opt_ex10 : HiSIM-IGBT Model Extraction
Requires: Utmost IV, SmartSpice, SmartView
Minimum Versions: Utmost IV 1.10.6.R, SmartSpice 4.10.2.R, SmartView 2.28.2.R
This example describes the extraction of model parameters of the HiSIM-IGBT (Version 1.2.0, LEVEL=3, Silvaco implementation) model for Insulated Gate Bipolar Transistor devices. The extraction for DC current characteristics at room temperature is considered.
To set up the extraction environment, the project file opt_ex10.prj and the data file opt_ex10.uds should be loaded into the database. The project, when opened in Utmost IV, is shown in opt_ex10_01.png .
The optimization sequence, which automates the parameter extraction, is divided into three sections. Some model parameters are optimized across the sections for better fitting.
To start the sequence, process parameters TOX and NSUBC are needed as a priori parameters.
Section 1 : ICvsVG_low_mid_rtemp
This section optimizes the parameters for threshold characteristics. The data is the collector current vs. gate voltage characteristics(ICvsVG) at low or middle collector-emitter voltage (Vce) at room temperature. This section has three steps.
- The first step's fitting target is the low and middle gate-emitter voltage (Vge).
- The second and third step's fitting target is the middle and high Vge.
- The first and second steps use Genetic Algorithm while the third step uses Levenberg-Marquardt Algorithm. The parameters are optimized as follows: NSUBC, VFBC, MUEPH0, MUEPH1, BJTRBVG11, BJTRBVG12, BJTRB, BJTMUEN, BJTMUEP, BJTNINJ, BJTTAUB, BJTWB, BJTLDEC, BJTWDEPMAX . The following parameters can be further used, if necessary: NDEP, NINV, BJTRC, BJTRE, BJTTAUC, BJTTAUE, BJTNB, BJTNC, BJTNE
After this section is completed, the fit to measured data is shown in opt_ex10_02.png .
Section 2 : ICvsVG_high_rtemp
This section optimizes the parameters for high-field mobility and base resistance. The data is ICvsVG at mid and high Vce at room temperature. This section uses Levenberg-Marquardt Algorithm and optimizes the parameters as follows: BJTRB, BJTRC, BJTMUEN, BJTMUEP, BJTMUEQN, BJTTAUB, BJTWDEPMAX, VMAX
After this section is completed, the fit to measured data is shown in opt_ex10_03.png .
Section 3 : ICvsVC_rtemp
This section optimizes the parameters for saturation operation. The data is the collector current vs. collector voltage characteristics(ICvsVC) at room temperature. In this section, ICvsVC data is divided into some regions. (Refer to Optimization Setups "icvc_1" and "icvc_2".) This section uses Levenberg-Marquardt Algorithm and optimizes the parameters as follows: BJTRB, BJTRC, BJTTAUB, BJTWB, BJTLDEC, BJTRBVG11, BJTRBVG12, VMAX . The following parameters can be further used, if necessary: BJTMUEN, BJTMUEP, BJTMUEQN, BJTWDEPMAX, BJTWHALFCELL, NSUBC, NSUBP, NSUBP0, VFBC, MUECB0, MUECB1, MUEPH0, MUEPH1, MUESR0, MUESR1, VOVER, VOVERP
After this section is completed, the fit to measured data is shown in opt_ex10_04.png .
When the entire sequence is completed, the model card can then be exported into an external model library file as shown in the output file opt_ex10.lib.
Files
opt_ex10.lib
.MODEL IGBT_sil PNP ( +LEVEL = 3 version = '1.20' info = 0 +show = 0 corsrd = 0 corg = 0 +coiprv = 0 copprv = 1 coadov = 1 +coisub = 0 coiigs = 0 cogidl = 0 +coovlp = 0 coovlps = 1 coflick = 0 +coisti = 0 conqs = 0 cothrml = 0 +coign = 0 codfm = 0 corbnet = 0 +coselfheat = 0 +cosym = 0 bjtne = 2.32758e+15 bjtnb = 9.9516e+13 +bjtnc = 5.53329e+18 bjtwb = 4.5378e-05 +bjtwhalfcell = 1e-07 +bjtninj = 0 +bjtninjmax = 1 +bjtwdepmax = 0.999725 +bjtmuep = 499.397 bjtmuen = 1487.69 bjtmueqn = 2.149 +bjttaue = 1e-06 bjttaub = 1.59947e-05 bjttauc = 5.33743e-05 +bjtnref = 1e+17 bjtgminc = 0 bjtgmine = 0 +bjtldec = 0.101583 bjtpmin = 1e+15 bjtrb = 1 +bjtrbvg11 = 0.5 +bjtrbvg12 = 33.2725 +bjtrc = 7198.93 bjtre = 0.5 bjtqdep = 1 +bjtqex = 0.1 vmax = 1e+06 bgtmp1 = 9.025e-05 +bgtmp2 = 1e-07 eg0 = 1.1785 tox = 1e-07 +toxedge = 1e-07 xld = 3e-08 lovers = 1.01e-09 +rdov11 = 0 rdov12 = 1 rdov13 = 1 +rdslp1 = 0 rdict1 = 1 rdslp2 = 1 +rdict2 = 0 loverld = 1.3e-06 ldrift1 = 1e-06 +ldrift2 = 1e-06 ldrift1s = 0 ldrift2s = 1e-06 +subld1 = 0 subld2 = 0 ddltmax = 1 +ddltslp = 0 ddltict = 10 vfbover = -0.5 +nover = 1e+16 novers = 1e+19 xwd = 0 +xl = 0 xw = 0 saref = 1e-06 +sbref = 1e-06 ll = 0 lld = 0 +lln = 0 wl = 0 wl1 = 0 +wl1p = 1 wl2 = 0 wl2p = 1 +wld = 0 wln = 0 rsh = 0 +rshg = 0 xqy = 0 xqy1 = 0 +xqy2 = 2 rs = 0 rd = 0.005 +vfbc = -1.06685 vbi = 1.1 nsubc = 6.70373e+16 +parl2 = 1e-08 lp = 0 nsubp = 1e+19 +nsubp0 = 6.46008 nsubwp = 1 scp1 = 1 +scp2 = 0.1 scp3 = 0 sc1 = 1 +sc2 = 1 sc3 = 0 sc4 = 0 +pgd1 = 0 pgd2 = 1 pgd3 = 0.8 +pgd4 = 0 ndep = 0.138508 ndepl = 0 +ndeplp = 1 ninv = 0.879066 muecb0 = 112.267 +muecb1 = 55.7554 mueph0 = 0.348615 mueph1 = 2827.52 +muephw = 0 muepwp = 1 muephl = 0 +mueplp = 1 muephs = 0 muepsp = 1 +vtmp = 0 wvth0 = 0 muesr0 = 2.2 +muesr1 = 1.84877e+15 muesrl = 0 muesrw = 0 +mueswp = 1 mueslp = 1 muetmp = 1.7 +bb = 2 sub1 = 0.05 sub2 = 100 +svgs = 0.8 svbs = 0.5 svbsl = 0 +svds = 0.8 slg = 3e-08 sub1l = 0.0025 +sub2l = 2e-06 fn1 = 50 fn2 = 0.00017 +fn3 = 0 fvbs = 0.012 svgsl = 0 +svgslp = 1 svgswp = 1 svgsw = 0 +svbslp = 1 slgl = 0 slglp = 1 +sub1lp = 1 nsti = 1e+17 wsti = 0 +wstil = 0 wstilp = 1 wstiw = 0 +wstiwp = 1 scsti1 = 0 scsti2 = 0 +vthsti = 0 vdsti = 0 muesti1 = 0 +muesti2 = 0 muesti3 = 1 +nsubpsti1 = 0 +nsubpsti2 = 0 +nsubpsti3 = 1 +lpext = 1e-50 npext = 1e+17 scp21 = 0 +scp22 = 0 bs1 = 0 bs2 = 0.9 +tpoly = 2e-07 cgbo = 1e-15 js0 = 5e-07 +js0sw = 0 nj = 1 njsw = 1 +xti = 2 cj = 0.0005 cjsw = 5e-10 +cjswg = 5e-10 mj = 0.5 mjsw = 0.33 +mjswg = 0.33 pb = 1 pbsw = 1 +pbswg = 1 xti2 = 0 cisb = 0 +cvb = 0 ctemp = 0 cisbk = 0 +cvbk = 0 divx = 0 clm1 = 0.05 +clm2 = 2 clm3 = 1 clm5 = 1 +clm6 = 0 vover = 0 voverp = 1.48926 +wfc = 0 nsubcw = 0 nsubcwp = 1 +qme1 = 0 qme2 = 1 qme3 = 0 +vovers = 0 voversp = 0 gidl1 = 2 +gidl2 = 3e+07 gidl3 = 0.9 gidl4 = 0.9 +gidl5 = 0.2 gleak1 = 50 gleak2 = 1e+07 +gleak3 = 0.06 gleak4 = 4 gleak5 = 7500 +gleak6 = 0.25 gleak7 = 1e-06 glpart1 = 0.5 +glksd1 = 1e-15 glksd2 = 5e+06 glksd3 = -5e+06 +glkb1 = 5e-16 glkb2 = 1 glkb3 = 0 +egig = 0 igtemp2 = 0 igtemp3 = 0 +vzadd0 = 0.01 pzadd0 = 0.005 nftrp = 1e+10 +nfalp = 1e-19 cit = 0 falph = 1 +kappa = 3.9 cgso = 1e-15 cgdo = 1e-15 +pthrou = 0 vdiffj = 0.0006 dly1 = 1e-10 +dly2 = 0.7 dly3 = 8e-07 tnom = 27 +ovslp = 2e-08 ovmag = 500 gbmin = 1e-12 +rbpb = 50 rbpd = 50 rbps = 50 +rbdb = 50 rbsb = 50 ibpc1 = 0 +ibpc2 = 0 mphdfm = -0.3 rdvg11 = 0 +rdvg12 = 100 rth0 = 0.1 cth0 = 1e-07 +powrat = 1 tcjbd = 0 tcjbs = 0 +tcjbdsw = 0 tcjbssw = 0 tcjbdswg = 0 +tcjbsswg = 0 dlyov = 0 qdftvd = 1 +xldld = 1e-06 rdvd = 0.07 qovsm = 0.2 +rd20 = 0 rd21 = 1 rd22 = 0 +rd22d = 0 rd23 = 0.005 rd24 = 0 +rd25 = 0 rdvdl = 0 rdvdlp = 1 +rdvds = 0 rdvdsp = 1 rd23l = 0 +rd23lp = 1 rd23s = 0 rd23sp = 1 +rds = 0 rdsp = 1 rdtemp1 = 0 +rdtemp2 = 0 +rdvdtemp1 = 0 +rdvdtemp2 = 0 +rth0w = 0 rth0wp = 1 cvdsover = 0 +ninvd = 0 vbsmin = -10.5 rdvb = 0 +rth0nf = 0 lmin = 0 lmax = 1 +wmin = 0 wmax = 1 lbinn = 1 +wbinn = 1 +bjtrbtemp1 = 0 +bjtrbtemp2 = 0 +cobjtnqs = 1 )
opt_ex10.uds
Utmost IV CSV Data Logfile Format Version 1 Copyright (c) 1984-2016 Silvaco, Inc. All rights reserved DataSetStart DataSetName, ICVC MeasurementType, DC BatchName, opt_ex10 WaferName, 1 DieName, 01 DeviceName, igbt Temperature, 27 FabDate, 18 Jun 2010 UserDate, 18 Jun 2010 Attribute, L, 2.9e-06 Attribute, M, 100000 Attribute, W, 5e-06 NodeNames, collector gate emitter Sweep, 1, V, collector, LIST, 500, 0 List, 1 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 1.1 1.2 1.3 1.4 1.5 1.6 1.7 1.8 1.9 2 2.1 2.2 2.3 2.4 2.5 2.6 2.7 2.8 2.9 3 3.1 3.2 3.3 3.4 3.5 3.6 3.7 3.8 3.9 4 4.1 4.2 4.3 4.4 4.5 4.6 4.7 4.8 4.9 5 5.1 5.2 5.3 5.4 5.5 5.6 5.7 5.8 5.9 6 6.1 6.2 6.3 6.4 6.5 6.6 6.7 6.8 6.9 7 7.1 7.2 7.3 7.4 7.5 7.6 7.7 7.8 7.9 8 8.1 8.2 8.3 8.4 8.5 8.6 8.7 8.8 8.9 9 9.1 9.2 9.3 9.4 9.5 9.6 9.7 9.8 9.9 10 10.1 10.2 10.3 10.4 10.5 10.6 10.7 10.8 10.9 11 11.1 11.2 11.3 11.4 11.5 11.6 11.7 11.8 11.9 12 12.1 12.2 12.3 12.4 12.5 12.6 12.7 12.8 12.9 13 13.1 13.2 13.3 13.4 13.5 13.6 13.7 13.8 13.9 14 14.1 14.2 14.3 14.4 14.5 14.6 14.7 14.8 14.9 15 15.1 15.2 15.3 15.4 15.5 15.6 15.7 15.8 15.9 16 16.1 16.2 16.3 16.4 16.5 16.6 16.7 16.8 16.9 17 17.1 17.2 17.3 17.4 17.5 17.6 17.7 17.8 17.9 18 18.1 18.2 18.3 18.4 18.5 18.6 18.7 18.8 18.9 19 19.1 19.2 19.3 19.4 19.5 19.6 19.7 19.8 19.9 20 20.1 20.2 20.3 20.4 20.5 20.6 20.7 20.8 20.9 21 21.1 21.2 21.3 21.4 21.5 21.6 21.7 21.8 21.9 22 22.1 22.2 22.3 22.4 22.5 22.6 22.7 22.8 22.9 23 23.1 23.2 23.3 23.4 23.5 23.6 23.7 23.8 23.9 24 24.1 24.2 24.3 24.4 24.5 24.6 24.7 24.8 24.9 25 25.1 25.2 25.3 25.4 25.5 25.6 25.7 25.8 25.9 26 26.1 26.2 26.3 26.4 26.5 26.6 26.7 26.8 26.9 27 27.1 27.2 27.3 27.4 27.5 27.6 27.7 27.8 27.9 28 28.1 28.2 28.3 28.4 28.5 28.6 28.7 28.8 28.9 29 29.1 29.2 29.3 29.4 29.5 29.6 29.7 29.8 29.9 30 30.1 30.2 30.3 30.4 30.5 30.6 30.7 30.8 30.9 31 31.1 31.2 31.3 31.4 31.5 31.6 31.7 31.8 31.9 32 32.1 32.2 32.3 32.4 32.5 32.6 32.7 32.8 32.9 33 33.1 33.2 33.3 33.4 33.5 33.6 33.7 33.8 33.9 34 34.1 34.2 34.3 34.4 34.5 34.6 34.7 34.8 34.9 35 35.1 35.2 35.3 35.4 35.5 35.6 35.7 35.8 35.9 36 36.1 36.2 36.3 36.4 36.5 36.6 36.7 36.8 36.9 37 37.1 37.2 37.3 37.4 37.5 37.6 37.7 37.8 37.9 38 38.1 38.2 38.3 38.4 38.5 38.6 38.7 38.8 38.9 39 39.1 39.2 39.3 39.4 39.5 39.6 39.7 39.8 39.9 40 40.1 40.2 40.3 40.4 40.5 40.6 40.7 40.8 40.9 41 41.1 41.2 41.3 41.4 41.5 41.6 41.7 41.8 41.9 42 42.1 42.2 42.3 42.4 42.5 42.6 42.7 42.8 42.9 43 43.1 43.2 43.3 43.4 43.5 43.6 43.7 43.8 43.9 44 44.1 44.2 44.3 44.4 44.5 44.6 44.7 44.8 44.9 45 45.1 45.2 45.3 45.4 45.5 45.6 45.7 45.8 45.9 46 46.1 46.2 46.3 46.4 46.5 46.6 46.7 46.8 46.9 47 47.1 47.2 47.3 47.4 47.5 47.6 47.7 47.8 47.9 48 48.1 48.2 48.3 48.4 48.5 48.6 48.7 48.8 48.9 49 49.1 49.2 49.3 49.4 49.5 49.6 49.7 49.8 49.9 50 Sweep, 2, V, gate, LIST, 3, 0 List, 2 5 10 15 Constant, V, emitter, 0, 0.1, 0 Target, I, collector Plot, icvc, XY (LIN LIN), Vcollector, Icollector DataArray, Icollector 3.81566e-12 1.85691e-10 8.86402e-09 4.228e-07 1.985e-05 0.000620893 0.00514363 0.0188589 0.0482776 0.103023 0.196918 0.344225 0.549943 0.805515 1.09567 1.40551 1.72257 2.03634 2.33774 2.61859 2.87156 3.09065 3.27206 3.41513 3.52271 3.60052 3.65528 3.69333 3.7199 3.73876 3.75236 3.76241 3.77007 3.77609 3.78092 3.78486 3.78816 3.79099 3.79348 3.79569 3.79768 3.79948 3.80113 3.80267 3.80412 3.80548 3.80677 3.80799 3.80915 3.81026 3.81132 3.81233 3.81331 3.81424 3.81514 3.816 3.81683 3.81763 3.81841 3.81916 3.81988 3.82058 3.82126 3.82193 3.82257 3.8232 3.82381 3.82441 3.825 3.82557 3.82613 3.82668 3.82722 3.82775 3.82827 3.82879 3.82929 3.82979 3.83028 3.83077 3.83125 3.83172 3.83219 3.83266 3.83311 3.83357 3.83402 3.83446 3.83491 3.83534 3.83578 3.83621 3.83664 3.83706 3.83749 3.8379 3.83832 3.83873 3.83914 3.83955 3.83996 3.84036 3.84076 3.84116 3.84156 3.84195 3.84234 3.84273 3.84312 3.84351 3.84389 3.84427 3.84465 3.84503 3.84541 3.84579 3.84616 3.84653 3.8469 3.84727 3.84764 3.848 3.84837 3.84873 3.84909 3.84945 3.84981 3.85016 3.85052 3.85087 3.85122 3.85158 3.85193 3.85227 3.85262 3.85297 3.85331 3.85366 3.854 3.85434 3.85468 3.85502 3.85536 3.85569 3.85603 3.85636 3.8567 3.85703 3.85736 3.85769 3.85802 3.85835 3.85868 3.859 3.85933 3.85965 3.85998 3.8603 3.86062 3.86094 3.86126 3.86158 3.8619 3.86222 3.86254 3.86285 3.86317 3.86348 3.86379 3.86411 3.86442 3.86473 3.86504 3.86535 3.86566 3.86597 3.86628 3.86658 3.86689 3.86719 3.8675 3.8678 3.8681 3.86841 3.86871 3.86901 3.86931 3.86961 3.86991 3.87021 3.87051 3.8708 3.8711 3.87139 3.87169 3.87198 3.87228 3.87257 3.87287 3.87316 3.87345 3.87374 3.87403 3.87432 3.87461 3.8749 3.87519 3.87547 3.87576 3.87605 3.87633 3.87662 3.8769 3.87719 3.87747 3.87776 3.87804 3.87832 3.8786 3.87888 3.87916 3.87944 3.87972 3.88 3.88028 3.88056 3.88084 3.88112 3.88139 3.88167 3.88195 3.88222 3.8825 3.88277 3.88305 3.88332 3.88359 3.88387 3.88414 3.88441 3.88468 3.88495 3.88522 3.8855 3.88577 3.88603 3.8863 3.88657 3.88684 3.88711 3.88738 3.88764 3.88791 3.88818 3.88844 3.88871 3.88898 3.88924 3.88951 3.88977 3.89003 3.8903 3.89056 3.89082 3.89109 3.89135 3.89161 3.89187 3.89213 3.89239 3.89265 3.89291 3.89317 3.89343 3.89369 3.89395 3.89421 3.89447 3.89473 3.89499 3.89524 3.8955 3.89576 3.89601 3.89627 3.89652 3.89678 3.89704 3.89729 3.89755 3.8978 3.89805 3.89831 3.89856 3.89881 3.89907 3.89932 3.89957 3.89982 3.90008 3.90033 3.90058 3.90083 3.90108 3.90133 3.90158 3.90183 3.90208 3.90233 3.90258 3.90283 3.90308 3.90333 3.90357 3.90382 3.90407 3.90432 3.90457 3.90481 3.90506 3.90531 3.90555 3.9058 3.90604 3.90629 3.90653 3.90678 3.90702 3.90727 3.90751 3.90776 3.908 3.90825 3.90849 3.90873 3.90898 3.90922 3.90946 3.9097 3.90995 3.91019 3.91043 3.91067 3.91091 3.91115 3.9114 3.91164 3.91188 3.91212 3.91236 3.9126 3.91284 3.91308 3.91332 3.91356 3.91379 3.91403 3.91427 3.91451 3.91475 3.91499 3.91522 3.91546 3.9157 3.91594 3.91617 3.91641 3.91665 3.91688 3.91712 3.91736 3.91759 3.91783 3.91806 3.9183 3.91854 3.91877 3.91901 3.91924 3.91948 3.91971 3.91994 3.92018 3.92041 3.92065 3.92088 3.92111 3.92135 3.92158 3.92181 3.92205 3.92228 3.92251 3.92274 3.92297 3.92321 3.92344 3.92367 3.9239 3.92413 3.92436 3.9246 3.92483 3.92506 3.92529 3.92552 3.92575 3.92598 3.92621 3.92644 3.92667 3.9269 3.92713 3.92736 3.92759 3.92781 3.92804 3.92827 3.9285 3.92873 3.92896 3.92919 3.92941 3.92964 3.92987 3.9301 3.93032 3.93055 3.93078 3.931 3.93123 3.93146 3.93169 3.93191 3.93214 3.93236 3.93259 3.93282 3.93304 3.93327 3.93349 3.93372 3.93394 3.93417 3.93439 3.93462 3.93484 3.93507 3.93529 3.93552 3.93574 3.93597 3.93619 3.93641 3.93664 3.93686 3.93708 3.93731 3.93753 3.93775 3.93798 3.9382 3.93842 3.93865 3.93887 3.93909 3.93931 3.93954 3.93976 3.93998 3.9402 3.94042 3.94065 3.94087 3.94109 3.94131 3.94153 3.94175 3.94197 3.94219 3.94242 3.94264 3.94286 3.94308 3.9433 3.94352 3.94374 3.94396 3.94418 3.9444 3.94462 3.94484 3.94506 3.94528 3.9455 3.94571 3.94593 3.94615 3.94637 3.94659 3.81566e-12 1.85694e-10 8.86402e-09 4.228e-07 1.98515e-05 0.000621896 0.00518016 0.0191841 0.0499593 0.109822 0.220558 0.413738 0.715097 1.12499 1.62495 2.19453 2.81759 3.48257 4.18111 4.90688 5.65537 6.42295 7.20676 8.00451 8.81439 9.63477 10.4644 11.3021 12.147 12.9982 13.8549 14.7166 15.5825 16.4523 17.3253 18.2012 19.0796 19.9601 20.8423 21.7259 22.6105 23.496 24.382 25.2682 26.1545 27.0404 27.9261 28.8104 29.694 30.5763 31.4572 32.3363 33.2135 34.0885 34.9611 35.831 36.6979 37.5617 38.422 39.2786 40.1312 40.9794 41.8231 42.6619 43.4955 44.3235 45.1456 45.9615 46.7707 47.573 48.3678 49.1549 49.9337 50.7037 51.4646 52.2158 52.9568 53.687 54.4058 55.1128 55.8071 56.4882 57.1554 57.808 58.4451 59.0661 59.6701 60.2562 60.8237 61.3715 61.8989 62.4049 62.8889 63.3501 63.7879 64.2017 64.5913 64.9564 65.2971 65.6134 65.9059 66.1751 66.4219 66.6472 66.8522 67.0382 67.2064 67.3584 67.4955 67.619 67.7303 67.8307 67.9214 68.0033 68.0775 68.1448 68.2061 68.2619 68.313 68.3599 68.403 68.4428 68.4796 68.5137 68.5455 68.5751 68.6027 68.6287 68.6531 68.6761 68.6978 68.7184 68.7379 68.7565 68.7742 68.7912 68.8074 68.8231 68.8382 68.8527 68.8668 68.8805 68.8939 68.9069 68.9196 68.9321 68.9443 68.9564 68.9682 68.9799 68.9915 69.0029 69.0142 69.0254 69.0364 69.0473 69.0582 69.0689 69.0795 69.0899 69.1003 69.1106 69.1208 69.1308 69.1408 69.1507 69.1604 69.1701 69.1797 69.1892 69.1985 69.2078 69.217 69.2261 69.235 69.2439 69.2526 69.2612 69.2697 69.278 69.2862 69.2942 69.3021 69.3098 69.3173 69.3246 69.3317 69.3387 69.3454 69.352 69.3584 69.3646 69.3706 69.3764 69.3821 69.3876 69.393 69.3982 69.4033 69.4082 69.4131 69.4178 69.4224 69.4268 69.4312 69.4355 69.4397 69.4438 69.4478 69.4518 69.4556 69.4594 69.4632 69.4669 69.4705 69.474 69.4775 69.481 69.4844 69.4877 69.491 69.4943 69.4975 69.5007 69.5038 69.5069 69.51 69.513 69.516 69.519 69.5219 69.5249 69.5277 69.5306 69.5334 69.5363 69.5391 69.5418 69.5446 69.5473 69.55 69.5527 69.5554 69.558 69.5607 69.5633 69.5659 69.5685 69.571 69.5736 69.5761 69.5787 69.5812 69.5837 69.5862 69.5887 69.5911 69.5936 69.5961 69.5985 69.6009 69.6033 69.6058 69.6082 69.6106 69.6129 69.6153 69.6177 69.62 69.6224 69.6247 69.6271 69.6294 69.6317 69.6341 69.6364 69.6387 69.641 69.6433 69.6456 69.6479 69.6501 69.6524 69.6547 69.657 69.6592 69.6615 69.6637 69.666 69.6682 69.6705 69.6727 69.675 69.6772 69.6794 69.6816 69.6839 69.6861 69.6883 69.6905 69.6927 69.6949 69.6971 69.6993 69.7015 69.7037 69.7059 69.7081 69.7103 69.7125 69.7147 69.7169 69.7191 69.7213 69.7235 69.7256 69.7278 69.73 69.7322 69.7344 69.7365 69.7387 69.7409 69.7431 69.7452 69.7474 69.7496 69.7517 69.7539 69.7561 69.7582 69.7604 69.7626 69.7647 69.7669 69.7691 69.7712 69.7734 69.7755 69.7777 69.7799 69.782 69.7842 69.7863 69.7885 69.7907 69.7928 69.795 69.7971 69.7993 69.8015 69.8036 69.8058 69.8079 69.8101 69.8123 69.8144 69.8166 69.8187 69.8209 69.8231 69.8252 69.8274 69.8295 69.8317 69.8339 69.836 69.8382 69.8404 69.8425 69.8447 69.8468 69.849 69.8512 69.8533 69.8555 69.8577 69.8598 69.862 69.8642 69.8663 69.8685 69.8707 69.8729 69.875 69.8772 69.8794 69.8815 69.8837 69.8859 69.8881 69.8902 69.8924 69.8946 69.8968 69.8989 69.9011 69.9033 69.9055 69.9077 69.9098 69.912 69.9142 69.9164 69.9186 69.9208 69.923 69.9251 69.9273 69.9295 69.9317 69.9339 69.9361 69.9383 69.9405 69.9427 69.9449 69.9471 69.9493 69.9515 69.9537 69.9559 69.9581 69.9603 69.9625 69.9647 69.9669 69.9691 69.9713 69.9735 69.9757 69.9779 69.9801 69.9823 69.9846 69.9868 69.989 69.9912 69.9934 69.9956 69.9979 70.0001 70.0023 70.0045 70.0067 70.009 70.0112 70.0134 70.0157 70.0179 70.0201 70.0223 70.0246 70.0268 70.029 70.0313 70.0335 70.0358 70.038 70.0402 70.0425 70.0447 70.047 70.0492 70.0514 70.0537 70.0559 70.0582 70.0604 70.0627 70.0649 70.0672 70.0695 70.0717 70.074 70.0762 70.0785 70.0807 70.083 70.0853 70.0875 70.0898 70.0921 70.0943 70.0966 70.0989 70.1011 70.1034 70.1057 70.108 70.1102 70.1125 70.1148 70.1171 70.1194 70.1216 70.1239 70.1262 70.1285 70.1308 3.82e-12 1.8569e-10 8.86402e-09 4.22801e-07 1.98517e-05 0.000622086 0.00518718 0.0192473 0.05029 0.111194 0.225594 0.429696 0.755499 1.20584 1.76011 2.39458 3.09058 3.83471 4.61738 5.43147 6.27191 7.13464 8.01661 8.91528 9.8287 10.7552 11.6934 12.642 13.6002 14.567 15.5418 16.5238 17.5125 18.5074 19.508 20.5139 21.5247 22.5401 23.5599 24.5837 25.6113 26.6423 27.6767 28.7142 29.7546 30.7978 31.8435 32.8918 33.9425 34.9953 36.0503 37.1072 38.166 39.2266 40.2888 41.3527 42.4181 43.4849 44.553 45.6223 46.6929 47.7645 48.8372 49.9108 50.9854 52.0608 53.1369 54.2138 55.2914 56.3696 57.4483 58.5275 59.6071 60.6871 61.7674 62.848 63.9288 65.0097 66.0908 67.1719 68.2531 69.3341 70.4152 71.496 72.5767 73.6571 74.7372 75.817 76.8964 77.9753 79.0538 80.1317 81.209 82.2856 83.3615 84.4366 85.5109 86.5843 87.6568 88.7283 89.7988 90.8681 91.9363 93.0033 94.0689 95.1333 96.1962 97.2577 98.3176 99.376 100.433 101.488 102.541 103.592 104.641 105.688 106.733 107.776 108.817 109.855 110.891 111.924 112.954 113.982 115.007 116.029 117.048 118.064 119.076 120.085 121.091 122.092 123.09 124.084 125.074 126.06 127.041 128.017 128.989 129.956 130.917 131.873 132.824 133.768 134.707 135.64 136.565 137.485 138.397 139.301 140.198 141.088 141.968 142.841 143.704 144.558 145.403 146.237 147.061 147.874 148.676 149.466 150.244 151.009 151.761 152.5 153.224 153.933 154.628 155.307 155.969 156.615 157.243 157.854 158.447 159.021 159.576 160.111 160.627 161.123 161.599 162.054 162.489 162.904 163.298 163.673 164.028 164.363 164.679 164.977 165.257 165.52 165.766 165.996 166.212 166.413 166.601 166.776 166.94 167.092 167.235 167.368 167.493 167.61 167.719 167.822 167.918 168.009 168.094 168.175 168.251 168.323 168.391 168.456 168.518 168.576 168.633 168.686 168.738 168.787 168.835 168.88 168.925 168.967 169.009 169.049 169.088 169.127 169.164 169.201 169.237 169.272 169.307 169.341 169.375 169.409 169.442 169.475 169.508 169.541 169.574 169.606 169.639 169.672 169.704 169.737 169.77 169.803 169.836 169.869 169.902 169.935 169.969 170.002 170.035 170.069 170.102 170.135 170.167 170.2 170.232 170.264 170.295 170.326 170.356 170.386 170.416 170.445 170.473 170.502 170.529 170.556 170.583 170.61 170.636 170.662 170.687 170.712 170.737 170.761 170.785 170.809 170.832 170.855 170.878 170.901 170.923 170.945 170.966 170.987 171.008 171.029 171.049 171.069 171.089 171.108 171.127 171.146 171.164 171.182 171.2 171.217 171.234 171.251 171.267 171.283 171.299 171.314 171.329 171.343 171.358 171.371 171.385 171.398 171.411 171.423 171.435 171.446 171.457 171.468 171.479 171.489 171.498 171.508 171.517 171.526 171.534 171.542 171.55 171.558 171.566 171.573 171.58 171.587 171.594 171.6 171.606 171.613 171.619 171.625 171.63 171.636 171.642 171.647 171.652 171.658 171.663 171.668 171.673 171.678 171.683 171.687 171.692 171.697 171.701 171.706 171.71 171.714 171.719 171.723 171.727 171.732 171.736 171.74 171.744 171.748 171.752 171.756 171.76 171.764 171.768 171.772 171.776 171.78 171.784 171.787 171.791 171.795 171.799 171.803 171.807 171.81 171.814 171.818 171.822 171.825 171.829 171.833 171.836 171.84 171.844 171.848 171.851 171.855 171.859 171.862 171.866 171.87 171.873 171.877 171.88 171.884 171.888 171.891 171.895 171.899 171.902 171.906 171.91 171.913 171.917 171.92 171.924 171.928 171.931 171.935 171.938 171.942 171.946 171.949 171.953 171.956 171.96 171.964 171.967 171.971 171.974 171.978 171.982 171.985 171.989 171.992 171.996 172 172.003 172.007 172.01 172.014 172.018 172.021 172.025 172.029 172.032 172.036 172.039 172.043 172.047 172.05 172.054 172.057 172.061 172.065 172.068 172.072 172.075 172.079 172.083 172.086 172.09 172.094 172.097 172.101 172.104 172.108 172.112 172.115 172.119 172.123 172.126 172.13 172.133 172.137 172.141 172.144 172.148 172.152 172.155 172.159 172.163 172.166 172.17 172.174 172.177 172.181 172.185 172.188 172.192 172.195 172.199 172.203 172.206 172.21 172.214 172.217 172.221 172.225 172.228 172.232 172.236 172.239 DataSetFinish DataSetStart DataSetName, ICVG_Vc14v MeasurementType, DC BatchName, opt_ex10 WaferName, 1 DieName, 01 DeviceName, igbt Temperature, 27 FabDate, 18 Jun 2010 UserDate, 18 Jun 2010 Attribute, L, 2.9e-06 Attribute, M, 100000 Attribute, W, 5e-06 NodeNames, collector gate emitter Sweep, 1, V, gate, LIST, 31, 0 List, 1 0.1 0.5 1 1.5 2 2.5 3 3.5 4 4.5 5 5.5 6 6.5 7 7.5 8 8.5 9 9.5 10 10.5 11 11.5 12 12.5 13 13.5 14 14.5 15 Constant, V, collector, 14.1, 0.1, 0 Constant, V, emitter, 0, 0.1, 0 Target, I, collector Function, gm, derivative (Vgate, Icollector) Plot, gm, XY (LIN LIN), Vgate, gm Plot, icvg, XY (LIN LIN), Vgate, Icollector DataArray, Icollector 1.74114e-08 1.74269e-08 1.73924e-08 1.73871e-08 2.61335e-08 5.29165e-07 3.92805e-05 0.0040835 0.207656 1.42364 3.85434 7.35507 11.7886 17.0287 22.9662 29.5088 36.575 44.0927 52.0104 60.2812 68.853 77.6615 86.6034 95.4746 103.85 111.099 116.871 121.328 124.817 127.631 129.956 DataSetFinish DataSetStart DataSetName, ICVG_Vc40v MeasurementType, DC BatchName, opt_ex10 WaferName, 1 DieName, 01 DeviceName, igbt Temperature, 27 FabDate, 18 Jun 2010 UserDate, 18 Jun 2010 Attribute, L, 2.9e-06 Attribute, M, 100000 Attribute, W, 5e-06 NodeNames, collector gate emitter Sweep, 1, V, gate, LIST, 31, 0 List, 1 0.1 0.5 1 1.5 2 2.5 3 3.5 4 4.5 5 5.5 6 6.5 7 7.5 8 8.5 9 9.5 10 10.5 11 11.5 12 12.5 13 13.5 14 14.5 15 Constant, V, collector, 40.1, 0.1, 0 Constant, V, emitter, 0, 0.1, 0 Target, I, collector Function, gm, derivative (Vgate, Icollector) Plot, gm, XY (LIN LIN), Vgate, gm Plot, icvg, XY (LIN LIN), Vgate, Icollector DataArray, Icollector 3.31912e-08 3.3008e-08 3.28443e-08 3.29897e-08 4.26788e-08 5.77386e-07 4.17487e-05 0.00424312 0.211749 1.45229 3.92413 7.47534 11.9656 17.2664 23.2676 29.8784 37.0242 44.6451 52.6923 61.125 69.9078 79.0114 88.4126 98.0909 108.024 118.19 128.567 139.138 149.888 160.805 171.88 DataSetFinish
Graphics
