Syntax Driven 2D Structure Export from 3D Structures and Extraction of 2D Volume Data Maps

Introduction

This article demonstrates a new feature of TonyPlot3D. This feature enables the automated, syntax driven export of 2D structure slices from 3D structures. Also demonstrated in this article is the subsequent extraction of 2D volume data maps with regular spacing using a combination of EXTRACT commands, system commands and loops.

EXTRACT is a powerful extraction language built into DeckBuild that allows the measurement of physical and electrical properties in a simulated device. The result of this could be a single value, such as a thickness, or a two-dimensional curve, such as concentration versus depth for process or gate voltage versus drain current for device. There are a number of significant features of the EXTRACT statement such as mathematical manipulation of extracted data, customized expressions, standard routines as well as variable substitution.