76292e-08 9.03834e-08 1.40672e-07 2.17097e-07 3.3198e-07 5.02662e-07 7.52997e-07 1.1148e-06 1.62876e-06 2.34399e-06 3.31563e-06 4.60019e-06 6.24941e-06 8.30408e-06 1.07895e-05 1.37137e-05 1.70686e-05 2.08328e-05 2.49761e-05 2.94635e-05 3.42582e-05 3.93245e-05 4.46289e-05 5.0141e-05 5.58336e-05 6.16826e-05 6.76667e-05 7.37671e-05 7.99669e-05 8.62509e-05 9.26055e-05 9.9018e-05 0.000105477 0.000111972 0.000118492 0.000125029 0.000131574 0.000138119 0.000144656 0.000151178 0.000157679 0.000164153 0.000170593 0.000176995 1.33253e-09 2.16203e-09 3.501e-09 5.65541e-09 9.1083e-09 1.46161e-08 2.3352e-08 3.7116e-08 5.86363e-08 9.19927e-08 1.43202e-07 2.21005e-07 3.37903e-07 5.11447e-07 7.65707e-07 1.13264e-06 1.65286e-06 2.37499e-06 3.35306e-06 4.6417e-06 6.29005e-06 8.33588e-06 1.08014e-05 1.3692e-05 1.69976e-05 2.06958e-05 2.47561e-05 2.9144e-05 3.38236e-05 3.87604e-05 4.39224e-05 4.92804e-05 5.48086e-05 6.04843e-05 6.62874e-05 7.21999e-05 7.8206e-05 8.42915e-05 9.04435e-05 9.66501e-05 0.000102901 0.000109185 0.000115494 0.000121818 0.00012815 0.000134483 0.000140808 0.00014712 0.000153411 0.000159678 0.000165913 8.40874e-10 1.36766e-09 2.22086e-09 3.59902e-09 5.81783e-09 9.37568e-09 1.5053e-08 2.40597e-08 3.82513e-08 6.04372e-08 9.48147e-08 1.47564e-07 2.2765e-07 3.47864e-07 5.26111e-07 7.86843e-07 1.16235e-06 1.69331e-06 2.42797e-06 3.41919e-06 4.71959e-06 6.37544e-06 8.42113e-06 1.08755e-05 1.37411e-05 1.70057e-05 2.06459e-05 2.4631e-05 2.89269e-05 3.3499e-05 3.8314e-05 4.33413e-05 4.85534e-05 5.39257e-05 5.94367e-05 6.50676e-05 7.08016e-05 7.66236e-05 8.25205e-05 8.848e-05 9.4491e-05 0.000100543 0.000106628 0.000112736 0.000118858 0.000124989 0.000131119 0.000137243 0.000143355 0.000149448 0.000155518 DataSetFinish DataSetStart DataSetName, idvgsat MeasurementType, DC BatchName, opt_ex22 WaferName, Silvaco DieName, Silvaco DeviceName, n10x10 Temperature, 27 FabDate, 01 Nov 2018 UserDate, 01 Nov 2018 Attribute, L, 1e-05 Attribute, W, 1e-05 NodeNames, d g s b Sweep, 1, V, G, LIN, 0, 1, CALCULATED, 51, 0.1, 0 Sweep, 2, V, B, LIN, 0, -0.4, CALCULATED, 6, 0.1, 0 Constant, V, D, 1, 0.1, 0 Constant, V, S, 0, 0.1, 0 Target, I, D Function, gm, derivative (vg, id) Plot, idvg, XYY (LIN LIN LIN), VG, ID, gm DataArray, ID 1.47104e-09 2.33606e-09 3.69081e-09 5.79692e-09 9.04413e-09 1.40059e-08 2.15152e-08 3.27653e-08 4.94386e-08 7.3856e-08 1.09125e-07 1.59233e-07 2.29024e-07 3.23977e-07 4.49784e-07 6.11778e-07 8.14349e-07 1.0605e-06 1.35162e-06 1.68756e-06 2.06687e-06 2.48714e-06 2.94537e-06 3.43828e-06 3.96257e-06 4.51503e-06 5.09267e-06 5.69274e-06 6.31271e-06 6.95029e-06 7.6034e-06 8.2701e-06 8.94863e-06 9.63733e-06 1.03347e-05 1.10392e-05 1.17495e-05 1.24643e-05 1.31823e-05 1.39025e-05 1.46237e-05 1.53449e-05 1.60651e-05 1.67834e-05 1.74989e-05 1.82109e-05 1.89187e-05 1.96215e-05 2.03187e-05 2.10098e-05 2.16942e-05 8.79266e-10 1.40512e-09 2.23575e-09 3.53928e-09 5.56974e-09 8.70626e-09 1.35074e-08 2.07854e-08 3.17044e-08 4.79066e-08 7.16578e-08 1.05992e-07 1.54807e-07 2.22833e-07 3.15425e-07 4.3814e-07 5.96174e-07 7.93783e-07 1.03384e-06 1.31764e-06 1.64495e-06 2.01424e-06 2.42308e-06 2.86847e-06 3.34714e-06 3.85583e-06 4.39137e-06 4.95085e-06 5.53157e-06 6.13109e-06 6.74721e-06 7.37791e-06 8.02136e-06 8.67587e-06 9.33988e-06 1.00119e-05 1.06906e-05 1.13747e-05 1.2063e-05 1.27543e-05 1.34476e-05 1.41418e-05 1.4836e-05 1.55292e-05 1.62207e-05 1.69097e-05 1.75954e-05 1.82771e-05 1.89543e-05 1.96264e-05 2.02927e-05 5.3245e-10 8.55287e-10 1.36888e-09 2.18138e-09 3.45831e-09 5.4501e-09 8.53085e-09 1.32521e-08 2.04161e-08 3.11729e-08 4.71434e-08 7.05629e-08 1.04421e-07 1.5255e-07 2.19592e-07 3.10786e-07 4.3154e-07 5.86881e-07 7.8088e-07 1.01623e-06 1.29407e-06 1.61404e-06 1.97453e-06 2.37307e-06 2.80666e-06 3.27206e-06 3.76607e-06 4.2856e-06 4.8278e-06 5.39009e-06 5.9701e-06 6.56572e-06 7.17504e-06 7.7963e-06 8.4279e-06 9.06838e-06 9.71636e-06 1.03706e-05 1.10298e-05 1.16929e-05 1.23588e-05 1.30266e-05 1.36952e-05 1.43638e-05 1.50316e-05 1.56977e-05 1.63615e-05 1.70223e-05 1.76795e-05 1.83324e-05 1.89806e-05 3.2642e-10 5.2656e-10 8.46849e-10 1.35697e-09 2.16483e-09 3.43572e-09 5.41986e-09 8.49114e-09 1.32008e-08 2.03505e-08 3.10885e-08 4.70314e-08 7.04045e-08 1.04176e-07 1.52138e-07 2.18862e-07 3.09475e-07 4.29228e-07 5.82948e-07 7.74484e-07 1.0063e-06 1.27934e-06 1.59309e-06 1.94584e-06 2.33508e-06 2.75781e-06 3.21085e-06 3.69106e-06 4.19546e-06 4.72128e-06 5.26604e-06 5.82749e-06 6.40361e-06 6.99258e-06 7.59274e-06 8.20259e-06 8.82073e-06 9.44588e-06 1.00768e-05 1.07125e-05 1.13518e-05 1.19937e-05 1.26373e-05 1.32818e-05 1.39262e-05 1.45699e-05 1.52121e-05 1.58522e-05 1.64894e-05 1.71234e-05 1.77534e-05 2.02443e-10 3.27709e-10 5.29159e-10 8.51821e-10 1.36613e-09 2.18117e-09 3.46412e-09 5.468e-09 8.57078e-09 1.33295e-08 2.05533e-08 3.14e-08 4.74964e-08 7.10757e-08 1.05105e-07 1.53355e-07 2.20342e-07 3.11081e-07 4.30657e-07 5.83672e-07 7.73714e-07 1.00299e-06 1.27221e-06 1.58068e-06 1.9266e-06 2.3074e-06 2.72012e-06 3.16162e-06 3.62886e-06 4.11896e-06 4.62926e-06 5.15739e-06 5.70121e-06 6.2588e-06 6.82845e-06 7.40858e-06 7.99779e-06 8.59476e-06 9.19829e-06 9.80726e-06 1.04206e-05 1.10374e-05 1.16566e-05 1.22774e-05 1.28991e-05 1.35207e-05 1.41417e-05 1.47613e-05 1.5379e-05 1.5994e-05 1.6606e-05 1.26928e-10 2.06064e-10 3.33844e-10 5.39474e-10 8.69027e-10 1.39457e-09 2.22772e-09 3.53945e-09 5.5884e-09 8.76065e-09 1.36245e-08 2.10044e-08 3.20778e-08 4.84947e-08 7.25121e-08 1.07113e-07 1.56063e-07 2.23829e-07 3.15318e-07 4.35433e-07 5.88525e-07 7.77895e-07 1.00546e-06 1.27168e-06 1.57566e-06 1.91551e-06 2.28863e-06 2.69207e-06 3.12277e-06 3.57779e-06 4.05436e-06 4.54995e-06 5.0623e-06 5.58939e-06 6.1294e-06 6.68071e-06 7.24185e-06 7.8115e-06 8.38843e-06 8.9715e-06 9.55966e-06 1.01519e-05 1.07474e-05 1.13452e-05 1.19446e-05 1.25447e-05 1.31448e-05 1.37444e-05 1.43426e-05 1.49391e-05 1.55332e-05 DataSetFinish DataSetStart DataSetName, idvgsat MeasurementType, DC BatchName, opt_ex22 WaferName, Silvaco DieName, Silvaco DeviceName, n10x2 Temperature, 27 FabDate, 01 Nov 2018 UserDate, 01 Nov 2018 Attribute, L, 2e-06 Attribute, W, 1e-05 NodeNames, d g s b Sweep, 1, V, G, LIN, 0, 1, CALCULATED, 51, 0.1, 0 Sweep, 2, V, B, LIN, 0, -0.4, CALCULATED, 6, 0.1, 0 Constant, V, D, 1, 0.1, 0 Constant, V, S, 0, 0.1, 0 Target, I, D Function, gm, derivative (vg, id) Plot, idvg, XYY (LIN LIN LIN), VG, ID, gm DataArray, ID 6.10412e-09 9.71731e-09 1.53968e-08 2.42622e-08 3.79927e-08 5.90741e-08 9.11399e-08 1.3943e-07 2.11389e-07 3.17395e-07 4.71556e-07 6.92369e-07 1.00293e-06 1.43033e-06 2.00387e-06 2.75243e-06 3.70127e-06 4.8692e-06 6.2669e-06 7.89654e-06 9.75268e-06 1.1824e-05 1.40953e-05 1.65493e-05 1.9168e-05 2.19341e-05 2.48311e-05 2.78439e-05 3.09589e-05 3.41636e-05 3.74468e-05 4.07984e-05 4.42091e-05 4.76704e-05 5.11744e-05 5.47137e-05 5.82815e-05 6.18712e-05 6.54767e-05 6.90925e-05 7.27129e-05 7.6333e-05 7.9948e-05 8.35534e-05 8.71451e-05 9.07191e-05 9.4272e-05 9.78004e-05 0.000101301 0.000104772 0.00010821 3.65149e-09 5.84705e-09 9.32583e-09 1.48046e-08 2.33732e-08 3.66683e-08 5.71169e-08 8.827e-08 1.35252e-07 2.05347e-07 3.08708e-07 4.59139e-07 6.74735e-07 9.78092e-07 1.39567e-06 1.95612e-06 2.68754e-06 3.61444e-06 4.75491e-06 6.119e-06 7.70834e-06 9.51717e-06 1.1534e-05 1.37435e-05 1.61286e-05 1.86716e-05 2.13553e-05 2.41638e-05 2.70823e-05 3.00976e-05 3.31976e-05 3.63718e-05 3.96103e-05 4.29043e-05 4.62458e-05 4.96273e-05 5.30418e-05 5.64829e-05 5.99445e-05 6.34209e-05 6.69068e-05 7.03971e-05 7.38872e-05 7.73725e-05 8.0849e-05 8.43128e-05 8.77604e-05 9.11883e-05 9.45936e-05 9.79734e-05 0.000101325 2.21437e-09 3.56281e-09 5.71356e-09 9.1263e-09 1.45087e-08 2.29377e-08 3.60327e-08 5.61962e-08 8.69451e-08 1.33355e-07 2.02635e-07 3.04831e-07 4.53577e-07 6.66718e-07 9.66473e-07 1.37878e-06 1.93158e-06 2.65213e-06 3.56393e-06 4.6841e-06 6.02173e-06 7.57773e-06 9.3458e-06 1.13142e-05 1.34676e-05 1.5789e-05 1.82612e-05 2.08674e-05 2.35919e-05 2.64207e-05 2.93409e-05 3.23412e-05 3.54112e-05 3.85417e-05 4.17244e-05 4.49516e-05 4.82163e-05 5.15119e-05 5.48324e-05 5.81721e-05 6.15257e-05 6.48882e-05 6.82549e-05 7.16215e-05 7.49837e-05 7.83378e-05 8.16802e-05 8.50076e-05 8.83168e-05 9.1605e-05 9.48697e-05 1.36012e-09 2.19697e-09 3.53903e-09 5.68195e-09 9.08581e-09 1.44593e-08 2.28817e-08 3.5976e-08 5.61506e-08 8.69299e-08 1.33397e-07 2.02764e-07 3.05064e-07 4.53881e-07 6.66929e-07 9.66168e-07 1.37708e-06 1.92687e-06 2.64185e-06 3.54435e-06 4.65025e-06 5.9675e-06 7.49607e-06 9.22903e-06 1.11543e-05 1.32566e-05 1.55193e-05 1.79252e-05 2.04583e-05 2.31034e-05 2.58471e-05 2.8677e-05 3.15823e-05 3.45532e-05 3.75809e-05 4.06577e-05 4.37762e-05 4.69298e-05 5.01125e-05 5.33186e-05 5.65426e-05 5.97798e-05 6.30253e-05 6.62749e-05 6.95244e-05 7.277e-05 7.60082e-05 7.92355e-05 8.2449e-05 8.56457e-05 8.88229e-05 8.45458e-10 1.37007e-09 2.21521e-09 3.57171e-09 5.73938e-09 9.18488e-09 1.46272e-08 2.31612e-08 3.64328e-08 5.68833e-08 8.80819e-08 1.3517e-07 2.05431e-07 3.08969e-07 4.59418e-07 6.74468e-07 9.75902e-07 1.38878e-06 1.93958e-06 2.65352e-06 3.55163e-06 4.64835e-06 5.95032e-06 7.45643e-06 9.15906e-06 1.10458e-05 1.31015e-05 1.53095e-05 1.76534e-05 2.01176e-05 2.26877e-05 2.53506e-05 2.80947e-05 3.09098e-05 3.37865e-05 3.67166e-05 3.96928e-05 4.27081e-05 4.57565e-05 4.88321e-05 5.19296e-05 5.50442e-05 5.8171e-05 6.13058e-05 6.44445e-05 6.75832e-05 7.07185e-05 7.38469e-05 7.69653e-05 8.0071e-05 8.3161e-05 5.31452e-10 8.6354e-10 1.40052e-09 2.26617e-09 3.65642e-09 5.87909e-09 9.41328e-09 1.49969e-08 2.3753e-08 3.73684e-08 5.83424e-08 9.03239e-08 1.3856e-07 2.10466e-07 3.16294e-07 4.69812e-07 6.88774e-07 9.9485e-07 1.41269e-06 1.96801e-06 2.68483e-06 3.58271e-06 4.67452e-06 5.96543e-06 7.45321e-06 9.12949e-06 1.09816e-05 1.29943e-05 1.51515e-05 1.74372e-05 1.98364e-05 2.23354e-05 2.49217e-05 2.75844e-05 3.03137e-05 3.3101e-05 3.59385e-05 3.88192e-05 4.17367e-05 4.46852e-05 4.76594e-05 5.06542e-05 5.3665e-05 5.66874e-05 5.97174e-05 6.27512e-05 6.57851e-05 6.88159e-05 7.18405e-05 7.48559e-05 7.78594e-05 DataSetFinish DataSetStart DataSetName, idvgsat MeasurementType, DC BatchName, opt_ex22 WaferName, Silvaco DieName, Silvaco DeviceName, n10x5 Temperature, 27 FabDate, 01 Nov 2018 UserDate, 01 Nov 2018 Attribute, L, 5e-06 Attribute, W, 1e-05 NodeNames, d g s b Sweep, 1, V, G, LIN, 0, 1, CALCULATED, 51, 0.1, 0 Sweep, 2, V, B, LIN, 0, -0.4, CALCULATED, 6, 0.1, 0 Constant, V, D, 1, 0.1, 0 Constant, V, S, 0, 0.1, 0 Target, I, D Function, gm, derivative (vg, id) Plot, idvg, XYY (LIN LIN LIN), VG, ID, gm DataArray, ID 2.81101e-09 4.46674e-09 7.0623e-09 1.11015e-08 1.73362e-08 2.68743e-08 4.13274e-08 6.30085e-08 9.51844e-08 1.42375e-07 2.10655e-07 3.07867e-07 4.43601e-07 6.28806e-07 8.74979e-07 1.19303e-06 1.59206e-06 2.07846e-06 2.65537e-06 3.32275e-06 4.07786e-06 4.91591e-06 5.83089e-06 6.81613e-06 7.86489e-06 8.97062e-06 1.01272e-05 1.1329e-05 1.25708e-05 1.3848e-05 1.51564e-05 1.64919e-05 1.78512e-05 1.92307e-05 2.06275e-05 2.20385e-05 2.34611e-05 2.48927e-05 2.63307e-05 2.77729e-05 2.92171e-05 3.06613e-05 3.21034e-05 3.35418e-05 3.49746e-05 3.64003e-05 3.78176e-05 3.92249e-05 4.06212e-05 4.20052e-05 4.33759e-05 1.68044e-09 2.68683e-09 4.27775e-09 6.77668e-09 1.06731e-08 1.66988e-08 2.59334e-08 3.99493e-08 6.10044e-08 9.2289e-08 1.38218e-07 2.04726e-07 2.99477e-07 4.31844e-07 6.12525e-07 8.52745e-07 1.16313e-06 1.55251e-06 2.02702e-06 2.58956e-06 3.23993e-06 3.97525e-06 4.79069e-06 5.6802e-06 6.63718e-06 7.65493e-06 8.72703e-06 9.84748e-06 1.10108e-05 1.2212e-05 1.34465e-05 1.47103e-05 1.59997e-05 1.73112e-05 1.86417e-05 1.99883e-05 2.13482e-05 2.27188e-05 2.40977e-05 2.54827e-05 2.68715e-05 2.82622e-05 2.96528e-05 3.10416e-05 3.24268e-05 3.3807e-05 3.51806e-05 3.65464e-05 3.7903e-05 3.92494e-05 4.05844e-05 1.01793e-09 1.63581e-09 2.61943e-09 4.1767e-09 6.62629e-09 1.04511e-08 1.63735e-08 2.54603e-08 3.92657e-08 6.00212e-08 9.08785e-08 1.36196e-07 2.01823e-07 2.95303e-07 4.25837e-07 6.03894e-07 8.40406e-07 1.14565e-06 1.52811e-06 1.99351e-06 2.54444e-06 3.18045e-06 3.89847e-06 4.69359e-06 5.55976e-06 6.49045e-06 7.47908e-06 8.51938e-06 9.60552e-06 1.07322e-05 1.18946e-05 1.30884e-05 1.43097e-05 1.55549e-05 1.6821e-05 1.81047e-05 1.94035e-05 2.07147e-05 2.20359e-05 2.33649e-05 2.46995e-05 2.60377e-05 2.73776e-05 2.87175e-05 3.00558e-05 3.13907e-05 3.2721e-05 3.40453e-05 3.53622e-05 3.66708e-05 3.79698e-05 6.24314e-10 1.00745e-09 1.62092e-09 2.59862e-09 4.14814e-09 6.58795e-09 1.04008e-08 1.63093e-08 2.53804e-08 3.9168e-08 5.9902e-08 9.0728e-08 1.35988e-07 2.01495e-07 2.94719e-07 4.24727e-07 6.01775e-07 8.36486e-07 1.13874e-06 1.51656e-06 1.97522e-06 2.51691e-06 3.14081e-06 3.84369e-06 4.62052e-06 5.46528e-06 6.37152e-06 7.33282e-06 8.34308e-06 9.39669e-06 1.04885e-05 1.1614e-05 1.27691e-05 1.39499e-05 1.51533e-05 1.6376e-05 1.76154e-05 1.88688e-05 2.01339e-05 2.14083e-05 2.26899e-05 2.39768e-05 2.52671e-05 2.65591e-05 2.78511e-05 2.91415e-05 3.04289e-05 3.17121e-05 3.29896e-05 3.42605e-05 3.55235e-05 3.87399e-10 6.27284e-10 1.01323e-09 1.63174e-09 2.61824e-09 4.18279e-09 6.64768e-09 1.05015e-08 1.64752e-08 2.56477e-08 3.95891e-08 6.05491e-08 9.16959e-08 1.37391e-07 2.03451e-07 2.97311e-07 4.27935e-07 6.05374e-07 8.39923e-07 1.14102e-06 1.51615e-06 1.97007e-06 2.50448e-06 3.11821e-06 3.80778e-06 4.56808e-06 5.39312e-06 6.27657e-06 7.21219e-06 8.1941e-06 9.21689e-06 1.02757e-05 1.13662e-05 1.24844e-05 1.36268e-05 1.47903e-05 1.59721e-05 1.71694e-05 1.83798e-05 1.96011e-05 2.08312e-05 2.20681e-05 2.331e-05 2.4555e-05 2.58016e-05 2.70483e-05 2.82936e-05 2.95362e-05 3.07748e-05 3.20082e-05 3.32355e-05 2.43039e-10 3.94654e-10 6.39554e-10 1.03384e-09 1.66608e-09 2.67496e-09 4.27559e-09 6.79786e-09 1.07416e-08 1.68541e-08 2.6237e-08 4.04912e-08 6.19068e-08 9.37e-08 1.40283e-07 2.0751e-07 3.02814e-07 4.35078e-07 6.14145e-07 8.49956e-07 1.15146e-06 1.52556e-06 1.97641e-06 2.50519e-06 3.11035e-06 3.78815e-06 4.53344e-06 5.34024e-06 6.20238e-06 7.11383e-06 8.06893e-06 9.06252e-06 1.009e-05 1.11472e-05 1.22304e-05 1.33364e-05 1.44622e-05 1.5605e-05 1.67624e-05 1.79322e-05 1.91121e-05 2.03003e-05 2.14949e-05 2.26942e-05 2.38965e-05 2.51003e-05 2.63042e-05 2.75069e-05 2.87071e-05 2.99036e-05 3.10954e-05 DataSetFinish DataSetStart DataSetName, idvgsat MeasurementType, DC BatchName, opt_ex22 WaferName, Silvaco DieName, Silvaco DeviceName, n1x1 Temperature, 27 FabDate, 01 Nov 2018 UserDate, 01 Nov 2018 Attribute, L, 1e-06 Attribute, W, 1e-06 NodeNames, d g s b Sweep, 1, V, G, LIN, 0, 1, CALCULATED, 51, 0.1, 0 Sweep, 2, V, B, LIN, 0, -0.4, CALCULATED, 6, 0.1, 0 Constant, V, D, 1, 0.1, 0 Constant, V, S, 0, 0.1, 0 Target, I, D Function, gm, derivative (vg, id) Plot, idvg, XYY (LIN LIN LIN), VG, ID, gm DataArray, ID 8.16831e-10 1.30582e-09 2.07937e-09 3.29578e-09 5.19536e-09 8.13858e-09 1.26592e-08 1.95371e-08 2.98963e-08 4.53314e-08 6.8062e-08 1.01099e-07 1.48384e-07 2.14825e-07 3.06158e-07 4.28569e-07 5.881e-07 7.89969e-07 1.03797e-06 1.33409e-06 1.6785e-06 2.06971e-06 2.50503e-06 2.98094e-06 3.49357e-06 4.03895e-06 4.61328e-06 5.21303e-06 5.83498e-06 6.47626e-06 7.13432e-06 7.80685e-06 8.49181e-06 9.18736e-06 9.89182e-06 1.06037e-05 1.13215e-05 1.20439e-05 1.27697e-05 1.34979e-05 1.42272e-05 1.49567e-05 1.56855e-05 1.64127e-05 1.71375e-05 1.78591e-05 1.85767e-05 1.92899e-05 1.99979e-05 2.07001e-05 2.13962e-05 4.8814e-10 7.84341e-10 1.25619e-09 2.00401e-09 3.18212e-09 5.02519e-09 7.88575e-09 1.22865e-08 1.89918e-08 2.9104e-08 4.41871e-08 6.64181e-08 9.8749e-08 1.4504e-07 2.10097e-07 2.99525e-07 4.19356e-07 5.75466e-07 7.72894e-07 1.01527e-06 1.30444e-06 1.64045e-06 2.02178e-06 2.4457e-06 2.90873e-06 3.40703e-06 3.93673e-06 4.49412e-06 5.07575e-06 5.67854e-06 6.2997e-06 6.93678e-06 7.58757e-06 8.25014e-06 8.92272e-06 9.60372e-06 1.02917e-05 1.09853e-05 1.16833e-05 1.23845e-05 1.30879e-05 1.37925e-05 1.44973e-05 1.52015e-05 1.59042e-05 1.66047e-05 1.73022e-05 1.79961e-05 1.86858e-05 1.93708e-05 2.00504e-05 2.96069e-10 4.77695e-10 7.68677e-10 1.23286e-09 1.96956e-09 3.13165e-09 4.9519e-09 7.78022e-09 1.21357e-08 1.87776e-08 2.88007e-08 4.37574e-08 6.58062e-08 9.78691e-08 1.43758e-07 2.08203e-07 2.96697e-07 4.15119e-07 5.69148e-07 7.63604e-07 1.00189e-06 1.28565e-06 1.61478e-06 1.98765e-06 2.4015e-06 2.85288e-06 3.33801e-06 3.85311e-06 4.39459e-06 4.95912e-06 5.54373e-06 6.14575e-06 6.76284e-06 7.3929e-06 8.03409e-06 8.68475e-06 9.34336e-06 1.00086e-05 1.06791e-05 1.13538e-05 1.20315e-05 1.27114e-05 1.33924e-05 1.40736e-05 1.47543e-05 1.54336e-05 1.61109e-05 1.67855e-05 1.74567e-05 1.81241e-05 1.8787e-05 1.82047e-10 2.94723e-10 4.76088e-10 7.66969e-10 1.23147e-09 1.96938e-09 3.13438e-09 4.96055e-09 7.79981e-09 1.21741e-08 1.88468e-08 2.89172e-08 4.39426e-08 6.60837e-08 9.82573e-08 1.44254e-07 2.0875e-07 2.97141e-07 4.15147e-07 5.68231e-07 7.60952e-07 9.96435e-07 1.27608e-06 1.5996e-06 1.96523e-06 2.37017e-06 2.81098e-06 3.28398e-06 3.78548e-06 4.31202e-06 4.86041e-06 5.4278e-06 6.01166e-06 6.60975e-06 7.2201e-06 7.84095e-06 8.47074e-06 9.10804e-06 9.75157e-06 1.04001e-05 1.10526e-05 1.17081e-05 1.23655e-05 1.30241e-05 1.36829e-05 1.43412e-05 1.49983e-05 1.56536e-05 1.63063e-05 1.6956e-05 1.7602e-05 1.13363e-10 1.84044e-10 2.98251e-10 4.82239e-10 7.77562e-10 1.24949e-09 1.99964e-09 3.18453e-09 5.04248e-09 7.93162e-09 1.23828e-08 1.91712e-08 2.94123e-08 4.46824e-08 6.71629e-08 9.97868e-08 1.46344e-07 2.11477e-07 3.0049e-07 4.1894e-07 5.72047e-07 7.64079e-07 9.97846e-07 1.27447e-06 1.59343e-06 1.95283e-06 2.34983e-06 2.78103e-06 3.2428e-06 3.73161e-06 4.2441e-06 4.77725e-06 5.32834e-06 5.89497e-06 6.47502e-06 7.06664e-06 7.66817e-06 8.27813e-06 8.89519e-06 9.51813e-06 1.01458e-05 1.07773e-05 1.14115e-05 1.20477e-05 1.26849e-05 1.33224e-05 1.39595e-05 1.45955e-05 1.52298e-05 1.58618e-05 1.64909e-05 7.14266e-11 1.16232e-10 1.88861e-10 3.06299e-10 4.95611e-10 7.99643e-10 1.28569e-09 2.0585e-09 3.27932e-09 5.19349e-09 8.16934e-09 1.27521e-08 1.97367e-08 3.02647e-08 4.5945e-08 6.8996e-08 1.02385e-07 1.4992e-07 2.1622e-07 3.06503e-07 4.26147e-07 5.80113e-07 7.72338e-07 1.00529e-06 1.27978e-06 1.59505e-06 1.94908e-06 2.33896e-06 2.76134e-06 3.21269e-06 3.68959e-06 4.18886e-06 4.7076e-06 5.24324e-06 5.79353e-06 6.35646e-06 6.9303e-06 7.51348e-06 8.10461e-06 8.70244e-06 9.30584e-06 9.91375e-06 1.05252e-05 1.11393e-05 1.17553e-05 1.23723e-05 1.29896e-05 1.36065e-05 1.42225e-05 1.48369e-05 1.54491e-05 DataSetFinish DataSetStart DataSetName, idvgsat MeasurementType, DC BatchName, opt_ex22 WaferName, Silvaco DieName, Silvaco DeviceName, n1x10 Temperature, 27 FabDate, 01 Nov 2018 UserDate, 01 Nov 2018 Attribute, L, 1e-05 Attribute, W, 1e-06 NodeNames, d g s b Sweep, 1, V, G, LIN, 0, 1, CALCULATED, 51, 0.1, 0 Sweep, 2, V, B, LIN, 0, -0.4, CALCULATED, 6, 0.1, 0 Constant, V, D, 1, 0.1, 0 Constant, V, S, 0, 0.1, 0 Target, I, D Function, gm, derivative (vg, id) Plot, idvg, XYY (LIN LIN LIN), VG, ID, gm DataArray, ID 1.26641e-10 2.01442e-10 3.18881e-10 5.01957e-10 7.85087e-10 1.21914e-09 1.87832e-09 2.8695e-09 4.3442e-09 6.51319e-09 9.66193e-09 1.41627e-08 2.04772e-08 2.91413e-08 4.07294e-08 5.58001e-08 7.48358e-08 9.81902e-08 1.26059e-07 1.58475e-07 1.9533e-07 2.36405e-07 2.81408e-07 3.30014e-07 3.81883e-07 4.36684e-07 4.94106e-07 5.53861e-07 6.15686e-07 6.79343e-07 7.44614e-07 8.11302e-07 8.79222e-07 9.48206e-07 1.0181e-06 1.08874e-06 1.16001e-06 1.23176e-06 1.30388e-06 1.37624e-06 1.44874e-06 1.52126e-06 1.59372e-06 1.66602e-06 1.73807e-06 1.80979e-06 1.88111e-06 1.95197e-06 2.02229e-06 2.09202e-06 2.1611e-06 7.54537e-11 1.20747e-10 1.92443e-10 3.05234e-10 4.81416e-10 7.5441e-10 1.17368e-09 1.81151e-09 2.77199e-09 4.20288e-09 6.30971e-09 9.37093e-09 1.37499e-08 1.98971e-08 2.8336e-08 3.96271e-08 5.43148e-08 7.28676e-08 9.56264e-08 1.22776e-07 1.54339e-07 1.90203e-07 2.30143e-07 2.7387e-07 3.21057e-07 3.71369e-07 4.24481e-07 4.80087e-07 5.37908e-07 5.97689e-07 6.59199e-07 7.22229e-07 7.86589e-07 8.52106e-07 9.18619e-07 9.85978e-07 1.05405e-06 1.12269e-06 1.19179e-06 1.26123e-06 1.33089e-06 1.40069e-06 1.47051e-06 1.54027e-06 1.60989e-06 1.67928e-06 1.74836e-06 1.81708e-06 1.88537e-06 1.95317e-06 2.02042e-06 4.55675e-11 7.32805e-11 1.17448e-10 1.8747e-10 2.9779e-10 4.70355e-10 7.38101e-10 1.14982e-09 1.7768e-09 2.72181e-09 4.13056e-09 6.20571e-09 9.22147e-09 1.35351e-08 1.95887e-08 2.78945e-08 3.89988e-08 5.34293e-08 7.1636e-08 9.39414e-08 1.20513e-07 1.51363e-07 1.86365e-07 2.25293e-07 2.67855e-07 3.13729e-07 3.62585e-07 4.14105e-07 4.67992e-07 5.23975e-07 5.81809e-07 6.41272e-07 7.02166e-07 7.64309e-07 8.27537e-07 8.91698e-07 9.56652e-07 1.02227e-06 1.08842e-06 1.15501e-06 1.2219e-06 1.28902e-06 1.35625e-06 1.42351e-06 1.49072e-06 1.5578e-06 1.62467e-06 1.69126e-06 1.75751e-06 1.82337e-06 1.88878e-06 2.78702e-11 4.50012e-11 7.24581e-11 1.16268e-10 1.85799e-10 2.95456e-10 4.67144e-10 7.33748e-10 1.14399e-09 1.76905e-09 2.71146e-09 4.11652e-09 6.18591e-09 9.19197e-09 1.34884e-08 1.9511e-08 2.77619e-08 3.87728e-08 5.30525e-08 7.10288e-08 9.30015e-08 1.19117e-07 1.4937e-07 1.83624e-07 2.21646e-07 2.63146e-07 3.07804e-07 3.55298e-07 4.05319e-07 4.57581e-07 5.11822e-07 5.67807e-07 6.25327e-07 6.84191e-07 7.44229e-07 8.05284e-07 8.67214e-07 9.29887e-07 9.93181e-07 1.05698e-06 1.12118e-06 1.18568e-06 1.25038e-06 1.31519e-06 1.38004e-06 1.44483e-06 1.50951e-06 1.574e-06 1.63824e-06 1.70216e-06 1.76572e-06 1.72501e-11 2.7946e-11 4.51686e-11 7.27968e-11 1.16916e-10 1.86989e-10 2.9757e-10 4.70791e-10 7.39872e-10 1.15401e-09 1.78503e-09 2.73629e-09 4.15397e-09 6.24054e-09 9.26845e-09 1.35899e-08 1.96361e-08 2.78998e-08 3.88978e-08 5.31176e-08 7.09618e-08 9.27035e-08 1.18465e-07 1.48221e-07 1.81823e-07 2.19033e-07 2.5956e-07 3.03089e-07 3.49308e-07 3.97918e-07 4.48643e-07 5.01234e-07 5.55468e-07 6.11144e-07 6.68084e-07 7.26125e-07 7.85121e-07 8.44938e-07 9.05452e-07 9.66548e-07 1.02812e-06 1.09007e-06 1.15229e-06 1.21472e-06 1.27725e-06 1.33981e-06 1.40233e-06 1.46475e-06 1.52699e-06 1.589e-06 1.65072e-06 1.07968e-11 1.75395e-11 2.84385e-11 4.60006e-11 7.41909e-11 1.19232e-10 1.90796e-10 3.03762e-10 4.8074e-10 7.55646e-10 1.17865e-09 1.82294e-09 2.79358e-09 4.23892e-09 6.36372e-09 9.44226e-09 1.38269e-08 1.99455e-08 2.8282e-08 3.9337e-08 5.3575e-08 7.13705e-08 9.29669e-08 1.1846e-07 1.47802e-07 1.80834e-07 2.1731e-07 2.56941e-07 2.9942e-07 3.44442e-07 3.91721e-07 4.40994e-07 4.92023e-07 5.44596e-07 5.98525e-07 6.5364e-07 7.09789e-07 7.66835e-07 8.24652e-07 8.83124e-07 9.42143e-07 1.00161e-06 1.06143e-06 1.12152e-06 1.18178e-06 1.24216e-06 1.30257e-06 1.36294e-06 1.42322e-06 1.48334e-06 1.54325e-06 DataSetFinish DataSetStart DataSetName, idvgsat MeasurementType, DC BatchName, opt_ex22 WaferName, Silvaco DieName, Silvaco DeviceName, n3x10 Temperature, 27 FabDate, 01 Nov 2018 UserDate, 01 Nov 2018 Attribute, L, 1e-05 Attribute, W, 3e-06 NodeNames, d g s b Sweep, 1, V, G, LIN, 0, 1, CALCULATED, 51, 0.1, 0 Sweep, 2, V, B, LIN, 0, -0.4, CALCULATED, 6, 0.1, 0 Constant, V, D, 1, 0.1, 0 Constant, V, S, 0, 0.1, 0 Target, I, D Function, gm, derivative (vg, id) Plot, idvg, XYY (LIN LIN LIN), VG, ID, gm DataArray, ID 4.03696e-10 6.41675e-10 1.0149e-09 1.59602e-09 2.49352e-09 3.86741e-09 5.95072e-09 9.07819e-09 1.37233e-08 2.05424e-08 3.04199e-08 4.45013e-08 6.41941e-08 9.1114e-08 1.26969e-07 1.73394e-07 2.31771e-07 3.03083e-07 3.87838e-07 4.8607e-07 5.97404e-07 7.21155e-07 8.56445e-07 1.00229e-06 1.1577e-06 1.3217e-06 1.49337e-06 1.67188e-06 1.85645e-06 2.04639e-06 2.24106e-06 2.43987e-06 2.64229e-06 2.84782e-06 3.056e-06 3.26637e-06 3.47854e-06 3.69212e-06 3.90673e-06 4.12202e-06 4.33767e-06 4.55337e-06 4.76882e-06 4.98376e-06 5.19792e-06 5.41108e-06 5.623e-06 5.83348e-06 6.04235e-06 6.24943e-06 6.45456e-06 2.40865e-10 3.85216e-10 6.13503e-10 9.72254e-10 1.53194e-09 2.39799e-09 3.72614e-09 5.74342e-09 8.77621e-09 1.32864e-08 1.99142e-08 2.95229e-08 4.32309e-08 6.24127e-08 8.86465e-08 1.236e-07 1.68865e-07 2.25784e-07 2.95302e-07 3.77894e-07 4.73569e-07 5.81933e-07 7.02291e-07 8.33762e-07 9.75374e-07 1.12614e-06 1.28509e-06 1.45135e-06 1.62409e-06 1.80257e-06 1.9861e-06 2.17409e-06 2.36596e-06 2.56122e-06 2.75939e-06 2.96002e-06 3.16271e-06 3.36706e-06 3.57273e-06 3.77935e-06 3.98662e-06 4.19421e-06 4.40186e-06 4.60927e-06 4.81622e-06 5.02245e-06 5.22775e-06 5.43191e-06 5.63476e-06 5.83611e-06 6.03581e-06 1.45637e-10 2.34092e-10 3.74956e-10 5.98066e-10 9.49196e-10 1.49776e-09 2.34772e-09 3.65275e-09 5.63696e-09 8.62256e-09 1.30653e-08 1.95967e-08 2.90669e-08 4.25758e-08 6.14721e-08 8.73001e-08 1.21684e-07 1.66166e-07 2.22033e-07 2.90176e-07 3.71022e-07 4.6454e-07 5.7031e-07 6.87626e-07 8.15604e-07 9.53282e-07 1.09969e-06 1.25388e-06 1.41501e-06 1.58226e-06 1.75492e-06 1.93235e-06 2.11396e-06 2.29923e-06 2.48766e-06 2.67881e-06 2.87227e-06 3.06765e-06 3.26458e-06 3.46274e-06 3.6618e-06 3.86145e-06 4.06142e-06 4.26143e-06 4.46124e-06 4.66062e-06 4.85934e-06 5.05721e-06 5.25403e-06 5.44964e-06 5.64387e-06 8.91668e-11 1.43915e-10 2.31606e-10 3.71412e-10 5.93087e-10 9.42308e-10 1.48839e-09 2.33518e-09 3.63619e-09 5.61525e-09 8.594e-09 1.30269e-08 1.95425e-08 2.8985e-08 4.24432e-08 6.1246e-08 8.69061e-08 1.21003e-07 1.65021e-07 2.20179e-07 2.87303e-07 3.66757e-07 4.58462e-07 5.61966e-07 6.76549e-07 8.01328e-07 9.35354e-07 1.07767e-06 1.22738e-06 1.38364e-06 1.54568e-06 1.71283e-06 1.88445e-06 2.06001e-06 2.23899e-06 2.42093e-06 2.60543e-06 2.79209e-06 2.98054e-06 3.17045e-06 3.3615e-06 3.5534e-06 3.74585e-06 3.93861e-06 4.13142e-06 4.32405e-06 4.51628e-06 4.70791e-06 4.89876e-06 5.08864e-06 5.2774e-06 5.52383e-11 8.94581e-11 1.44528e-10 2.32812e-10 3.73677e-10 5.97188e-10 9.49517e-10 1.50072e-09 2.35574e-09 3.66964e-09 5.66833e-09 8.67601e-09 1.315e-08 1.97212e-08 2.9234e-08 4.27718e-08 6.16484e-08 8.73468e-08 1.21399e-07 1.65224e-07 2.19967e-07 2.86371e-07 3.64733e-07 4.54916e-07 5.56434e-07 6.68552e-07 7.90391e-07 9.21018e-07 1.05951e-06 1.20498e-06 1.35664e-06 1.51374e-06 1.67565e-06 1.84176e-06 2.01157e-06 2.18459e-06 2.36039e-06 2.53858e-06 2.71879e-06 2.90069e-06 3.08396e-06 3.2683e-06 3.45343e-06 3.63909e-06 3.82504e-06 4.01105e-06 4.1969e-06 4.38239e-06 4.56733e-06 4.75154e-06 4.93487e-06 3.46e-11 5.61923e-11 9.10782e-11 1.4726e-10 2.37379e-10 3.81246e-10 6.09608e-10 9.69672e-10 1.53303e-09 2.40684e-09 3.74928e-09 5.7905e-09 8.86019e-09 1.34223e-08 2.01147e-08 2.97869e-08 4.3522e-08 6.26221e-08 8.85408e-08 1.22759e-07 1.66626e-07 2.21199e-07 2.87136e-07 3.64654e-07 4.53559e-07 5.53327e-07 6.6321e-07 7.82335e-07 9.09789e-07 1.04468e-06 1.18615e-06 1.33345e-06 1.48588e-06 1.64282e-06 1.80371e-06 1.96806e-06 2.13543e-06 2.30541e-06 2.47763e-06 2.65175e-06 2.82745e-06 3.00444e-06 3.18243e-06 3.36118e-06 3.54043e-06 3.71995e-06 3.89954e-06 4.07899e-06 4.25812e-06 4.43674e-06 4.61469e-06 DataSetFinish DataSetStart DataSetName, idvd MeasurementType, DC BatchName, opt_ex22 WaferName, Silvaco DieName, Silvaco DeviceName, n10x1 Temperature, 125 FabDate, 01 Nov 2018 UserDate, 01 Nov 2018 Attribute, L, 1e-06 Attribute, W, 1e-05 NodeNames, d g s b Sweep, 1, V, D, LIN, 0, 1, CALCULATED, 51, 0.1, 0 Sweep, 2, V, G, LIN, 0.4, 1, CALCULATED, 5, 0.1, 0 Constant, V, B, 0, 0.1, 0 Constant, V, S, 0, 0.1, 0 Target, I, D Function, gds, derivative (vd, id) Plot, idvd, XY (LIN LIN), VD, ID Plot, gds, XY (LIN LOG), vd, gds DataArray, ID 0 5.07591e-06 9.67524e-06 1.38042e-05 1.74692e-05 2.06766e-05 2.34332e-05 2.57467e-05 2.7627e-05 2.90885e-05 3.01573e-05 3.08847e-05 3.13572e-05 3.16748e-05 3.19111e-05 3.21048e-05 3.22743e-05 3.24285e-05 3.25722e-05 3.27083e-05 3.28386e-05 3.29644e-05 3.30864e-05 3.32054e-05 3.33218e-05 3.3436e-05 3.35484e-05 3.3659e-05 3.37683e-05 3.38762e-05 3.3983e-05 3.40887e-05 3.41936e-05 3.42975e-05 3.44007e-05 3.45032e-05 3.46051e-05 3.47064e-05 3.48071e-05 3.49073e-05 3.5007e-05 3.51063e-05 3.52052e-05 3.53037e-05 3.54018e-05 3.54996e-05 3.55971e-05 3.56943e-05 3.57912e-05 3.58879e-05 3.59843e-05 0 7.74239e-06 1.49957e-05 2.17652e-05 2.80563e-05 3.3874e-05 3.92238e-05 4.41106e-05 4.854e-05 5.25171e-05 5.60476e-05 5.91377e-05 6.17945e-05 6.4027e-05 6.58485e-05 6.72807e-05 6.83614e-05 6.9152e-05 6.97317e-05 7.01752e-05 7.05352e-05 7.08431e-05 7.11166e-05 7.13663e-05 7.15984e-05 7.18173e-05 7.20256e-05 7.22255e-05 7.24184e-05 7.26054e-05 7.27875e-05 7.29653e-05 7.31393e-05 7.33101e-05 7.3478e-05 7.36434e-05 7.38064e-05 7.39673e-05 7.41263e-05 7.42837e-05 7.44394e-05 7.45937e-05 7.47467e-05 7.48985e-05 7.50491e-05 7.51987e-05 7.53473e-05 7.5495e-05 7.56419e-05 7.57879e-05 7.59332e-05 0 9.49202e-06 1.85246e-05 2.71019e-05 3.52282e-05 4.29076e-05 5.01443e-05 5.69423e-05 6.33056e-05 6.92384e-05 7.47446e-05 7.98283e-05 8.44936e-05 8.87447e-05 9.2586e-05 9.60223e-05 9.90587e-05 0.000101702 0.00010396 0.000105846 0.000107379 0.000108591 0.000109533 0.000110264 0.000110847 0.00011133 0.000111745 0.000112114 0.000112449 0.000112758 0.000113048 0.000113323 0.000113584 0.000113835 0.000114078 0.000114313 0.000114541 0.000114764 0.000114981 0.000115195 0.000115404 0.00011561 0.000115813 0.000116012 0.000116209 0.000116404 0.000116597 0.000116787 0.000116976 0.000117162 0.000117348 0 1.05422e-05 2.06684e-05 3.03817e-05 3.96855e-05 4.85829e-05 5.70771e-05 6.51712e-05 7.28684e-05 8.01718e-05 8.70845e-05 9.36095e-05 9.97499e-05 0.000105509 0.000110889 0.000115894 0.000120527 0.00012479 0.000128688 0.000132224 0.000135402 0.000138227 0.000140704 0.000142842 0.000144652 0.000146154 0.000147377 0.000148361 0.000149157 0.000149813 0.000150369 0.000150854 0.000151287 0.000151682 0.000152047 0.000152388 0.000152711 0.000153019 0.000153313 0.000153597 0.000153871 0.000154136 0.000154395 0.000154648 0.000154894 0.000155136 0.000155373 0.000155606 0.000155836 0.000156062 0.000156285 0 1.11038e-05 2.18377e-05 3.22041e-05 4.22055e-05 5.18443e-05 6.1123e-05 7.0044e-05 7.86095e-05 8.68221e-05 9.4684e-05 0.000102198 0.000109365 0.000116189 0.000122672 0.000128815 0.000134622 0.000140094 0.000145234 0.000150044 0.000154527 0.000158684 0.00016252 0.000166035 0.000169234 0.00017212 0.000174696 0.00017697 0.000178948 0.000180643 0.000182071 0.000183259 0.000184242 0.000185059 0.00018575 0.000186347 0.000186874 0.00018735 0.000187785 0.000188189 0.000188567 0.000188925 0.000189266 0.000189592 0.000189906 0.000190209 0.000190503 0.000190788 0.000191066 0.000191338 0.000191603 DataSetFinish DataSetStart DataSetName, idvd MeasurementType, DC BatchName, opt_ex22 WaferName, Silvaco DieName, Silvaco DeviceName, n10x10 Temperature, 125 FabDate, 01 Nov 2018 UserDate, 01 Nov 2018 Attribute, L, 1e-05 Attribute, W, 1e-05 NodeNames, d g s b Sweep, 1, V, D, LIN, 0, 1, CALCULATED, 51, 0.1, 0 Sweep, 2, V, G, LIN, 0.4, 1, CALCULATED, 5, 0.1, 0 Constant, V, B, 0, 0.1, 0 Constant, V, S, 0, 0.1, 0 Target, I, D Function, gds, derivative (vd, id) Plot, idvd, XY (LIN LIN), VD, ID Plot, gds, XY (LIN LOG), vd, gds DataArray, ID 0 5.55879e-07 1.06514e-06 1.52786e-06 1.94413e-06 2.31406e-06 2.63778e-06 2.91548e-06 3.14751e-06 3.33444e-06 3.47746e-06 3.57917e-06 3.645e-06 3.68438e-06 3.7083e-06 3.72487e-06 3.73824e-06 3.75017e-06 3.76138e-06 3.77222e-06 3.78283e-06 3.79331e-06 3.80369e-06 3.814e-06 3.82426e-06 3.83448e-06 3.84467e-06 3.85483e-06 3.86497e-06 3.87509e-06 3.8852e-06 3.8953e-06 3.90538e-06 3.91545e-06 3.92551e-06 3.93557e-06 3.94561e-06 3.95565e-06 3.96568e-06 3.97571e-06 3.98573e-06 3.99574e-06 4.00575e-06 4.01576e-06 4.02576e-06 4.03576e-06 4.04575e-06 4.05574e-06 4.06573e-06 4.07571e-06 4.08569e-06 0 8.21494e-07 1.59622e-06 2.32425e-06 3.00562e-06 3.6404e-06 4.22866e-06 4.77047e-06 5.26589e-06 5.71504e-06 6.11803e-06 6.47501e-06 6.78621e-06 7.05198e-06 7.27292e-06 7.45009e-06 7.58553e-06 7.68305e-06 7.74919e-06 7.79293e-06 7.82317e-06 7.84627e-06 7.86577e-06 7.88342e-06 7.90007e-06 7.91612e-06 7.93182e-06 7.94726e-06 7.96254e-06 7.97769e-06 7.99274e-06 8.00772e-06 8.02263e-06 8.0375e-06 8.05232e-06 8.06711e-06 8.08186e-06 8.09659e-06 8.11129e-06 8.12597e-06 8.14063e-06 8.15527e-06 8.16989e-06 8.1845e-06 8.1991e-06 8.21368e-06 8.22825e-06 8.24281e-06 8.25736e-06 8.2719e-06 8.28643e-06 0 9.97985e-07 1.95233e-06 2.86308e-06 3.73028e-06 4.55397e-06 5.33419e-06 6.07099e-06 6.76443e-06 7.41454e-06 8.02139e-06 8.58504e-06 9.10555e-06 9.583e-06 1.00175e-05 1.04092e-05 1.07581e-05 1.10647e-05 1.13292e-05 1.15523e-05 1.1735e-05 1.18791e-05 1.19878e-05 1.20663e-05 1.21215e-05 1.21613e-05 1.21917e-05 1.22171e-05 1.22397e-05 1.22607e-05 1.22807e-05 1.23001e-05 1.23191e-05 1.23379e-05 1.23564e-05 1.23748e-05 1.2393e-05 1.24112e-05 1.24293e-05 1.24473e-05 1.24653e-05 1.24832e-05 1.2501e-05 1.25188e-05 1.25366e-05 1.25544e-05 1.25721e-05 1.25898e-05 1.26075e-05 1.26251e-05 1.26427e-05 0 1.10405e-06 2.16865e-06 3.19385e-06 4.17967e-06 5.12614e-06 6.0333e-06 6.90119e-06 7.72983e-06 8.51925e-06 9.26951e-06 9.98063e-06 1.06527e-05 1.12856e-05 1.18796e-05 1.24346e-05 1.29507e-05 1.34279e-05 1.38664e-05 1.42663e-05 1.46276e-05 1.49505e-05 1.52354e-05 1.54826e-05 1.56927e-05 1.58667e-05 1.60065e-05 1.61147e-05 1.61956e-05 1.62552e-05 1.62996e-05 1.63344e-05 1.63634e-05 1.63892e-05 1.6413e-05 1.64356e-05 1.64574e-05 1.64788e-05 1.64997e-05 1.65204e-05 1.65409e-05 1.65612e-05 1.65814e-05 1.66015e-05 1.66215e-05 1.66414e-05 1.66613e-05 1.66811e-05 1.67008e-05 1.67205e-05 1.67402e-05 0 1.15889e-06 2.28272e-06 3.37151e-06 4.42529e-06 5.44408e-06 6.42791e-06 7.3768e-06 8.29077e-06 9.16986e-06 1.00141e-05 1.08235e-05 1.1598e-05 1.23378e-05 1.30429e-05 1.37132e-05 1.43488e-05 1.49498e-05 1.55161e-05 1.60479e-05 1.65451e-05 1.70079e-05 1.74362e-05 1.78302e-05 1.81899e-05 1.85155e-05 1.88072e-05 1.90653e-05 1.92901e-05 1.94823e-05 1.96429e-05 1.97734e-05 1.98764e-05 1.99556e-05 2.00156e-05 2.00617e-05 2.00986e-05 2.01296e-05 2.01572e-05 2.01827e-05 2.02068e-05 2.023e-05 2.02527e-05 2.02749e-05 2.02968e-05 2.03185e-05 2.034e-05 2.03613e-05 2.03825e-05 2.04036e-05 2.04246e-05 DataSetFinish DataSetStart DataSetName, idvd MeasurementType, DC BatchName, opt_ex22 WaferName, Silvaco DieName, Silvaco DeviceName, n10x2 Temperature, 125 FabDate, 01 Nov 2018 UserDate, 01 Nov 2018 Attribute, L, 2e-06 Attribute, W, 1e-05 NodeNames, d g s b Sweep, 1, V, D, LIN, 0, 1, CALCULATED, 51, 0.1, 0 Sweep, 2, V, G, LIN, 0.4, 1, CALCULATED, 5, 0.1, 0 Constant, V, B, 0, 0.1, 0 Constant, V, S, 0, 0.1, 0 Target, I, D Function, gds, derivative (vd, id) Plot, idvd, XY (LIN LIN), VD, ID Plot, gds, XY (LIN LOG), vd, gds DataArray, ID 0 2.67517e-06 5.11501e-06 7.32107e-06 9.29495e-06 1.10384e-05 1.25531e-05 1.38416e-05 1.49066e-05 1.57528e-05 1.6389e-05 1.68327e-05 1.71184e-05 1.72969e-05 1.74169e-05 1.75086e-05 1.75863e-05 1.76564e-05 1.77219e-05 1.77843e-05 1.78446e-05 1.79033e-05 1.79606e-05 1.8017e-05 1.80725e-05 1.81273e-05 1.81816e-05 1.82353e-05 1.82886e-05 1.83414e-05 1.8394e-05 1.84462e-05 1.84981e-05 1.85498e-05 1.86013e-05 1.86525e-05 1.87036e-05 1.87544e-05 1.88052e-05 1.88557e-05 1.89061e-05 1.89564e-05 1.90066e-05 1.90567e-05 1.91066e-05 1.91565e-05 1.92063e-05 1.9256e-05 1.93056e-05 1.93551e-05 1.94045e-05 0 4.00376e-06 7.76916e-06 1.12975e-05 1.459e-05 1.76481e-05 2.04731e-05 2.30662e-05 2.54289e-05 2.75626e-05 2.94689e-05 3.11496e-05 3.26069e-05 3.38437e-05 3.48645e-05 3.56768e-05 3.62942e-05 3.67407e-05 3.70536e-05 3.72763e-05 3.74453e-05 3.75839e-05 3.77049e-05 3.78148e-05 3.79174e-05 3.80148e-05 3.81084e-05 3.81989e-05 3.82871e-05 3.83734e-05 3.8458e-05 3.85412e-05 3.86233e-05 3.87043e-05 3.87845e-05 3.88638e-05 3.89425e-05 3.90205e-05 3.90979e-05 3.91748e-05 3.92513e-05 3.93273e-05 3.94029e-05 3.94782e-05 3.95531e-05 3.96277e-05 3.9702e-05 3.9776e-05 3.98498e-05 3.99234e-05 3.99967e-05 0 4.8812e-06 9.53928e-06 1.39753e-05 1.81902e-05 2.21852e-05 2.59611e-05 2.9519e-05 3.28599e-05 3.5985e-05 3.88951e-05 4.15915e-05 4.40751e-05 4.63473e-05 4.84092e-05 5.02622e-05 5.1908e-05 5.33488e-05 5.45874e-05 5.56282e-05 5.64783e-05 5.71495e-05 5.76618e-05 5.80443e-05 5.8332e-05 5.85571e-05 5.87432e-05 5.89047e-05 5.90504e-05 5.91851e-05 5.93119e-05 5.94329e-05 5.95492e-05 5.96619e-05 5.97715e-05 5.98786e-05 5.99836e-05 6.00868e-05 6.01883e-05 6.02885e-05 6.03874e-05 6.04852e-05 6.0582e-05 6.0678e-05 6.07731e-05 6.08674e-05 6.09612e-05 6.10542e-05 6.11467e-05 6.12387e-05 6.13302e-05 0 5.40828e-06 1.06147e-05 1.56201e-05 2.04252e-05 2.50309e-05 2.94379e-05 3.36469e-05 3.76589e-05 4.14745e-05 4.50946e-05 4.85198e-05 5.17512e-05 5.47893e-05 5.76351e-05 6.02894e-05 6.27531e-05 6.5027e-05 6.71122e-05 6.90097e-05 7.07209e-05 7.22473e-05 7.35909e-05 7.47547e-05 7.57429e-05 7.65624e-05 7.72244e-05 7.7746e-05 7.81516e-05 7.84692e-05 7.87256e-05 7.89412e-05 7.91298e-05 7.93001e-05 7.94574e-05 7.96052e-05 7.97458e-05 7.98806e-05 8.00107e-05 8.01371e-05 8.02602e-05 8.03806e-05 8.04987e-05 8.06146e-05 8.07288e-05 8.08414e-05 8.09525e-05 8.10623e-05 8.1171e-05 8.12786e-05 8.13852e-05 0 5.68501e-06 1.11906e-05 1.65173e-05 2.16658e-05 2.66367e-05 3.14305e-05 3.60479e-05 4.04895e-05 4.47557e-05 4.88473e-05 5.27649e-05 5.65089e-05 6.008e-05 6.34789e-05 6.6706e-05 6.97621e-05 7.26476e-05 7.53634e-05 7.79099e-05 8.02879e-05 8.24981e-05 8.45412e-05 8.64181e-05 8.81298e-05 8.96775e-05 9.10625e-05 9.2287e-05 9.33537e-05 9.42669e-05 9.50332e-05 9.56628e-05 9.61709e-05 9.65775e-05 9.69057e-05 9.71772e-05 9.74095e-05 9.76146e-05 9.78006e-05 9.79728e-05 9.81347e-05 9.82884e-05 9.84358e-05 9.85779e-05 9.87156e-05 9.88497e-05 9.89806e-05 9.91088e-05 9.92345e-05 9.93582e-05 9.948e-05 DataSetFinish DataSetStart DataSetName, idvd MeasurementType, DC BatchName, opt_ex22 WaferName, Silvaco DieName, Silvaco DeviceName, n10x5 Temperature, 125 FabDate, 01 Nov 2018 UserDate, 01 Nov 2018 Attribute, L, 5e-06 Attribute, W, 1e-05 NodeNames, d g s b Sweep, 1, V, D, LIN, 0, 1, CALCULATED, 51, 0.1, 0 Sweep, 2, V, G, LIN, 0.4, 1, CALCULATED, 5, 0.1, 0 Constant, V, B, 0, 0.1, 0 Constant, V, S, 0, 0.1, 0 Target, I, D Function, gds, derivative (vd, id) Plot, idvd, XY (LIN LIN), VD, ID Plot, gds, XY (LIN LOG), vd, gds DataArray, ID 0 1.10151e-06 2.10956e-06 3.02444e-06 3.84642e-06 4.57583e-06 5.21307e-06 5.75866e-06 6.21338e-06 6.57856e-06 6.85684e-06 7.05382e-06 7.18107e-06 7.2579e-06 7.30585e-06 7.34005e-06 7.36807e-06 7.39316e-06 7.4167e-06 7.43934e-06 7.46142e-06 7.4831e-06 7.5045e-06 7.52569e-06 7.54671e-06 7.5676e-06 7.58837e-06 7.60905e-06 7.62964e-06 7.65017e-06 7.67064e-06 7.69105e-06 7.71141e-06 7.73172e-06 7.752e-06 7.77224e-06 7.79245e-06 7.81263e-06 7.83278e-06 7.85291e-06 7.87301e-06 7.89309e-06 7.91315e-06 7.93319e-06 7.95322e-06 7.97322e-06 7.99321e-06 8.01319e-06 8.03315e-06 8.0531e-06 8.07304e-06 0 1.63268e-06 3.1714e-06 4.61636e-06 5.96778e-06 7.22588e-06 8.39088e-06 9.46303e-06 1.04426e-05 1.13298e-05 1.21251e-05 1.28288e-05 1.34415e-05 1.3964e-05 1.43977e-05 1.47448e-05 1.50098e-05 1.52008e-05 1.53313e-05 1.54194e-05 1.5482e-05 1.55309e-05 1.55726e-05 1.56105e-05 1.56461e-05 1.56802e-05 1.57134e-05 1.57458e-05 1.57778e-05 1.58093e-05 1.58405e-05 1.58714e-05 1.59022e-05 1.59327e-05 1.59631e-05 1.59933e-05 1.60234e-05 1.60534e-05 1.60832e-05 1.6113e-05 1.61428e-05 1.61724e-05 1.6202e-05 1.62315e-05 1.62609e-05 1.62903e-05 1.63197e-05 1.6349e-05 1.63782e-05 1.64074e-05 1.64366e-05 0 1.98507e-06 3.88238e-06 5.69211e-06 7.41441e-06 9.04945e-06 1.05974e-05 1.20584e-05 1.34327e-05 1.47205e-05 1.59218e-05 1.7037e-05 1.80662e-05 1.90097e-05 1.98677e-05 2.06406e-05 2.13288e-05 2.19329e-05 2.24537e-05 2.28926e-05 2.32518e-05 2.35352e-05 2.37496e-05 2.39056e-05 2.40175e-05 2.41001e-05 2.41651e-05 2.42199e-05 2.4269e-05 2.43145e-05 2.43577e-05 2.43993e-05 2.44399e-05 2.44796e-05 2.45187e-05 2.45573e-05 2.45954e-05 2.46332e-05 2.46707e-05 2.4708e-05 2.4745e-05 2.47818e-05 2.48184e-05 2.48549e-05 2.48912e-05 2.49274e-05 2.49635e-05 2.49994e-05 2.50353e-05 2.50711e-05 2.51068e-05 0 2.19682e-06 4.3143e-06 6.35257e-06 8.31177e-06 1.0192e-05 1.19934e-05 1.37161e-05 1.53603e-05 1.6926e-05 1.84133e-05 1.98226e-05 2.11537e-05 2.2407e-05 2.35826e-05 2.46806e-05 2.57011e-05 2.66445e-05 2.75108e-05 2.83004e-05 2.90136e-05 2.96508e-05 3.02126e-05 3.06999e-05 3.11141e-05 3.14573e-05 3.17333e-05 3.19479e-05 3.21101e-05 3.22316e-05 3.23244e-05 3.23989e-05 3.24622e-05 3.25186e-05 3.25708e-05 3.26202e-05 3.26676e-05 3.27136e-05 3.27586e-05 3.28027e-05 3.28461e-05 3.2889e-05 3.29314e-05 3.29735e-05 3.30152e-05 3.30566e-05 3.30977e-05 3.31386e-05 3.31793e-05 3.32198e-05 3.32601e-05 0 2.30673e-06 4.54293e-06 6.70871e-06 8.80416e-06 1.08294e-05 1.27844e-05 1.46695e-05 1.64845e-05 1.82297e-05 1.99052e-05 2.1511e-05 2.30473e-05 2.45141e-05 2.59115e-05 2.72397e-05 2.84988e-05 2.96888e-05 3.081e-05 3.18623e-05 3.2846e-05 3.37612e-05 3.46081e-05 3.53869e-05 3.60978e-05 3.67412e-05 3.73174e-05 3.78271e-05 3.82712e-05 3.8651e-05 3.89688e-05 3.92277e-05 3.94333e-05 3.95929e-05 3.97162e-05 3.98132e-05 3.98925e-05 3.99606e-05 4.00215e-05 4.00778e-05 4.01309e-05 4.01819e-05 4.02312e-05 4.02794e-05 4.03265e-05 4.03729e-05 4.04187e-05 4.04639e-05 4.05087e-05 4.05531e-05 4.05971e-05 DataSetFinish DataSetStart DataSetName, idvd MeasurementType, DC BatchName, opt_ex22 WaferName, Silvaco DieName, Silvaco DeviceName, n1x1 Temperature, 125 FabDate, 01 Nov 2018 UserDate, 01 Nov 2018 Attribute, L, 1e-06 Attribute, W, 1e-06 NodeNames, d g s b Sweep, 1, V, D, LIN, 0, 1, CALCULATED, 51, 0.1, 0 Sweep, 2, V, G, LIN, 0.4, 1, CALCULATED, 5, 0.1, 0 Constant, V, B, 0, 0.1, 0 Constant, V, S, 0, 0.1, 0 Target, I, D Function, gds, derivative (vd, id) Plot, idvd, XY (LIN LIN), VD, ID Plot, gds, XY (LIN LOG), vd, gds DataArray, ID 0 4.99093e-07 9.50221e-07 1.35401e-06 1.7111e-06 2.02213e-06 2.28782e-06 2.50896e-06 2.68661e-06 2.82245e-06 2.91961e-06 2.98419e-06 3.02578e-06 3.05423e-06 3.07595e-06 3.09413e-06 3.11024e-06 3.12503e-06 3.13889e-06 3.15208e-06 3.16474e-06 3.17698e-06 3.18889e-06 3.20051e-06 3.2119e-06 3.22308e-06 3.23409e-06 3.24495e-06 3.25567e-06 3.26627e-06 3.27676e-06 3.28716e-06 3.29747e-06 3.3077e-06 3.31785e-06 3.32794e-06 3.33797e-06 3.34795e-06 3.35787e-06 3.36774e-06 3.37757e-06 3.38736e-06 3.39711e-06 3.40682e-06 3.4165e-06 3.42615e-06 3.43576e-06 3.44535e-06 3.45492e-06 3.46446e-06 3.47397e-06 0 7.71286e-07 1.49319e-06 2.16625e-06 2.791e-06 3.36794e-06 3.89762e-06 4.38055e-06 4.81725e-06 5.20828e-06 5.55422e-06 5.85568e-06 6.11342e-06 6.32844e-06 6.5022e-06 6.63722e-06 6.73786e-06 6.81097e-06 6.86477e-06 6.90642e-06 6.94067e-06 6.97027e-06 6.99678e-06 7.02111e-06 7.04384e-06 7.06533e-06 7.08584e-06 7.10555e-06 7.12461e-06 7.14312e-06 7.16115e-06 7.17878e-06 7.19605e-06 7.21301e-06 7.22969e-06 7.24613e-06 7.26234e-06 7.27836e-06 7.29419e-06 7.30985e-06 7.32537e-06 7.34075e-06 7.356e-06 7.37113e-06 7.38615e-06 7.40107e-06 7.41589e-06 7.43063e-06 7.44528e-06 7.45986e-06 7.47436e-06 0 9.50307e-07 1.85422e-06 2.71215e-06 3.52453e-06 4.29177e-06 5.01428e-06 5.69246e-06 6.32672e-06 6.91748e-06 7.46512e-06 7.97006e-06 8.43271e-06 8.85349e-06 9.23286e-06 9.57128e-06 9.86933e-06 1.01277e-05 1.03472e-05 1.05294e-05 1.06763e-05 1.07917e-05 1.0881e-05 1.09504e-05 1.10061e-05 1.10527e-05 1.1093e-05 1.1129e-05 1.11619e-05 1.11923e-05 1.1221e-05 1.12481e-05 1.12741e-05 1.1299e-05 1.13231e-05 1.13465e-05 1.13692e-05 1.13914e-05 1.14132e-05 1.14345e-05 1.14554e-05 1.14759e-05 1.14962e-05 1.15162e-05 1.15359e-05 1.15554e-05 1.15746e-05 1.15937e-05 1.16126e-05 1.16313e-05 1.16499e-05 0 1.058e-06 2.07398e-06 3.04828e-06 3.98121e-06 4.87309e-06 5.72425e-06 6.53498e-06 7.30562e-06 8.03645e-06 8.7278e-06 9.37997e-06 9.99327e-06 1.0568e-05 1.11045e-05 1.1603e-05 1.20638e-05 1.24874e-05 1.2874e-05 1.3224e-05 1.35377e-05 1.38158e-05 1.40589e-05 1.42677e-05 1.44438e-05 1.4589e-05 1.47067e-05 1.48013e-05 1.48778e-05 1.49412e-05 1.49953e-05 1.50427e-05 1.50852e-05 1.51241e-05 1.51602e-05 1.5194e-05 1.52261e-05 1.52567e-05 1.5286e-05 1.53142e-05 1.53416e-05 1.53681e-05 1.5394e-05 1.54192e-05 1.54439e-05 1.54681e-05 1.54919e-05 1.55153e-05 1.55383e-05 1.55609e-05 1.55833e-05 0 1.11609e-06 2.19481e-06 3.23643e-06 4.24118e-06 5.20931e-06 6.14105e-06 7.03665e-06 7.89634e-06 8.72037e-06 9.50895e-06 1.02623e-05 1.09807e-05 1.16644e-05 1.23136e-05 1.29284e-05 1.35093e-05 1.40562e-05 1.45696e-05 1.50497e-05 1.54966e-05 1.59106e-05 1.62921e-05 1.66412e-05 1.69583e-05 1.72437e-05 1.74979e-05 1.77216e-05 1.79154e-05 1.80809e-05 1.82198e-05 1.8335e-05 1.84302e-05 1.85095e-05 1.85768e-05 1.86352e-05 1.8687e-05 1.87339e-05 1.87769e-05 1.88169e-05 1.88545e-05 1.88901e-05 1.89241e-05 1.89566e-05 1.89879e-05 1.90182e-05 1.90476e-05 1.90761e-05 1.9104e-05 1.91312e-05 1.91579e-05 DataSetFinish DataSetStart DataSetName, idvd MeasurementType, DC BatchName, opt_ex22 WaferName, Silvaco DieName, Silvaco DeviceName, n1x10 Temperature, 125 FabDate, 01 Nov 2018 UserDate, 01 Nov 2018 Attribute, L, 1e-05 Attribute, W, 1e-06 NodeNames, d g s b Sweep, 1, V, D, LIN, 0, 1, CALCULATED, 51, 0.1, 0 Sweep, 2, V, G, LIN, 0.4, 1, CALCULATED, 5, 0.1, 0 Constant, V, B, 0, 0.1, 0 Constant, V, S, 0, 0.1, 0 Target, I, D Function, gds, derivative (vd, id) Plot, idvd, XY (LIN LIN), VD, ID Plot, gds, XY (LIN LOG), vd, gds DataArray, ID 0 5.48481e-08 1.04987e-07 1.50424e-07 1.91168e-07 2.27231e-07 2.58628e-07 2.85381e-07 3.07526e-07 3.25135e-07 3.38353e-07 3.47501e-07 3.5324e-07 3.56618e-07 3.58716e-07 3.60232e-07 3.61498e-07 3.62648e-07 3.63742e-07 3.64804e-07 3.65847e-07 3.66878e-07 3.679e-07 3.68917e-07 3.69929e-07 3.70937e-07 3.71943e-07 3.72946e-07 3.73947e-07 3.74947e-07 3.75945e-07 3.76942e-07 3.77938e-07 3.78933e-07 3.79927e-07 3.8092e-07 3.81912e-07 3.82904e-07 3.83895e-07 3.84885e-07 3.85875e-07 3.86865e-07 3.87854e-07 3.88842e-07 3.8983e-07 3.90818e-07 3.91805e-07 3.92792e-07 3.93779e-07 3.94766e-07 3.95752e-07 0 8.1957e-08 1.59179e-07 2.3167e-07 2.99438e-07 3.62488e-07 4.20827e-07 4.74461e-07 5.234e-07 5.67653e-07 6.07233e-07 6.42156e-07 6.72448e-07 6.98149e-07 7.19326e-07 7.36107e-07 7.48733e-07 7.57656e-07 7.63616e-07 7.67558e-07 7.70339e-07 7.72521e-07 7.74403e-07 7.7613e-07 7.77771e-07 7.79361e-07 7.80919e-07 7.82455e-07 7.83975e-07 7.85484e-07 7.86984e-07 7.88477e-07 7.89964e-07 7.91447e-07 7.92925e-07 7.944e-07 7.95872e-07 7.97341e-07 7.98808e-07 8.00273e-07 8.01736e-07 8.03197e-07 8.04657e-07 8.06115e-07 8.07572e-07 8.09027e-07 8.10482e-07 8.11935e-07 8.13387e-07 8.14839e-07 8.16289e-07 0 9.99972e-08 1.95575e-07 2.86737e-07 3.73487e-07 4.55832e-07 5.33773e-07 6.07317e-07 6.76469e-07 7.41233e-07 8.01615e-07 8.57621e-07 9.09258e-07 9.56535e-07 9.99462e-07 1.03805e-06 1.07232e-06 1.1023e-06 1.12803e-06 1.14958e-06 1.16707e-06 1.18072e-06 1.19087e-06 1.19812e-06 1.20322e-06 1.20692e-06 1.20982e-06 1.21227e-06 1.21448e-06 1.21655e-06 1.21854e-06 1.22047e-06 1.22237e-06 1.22424e-06 1.22609e-06 1.22793e-06 1.22976e-06 1.23158e-06 1.23339e-06 1.23519e-06 1.23699e-06 1.23878e-06 1.24057e-06 1.24236e-06 1.24414e-06 1.24592e-06 1.24769e-06 1.24947e-06 1.25124e-06 1.25301e-06 1.25477e-06 0 1.10868e-07 2.17742e-07 3.20625e-07 4.1952e-07 5.14429e-07 6.05358e-07 6.92308e-07 7.75283e-07 8.54287e-07 9.29324e-07 1.0004e-06 1.06751e-06 1.13067e-06 1.18987e-06 1.24513e-06 1.29645e-06 1.34384e-06 1.3873e-06 1.42685e-06 1.4625e-06 1.49427e-06 1.52218e-06 1.54629e-06 1.56666e-06 1.58341e-06 1.59673e-06 1.60695e-06 1.61453e-06 1.6201e-06 1.62428e-06 1.6276e-06 1.63042e-06 1.63295e-06 1.6353e-06 1.63755e-06 1.63973e-06 1.64186e-06 1.64395e-06 1.64603e-06 1.64808e-06 1.65012e-06 1.65214e-06 1.65416e-06 1.65616e-06 1.65816e-06 1.66016e-06 1.66214e-06 1.66413e-06 1.6661e-06 1.66808e-06 0 1.16548e-07 2.29545e-07 3.38993e-07 4.44895e-07 5.47253e-07 6.4607e-07 7.41348e-07 8.33089e-07 9.21297e-07 1.00597e-06 1.08712e-06 1.16474e-06 1.23884e-06 1.30942e-06 1.37648e-06 1.44003e-06 1.50006e-06 1.55659e-06 1.60962e-06 1.65915e-06 1.70519e-06 1.74774e-06 1.78681e-06 1.82242e-06 1.85457e-06 1.88329e-06 1.90861e-06 1.93057e-06 1.94925e-06 1.96475e-06 1.97725e-06 1.98705e-06 1.99452e-06 2.00019e-06 2.00456e-06 2.0081e-06 2.01113e-06 2.01384e-06 2.01636e-06 2.01875e-06 2.02107e-06 2.02334e-06 2.02557e-06 2.02776e-06 2.02994e-06 2.03209e-06 2.03424e-06 2.03637e-06 2.03849e-06 2.0406e-06 DataSetFinish DataSetStart DataSetName, idvd MeasurementType, DC BatchName, opt_ex22 WaferName, Silvaco DieName, Silvaco DeviceName, n3x10 Temperature, 125 FabDate, 01 Nov 2018 UserDate, 01 Nov 2018 Attribute, L, 1e-05 Attribute, W, 3e-06 NodeNames, d g s b Sweep, 1, V, D, LIN, 0, 1, CALCULATED, 51, 0.1, 0 Sweep, 2, V, G, LIN, 0.4, 1, CALCULATED, 5, 0.1, 0 Constant, V, B, 0, 0.1, 0 Constant, V, S, 0, 0.1, 0 Target, I, D Function, gds, derivative (vd, id) Plot, idvd, XY (LIN LIN), VD, ID Plot, gds, XY (LIN LOG), vd, gds DataArray, ID 0 1.6453e-07 3.15081e-07 4.51677e-07 5.74345e-07 6.83116e-07 7.78035e-07 8.59163e-07 9.26606e-07 9.80557e-07 1.02141e-06 1.05004e-06 1.06825e-06 1.07904e-06 1.08566e-06 1.09036e-06 1.09423e-06 1.09771e-06 1.10101e-06 1.1042e-06 1.10734e-06 1.11043e-06 1.1135e-06 1.11655e-06 1.11959e-06 1.12261e-06 1.12563e-06 1.12864e-06 1.13164e-06 1.13464e-06 1.13763e-06 1.14062e-06 1.1436e-06 1.14659e-06 1.14957e-06 1.15254e-06 1.15552e-06 1.15849e-06 1.16146e-06 1.16443e-06 1.1674e-06 1.17037e-06 1.17333e-06 1.1763e-06 1.17926e-06 1.18222e-06 1.18518e-06 1.18814e-06 1.1911e-06 1.19405e-06 1.19701e-06 0 2.44626e-07 4.75212e-07 6.91774e-07 8.94329e-07 1.0829e-06 1.25749e-06 1.41814e-06 1.56487e-06 1.6977e-06 1.81668e-06 1.92184e-06 2.01327e-06 2.09107e-06 2.15544e-06 2.20672e-06 2.24559e-06 2.27329e-06 2.29191e-06 2.30422e-06 2.31282e-06 2.31948e-06 2.32518e-06 2.33038e-06 2.3353e-06 2.34006e-06 2.34472e-06 2.34931e-06 2.35386e-06 2.35836e-06 2.36284e-06 2.3673e-06 2.37174e-06 2.37617e-06 2.38058e-06 2.38498e-06 2.38937e-06 2.39376e-06 2.39814e-06 2.40251e-06 2.40688e-06 2.41124e-06 2.41559e-06 2.41994e-06 2.42429e-06 2.42863e-06 2.43297e-06 2.43731e-06 2.44164e-06 2.44597e-06 2.4503e-06 0 2.97891e-07 5.82678e-07 8.54374e-07 1.11299e-06 1.35854e-06 1.59105e-06 1.81051e-06 2.01695e-06 2.21038e-06 2.39082e-06 2.55829e-06 2.71281e-06 2.8544e-06 2.98308e-06 3.09891e-06 3.20194e-06 3.29223e-06 3.36991e-06 3.43518e-06 3.48837e-06 3.53006e-06 3.56129e-06 3.58368e-06 3.59943e-06 3.61082e-06 3.61964e-06 3.62707e-06 3.63371e-06 3.63992e-06 3.64586e-06 3.65164e-06 3.6573e-06 3.66289e-06 3.66841e-06 3.6739e-06 3.67934e-06 3.68476e-06 3.69015e-06 3.69553e-06 3.70089e-06 3.70623e-06 3.71156e-06 3.71688e-06 3.72218e-06 3.72748e-06 3.73277e-06 3.73805e-06 3.74333e-06 3.7486e-06 3.75386e-06 0 3.2995e-07 6.48056e-07 9.54329e-07 1.24878e-06 1.53141e-06 1.80224e-06 2.06128e-06 2.30853e-06 2.54401e-06 2.76772e-06 2.97968e-06 3.17991e-06 3.3684e-06 3.54519e-06 3.71027e-06 3.86368e-06 4.00542e-06 4.13552e-06 4.25402e-06 4.36095e-06 4.45637e-06 4.54037e-06 4.61306e-06 4.67464e-06 4.72546e-06 4.76604e-06 4.7973e-06 4.82059e-06 4.83769e-06 4.85049e-06 4.86059e-06 4.86911e-06 4.8767e-06 4.88375e-06 4.89047e-06 4.89697e-06 4.90332e-06 4.90957e-06 4.91575e-06 4.92186e-06 4.92793e-06 4.93396e-06 4.93996e-06 4.94594e-06 4.95189e-06 4.95782e-06 4.96373e-06 4.96963e-06 4.97552e-06 4.98139e-06 0 3.46622e-07 6.82716e-07 1.00829e-06 1.32335e-06 1.6279e-06 1.92195e-06 2.20552e-06 2.47859e-06 2.74119e-06 2.99332e-06 3.235e-06 3.46621e-06 3.68699e-06 3.89732e-06 4.09723e-06 4.28672e-06 4.46581e-06 4.63449e-06 4.7928e-06 4.94073e-06 5.07831e-06 5.20555e-06 5.32248e-06 5.42914e-06 5.52555e-06 5.61179e-06 5.68793e-06 5.7541e-06 5.8105e-06 5.85746e-06 5.89547e-06 5.92534e-06 5.94821e-06 5.96553e-06 5.97889e-06 5.98962e-06 5.99874e-06 6.00688e-06 6.01443e-06 6.02159e-06 6.02852e-06 6.03527e-06 6.0419e-06 6.04844e-06 6.05492e-06 6.06134e-06 6.06771e-06 6.07405e-06 6.08036e-06 6.08664e-06 DataSetFinish DataSetStart DataSetName, idvglin MeasurementType, DC BatchName, opt_ex22 WaferName, Silvaco DieName, Silvaco DeviceName, n10x1 Temperature, 125 FabDate, 01 Nov 2018 UserDate, 01 Nov 2018 Attribute, L, 1e-06 Attribute, W, 1e-05 NodeNames, d g s b Sweep, 1, V, G, LIN, 0, 1, CALCULATED, 51, 0.1, 0 Sweep, 2, V, B, LIN, 0, -0.4, CALCULATED, 6, 0.1, 0 Constant, V, D, 0.1, 0.1, 0 Constant, V, S, 0, 0.1, 0 Target, I, D Function, gm, derivative (vg, id) Plot, idvg, XYY (LIN LIN LIN), VG, ID, gm DataArray, ID 1.35956e-07 1.90464e-07 2.66441e-07 3.72215e-07 5.19177e-07 7.22626e-07 1.00256e-06 1.38409e-06 1.89692e-06 2.57297e-06 3.44114e-06 4.5195e-06 5.80926e-06 7.29565e-06 8.95325e-06 1.07508e-05 1.26542e-05 1.46292e-05 1.66434e-05 1.86675e-05 2.06766e-05 2.26503e-05 2.45728e-05 2.64327e-05 2.82218e-05 2.99351e-05 3.15701e-05 3.31258e-05 3.46027e-05 3.60023e-05 3.73265e-05 3.85778e-05 3.97588e-05 4.08723e-05 4.1921e-05 4.29076e-05 4.38349e-05 4.47054e-05 4.55216e-05 4.62858e-05 4.70003e-05 4.76672e-05 4.82886e-05 4.88665e-05 4.94029e-05 4.98994e-05 5.03579e-05 5.07801e-05 5.11675e-05 5.15217e-05 5.18443e-05 9.55335e-08 1.34201e-07 1.88193e-07 2.63504e-07 3.68408e-07 5.14221e-07 7.16128e-07 9.93959e-07 1.37256e-06 1.8812e-06 2.55113e-06 3.41023e-06 4.47517e-06 5.74583e-06 7.20645e-06 8.83106e-06 1.05882e-05 1.24439e-05 1.43645e-05 1.63181e-05 1.82765e-05 2.02159e-05 2.21171e-05 2.39653e-05 2.575e-05 2.74639e-05 2.91029e-05 3.06648e-05 3.21494e-05 3.35573e-05 3.48904e-05 3.61507e-05 3.7341e-05 3.84638e-05 3.95221e-05 4.05186e-05 4.14559e-05 4.23368e-05 4.31638e-05 4.39393e-05 4.46656e-05 4.53449e-05 4.59793e-05 4.65708e-05 4.71212e-05 4.76325e-05 4.81063e-05 4.85444e-05 4.89483e-05 4.93195e-05 4.96596e-05 6.76566e-08 9.53117e-08 1.34004e-07 1.88066e-07 2.63512e-07 3.68646e-07 5.14809e-07 7.17197e-07 9.95603e-07 1.37473e-06 1.8835e-06 2.55243e-06 3.40811e-06 4.4654e-06 5.72237e-06 7.162e-06 8.75768e-06 1.04777e-05 1.22886e-05 1.41569e-05 1.60521e-05 1.79469e-05 1.98188e-05 2.16497e-05 2.3426e-05 2.51383e-05 2.67803e-05 2.83483e-05 2.98409e-05 3.12581e-05 3.26011e-05 3.38718e-05 3.50726e-05 3.6206e-05 3.7275e-05 3.82823e-05 3.92306e-05 4.01227e-05 4.09611e-05 4.17484e-05 4.24868e-05 4.31787e-05 4.38261e-05 4.4431e-05 4.49954e-05 4.55211e-05 4.60098e-05 4.64633e-05 4.68829e-05 4.72704e-05 4.76272e-05 4.82458e-08 6.81636e-08 9.60932e-08 1.35192e-07 1.89848e-07 2.66154e-07 3.72511e-07 5.20377e-07 7.25068e-07 1.00646e-06 1.38921e-06 1.90194e-06 2.57435e-06 3.43146e-06 4.48593e-06 5.73364e-06 7.15612e-06 8.72607e-06 1.04117e-05 1.21798e-05 1.39979e-05 1.58364e-05 1.76694e-05 1.94756e-05 2.12384e-05 2.29455e-05 2.45881e-05 2.6161e-05 2.76613e-05 2.9088e-05 3.04415e-05 3.17233e-05 3.29354e-05 3.40804e-05 3.51609e-05 3.61797e-05 3.71397e-05 3.80435e-05 3.88938e-05 3.96932e-05 4.0444e-05 4.11485e-05 4.18088e-05 4.24271e-05 4.30051e-05 4.35449e-05 4.40481e-05 4.45163e-05 4.49512e-05 4.53543e-05 4.5727e-05 3.46181e-08 4.90499e-08 6.93378e-08 9.77998e-08 1.3766e-07 1.93402e-07 2.71244e-07 3.79753e-07 5.30587e-07 7.39279e-07 1.02589e-06 1.41511e-06 1.93526e-06 2.61511e-06 3.47783e-06 4.53345e-06 5.77544e-06 7.18374e-06 8.7304e-06 1.03836e-05 1.21106e-05 1.38801e-05 1.56634e-05 1.74362e-05 1.91787e-05 2.08755e-05 2.25155e-05 2.40912e-05 2.5598e-05 2.70336e-05 2.83976e-05 2.96908e-05 3.09148e-05 3.20718e-05 3.31644e-05 3.41954e-05 3.51675e-05 3.60835e-05 3.6946e-05 3.77577e-05 3.85209e-05 3.9238e-05 3.99112e-05 4.05426e-05 4.11341e-05 4.16876e-05 4.22048e-05 4.26873e-05 4.31368e-05 4.35548e-05 4.39427e-05 2.49813e-08 3.54937e-08 5.03114e-08 7.11491e-08 1.00392e-07 1.41358e-07 1.98661e-07 2.78693e-07 3.90252e-07 5.45273e-07 7.59595e-07 1.05354e-06 1.45189e-06 1.98265e-06 2.67348e-06 3.54535e-06 4.60537e-06 5.84433e-06 7.24066e-06 8.76577e-06 1.0388e-05 1.20752e-05 1.37971e-05 1.55266e-05 1.72408e-05 1.89212e-05 2.05541e-05 2.21295e-05 2.36407e-05 2.50842e-05 2.64581e-05 2.77625e-05 2.89985e-05 3.01679e-05 3.12731e-05 3.23166e-05 3.33011e-05 3.42296e-05 3.51045e-05 3.59286e-05 3.67043e-05 3.7434e-05 3.812e-05 3.87643e-05 3.93689e-05 3.99357e-05 4.04664e-05 4.09628e-05 4.14264e-05 4.18587e-05 4.22611e-05 DataSetFinish DataSetStart DataSetName, idvglin MeasurementType, DC BatchName, opt_ex22 WaferName, Silvaco DieName, Silvaco DeviceName, n10x10 Temperature, 125 FabDate, 01 Nov 2018 UserDate, 01 Nov 2018 Attribute, L, 1e-05 Attribute, W, 1e-05 NodeNames, d g s b Sweep, 1, V, G, LIN, 0, 1, CALCULATED, 51, 0.1, 0 Sweep, 2, V, B, LIN, 0, -0.4, CALCULATED, 6, 0.1, 0 Constant, V, D, 0.1, 0.1, 0 Constant, V, S, 0, 0.1, 0 Target, I, D Function, gm, derivative (vg, id) Plot, idvg, XYY (LIN LIN LIN), VG, ID, gm DataArray, ID 1.91407e-08 2.6799e-08 3.74842e-08 5.23661e-08 7.30194e-08 1.01505e-07 1.40413e-07 1.92808e-07 2.61976e-07 3.50853e-07 4.61179e-07 5.92911e-07 7.44437e-07 9.13183e-07 1.09608e-06 1.28983e-06 1.49114e-06 1.69686e-06 1.90415e-06 2.11056e-06 2.31406e-06 2.51305e-06 2.70632e-06 2.89298e-06 3.07247e-06 3.2444e-06 3.40862e-06 3.56507e-06 3.71382e-06 3.85498e-06 3.98874e-06 4.11529e-06 4.23485e-06 4.34766e-06 4.45396e-06 4.55397e-06 4.64792e-06 4.73605e-06 4.81857e-06 4.89569e-06 4.96764e-06 5.0346e-06 5.09678e-06 5.15438e-06 5.20757e-06 5.25653e-06 5.30146e-06 5.34251e-06 5.37985e-06 5.41366e-06 5.44408e-06 1.34221e-08 1.8831e-08 2.63887e-08 3.69388e-08 5.16382e-08 7.20437e-08 1.00192e-07 1.38639e-07 1.90404e-07 2.58704e-07 3.46385e-07 4.5507e-07 5.84612e-07 7.33312e-07 8.98546e-07 1.07721e-06 1.26602e-06 1.46168e-06 1.66112e-06 1.86156e-06 2.06066e-06 2.25648e-06 2.44753e-06 2.63268e-06 2.81115e-06 2.98244e-06 3.14625e-06 3.30246e-06 3.45108e-06 3.5922e-06 3.72598e-06 3.85262e-06 3.97233e-06 4.08535e-06 4.19192e-06 4.29228e-06 4.38668e-06 4.47534e-06 4.55849e-06 4.63635e-06 4.70913e-06 4.77703e-06 4.84026e-06 4.89901e-06 4.95345e-06 5.00377e-06 5.05015e-06 5.09275e-06 5.13174e-06 5.16727e-06 5.1995e-06 9.48822e-09 1.33421e-08 1.87337e-08 2.62709e-08 3.6796e-08 5.14633e-08 7.18244e-08 9.99049e-08 1.3824e-07 1.89807e-07 2.57752e-07 3.44799e-07 4.5241e-07 5.80281e-07 7.26607e-07 8.887e-07 1.06344e-06 1.24753e-06 1.43775e-06 1.63109e-06 1.82487e-06 2.01686e-06 2.20523e-06 2.3886e-06 2.56595e-06 2.73659e-06 2.90008e-06 3.0562e-06 3.20489e-06 3.34617e-06 3.4802e-06 3.60713e-06 3.7272e-06 3.84062e-06 3.94766e-06 4.04854e-06 4.14353e-06 4.23284e-06 4.31673e-06 4.3954e-06 4.46909e-06 4.53798e-06 4.60228e-06 4.66219e-06 4.71788e-06 4.76954e-06 4.81734e-06 4.86144e-06 4.902e-06 4.93918e-06 4.97313e-06 6.75409e-09 9.52099e-09 1.33974e-08 1.88232e-08 2.64109e-08 3.70089e-08 5.1778e-08 7.22754e-08 1.00528e-07 1.39059e-07 1.9081e-07 2.58847e-07 3.45743e-07 4.52758e-07 5.7939e-07 7.23708e-07 8.82959e-07 1.05401e-06 1.23359e-06 1.41854e-06 1.60593e-06 1.79323e-06 1.9783e-06 2.15945e-06 2.33541e-06 2.50527e-06 2.66841e-06 2.82449e-06 2.97334e-06 3.11493e-06 3.24935e-06 3.37674e-06 3.49732e-06 3.61131e-06 3.71894e-06 3.82047e-06 3.91616e-06 4.00623e-06 4.09093e-06 4.17048e-06 4.24511e-06 4.31501e-06 4.38041e-06 4.44147e-06 4.4984e-06 4.55137e-06 4.60054e-06 4.64609e-06 4.68816e-06 4.72691e-06 4.76249e-06 4.83717e-09 6.83659e-09 9.64277e-09 1.3576e-08 1.90833e-08 2.6787e-08 3.75481e-08 5.25423e-08 7.33419e-08 1.01985e-07 1.40992e-07 1.9327e-07 2.61792e-07 3.48954e-07 4.55769e-07 5.81511e-07 7.2411e-07 8.80753e-07 1.0483e-06 1.22352e-06 1.40334e-06 1.58495e-06 1.76592e-06 1.94426e-06 2.11842e-06 2.28723e-06 2.44989e-06 2.60588e-06 2.75491e-06 2.89687e-06 3.03177e-06 3.15974e-06 3.28095e-06 3.39561e-06 3.50395e-06 3.60623e-06 3.7027e-06 3.7936e-06 3.87917e-06 3.95964e-06 4.03524e-06 4.10618e-06 4.17267e-06 4.23488e-06 4.29302e-06 4.34726e-06 4.39777e-06 4.4447e-06 4.48822e-06 4.52847e-06 4.56561e-06 3.48324e-09 4.93608e-09 6.97949e-09 9.84849e-09 1.38711e-08 1.95051e-08 2.73874e-08 3.83974e-08 5.37337e-08 7.49925e-08 1.04231e-07 1.43973e-07 1.97091e-07 2.66448e-07 3.5423e-07 4.61169e-07 5.86294e-07 7.27392e-07 8.81599e-07 1.04578e-06 1.21677e-06 1.39158e-06 1.56752e-06 1.74233e-06 1.91414e-06 2.08152e-06 2.24345e-06 2.3992e-06 2.54835e-06 2.69068e-06 2.82611e-06 2.95472e-06 3.07663e-06 3.19205e-06 3.30118e-06 3.40428e-06 3.5016e-06 3.59338e-06 3.67986e-06 3.76129e-06 3.83789e-06 3.90987e-06 3.97744e-06 4.04079e-06 4.10012e-06 4.1556e-06 4.20739e-06 4.25566e-06 4.30057e-06 4.34225e-06 4.38086e-06 DataSetFinish DataSetStart DataSetName, idvglin MeasurementType, DC BatchName, opt_ex22 WaferName, Silvaco DieName, Silvaco DeviceName, n10x2 Temperature, 125 FabDate, 01 Nov 2018 UserDate, 01 Nov 2018 Attribute, L, 2e-06 Attribute, W, 1e-05 NodeNames, d g s b Sweep, 1, V, G, LIN, 0, 1, CALCULATED, 51, 0.1, 0 Sweep, 2, V, B, LIN, 0, -0.4, CALCULATED, 6, 0.1, 0 Constant, V, D, 0.1, 0.1, 0 Constant, V, S, 0, 0.1, 0 Target, I, D Function, gm, derivative (vg, id) Plot, idvg, XYY (LIN LIN LIN), VG, ID, gm DataArray, ID 8.27136e-08 1.15821e-07 1.61993e-07 2.26294e-07 3.15595e-07 4.39009e-07 6.08203e-07 8.37384e-07 1.14255e-06 1.53944e-06 2.03983e-06 2.64774e-06 3.35844e-06 4.16093e-06 5.04065e-06 5.98126e-06 6.96587e-06 7.97806e-06 9.00268e-06 1.00265e-05 1.10384e-05 1.20294e-05 1.29928e-05 1.39237e-05 1.48188e-05 1.5676e-05 1.64942e-05 1.72732e-05 1.80134e-05 1.87153e-05 1.93799e-05 2.00083e-05 2.06018e-05 2.11616e-05 2.1689e-05 2.21852e-05 2.26514e-05 2.30889e-05 2.34987e-05 2.38822e-05 2.42402e-05 2.45738e-05 2.48842e-05 2.51721e-05 2.54387e-05 2.56847e-05 2.59111e-05 2.61186e-05 2.63082e-05 2.64807e-05 2.66367e-05 5.80546e-08 8.14839e-08 1.14207e-07 1.59869e-07 2.23487e-07 3.1187e-07 4.34036e-07 6.0152e-07 8.28339e-07 1.13021e-06 1.52243e-06 2.01624e-06 2.61498e-06 3.31345e-06 4.10028e-06 4.96075e-06 5.87848e-06 6.83668e-06 7.81918e-06 8.81126e-06 9.80011e-06 1.07751e-05 1.1728e-05 1.26524e-05 1.35439e-05 1.43996e-05 1.52178e-05 1.59976e-05 1.67392e-05 1.7443e-05 1.81097e-05 1.87405e-05 1.93365e-05 1.9899e-05 2.04293e-05 2.09287e-05 2.13984e-05 2.18397e-05 2.22538e-05 2.26418e-05 2.30048e-05 2.33439e-05 2.366e-05 2.39542e-05 2.42274e-05 2.44805e-05 2.47143e-05 2.49297e-05 2.51275e-05 2.53085e-05 2.54734e-05 4.1071e-08 5.77931e-08 8.11841e-08 1.13872e-07 1.59504e-07 2.23099e-07 3.11456e-07 4.33568e-07 6.00906e-07 8.27343e-07 1.12831e-06 1.51861e-06 2.0087e-06 2.60106e-06 3.28976e-06 4.06305e-06 4.906e-06 5.80224e-06 6.73519e-06 7.68903e-06 8.64952e-06 9.60441e-06 1.05437e-05 1.14596e-05 1.23465e-05 1.32002e-05 1.40183e-05 1.47994e-05 1.5543e-05 1.62494e-05 1.69191e-05 1.75531e-05 1.81525e-05 1.87185e-05 1.92525e-05 1.97558e-05 2.02296e-05 2.06753e-05 2.1094e-05 2.14869e-05 2.18551e-05 2.21997e-05 2.25218e-05 2.28222e-05 2.3102e-05 2.3362e-05 2.3603e-05 2.3826e-05 2.40317e-05 2.42209e-05 2.43943e-05 2.92565e-08 4.12791e-08 5.81266e-08 8.17054e-08 1.1467e-07 1.60702e-07 2.24862e-07 3.13992e-07 4.37119e-07 6.05703e-07 8.33514e-07 1.13569e-06 1.52644e-06 2.01525e-06 2.60352e-06 3.28447e-06 4.04591e-06 4.87272e-06 5.74861e-06 6.65726e-06 7.58331e-06 8.51306e-06 9.43494e-06 1.03396e-05 1.12198e-05 1.20704e-05 1.28879e-05 1.36701e-05 1.4416e-05 1.51254e-05 1.57986e-05 1.64364e-05 1.70398e-05 1.761e-05 1.81483e-05 1.86559e-05 1.91343e-05 1.95847e-05 2.00084e-05 2.04064e-05 2.078e-05 2.11303e-05 2.14582e-05 2.17649e-05 2.20511e-05 2.23179e-05 2.2566e-05 2.27963e-05 2.30096e-05 2.32066e-05 2.3388e-05 2.09681e-08 2.9666e-08 4.18806e-08 5.90049e-08 8.29809e-08 1.16511e-07 1.63342e-07 2.28612e-07 3.19256e-07 4.44381e-07 6.15485e-07 8.4626e-07 1.15153e-06 1.54479e-06 2.03438e-06 2.62042e-06 3.29523e-06 4.04612e-06 4.85785e-06 5.71426e-06 6.59938e-06 7.49837e-06 8.3982e-06 9.28795e-06 1.01589e-05 1.10046e-05 1.18204e-05 1.26031e-05 1.33511e-05 1.40636e-05 1.47406e-05 1.53825e-05 1.59904e-05 1.65651e-05 1.71081e-05 1.76206e-05 1.81039e-05 1.85593e-05 1.89881e-05 1.93914e-05 1.97706e-05 2.01265e-05 2.04604e-05 2.07731e-05 2.10657e-05 2.1339e-05 2.1594e-05 2.18313e-05 2.20519e-05 2.22564e-05 2.24455e-05 1.51111e-08 2.14378e-08 3.03437e-08 4.28549e-08 6.04011e-08 8.49749e-08 1.19349e-07 1.6736e-07 2.34264e-07 3.27126e-07 4.5518e-07 6.3e-07 8.65206e-07 1.17526e-06 1.57282e-06 2.06489e-06 2.65019e-06 3.32007e-06 4.06138e-06 4.85881e-06 5.69639e-06 6.55858e-06 7.43116e-06 8.30178e-06 9.16025e-06 9.99861e-06 1.08109e-05 1.15931e-05 1.23426e-05 1.3058e-05 1.37387e-05 1.4385e-05 1.49975e-05 1.55772e-05 1.61252e-05 1.66427e-05 1.71312e-05 1.75918e-05 1.80259e-05 1.84347e-05 1.88194e-05 1.9181e-05 1.95207e-05 1.98395e-05 2.01383e-05 2.0418e-05 2.06796e-05 2.09237e-05 2.11512e-05 2.13629e-05 2.15593e-05 DataSetFinish DataSetStart DataSetName, idvglin MeasurementType, DC BatchName, opt_ex22 WaferName, Silvaco DieName, Silvaco DeviceName, n10x5 Temperature, 125 FabDate, 01 Nov 2018 UserDate, 01 Nov 2018 Attribute, L, 5e-06 Attribute, W, 1e-05 NodeNames, d g s b Sweep, 1, V, G, LIN, 0, 1, CALCULATED, 51, 0.1, 0 Sweep, 2, V, B, LIN, 0, -0.4, CALCULATED, 6, 0.1, 0 Constant, V, D, 0.1, 0.1, 0 Constant, V, S, 0, 0.1, 0 Target, I, D Function, gm, derivative (vg, id) Plot, idvg, XYY (LIN LIN LIN), VG, ID, gm DataArray, ID 3.69428e-08 5.17244e-08 7.2346e-08 1.01067e-07 1.40935e-07 1.95952e-07 2.71174e-07 3.72626e-07 5.06857e-07 6.79874e-07 8.9549e-07 1.15404e-06 1.45258e-06 1.78615e-06 2.14864e-06 2.53349e-06 2.93404e-06 3.34392e-06 3.75738e-06 4.16939e-06 4.57583e-06 4.9734e-06 5.3596e-06 5.73263e-06 6.0913e-06 6.43485e-06 6.76292e-06 7.07543e-06 7.37249e-06 7.65435e-06 7.92138e-06 8.17398e-06 8.41261e-06 8.63775e-06 8.84987e-06 9.04945e-06 9.23695e-06 9.41285e-06 9.57757e-06 9.73157e-06 9.87525e-06 1.0009e-05 1.01333e-05 1.02485e-05 1.03549e-05 1.04529e-05 1.05429e-05 1.06252e-05 1.07002e-05 1.07681e-05 1.08294e-05 2.59115e-08 3.63566e-08 5.09494e-08 7.13182e-08 9.96981e-08 1.39104e-07 1.93492e-07 2.67855e-07 3.68127e-07 5.00728e-07 6.71484e-07 8.83978e-07 1.13831e-06 1.43139e-06 1.75811e-06 2.11233e-06 2.48746e-06 2.87689e-06 3.27438e-06 3.67431e-06 4.07186e-06 4.4631e-06 4.84493e-06 5.21506e-06 5.57186e-06 5.9143e-06 6.24177e-06 6.55401e-06 6.85103e-06 7.13302e-06 7.40029e-06 7.65326e-06 7.89236e-06 8.11809e-06 8.33093e-06 8.53136e-06 8.71989e-06 8.89697e-06 9.06306e-06 9.21861e-06 9.36405e-06 9.49978e-06 9.62621e-06 9.74372e-06 9.85268e-06 9.95346e-06 1.00464e-05 1.01318e-05 1.02101e-05 1.02814e-05 1.03463e-05 1.83207e-08 2.57661e-08 3.61816e-08 5.07405e-08 7.10694e-08 9.93998e-08 1.38738e-07 1.93021e-07 2.67202e-07 3.67143e-07 4.99125e-07 6.6874e-07 8.79251e-07 1.13044e-06 1.41897e-06 1.73961e-06 2.08617e-06 2.45208e-06 2.83082e-06 3.21628e-06 3.60306e-06 3.98654e-06 4.36303e-06 4.72966e-06 5.08433e-06 5.4256e-06 5.75259e-06 6.06483e-06 6.36216e-06 6.64466e-06 6.91261e-06 7.16635e-06 7.40633e-06 7.63302e-06 7.84692e-06 8.04853e-06 8.23835e-06 8.41685e-06 8.58451e-06 8.74178e-06 8.88909e-06 9.02686e-06 9.1555e-06 9.27538e-06 9.38687e-06 9.49034e-06 9.58613e-06 9.67456e-06 9.75596e-06 9.83064e-06 9.89888e-06 1.30436e-08 1.83909e-08 2.58828e-08 3.63685e-08 5.10312e-08 7.15098e-08 1.0005e-07 1.39671e-07 1.94315e-07 2.68917e-07 3.69275e-07 5.01519e-07 6.70958e-07 8.80448e-07 1.12936e-06 1.4141e-06 1.72929e-06 2.06869e-06 2.42579e-06 2.79418e-06 3.16795e-06 3.54191e-06 3.91172e-06 4.27391e-06 4.62585e-06 4.96565e-06 5.29207e-06 5.60436e-06 5.90217e-06 6.18543e-06 6.45432e-06 6.70914e-06 6.9503e-06 7.17824e-06 7.39348e-06 7.5965e-06 7.78782e-06 7.96793e-06 8.13731e-06 8.29641e-06 8.44568e-06 8.58554e-06 8.7164e-06 8.83864e-06 8.95263e-06 9.05874e-06 9.15729e-06 9.24863e-06 9.33305e-06 9.41087e-06 9.48237e-06 9.34315e-09 1.32084e-08 1.86339e-08 2.62387e-08 3.68866e-08 5.17801e-08 7.25835e-08 1.01573e-07 1.41799e-07 1.9723e-07 2.72801e-07 3.74249e-07 5.07536e-07 6.7763e-07 8.86901e-07 1.13426e-06 1.4158e-06 1.72601e-06 2.05864e-06 2.40724e-06 2.76557e-06 3.12795e-06 3.48943e-06 3.84593e-06 4.19426e-06 4.53202e-06 4.85755e-06 5.16976e-06 5.46806e-06 5.75219e-06 6.0222e-06 6.2783e-06 6.52084e-06 6.75026e-06 6.96703e-06 7.17165e-06 7.36464e-06 7.54649e-06 7.71769e-06 7.87871e-06 8.02999e-06 8.17197e-06 8.30505e-06 8.42964e-06 8.54608e-06 8.65476e-06 8.75599e-06 8.85011e-06 8.93743e-06 9.01825e-06 9.09285e-06 6.72921e-09 9.53851e-09 1.34905e-08 1.90399e-08 2.68211e-08 3.77188e-08 5.29644e-08 7.42597e-08 1.03926e-07 1.45064e-07 2.01683e-07 2.78731e-07 3.81886e-07 5.16911e-07 6.88373e-07 8.98082e-07 1.14444e-06 1.42322e-06 1.72881e-06 2.05496e-06 2.39531e-06 2.74383e-06 3.09507e-06 3.44437e-06 3.78794e-06 4.12284e-06 4.44694e-06 4.75876e-06 5.0574e-06 5.34237e-06 5.61355e-06 5.87104e-06 6.11511e-06 6.34615e-06 6.56461e-06 6.77098e-06 6.96576e-06 7.14946e-06 7.32256e-06 7.48555e-06 7.63888e-06 7.78299e-06 7.9183e-06 8.04519e-06 8.16404e-06 8.2752e-06 8.37903e-06 8.47583e-06 8.56593e-06 8.64961e-06 8.72715e-06 DataSetFinish DataSetStart DataSetName, idvglin MeasurementType, DC BatchName, opt_ex22 WaferName, Silvaco DieName, Silvaco DeviceName, n1x1 Temperature, 125 FabDate, 01 Nov 2018 UserDate, 01 Nov 2018 Attribute, L, 1e-06 Attribute, W, 1e-06 NodeNames, d g s b Sweep, 1, V, G, LIN, 0, 1, CALCULATED, 51, 0.1, 0 Sweep, 2, V, B, LIN, 0, -0.4, CALCULATED, 6, 0.1, 0 Constant, V, D, 0.1, 0.1, 0 Constant, V, S, 0, 0.1, 0 Target, I, D Function, gm, derivative (vg, id) Plot, idvg, XYY (LIN LIN LIN), VG, ID, gm DataArray, ID 1.22717e-08 1.72006e-08 2.40725e-08 3.3643e-08 4.69495e-08 6.53951e-08 9.08335e-08 1.25629e-07 1.72643e-07 2.35075e-07 3.16042e-07 4.17846e-07 5.41226e-07 6.85178e-07 8.47403e-07 1.02486e-06 1.21414e-06 1.41174e-06 1.61426e-06 1.81862e-06 2.02213e-06 2.22259e-06 2.41825e-06 2.60782e-06 2.79038e-06 2.96536e-06 3.13242e-06 3.29145e-06 3.44245e-06 3.58556e-06 3.72097e-06 3.84893e-06 3.9697e-06 4.08358e-06 4.19084e-06 4.29177e-06 4.38664e-06 4.47573e-06 4.55928e-06 4.63755e-06 4.71075e-06 4.77913e-06 4.84288e-06 4.90222e-06 4.95734e-06 5.00842e-06 5.05564e-06 5.09918e-06 5.1392e-06 5.17586e-06 5.20931e-06 8.60453e-09 1.2095e-08 1.69705e-08 2.3773e-08 3.32525e-08 4.64386e-08 6.47231e-08 8.9943e-08 1.24437e-07 1.71028e-07 2.32855e-07 3.1294e-07 4.13457e-07 5.35002e-07 6.76458e-07 8.35463e-07 1.00895e-06 1.19352e-06 1.38571e-06 1.58219e-06 1.77997e-06 1.97649e-06 2.16964e-06 2.3578e-06 2.53977e-06 2.71473e-06 2.88218e-06 3.04185e-06 3.19367e-06 3.33769e-06 3.47407e-06 3.60302e-06 3.72481e-06 3.83971e-06 3.94801e-06 4.04999e-06 4.14595e-06 4.23615e-06 4.32085e-06 4.4003e-06 4.47475e-06 4.54442e-06 4.60952e-06 4.67026e-06 4.72683e-06 4.77943e-06 4.82823e-06 4.8734e-06 4.91509e-06 4.95348e-06 4.98871e-06 6.08087e-09 8.57279e-09 1.20609e-08 1.69365e-08 2.37431e-08 3.32324e-08 4.6436e-08 6.47461e-08 8.99965e-08 1.24514e-07 1.71094e-07 2.32813e-07 3.12583e-07 4.12409e-07 5.32697e-07 6.72182e-07 8.28422e-07 9.98324e-07 1.1785e-06 1.36555e-06 1.55623e-06 1.74767e-06 1.93741e-06 2.1235e-06 2.30442e-06 2.47908e-06 2.64676e-06 2.80703e-06 2.95967e-06 3.10467e-06 3.24211e-06 3.37217e-06 3.49508e-06 3.61112e-06 3.72057e-06 3.82371e-06 3.92083e-06 4.01222e-06 4.09812e-06 4.17881e-06 4.25453e-06 4.3255e-06 4.39195e-06 4.45408e-06 4.51209e-06 4.56617e-06 4.61649e-06 4.66323e-06 4.70654e-06 4.74659e-06 4.78351e-06 4.32744e-09 6.11888e-09 8.63255e-09 1.21532e-08 1.70769e-08 2.39535e-08 3.35434e-08 4.68884e-08 6.5392e-08 9.08966e-08 1.25729e-07 1.72662e-07 2.34711e-07 3.14656e-07 4.14294e-07 5.33803e-07 6.71742e-07 8.25579e-07 9.92197e-07 1.16824e-06 1.35036e-06 1.53545e-06 1.72074e-06 1.90392e-06 2.08317e-06 2.2571e-06 2.42473e-06 2.58543e-06 2.73884e-06 2.8848e-06 3.02334e-06 3.15456e-06 3.27869e-06 3.39595e-06 3.50662e-06 3.61099e-06 3.70934e-06 3.80196e-06 3.88911e-06 3.97107e-06 4.04807e-06 4.12035e-06 4.18814e-06 4.25164e-06 4.31106e-06 4.36658e-06 4.41838e-06 4.46663e-06 4.51149e-06 4.55312e-06 4.59167e-06 3.09909e-09 4.39471e-09 6.21749e-09 8.77636e-09 1.23619e-08 1.73783e-08 2.43865e-08 3.41617e-08 4.77638e-08 6.66171e-08 9.25831e-08 1.27997e-07 1.75616e-07 2.38384e-07 3.18929e-07 4.18802e-07 5.37916e-07 6.74642e-07 8.26356e-07 9.89922e-07 1.16202e-06 1.3394e-06 1.51906e-06 1.69838e-06 1.8752e-06 2.04783e-06 2.21501e-06 2.37588e-06 2.52988e-06 2.67674e-06 2.81635e-06 2.94876e-06 3.07412e-06 3.19265e-06 3.3046e-06 3.41024e-06 3.50987e-06 3.60376e-06 3.69219e-06 3.77543e-06 3.85372e-06 3.92731e-06 3.99643e-06 4.06128e-06 4.12208e-06 4.179e-06 4.23223e-06 4.28194e-06 4.3283e-06 4.37144e-06 4.41153e-06 2.23234e-09 3.17436e-09 4.50336e-09 6.37375e-09 9.00035e-09 1.2682e-08 1.78341e-08 2.50335e-08 3.50756e-08 4.90464e-08 6.83992e-08 9.50236e-08 1.31271e-07 1.79882e-07 2.43722e-07 3.25233e-07 4.25689e-07 5.44711e-07 6.80475e-07 8.3027e-07 9.90952e-07 1.15926e-06 1.33203e-06 1.5064e-06 1.67991e-06 1.85055e-06 2.01677e-06 2.17744e-06 2.3318e-06 2.47939e-06 2.61999e-06 2.75355e-06 2.88015e-06 2.99997e-06 3.11322e-06 3.22018e-06 3.32111e-06 3.4163e-06 3.50603e-06 3.59056e-06 3.67015e-06 3.74504e-06 3.81547e-06 3.88165e-06 3.94379e-06 4.00208e-06 4.05669e-06 4.10781e-06 4.1556e-06 4.2002e-06 4.24176e-06 DataSetFinish DataSetStart DataSetName, idvglin MeasurementType, DC BatchName, opt_ex22 WaferName, Silvaco DieName, Silvaco DeviceName, n1x10 Temperature, 125 FabDate, 01 Nov 2018 UserDate, 01 Nov 2018 Attribute, L, 1e-05 Attribute, W, 1e-06 NodeNames, d g s b Sweep, 1, V, G, LIN, 0, 1, CALCULATED, 51, 0.1, 0 Sweep, 2, V, B, LIN, 0, -0.4, CALCULATED, 6, 0.1, 0 Constant, V, D, 0.1, 0.1, 0 Constant, V, S, 0, 0.1, 0 Target, I, D Function, gm, derivative (vg, id) Plot, idvg, XYY (LIN LIN LIN), VG, ID, gm DataArray, ID 1.73069e-09 2.42386e-09 3.39121e-09 4.73935e-09 6.61277e-09 9.20266e-09 1.27531e-08 1.75597e-08 2.39528e-08 3.22512e-08 4.26834e-08 5.53089e-08 7.00105e-08 8.65508e-08 1.04628e-07 1.23911e-07 1.4406e-07 1.64748e-07 1.85673e-07 2.06574e-07 2.27231e-07 2.47469e-07 2.67152e-07 2.86183e-07 3.04495e-07 3.22046e-07 3.38815e-07 3.54794e-07 3.69987e-07 3.84408e-07 3.98072e-07 4.11001e-07 4.23217e-07 4.34745e-07 4.45608e-07 4.55832e-07 4.65439e-07 4.74453e-07 4.82898e-07 4.90796e-07 4.98167e-07 5.05033e-07 5.11414e-07 5.1733e-07 5.228e-07 5.27843e-07 5.32475e-07 5.36716e-07 5.40582e-07 5.44089e-07 5.47253e-07 1.21125e-09 1.70008e-09 2.3832e-09 3.33705e-09 4.66692e-09 6.51556e-09 9.07172e-09 1.25762e-08 1.732e-08 2.36272e-08 3.18081e-08 4.20797e-08 5.44904e-08 6.89138e-08 8.51068e-08 1.02765e-07 1.21555e-07 1.41141e-07 1.61199e-07 1.81438e-07 2.01603e-07 2.21486e-07 2.40922e-07 2.59785e-07 2.77987e-07 2.9547e-07 3.122e-07 3.28159e-07 3.43346e-07 3.57769e-07 3.71443e-07 3.84388e-07 3.96626e-07 4.08182e-07 4.19081e-07 4.29346e-07 4.39004e-07 4.48079e-07 4.56592e-07 4.64568e-07 4.72028e-07 4.78993e-07 4.85484e-07 4.91519e-07 4.97119e-07 5.02301e-07 5.07083e-07 5.11482e-07 5.15515e-07 5.19198e-07 5.22546e-07 8.54551e-10 1.20232e-09 1.68895e-09 2.36935e-09 3.31978e-09 4.64523e-09 6.48787e-09 9.03539e-09 1.25266e-08 1.72491e-08 2.35204e-08 3.16403e-08 4.18105e-08 5.40627e-08 6.82581e-08 8.41462e-08 1.01419e-07 1.19746e-07 1.38792e-07 1.58243e-07 1.77815e-07 1.97267e-07 2.16401e-07 2.35062e-07 2.53138e-07 2.70549e-07 2.87243e-07 3.03194e-07 3.18391e-07 3.32836e-07 3.46541e-07 3.59523e-07 3.71804e-07 3.83408e-07 3.94359e-07 4.04683e-07 4.14406e-07 4.23552e-07 4.32144e-07 4.40207e-07 4.47762e-07 4.5483e-07 4.61432e-07 4.67588e-07 4.73316e-07 4.78635e-07 4.83562e-07 4.88114e-07 4.92308e-07 4.96159e-07 4.99681e-07 6.07099e-10 8.56383e-10 1.20576e-09 1.69488e-09 2.37904e-09 3.33501e-09 4.66832e-09 6.52161e-09 9.08274e-09 1.25897e-08 1.73273e-08 2.36065e-08 3.17143e-08 4.18332e-08 5.39739e-08 6.79823e-08 8.36e-08 1.00517e-07 1.18402e-07 1.36929e-07 1.55792e-07 1.74718e-07 1.93477e-07 2.11885e-07 2.298e-07 2.47119e-07 2.63773e-07 2.79717e-07 2.94932e-07 3.0941e-07 3.2316e-07 3.36194e-07 3.48532e-07 3.60198e-07 3.71215e-07 3.81611e-07 3.91409e-07 4.00635e-07 4.09314e-07 4.17469e-07 4.25123e-07 4.32297e-07 4.39011e-07 4.45287e-07 4.51142e-07 4.56595e-07 4.61662e-07 4.66362e-07 4.70709e-07 4.74719e-07 4.78408e-07 4.33951e-10 6.13785e-10 8.66319e-10 1.22041e-09 1.71634e-09 2.41025e-09 3.37998e-09 4.73241e-09 6.61165e-09 9.20671e-09 1.27557e-08 1.75412e-08 2.38671e-08 3.20052e-08 4.2115e-08 5.41826e-08 6.80369e-08 8.34113e-08 9.99938e-08 1.17458e-07 1.35482e-07 1.53773e-07 1.7207e-07 1.90157e-07 2.07863e-07 2.25058e-07 2.41651e-07 2.57581e-07 2.72811e-07 2.87328e-07 3.0113e-07 3.14226e-07 3.26632e-07 3.38371e-07 3.49465e-07 3.5994e-07 3.69822e-07 3.79136e-07 3.87907e-07 3.96158e-07 4.03914e-07 4.11194e-07 4.18022e-07 4.24416e-07 4.30395e-07 4.35978e-07 4.41181e-07 4.46022e-07 4.50517e-07 4.54679e-07 4.58525e-07 3.11902e-10 4.4235e-10 6.25949e-10 8.83868e-10 1.24564e-09 1.75248e-09 2.46179e-09 3.45311e-09 4.83538e-09 6.755e-09 9.40309e-09 1.30187e-08 1.78822e-08 2.42894e-08 3.24946e-08 4.26303e-08 5.46553e-08 6.83807e-08 8.35323e-08 9.97974e-08 1.16854e-07 1.3439e-07 1.52123e-07 1.69808e-07 1.87242e-07 2.04269e-07 2.20771e-07 2.36667e-07 2.51905e-07 2.66457e-07 2.80313e-07 2.93475e-07 3.05956e-07 3.17775e-07 3.28954e-07 3.39516e-07 3.49488e-07 3.58895e-07 3.67761e-07 3.76113e-07 3.83971e-07 3.9136e-07 3.98299e-07 4.04809e-07 4.1091e-07 4.16619e-07 4.21954e-07 4.26931e-07 4.31566e-07 4.35874e-07 4.39869e-07 DataSetFinish DataSetStart DataSetName, idvglin MeasurementType, DC BatchName, opt_ex22 WaferName, Silvaco DieName, Silvaco DeviceName, n3x10 Temperature, 125 FabDate, 01 Nov 2018 UserDate, 01 Nov 2018 Attribute, L, 1e-05 Attribute, W, 3e-06 NodeNames, d g s b Sweep, 1, V, G, LIN, 0, 1, CALCULATED, 51, 0.1, 0 Sweep, 2, V, B, LIN, 0, -0.4, CALCULATED, 6, 0.1, 0 Constant, V, D, 0.1, 0.1, 0 Constant, V, S, 0, 0.1, 0 Target, I, D Function, gm, derivative (vg, id) Plot, idvg, XYY (LIN LIN LIN), VG, ID, gm DataArray, ID 5.39728e-09 7.55796e-09 1.0573e-08 1.47739e-08 2.06083e-08 2.86661e-08 3.9695e-08 5.45921e-08 7.43421e-08 9.98659e-08 1.31775e-07 1.7016e-07 2.1461e-07 2.64387e-07 3.18585e-07 3.76216e-07 4.36279e-07 4.97816e-07 5.59953e-07 6.21931e-07 6.83116e-07 7.43007e-07 8.01219e-07 8.57476e-07 9.11588e-07 9.63441e-07 1.01297e-06 1.06017e-06 1.10504e-06 1.14763e-06 1.18799e-06 1.22617e-06 1.26224e-06 1.29628e-06 1.32836e-06 1.35854e-06 1.38691e-06 1.41351e-06 1.43843e-06 1.46173e-06 1.48348e-06 1.50372e-06 1.52253e-06 1.53996e-06 1.55606e-06 1.5709e-06 1.58453e-06 1.59699e-06 1.60834e-06 1.61863e-06 1.6279e-06 3.78068e-09 5.30546e-09 7.43612e-09 1.04109e-08 1.45572e-08 2.03177e-08 2.82748e-08 3.91664e-08 5.38758e-08 7.33685e-08 9.85388e-08 1.29964e-07 1.67703e-07 2.11317e-07 2.60054e-07 3.12996e-07 3.69155e-07 4.27537e-07 4.872e-07 5.47292e-07 6.07081e-07 6.65967e-07 7.23476e-07 7.79255e-07 8.33054e-07 8.84707e-07 9.34121e-07 9.81252e-07 1.0261e-06 1.06869e-06 1.10906e-06 1.14728e-06 1.18341e-06 1.21752e-06 1.2497e-06 1.28e-06 1.3085e-06 1.33528e-06 1.3604e-06 1.38392e-06 1.40592e-06 1.42645e-06 1.44558e-06 1.46336e-06 1.47985e-06 1.4951e-06 1.50917e-06 1.5221e-06 1.53394e-06 1.54475e-06 1.55456e-06 2.66969e-09 3.75521e-09 5.27399e-09 7.39737e-09 1.03631e-08 1.44978e-08 2.02423e-08 2.8176e-08 3.90307e-08 5.36785e-08 7.30647e-08 9.80501e-08 1.29165e-07 1.6642e-07 2.09342e-07 2.57157e-07 3.0894e-07 3.63706e-07 4.20473e-07 4.78321e-07 5.36427e-07 5.94092e-07 6.50749e-07 7.05959e-07 7.594e-07 8.10848e-07 8.60162e-07 9.07269e-07 9.52139e-07 9.94785e-07 1.03524e-06 1.07356e-06 1.10981e-06 1.14406e-06 1.17638e-06 1.20685e-06 1.23553e-06 1.26252e-06 1.28786e-06 1.31164e-06 1.33392e-06 1.35475e-06 1.37421e-06 1.39234e-06 1.40921e-06 1.42486e-06 1.43935e-06 1.45274e-06 1.46506e-06 1.47636e-06 1.48669e-06 1.89831e-09 2.67697e-09 3.76809e-09 5.29548e-09 7.43173e-09 1.04162e-08 1.45772e-08 2.03574e-08 2.83362e-08 3.92429e-08 5.39401e-08 7.33517e-08 9.82976e-08 1.29249e-07 1.66155e-07 2.08501e-07 2.55491e-07 3.06195e-07 3.59632e-07 4.1484e-07 4.70926e-07 5.271e-07 5.82701e-07 6.372e-07 6.90191e-07 7.41385e-07 7.90586e-07 8.37676e-07 8.82598e-07 9.2534e-07 9.65922e-07 1.00439e-06 1.0408e-06 1.07523e-06 1.10774e-06 1.13841e-06 1.16731e-06 1.19453e-06 1.22012e-06 1.24417e-06 1.26674e-06 1.28788e-06 1.30767e-06 1.32615e-06 1.34339e-06 1.35944e-06 1.37435e-06 1.38817e-06 1.40094e-06 1.41272e-06 1.42354e-06 1.35808e-09 1.92023e-09 2.70945e-09 3.81586e-09 5.36526e-09 7.53294e-09 1.05617e-08 1.47841e-08 2.06471e-08 2.87337e-08 3.97731e-08 5.46196e-08 7.41731e-08 9.92052e-08 1.30116e-07 1.66783e-07 2.08645e-07 2.54886e-07 3.04571e-07 3.56732e-07 4.10428e-07 4.64798e-07 5.19092e-07 5.72689e-07 6.25097e-07 6.75949e-07 7.24986e-07 7.7204e-07 8.17013e-07 8.59867e-07 9.00601e-07 9.39247e-07 9.75855e-07 1.01049e-06 1.04322e-06 1.07412e-06 1.10327e-06 1.13074e-06 1.1566e-06 1.18093e-06 1.2038e-06 1.22525e-06 1.24537e-06 1.2642e-06 1.28181e-06 1.29824e-06 1.31355e-06 1.32779e-06 1.341e-06 1.35323e-06 1.36452e-06 9.76937e-10 1.38503e-09 1.95921e-09 2.76563e-09 3.89655e-09 5.48073e-09 7.69748e-09 1.07948e-08 1.51118e-08 2.11024e-08 2.93557e-08 4.06027e-08 5.56898e-08 7.54893e-08 1.00716e-07 1.31686e-07 1.68201e-07 2.09651e-07 2.55199e-07 3.03912e-07 3.54836e-07 4.07059e-07 4.59756e-07 5.12218e-07 5.63866e-07 6.14251e-07 6.63042e-07 7.1001e-07 7.55012e-07 7.97973e-07 8.38867e-07 8.77708e-07 9.14534e-07 9.494e-07 9.82375e-07 1.01353e-06 1.04294e-06 1.07068e-06 1.09683e-06 1.12145e-06 1.14461e-06 1.16638e-06 1.18683e-06 1.20601e-06 1.22397e-06 1.24078e-06 1.25648e-06 1.27112e-06 1.28474e-06 1.2974e-06 1.30913e-06 DataSetFinish DataSetStart DataSetName, idvgsat MeasurementType, DC BatchName, opt_ex22 WaferName, Silvaco DieName, Silvaco DeviceName, n10x1 Temperature, 125 FabDate, 01 Nov 2018 UserDate, 01 Nov 2018 Attribute, L, 1e-06 Attribute, W, 1e-05 NodeNames, d g s b Sweep, 1, V, G, LIN, 0, 1, CALCULATED, 51, 0.1, 0 Sweep, 2, V, B, LIN, 0, -0.4, CALCULATED, 6, 0.1, 0 Constant, V, D, 1, 0.1, 0 Constant, V, S, 0, 0.1, 0 Target, I, D Function, gm, derivative (vg, id) Plot, idvg, XYY (LIN LIN LIN), VG, ID, gm DataArray, ID 2.23709e-07 3.1058e-07 4.29588e-07 5.9193e-07 8.12347e-07 1.10996e-06 1.50908e-06 2.03975e-06 2.7378e-06 3.64405e-06 4.80245e-06 6.25727e-06 8.04927e-06 1.02118e-05 1.27675e-05 1.57255e-05 1.90813e-05 2.28171e-05 2.69045e-05 3.13072e-05 3.59843e-05 4.08937e-05 4.59939e-05 5.12463e-05 5.66162e-05 6.20729e-05 6.75904e-05 7.31465e-05 7.8723e-05 8.43047e-05 8.98793e-05 9.54366e-05 0.000100968 0.000106468 0.000111929 0.000117348 0.000122719 0.00012804 0.000133308 0.000138519 0.000143672 0.000148764 0.000153794 0.000158759 0.000163659 0.000168491 0.000173255 0.000177949 0.000182572 0.000187124 0.000191603 1.58378e-07 2.20933e-07 3.07056e-07 4.25129e-07 5.86295e-07 8.05211e-07 1.10087e-06 1.49739e-06 2.02452e-06 2.71763e-06 3.61688e-06 4.76532e-06 6.20596e-06 7.97808e-06 1.01133e-05 1.26324e-05 1.55427e-05 1.88383e-05 2.25002e-05 2.64995e-05 3.07999e-05 3.5361e-05 4.01414e-05 4.51011e-05 5.02028e-05 5.54131e-05 6.0703e-05 6.60478e-05 7.14267e-05 7.68225e-05 8.22211e-05 8.76113e-05 9.29835e-05 9.83303e-05 0.000103645 0.000108923 0.00011416 0.000119353 0.000124497 0.00012959 0.00013463 0.000139615 0.000144543 0.000149412 0.00015422 0.000158966 0.00016365 0.000168268 0.000172822 0.000177309 0.000181729 1.12776e-07 1.58027e-07 2.20627e-07 3.06864e-07 4.25149e-07 5.86655e-07 8.06062e-07 1.10236e-06 1.49962e-06 2.0274e-06 2.72074e-06 3.61919e-06 4.76485e-06 6.19939e-06 7.96036e-06 1.00774e-05 1.25689e-05 1.54404e-05 1.86841e-05 2.228e-05 2.61983e-05 3.04029e-05 3.4854e-05 3.95114e-05 4.43361e-05 4.92927e-05 5.43492e-05 5.94783e-05 6.46566e-05 6.98647e-05 7.50866e-05 8.03095e-05 8.55225e-05 9.07174e-05 9.5887e-05 0.000101026 0.000106129 0.000111193 0.000116214 0.000121189 0.000126117 0.000130994 0.000135819 0.00014059 0.000145306 0.000149964 0.000154565 0.000159106 0.000163587 0.000168006 0.000172363 8.0738e-08 1.13607e-07 1.59291e-07 2.22518e-07 3.09647e-07 4.2918e-07 5.92398e-07 8.14099e-07 1.11339e-06 1.51437e-06 2.04659e-06 2.74479e-06 3.64797e-06 4.79722e-06 6.23274e-06 7.99014e-06 1.00967e-05 1.25686e-05 1.5409e-05 1.86081e-05 2.21446e-05 2.59884e-05 3.01032e-05 3.44501e-05 3.89899e-05 4.36854e-05 4.85026e-05 5.34113e-05 5.83858e-05 6.34041e-05 6.84484e-05 7.35037e-05 7.8558e-05 8.36018e-05 8.86271e-05 9.36277e-05 9.85984e-05 0.000103535 0.000108434 0.000113292 0.000118107 0.000122877 0.000127599 0.000132272 0.000136894 0.000141464 0.000145981 0.000150443 0.000154849 0.000159198 0.00016349 5.80973e-08 8.20641e-08 1.15525e-07 1.62045e-07 2.2644e-07 3.15186e-07 4.36934e-07 6.03144e-07 8.2882e-07 1.13327e-06 1.54077e-06 2.08089e-06 2.78819e-06 3.70107e-06 4.8596e-06 6.30235e-06 8.06278e-06 1.01657e-05 1.26246e-05 1.54403e-05 1.86009e-05 2.20839e-05 2.58585e-05 2.98888e-05 3.41367e-05 3.85643e-05 4.3136e-05 4.78195e-05 5.25864e-05 5.74125e-05 6.22776e-05 6.71648e-05 7.20607e-05 7.69541e-05 8.18362e-05 8.66999e-05 9.15394e-05 9.63501e-05 0.000101128 0.00010587 0.000110574 0.000115237 0.000119856 0.000124431 0.00012896 0.000133441 0.000137873 0.000142255 0.000146585 0.000150862 0.000155086 4.20105e-08 5.95499e-08 8.41417e-08 1.1848e-07 1.6622e-07 2.32304e-07 3.23365e-07 4.48257e-07 6.18689e-07 8.4995e-07 1.16164e-06 1.5783e-06 2.12958e-06 2.84988e-06 3.77704e-06 4.94995e-06 6.40543e-06 8.17463e-06 1.02797e-05 1.27312e-05 1.55274e-05 1.86545e-05 2.20888e-05 2.5799e-05 2.97494e-05 3.39029e-05 3.82232e-05 4.26762e-05 4.72314e-05 5.18623e-05 5.65463e-05 6.12645e-05 6.60017e-05 7.07451e-05 7.54848e-05 8.02128e-05 8.49225e-05 8.96087e-05 9.42672e-05 9.88945e-05 0.000103488 0.000108044 0.000112563 0.00011704 0.000121475 0.000125867 0.000130214 0.000134515 0.000138768 0.000142972 0.000147128 DataSetFinish DataSetStart DataSetName, idvgsat MeasurementType, DC BatchName, opt_ex22 WaferName, Silvaco DieName, Silvaco DeviceName, n10x10 Temperature, 125 FabDate, 01 Nov 2018 UserDate, 01 Nov 2018 Attribute, L, 1e-05 Attribute, W, 1e-05 NodeNames, d g s b Sweep, 1, V, G, LIN, 0, 1, CALCULATED, 51, 0.1, 0 Sweep, 2, V, B, LIN, 0, -0.4, CALCULATED, 6, 0.1, 0 Constant, V, D, 1, 0.1, 0 Constant, V, S, 0, 0.1, 0 Target, I, D Function, gm, derivative (vg, id) Plot, idvg, XYY (LIN LIN LIN), VG, ID, gm DataArray, ID 3.01325e-08 4.1681e-08 5.74549e-08 7.89078e-08 1.07932e-07 1.46938e-07 1.98911e-07 2.67414e-07 3.56509e-07 4.70584e-07 6.1407e-07 7.91093e-07 1.00509e-06 1.2585e-06 1.5525e-06 1.88694e-06 2.26045e-06 2.67056e-06 3.11401e-06 3.58705e-06 4.08569e-06 4.60598e-06 5.14414e-06 5.69669e-06 6.26052e-06 6.83288e-06 7.41141e-06 7.99409e-06 8.57918e-06 9.16522e-06 9.75096e-06 1.03353e-05 1.09174e-05 1.14965e-05 1.20718e-05 1.26427e-05 1.32088e-05 1.37695e-05 1.43243e-05 1.48731e-05 1.54152e-05 1.59506e-05 1.64788e-05 1.69997e-05 1.7513e-05 1.80185e-05 1.85161e-05 1.90056e-05 1.94869e-05 1.996e-05 2.04246e-05 2.13537e-08 2.9672e-08 4.10859e-08 5.66858e-08 7.79117e-08 1.06637e-07 1.45247e-07 1.96688e-07 2.64473e-07 3.52595e-07 4.65348e-07 6.07045e-07 7.81665e-07 9.92482e-07 1.24174e-06 1.53045e-06 1.8583e-06 2.22378e-06 2.62434e-06 3.05668e-06 3.51707e-06 4.00158e-06 4.50634e-06 5.02768e-06 5.56228e-06 6.10714e-06 6.65967e-06 7.21765e-06 7.77918e-06 8.34265e-06 8.90672e-06 9.47024e-06 1.00322e-05 1.05919e-05 1.11485e-05 1.17015e-05 1.22502e-05 1.27943e-05 1.33332e-05 1.38667e-05 1.43944e-05 1.49159e-05 1.54311e-05 1.59396e-05 1.64412e-05 1.69359e-05 1.74233e-05 1.79033e-05 1.83758e-05 1.88408e-05 1.9298e-05 1.5214e-08 2.12333e-08 2.95289e-08 4.09176e-08 5.64883e-08 7.76782e-08 1.06354e-07 1.44886e-07 1.96199e-07 2.63763e-07 3.51505e-07 4.63623e-07 6.04295e-07 7.77333e-07 9.85812e-07 1.23177e-06 1.51599e-06 1.83801e-06 2.19615e-06 2.58779e-06 3.00962e-06 3.4579e-06 3.9288e-06 4.41857e-06 4.92367e-06 5.44091e-06 5.96747e-06 6.5009e-06 7.03912e-06 7.58036e-06 8.12315e-06 8.66624e-06 9.20858e-06 9.74931e-06 1.02877e-05 1.0823e-05 1.13549e-05 1.18826e-05 1.2406e-05 1.29245e-05 1.34378e-05 1.39457e-05 1.44478e-05 1.4944e-05 1.5434e-05 1.59176e-05 1.63946e-05 1.68649e-05 1.73284e-05 1.77849e-05 1.82344e-05 1.08928e-08 1.52662e-08 2.13197e-08 2.96658e-08 4.11268e-08 5.67978e-08 7.81223e-08 1.06971e-07 1.45712e-07 1.97257e-07 2.6504e-07 3.52928e-07 4.65015e-07 6.05334e-07 7.77508e-07 9.84388e-07 1.22777e-06 1.50823e-06 1.82508e-06 2.17652e-06 2.55983e-06 2.97169e-06 3.40842e-06 3.86628e-06 4.34163e-06 4.8311e-06 5.33165e-06 5.84064e-06 6.35576e-06 6.87507e-06 7.39694e-06 7.92001e-06 8.44315e-06 8.9654e-06 9.48597e-06 1.00042e-05 1.05195e-05 1.10314e-05 1.15394e-05 1.20432e-05 1.25425e-05 1.30369e-05 1.35262e-05 1.40101e-05 1.44884e-05 1.4961e-05 1.54276e-05 1.58881e-05 1.63424e-05 1.67903e-05 1.72317e-05 7.83445e-09 1.10236e-08 1.54568e-08 2.15947e-08 3.00587e-08 4.16818e-08 5.75726e-08 7.91888e-08 1.08414e-07 1.47626e-07 1.99729e-07 2.68132e-07 3.56637e-07 4.69231e-07 6.09788e-07 7.81722e-07 9.87641e-07 1.22909e-06 1.50638e-06 1.81864e-06 2.16393e-06 2.53944e-06 2.94186e-06 3.36757e-06 3.81292e-06 4.27445e-06 4.74892e-06 5.23349e-06 5.72564e-06 6.22325e-06 6.72452e-06 7.22795e-06 7.73229e-06 8.23649e-06 8.73971e-06 9.24122e-06 9.74042e-06 1.02368e-05 1.07299e-05 1.12193e-05 1.17048e-05 1.21859e-05 1.26626e-05 1.31344e-05 1.36012e-05 1.40627e-05 1.4519e-05 1.49696e-05 1.54146e-05 1.58538e-05 1.6287e-05 5.65914e-09 7.99235e-09 1.12494e-08 1.57777e-08 2.20477e-08 3.06933e-08 4.2564e-08 5.87878e-08 8.08445e-08 1.1064e-07 1.50567e-07 2.03533e-07 2.72922e-07 3.62471e-07 4.76053e-07 6.17369e-07 7.89606e-07 9.95111e-07 1.23515e-06 1.5098e-06 1.81796e-06 2.15756e-06 2.52574e-06 2.91918e-06 3.33436e-06 3.76775e-06 4.21602e-06 4.67612e-06 5.14538e-06 5.62145e-06 6.10236e-06 6.58645e-06 7.07234e-06 7.55889e-06 8.04516e-06 8.53037e-06 9.01387e-06 9.49511e-06 9.97364e-06 1.0449e-05 1.0921e-05 1.13892e-05 1.18533e-05 1.23132e-05 1.27686e-05 1.32193e-05 1.36652e-05 1.4106e-05 1.45416e-05 1.4972e-05 1.53969e-05 DataSetFinish DataSetStart DataSetName, idvgsat MeasurementType, DC BatchName, opt_ex22 WaferName, Silvaco DieName, Silvaco DeviceName, n10x2 Temperature, 125 FabDate, 01 Nov 2018 UserDate, 01 Nov 2018 Attribute, L, 2e-06 Attribute, W, 1e-05 NodeNames, d g s b Sweep, 1, V, G, LIN, 0, 1, CALCULATED, 51, 0.1, 0 Sweep, 2, V, B, LIN, 0, -0.4, CALCULATED, 6, 0.1, 0 Constant, V, D, 1, 0.1, 0 Constant, V, S, 0, 0.1, 0 Target, I, D Function, gm, derivative (vg, id) Plot, idvg, XYY (LIN LIN LIN), VG, ID, gm DataArray, ID 1.32816e-07 1.83997e-07 2.53988e-07 3.49301e-07 4.78462e-07 6.52432e-07 8.84955e-07 1.19271e-06 1.59511e-06 2.11364e-06 2.77065e-06 3.58766e-06 4.58349e-06 5.77238e-06 7.16257e-06 8.75557e-06 1.05462e-05 1.25235e-05 1.46718e-05 1.69722e-05 1.94045e-05 2.19482e-05 2.45836e-05 2.72923e-05 3.00579e-05 3.28662e-05 3.57047e-05 3.8563e-05 4.14322e-05 4.43049e-05 4.7175e-05 5.00373e-05 5.28874e-05 5.57217e-05 5.85368e-05 6.13302e-05 6.40994e-05 6.68424e-05 6.95572e-05 7.22423e-05 7.48961e-05 7.75172e-05 8.01046e-05 8.26571e-05 8.51737e-05 8.76536e-05 9.00961e-05 9.25005e-05 9.48662e-05 9.71928e-05 9.94799e-05 9.40752e-08 1.30936e-07 1.81583e-07 2.50892e-07 3.45326e-07 4.7334e-07 6.45794e-07 8.76286e-07 1.18128e-06 1.57991e-06 2.09322e-06 2.74303e-06 3.55019e-06 4.53268e-06 5.70385e-06 7.07104e-06 8.63492e-06 1.03897e-05 1.23237e-05 1.44212e-05 1.66635e-05 1.90305e-05 2.15022e-05 2.40593e-05 2.66845e-05 2.93619e-05 3.20779e-05 3.48209e-05 3.7581e-05 4.035e-05 4.31211e-05 4.58886e-05 4.86477e-05 5.13944e-05 5.41255e-05 5.6838e-05 5.95296e-05 6.21981e-05 6.48416e-05 6.74584e-05 7.00472e-05 7.26065e-05 7.51353e-05 7.76323e-05 8.00967e-05 8.25276e-05 8.49243e-05 8.7286e-05 8.96122e-05 9.19023e-05 9.4156e-05 6.70027e-08 9.36715e-08 1.30483e-07 1.8109e-07 2.50372e-07 3.44793e-07 4.72793e-07 6.45198e-07 8.75524e-07 1.18009e-06 1.57775e-06 2.08916e-06 2.73553e-06 3.53695e-06 4.51044e-06 5.66831e-06 7.01682e-06 8.55569e-06 1.02783e-05 1.21727e-05 1.42227e-05 1.64097e-05 1.87142e-05 2.11166e-05 2.35985e-05 2.6143e-05 2.87352e-05 3.13623e-05 3.40133e-05 3.66791e-05 3.93521e-05 4.20258e-05 4.46951e-05 4.73558e-05 5.00041e-05 5.26371e-05 5.52521e-05 5.78471e-05 6.04201e-05 6.29694e-05 6.54936e-05 6.79913e-05 7.04614e-05 7.29027e-05 7.53144e-05 7.76955e-05 8.00453e-05 8.23632e-05 8.46484e-05 8.69004e-05 8.91189e-05 4.79638e-08 6.73372e-08 9.41993e-08 1.31293e-07 1.82302e-07 2.52148e-07 3.47332e-07 4.76337e-07 6.50008e-07 8.8184e-07 1.18804e-06 1.58724e-06 2.09968e-06 2.74593e-06 3.54521e-06 4.51348e-06 5.66186e-06 6.99545e-06 8.51289e-06 1.02068e-05 1.20646e-05 1.40701e-05 1.62048e-05 1.84497e-05 2.07856e-05 2.31951e-05 2.56621e-05 2.81725e-05 3.07142e-05 3.32771e-05 3.58526e-05 3.84337e-05 4.10146e-05 4.35905e-05 4.61575e-05 4.87123e-05 5.12523e-05 5.3775e-05 5.62786e-05 5.87613e-05 6.12216e-05 6.36582e-05 6.60699e-05 6.84557e-05 7.08145e-05 7.31456e-05 7.54481e-05 7.77213e-05 7.99646e-05 8.21774e-05 8.43593e-05 3.44989e-08 4.86244e-08 6.82965e-08 9.558e-08 1.33262e-07 1.85085e-07 2.56038e-07 3.52707e-07 4.83658e-07 6.59808e-07 8.94678e-07 1.20441e-06 1.60741e-06 2.1235e-06 2.77256e-06 3.57284e-06 4.53916e-06 5.68134e-06 7.0032e-06 8.50228e-06 1.01703e-05 1.19943e-05 1.3958e-05 1.60431e-05 1.82309e-05 2.05033e-05 2.28434e-05 2.5236e-05 2.7668e-05 3.0128e-05 3.26066e-05 3.50959e-05 3.75894e-05 4.00819e-05 4.2569e-05 4.50471e-05 4.75133e-05 4.99652e-05 5.24005e-05 5.48177e-05 5.72151e-05 5.95913e-05 6.19453e-05 6.42758e-05 6.6582e-05 6.8863e-05 7.1118e-05 7.33462e-05 7.5547e-05 7.77199e-05 7.98643e-05 2.49271e-08 3.52615e-08 4.97152e-08 6.98468e-08 9.77694e-08 1.36333e-07 1.89361e-07 2.61942e-07 3.60782e-07 4.94573e-07 6.74345e-07 9.13687e-07 1.2287e-06 1.63758e-06 2.15968e-06 2.81414e-06 3.61819e-06 4.58537e-06 5.72413e-06 7.03694e-06 8.5202e-06 1.01648e-05 1.19574e-05 1.38816e-05 1.59194e-05 1.80527e-05 2.02642e-05 2.25378e-05 2.48592e-05 2.72161e-05 2.9598e-05 3.19961e-05 3.44032e-05 3.68134e-05 3.92218e-05 4.16246e-05 4.40184e-05 4.64007e-05 4.87691e-05 5.11219e-05 5.34573e-05 5.57741e-05 5.8071e-05 6.03469e-05 6.26008e-05 6.48319e-05 6.70394e-05 6.92225e-05 7.13805e-05 7.35129e-05 7.56192e-05 DataSetFinish DataSetStart DataSetName, idvgsat MeasurementType, DC BatchName, opt_ex22 WaferName, Silvaco DieName, Silvaco DeviceName, n10x5 Temperature, 125 FabDate, 01 Nov 2018 UserDate, 01 Nov 2018 Attribute, L, 5e-06 Attribute, W, 1e-05 NodeNames, d g s b Sweep, 1, V, G, LIN, 0, 1, CALCULATED, 51, 0.1, 0 Sweep, 2, V, B, LIN, 0, -0.4, CALCULATED, 6, 0.1, 0 Constant, V, D, 1, 0.1, 0 Constant, V, S, 0, 0.1, 0 Target, I, D Function, gm, derivative (vg, id) Plot, idvg, XYY (LIN LIN LIN), VG, ID, gm DataArray, ID 5.84475e-08 8.08772e-08 1.11523e-07 1.53214e-07 2.09644e-07 2.85525e-07 3.86715e-07 5.20231e-07 6.94122e-07 9.17131e-07 1.19816e-06 1.54555e-06 1.96636e-06 2.46567e-06 3.04606e-06 3.70747e-06 4.44728e-06 5.26068e-06 6.1412e-06 7.08133e-06 8.07304e-06 9.10835e-06 1.01796e-05 1.12797e-05 1.24025e-05 1.35423e-05 1.46943e-05 1.58545e-05 1.70195e-05 1.81861e-05 1.93521e-05 2.05152e-05 2.16737e-05 2.2826e-05 2.39708e-05 2.51068e-05 2.6233e-05 2.73486e-05 2.84527e-05 2.95444e-05 3.06233e-05 3.16886e-05 3.27399e-05 3.37766e-05 3.47984e-05 3.58048e-05 3.67956e-05 3.77704e-05 3.8729e-05 3.96713e-05 4.05971e-05 4.14142e-08 5.75697e-08 7.97446e-08 1.10061e-07 1.51325e-07 2.07193e-07 2.82329e-07 3.82519e-07 5.14685e-07 6.86739e-07 9.07243e-07 1.18486e-06 1.52766e-06 1.94236e-06 2.43367e-06 3.00381e-06 3.6524e-06 4.37656e-06 5.1713e-06 6.03007e-06 6.94538e-06 7.90934e-06 8.91412e-06 9.95232e-06 1.10172e-05 1.21026e-05 1.32034e-05 1.43151e-05 1.54338e-05 1.65562e-05 1.76798e-05 1.88021e-05 1.99214e-05 2.10359e-05 2.21442e-05 2.32451e-05 2.43377e-05 2.54209e-05 2.64939e-05 2.75561e-05 2.86067e-05 2.96452e-05 3.0671e-05 3.16837e-05 3.26828e-05 3.3668e-05 3.46389e-05 3.55952e-05 3.65367e-05 3.74633e-05 3.83746e-05 2.95038e-08 4.11937e-08 5.73106e-08 7.94438e-08 1.09715e-07 1.50924e-07 2.06717e-07 2.81734e-07 3.81716e-07 5.13508e-07 6.84898e-07 9.0426e-07 1.18e-06 1.51985e-06 1.93014e-06 2.41515e-06 2.9767e-06 3.61402e-06 4.32395e-06 5.10133e-06 5.93955e-06 6.83117e-06 7.76845e-06 8.7438e-06 9.75008e-06 1.07808e-05 1.18303e-05 1.28935e-05 1.39663e-05 1.50452e-05 1.6127e-05 1.72093e-05 1.82901e-05 1.93676e-05 2.04403e-05 2.15069e-05 2.25664e-05 2.36179e-05 2.46604e-05 2.56934e-05 2.67161e-05 2.77279e-05 2.87283e-05 2.97169e-05 3.06933e-05 3.16569e-05 3.26076e-05 3.35451e-05 3.4469e-05 3.53791e-05 3.62753e-05 2.11226e-08 2.96158e-08 4.13766e-08 5.75975e-08 7.98798e-08 1.10358e-07 1.51846e-07 2.07999e-07 2.83458e-07 3.8394e-07 5.16229e-07 6.87994e-07 9.07416e-07 1.18262e-06 1.52096e-06 1.92833e-06 2.40853e-06 2.96292e-06 3.59035e-06 4.28733e-06 5.04854e-06 5.86735e-06 6.73639e-06 7.64811e-06 8.59518e-06 9.57076e-06 1.05687e-05 1.15836e-05 1.26109e-05 1.36465e-05 1.46872e-05 1.57303e-05 1.67734e-05 1.78147e-05 1.88525e-05 1.98857e-05 2.09129e-05 2.19333e-05 2.2946e-05 2.39502e-05 2.49454e-05 2.59309e-05 2.69063e-05 2.78709e-05 2.88245e-05 2.97667e-05 3.0697e-05 3.16153e-05 3.25212e-05 3.34145e-05 3.4295e-05 1.5192e-08 2.1385e-08 2.99978e-08 4.19275e-08 5.83842e-08 8.09912e-08 1.1191e-07 1.53985e-07 2.109e-07 2.87313e-07 3.88939e-07 5.22513e-07 6.95588e-07 9.1614e-07 1.19198e-06 1.53007e-06 1.9358e-06 2.41248e-06 2.96095e-06 3.57964e-06 4.2648e-06 5.01092e-06 5.81136e-06 6.65888e-06 7.54614e-06 8.46609e-06 9.41222e-06 1.03787e-05 1.13605e-05 1.23533e-05 1.33535e-05 1.43579e-05 1.53641e-05 1.63699e-05 1.73738e-05 1.83742e-05 1.93699e-05 2.03599e-05 2.13434e-05 2.23196e-05 2.32878e-05 2.42474e-05 2.51979e-05 2.6139e-05 2.707e-05 2.79907e-05 2.89007e-05 2.97997e-05 3.06874e-05 3.15636e-05 3.24281e-05 1.09743e-08 1.55052e-08 2.1833e-08 3.06344e-08 4.28261e-08 5.96436e-08 8.27427e-08 1.14324e-07 1.57277e-07 2.15332e-07 2.93182e-07 3.96552e-07 5.32137e-07 7.07372e-07 9.30013e-07 1.20754e-06 1.54646e-06 1.95166e-06 2.42588e-06 2.96947e-06 3.58043e-06 4.2547e-06 4.98666e-06 5.76968e-06 6.59665e-06 7.46049e-06 8.35446e-06 9.27237e-06 1.02088e-05 1.11589e-05 1.21188e-05 1.30851e-05 1.4055e-05 1.50262e-05 1.59968e-05 1.69652e-05 1.79301e-05 1.88905e-05 1.98454e-05 2.07941e-05 2.17358e-05 2.267e-05 2.35962e-05 2.45139e-05 2.54226e-05 2.6322e-05 2.72117e-05 2.80915e-05 2.89609e-05 2.98199e-05 3.06681e-05 DataSetFinish DataSetStart DataSetName, idvgsat MeasurementType, DC BatchName, opt_ex22 WaferName, Silvaco DieName, Silvaco DeviceName, n1x1 Temperature, 125 FabDate, 01 Nov 2018 UserDate, 01 Nov 2018 Attribute, L, 1e-06 Attribute, W, 1e-06 NodeNames, d g s b Sweep, 1, V, G, LIN, 0, 1, CALCULATED, 51, 0.1, 0 Sweep, 2, V, B, LIN, 0, -0.4, CALCULATED, 6, 0.1, 0 Constant, V, D, 1, 0.1, 0 Constant, V, S, 0, 0.1, 0 Target, I, D Function, gm, derivative (vg, id) Plot, idvg, XYY (LIN LIN LIN), VG, ID, gm DataArray, ID 2.0249e-08 2.81478e-08 3.89836e-08 5.37863e-08 7.39166e-08 1.01149e-07 1.37757e-07 1.86577e-07 2.5104e-07 3.35114e-07 4.43164e-07 5.79688e-07 7.48965e-07 9.54658e-07 1.19943e-06 1.48467e-06 1.81037e-06 2.17513e-06 2.57638e-06 3.01067e-06 3.47397e-06 3.96202e-06 4.47056e-06 4.99559e-06 5.53344e-06 6.0809e-06 6.63518e-06 7.19394e-06 7.7552e-06 8.31736e-06 8.87911e-06 9.43935e-06 9.99721e-06 1.0552e-05 1.1103e-05 1.16499e-05 1.21921e-05 1.27294e-05 1.32614e-05 1.37878e-05 1.43084e-05 1.4823e-05 1.53315e-05 1.58335e-05 1.6329e-05 1.68178e-05 1.72998e-05 1.7775e-05 1.82431e-05 1.8704e-05 1.91579e-05 1.42953e-08 1.99669e-08 2.77865e-08 3.85225e-08 5.31987e-08 7.31671e-08 1.0019e-07 1.3652e-07 1.84967e-07 2.48917e-07 3.32278e-07 4.39328e-07 5.74449e-07 7.41777e-07 9.44804e-07 1.18601e-06 1.46661e-06 1.78643e-06 2.14395e-06 2.53655e-06 2.96075e-06 3.41256e-06 3.8878e-06 4.38234e-06 4.89231e-06 5.41421e-06 5.94496e-06 6.48191e-06 7.02286e-06 7.56597e-06 8.10974e-06 8.65293e-06 9.19456e-06 9.73381e-06 1.027e-05 1.08027e-05 1.13313e-05 1.18555e-05 1.2375e-05 1.28895e-05 1.33987e-05 1.39024e-05 1.44005e-05 1.48928e-05 1.5379e-05 1.58592e-05 1.6333e-05 1.68005e-05 1.72615e-05 1.77159e-05 1.81637e-05 1.01525e-08 1.4244e-08 1.99125e-08 2.77327e-08 3.84752e-08 5.31658e-08 7.3158e-08 1.00213e-07 1.36579e-07 1.8505e-07 2.48982e-07 3.3223e-07 4.38984e-07 5.73504e-07 7.39761e-07 9.41053e-07 1.17965e-06 1.45654e-06 1.77138e-06 2.12252e-06 2.50724e-06 2.92207e-06 3.36306e-06 3.82613e-06 4.30729e-06 4.80282e-06 5.30936e-06 5.82402e-06 6.3443e-06 6.86812e-06 7.39378e-06 7.91988e-06 8.44528e-06 8.96907e-06 9.49052e-06 1.0009e-05 1.05241e-05 1.10353e-05 1.15423e-05 1.20448e-05 1.25426e-05 1.30354e-05 1.35231e-05 1.40055e-05 1.44823e-05 1.49535e-05 1.5419e-05 1.58786e-05 1.63322e-05 1.67797e-05 1.7221e-05 7.25066e-09 1.02149e-08 1.43409e-08 2.00598e-08 2.79524e-08 3.87972e-08 5.36293e-08 7.38129e-08 1.01119e-07 1.37803e-07 1.86656e-07 2.51013e-07 3.34681e-07 4.41763e-07 5.76387e-07 7.42341e-07 9.42703e-07 1.1795e-06 1.4535e-06 1.76414e-06 2.10962e-06 2.48717e-06 2.89328e-06 3.32408e-06 3.77559e-06 4.24397e-06 4.72565e-06 5.21748e-06 5.7167e-06 6.22097e-06 6.72838e-06 7.23732e-06 7.7465e-06 8.25489e-06 8.76165e-06 9.2661e-06 9.76769e-06 1.0266e-05 1.07606e-05 1.12513e-05 1.17377e-05 1.22196e-05 1.26968e-05 1.31692e-05 1.36366e-05 1.40988e-05 1.45558e-05 1.50073e-05 1.54533e-05 1.58936e-05 1.63283e-05 5.20578e-09 7.36182e-09 1.03764e-08 1.45737e-08 2.03927e-08 2.84246e-08 3.94607e-08 5.45528e-08 7.50838e-08 1.02845e-07 1.40107e-07 1.89671e-07 2.54857e-07 3.39429e-07 4.47398e-07 5.82748e-07 7.4907e-07 9.49197e-07 1.1849e-06 1.45668e-06 1.76377e-06 2.10423e-06 2.47519e-06 2.87316e-06 3.29433e-06 3.73484e-06 4.19101e-06 4.65946e-06 5.13718e-06 5.6216e-06 6.11056e-06 6.60224e-06 7.09519e-06 7.58822e-06 8.08037e-06 8.57089e-06 9.05915e-06 9.54466e-06 1.0027e-05 1.05059e-05 1.0981e-05 1.1452e-05 1.19189e-05 1.23813e-05 1.28392e-05 1.32924e-05 1.37407e-05 1.4184e-05 1.46223e-05 1.50553e-05 1.54831e-05 3.75666e-09 5.33085e-09 7.54116e-09 1.0632e-08 1.49359e-08 2.09027e-08 2.91378e-08 4.04509e-08 5.59165e-08 7.69439e-08 1.05353e-07 1.43442e-07 1.94025e-07 2.60417e-07 3.46335e-07 4.55697e-07 5.92326e-07 7.596e-07 9.60089e-07 1.19528e-06 1.46542e-06 1.76951e-06 2.10546e-06 2.47033e-06 2.86065e-06 3.27268e-06 3.70271e-06 4.14721e-06 4.60297e-06 5.06719e-06 5.53745e-06 6.01174e-06 6.4884e-06 6.96608e-06 7.44369e-06 7.92036e-06 8.3954e-06 8.86825e-06 9.33845e-06 9.80565e-06 1.02695e-05 1.07298e-05 1.11864e-05 1.16389e-05 1.20873e-05 1.25314e-05 1.2971e-05 1.34061e-05 1.38366e-05 1.42622e-05 1.46829e-05 DataSetFinish DataSetStart DataSetName, idvgsat MeasurementType, DC BatchName, opt_ex22 WaferName, Silvaco DieName, Silvaco DeviceName, n1x10 Temperature, 125 FabDate, 01 Nov 2018 UserDate, 01 Nov 2018 Attribute, L, 1e-05 Attribute, W, 1e-06 NodeNames, d g s b Sweep, 1, V, G, LIN, 0, 1, CALCULATED, 51, 0.1, 0 Sweep, 2, V, B, LIN, 0, -0.4, CALCULATED, 6, 0.1, 0 Constant, V, D, 1, 0.1, 0 Constant, V, S, 0, 0.1, 0 Target, I, D Function, gm, derivative (vg, id) Plot, idvg, XYY (LIN LIN LIN), VG, ID, gm DataArray, ID 2.73491e-09 3.7875e-09 5.22703e-09 7.18767e-09 9.84502e-09 1.34246e-08 1.82086e-08 2.4538e-08 3.28084e-08 4.34549e-08 5.69276e-08 7.36576e-08 9.4019e-08 1.18293e-07 1.4664e-07 1.79089e-07 2.15536e-07 2.55762e-07 2.99458e-07 3.46254e-07 3.95752e-07 4.47545e-07 5.01244e-07 5.56485e-07 6.12942e-07 6.70326e-07 7.28388e-07 7.86912e-07 8.45717e-07 9.04648e-07 9.63575e-07 1.02239e-06 1.08099e-06 1.1393e-06 1.19725e-06 1.25477e-06 1.31182e-06 1.36834e-06 1.42429e-06 1.47963e-06 1.53433e-06 1.58836e-06 1.64168e-06 1.69428e-06 1.74613e-06 1.79721e-06 1.84751e-06 1.89701e-06 1.9457e-06 1.99356e-06 2.0406e-06 1.93273e-09 2.68886e-09 3.72769e-09 5.14937e-09 7.08672e-09 9.71345e-09 1.32525e-08 1.79822e-08 2.4239e-08 3.24113e-08 4.29256e-08 5.62205e-08 7.27129e-08 9.27605e-08 1.16627e-07 1.44454e-07 1.76254e-07 2.1191e-07 2.51193e-07 2.93789e-07 3.39331e-07 3.87422e-07 4.37668e-07 4.89688e-07 5.43134e-07 5.97694e-07 6.53092e-07 7.09094e-07 7.65499e-07 8.22137e-07 8.78865e-07 9.35564e-07 9.92132e-07 1.04848e-06 1.10454e-06 1.16025e-06 1.21555e-06 1.2704e-06 1.32474e-06 1.37855e-06 1.43178e-06 1.48442e-06 1.53642e-06 1.58777e-06 1.63844e-06 1.68842e-06 1.73768e-06 1.78622e-06 1.83401e-06 1.88106e-06 1.92734e-06 1.37337e-09 1.91908e-09 2.67216e-09 3.70736e-09 5.12467e-09 7.05652e-09 9.67593e-09 1.32045e-08 1.79184e-08 2.41499e-08 3.22818e-08 4.27314e-08 5.59247e-08 7.22627e-08 9.2084e-08 1.15631e-07 1.43025e-07 1.74259e-07 2.09201e-07 2.47612e-07 2.89174e-07 3.33522e-07 3.80268e-07 4.29025e-07 4.79429e-07 5.31145e-07 5.83877e-07 6.37366e-07 6.91391e-07 7.45764e-07 8.00329e-07 8.54955e-07 9.09532e-07 9.63968e-07 1.01818e-06 1.07212e-06 1.12571e-06 1.17891e-06 1.23167e-06 1.28396e-06 1.33575e-06 1.387e-06 1.43769e-06 1.48779e-06 1.53728e-06 1.58614e-06 1.63436e-06 1.68191e-06 1.72878e-06 1.77497e-06 1.82046e-06 9.80812e-10 1.3763e-09 1.92445e-09 2.68123e-09 3.72184e-09 5.14679e-09 7.08903e-09 9.72189e-09 1.32668e-08 1.79989e-08 2.42476e-08 3.239e-08 4.28343e-08 5.59931e-08 7.22497e-08 9.1921e-08 1.15226e-07 1.42263e-07 1.73004e-07 2.073e-07 2.44904e-07 2.85495e-07 3.2871e-07 3.7417e-07 4.21502e-07 4.70355e-07 5.20412e-07 5.71392e-07 6.23052e-07 6.75186e-07 7.27621e-07 7.80213e-07 8.3284e-07 8.85403e-07 9.37819e-07 9.90017e-07 1.04194e-06 1.09353e-06 1.14475e-06 1.19556e-06 1.24592e-06 1.29581e-06 1.34519e-06 1.39405e-06 1.44236e-06 1.49011e-06 1.53727e-06 1.58382e-06 1.62976e-06 1.67507e-06 1.71975e-06 7.03767e-10 9.91438e-10 1.39189e-09 1.94711e-09 2.71378e-09 3.76811e-09 5.21175e-09 7.17895e-09 9.84436e-09 1.34303e-08 1.82116e-08 2.45157e-08 3.27143e-08 4.32063e-08 5.63898e-08 7.26285e-08 9.2216e-08 1.15345e-07 1.4209e-07 1.724e-07 2.06111e-07 2.42966e-07 2.82643e-07 3.24783e-07 3.69016e-07 4.14984e-07 4.62353e-07 5.10821e-07 5.60126e-07 6.1004e-07 6.60372e-07 7.10963e-07 7.61679e-07 8.1241e-07 8.63067e-07 9.13572e-07 9.63862e-07 1.01388e-06 1.06359e-06 1.11295e-06 1.16192e-06 1.21046e-06 1.25857e-06 1.3062e-06 1.35334e-06 1.39997e-06 1.44607e-06 1.49163e-06 1.53662e-06 1.58105e-06 1.62488e-06 5.07244e-10 7.17206e-10 1.01072e-09 1.41938e-09 1.98602e-09 2.76847e-09 3.84437e-09 5.31714e-09 7.32311e-09 1.0039e-08 1.36889e-08 1.85483e-08 2.4943e-08 3.32395e-08 4.38268e-08 5.70874e-08 7.33638e-08 9.29243e-08 1.15935e-07 1.42442e-07 1.72375e-07 2.05552e-07 2.41708e-07 2.80521e-07 3.21638e-07 3.647e-07 4.09364e-07 4.55313e-07 5.02263e-07 5.49968e-07 5.98218e-07 6.46835e-07 6.95672e-07 7.44609e-07 7.93545e-07 8.42397e-07 8.91097e-07 9.39587e-07 9.87821e-07 1.03575e-06 1.08336e-06 1.13059e-06 1.17743e-06 1.22386e-06 1.26984e-06 1.31537e-06 1.36042e-06 1.40497e-06 1.44902e-06 1.49254e-06 1.53554e-06 DataSetFinish DataSetStart DataSetName, idvgsat MeasurementType, DC BatchName, opt_ex22 WaferName, Silvaco DieName, Silvaco DeviceName, n3x10 Temperature, 125 FabDate, 01 Nov 2018 UserDate, 01 Nov 2018 Attribute, L, 1e-05 Attribute, W, 3e-06 NodeNames, d g s b Sweep, 1, V, G, LIN, 0, 1, CALCULATED, 51, 0.1, 0 Sweep, 2, V, B, LIN, 0, -0.4, CALCULATED, 6, 0.1, 0 Constant, V, D, 1, 0.1, 0 Constant, V, S, 0, 0.1, 0 Target, I, D Function, gm, derivative (vg, id) Plot, idvg, XYY (LIN LIN LIN), VG, ID, gm DataArray, ID 8.51491e-09 1.17859e-08 1.62569e-08 2.23425e-08 3.05841e-08 4.16748e-08 5.64775e-08 7.60299e-08 1.01526e-07 1.3427e-07 1.75595e-07 2.26763e-07 2.88851e-07 3.62647e-07 4.48574e-07 5.4666e-07 6.56547e-07 7.77544e-07 9.08707e-07 1.04893e-06 1.19701e-06 1.35176e-06 1.51204e-06 1.67677e-06 1.84501e-06 2.01591e-06 2.18875e-06 2.3629e-06 2.53784e-06 2.71311e-06 2.88834e-06 3.06319e-06 3.23739e-06 3.4107e-06 3.58292e-06 3.75386e-06 3.92336e-06 4.09127e-06 4.25747e-06 4.42185e-06 4.5843e-06 4.74472e-06 4.90304e-06 5.05919e-06 5.21308e-06 5.36468e-06 5.51393e-06 5.66078e-06 5.8052e-06 5.94716e-06 6.08664e-06 6.02489e-09 8.37747e-09 1.16078e-08 1.60261e-08 2.20429e-08 3.01941e-08 4.11648e-08 5.58072e-08 7.51438e-08 1.00349e-07 1.32698e-07 1.73491e-07 2.23947e-07 2.85093e-07 3.57664e-07 4.42029e-07 5.38165e-07 6.45677e-07 7.63846e-07 8.91717e-07 1.02818e-06 1.17206e-06 1.32219e-06 1.47746e-06 1.63684e-06 1.79942e-06 1.9644e-06 2.13111e-06 2.29895e-06 2.46743e-06 2.63614e-06 2.80473e-06 2.9729e-06 3.1404e-06 3.30702e-06 3.47256e-06 3.63687e-06 3.79981e-06 3.96124e-06 4.12105e-06 4.27915e-06 4.43544e-06 4.58984e-06 4.74227e-06 4.89268e-06 5.041e-06 5.18718e-06 5.33118e-06 5.47297e-06 5.6125e-06 5.74975e-06 4.28627e-09 5.98617e-09 8.33062e-09 1.15515e-08 1.59586e-08 2.19614e-08 3.00937e-08 4.10368e-08 5.56357e-08 7.49012e-08 9.99885e-08 1.32146e-07 1.72635e-07 2.22626e-07 2.83088e-07 3.54691e-07 4.37745e-07 5.3217e-07 6.37526e-07 7.53069e-07 8.77832e-07 1.01071e-06 1.15056e-06 1.29624e-06 1.44667e-06 1.60089e-06 1.75802e-06 1.91731e-06 2.07812e-06 2.23991e-06 2.40221e-06 2.56466e-06 2.72693e-06 2.88875e-06 3.04989e-06 3.21016e-06 3.3694e-06 3.52745e-06 3.6842e-06 3.83952e-06 3.99332e-06 4.14551e-06 4.29601e-06 4.44474e-06 4.59164e-06 4.73665e-06 4.87972e-06 5.0208e-06 5.15986e-06 5.29686e-06 5.43177e-06 3.06455e-09 4.29789e-09 6.00632e-09 8.36351e-09 1.16029e-08 1.60358e-08 2.20735e-08 3.02508e-08 4.12486e-08 5.59081e-08 7.5231e-08 1.00355e-07 1.325e-07 1.72885e-07 2.22626e-07 2.82628e-07 3.53491e-07 4.35452e-07 5.28376e-07 6.31774e-07 7.44877e-07 8.6671e-07 9.96184e-07 1.13217e-06 1.27358e-06 1.41937e-06 1.56863e-06 1.72052e-06 1.87436e-06 2.02953e-06 2.18554e-06 2.34197e-06 2.49846e-06 2.65473e-06 2.81053e-06 2.96566e-06 3.11994e-06 3.27323e-06 3.42538e-06 3.5763e-06 3.72588e-06 3.87402e-06 4.02066e-06 4.16571e-06 4.30912e-06 4.45081e-06 4.59075e-06 4.72889e-06 4.86518e-06 4.99958e-06 5.13207e-06 2.20124e-09 3.09935e-09 4.3488e-09 6.08004e-09 8.46916e-09 1.17526e-08 1.62454e-08 2.2363e-08 3.06441e-08 4.17718e-08 5.65868e-08 7.60834e-08 1.01382e-07 1.33673e-07 1.74131e-07 2.23812e-07 2.83548e-07 3.53863e-07 4.34922e-07 5.26524e-07 6.28137e-07 7.38965e-07 8.58032e-07 9.84262e-07 1.11656e-06 1.25388e-06 1.39522e-06 1.53973e-06 1.68662e-06 1.83524e-06 1.98504e-06 2.13555e-06 2.28639e-06 2.43723e-06 2.58782e-06 2.73793e-06 2.88738e-06 3.03601e-06 3.18369e-06 3.33029e-06 3.47573e-06 3.6199e-06 3.76273e-06 3.90415e-06 4.04409e-06 4.18249e-06 4.3193e-06 4.45447e-06 4.58796e-06 4.71973e-06 4.84975e-06 1.5881e-09 2.24431e-09 3.16107e-09 4.43665e-09 6.20423e-09 8.64346e-09 1.19953e-08 1.65804e-08 2.28203e-08 3.12604e-08 4.25887e-08 5.76472e-08 7.74245e-08 1.03024e-07 1.35604e-07 1.76291e-07 2.26075e-07 2.85711e-07 3.55643e-07 4.35959e-07 5.26392e-07 6.26367e-07 7.35066e-07 8.51511e-07 9.74651e-07 1.10343e-06 1.23682e-06 1.37391e-06 1.51387e-06 1.65598e-06 1.79963e-06 1.94431e-06 2.08959e-06 2.23513e-06 2.38062e-06 2.52583e-06 2.67057e-06 2.81466e-06 2.95796e-06 3.10035e-06 3.24173e-06 3.38201e-06 3.5211e-06 3.65894e-06 3.79545e-06 3.93058e-06 4.06427e-06 4.19649e-06 4.32717e-06 4.45629e-06 4.58381e-06 DataSetFinish
Graphics
