Estimation of Interface Property Changes Between Normally On/Off Hydrogenated Diamond MISFETs
Introduction
Diamond is considered to be the ultimate semiconductor material for high power and high frequency devices due to its superior electrical and thermal properties, such as high breakdown field, high carrier mobility, low dielectric constant, and high thermal conductivity, as shown in Table 1.
Furthermore, diamond has some unique electronic properties. The surface of diamond films terminated by hydrogen atoms has negative electron affinity (NEA) and can generate a two-dimensional hole accumulation layer suitable as a hole channel of a field-effect transistor.