MEMS

The full text for most of these papers may be found at the IEEE website at www.ieee.org.

Yonghyun Shim, Member, IEEE, Jean-Pierre Raskin, Member, IEEE, César Roda Neve, Member, IEEE, and Mina Rais-Zadeh, Senior Member, IEEE
“RF MEMS Passives on High-Resistivity Silicon Substrates”
IEEE MICROWAVE AND WIRELESS COMPONENTS LETTERS, VOL. 23, NO. 12, DECEMBER 2013

A. Baharin, M. R. Hashim,
“Study of electrical characteristics of Ge islands MSM photodetector structure grown on Si substrate using conventional methods”
Semiconductor Science and Technology, Vol. 22, No. 8, Aug. 2007, pp. 905-910.

T. Schmidt, K. Hahna, T. Binderc, J. Poppb, A. Wagener, R. Brück,
“Optimization of MEMS fabrication process design by virtual experiments”
Proceedings of SPIE&The International Society for Optical Engineering Vol. 5-8 Dec. 20, 2006

Yong Qing Fu¹, Jack Luo¹, Stuart Milne¹, Andrew Flewitt¹, Ahmed Nejim²
“Process Flow Simulation and Manufacture of Variable RF MEMS Capacitors “,
¹Engineering Department, University of Cambridge, Cambridge UK
²Silvaco, St Ives, Cambridgeshire PE27 5JL, UK

T. Bourouina, T. Masuzawa, H. Fujita,
“The MEMSNAS process: Microloading effect for micromachining 3-D structures of nearly all shapes”
Journal of Microelectromechanical Systems, Vol. 13, Issue 2, April 2004, pp. 190-199.